KR19990012916A

KR19990012916A - Plasmer carburizing heat treatment apparatus and method

Info

Publication number: KR19990012916A
Application number: KR1019970036495A
Authority: KR
Inventors: 유영석
Original assignee: 토니헬샴; 볼보건설기계코리아 주식회사
Priority date: 1997-07-31
Filing date: 1997-07-31
Publication date: 1999-02-25

Abstract

본 발명은 플래즈머 침탄 열처리장치(Plasma Carburizing Furnace) 및 그 방법에 관한 것으로, 특히 피처리물을 플라즈마 침탄과 후속열처리를 연속적으로 수행할 수 있는 플라즈마 침탄 열처리장치에 있어서, 내부의 압력을 진공으로 만드는 진공시스템과, 상기 피처리물의 침탄처리에 적합한 가스를 내부로 공급하는 침탄가스공급라인과, 상기 피처리물을 가열하기 위한 히터장치와, 내부에 플라즈마를 발생하여 침탄작용을 하는 전류공급장치와, 상기 피처리물을 다음공정으로 이송하는 이송장치가 내장되는 플라즈마 침탄실과: 상기 플라즈마 침탄실과 일체로 형성되면서 내부에 질소가스를 지속적으로 공급할 수 있는 질소공급장치, 하부에 상기 피처리물을 열처리하기 위한 냉각조가 형성되는 냉각실과: 상기 플라즈마 침탄실과 냉각실 사이를 차단하는 차단벽에 개폐 가능하도록형성되는 중간차단장치를 구비한 것을 특징으로 하는 플라즈마 침탄 열처리장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma carburizing furnace and a method thereof. In particular, in a plasma carburizing apparatus capable of continuously performing plasma carburization and subsequent heat treatment of a workpiece, a pressure inside the vacuum is applied to a vacuum. A vacuum system to make, a carburizing gas supply line for supplying a gas suitable for carburizing of the target object therein, a heater device for heating the target object, and a current supplying device for generating a plasma inside the carburizing operation And a plasma carburizing chamber having a transfer device for transferring the object to the next step; a nitrogen supply device capable of continuously supplying nitrogen gas therein while being integrally formed with the plasma carburizing chamber; A cooling chamber in which a cooling tank for heat treatment is formed: blocking the plasma carburizing chamber and the cooling chamber; It relates to a plasma carburizing heat treatment apparatus comprising an intermediate blocking device that is formed to be opened and closed on the blocking wall.

또한 본 발명은 피처리물을 플라즈마 침탄과 후속열처리를 연속적으로 수행할 수 있는 플라즈마 침탄 열처리방법에 있어서, 피처리물을 플라즈마 침탄실에 넣고 상기 피처리물의 표면을 클리닝하는 단계: 상기 클리닝한 피처리물을 플라즈마 침탄 및 확산하는 단계: 상기 피처리물이 플라즈마 침탄실에서 침탄 및 확산되는 동안 질소 공급라인을 통해 질소를 공급하여 냉각실을 상압의 질소분위기로 만드는 단계와; 피처리물의 침탄 및 확산이 완료되면 진공시스템의 작동을 멈추고 침탄가스 공급라인을 통해 질소를 공급하여 플라즈마 침탄실을 상압의 질소분위기로 만드는 단계와: 차단도어를 개방하여 플라즈마 침탄실과 냉각실을 서로 같은 상압의 질소 분위기로 만드는 단계와: 침탄 및 확산이 완료된 피처리물을 상압의 질소 분위기에서 이송장치를 이용하여 개방된 침탄도어외 냉각실을 통해 냉각조의 냉매에 담금질하는 단계로 구성되는 것을 특징으로 하는 플라즈마 침탄 열처리방법에 관한 것이다.In another aspect, the present invention provides a plasma carburizing heat treatment method for continuously performing plasma carburizing and subsequent heat treatment of a workpiece, placing the workpiece in a plasma carburizing chamber and cleaning the surface of the workpiece: the cleaned blood Plasma carburizing and diffusing a treatment: supplying nitrogen through a nitrogen supply line while the workpiece is carburized and diffused in a plasma carburizing chamber to make the cooling chamber an atmospheric nitrogen atmosphere; When the carburizing and diffusion of the processed object is completed, the vacuum system is stopped and nitrogen is supplied through the carburizing gas supply line to make the plasma carburizing chamber into an atmospheric nitrogen atmosphere: opening the blocking door to open the plasma carburizing chamber and the cooling chamber to each other. The step of making a nitrogen atmosphere of the same atmospheric pressure: and the step of quenching and diffusion of the workpiece to be quenched in the refrigerant of the cooling tank through a cooling chamber other than the open carburizing door using a transfer device in a nitrogen atmosphere of atmospheric pressure. It relates to a plasma carburizing heat treatment method.

Description

Plasmer carburizing heat treatment apparatus and method

본 발명은 플래즈머 침탄 열처리장치(Plasma Carburizing Furnace) 및 그 방법에 관한 것으로, 특히 플래즈머침탄실과 냉각실, 냉각조가 하나의 체임버내에 통합 설치되고, 플래즈머침탄실과 냉각실이 차단판에 의해 격리되도록 구성되어 플래즈머침탄실에서 침탄된 침탄소재가 개방된 차단판을 통해 질소분위기하의 냉각실을 거쳐 냉각조로 이송됨으로써 침탄소재의 탈탄 및 산화를 방지할 수 있는 플래즈머 침탄 열처리장치(Plasma Carburizing Furnace) 및 그 방법에 관한 것이다.The present invention relates to a plasma carburizing furnace and a method thereof. In particular, the plasma carburizing chamber, the cooling chamber, and the cooling tank are integrally installed in one chamber, and the plasma carburizing chamber and the cooling chamber are separated by a blocking plate. Plasma Carburizing Furnace which is designed to prevent decarburization and oxidation of carburized carbon by transporting carburized carbon carburized in the plasma carburizing chamber to a cooling tank through a cooling chamber under a nitrogen atmosphere. ) And methods thereof.

종래의 플래즈머 침탄로는 도1에 도시한 바와같이 침탄실(11)과 냉각조(12)가 별개의 체임버(Chamber)로 구성되어 있고, 이때 침탄실과 냉각조 사이에는 이송기구(23)가 설치되어 있다.As shown in FIG. 1, the conventional plasma carburizing furnace comprises a carburizing chamber 11 and a cooling chamber 12 having separate chambers, and a transfer mechanism 23 is provided between the carburizing chamber and the cooling chamber. It is installed.

따라서 침탄실(11)에서 침탄이 완료된 침탄소재는 이송기구(23)에 매달려서 냉각조(12)로 이송되어 냉각매질(13)에 담기게 된다.Therefore, the carburized carbon material in which carburization is completed in the carburizing chamber 11 is suspended in the transport mechanism 23 and transferred to the cooling tank 12 to be contained in the cooling medium 13.

이때 플래즈머침탄실(11)에서 침탄된 고온의 침탄소재는 이송기구(23)에 의해 냉각조(12)로 이동하는 동안 대기에 노출되고, 이로써 그 표면이 공기에 의해 산화 또는 탈탄반응을 일으키게 된다.At this time, the high temperature carburized material carburized in the plasma carburizing chamber 11 is exposed to the atmosphere while moving to the cooling tank 12 by the transfer mechanism 23, thereby causing the surface to be oxidized or decarburized by air. do.

이로 인해 침탄소재는 표면경도가 감소되고, 이로써 내마모성이 현저히 저하되는 문제점이 발생되었다.As a result, the carbonaceous material is reduced in surface hardness, thereby causing a problem of significantly lowered wear resistance.

본 발명은 플래즈머침탄실에서 침탄된 침탄소재가 질소분위기하의 냉각실을 통해 냉각조로 이송됨으로써 침탄소재의 탈탄 및 산화방지할 수 있는 플래즈머침탄열처리장치(Plasma Carburizing Furnace) 및 그 방법을 제공함에 그 목적이 있다.The present invention provides a plasma carburizing furnace and a method for preventing carburizing and oxidation of the carburized carbon by transporting the carburized carbon carburized in the plasma carburized chamber through a cooling chamber under a nitrogen atmosphere. The purpose is.

도1은 종래의 플래즈머 침탄 열처리장치를 나타내는 개략도,1 is a schematic view showing a conventional plasma carburizing heat treatment apparatus;

도2은 본 발명에 따른 플래즈머 침탄 열처리장치를 나타내는 개략도이다.Figure 2 is a schematic diagram showing a plasma carburizing heat treatment apparatus according to the present invention.

도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings

1: 플래즈머침탄실 2: 냉각실 3: 차단도어 4: 히터 5: 냉각조 6: 이동롤러 7: 진공시스템 8: 전원 9: 질소공급라인 10: 침탄가스공급라인 11: 침탄실 12: 냉각조 13: 냉각매질 14: 진공배기기구 15: 교반기 16: 적치대 19: 콘트롤박스 21: 가스공급기구 20: 침탄소재 23: 이송기구 24: 히터 25: 적치대DESCRIPTION OF SYMBOLS 1: Plasma carburizing chamber 2: Cooling chamber 3: Blocking door 4: Heater 5: Cooling tank 6: Transfer roller 7: Vacuum system 8: Power supply 9: Nitrogen supply line 10: Carburizing gas supply line 11: Carburizing chamber 12: Cooling Article 13: Cooling medium 14: Vacuum exhaust mechanism 15: Agitator 16: Loading rack 19: Control box 21: Gas supply mechanism 20: Carburizing material 23: Transfer mechanism 24: Heater 25: Loading rack

상기한 목적을 달성하기 위하여 본 발명은 피처리물을 플라즈마 침탄과 후속열처리를 연속적으로 수행할 수 있는 플라즈마 침탄 열처리장치에 있어서, 내부의 압력을 진공으로 만드는 진공시스템과, 상기 피처리물의 침탄처리에 적합한 가스를 내부로 공급하는 침탄가스공급라인과, 상기 피처리물을 가열하기 위한 히터장치와, 내부에 플라즈마를 발생하여 침탄작용을 하는 전류공급장치와, 상기 피처리물을 다음공정으로 이송하는 이송장치가 내장되는 플라즈마 침탄실과: 상기 플라즈마 침탄실과 일체로 형성되면서 내부에 질소가스를 지속적으로 공급할 수 있는 질소공급장치, 하부에 상기 피처리물을 열처리하기 위한 냉각조가 형성되는 냉각실과: 상기 플라즈마 침탄실과 냉각실 사이를 차단하는 차단벽에 개폐 가능하도록형성되는 중간차단장치를 구비한 것을 특징으로 하는 플라즈마 침탄 열처리장치을 제공한다.In order to achieve the above object, the present invention provides a plasma carburizing heat treatment apparatus capable of continuously performing carburizing and subsequent heat treatment of a workpiece, comprising: a vacuum system for making the pressure inside the vacuum and a carburizing treatment of the workpiece A carburizing gas supply line for supplying a gas suitable for the inside, a heater device for heating the object, a current supply device for carburizing by generating a plasma therein, and transferring the object to the next step And a plasma carburizing chamber in which a conveying device is incorporated, the nitrogen supplying device being formed integrally with the plasma carburizing chamber and continuously supplying nitrogen gas therein, and a cooling chamber having a cooling tank formed therein for heat treating the object. Intermediate cut-off length formed to be open and close on the barrier wall blocking the plasma carburizing chamber and the cooling chamber It provides a plasma carburizing heat treatment jangchieul, characterized in that comprising a.

또한 본 발명은 피처리물을 플라즈마 침탄과 후속열처리를 연속적으로 수행할 수 있는 플라즈마 침탄 열처리방법에 있어서, 피처리물을 플라즈마 침탄실에 넣고 상기 피처리물의 표면을 클리닝하는 단계: 상기 클리닝한 피처리물을 플라즈마 침탄 및 확산하는 단계: 상기 피처리물이 플라즈마 침탄실에서 침탄 및 확산되는 동안 질소 공급라인을 통해 질소를 공급하여 냉각실을 상압의 질소분위기로 만드는 단계와; 피처리물의 침탄 및 확산이 완료되면 진공시스템의 작동을 멈추고 침탄가스 공급라인을 통해 질소를 공급하여 플라즈마 침탄실을 상압의 질소분위기로 만드는 단계와: 차단도어를 개방하여 플라즈마 침탄실과 냉각실을 서로 같은 상압의 질소 분위기로 만드는 단계와: 침탄 및 확산이 완료된 피처리물을 상압의 질소 분위기에서 이송장치를 이용하여 개방된 침탄도어외 냉각실을 통해 냉각조의 냉매에 담금질하는 단계로 구성되는 것을 특징으로 하는 플라즈마 침탄 열처리방법을 제공한다.In another aspect, the present invention provides a plasma carburizing heat treatment method for continuously performing plasma carburizing and subsequent heat treatment of a workpiece, placing the workpiece in a plasma carburizing chamber and cleaning the surface of the workpiece: the cleaned blood Plasma carburizing and diffusing a treatment: supplying nitrogen through a nitrogen supply line while the workpiece is carburized and diffused in a plasma carburizing chamber to make the cooling chamber an atmospheric nitrogen atmosphere; When the carburizing and diffusion of the processed object is completed, the vacuum system is stopped and nitrogen is supplied through the carburizing gas supply line to make the plasma carburizing chamber into an atmospheric nitrogen atmosphere: opening the blocking door to open the plasma carburizing chamber and the cooling chamber to each other. The step of making a nitrogen atmosphere of the same atmospheric pressure: and the step of quenching and diffusion of the workpiece to be quenched in the refrigerant of the cooling tank through a cooling chamber other than the open carburizing door using a transfer device in a nitrogen atmosphere of atmospheric pressure. A plasma carburizing heat treatment method is provided.

도면을 참조하여 본 발명을 상세히 설명한다.The present invention will be described in detail with reference to the drawings.

도2는 본 발명에 따른 플래즈머침탄 열처리장치를 나타내는 개략도이다.Figure 2 is a schematic diagram showing a plasma carburizing heat treatment apparatus according to the present invention.

먼저 본 발명에 따른 플래즈머열처리장치는 플래즈머침탄실(1)과 냉각실(2), 냉각조(5)가 외부와 차단된 하나의 체임버내에 설치되어 있다.First, the plasma heat treatment apparatus according to the present invention is installed in one chamber in which the plasma carburizing chamber 1, the cooling chamber 2, and the cooling tank 5 are isolated from the outside.

즉, 플래즈머침탄실(1)과 냉각실(2)은 자동 개폐되는 차단도어(3)에 의해 격리되어 있고, 냉각실의 하부에는 냉각매질을 담겨 있는 냉각조(5)가 형성되어 있다.That is, the plasmmer carburizing chamber 1 and the cooling chamber 2 are isolated by the blocking door 3 which is automatically opened and closed, and a cooling tank 5 containing a cooling medium is formed in the lower part of the cooling chamber.

그리고 플래즈머침탄실(1)에는 플래즈머상태를 조성하는 히터(4)가 설치되어 있고, 이 히터(4) 내에 침탄소재(20)가 놓일 적치대(25)가 설치되어 있고, 상부를 통해 침탄가스공급라인(10)이 취부되어 있다.The plasma carburizing chamber 1 is provided with a heater 4 for creating a plasmmer state, and a mounting base 25 in which the carbonaceous material 20 is to be placed is installed in the heater 4, The carburizing gas supply line 10 is mounted.

이때 플래즈머침탄실(1)에는 침탄이 완료된 침탄소재(20)를 개방된 차단도어(3)를 통해 냉각실(2)로 이송시키는 이동롤러(6)가 취부되어 있으며, 하부에 진공시스템(7)이 설치되어 있다.At this time, the plasma carburizing chamber 1 is provided with a moving roller 6 for transferring the carburized carbon material 20 having been carburized to the cooling chamber 2 through an open blocking door 3, and at the bottom thereof, a vacuum system ( 7) is installed.

한편 냉각조(5)의 상부에 형성되는 냉각실(2)에는 차단도어(3)를 통해 내장되는 침탄소재(20)의 탈탄 및 산화를 방지하기 위하여 질소분위기를 만드는데, 이때 질소를 공급하기 위하여 상부에 질소공급라인(9)이 취부되어 있다.Meanwhile, in the cooling chamber 2 formed at the upper portion of the cooling tank 5, a nitrogen atmosphere is made to prevent decarburization and oxidation of the carbonaceous material 20 embedded through the blocking door 3, in order to supply nitrogen. A nitrogen supply line 9 is mounted on the top.

그리고 냉각조(5)에 사용되는 냉매는 진공용 냉각오일이 아닌 일반 냉각오일을 사용하여도 무방하다.The refrigerant used in the cooling tank 5 may be a general cooling oil instead of a vacuum cooling oil.

이하 실시예를 통해 본 발명을 더욱 상세히 설명한다.The present invention will be described in more detail with reference to the following examples.

침탄소재(20)를 플래즈머침탄실(1)에 넣고 진공시스템(7)을 이용하여 침탄실(1)내의 압력을 10^-2Torr이하의 진공으로 조절한 후, 히터(4)로 침탄소재를 800∼1000℃로 가열한다.The carburized carbon material 20 is placed in the plasma carburizing chamber 1 and the pressure in the carburizing chamber 1 is adjusted to a vacuum of 10 ⁻² Torr or less using the vacuum system 7, and then the carburized carbon material is heated by the heater 4. Heated to 800-1000 ° C.

그리고 플래즈머침탄실(1)내에 아르곤가스를 주입하여 플래즈머분위기하에서 침탄소재(20)의 표면을 스피터크리닝하고, 다시 침탄가스공급라인(10)을 통해 침탄혼합가스를 주입하여 침탄실내의 압력을 10∼30 Torr로 유지하며, 전원(8)을 공급하여 히터(4)를 작동시키고, 히터에 의한 플래즈머를 발생시키면서 침탄소재의 침탄을 실시한다.Then, argon gas is injected into the plasma carburizing chamber 1 to sputter-clean the surface of the carburizing material 20 under the atmosphere of the plasma, and the carburizing mixed gas is injected again through the carburizing gas supply line 10 to pressurize the carburizing chamber. Is maintained at 10 to 30 Torr, the power source 8 is supplied to operate the heater 4, and carburization of the carburized carbon material is performed while generating a plasma by the heater.

이때 DC전류의 전원(8)은 플래즈머침탄실(1)에 일정한 전류를 공급함으로써 침탄소재(20)의 표면에 균일한 플래즈머가 발생되도록 제어하고, 이로써 침탄소재의 표면에는 균일한 침탄이 이루어진다.At this time, the power supply 8 of the DC current is controlled to generate a uniform plasma on the surface of the carburizing material 20 by supplying a constant current to the plasma carburizing chamber 1, whereby the uniform carburizing on the surface of the carburizing material Is done.

또한 30∼120분동안의 침탄공정을 거친 후에는 전원공급을 중단하고, 침탄소재(20)의 표면에 주입된 탄소가 내부로 확산되도록 침탄실내의 온도를 800∼1000℃에서 10∼60분동안 유지한다.In addition, after 30 to 120 minutes of carburizing process, the power supply is stopped, and the temperature in the carburizing chamber is increased at 800 to 1000 ° C. for 10 to 60 minutes so that the carbon injected into the surface of the carburizing material 20 is diffused therein. Keep it.

한편 상기 침탄과정동안 냉각실(2)은 질소공급라인(9)을 통하여 지속적으로 질소가스가 공급되어 상압의 질소분위기를 유지하게 된다.Meanwhile, during the carburization process, the cooling chamber 2 is continuously supplied with nitrogen gas through the nitrogen supply line 9 to maintain the nitrogen atmosphere at atmospheric pressure.

그리고 플래즈머침탄실(1)에서 침탄소재(20)의 침탄 및 확산이 완료되면 진공시스템(7)의 작동을 멈추고 침탄가스공급라인(10)을 통해 질소가스를 주입하여 침탄실의 내압을 상압으로 높인다.When the carburizing and dispersing of the carburized material 20 is completed in the plasma carburizing chamber 1, the operation of the vacuum system 7 is stopped and nitrogen gas is injected through the carburizing gas supply line 10 to normalize the internal pressure of the carburizing chamber. To increase.

또한 차단도어(3)를 개방시켜 플래즈머침탄실(1)과 냉각실(2)의 분위기를 서로 같은 상압의 질소분위기가 되도록한 후, 침탄과 확산이 완료된 침탄소재(20)를 이동롤러(6)를 이용하여 개방된 차단도어를 통해 냉각실(2)로 이동시킨다.In addition, by opening the blocking door (3) to make the atmosphere of the plasma carburizing chamber (1) and the cooling chamber (2) to the nitrogen atmosphere of the same atmospheric pressure to each other, the carburizing material (20) carburizing and diffusion is completed, the moving roller ( 6) to the cooling chamber (2) through the open blocking door.

이때 냉각조(5)의 냉매로부터 발생되는 가스는 상압의 질소에 의해 침탄소재(20)의 표면과 격리되고, 이로써 침탄소재는 그 표면에서 발생되는 탈탄 및 산화반응이 방지되면서 냉각실(2)로 낙하되어 열처리된다.At this time, the gas generated from the refrigerant in the cooling tank 5 is isolated from the surface of the carbonaceous material 20 by nitrogen at atmospheric pressure, whereby the carbonaceous material is prevented from decarburization and oxidation reaction generated on the surface of the cooling chamber 2 It is dropped to heat treatment.

본 발명은 상압의 질소분위기로 조성된 냉각실을 통해 침탄소재를 냉각조에 투입함으로써 내마모성 및 내피팅성이 우수한 침탄소재를 생산할 수 있고, 별도의 냉각실 진공장치를 필요로 하지 않기 때문에 침탄비용이 저렴한 효과를 제공한다.The present invention can produce a carburized carbon material having excellent abrasion resistance and fitting resistance by injecting the carburized carbon material into a cooling tank through a cooling chamber formed under a nitrogen atmosphere at atmospheric pressure, and does not require a separate cooling chamber vacuum device, thereby reducing carburizing cost. Provides an inexpensive effect.

Claims

In the plasma carburization heat treatment apparatus capable of continuously performing the plasma carburization and subsequent heat treatment of the object,

A vacuum system for making the pressure inside the vacuum, a carburizing gas supply line for supplying a gas suitable for carburizing of the target object therein, a heater device for heating the target object, and a plasma generated inside the carburizing unit A plasma carburizing chamber having a functioning current supply device and a transfer device for transferring the object to the next process;

A nitrogen supply device capable of continuously supplying nitrogen gas therein while being integrally formed with the plasma carburizing chamber, and a cooling chamber in which a cooling tank for heat-treating the workpiece is formed;

Plasma carburizing heat treatment apparatus characterized in that it comprises an intermediate blocking device formed to be opened and closed on the blocking wall blocking the plasma carburizing chamber and the cooling chamber.

The method of claim 1,

Plasma carburization heat treatment apparatus, characterized in that for use as a refrigerant in the cooling tank not a cooling oil for vacuum but a general cooling oil.

In the plasma carburization heat treatment method which can perform plasma carburization and subsequent heat treatment successively,

Placing the workpiece in a plasma carburizing chamber and cleaning the surface of the workpiece:

Plasma carburizing and diffusing the cleaned object:

Supplying nitrogen through a nitrogen supply line while the object is carburized and diffused in a plasma carburizing chamber to make the cooling chamber into an atmospheric nitrogen atmosphere;

When the carburizing and diffusion of the treated materials are completed, the vacuum system is stopped and nitrogen is supplied through the carburizing gas supply line to make the plasma carburizing chamber into an atmospheric nitrogen atmosphere:

Opening the blocking door to make the plasma carburizing chamber and the cooling chamber into the same atmospheric nitrogen atmosphere;

Plasma carburizing heat treatment method comprising the step of quenching the carburized and diffused to-be-processed object in the refrigerant of the cooling tank through a cooling chamber other than the open carburizing door using a conveying device in a nitrogen atmosphere of atmospheric pressure.

The method of claim 3, wherein

The cleaning method is plasma carburizing heat treatment method characterized in that the sputter cleaning using argon gas in the plasma state