KR19990025909A - How to connect medical ultrasound transducer - Google Patents

How to connect medical ultrasound transducer Download PDF

Info

Publication number
KR19990025909A
KR19990025909A KR1019970047763A KR19970047763A KR19990025909A KR 19990025909 A KR19990025909 A KR 19990025909A KR 1019970047763 A KR1019970047763 A KR 1019970047763A KR 19970047763 A KR19970047763 A KR 19970047763A KR 19990025909 A KR19990025909 A KR 19990025909A
Authority
KR
South Korea
Prior art keywords
focusing
curvature
piezoelectric body
acoustic matching
matching layer
Prior art date
Application number
KR1019970047763A
Other languages
Korean (ko)
Other versions
KR100242625B1 (en
Inventor
김성수
Original Assignee
한진호
대원전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한진호, 대원전자 주식회사 filed Critical 한진호
Priority to KR1019970047763A priority Critical patent/KR100242625B1/en
Publication of KR19990025909A publication Critical patent/KR19990025909A/en
Application granted granted Critical
Publication of KR100242625B1 publication Critical patent/KR100242625B1/en

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/13Tomography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • G01S15/89Sonar systems specially adapted for specific applications for mapping or imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52046Techniques for image enhancement involving transmitter or receiver
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52053Display arrangements
    • G01S7/52057Cathode ray tube displays
    • G01S7/5206Two-dimensional coordinated display of distance and direction; B-scan display

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Gynecology & Obstetrics (AREA)
  • Mechanical Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

본 발명은 인체 내부의 단면을 초음파를 이용하여 영상화하는 장치에 사용되는 초음파 진단기용 변환기에서 폭방향으로의 집속방식을 2중포커싱(focusing)으로 초점을 맞출 수 있게 하여 제작공정의 편의성과 고감도의 변환기를 제공할 수 있도록 한 것이다.The present invention enables the focusing method in the width direction in the ultrasonic diagnostic transducer used in the apparatus for imaging the cross section of the human body using the ultrasonic wave by focusing by double focusing (convenience and high sensitivity) of the manufacturing process. It is intended to provide a converter.

즉, 압전체(1)의 곡률과 제 1,2차음향정합층(2)(3)의 곡률이 일치되게 형성하고 제 2차음향정합층(3)위에 인체에 비해 음속이 작은 음향렌즈(4)를 형성시켜 폭방향으로 굴절에 의한 2중포커싱으로 초점을 맞출 수 있게 한 의료용 초음파 변환기의 집속방법이다.That is, the acoustic lens 4 is formed so that the curvature of the piezoelectric body 1 and the curvatures of the first and second order acoustic matching layers 2 and 3 match and the sound velocity of the piezoelectric body 1 is lower than that of the human body. Is a focusing method for medical ultrasound transducers which can be focused by double focusing by refraction in the width direction.

Description

의료용 초음파 변환기의 집속방법Focusing method of medical ultrasound transducer

본 발명은 인체 내부의 단면을 초음파를 이용하여 영상화하는 장치에 사용되는 초음파 진단기용 변환기에서 폭방향으로의 집속방식을 2중포커싱(focusing)으로 초점을 맞출 수 있게 하여 제작공정의 편의성과 고감도의 변환기를 제공할 수 있도록 한 것이다.The present invention enables the focusing method in the width direction in the ultrasonic diagnostic transducer used in the apparatus for imaging the cross section of the human body using the ultrasonic wave by focusing by double focusing (convenience and high sensitivity) of the manufacturing process. It is intended to provide a converter.

종래에 이 분야의 변환기는 다음과 같은 여러방식이 적용되고 있다.Conventional converters in this field have been applied in the following ways.

첫째 : 폭 방향으로의 음파의 집속을 위해서 음파를 발생시키는 압전체의 곡률을 이용한 방식으로서 압전체의 곡률을 음파집속을 하기 위한 지점에 맞추고 제 1차음향정합층(matching layer)을 평면으로 형성시키고 여기에 제 2차정합층을 파장의 1/4로 만들어서 제품을 제작한다(도 3(가) 참조)First: This method uses the curvature of the piezoelectric material to generate sound waves for focusing sound waves in the width direction, aligning the curvature of the piezoelectric material to a point for focusing sound waves, and forming the first acoustic matching layer (plane) To make a product by making the second matching layer at 1/4 of the wavelength (see Fig. 3 (a)).

이 기술은 압전체의 곡률을 이용하여 음파를 집속하기 때문에 음파를 효과적으로 집속할 수 있고 압전체의 유효진동면적이 넓기 때문에 변환기의 감도가 좋아지는 이점이 있는 대신에 제 1차음향정합층의 두께를 정확하게 조정할 수 없어서 변환기의 대역폭이 좁아지고 펄스의 폭이 넓어져서 이미지(image)에서의 축방향 해상도가 많이 떨어지는 단점이 있고, 압전체를 각각의 요소(clement)로 분리하기 위하여 절단(dicing)할 경우 압전체의 곡률이 크기 때문에 절단날과 압전체가 쉽게 파손되는 제작공정상의 단점이 있다.This technology focuses the sound waves using the curvature of the piezoelectric body, so that the sound waves can be effectively focused and the effective vibration area of the piezoelectric body has the advantage of improving the sensitivity of the transducer. Instead, it accurately adjusts the thickness of the first acoustic matching layer. As the bandwidth of the transducer is narrowed and the width of pulse is widened, the axial resolution in the image is greatly reduced, and when the piezoelectric body is cut to separate each element, Since the curvature is large, there is a disadvantage in the manufacturing process that the cutting blade and the piezoelectric body easily break.

둘째 : 음향렌즈를 마지막 음향정합층에 사용하여 음파의 굴절을 이용한 음파집속방식이 있다.Secondly, there is a sonic focusing method using the refraction of sound waves using an acoustic lens for the last acoustic matching layer.

음속이 다른 매질을 음파가 진행할 경우 입사각과 굴절각이 음속의 비에 따라 달라지게 되므로 마지막 음향정합층에 원하는 음파집속부위에 맞는 음향렌즈의 곡률을 형성시켜서 음파를 집속시킨다(도 3(나)참조)When the sound waves proceed in a medium having different sound speeds, the incident angle and the refraction angle vary depending on the ratio of the speeds of sound, thereby converging the sound waves by forming a curvature of the acoustic lens suitable for the desired sound wave focusing region in the final acoustic matching layer (see FIG. 3 (b)). )

이 방식은 압전체가 평면이므로 음향정합층을 만들거나 압전체를 제작하는데는 용이하지만 압전체의 유효진동면적이 압전체의 곡률을 이용한 것에 비해 작고 음파가 음향렌즈층을 투과하면서 심한 감쇠가 발생하기 때문에 변환기의 감도가 떨어지는 단점이 있다.This method is easy to make an acoustic matching layer or a piezoelectric material because the piezoelectric plane is flat, but the effective vibration area of the piezoelectric body is smaller than the curvature of the piezoelectric material, and the sound wave penetrates the acoustic lens layer, causing severe attenuation. There is a disadvantage of low sensitivity.

셋째 : 압전체의 곡률과 음향정합층의 곡률을 일치시키고 제 3차음향정합층(3')을 인체의 음속과 같은 음속을 가지는 물질로 형성시켜서 음파가 굴절하지 않도록 하여 압전체의 곡률중심에 음파가 집속되게한 방식이 있다.(도 3(다)참조)Third: Match the curvature of the piezoelectric material with the curvature of the acoustic matching layer, and form the third acoustic matching layer 3 'made of a material having the same sound velocity as the sound velocity of the human body so that the sound wave is not refracted so that the sound wave is in the center of curvature of the piezoelectric body. There is a way to focus (see Figure 3 (c)).

이는 매칭층의 두께를 조정할 수 있어서 축방향의 해상도를 양호하게 할 수 있는 대신 압전체의 곡률이 크므로 절단시(dicing)에 절단날(brade)이 깊이 들어가야 하므로 날과 압전체가 쉽게 파손되는 제작 공정상의 단점이 있다.This is because the thickness of the matching layer can be adjusted to improve the axial resolution, but the curvature of the piezoelectric material is large, so that a cutting blade must enter deeply during cutting, so that the blade and the piezoelectric body are easily broken. There are disadvantages.

본 발명은 이러한 문제점을 해결하기 위하여 압전체의 곡률과 음향정합층의 곡률을 일치시켜 이미지의 축방향 해상도를 좋게 하고 실제 폭방향의 음파집속점에서부터 먼거리에 집속되도록 곡률을 형성시키고 여기서 발생되는 집속거리의 불일치를 보완하기 위해 제 2차 음향정합층 위에 음향렌즈(Acoustic Lens)를 형성시켜 굴절에 의한 집속방식으로 집속거리를 원하는 위치로 맞출 수 있게 함으로서 압전체의 곡률을 작게 할 수 있어 절단 깊이를 낮게 하고 고감도 변환기를 얻을 수 있도록 한 것이다.In order to solve the problem, the present invention matches the curvature of the piezoelectric body with the curvature of the acoustic matching layer to improve the axial resolution of the image, and to form a curvature so as to focus at a long distance from the sonic focus point in the actual width direction and the focusing distance generated therefrom. In order to compensate for the mismatch, the acoustic lens is formed on the second acoustic matching layer, and the curvature of the piezoelectric body can be made small by adjusting the focusing distance to a desired position by the focusing method by refraction, thereby reducing the cutting depth. And high sensitivity converter.

도 1은 본 발명에 따른 초음파 변화기 단면도.1 is a cross-sectional view of the ultrasonic transducer according to the present invention.

도 2는 본 발명의 요부확대 단면도.Figure 2 is an enlarged cross-sectional view of the main part of the present invention.

도 3 (가)(나)(다)는 종래의 집속방법을 나타낸 단면도Figure 3 (a) (b) (c) is a cross-sectional view showing a conventional focusing method.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 압전체, 2 : 제 1차 정합층, 3 : 제 2차 정합층, 4 : 음향렌즈1 piezoelectric material 2 primary matching layer 3 secondary matching layer 4 acoustic lens

이하 본 발명을 더욱 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail.

도 1은 본 발명에 따른 초음파 변환기를 나타낸 것으로, 곡률형태로 만든 압전체(1)와, 여기에 에폭시와 필러를 적당량 혼합하여 만든 제 1차음향 정합층(2)을 형성시키되 음향정합층의 두께를 일정하게 설정하기 위해 곡면연마를 하고 여기에 같은 방법으로 제 2차음향정합층(3)을 제 1차음향정합층(2)위에 형성시키고 압전체(1)를 각각의 요소로 분리하기 위하여 절단한 다음 각각의 요소에 전기신호의 입출력을 위해 인쇄회로기판[PCB](5)과 압전체(1)를 가는 도선(6)으로 연결한다.1 shows an ultrasonic transducer according to the present invention, wherein a piezoelectric body 1 made of a curvature form and a first acoustic matching layer 2 made by mixing an appropriate amount of epoxy and a filler are formed therein, but the thickness of the acoustic matching layer is shown. The surface polishing is carried out in order to set a constant and the second acoustic matching layer 3 is formed on the first acoustic matching layer 2 in the same manner, and the piezoelectric body 1 is cut to separate the elements. Then, the printed circuit board [PCB] 5 and the piezoelectric element 1 are connected by thin wires 6 to input and output electric signals to each element.

이어서 후면 방향의 음파 흡수를 위하여 에폭시와 필러를 적절하게 배합하여 압전체(1) 후면에 후면층(7)을 형성하고 동박(8)을 이용하여 초음파변환기의 양쪽을 감싼 뒤에 제 2차음향정합층(3)위에 인체의 음속(Cw)에 비해 음속(Cm)이 작은 음향렌즈(4)를 형성시켜서 된 것이다.Subsequently, an epoxy and a filler are appropriately combined to form a rear layer 7 on the back of the piezoelectric body 1 and the both sides of the ultrasonic transducer using the copper foil 8 are wrapped in the second acoustic matching layer for the absorption of sound waves in the rear direction. (3) is formed by forming an acoustic lens 4 whose sound velocity Cm is smaller than the sound velocity Cw of the human body.

도 2는 상기한 본 발명의 요부확대도를 나타낸 것으로서, 음향 정합층(2)(3)과 압전체(1)의 곡률(R)과 일치시킬 수 있게 되므로 음향정합층(2)(3)의 형성이 용이하여 이미지(image)의 축방향해상도를 향상시킬 수 있게 된다.FIG. 2 is an enlarged view of the main part of the present invention, and it is possible to match the curvature R of the acoustic matching layers 2 and 3 and the piezoelectric body 1, so that the acoustic matching layers 2 and 3 are It is easy to form so that the axial resolution of an image can be improved.

그리고 압전체(1)를 각각의 요소로 분리하기 위해 절단기(Dicnig Saw)로 절단할 때 실제폭방향의 음파집속점에서부터 먼거리에 접속되도록 압전체(1)의 곡률이 형성되어 있고 여기서 발생되는 집속거리의 불일치를 인체의 음속(Cw)에 비해 음속(Cm)이 작은 음향렌즈(4)에서 폭방향으로 굴절에 의한 2중포커싱(focusing)으로 초점을 맞추게 되므로 집속거리를 원하는 위치로 맞출 수 있게 된다.The curvature of the piezoelectric element 1 is formed so that the piezoelectric element 1 is connected to a long distance from the sound wave focusing point in the actual width direction when cutting with a cutter to separate each element into individual elements. The inconsistency is focused by the double focusing due to refraction in the width direction in the acoustic lens 4 having a smaller sound speed Cm than the sound speed Cw of the human body, so that the focusing distance can be adjusted to a desired position.

이렇게 하여 압전체(1)의 곡률을 작게 할 수 있어서 절단깊이가 낮게 유지되므로 절단날과 압전체가 절단과정에서 파손되는 것을 방지할 수 있게 된다.In this way, the curvature of the piezoelectric body 1 can be made small, so that the cutting depth is kept low, so that the cutting blade and the piezoelectric body can be prevented from being broken during the cutting process.

또한, 음향렌즈(4)에 의한 집속방식으로부터 발생되는 감도저하문제도 압전체(1)의 곡률에 의한 기계적 접속방식을 유지하기 때문에 음향정합층 형성으로 인한 이득과 함께 고감도 변환기를 제작할 수 있게 되는 것이다.In addition, the sensitivity reduction problem caused by the focusing method by the acoustic lens 4 also maintains the mechanical connection method due to the curvature of the piezoelectric body 1, thereby making it possible to manufacture a high-sensitivity converter with the gain due to the formation of the acoustic matching layer. .

이와 같이 본 발명은 초음파 진단기용 변환기에서 폭방향으로의 집속방식을 2중포커싱으로 초점을 맞출 수 있는 방법으로 제작공정의 편의성과 축방향해상도가 향상된 고감도의 초음파변환기를 얻을 수 있는 단점이 있는 것이다.As described above, the present invention has a disadvantage in that a high-sensitivity ultrasonic transducer with improved convenience and axial resolution of the manufacturing process may be obtained by focusing the bidirectional focusing method in the width direction in the ultrasonic diagnostic transducer. .

Claims (1)

압전체(1)의 곡률과 제 1,2차음향정합층(2)(3)의 곡률이 일치되게 형성하고 제 2차음향정합층(3)위에 인체의 음속(Cw)에 비해 음속(Cm)이 작은 음향렌즈(4)를 형성시켜 폭방향으로 굴절에 의한 2중포커싱으로 초점을 맞출 수 있게 한 의료용 초음파 변환기의 집속방법.The curvature of the piezoelectric body 1 and the curvatures of the first and second order acoustic matching layers 2 and 3 are coincident, and the sound speed Cm is higher than the sound speed Cw of the human body on the second acoustic matching layer 3. A method of focusing a medical ultrasound transducer in which a small acoustic lens (4) is formed to focus by double focusing by refraction in the width direction.
KR1019970047763A 1997-09-13 1997-09-13 Ultrasonic focusing apparatus of ultrasonic converter for medical KR100242625B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019970047763A KR100242625B1 (en) 1997-09-13 1997-09-13 Ultrasonic focusing apparatus of ultrasonic converter for medical

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970047763A KR100242625B1 (en) 1997-09-13 1997-09-13 Ultrasonic focusing apparatus of ultrasonic converter for medical

Publications (2)

Publication Number Publication Date
KR19990025909A true KR19990025909A (en) 1999-04-06
KR100242625B1 KR100242625B1 (en) 2000-02-01

Family

ID=19521423

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970047763A KR100242625B1 (en) 1997-09-13 1997-09-13 Ultrasonic focusing apparatus of ultrasonic converter for medical

Country Status (1)

Country Link
KR (1) KR100242625B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100419806B1 (en) * 2001-12-31 2004-02-21 주식회사 메디슨 Synthetic aperture focusing method for ultrasound imaging based on planar waves
KR101533400B1 (en) * 2013-10-24 2015-07-03 알피니언메디칼시스템 주식회사 High Intensity Focused Ultrasound Treatment Head with Adjustable Focal Length

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100419806B1 (en) * 2001-12-31 2004-02-21 주식회사 메디슨 Synthetic aperture focusing method for ultrasound imaging based on planar waves
KR101533400B1 (en) * 2013-10-24 2015-07-03 알피니언메디칼시스템 주식회사 High Intensity Focused Ultrasound Treatment Head with Adjustable Focal Length

Also Published As

Publication number Publication date
KR100242625B1 (en) 2000-02-01

Similar Documents

Publication Publication Date Title
US4385255A (en) Linear array ultrasonic transducer
JP3950755B2 (en) Ultrasonic transducers that increase the resolution of imaging systems
US5916169A (en) Phased array transducer design and method for manufacture thereof
JP2960093B2 (en) Ultrasonic array and its processing method and apparatus
JPS63177700A (en) Ultrasonic probe
KR102569596B1 (en) high frequency ultrasonic transducers
JP2002045357A (en) Ultrasonic diagnosis device
JPH0360491B2 (en)
JPH09238399A (en) Ultrasonic wave probe and its manufacture
JPH10507600A (en) Ultrasonic transducer array with snake-shaped elevation focus
US9839411B2 (en) Ultrasound diagnostic apparatus probe having laminated piezoelectric layers oriented at different angles
JP2005198261A (en) Ultrasonic probe and ultrasonic diagnostic device
KR19990025909A (en) How to connect medical ultrasound transducer
CA1145449A (en) Conical transducer ultrasonic scanner
JP4769127B2 (en) Ultrasonic probe and ultrasonic probe manufacturing method
JP3358907B2 (en) Array type ultrasonic probe
JP3429696B2 (en) Ultrasonic probe
JPS59174150A (en) Multi-focus ultrasonic diagnostic apparatus
JP3003489B2 (en) Ultrasonic probe
JP3325305B2 (en) Ultrasonic probe
JPH11146492A (en) Ultrasonic probe
WO2023019554A1 (en) Multi-frequency ultrasonic transducer, ultrasonic imaging system having same, and ultrasonic imaging method
JP3181949B2 (en) Ultrasonic vibrator and method of manufacturing ultrasonic vibrator
US20240118130A1 (en) Transducer and ultrasonic probe having the same
JP2002152890A (en) Ultrasonic wave probe

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20121002

Year of fee payment: 14

FPAY Annual fee payment

Payment date: 20130911

Year of fee payment: 15

FPAY Annual fee payment

Payment date: 20141103

Year of fee payment: 16

FPAY Annual fee payment

Payment date: 20151020

Year of fee payment: 17

FPAY Annual fee payment

Payment date: 20161026

Year of fee payment: 18

EXPY Expiration of term