KR19990069959A - Image data retrieval method - Google Patents

Abstract

The present invention selects a shape of a target screen to be searched on a window, selects a color and a background image in turn, and sets respective weights to the shape, color, and background image to search image data for searching the target screen according to importance. A method comprising: a first step of inputting weights of shapes, colors, and backgrounds of search image data to be found on window information; and the search image data input in the first step and stored image data stored in a database. A second process of comparing, a third process of temporarily storing the value compared in the second process for a predetermined time delay, and a fourth process of decrypting the data stored in the third process and transmitting the decrypted information to the microcomputer And a fifth step of extracting the image file name corresponding to the information transmitted in the fourth step and storing the same in the memory. In the sixth step of outputting the image file name stored in the memory, it is possible to quickly search for a file close to a weight selected by the user, and the present invention has an effect of searching for a file using voice.

Description

Image data retrieval method

The present invention relates to a method of retrieving image data, and more particularly, to select a shape of a target screen to be searched on a window, to select a color and a background image in turn, and to assign respective weights to the shape, color, and background image. The present invention relates to a retrieval method of image data for setting and retrieving a target screen according to importance.

In manufacturing a solid electronic device such as a semiconductor device, photomasks and reticles are manufactured to form the electronic device and the respective pattern layers. If such photomask and reticle patterns exist, even minor defects, the defects have a major adverse effect on the manufacture of the product. For this reason, the accuracy of the pattern of the photomask and the reticle is examined when the pattern is completed.

In general, upon performing the above-mentioned inspection, the pattern of the photomask or the reticle is converted into an electric signal, that is, image data. This image data is compared and compared with the image data prepared in advance in the design stage. By this comparison, it is determined whether the two image data coincide in all areas of the photomask or the reticle. In this examination, the two image data must match as is.

1 is a system opening diagram for explaining an example of a conventional reticle image data inspection method.

As shown in FIG. 1, the pattern D1 formed on the reticle 1 by the metal thin film is converted into an electric signal by the image reading unit 2. The image reading unit 2 is composed of, for example, an optical device that emits read light and a photoelectric conversion device that receives read light transmitted through a reticle pattern.

The image reading unit 2 outputs the reticle image data D2 as an electric signal.

For example, the reticle image data D2 expresses a pattern shape for each subdivided unit area by subdividing the entire area of the reticle into units of a photoelectric conversion apparatus. The signal format of the reticle image data D2 is represented by The shape is expressed by defining the center point coordinates X1 and Y1, the width W1 and the height H1 of the pattern.

The inspection data D3 is created from the design mask data in the same manner as the exposure data for manufacturing the reticle prior to the manufacture of the reticle.

The signal format of the inspection data D3 is formed by defining the pattern shape existing in the entire area of the reticle as the center point coordinates (X2, Y2), the width (W2) and the height (H2) of the pattern.

Therefore, since the inspection data D3 and the reticle image data D2 have different signal formats, the format conversion unit (1) converts the signal format of the inspection data D3 to match the signal format of the reticle image data D2. 3) is provided. The format conversion unit 3 converts the inspection data D3 into inspection image data D4.

The comparison unit 6 compares the two image data D2 and D4 and outputs a detection signal indicating whether the two image data D2 and D4 match. This detection signal is supplied to the output unit 7, and when this detection signal indicates that the two image data D2 and D4 coincide, this indicates that the inspected reticle is in a satisfactory state without any defects while the two image data Indication of (D2, D4) mismatch indicates that the inspected reticle is defective.

For convenience, a detection signal indicating that the two image data D2 and D4 coincide is referred to as a first detection signal, and a detection signal indicating disagreement is referred to as a second detection signal.

When correction and the like are necessary after the creation of the image data D2 and D4, the image data correction units 4 and 5 correct the respective image data D2 and D4, for example, by correcting the round portions at the corners of the image. The comparison of the two image data D2 and D4 corresponds to a step of continuous scanning over the entire area of the reticle on the X and Y coordinates, for example, to determine whether the center point coordinates, width and height of each pattern coincide with each other.

Therefore, it is necessary to scan all the coordinate points over the entire reticle area and perform comparison at the high speed in the comparison section 6.

If a defect exists in the reticle and causes such a poor etching due to the minute defect, the second detection signal indicating that the two image data D2 and D4 do not coincide lasts for a very short time during scanning.

However, since the comparator performs the comparison at high speed, the scanning cycle is very fast. For this reason, it is difficult to distinguish between the second detection signal which lasts for a very short time due to the presence of minute defects and the noise signal due to the distortion of the signal waveform due to the high frequency.

If the detection sensitivity of the comparator is increased, a simple noise signal is detected as a second detection signal, i.e., a defect is present in the reticle, while if the detection sensitivity is decreased, fine defects in the reticle cannot be detected.

Accordingly, the present invention has been made to solve such a problem, the object of the present invention is to select the shape of the target screen to be searched on the window, select the color and the background image in turn, and the shape, color, background image respectively The present invention provides a method of retrieving image data in which a target screen is searched according to importance by setting a weighting factor.

According to an aspect of the present invention, there is provided a method of searching for image data in which window image information is searched by comparing and searching image data stored as an image file with specific image data selected by a user. In the first step of inputting the weight of the shape, color, and background of the retrieval image data, the second step of comparing the retrieval image data input in the first step and the stored image data stored in the database; The third process of temporarily storing the compared values for a predetermined time delay, the fourth process of decrypting the data stored in the third process and transmitting the decrypted information to the microcomputer, and the information transmitted in the fourth process. Extracting the image file name to store in the memory and the image file name stored in the memory of the fifth process And a sixth process of outputting.

1 is a system opening diagram for explaining an example of a conventional reticle image data inspection method.

Figure 2 is to show the overall configuration of the image data search method according to the present invention

One convex road.

3 is a flowchart for explaining the overall operation of the retrieval method of image data according to the present invention;

<Explanation of symbols for the main parts of the drawings>

10: weight setting unit 20: search image data

30: database 40: stored image data

50: comparator 60: buffer

70: decoder 80: microcomputer

90: memory 100: search file output

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is to show the overall configuration of the image data search method according to the present invention

One convexity.

As shown in FIG. 2, in the present invention, the weight setting unit 10, the search image data 20, the database 30, the stored image data 40, the comparison unit 50, the buffer unit 60, The decoder 70, the microcomputer 80, the memory 90, and the search file output unit 100 are configured.

Reference numeral 10 includes a shape, color, and background weight input unit, and is a weight setting unit for inputting weights of shapes, colors, and backgrounds of image files to be searched based on information on a window.

Reference numeral 20 denotes search image data to be searched based on the weight input by the weight setting unit, reference numeral 30 denotes a database storing an image file, and reference numeral 40 denotes a stored image obtained by extracting a file previously stored in the database. Data.

Reference numeral 50 is a comparator comprising a plurality of comparators for comparing and retrieving search image data and stored image data and outputting a comparison value, and reference numeral 60 is a plurality of comparator for temporarily storing the comparison values output from each comparator of the comparator. A buffer unit consisting of a buffer, and reference numeral 70 denotes a decoder for decoding data stored in each buffer of the buffer unit.

Reference numeral 80 denotes a microcomputer that controls the entire system by inputting the data decoded by the decoder and determining whether the stored image data retrieved is a file that has reached the weight based on the weight set by the user. A memory for storing files of stored image data that has reached the weight under the control of?, And reference numeral 100 denotes a search file output unit for outputting a file stored in the memory under the control of the microcomputer.

Hereinafter, the operation of the present invention having the above configuration will be described in detail with reference to FIG.

3 is a flowchart for explaining the overall operation of the retrieval method of the image data according to the present invention.

First, a shape, color, and background of a file to be searched are selected on a window, and respective weights are input by a user's selection (step 302). For example, suppose that the file you want to search for is one person, the person is wearing a red uniform and is looking at the mountain. Enter a weight of 1 for one person and a weight of 0.7 for the red uniform. Enter a weight of 0.5.

When the input of the search image data to be searched is completed, the microcomputer extracts the stored image data previously stored in the database (step 304). Each comparator of the comparator compares and retrieves the search image data and the stored image data based on the input shape, color, and background weight value (step 306) and stores the output value in a corresponding buffer of the buffer part (step 308).

The decoder decodes comparison values of shapes, colors, and background weights stored in each buffer of the buffer unit, and inputs decoded data indicating to the microcomputer how much the stored image data matches the weighted search image data (step 310). .

The microcomputer receives the data decoded by the decoder and determines whether the stored image data has reached the weight (step 312). If the file has not reached the weight, the microcomputer extracts the next stored image data to be searched from the database. The control is repeated to repeat the process (step 314), and if the file reaches the weight value, the file name of the stored image data is stored in the memory (step 316).

In addition, the microcomputer determines whether all files in the database have been searched (step 318). If there are files to be searched, the microcomputer proceeds to step 314 to extract the next stored image data to be searched from the database. The control is repeated to repeat the process (step 314). When all files in the database are searched, the control unit outputs a search file that reaches the weight stored in the memory (step 320).

As described above, according to the retrieval method of the image data according to the present invention, the shape, color, and background weight of the retrieval image data to be retrieved are input on the window, and the image data is searched based on the input weight. By comparing and retrieving the stored stored image data, it is possible to quickly search for a file close to a weight selected by the user, and the present invention has an effect of searching for a file using voice.

Claims (1)

In the image data retrieval method of comparing and searching the specific image data selected by the user in the window information and the image data stored as the image file, and outputs the retrieved image file, A first step of inputting weights of shapes, colors, and backgrounds of search image data to be searched on window information; A second step of comparing the search image data input in the first step with the stored image data stored in the database; A third step of temporarily storing the value compared in the second step to delay a predetermined time; A fourth process of decrypting the data stored in the third process and transmitting the decrypted information to the microcomputer; A fifth step of extracting an image file name corresponding to the information transmitted in the fourth step and storing it in a memory; And a sixth step of outputting an image file name stored in the memory of the fifth step.