KR19990038949A - Variable Capacitor and Resistance Design Method for Monolithic Microwave Integrated Circuits - Google Patents

Abstract

The present invention relates to a variable capacitor and a resistance design method for a monolithic microwave integrated circuit (MMIC), and in series manufacturing and parallel connection to a capacitor using a short circuit and opening of a metal wire using a laser in MMIC fabrication. If mixing to match the target value of the storage capacity after the process, no adjustment is necessary. If the storage capacity is smaller than the target value, short-circuit connected capacitors are shorted to match the target storage capacity value. By providing a layout that opens the connecting metal wires to match the target capacitance value, fine adjustment of the capacitance and resistance is possible, but when the process results in the capacitance and resistance being made to meet the target value, no adjustment is necessary to minimize the adjustment. As much as possible without sacrificing yield There is an effect that it is possible to minimize the coordination of such devices to minimize the production time and process cost.

Description

Variable Capacitor and Resistor Design Method for Monolithic Microwave Integrated Circuits

The present invention relates to a variable capacitor and a resistor design structure for a monolithic microwave integrated circuit (MMIC).

In the MMIC fabrication, the characteristics of the MMIC process vary depending on the run-to-run variation of the fabricated MMIC process. The MMIC characteristics improve the yield after fabrication compared to the hybrid-microwave integrated circuit (Hybrid-MIC). Fine tuning to increase is almost impossible, so there is a limiting disadvantage.

Existing adjustment methods are not known for active elements, and fine adjustments for capacitance and resistance of passive elements are known.

However, the conventional method has a disadvantage in that adjustment is required even when the capacitance and the resistance meet the target values.

1 is a schematic structural diagram of a capacitor capacity control for a conventional MMIC, the capacitors are connected in parallel so that the total capacitance is the sum of the respective capacitance ( If a part of the two electrodes of the capacitor is opened by using a laser to open the metal connection line 10 of the dielectric opening 20, the capacitor of the open part functions as the capacitor 30. This results in a loss of power and thus a reduction in power storage capacity.

However, this method can only be adjusted to reduce the power storage capacity, so the initial total power storage capacity should be laid out to be larger than the target value. Therefore, even if the value of the power storage capacity satisfies the target value as described above, Likewise, there is a disadvantage in that the adjustment of the capacitance is performed by using a laser.

2 is a schematic structural diagram of resistance control for a conventional MMIC, in which resistors 40 are connected in parallel so that the total resistance value is the sum of the inverses of the respective resistance values. If one of the two electrodes of the resistance is opened by using a laser on one side of the dielectric opening 20 to open the metal connection line 10, the function of the open resistance is lost. The value can be reduced.

However, this method is only possible to increase the resistance value by adjusting, so even if the initial total resistance value satisfies the target value, there is a disadvantage in that the resistance value should be adjusted using a laser as described above.

FIG. 3 is a schematic diagram of a structure for designing a conventional resistor for MMIC, and a method of connecting a resistor having an appropriate value by wire bonding according to an error degree of a process.

However, since the method requires wire bonding 50, it is difficult to apply the MMIC that can be measured in a wafer state.

In order to solve the above problems, the present invention uses an adjustment method for opening a metal wire using an existing laser as an adjustment method for adjusting the capacitance and resistance after fabrication of an MMIC capable of evaluating characteristics in a wafer state, and then a fabrication process error. The goal is to provide a layout that does not need to be adjusted if it is not present.

1 is a schematic structural diagram for adjusting the capacitance of a conventional MMIC capacitor;

2 is a schematic structural diagram for adjusting resistance for a conventional MMIC;

3 is a schematic diagram of a design of another form for adjusting resistance for a conventional MMIC;

4 is a circuit and design structure diagram for minimizing capacitor capacitance control for MMIC of the present invention;

5 is an exemplary view of a method of increasing the capacitance by short-circuit using a capacitor laser connected in series when adjusting the capacitance of the MMIC capacitor of the present invention;

Figure 6 is a circuit and design for minimizing the resistance control for the MMIC to which the present invention is applied.

<Description of Symbols for Main Parts of Drawings>

10: metal connection line 20: dielectric opening

30: capacitor (C1, C2, C3) 40: resistance

50: wire bonding 60: parallel connection capacitors (C1p, C2p, C3p)

61 dielectric layer 70 series connected capacitors (C1s, C2s)

80: series connection resistance 90: parallel connection resistance

In order to achieve the above object, the present invention, in the manufacture of the MMIC, using a laser can be used to short-circuit the metal wire to connect the capacitors in series to meet the target capacitance value, and to produce the MMIC metal wire using a laser Capacitors are connected in parallel using a short circuit that can be shorted to match the target capacitive value, and in the manufacturing of the MMIC, a series connection parallel connection to the capacitors is mixed by using a laser that can be short-circuited by a laser. In order to match the values, the short circuit of the metal wires is possible by using a laser to manufacture the MMIC, and the capacitors connected in parallel to the respective resistors are connected in series to match the target capacitance value, and the laser is used to manufacture the MMIC. By using a metal wire short circuit When the resistance is made smaller than the target value, the connecting metal wires of the parallel connected resistors are opened to match the target capacitance value, and in the manufacturing of the MMIC, a series connection and parallel with respect to the resistance are made by using a short circuit of the metal wire using a laser. Mixing the connections to match the target capacitance value.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

4 is a circuit and design structure diagram for minimizing capacitor capacity control for the MMIC of the present invention, in which three capacitors 60 connected in parallel and a capacitor 70 connected in series are connected to the capacitor 60 connected in parallel. It consists of.

In FIG. 4, C1p, C2p, C3p, ... are connected in parallel, and C1s, C2s, ... are connected in series with C1p, C2p, C3p, .... .

As an example of implementation, when the target value is C, the capacitance is adjusted by the laser and the process error contrasts a range of ± 10 at 5% intervals. The parallel capacitor 60 has three values of C1p, C2p, and C3p. The dog and series connected capacitor 70 requires two capacitors, C1s and C2s.

At this time, if the C2s is shorted, the capacitance value is 1.05C, and if the C1s and C2s are shorted at the same time, it is 1.1C. If only C3p is opened, 0.95C is opened, and if the C3p and C2p are opened at the same time, the previous power storage is obtained. The capacity adjusting condition is satisfied and the relation is expressed by the following equation.

At this time, C1p≈0.98C, C2p≈0.059C, C3p≈0.061C, C1s≈23.1C, C2s≈21.0C to be.

5 is an exemplary diagram of a method of increasing a capacitance by short-circuiting using a capacitor laser connected in series when adjusting a capacitor capacitance for an MMIC of the present invention, using a capacitor laser where a metal connection line and a dielectric layer 61 are stacked. The metal connection line 10 is made to diffuse into the dielectric layer.

FIG. 6 is a circuit and design structure diagram for minimizing resistance control for the MMIC to which the present invention is applied. In FIG. 4, R1p, R2p, R3p, ... are connected in parallel, and R1s, R2s, .. ... are connected in series with R1p, R2p, R3p, ..., and capacitors C1s, C2s, ... Is connected.

As an example, when the target value of the resistor is R, the parallel connection resistance 90 is R1p, R2p, and R3p when the target error of the laser contrasts the range of ± 10% at 5% intervals. Three and series connected capacitors 70 require two capacitors, C1s and C2s, for each of R1s and R2s.

In this case, if C2s is shorted, the resistance value is 1.05R, and if C1s and C2s are shorted at the same time, it is 1.1R. If only R3p is opened, 0.95R is opened, and if R3p and R2p are opened at the same time, the resistance control condition is as follows. To be satisfied, and the relationship is expressed by the following equation (2).

Solving the above five equations R1p = R, R2p = 19R, R3p = 17R, R1s = R2s = 0.05R to be.

As described above, the present invention can finely adjust the capacitance and the resistance, but when the result of the process is made to meet the target value, the capacitance is not required, so that the adjustment is not necessary without reducing the yield in a way to minimize the adjustment. It is effective in minimizing the adjustment of passive components as much as possible to minimize manufacturing time and process cost.

Claims (4)

In the variable capacitor and resistance design method for a monolithic microwave integrated circuit (MMIC), A first step of connecting the capacitors in series by using a laser to short-circuit a metal wire in fabricating the MMIC to match a target capacitance value; A second step of connecting the capacitors in parallel by using a laser to short-circuit a metal wire in fabricating the MMIC to match a target capacitance value; A third step of matching a target capacitance value by mixing series connection parallel connection with a capacitor by using a laser to short-circuit a metal wire in manufacturing the MMIC; A fourth step of matching the target capacitance value by serially connecting capacitors connected in parallel to respective resistors by using a laser to short-circuit a metal wire in manufacturing the MMIC; A fifth step of opening the connection metal wires of the resistors connected in parallel to match the target capacitance value when the resistance is made smaller than the target value by using a laser to short-circuit the metal wire in manufacturing the MMIC; In the manufacturing of the MMIC, a monolithic microwave comprising a sixth step of adjusting a target capacitance value by mixing a series connection and a parallel connection with respect to a resistance using a short circuit of a metal wire using a laser. Design method of variable capacitor and resistor for integrated circuit. The method of claim 1, wherein the first step A method for designing a variable capacitor and a resistor for a monolithic microwave integrated circuit, wherein if the capacitance is made smaller than the target value, the capacitor connected in series is shorted. The method of claim 1, wherein the fourth step A method of designing a variable capacitor and a resistor for a monolithic microwave integrated circuit, wherein if the resistor is made larger than the target value, the capacitor is connected to each of the resistors connected in parallel. The method of claim 1, wherein the sixth step is If the target value of the resistor is adjusted, no adjustment is required, and if the resistor is made larger than the target value, the capacitors connected in parallel with each of the resistors connected in parallel are shorted to match the target measuring capacitance value. A method of designing a variable capacitor and a resistor for a monolithic microwave integrated circuit comprising opening a connecting metal line of resistors connected in parallel when the resistance is made smaller than a target value.