KR19990059113A - Method of forming barrier metal layer of semiconductor device - Google Patents
Method of forming barrier metal layer of semiconductor device Download PDFInfo
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- KR19990059113A KR19990059113A KR1019970079310A KR19970079310A KR19990059113A KR 19990059113 A KR19990059113 A KR 19990059113A KR 1019970079310 A KR1019970079310 A KR 1019970079310A KR 19970079310 A KR19970079310 A KR 19970079310A KR 19990059113 A KR19990059113 A KR 19990059113A
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- high frequency
- titanium nitride
- forming
- barrier metal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76846—Layer combinations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by physical means, e.g. sputtering, evaporation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
Abstract
1. 청구범위에 기재된 발명이 속한 기술분야1. TECHNICAL FIELD OF THE INVENTION
본 발명은 반도체 소자의 장벽 금속층 형성 방법에 관한 것으로, 특히 얕은 접합을 가지는 콘택에서 이온 메탈 플라즈마 방법을 이용한 금속성 타이타늄나이트라이드층을 형성하여 콘택 저항을 안정화 시키는 방법에 관한 것임.The present invention relates to a method for forming a barrier metal layer of a semiconductor device, and more particularly, to a method for stabilizing contact resistance by forming a metallic titanium nitride layer using an ion metal plasma method in a contact having a shallow junction.
2. 발명이 해결하려고 하는 기술적 과제2. The technical problem to be solved by the invention
콘택 형성시 장벽 금속층으로 형성된 타이타늄층 및 타이타늄나이트라이드층은 기판의 실리콘 성분과 반응으로 타이타늄실리사이드 화합물을 생성시켜 저항 및 누설 전류를 증가시키는 단점이 있음.The titanium layer and the titanium nitride layer formed of the barrier metal layer at the time of contact formation have a disadvantage of increasing the resistance and leakage current by generating a titanium silicide compound by reaction with the silicon component of the substrate.
3. 발명의 해결 방법의 요지3. Summary of the Solution of the Invention
이온 메탈 플라즈마 챔버 내에서 반도체 기판에 타이타늄나이트라이드층을 증착하되, 고주파 코일이 타겟의 이온에 노출되어 고주파 코일 상부에 타이타늄나이트라이드가 증착되고, 이 고주파 코일에 증착되었던 타이타늄나이트라이드가 다시 이온화되어, 반도체 기판에 금속성 타이타늄나이트라이드가 증착되도록 함.In the ion metal plasma chamber, a layer of titanium nitride is deposited on a semiconductor substrate, and the high frequency coil is exposed to ions of the target to deposit titanium nitride on the high frequency coil, and the titanium nitride deposited on the high frequency coil is ionized again. And depositing metallic titanium nitride on the semiconductor substrate.
4. 발명의 중요한 용도4. Important uses of the invention
반도체 소자의 콘택 형성 공정Contact Forming Process of Semiconductor Device
Description
본 발명은 반도체 소자의 장벽 금속층(barrier layer) 형성 방법에 관한 것으로, 특히 얕은 접합(shallow junction)을 가지는 콘택에서 이온 메탈 플라즈마(Ion Metal Plasma ; 이하 IMP라 칭함) 방법을 이용한 금속성(metallic) 타이타늄나이트라이드(TiN)층을 형성하여 콘택 저항을 안정화 시키는 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a barrier metal layer of a semiconductor device. In particular, a metallic titanium using an ion metal plasma (IMP) method in a contact having a shallow junction is used. A method of stabilizing contact resistance by forming a nitride (TiN) layer.
반도체 소자가 고집적화 되어감에 따라 콘택의 크기가 점점 감소되고, 접합부도 점차 얕아지고 있다. 그러므로 콘택 저항의 안정화가 절실히 요구되고 있는데, 특히 얕은 접합부에서 콘택 저항이 안정화되지 못하면 소자의 동작이 원활치 못하고 불량 소자를 유발할 수 있다.As semiconductor devices become highly integrated, the size of contacts is gradually reduced and the junctions are becoming shallower. Therefore, the stabilization of the contact resistance is urgently required. In particular, if the contact resistance is not stabilized at a shallow junction, the device may not operate smoothly and may cause a defective device.
일반적으로 금속 배선 콘택의 경우 콘택 홀 형성 후, 타이타늄(Ti)층 및 타이타늄나이트라이드층을 증착하고 그 상부에 금속 배선을 형성한다. 이 때 증착되는 타이타늄층은 콘택 저항을 낮추어주는 역할을 하고, 타이타늄나이트라이드층은 장벽 금속층의 역할을 한다. 그러나 타이타늄층은 후속 열공정시 하부면에 접하고 있는 기판의 실리콘(Si) 성분과 반응하여 타이타늄실리사이드(TiSix)와 같은 화합물을 형성시킨다. 접합부가 매우 얕은 경우 이러한 화합물의 생성이 과도하게 일어나면 콘택 저항 및 누설 전류가 증가하게 된다. 이를 방지하기 위하여 타이타늄층의 두께를 감소시켜 균일한 타이타늄실리사이드층을 형성해 주어야 하나, 타이타늄층의 두께가 감소되면 타이타늄층의 균일도(uniformity)가 떨어져 타이타늄실리사이드층 또한 균일하게 형성되지 못하고 국부적으로 불균일하게 형성된다. 따라서 타이타늄층 대신에 질소(N) 성분이 어느 정도 포함된 금속성 타이타늄나이트라이드층을 증착해 줌으로써 타이타늄실리사이드층의 형성 정도를 제어하려 하고 있으나, 금속성 타이타늄나이트라이드층은 조성의 재현성이 떨어지며 기판 상부에서 균일도가 매우 나쁜 단점을 가지고 있다.In general, in the case of a metal wiring contact, after forming a contact hole, a titanium (Ti) layer and a titanium nitride layer are deposited and a metal wiring is formed thereon. At this time, the deposited titanium layer serves to lower the contact resistance, and the titanium nitride layer serves as a barrier metal layer. However, the titanium layer reacts with the silicon (Si) component of the substrate in contact with the lower surface during the subsequent thermal process to form a compound such as titanium silicide (TiSi x ). If the junction is very shallow, excessive production of these compounds results in increased contact resistance and leakage current. In order to prevent this, the thickness of the titanium layer should be reduced to form a uniform titanium silicide layer.However, if the thickness of the titanium layer is reduced, the uniformity of the titanium layer will be reduced, and thus the titanium silicide layer will not be formed uniformly. Is formed. Therefore, the degree of formation of the titanium silicide layer is controlled by depositing a metallic titanium nitride layer containing a certain amount of nitrogen (N) instead of the titanium layer, but the metallic titanium nitride layer has a poor reproducibility of the composition, Uniformity has a very bad disadvantage.
본 발명은 얕은 접합 구조를 갖는 콘택 형성에 있어서 콘택 저항 및 누설 전류를 감소시켜 소자의 동작을 원활히 하고 수율이 증대되도록 안정된 콘택을 형성하는데 그 목적이 있다.An object of the present invention is to form a stable contact to reduce the contact resistance and leakage current in forming a contact having a shallow junction structure to facilitate the operation of the device and increase the yield.
상술한 목적을 달성하기 위한 반도체 소자의 장벽 금속층 형성 방법은, 반도체 소자를 형성하기 위한 여러 요소가 형성된 기판 상부에 층간 절연막을 형성하고 선택된 영역에 콘택 홀을 형성하는 단계와, 상기 콘택 홀이 형성된 기판을 측벽에 고주파 코일이 형성된 이온 메탈 플라즈마 스퍼터링 장치에 장착하는 단계와, 상기 고주파 코일에 고주파를 인가하지 않은 상태에서 타이타늄나이트라이드 타겟을 사용하여 타이타늄나이트라이드층을 증착하되, 상기 콘택 홀을 포함한 기판 상부와 플라즈마에 노출되는 상기 고주파 코일의 상부에 동시에 타이타늄나이트라이드층이 증착되도록 하는 단계와, 상기 고주파 코일에 고주파를 인가한 상태에서 타이타늄 타겟을 사용하여 타이타늄층을 증착하되, 상기 고주파 코일의 상부에 증착된 타이타늄나이트라이드층이 스퍼터링되어 상기 타이타늄나이트라이드층이 증착된 기판으로 타이타늄과 함께 재 증착되도록 하여 장벽 금속층을 형성하는 단계와, 열 공정을 실시하는 단계를 포함하여 이루어지는 것을 특징으로 한다.In order to achieve the above object, a method of forming a barrier metal layer of a semiconductor device includes forming an interlayer insulating film over a substrate on which various elements for forming a semiconductor device are formed, and forming a contact hole in a selected region, and forming the contact hole. Mounting a substrate on an ion metal plasma sputtering apparatus having a high frequency coil formed on a sidewall, and depositing a titanium nitride layer using a titanium nitride target without applying a high frequency to the high frequency coil, the contact hole including the contact hole At the same time, a titanium nitride layer is deposited on a substrate and an upper portion of the high frequency coil exposed to the plasma, and a titanium layer is deposited using a titanium target while a high frequency is applied to the high frequency coil. Titanium Night Deposited on Top Id is a sputtered layer is characterized in that comprises a step for applying step and a heat step of forming a barrier metal layer such that the deposited material together with titanium in a deposition substrate on which the titanium nitride layer.
도 1(a) 내지 도 1(c)는 본 발명에 따른 반도체 소자의 장벽 금속층 형성 방법을 설명하기 위해 도시한 이온 메탈 플라즈마 챔버의 내부 구성도.1 (a) to 1 (c) are internal configuration diagrams of an ion metal plasma chamber shown for explaining a method of forming a barrier metal layer of a semiconductor device according to the present invention.
<도면의 주요부분에 대한 부호 설명><Description of Signs of Major Parts of Drawings>
11 : 진공 챔버 12 : 히터11: vacuum chamber 12: heater
13 : 기판 14 : 타겟13 substrate 14 target
15 : 고주파 코일 16 : 타이타늄나이트라이드15: high frequency coil 16: titanium nitride
17 : 금속성 타이타늄나이트라이드층17: metallic titanium nitride layer
이하, 첨부된 도면을 참조하여 본 발명을 상세히 설명하기로 한다.Hereinafter, with reference to the accompanying drawings will be described in detail the present invention.
도 1(a) 내지 도 1(c)는 본 발명에 따른 반도체 소자의 장벽 금속층 형성 방법을 설명하기 위해 도시한 IMP 챔버의 내부 구성도이다.1 (a) to 1 (c) are internal configuration diagrams of an IMP chamber shown for explaining a method of forming a barrier metal layer of a semiconductor device according to the present invention.
도 1(a)에 도시된 것과 같이, IMP 챔버(11)는 원하는 진공도 유지할 수 있는 진공 챕버(11) 내부에 기판(13) 및 기판(13)을 가열할 수 있는 히터(12), 타갯(14) 및 진공 챔버(11)의 측벽에 장착되어 고주파를 인가할 수 있는 고주파 코일(RF coil ; 15)로 구성되어 있다.As shown in FIG. 1A, the IMP chamber 11 includes a heater 12 capable of heating the substrate 13 and the substrate 13 inside the vacuum chapter 11 capable of maintaining a desired vacuum. 14) and a high frequency coil 15 mounted on the side wall of the vacuum chamber 11 to which a high frequency can be applied.
이러한 IMP 챔버(11) 내부에 기판(13)을 장착하되, 기판(13)은 반도체 소자를 형성하기 위한 여러 요소가 형성된 기판 상부에 층간 절연막을 형성하고, 선택된 영역에 콘택 홀을 형성한다. 이렇게 준비된 반도체 기판을 IMP 챔버(11)에 장착하고, 타이타늄나이트라이드 타겟(14)을 사용하여 아르곤(Ar) 가스 및 질소(N2) 가스 분위기에서 400 ℃ 이하의 온도로 타이타늄나이트라이드를 증착한다. 유입되는 가스가 아르곤인 경우에는 5 sccm 내지 50 sccm 정도로 제어하고, 질소 가스의 경우에는 10 sccm 내지 150 sccm이 되도록 제어하여, 증착되는 타이타늄나이트라이드층의 두께가 1,000 Å ∼ 20,000 Å이 되도록 충분히 증착한다. 이 때 IMP 챔버(11)의 고주파 코일(15)에는 고주파를 인가하지 않고, 1 ㎾ ∼ 20 ㎾ 범위의 직류 전력만으로 타이타늄나이트라이드층의 증착 공정을 진행한다. 따라서 타겟(14)의 이온들이 기판(11)에 증착됨은 물론이고, 도 1(b)에 도시된 것과 같이, 이 이온에 노출되어 있는 고주파 코일(15)의 상부에도 증착되어 타이타늄나이트라이드층(16)을 형성한다.The substrate 13 is mounted inside the IMP chamber 11, and the substrate 13 forms an interlayer insulating layer on the substrate on which various elements for forming a semiconductor device are formed, and forms a contact hole in a selected region. The semiconductor substrate thus prepared is mounted in the IMP chamber 11, and the titanium nitride is deposited at a temperature of 400 ° C. or less in an argon (Ar) gas and a nitrogen (N 2 ) gas atmosphere using the titanium nitride target 14. . In the case of argon, 5 sccm to 50 sccm is introduced, and nitrogen gas is controlled to be 10 sccm to 150 sccm, so that the deposited titanium nitride layer has a thickness of 1,000 kPa to 20,000 kPa. do. At this time, the high frequency coil 15 of the IMP chamber 11 is not subjected to a high frequency, and the deposition process of the titanium nitride layer is carried out using only DC power in the range of 1 kW to 20 kW. Therefore, not only the ions of the target 14 are deposited on the substrate 11 but also are deposited on the high frequency coil 15 exposed to the ions, as shown in FIG. 16).
이후 공정으로 챔버(11)내로 아르곤 가스가 5 sccm ∼ 200 sccm의 속도로 유입되고, 400 ℃ 이하인 온도 분위기에서 타이타늄 타겟(14)을 사용하여 타이타늄층을 증착하되, 고주파 코일(15)에 10 W 이하의 고주파를 인가하고 기판(13)에는 주파수가 200 ㎑ ∼ 1,000 ㎑인 바이어스를 5 W ∼ 100 W의 파워로 인가하여 증착한다.Afterwards, argon gas is introduced into the chamber 11 at a rate of 5 sccm to 200 sccm, and a titanium layer is deposited using the titanium target 14 in a temperature atmosphere of 400 ° C. or less, and 10 W is applied to the high frequency coil 15. The following high frequency is applied, and a bias with a frequency of 200 Hz to 1,000 Hz is applied to the substrate 13 with a power of 5 W to 100 W and deposited.
따라서, 도 1(c)에 도시된 것과 같이, 고주파 코일(15)에 증착된 타이타늄나이트라이드(16)가 스퍼터링(sputtering)되어 기판(13) 상에 타이타늄과 동시에 증착되도록 한다. 이 때 기판에 증착되는 타이타늄나이트라이드는 질소의 조성비가 50 % 이하가 되도록 제어한다. 이렇게 함으로써 균일한 분포를 갖는 금속성 타이타늄나이트라이드층(17)을 증착할 수 있고, 이는 콘택 홀 저면에서 타이타늄실리사이드의 형성 속도를 제어하므로 안정된 저항 분포를 얻을 수 있다.Thus, as shown in FIG. 1C, the titanium nitride 16 deposited on the high frequency coil 15 is sputtered to be deposited simultaneously with the titanium on the substrate 13. At this time, the titanium nitride deposited on the substrate is controlled so that the composition ratio of nitrogen is 50% or less. In this way, a metallic titanium nitride layer 17 having a uniform distribution can be deposited, which can control the formation rate of titanium silicide at the bottom of the contact hole, thereby obtaining a stable resistance distribution.
이 때 고주파 코일(15)에 증착되어 있는 타이타늄나이트라이드(16)가 모두 스퍼터링 되고나면 고주파 코일(15)이 노출되므로, 일정한 타이타늄층의 증착이 이루어지고 난 후에는 다시 타이타늄나이트라이드를 증착하여 고주파 코일(15) 상부에 타이타늄나이트라이드(16)를 보충해 주어야 한다. 고주파 코일(15) 상부에 타이타늄나이트라이드(16)를 보충할 때 역시 고주파 코일(15)에는 고주파를 인가하지 않는다.At this time, since all of the titanium nitride 16 deposited on the high frequency coil 15 is sputtered, the high frequency coil 15 is exposed. After the deposition of a predetermined titanium layer is performed, the titanium nitride is deposited again to obtain a high frequency. Titanium nitride 16 must be replenished on top of the coil 15. When the titanium nitride 16 is replenished on the high frequency coil 15, high frequency is not applied to the high frequency coil 15.
위와 같은 방법으로 금속성 타이타늄나이트라이드가 장벽 금속층으로 증착된 반도체 기판은 열처리 공정을 통하여 안정된 콘택 저항 특성을 나타내게 된다. 열처리시 급속 열처리를 실시하는 경우에는 550 ℃ ∼ 850 ℃의 온도 범위에서 질소 가스를 5 sccm 내지 10 sccm의 속도로 흘려 주면서 5초 내지 100초 동안 실시한다. 또한 퍼니스를 이용한 열처리의 경우 400 ℃ ∼ 800 ℃의 온도 범위에서 10분 내지 120분 동안 실시한다.The semiconductor substrate on which the metallic titanium nitride is deposited as the barrier metal layer by the above method exhibits stable contact resistance through the heat treatment process. In the case of rapid heat treatment during the heat treatment, nitrogen gas is flowed at a rate of 5 sccm to 10 sccm in a temperature range of 550 ° C. to 850 ° C. for 5 seconds to 100 seconds. In addition, the heat treatment using the furnace is carried out for 10 minutes to 120 minutes in the temperature range of 400 ℃ to 800 ℃.
상술한 바와 같이 본 발명에 의하면, 특별한 장치 없이 IMP 챔버의 고주파 코일을 이용하여 균일한 특성의 장벽 금속층을 형성할 수 있다. 따라서, 반도체 소자의 얕은 접합을 가지는 콘택 구조에서 안정된 콘택 저항을 갖는 반도체 소자를 제조할 수 있는 탁월한 효과가 있다.As described above, according to the present invention, a barrier metal layer having a uniform characteristic can be formed using a high frequency coil of an IMP chamber without any special device. Therefore, there is an excellent effect of manufacturing a semiconductor device having a stable contact resistance in a contact structure having a shallow junction of the semiconductor device.
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