KR20000026892A - Management system for gas feeding state - Google Patents

Abstract

PURPOSE: A management system for a gas feeding state is provided to transmit a large amount of data by connecting a programmable logic controller(PLC) with supplementary facilities such as a multi-leak detector and the like in a serial communication line method. CONSTITUTION: A master PLC is connected with a touch panel(16) through a local network(N2) and the touch panel has a local PLC(14) for managing the gas leak state and a button for controlling. The local PLC is connected with a multi-leak detector(18) through a single line to transmit serial signals. The multi-leak detector detects the leakage gas in the relevant position through a teflon tube(22) connected to sixteen sensing points(24) respectively. The leak detector(18) is sequentially constituted of a valve(26) for controlling the introduction of the leakage gas detected from the teflon tube, an analyzer(28) and a recorder(30).

Description

Gas supply condition management system

The present invention relates to a gas supply management system, and more particularly, a multi-leak detector and a programmable logic controller for detecting leaks of a plurality of sensing points in order to monitor a leak state of a gas supplying facility for the progress of a semiconductor process. Programmable Logic Controller (hereinafter referred to as 'PLC') relates to a gas supply management system that checks gas leakage by connecting one serial signal line.

In general, various kinds of process equipment for manufacturing a semiconductor device are arranged and operated in a predetermined layout in a semiconductor manufacturing factory, and auxiliary equipment for supplying chemical, pure water, or various gases required for the process is installed and operated.

With the recent development of communication technology, a bidirectional transmission system of data via Ethernet between process facilities has been introduced into a semiconductor manufacturing plant to monitor the status and process information of each process facility and its auxiliary facilities. A local network is established to control and monitor unit processes. In addition, a PLC, which is a standard controller, is configured for controlling Ethernet or local network.

However, in the related art, a hard cable is used for data transmission between an auxiliary equipment such as a facility for checking gas leakage and a PLC connected to a local network, and data transmission amount is limited because data is transmitted through such hard cable.

In particular, if there are many leak sensing points or facilities for leak sensing, a multi-port is configured. In this case, a lot of manpower is required for the installation of several hard cables, and a lot of construction costs are required. The same auxiliary equipment is required. In addition, resetting the hard cable once installed requires a lot of manpower and money.

In addition, since the hard cable is affected by a lot of noise, it is necessary to check the input / output signal for the multi-port accordingly, and there is a problem that a data error occurs frequently.

An object of the present invention is to transmit a large amount of data by connecting a serial communication line between an auxiliary device such as a multi-leak detector disposed in a semiconductor factory and a programmable logic controller.

In addition, another object of the present invention is to implement a signal transmission between an auxiliary device such as a multi-leak detector and a programmable logic controller at a simple construction and low cost.

Another object of the present invention is to transmit data without data error to a programmable logic controller in an auxiliary facility such as a multi-leak detector.

Other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

1 is a block diagram showing a preferred embodiment of a gas supply state management system according to the present invention.

Fig. 2 is a detailed block diagram of the multi-leak detector and the local PLC of the embodiment.

3 is a flowchart showing the operation of the embodiment.

In the gas supply management system according to the present invention, an Ethernet network for monitoring is configured, and a local network detecting a gas leak state is configured in a master programmable logic controller connected to the Ethernet network, and is supplied to the gas supply facility. A multi-leak detector and a multi-leak detector for sensing a leak state of gas for each of a plurality of sensing points connected to a multi-port, and sequentially transmitting data for each sensing point according to a predetermined period through a single serial signal line. A local programmable logic controller connected to the serial signal line to receive data including state data and sensing data, and connected to the master programmable logic controller via the local network to transmit information necessary for monitoring; The roller is configured.

The multi-leak detector is a Teflon tube connected one-to-one to the multi-port from the sensing points, a valve for determining the inflow state of the leak gas through the Teflon tube, and an analyzer for analyzing the leak gas when the valve is opened. And a recorder for recording the analyzed result, wherein the analyzer and the recorder are individually configured for the Teflon tube, and data of each recorder is transmitted through the serial signal line.

The local programmable logic controller may be configured to receive good data by determining the match of data transmitted from the multi-leak detector, and to perform an alarm operation when the match of data is poor.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 1, the monitoring system 10 and the master PLC 12 are connected to an Ethernet-net network N1 of the TCP-IP method, and the monitoring system 10 is transmitted from the master PLC 12. The master PLC 12 controls the respective devices connected to the local network N2.

In this embodiment, the master PLC 12 is connected to the local PLC 14 for managing the gas leak state and the touch panel 16 on which a button for operation is formed through the local network N2.

The local PLC 14 collects data on the leak status of the gas supply facility monitored by the multi-leak detector 18. For this purpose, the multi-leak detector 18 and the local PLC 14 transmit a serial signal. Are connected by a single line.

The above-described multi-leak detector 18 detects the leakage gas at the corresponding position through the Teflon tube 22 connected to each sensing point 24, that is, # 1 to # 16, as shown in FIG. 2, and the leak detector 18 Internally, a valve 26, an analyzer 28, and a recorder 30 for controlling the inflow of leaked gas detected from the Teflon tube 22 connected to each sensing point 24 are sequentially configured. That is, the valve 26, the analyzer 28, and the recorder 30 are configured for each Teflon tube 22 connected to each sensing point 24.

The output signals of the recorders 30 configured as described above are transmitted to the local PLC 14 through serial signal lines in a predetermined order, and analog and digital sequentially output from each recorder 30 as serial signal lines. A signal in which a signal of a form is combined is transmitted.

The above-described operation for data transmission through the serial signal line between the local PLC 14 and the multi-leak detector 18 will be described with reference to FIG.

First, when the power of the local PLC 14 and the multi-leak detector 18 is turned on (S2), the local PLC 14 checks the status of the system. That is, the local PLC 14 and the multi-leak detector 18 are checked whether they are in a normal operating state (S4), and if they are good (S6), if any one of them is abnormal, it is restarted (S8).

If the state of the system is determined to be normal (S6), the multi-leak detector 18 starts to transmit data to the local PLC (14) (S10). At this time, the order in which data is transmitted is sequentially cycled from # 1 to # 16 of the sensing point 24.

As described above, the signal transmitted from the multi-leak detector 18 is received at the local PLC 14 (S12), and it is determined whether or not the matching of the data included in the received signal is good (S14).

The determination of data consistency is, for example, determining whether the data for the year, month, day, and time set in the local PLC 14 and the data for the year, month, day, and time set in the multi-leak detector 18 match. If it is determined that data matching is not good, the data mismatch condition is notified to the multi-leak detector 18 (S16), and the local PLC 14 requests the multi-let detector 18 to retransmit the data. If the retransmission of the data is not good, the alarm (S22) is generated and receives the data received from the other sensing point (S12).

If it is determined that the data is well matched (S14), the local PLC 14 transmits the data of the data abnormality-free state, that is, the data on the state in which no error has occurred, to the multi-leak detector 18, and the local PLC 14 ) Requests the transmission of the next data (S28).

Then, the multi-leak detector 18 transmits data on the system state (S30), and the local PLC 14 determines the data transmission cycle after confirming the consistency of the data as the transmitted data.

The transmission of data is transmitted via the serial signal line as described above. Serial signal lines are usually capable of transmitting 9600bps (9600 Bit per second) or 1200 bytes of data.

The multi-leak detector 18 records electrical low / high data in the recorder 30 to determine whether there is a leak as a result of inflow gas analysis of the internal analyzer 28, and for this purpose, two bytes of transmission data are recorded. Is generated. The total amount of data generated at once from # 1 to # 16 is 32 bytes.

As described above, even if the serial signal line is installed as a data transmission line as a single line, since the amount of data transmission is much smaller than the capacity of the serial signal line in the embodiment, the present embodiment requires a large amount of data transmission. Even if the function is extended or additional connection of one serial signal line is made, it can be fully operated.

In addition, since the data transmission period is adjusted, the capacity can be changed, and additional connection using one serial signal line may be considered.

Therefore, the embodiment according to the present invention can exchange a large amount of data such as situation data and facility information between the multi-leak detector and the local PLC even when using one serial signal line.

In addition, since a new setting or an additional setting operation of the system for configuring the above-described embodiment is performed using one serial signal line, manpower and cost required for installation and maintenance are reduced.

In addition, since data is transmitted while determining data integrity, an error of data transmission does not occur.

As described in detail above, the present invention has been described in detail with respect to preferred embodiments, but those skilled in the art to which the present invention pertains, various embodiments of the present invention without departing from the spirit and scope of the present invention It will be appreciated that the present invention may be modified or modified as described above.

Therefore, according to the present invention, data is transferred between an auxiliary device such as a multi-leak detector and a local PLC by using one serial line, so that installation and maintenance are easy, and a capacity that can be accommodated is secured even if a large amount of data is transmitted. And no data error occurs. Accordingly, the reliability of the system is increased.

Claims (4)

In the gas supply management system is configured an Ethernet network for monitoring, the local network configured to detect a gas leak state in the master programmable logic controller connected to the Ethernet network, The multi-leak senses the leak state of the gas supplied to the gas supply facility for each of a plurality of sensing points connected to the multi-port, and sequentially transmits the sensing result data for each sensing point at a predetermined period through one serial signal line. Detector and A local programmable logic controller connected to the multi-leak detector through the serial signal line to receive data including state data and sensing data, and connected to the master programmable logic controller through the local network to transmit information necessary for monitoring; Gas supply status management system, characterized in that provided. The method of claim 1, wherein the multi-leak detector, A teflon tube connected one-to-one to the multi-port from the sensing points; A valve for determining an inflow state of the leak gas through the Teflon tube; An analyzer for analyzing leak gas flowing in opening the valve; And a recorder for recording the analyzed result. The analyzer and recorder are configured separately for the Teflon tube, and data of each recorder is transmitted through the serial signal line. The logic controller of claim 1, wherein the local programmable logic controller comprises: And determine goodness of data transmitted from the multi-leak detector to receive good data. The logic controller of claim 1, wherein the local programmable logic controller comprises: And determine an integrity of data transmitted from the multi-leak detector, and perform an alarm operation when the data is inconsistent.