KR20000001904A - Integral bubble ink jet printer head and manufacturing method thereof - Google Patents
Integral bubble ink jet printer head and manufacturing method thereof Download PDFInfo
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- KR20000001904A KR20000001904A KR1019980022381A KR19980022381A KR20000001904A KR 20000001904 A KR20000001904 A KR 20000001904A KR 1019980022381 A KR1019980022381 A KR 1019980022381A KR 19980022381 A KR19980022381 A KR 19980022381A KR 20000001904 A KR20000001904 A KR 20000001904A
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- Prior art keywords
- ink
- layer
- polyimide
- nozzle plate
- nozzle
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000004642 Polyimide Substances 0.000 claims abstract description 47
- 229920001721 polyimide Polymers 0.000 claims abstract description 47
- 238000005192 partition Methods 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 64
- 239000011241 protective layer Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 13
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 2
- 230000036211 photosensitivity Effects 0.000 abstract description 2
- 230000003993 interaction Effects 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 241000272201 Columbiformes Species 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 231100000957 no side effect Toxicity 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Abstract
Description
본 발명은 버블 잉크젯 프린터 헤드에 관한 것으로서, 상세하게는 잉크와 화학적 반응을 일으키지 않는 폴리이미드(polyimide) 노즐판을 가진 일체형 버블 잉크젯 프린터 헤드 및 그 제조 방법에 관한 것이다.The present invention relates to a bubble ink jet printer head, and more particularly, to an integrated bubble ink jet printer head having a polyimide nozzle plate which does not cause chemical reaction with ink, and a manufacturing method thereof.
도 1은 종래의 버블 잉크젯 프린터 헤드의 수직 단면도이다. 도시된 바와 같이, 종래의 버블 잉크젯 프린터 헤드에는 기본적으로 실리콘(Si) 기판(11) 위에 히트 레지스터(heat resistor)층(12), 잉크 챔버 및 잉크 유로를 형성하는 잉크 파티션층(14) 및 노즐(17)이 형성된 노즐판(16)이 구비되어 있다. 또한, 히트 레지스터층(12) 위에는 SiO2/SiC를 증착하여 이루어진 보호층(passivation layer)(13)이 구비되어 히드 레지스터(12)가 보호된다. 잉크 파티션(partition)층(14)은 고체형 폴리이미드로 형성되어 잉크의 공급 경로를 한정하게 된다. 즉, 잉크 챔버 및 잉크 유로 등을 형성하게 된다. 잉크 파티션층(14) 위에 형성된 노즐판(16)은 Ni로 형성되며, 그 표면은 Ni의 산화 및 잉크와 노즐판(16) 간의 상호 화학반응을 방지하기 위하여 Au도금층(15)이 코팅되어 있다.1 is a vertical sectional view of a conventional bubble ink jet printer head. As shown, conventional bubble ink jet printer heads basically have a heat resistor layer 12, an ink chamber and an ink flow path 14 and nozzles forming a heat resistor layer 12 on a silicon (Si) substrate 11. The nozzle plate 16 with which the 17 was formed is provided. In addition, a passivation layer 13 formed by depositing SiO 2 / SiC is provided on the heat register layer 12 to protect the heat resistor 12. The ink partition layer 14 is formed of solid polyimide to define the supply path of the ink. That is, an ink chamber and an ink flow path are formed. The nozzle plate 16 formed on the ink partition layer 14 is formed of Ni, and its surface is coated with Au plating layer 15 to prevent oxidation of Ni and mutual chemical reaction between the ink and the nozzle plate 16. .
이상과 같은 구조를 가진 종래의 버블 잉크젯 프린터 헤드의 제조 방법은, 크게 기판(11) 위에 히트 레지스터층(12)과 SiO2/SiC 보호층(13)을 증착시키는 박막 제조 공정과 상기 박막 위에 잉크 파티션층(14)과 노즐판(16)을 형성시키는 후막 제조 공정으로 구분된다. 여기서, 노즐판(16)은 별도로 제작된 후 잉크 파티션층(14) 위에 접착된다.The conventional method of manufacturing a bubble ink jet printer head having the above structure includes a thin film manufacturing process for depositing a heat register layer 12 and a SiO 2 / SiC protective layer 13 on a substrate 11 and an ink partition on the thin film. It is divided into the thick film manufacturing process which forms the layer 14 and the nozzle plate 16. FIG. Here, the nozzle plate 16 is separately manufactured and then adhered to the ink partition layer 14.
따라서, 종래의 버블 잉크젯 프린터 헤드는 박막 제조 공정과 후막 제조 공정 이라는 이원화된 공정에 의해 제조되므로 소자 제조에 많은 시간이 소요된다. 또한, 노즐판(16)을 잉크 파티션층(14) 위에 물리적으로 접착시키기 위한 별도의 고가 장비를 필요로 한다. 더우기, 노즐판(16)을 원하는 지점에 정확히 접착시키기가 어려워 고해상도의 버블 잉크젯 프린터 헤드 제작이 곤란한 단점이 있다.Therefore, since the conventional bubble ink jet printer head is manufactured by a dual process such as a thin film manufacturing process and a thick film manufacturing process, a lot of time is required for device manufacturing. In addition, separate expensive equipment for physically bonding the nozzle plate 16 onto the ink partition layer 14 is required. Moreover, it is difficult to accurately adhere the nozzle plate 16 to a desired point, which makes it difficult to fabricate a high resolution bubble ink jet printer head.
이러한 문제점을 개선하고자 제안된 발명이, 미국 특허 제4,438,191호에 개시되어 있다. 여기서는, 히트 레지스터층 및 SiO2/SiC 보호층과 같은 박막 위에 잉크 파티션층과 노즐 플레이트를 도금에 의해 직접 형성시키는 일체형 버블 잉크젯 프린터 헤드의 제조 방법이 제안되었다. 그러나, 이 발명에서는 금속의 산화 및 노즐 플레이트층과 잉크와의 상호 반응을 방지하기 위한 Au 코팅 공정이 복잡하고 제조 비용 또한 높다는 문제점이 따른다.The invention proposed to remedy this problem is disclosed in US Pat. No. 4,438,191. Here, a method of manufacturing an integrated bubble ink jet printer head in which an ink partition layer and a nozzle plate are directly formed by plating on a thin film such as a heat register layer and a SiO 2 / SiC protective layer has been proposed. However, in the present invention, there is a problem that the Au coating process for preventing the oxidation of the metal and the mutual interaction of the nozzle plate layer with the ink is complicated and the manufacturing cost is also high.
본 발명은 상기와 같은 문제점들을 해결하기 위해 창안된 것으로서, 잉크 파티션층 위에 금속재료 대신에 감광성을 갖는 폴리이미드로 노즐판을 제작함으로써 제조 공정이 간편하고 경제성이 향상된 일체형 버블 잉크젯 프린터 헤드 및 그 제조 방법을 제공하는데 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the integrated bubble inkjet printer head and its manufacture which have a simple manufacturing process and have improved economic efficiency by manufacturing a nozzle plate from polyimide having photosensitivity instead of a metal material on an ink partition layer. The purpose is to provide a method.
도1은 종래의 버블 잉크젯 프린터 헤드의 수직 단면도,1 is a vertical sectional view of a conventional bubble ink jet printer head,
도 2는 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드의 수직 단면도,2 is a vertical sectional view of the integrated bubble inkjet printer head according to the present invention;
도 3a 내지 도 3e는 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드의 제조방법을 공정 단계별로 보여주는 도면으로서,3A to 3E are views illustrating a method of manufacturing an integrated bubble ink jet printer head according to the present invention in a step-by-step manner.
도 3a는 잉크 파티션층 형성을 위한 노광 공정을 보여주는 도면,3A is a view showing an exposure process for forming an ink partition layer;
도 3b는 노광후 현상하여 잉크 파티션층을 형성한 모습을 보여주는 도면,3B is a view showing a state in which an ink partition layer is formed by developing after exposure;
도 3c는 노즐판 형성용 고체 폴리이미드를 적층한 모습을 보여주는 도면,3C is a view showing a state in which a solid polyimide for forming a nozzle plate is laminated;
도 3d는 노즐 형성을 위하여 마스크를 형성한 후 노광하는 모습을 보여주는 도면,3d is a view showing an exposure after forming a mask for forming a nozzle,
그리고 도 3e는 노광된 부분을 식각하여 노즐을 형성한 모습을 보여주는 도면이다.3E is a view illustrating a nozzle formed by etching the exposed portion.
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
11. Si 기판 12. 레지스터층11.Si substrate 12.Resistor layer
13. SiO2/SiC 보호층 14. 잉크 파티션층13. SiO 2 / SiC protective layer 14. Ink partition layer
15. Au 도금층 16. Ni 노즐판15.Au plating layer 16.Ni nozzle plate
17. 노즐17. Nozzle
21. Si 기판 22. 레지스터층21.Si substrate 22.Resistor layer
23. SiO2/SiC 보호층 24. 폴리이미드 잉크 파티션층23. SiO 2 / SiC protective layer 24. Polyimide ink partition layer
25. 폴리이미드 노즐판 26. 잉크 챔버 및 잉크 유로25. Polyimide nozzle plate 26. Ink chamber and ink flow path
27. 노즐 31. 마스크(잉크 파티션층 형성용)27.Nozzle 31.Mask (for forming ink partition layer)
32. 마스크(노즐 형성용)32. Mask (for nozzle formation)
상기와 같은 목적을 달성하기 위해서 본 발명에 따른 버블 잉크젯 프린터 헤드는, 기판; 상기 기판 위에 증착된 히트 레지스터; 상기 히트 레지스트를 보호하기 위하여 상기 히트 레지스트를 덮도록 상기 기판 위에 형성된 보호층; 상기 보호층 위에 도포되며 상기 히트 레지스트 바로 위의 보호층 상에 잉크 챔버가 이루어지도록 한정하여 형성되는 잉크 파티션층; 및 상기 잉크 파티션층 상면에 감광성 폴리이미드로 도포되어 상기 잉크 챔버에 대응하는 노즐이 형성된 노즐판;을 포함하는 것을 특징으로 한다.Bubble inkjet printer head according to the present invention to achieve the above object, the substrate; A heat resistor deposited on the substrate; A protective layer formed on the substrate to cover the heat resist to protect the heat resist; An ink partition layer applied on the protective layer and formed to restrict an ink chamber on the protective layer directly above the heat resist; And a nozzle plate coated with a photosensitive polyimide on an upper surface of the ink partition layer, the nozzle plate having a nozzle corresponding to the ink chamber formed thereon.
본 발명에 있어서, 상기 기판은 실리콘으로 형성되고, 상기 보호층은 SiO2/SiC로 형성되며, 상기 잉크 파티션층 및 노즐판은 각각 네거티브 폴리이미드 및 포지티브 폴리이미드로 이루어지거나 혹은 그 반대형들의 폴리이미드로 이루어지며, 상기 노즐의 수직 단면은 비둘기 꼬리 모양으로 이루어진 것이 바람직하다. 또한, 상기와 같은 목적을 달성하기 위해서 본 발명에 따른 버블 잉크젯 프린터 헤드의 제조 방법은, (가) 기판 위에 히트 레지스터 패턴을 형성하고, 상기 히트레지스트 패턴 위에 보호층을 형성하는 단계; (나) 상기 보호층 상면에 감광성 폴리이미드로 된 잉크 파티션층을 도포하는 단계; (다) 잉크 챔버 및 잉크 유로를 한정하기 위해 마스크를 사용하여 상기 잉크 파티션층을 노광시키는 단계; (라) 상기 잉크 파티션층의 비노광 부분을 에칭시켜 잉크 챔버 및 잉크 유로를 형성하는 단계; (마) 상기 잉크 파티션층 위에 노즐판용 감광성 폴리이미드를 도포하고, 노즐을 형성하기 위해 마스크를 사용하여 노즐판용 폴리이미드층을 노광시키는 단계; 및 (바) 상기 노즐판용 폴리이미드층의 노광된 부분을 에칭시켜 노즐을 형성시키는 단계;를 포함하는 것을 특징으로 한다.In the present invention, the substrate is formed of silicon, the protective layer is formed of SiO 2 / SiC, the ink partition layer and the nozzle plate are each made of negative polyimide and positive polyimide or vice versa poly Made of mid, the vertical cross section of the nozzle is preferably made of a pigeon tail shape. In addition, to achieve the above object, a method of manufacturing a bubble inkjet printer head according to the present invention includes the steps of: (a) forming a heat register pattern on a substrate and forming a protective layer on the heat resist pattern; (B) applying an ink partition layer of photosensitive polyimide to the upper surface of the protective layer; (C) exposing the ink partition layer using a mask to define an ink chamber and an ink flow path; (D) etching the unexposed portions of the ink partition layer to form an ink chamber and an ink flow path; (E) applying the photosensitive polyimide for nozzle plate on the ink partition layer and exposing the nozzle plate polyimide layer using a mask to form a nozzle; And (bar) etching the exposed portion of the polyimide layer for the nozzle plate to form a nozzle.
본 발명에 있어서, 상기 (가) 단계에서 상기 보호층은 SiO2/SiC를 증착하여 형성하고, 상기 (나) 단계에서 상기 잉크 파티션층으로 네거티브형 감광성 폴리이미드를 도포하고, 상기 (마) 단계에서 노즐판으로 포지티브형 감광성 폴리이미드를 도포하거나, 혹은 상기 (나) 단계에서 상기 잉크 파티션층으로 포지티브형 감광성 폴리이미드를 도포하고, 상기 (마) 단계에서 노즐판으로 네거티브형 감광성 폴리이미드를 도포하는 것이 바람직하며, 상기 (라) 단계에서 상기 잉크 파티션층의 노광 부분을 에칭시켜 잉크 챔버 및 잉크 유로를 형성하고, 상기 (바) 단계에서 상기 노즐판용 폴리이미드층의 비노광 부분을 에칭시켜 노즐을 형성시키는 것도 바람직하다.In the present invention, in the step (a), the protective layer is formed by depositing SiO 2 / SiC, and in step (b), a negative photosensitive polyimide is applied to the ink partition layer, and the step (e) Apply positive photosensitive polyimide to the nozzle plate at, or apply positive photosensitive polyimide to the ink partition layer in step (b), and apply negative photosensitive polyimide to the nozzle plate in step (e). Preferably, in the step (d), the exposed portion of the ink partition layer is etched to form an ink chamber and an ink passage, and in step (f), the non-exposed part of the polyimide layer for the nozzle plate is etched to form a nozzle. It is also preferable to form
이하 도면을 참조하면서 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드 및 그 제조 방법을 상세하게 설명한다.Hereinafter, an integrated bubble ink jet printer head and a manufacturing method thereof according to the present invention will be described in detail with reference to the drawings.
도 2는 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드의 수직 단면 구조를 보여주는 도면이다. 도시된 바와 같이, 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드는 다음과 같이 구성된다. 실리콘 기판(21) 위에 열 발생원인 히트 레지스터층(22)이 구비되고, 이를 보호하기 위하여 그 위에 SiO2/SiC가 증착되어 이루어진 보호층(23)이 형성된다. 이 보호층(23) 위에는 잉크 파티션층(24)이 적층되는데, 히트 레지스터층(22) 바로 위의 보호층(23) 상에 잉크 챔버(26)가 형성되도록 적층된다. 잉크 파티션층(24) 위에는 노즐판(25)이 형성되는데 이 층은 금속이 아닌 감광성 폴리이미드로 형성된다. 폴리이미드는 네가티브형과 포지티브형 폴리이미드가 사용된다. 이들은 고체형태 또는 액체형태로 사용된다. 이와 같은 구조의 일체형 버블 잉크젯 프린터 헤드는 히트 레지스터(12)에 일정한 전압이 인가되면 순간적으로 가열되어 그 상부에 위치한 잉크 챔버(26) 내의 잉크를 가열하여 순간적으로 기포를 발생시킨다. 이 기포의 팽창력에 의해 잉크카 노즐(27)을 통하여 토출됨으로써 인쇄가 이루어진다.2 is a view showing a vertical cross-sectional structure of an integrated bubble ink jet printer head according to the present invention. As shown, the integrated bubble ink jet printer head according to the present invention is constructed as follows. The heat register layer 22, which is a heat generating source, is provided on the silicon substrate 21, and a protective layer 23 formed by depositing SiO 2 / SiC is formed thereon to protect it. The ink partition layer 24 is laminated on the protective layer 23, and the ink chamber 26 is formed on the protective layer 23 directly above the heat register layer 22. The nozzle plate 25 is formed on the ink partition layer 24, which is formed of photosensitive polyimide rather than metal. As the polyimide, negative type and positive type polyimide are used. They are used in solid form or in liquid form. The integrated bubble ink jet printer head having such a structure is instantaneously heated when a constant voltage is applied to the heat register 12 to heat the ink in the ink chamber 26 located thereon to generate air bubbles instantaneously. Printing is performed by ejecting through the ink car nozzle 27 by the expansion force of this bubble.
상기와 같은 구조를 가진 일체형 버블 잉크젯 프린터 헤드의 제조 방법을 도 3a도 내지 도 3e를 참조로 하여 설명한다.A method of manufacturing an integrated bubble ink jet printer head having the above structure will be described with reference to FIGS. 3A to 3E.
먼저, 도 3a에 도시된 바와 같이, 기판(21) 위에 히트 레지스터층(22)과 보호층(23)을 차례로 증착하고, 보호층(23) 위에 감광성 폴리이미드로된 잉크 파티션층(24)을 도포한 다음, 잉크 파티션층(24)을 마스크(31)를 이용하여 노광한다.First, as shown in FIG. 3A, the heat register layer 22 and the protective layer 23 are sequentially deposited on the substrate 21, and the ink partition layer 24 made of photosensitive polyimide is disposed on the protective layer 23. After application, the ink partition layer 24 is exposed using a mask 31.
다음에, 도 3b에 도시된 바와 같이, 마스크를 제거하고 폴리이미드의 노광된 부분을 현상하여 잉크 챔버 및 잉크 유로(26)를 형성한다.Next, as shown in FIG. 3B, the mask is removed and the exposed portion of the polyimide is developed to form the ink chamber and the ink flow path 26.
다음에, 도 3c에 도시된 바와 같이, 잉크 파티션층(24) 위에 감광성 폴리이미드로 형성된 노즐판(25)이 도포된다. 이는 고체형 폴리이미드를 사용하여 상기 잉크 챔버 및 잉크 유로가 막히지 않도록 한다.Next, as shown in FIG. 3C, a nozzle plate 25 formed of photosensitive polyimide is applied on the ink partition layer 24. This uses solid polyimide to prevent the ink chamber and the ink passage from clogging.
다음으로, 도 3d에 도시된 바와 같이, 마스크(32)를 형성하고 이를 이용하여 노즐판(25)에 노광한다.Next, as shown in FIG. 3D, a mask 32 is formed and exposed to the nozzle plate 25 using the mask 32.
다음에, 도 3e에 도시된 바와 같이, 노즐판(25)를 현상하여 비둘기 꼬리(dove-tail) 모양의 노즐(27)이 형성되도록 한다. 이러한 모양 형성을 위해 상기 노광 공정의 노광 시간은 적절히 조절되는 것이 바람직하다.Next, as shown in FIG. 3E, the nozzle plate 25 is developed to form a dove-tail nozzle 27. In order to form such a shape, the exposure time of the exposure process is preferably adjusted appropriately.
다음에, 폴리이미드층을 완전히 경화(cure)시켜 프린터 헤드를 완성한다.Next, the polyimide layer is completely cured to complete the print head.
이와 같은 일체형 버블 잉크젯 프린터 헤드의 제조 방법은, 폴리이미드로 된 노즐판이 잉크 파티션층 상부에 직접 도포되므로, 별도의 노즐판 접착 장비가 필요없고 공정이 간단하여 높은 해상도의 헤드를 제조하는데 유리하다. 또한 잉크 파티션층과 노즐판으로 쓰이는 폴리이미드의 형을 달리하면, 상기 두 층의 상호작용을 방지하기 위한 다른 금속이나 포토레스터층의 증착과 에칭의 공정 단계가 생략되므로 헤드 제조상 드는 시간과 비용을 줄일 수 있다. 더욱이, 포토리소그래피에 의해 노즐 플레이트가 형성되므로 노즐의 변형이 없고 노광시간의 조절에 따라 비둘기 꼬리 모양의 노즐 단면을 얻을 수 있는데 이것은 유체역학상 노즐에 인가되는 부하를 감소시키는 기능을 한다. 또한, 본 발명에 따른 헤드의 노즐 플레이트는 폴리이미드로 구성되므로 금속에 비해 잉크와 화학적인 상호반응이 적고 산화로 인한 부식의 염려가 없다.Such a method of manufacturing an integrated bubble ink jet printer head is advantageous in that a nozzle plate made of polyimide is applied directly on top of an ink partition layer, thus eliminating the need for a separate nozzle plate adhering equipment and simplifying the process to produce a high resolution head. In addition, different types of polyimide used as the ink partition layer and the nozzle plate eliminate the steps of depositing and etching other metals or photorester layers to prevent the interaction between the two layers, thus reducing the time and cost of head manufacturing. Can be reduced. Furthermore, since the nozzle plate is formed by photolithography, there is no deformation of the nozzle and a dove tail shaped nozzle cross section can be obtained according to the adjustment of the exposure time, which serves to reduce the load applied to the hydrodynamic nozzle. In addition, since the nozzle plate of the head according to the present invention is composed of polyimide, there is less chemical interaction with the ink than metal and there is no fear of corrosion due to oxidation.
이상 설명한 바와 같이, 본 발명에 따른 일체형 버블 잉크젯 프린터 헤드는 노즐판으로 폴리이미드를 사용함으로써, 그 구조 및 제조 방법상 다음과 같은 장점을 갖는다.As described above, the integrated bubble inkjet printer head according to the present invention has the following advantages in structure and manufacturing method by using polyimide as the nozzle plate.
첫째, Pick & Place 나 도금조의 사용이 불필요하다.First, there is no need to use Pick & Place or plating bath.
둘째, 폴리이미드(polyimide)를 사용한 일종의 플라스틱(plastic) 노즐이기 때문에 잉크와의 화학적인 상호작용 및 산화로 인한 부식에서 오는 부작용이 없다.Second, since it is a kind of plastic nozzle using polyimide, there is no side effect that comes from corrosion due to oxidation and chemical interaction with the ink.
세째, 노즐판(Nozzle plate)이 포토리소그래피(photolithography)를 통하여 매우 정확하게 히트 레지스터 위에 배열된다.Third, the nozzle plate is arranged on the heat register very accurately through photolithography.
네째, 본 발명은 마스크와 포토레지스트와의 완벽한 접촉상태에서 노즐의 포토리소그래피가 이루어지므로, 원래 마스크 상의 노즐 크기가 변형됨이 없도록 장시간 동안 노광을 할 수 있다. 또한, 이러한 결과는 잉크 토출시 유체역학상 노즐에 인가되는 부하를 덜어주는 비둘기 꼬리와 같은 모양의 노즐 단면을 형성한다. 결과적으로 도금으로 형성된 노즐판(nozzle plate)에서 볼 수 있는 큰 장점인 아래쪽이 넓은 둥근 모양의 노즐 단면이 갖는 유체역학상의 효과와 유사한 효과를 얻을 수 있다.Fourth, since the present invention is photolithography of the nozzle in perfect contact between the mask and the photoresist, the exposure can be performed for a long time so that the nozzle size on the original mask is not deformed. This result also results in a nozzle cross section shaped like a pigeon tail that relieves the load applied to the hydrodynamic nozzle during ink ejection. As a result, it is possible to obtain an effect similar to the hydrodynamic effect of the rounded nozzle section having a wide bottom, which is a big advantage seen in the nozzle plate formed by plating.
다섯째, 높은 해상도를 얻기 위하여는 수 마이크로미터(micro meter) 단위의 노즐 반경(2000 DPI 이상) 까지 무리없이 상용 표준 노광 장비만으로 제작이 가능 하다.Fifth, in order to obtain high resolution, it is possible to manufacture only commercially available standard exposure equipment to a nozzle radius of more than several micrometers (over 2000 DPI).
여섯째, 노즐을 형성하는 폴리이미드와 잉트 파티션층을 형성하는 폴리이미드의 형을 다르게 하여 그 두층 사이의 상호작용을 방지하기 위한 보호층이 필요하지 않게 된다.Sixth, the polyimide forming the nozzle and the polyimide forming the ingot partition layer are different, so that a protective layer for preventing the interaction between the two layers is not necessary.
Claims (10)
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| KR100509481B1 (en) * | 2002-12-03 | 2005-08-22 | 삼성전자주식회사 | Method for manufacturing monolithic inkjet printhead |
| CN108136776A (en) * | 2015-10-30 | 2018-06-08 | 惠普发展公司，有限责任合伙企业 | Fluid ejection device |
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| JPS62264957A (en) * | 1986-05-08 | 1987-11-17 | Yokogawa Hewlett Packard Ltd | Production of ink jet print head |
| JPS63297051A (en) * | 1987-05-29 | 1988-12-05 | Seiko Epson Corp | Nozzle plate for bubble jet head |
| JPS6414044A (en) * | 1987-07-08 | 1989-01-18 | Seiko Epson Corp | Ink jet head |
| JPH01190458A (en) * | 1988-01-25 | 1989-07-31 | Nec Corp | Ink-jet head |
| US4926197A (en) * | 1988-03-16 | 1990-05-15 | Hewlett-Packard Company | Plastic substrate for thermal ink jet printer |
| WO1990013430A1 (en) * | 1989-05-12 | 1990-11-15 | Eastman Kodak Company | Bubble jet print head having improved multi-layer protective structure for heater elements |
| JPH09150516A (en) * | 1995-11-28 | 1997-06-10 | Kyocera Corp | Ink jet head |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100509481B1 (en) * | 2002-12-03 | 2005-08-22 | 삼성전자주식회사 | Method for manufacturing monolithic inkjet printhead |
| CN108136776A (en) * | 2015-10-30 | 2018-06-08 | 惠普发展公司，有限责任合伙企业 | Fluid ejection device |
| US10449762B2 (en) | 2015-10-30 | 2019-10-22 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
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