KR19980076611A - Management Method of Equipment for Semiconductor Manufacturing - Google Patents

Abstract

The present invention relates to a method for managing a semiconductor manufacturing facility that can respond quickly when an abnormality occurs in a facility. The present invention relates to a method for managing a semiconductor manufacturing facility using a host computer, through a predetermined control S / W. A first step of receiving the operation data of the facility and determining whether it has deviated from previously stored reference data; A second step of displaying a predetermined reference data deviation warning message when the operation data of the facility is out of the reference data as a result of the determination; A third step of outputting a predetermined check signal through the control S / W and determining whether to output a predetermined response signal corresponding to the check signal; And as a result of the determination, if a response signal is not output, a fourth step of displaying a predetermined non-response alarm message.

Accordingly, in the present invention, it is possible to collectively grasp whether or not a problem occurs in all the facilities arranged in each manufacturing line.

Description

Management Method of Equipment for Semiconductor Manufacturing

The present invention relates to a method for managing a semiconductor manufacturing facility, and more particularly, a predetermined monitoring S / W (Software) is provided in a host computer, and the status of each facility is collectively managed through this. The present invention relates to a method for managing a semiconductor manufacturing facility that can respond quickly when an abnormality occurs.

In general, semiconductor devices require a high degree of precision, and thus, in a general semiconductor production line, a predetermined facility capable of precision processing, for example, a sputtering facility, an etching facility, a measurement facility, and the like are disposed to perform most manufacturing processes. .

At this time, the operator tries to improve the line work efficiency by closely monitoring the operation status of each facility.

1 is a conceptual diagram schematically showing an arrangement of a conventional semiconductor manufacturing facility for performing such a function.

As shown, each facility 1 is arranged for each process in a production line (not shown), and each facility 1 is controlled by a predetermined facility controller 2.

At this time, the individual user (User) performs a predetermined computing operation to each facility controller 2, to operate an automatic transfer system such as a robot (not shown), whereby the lot (not shown) is a facility (1) It is loaded in the port provided in the to undergo a predetermined process.

On the other hand, each facility 1 is connected online with a host computer 3 having a data collection function.

Accordingly, various data related to each facility 1 are input and stored in the host computer 3, and a worker logs in or connects to the host computer 3 from each individual facility controller 2, and the desired data is desired. Can perform computational work.

At this time, the facility 1 is provided with a predetermined port which is responsible for data communication with the host computer 3, and the facility 1 is equipped with a host computer by a predetermined protocol, for example, a Semi Equipment Communications Standard (SECS). Continuous data exchange with (3) can be performed.

Here, the operation manager periodically observes and inspects the facility 1 through an O / I PC (Operator Interface Personal Computer) 4 connected to the host computer 3, so that the facility 1 has a predetermined abnormality. I'm trying to prevent it.

On the other hand, the host computer 3 described above integrally stores the history of each facility 1 operated for a predetermined time.

Thereafter, the job manager observes the data related to the facility 1 stored in the host computer 3 in detail, collects and evaluates the relevant data, and feeds the result back to the production line so that the facility 1 can be efficiently managed. .

However, there are some serious problems in the conventional method for managing a semiconductor manufacturing facility that performs this function.

First, as described above, the installation and the host computer is a large number of installation, while the number of task managers managing this has a certain limit, if a problem occurs in the equipment, it is not immediately known There is this.

Second, if an error is not found in a facility due to a mistake of the work manager or the above-described problems, and the device is left for a long time, there is a problem that the overall process operation rate is sharply lowered.

Therefore, an object of the present invention is to provide a monitoring software for management in a predetermined host computer, and through this, by observing the occurrence of abnormal condition of the equipment through this, if a problem occurs in the equipment, a quick follow-up can be made. The present invention provides a method for managing a semiconductor manufacturing facility.

1 is a conceptual diagram schematically showing an arrangement of a conventional semiconductor manufacturing facility.

2 is a flowchart sequentially illustrating a method of managing a semiconductor manufacturing facility according to the present invention.

According to the present invention for achieving the above object, in the method for managing a semiconductor manufacturing facility using a host computer, whether or not the operation data of the facility is received from a predetermined control S / W and deviated from previously stored reference data. Determining the first step; A second step of displaying a predetermined reference data deviation warning message when the operation data of the facility is out of the reference data as a result of the determination; A third step of outputting a predetermined check signal through the control S / W and determining whether to output a predetermined response signal corresponding to the check signal; And as a result of the determination, if a response signal is not output, a fourth step of displaying a predetermined non-response alarm message.

Accordingly, in the present invention, it is possible to collectively grasp whether or not a problem occurs in all the facilities arranged in each manufacturing line.

Hereinafter, with reference to the accompanying drawings will be described in more detail the management method of the semiconductor manufacturing equipment according to the present invention.

2 is a flowchart sequentially illustrating a method of managing a semiconductor manufacturing facility according to the present invention.

As shown, the present invention is the first step (S1, S2) to determine whether the deviation from the pre-stored reference data by receiving the operation data of the facility (1) through a predetermined control S / W, and the determination As a result, when the operation data of the facility 1 deviates from the reference data, a second step S3 of displaying a predetermined reference data deviation warning message and a predetermined check signal through the control S / W described above. Third step (S4, S5) for outputting a predetermined response signal corresponding to the check signal and outputting a predetermined response signal when the response signal is not output as a result of the determination. And a fourth step S6 of displaying the alert message.

Hereinafter, each step of the present invention will be described in more detail.

First, each host computer in the line is arranged to be online with each other.

At this time, the task manager selects a predetermined host computer, for example, the first host computer 3, which is convenient for management thereof, and selects a predetermined monitoring S / W, for example, SACM S / W (System and Application Control and Monitoring). S / W) is installed.

Subsequently, each facility 1 inputs its own operation data to the first host computer 3 incorporating the above-described SACM S / W. (S1)

In addition, the second host computer 5 receives operation data of each facility 1 connected thereto in real time and inputs it to the first host computer 3 connected online (S1).

The data input process of each host computer to the first host computer 3 is performed in the same process in all the host computers arranged.

As a result, operation data of all the facilities 1 installed in the line are collectively inputted to the first host computer 3 provided with the SACM S / W.

Subsequently, the first host computer 3 compares the operation data of each facility 1 input with the previously stored facility 1 reference data, and has a predetermined deviation occurred from the operation data output from each facility 1? Determine whether or not (S2).

As a result of this determination, if a predetermined deviation has not occurred in the operation data of the inputted equipment 1, the first host computer 3 feeds back the flow to continuously determine whether there is an abnormal operation of the equipment. (S1, S2)

However, as a result of this determination, if the operation data of the equipment 1 to be input deviates by a predetermined size from the above-described equipment 1 reference data, the first host computer 3 indicates that a predetermined abnormality has occurred in the equipment 1. Identify immediately and take appropriate action to respond to the abnormality.

For example, when the temperature operation status of the equipment A input at a predetermined time deviates from the reference temperature by a predetermined size, the host computer immediately recognizes the O / I connected to the first host computer 3 and outputs a predetermined alarm message. It downloads to the PC 4 and informs the job manager that a predetermined problem has occurred in the facility A. (S3)

In this way, the work manager appropriately solves the problems caused by the facility by taking a predetermined post-action to the facility 1.

Subsequently, the above-described first host computer 3 inputs a predetermined check signal to each host computer. (S4)

Subsequently, the first host computer 3 determines whether or not a response signal corresponding to the check signal has been transmitted from the other host computer.

As a result of this determination, when a response signal corresponding to the check signal is sent, the first host computer 3 feeds back the flow to continuously determine whether an abnormal state has occurred in each host computer (S4).

However, as a result of this determination, if there is no response signal corresponding to the check signal, the first host computer 3 searches for the corresponding host computer and finds the ID of the host computer.

Subsequently, the first host computer 3 downloads the ID of the troubled host computer and the predetermined host computer abnormal state alarm message to the O / I PC 4 described above (S6).

As a result, the job manager recognizes that an abnormality has occurred in the host computer and takes appropriate measures accordingly.

As an example, when such a response signal is not sent from the first host computer 3 and the online second host computer 5, the first host computer 3 may describe the situation as described above. Marked externally through (S6), the task manager takes appropriate follow-up actions appropriate to the situation.

As a result, the troublesome host computer is properly healed.

As described above, in the present invention, the operator manages each facility 1 and each management system arranged in the entire manufacturing line through one host computer and O / I PC 4 so that the operator can individually manage each facility 1. And appropriate follow-up without monitoring the management system.

In addition, in the present invention, a predetermined process accident can be prevented in advance by the work manager integrally monitoring and appropriately modifying each process performed by an individual operator.

Such a present invention is useful in all the facilities for manufacturing a semiconductor, which is arranged in a semiconductor manufacturing line and requires a predetermined management.

And while certain embodiments of the invention have been described and illustrated, it will be apparent that the invention may be embodied in various modifications by those skilled in the art.

Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

As described in detail above, in the method for managing a semiconductor manufacturing facility according to the present invention, the monitoring software for management is provided in a predetermined host computer, and through this, by collectively observing the occurrence of an abnormal state of the facility, If this occurs, quick follow-up can be made.

Claims (1)

In the method of managing a semiconductor manufacturing facility using a host computer, A first step of receiving the operation data of the facility through a predetermined control S / W and determining whether the reference data has been deviated from previously stored reference data; A second step of displaying a predetermined reference data deviation warning message when the operation data of the facility is out of the reference data as a result of the determination; A third step of outputting a predetermined check signal through the control S / W and determining whether to output a predetermined response signal corresponding to the check signal; And a fourth step of displaying a warning message that does not output a predetermined response signal when the response signal is not output as a result of the determination.