KR20000019934A - Monitoring system of clean room - Google Patents

Abstract

PURPOSE: A monitoring system is made so that a scale of system hardware is increased only in quantity but a cable for installing a number of sensors is not increased when applying a number of sensors in the system by minimizing wire. CONSTITUTION: A monitoring system is applied using the fact that sensing signals of all kinds of sensors(S01-S0n,S11-S1n) can be supplied to a main controller(3) through a data buffer(4a,4b) only by connecting the sensors watching a process state of a facility with wire. The system can use the space of the facility effectively by removing wire connecting the sensors with the data buffer, by adding a function receiving a wireless data to the data buffer and transmitting the sensing signals of the sensors wirelessly by connecting a wireless data transmission unit(5,6) to the sensors which transmits the sensing signals of the sensors wirelessly after converting into wireless signals.

Description

Clean Room Monitoring System

The present invention relates to a monitoring system of a clean room, and more particularly, to a monitoring system (cleaning system of the cleam room) to enable the wireless sensor to monitor the detection signal of the sensor for detecting the process status of various equipment to monitor It is about.

High clean room is an essential process environment in the line producing high integration devices such as semiconductor, TFT, LCD, etc., and the role of high clean room is directly related to the yield of products. Various systems are applied for operation and maintenance.

For example, a series of data buffers are installed at the lower stage centering on the main controller, and a sensor or a counter for measuring the required items, areas, and utilities is installed at the terminal, and all of them are connected using a signal cable or a LAN. It is commonly used to operate data to jitter data.

In other words, conventionally, as shown in FIG. 1, various sensors are installed in the data buffer 105 to detect a process state by being installed in a facility (high clean room), and the data buffer 106 is installed outside the facility to detect a process state. Various sensors are connected, and the data buffers 105 and 106 are connected to the main controller 104 to transmit detection signals of the various sensors to the main controller 104.

The main controller 104 provides the detection signals of various sensors to the databases 101 and 102 and the user 103 so that everyone, including the user, can know the process status of the facility.

However, in the case of employing a large amount of sensors, the structure of the system is simple, but the sub-components must be wired, so the complexity of the sub-components in managing the system causes considerable human and time loss, and the hypothesis of the wire is difficult. In the case of limited or limited space, there is a problem that it is impossible to accurately monitor the required part, so it is difficult to efficiently build and maintain the system by slimming the system.

Of course, the software that operates the system has various functions to optimize them, but there are limitations.

In particular, in the case of high clean room, it is necessary to monitor the situation in which the artificial influence is excluded due to structural type change such as facility, insulation and SMIF.

The object of the present invention proposed to eliminate the drawbacks described above is that even when a large number of sensors are applied to the system by minimizing the wires, the scale of the hardware system changes only with a quantitative increase. It is to provide a monitoring system of a clean room so that the cable for installation does not increase.

1 is a configuration diagram showing a monitoring system of a conventional clean room.

2 is a block diagram showing a monitoring system of a clean room according to the present invention.

※ Explanation of codes for main parts of drawing

1a, 1b Database 2: User

3: main controller 4a, 4b: data buffer

5,6: Wireless data transmission unit S01-S0n, S11-S1n: Sensor

Monitoring system of the clean room of the present invention for achieving the above object is a process state of the clean room receiving the first, the second data buffer for receiving the detection signals of the various sensors, and the detection signal of the first, second data buffer In the clean room monitoring system having a main controller for providing a database and the corresponding data to the user and the corresponding data, the first and second data buffers are provided with radio signals from the first and second wireless data transmitting units. A first wireless data sending unit which is provided with a receiving function capable of receiving and connected to various sensors for detecting a process state in a facility, converts a detection signal of various sensors into a wireless signal, and transmits it wirelessly, and detects a process state outside the facility. A second wireless data transmission unit connected to various sensors for converting the detection signals of the various sensors into wireless signals for wireless transmission Characterized in that consists of.

Hereinafter, with reference to the accompanying drawings, a specific embodiment of the present invention will be described in more detail.

Referring to Fig. 2, a plurality of sensors S01-S0n for detecting a process state in a facility (clean room) are connected to the wireless data sending unit 5, and this wireless data sending unit 5 is connected to this sensor (S01-). A plurality of sensors (S11-S1n) configured to convert the detected signals of the SOs into wireless signals and transmit them wirelessly, and are connected to the wireless data sending unit 6, which are connected to the wireless data sending unit 6 to detect a process state outside the facility. (6) is configured to convert the detected signals of the sensors S11-S1n into radio signals and to transmit them wirelessly.

The data buffers 4a and 4b, which provide the main controller 3 with the process status of the equipment, are provided with a radio reception function capable of receiving radio signals wirelessly transmitted from the radio data transmission units 5 and 6, The main controller 3 is connected to the databases 1a and 1b and the user 2 as in the prior art.

The operation of the present invention configured as described above is as follows.

The detection signal sensed by the various sensors S01-S0n installed in the facility is converted into a wireless signal by the wireless data transmitting unit 5 and wirelessly sent to the data buffer 4a. Then, the data buffer 4a receives the radio signal and provides it to the main controller 3.

Then, the detection signal detected by the various sensors (S11-S1n) installed outside the facility is converted into a wireless signal by the wireless data transmission unit 6 and wirelessly sent to the data buffer 4b. Then, the data buffer 4b receives the radio signal and provides it to the main controller 3.

Accordingly, the main controller 3 checks the process status of the facility, that is, the high clean room, and provides data corresponding thereto to the databases 1a, 1b and the user 2 so that the state of the high clean room can be checked at any time. do.

Therefore, according to the present invention, it is possible not only to efficiently use the space of various facilities by wirelessly connecting various sensors for detecting the process status of various equipments and data buffers for transmitting the detection signals of the various sensors to the main controller. There is an effect that can reduce the number of personnel and the cost of installing various sensors.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (1)

The first and second data buffers for receiving detection signals of various sensors and the detection signals of the first and second data buffers are input to determine the process state of the clean room and provide corresponding data to the database and the user. In the monitoring system of a clean room having a main controller, The first and second data buffers are provided with a receiving function for receiving a radio signal transmitted from the first and second wireless data transmitting units; A first wireless data sending unit connected to various sensors for detecting a process state in a facility and converting the detection signals of the various sensors into wireless signals for wireless transmission; A second wireless data sending unit which is connected to various sensors for detecting a process state outside the facility and converts the detection signals of the various sensors into wireless signals to wirelessly transmit them; Clean room monitoring system, characterized in that consisting of.