KR20000025459A - Operation method for storage elevator of loadlock chamber - Google Patents

Operation method for storage elevator of loadlock chamber Download PDF

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Publication number
KR20000025459A
KR20000025459A KR1019980042555A KR19980042555A KR20000025459A KR 20000025459 A KR20000025459 A KR 20000025459A KR 1019980042555 A KR1019980042555 A KR 1019980042555A KR 19980042555 A KR19980042555 A KR 19980042555A KR 20000025459 A KR20000025459 A KR 20000025459A
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South Korea
Prior art keywords
storage elevator
wafer
elevator
load lock
storage
Prior art date
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KR1019980042555A
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Korean (ko)
Inventor
정이하
Original Assignee
윤종용
삼성전자 주식회사
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Priority to KR1019980042555A priority Critical patent/KR20000025459A/en
Publication of KR20000025459A publication Critical patent/KR20000025459A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: An operation method for a storage elevator of load lock chamber is provided to prevent that a wafer is broken while conveying the wafer in a storage elevator of load lock chamber. CONSTITUTION: A wafer(104) is loaded on a storage elevator, and a wafer which is not accurately aligned on a slot is detected by using a sensor before vertically moving the storage elevator. The storage elevator is vertically moved when there is no wafer not accurately aligned on the slot, and a process is performed. Thereby, if wafer alignment is not accurately performed in the storage elevator(100), the sensor senses this, and a motor driving the storage elevator is stopped, so that the wafer is not broken in a vertical moving passage of a storage elevator.

Description

로드락 챔버의 스토리지 엘리베이터 운용방법How to operate the storage elevator in the load lock chamber

본 발명은 반도체 소자의 제조공정에 사용되는 장비에 관한 것으로, 더욱 상세하게는 건식식각(dry etching) 장비 및 화학기상증착(CVD: Chemical Mechanical Deposition) 장비에 있는 로드락 챔버(loadlock chamber)에 관한 것이다.The present invention relates to equipment used in the manufacturing process of semiconductor devices, and more particularly, to a load lock chamber (drylock) equipment and chemical mechanical deposition (CVD) equipment (loadlock chamber) will be.

반도체 소자를 제조하는 장비들 중에서 챔버를 포함하는 장비들이 있다. 이때 대부분의 캐리어(carrier)에 탑재된 웨이퍼는 상하방향인 수직으로 움직이고, 장비 내부에 구성된 로봇 암(Robot Arm)은 수평운동을 하여 캐리어에서 웨이퍼를 빼내고 가공이 끝난 웨이퍼를 다시 집어넣는다. 이러한 대표적인 설비가 박막 형성장비와 건식식각 장비에 들어가는 로드락 챔버(loadlock chamber)이다.Among the devices for manufacturing a semiconductor device is a device including a chamber. At this time, the wafers mounted on most carriers move vertically in the vertical direction, and the robot arm configured inside the equipment moves horizontally to remove the wafers from the carriers and reinsert the processed wafers. Such representative equipment is a loadlock chamber for thin film forming equipment and dry etching equipment.

도 1은 로드락 챔버를 설명하기 위해 도시한 평면도이다.1 is a plan view illustrating the load lock chamber.

상세히 설명하면, 로딩부(59)에 스토리지 엘리베이터(storage elevator, 63)로 통하여 들어온 웨이퍼(67)는 로봇암(55)의 회전판(65)을 통해 수평으로 이송되며 다시 챔버 게이트 밸브(69)를 통해 각각의 프로세스 챔버(51)에서 가공이 된다. 여기서 참조부호 53은 핸들링 챔버를 가리킨다. 일단 가공이 끝난 웨이퍼(67)는 다시 로봇암(55)의 회전판(65)을 통해 언로딩부(unloading portion, 61)의 스토리지 엘리베이터(63)으로 이동되는데 이때, 회전판이 상하 운동을 수행하지 못하고 수평운동만을 수행하기 때문에 스토리지 엘리베이터(63)가 상하운동을 수행하여 웨이퍼를 집어넣고 빼고 할 수 있는 구조로 구성된다. 도면에서 참조부호 57은 프론트 챔버(front chamber)를 가리키고, 71은 웨이퍼(67) 꽂히는 슬롯(slot)을 가리킨다.In detail, the wafer 67 entering the loading unit 59 through the storage elevator 63 is horizontally transferred through the rotating plate 65 of the robot arm 55 and again moves the chamber gate valve 69. Through each process chamber 51 is processed. Reference numeral 53 here refers to a handling chamber. Once processed, the wafer 67 is moved back to the storage elevator 63 of the unloading portion 61 through the rotating plate 65 of the robot arm 55. At this time, the rotating plate does not perform the vertical movement. Since only the horizontal movement is performed, the storage elevator 63 is configured to be able to insert and withdraw the wafer by performing the vertical movement. In the figure, reference numeral 57 denotes a front chamber and 71 denotes a slot into which the wafer 67 is inserted.

도 2는 종래기술에 의한 로드락 챔버에서의 스토리지 엘리베이터를 설명하기 위해 도시한 단면도이다.2 is a cross-sectional view illustrating a storage elevator in a load lock chamber according to the prior art.

도 2를 참조하면, 스토리지 엘리베이터(63)에는 복수개의 웨이퍼(67)가 탑재되어 상하운동(도면의 화살표방향)을 수행하는데 특정 웨이퍼(67')가 정렬이 제대로 되지 않고 움직일 겨우, 수직이동하는 통로에 웨이퍼가 걸려서 깨지고, 장비 내부가 실리콘으로 오염되는 문제가 많이 발생한다.Referring to FIG. 2, a plurality of wafers 67 are mounted in the storage elevator 63 to perform vertical movement (arrow direction in the drawing). Wafers are jammed in the passage and broken, and a lot of problems are contaminated with silicon inside the equipment.

본 발명이 이루고자 하는 기술적 과제는 로드락 챔버에서 스토리지 엘리베이터가 상하운동을 수행하는 동안에 탑재된 웨이퍼가 수직 이동 통로에 걸려서 깨지는 문제점을 방지할 수 있는 로드락 챔버의 스토리지 엘리베이터 운용방법을 제공하는데 있다.The technical problem to be achieved by the present invention is to provide a storage elevator operating method of the load lock chamber that can prevent the problem that the wafer mounted during the vertical movement of the storage elevator in the load lock chamber broken.

도 1은 로드락 챔버를 설명하기 위해 도시한 평면도이다.1 is a plan view illustrating the load lock chamber.

도 2는 종래기술에 의한 로드락 챔버에서의 스토리지 엘리베이터를 설명하기 위해 도시한 단면도이다.2 is a cross-sectional view illustrating a storage elevator in a load lock chamber according to the prior art.

도 3은 본 발명에 의한 로드락 챔버에서의 스토리지 엘리베이터를 설명하기 위해 도시한 단면도이다.3 is a cross-sectional view illustrating the storage elevator in the load lock chamber according to the present invention.

상기 기술적 과제를 달성하기 위하여 본 발명은, 스토리지 엘리베이터(storage elevator)에 웨이퍼를 로딩하는 하는 단계와, 상기 스토리지 엘리베이터를 상하로 이송하기 전에 센서를 이용하여 슬롯(slot)에 정확하게 정렬되지 않는 웨이퍼를 탐지하는 단계와, 상기 슬롯에 정확하게 정렬되지 웨이퍼가 없는 경우에만 상기 스토리지 엘리베이터를 상하로 이송하여 공정을 진행하는 단계를 구비하는 것을 특징으로 하는 로드락 챔버의 스토리지 엘리베이터 운용방법을 제공한다.In order to achieve the above technical problem, the present invention provides a method of loading a wafer into a storage elevator, and using a sensor before transferring the storage elevator up and down, a wafer that is not accurately aligned with a slot. It provides a storage elevator operating method of the load lock chamber, characterized in that it comprises the step of detecting, and the step of moving the storage elevator up and down only when there is no wafer not aligned correctly in the slot.

본 발명에 따르면, 웨이퍼가 스토리지 엘리베이터에서 움직여 정렬이 틀어진 경우에는 이를 센서(sensor)를 통하여 미리 감지하여 스토리지 엘리베이터를 구동하는 모터의 작동을 멈추게 함으로써 스토리지 엘리베이터가 수직으로 움직이는 통로에서 웨이퍼가 걸려 부러지는 문제를 방지할 수 있다.According to the present invention, when the wafer is moved in the storage elevator and the alignment is misaligned, the wafer is sensed in advance through a sensor to stop the operation of the motor driving the storage elevator. Problems can be prevented.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 3은 본 발명에 의한 로드락 챔버에서의 스토리지 엘리베이터를 설명하기 위해 도시한 단면도이다.3 is a cross-sectional view illustrating the storage elevator in the load lock chamber according to the present invention.

도 3을 참조하면, 본 발명에 의한 로드락 챔버의 스토리지 엘리베이터 운용방법은 먼저 웨이퍼(104)가 스토리지 엘리베이터(100)에 들어오면, 웨이퍼(104)의 올바른 정렬여부를 광센서(106), 예컨대 레이저 센서(LASER sensor)나 포토센서(photo sensor)등을 이용하여 확인한다. 만약 잘못 정렬된 웨이퍼(104')가 스토리지 엘리베이터(100) 내에 있는 경우엔 광센서(106)에 의해 조사(irradiation)되는 광(光)의 방향을 가로막기 때문에 쉽게 탑지가 가능하며 이경우엔 스토리지 엘리베이터를 움직이는 모터(motor, 미도시)의 작동을 중지시키고 경보(alarm)을 외부로 울리도록 한다. 이어서, 광센서(106)에 의해 웨이퍼(104)의 정렬 여부가 적절한지 확인이 완료되면 스토리지 엘리베이터(100)는 상하운동을 수행하여 웨이퍼(104)을 외부의 로봇암(robot arm)에 의해 꺼내거나 집어넣도록 된다. 이러한 광센서(106)을 설치하지 않은 상태에서는 월 평균 잘못된 스토리지 엘리베이터의 운용으로 깨지는 웨이퍼의 매수가 약 41매 였지만, 본 발명에 의한 광센서를 설치하고 스토리지 엘리베이터를 운용한 결과, 이러한 사고가 월 1건도 발생되지 않았다.Referring to FIG. 3, in the method of operating a storage elevator of a load lock chamber according to the present invention, first, when the wafer 104 enters the storage elevator 100, an optical sensor 106 may be used to determine whether the wafer 104 is properly aligned. Check using a laser sensor or photo sensor. If the misaligned wafer 104 'is in the storage elevator 100, it can be easily mounted because it blocks the direction of light irradiated by the optical sensor 106, in this case, the storage elevator. Stop the operation of the moving motor (motor, not shown) and let the alarm (alarm) ring outside. Subsequently, when checking whether the wafer 104 is properly aligned by the optical sensor 106 is completed, the storage elevator 100 performs vertical movement to take out the wafer 104 by an external robot arm. Or put it in. In the state in which the optical sensor 106 was not installed, the number of wafers broken by the operation of the wrong storage elevator was about 41 sheets. However, when the optical sensor of the present invention was installed and the storage elevator was operated, the accident One case did not occur.

본 발명은 상기한 실시예에 한정되지 않으며, 본 발명이 속한 기술적 사상 내에서 당 분야의 통상의 지식을 가진 자에 의해 많은 변형이 가능함이 명백하다.The present invention is not limited to the above embodiments, and it is apparent that many modifications can be made by those skilled in the art within the technical spirit to which the present invention belongs.

따라서, 상술한 본 발명에 따르면, 웨이퍼가 스토리지 엘리베이터에서 움직여 정렬이 틀어진 경우에는 이를 센서(sensor)를 통하여 미리 감지하여 스토리지 엘리베이터를 구동하는 모터의 작동을 멈추게 함으로써 스토리지 엘리베이터가 수직으로 움직이는 통로에서 웨이퍼가 걸려 부러지는 문제를 방지할 수 있다.Therefore, according to the present invention described above, when the wafer is moved in the storage elevator is misaligned, it is detected in advance through a sensor (sensor) to stop the operation of the motor driving the storage elevator to stop the wafer in the vertically moving passage It can prevent the problem of getting caught.

Claims (1)

스토리지 엘리베이터(storage elevator)에 웨이퍼를 로딩하는 하는 단계;Loading the wafer into a storage elevator; 상기 스토리지 엘리베이터를 상하로 이송하기 전에 센서를 이용하여 슬롯(slot)에 정확하게 정렬되지 않는 웨이퍼를 탐지하는 단계;Detecting a wafer that is not aligned correctly with a slot using a sensor before transporting the storage elevator up and down; 상기 슬롯에 정확하게 정렬되지 웨이퍼가 없는 경우에만 상기 스토리지 엘리베이터를 상하로 이송하여 공정을 진행하는 단계를 구비하는 것을 특징으로 하는 로드락 챔버의 스토리지 엘리베이터 운용방법.And transferring the storage elevator up and down only when there are no wafers not aligned correctly in the slots.
KR1019980042555A 1998-10-12 1998-10-12 Operation method for storage elevator of loadlock chamber KR20000025459A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100725095B1 (en) * 2001-08-01 2007-06-04 삼성전자주식회사 Wafer detector of cleaning equipment for manufacturing semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100725095B1 (en) * 2001-08-01 2007-06-04 삼성전자주식회사 Wafer detector of cleaning equipment for manufacturing semiconductor

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