KR19990031944A - Head-mounted micro actuator for ultra-high density hard disk drives - Google Patents

Abstract

The present invention relates to a head-mounted micro-driver for an ultra-high density hard disk drive, each group having a plurality of comb-shaped body, n comb-shaped body for each comb-shaped protruding at a predetermined interval, with a predetermined distance from each other A plurality of stators and oppositely fixed stators, each having a plurality of comb-shaped bodies on the left and right around a central body, and n + 1 fingers are formed to protrude at predetermined intervals for each comb-shaped body, so that the fingers of the plurality of stators A head mounted substrate provided in a linearly reciprocating motion between the movable head and a read / write head, the head mounted substrate being provided in the middle of the mover between the plurality of stators, and partly the head mounted substrate and the substrate. Is deposited on the body of the mover adjacent to and the remainder is floated in the air and bonded to the spring structure to have a predetermined elasticity And an anchor for supplying power to the wire, the stator and the mover, supporting the signal wiring, and a signal pad deposited on the anchor.

According to the present invention, by shortening the path of the signal wiring, the resistance and inductance is reduced, the S / N ratio is not lowered due to the influence of noise, and the high speed transmission performance is achieved due to the reduction of the inductance, and the spring is connected by the signal wiring. The design is accurate and the residual stress occurring in the spring structure is prevented.

Description

Head-mounted micro actuator for ultra-high density hard disk drives

The present invention relates to a head mounted micro driver for an ultra high density hard disk drive, and more particularly, to improve the signal line processing of the read / write head to control the ultra high density hard disk drive system (HDD). The present invention relates to a head mounted micro driver for an ultra high density HDD.

Typically, next-generation ultra high density HDD systems require a dual stage servo system with a recording density of 5Gb / in ² or more, and as the recording density increases, the track density increases. In order to achieve precise and high speed control in accordance with the trend of more than 4-5 times, micro driver with a read / write head attached to a dual stage servo system is used.

Such a head-mounted microdriver is attached to the rear of the slider 100 that is floatably mounted, as shown in FIG. 1. To this end, the micro driver 200 is bonded to the base plate 210 is electrically insulated from the rear of the slider 100. The base plate 210 has a plurality of comb-shaped bodies, and n fingers are formed for each comb-shaped body, and a plurality of stators 230 are fixedly installed to face each other at a predetermined distance from each other. In addition, the mover 250, which is injured by maintaining a constant distance from the base plate 210, has a plurality of comb-shaped bodies, and each of the comb-shaped bodies is formed with n + 1 fingers, which are the fingers of each stator 230 The left and right reciprocating motion is installed linearly between the fingers.

On the other hand, the head mounting substrate 220 is installed on the base plate 210 in the center of the mover 250, the read / write head 222 having a head tip is installed on either side. In addition, a spring 260 having a predetermined modulus of elasticity is attached to both ends of the mover 250, and the pair of anchors 270 support the spring 260 while supplying power to the stator 230 and the mover 250. To supply. The anchor 270 is fixedly installed on the base plate 210.

In addition, on the base plate 210, a signal wire 212 for transmitting a read / write signal is formed by a metal deposition process, and a signal pad 214 for connecting the signal wire 212 to the outside is formed. Although not shown in the drawing, the signal pad 214 is connected to a connector provided on the slider 100, and a connector is provided with a signal line connected to a signal amplifier.

When the control signal voltage required for the stator 230 of the micro driver 200 configured as described above is applied, a change in capacitance occurs and a constant electric power in proportion thereto acts to pull the mover 250 toward the stator 230. At this time, since the mover 250 is connected to the spring 260, the mover 250 stops the movement in a state where the electrostatic force and the spring force are in balance with the force. As such, as the electrostatic force is generated between the plurality of stators 230 and the movers 250 present in the micro driver 200, the head mounting substrate 220 to which the read / write head 222 is attached is minutely displaced. Since the head tip is micro-moving. The direction of movement of this head tip travels between the magnetic tracks along the radial direction of the magnetic disk. The head tip reads the information recorded on the magnetic disk, and the signal is transmitted to the signal pad 214 through the signal wiring 212 and sent to the signal amplifier.

However, such a conventional micro driver has a long path through which the read / write signal line is connected to the anchor via the mover and the spring, thereby depositing the signal wiring, which is a metal thin film, on the spring, thereby changing the rigidity of the spring made of silicon. This change in stiffness must be taken into account when designing a micro-driver, and if this is not taken into account, accurate design stiffness cannot be obtained. Also, since the metal thin film and the silicon thin film are displaced, a large residual stress is generated and the spring structure is bent, resulting in design stiffness. In addition, since the signal wiring has a long path, the resistance and inductance are large and the noise is easily affected, thereby reducing the performance of the high-speed transmission, which requires a data transfer rate of several tens of Mb per second. There was a problem.

Accordingly, the present invention has been made in view of the above-mentioned conventional problems, and an object thereof is to improve the arrangement of the signal lines of the read / write head attached to the micro driver, thereby reducing the influence on the operation of the micro driver and reducing the resistance of the signal line. It is to provide a head-mounted micro-driver for ultra-high density HDD that can reduce inductance.

As a means for achieving the above object, the head-mounted micro-driver for the ultra-high density HDD of the present invention has a plurality of comb-shaped bodies for each group, and n fingers are protruded at predetermined intervals for each comb-shaped member, so that predetermined distances from each other are provided. A plurality of stators fixedly opposed to each other at a predetermined distance, and each has a plurality of comb-shaped bodies on the left and right centering on a central body, and n + 1 fingers are formed to protrude at predetermined intervals for each comb-shaped body, A mover installed linearly reciprocally between the fingers of the stator of the stator and a read / write head, a head mounting substrate provided in the middle of the mover between the plurality of stators, and a part of the head mounting. It is deposited on the substrate and the body of the mover adjacent to the head mounting substrate, the other part is floated in the air to have a predetermined elasticity A signal line attached to the ring structure, and supply power to the stator and the mover, and wherein the anchor and for supporting the signal line, the signal consisting of the metal pads deposited on the anchor.

1 is a schematic diagram showing the configuration of a conventional head mounted micro driver for an ultra high density hard disk drive;

Figure 2 is a schematic diagram showing the configuration of a head mounted micro driver for an ultra high density hard disk drive according to the present invention.

<Description of Symbols for Major Parts of Drawings>

100; Slider 200; Micro driver

210; Base plate 212; Signal wiring

214; Signal pad 220; Head mounting board

222; Read / write head 230; Stator

250; Mover 260; spring

270; Anchor 300; Stator

310; Combs 320, 420; Finger

400; Mover 402; Body

410; Comb shape 500; Head Mounting Board

510; Read / write head 600; Signal Wiring

700; Anchor 800; Signal pad

The above and other objects and various advantages of the present invention will become more apparent from the preferred embodiments of the invention described below with reference to the accompanying drawings by those skilled in the art.

Hereinafter, the comb-shaped electrostatic micro actuator according to the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a schematic diagram showing the configuration of a head mounted micro driver for an ultra high density hard disk drive according to an embodiment of the present invention.

As shown, the micro-driver according to the preferred embodiment of the present invention is installed in a plurality of groups of stators 300, that is, four groups of up, down, left and right are opposed to each other at a predetermined distance from each other. Each stator 300 has a plurality of comb-shaped bodies 310, and n fingers 320 are projected downward at predetermined intervals for each comb-shaped body 310.

In addition, the mover 400 has a plurality of comb-shaped bodies 410 on the left and right about the center body 402, and n + 1 fingers 420 are projected upward at predetermined intervals for each comb-shaped body 410. Is formed, it is possible to linearly reciprocate the linear movement between the fingers 320 of the plurality of stator 300.

On the other hand, the head mounting substrate 500 having a read / write head 510 is installed in the middle of the mover 400 between the plurality of stator 300, the head mounting substrate 500 and the head mounting substrate ( A portion of the signal wiring 600 is deposited on the body 402 of the mover 400 adjacent to the 500, and the remaining portion is attached to the spring structure to have a predetermined elasticity by floating in the air, thereby serving as a spring. do. As such, since the signal wiring 600 performs the role of a spring, the spring structure is made of silicon material according to the design consideration, and the spring effect due to the silicon material is added to the spring effect of the signal wiring 600 so that the correct spring is correct. The design becomes possible. In addition, when the signal wire 600 is formed of a metal thin film, the residual stress generated in the spring structure is prevented when the silicon thin film of the spring structure is bonded.

The signal wiring 600 is supported by the anchor 700 for supplying power to the mover 400. Since the signal pad 800 is deposited on the anchor 700, the area occupied by the signal pad 800 is large. In addition, the signal of the read / write head 510 is transmitted to the signal pad 800 directly through the signal line 600. In order to manufacture the signal wiring 600 having such a structure, a micro driver is manufactured by a micro-electric-mechanical system (MEMS) process, and then a read / write head 510 is manufactured on the head mounting substrate 500. Metal deposition is carried out. Thereafter, after the read / write head 510 and the micro driver are manufactured, it is preferable to form a structure in which the mover 400 of the micro driver floats in the air by performing a release process.

The embodiments disclosed above are merely exemplary and not meant to be limiting, and all modifications having equivalent meanings to the claims will be included within the scope of the present invention.

As described above, according to the ultra-high-density HDD head mounted micro driver of the present invention, it is connected to a signal pad directly from the head mounting board without a mover, a spring, etc. as in the prior art, thereby shortening the path of signal wiring. By reducing the inductance and reducing the influence of noise, the S / N ratio is not lowered. Also, the reduction of the inductance can achieve the high-speed transmission performance that requires a data transmission rate of several tens of Mb per second. Accurate spring design is possible, and it has the effect of preventing residual stress occurring in the spring structure

Claims (3)

In the head mounted micro driver for the ultra high density HDD, A plurality of stators having a plurality of comb-shaped bodies for each group, n fingers protruding at predetermined intervals for each comb-shaped body, and fixedly opposed to each other at a predetermined distance from each other; Each comb-shaped member has a plurality of comb-shaped bodies on the left and right around the central body, and n + 1 fingers are formed at predetermined intervals for each comb-shaped body, thereby linearly reciprocating linearly between the fingers of the plurality of stators. With a mobile installed, A head mounting substrate provided with a read / write head in the middle of said mover between said plurality of stators; A part is deposited on the head mounting substrate and the body of the mover adjacent to the head mounting substrate, and the other part is a signal wiring bonded on a spring structure to be floating in the air and have a predetermined elasticity; An anchor for supplying power to the mover and supporting the signal wiring; Ultra-density hard disk drive head-mounted micro-driver, characterized in that the signal pad made of metal deposited on the anchor. The method of claim 1, The signal wiring is a metal thin film, and the spring-like structure is a silicon thin film head-mounted micro-driver for ultra-high density hard disk drive, characterized in that. The method according to claim 1 or 2, The signal wiring is a metal deposition is performed as when manufacturing the read / write head on the head mounting substrate, and after the read / write head and the micro driver is manufactured, the release process is performed for the ultra-high density hard disk drive Head-mounted micro actuator.