KR102672981B1 - Apparatus and method for control of linear conveyor - Google Patents

Abstract

A linear conveyor control device according to an embodiment of the present invention includes a pallet, which is a transported object on which a substrate is loaded, a linear motor that drives the pallet, a hall sensor provided in the linear motor to detect the presence or absence of the pallet, and a linear motor provided in the linear motor. Based on the occupancy sensor and linear motor that detects the occupancy rate of the pallet, and the presence or occupancy rate of the pallet on the linear motor adjacent to the linear motor, the pallet is moved in the forward direction and then in the reverse direction to move the pallet to the origin of the pallet at a predetermined position. It may include a control unit that controls to ensure security.

Description

Linear conveyor control device and method {APPARATUS AND METHOD FOR CONTROL OF LINEAR CONVEYOR}

The present invention relates to a linear conveyor control device and method.

In general, in the production line of a production plant, it is required to quickly and quietly convey the conveyed object from the viewpoint of improving production efficiency and improving the working environment. Such a conveying device is a linear conveyor system in which a linear motor consisting of a linear motor coil and a reaction member is installed at each work station in the production line, and the conveyed objects are sequentially sent to each work station by these linear motors. This is being produced.

Meanwhile, the linear conveyor system operates multiple pallets. When the linear conveyor system is stopped due to reasons such as a power outage or power cut, and the power is re-applied to the linear conveyor system, the Hall sensor of the arranged linear motor (Hall sensors) can determine the presence or absence of a pallet, but there is a problem in that they cannot accurately determine the origin position of the pallet.

An object of the present invention is to provide a linear conveyor control device and method that allows a plurality of pallets operated in a linear conveyor system to perform an origin at the current position, thereby shortening the time to secure the origin, thereby facilitating the operation of the system. I'm doing it.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below.

A linear conveyor control device according to an embodiment of the present invention includes a pallet, which is a transported object on which a substrate is loaded, a linear motor that drives the pallet, a hall sensor provided in the linear motor to detect the presence or absence of the pallet, and a linear motor provided in the linear motor. Based on the occupancy sensor and linear motor that detects the occupancy rate of the pallet, and the presence or occupancy rate of the pallet on the linear motor adjacent to the linear motor, the pallet is moved in the forward direction and then in the reverse direction to move the pallet to the origin of the pallet at a predetermined position. It may include a control unit that controls to ensure security.

In one embodiment, when the first pallet is detected by the hall sensor and the occupancy sensor of the first linear motor, the control unit operates the second linear motor adjacent to the first linear motor and for which the first pallet has not been detected. After moving the first pallet so that the first pallet is not detected by the hall sensor of the first linear motor, control is performed to secure the origin of the first pallet at a predetermined position by moving the first pallet in the reverse direction. can do.

In one embodiment, when the first pallet is detected by the hall sensor of the first linear motor, the control unit detects a second linear motor adjacent to one side of the first linear motor and a second linear motor adjacent to the other side of the first linear motor. By driving three linear motors together, the first pallet can be moved onto the first linear motor and controlled to secure the origin of the first pallet at a predetermined position.

In one embodiment, when the control unit detects the second pallet from the Hall sensor of the fourth linear motor and the Hall sensor of the fifth linear motor adjacent to the fourth linear motor, the second pallet is relatively occupied. After selecting the linear motor as the main motor and the linear motor with a relatively small occupancy of the second pallet as the auxiliary motor, the second pallet is moved with the auxiliary motor so that the hall sensor of the main motor does not detect the second pallet. After doing so, the second pallet can be moved in the reverse direction and controlled to secure the origin of the second pallet at a predetermined position.

In one embodiment, when the third pallet cannot move on the sixth linear motor, when both ends of the third pallet are detected by a pair of position sensors, the control unit detects the third pallet on the sixth linear motor. 3 It can be judged that the origin of the pallet has been secured.

A linear conveyor control method according to another embodiment of the present invention includes the steps of detecting the presence or absence of a pallet through a hall sensor provided in a linear motor, detecting the occupancy rate of the pallet through an occupancy sensor provided in a linear motor, and linear Based on the presence or occupancy of the pallet on the motor and the linear motor adjacent to the linear motor, the step may include controlling the pallet to secure the origin of the pallet at a predetermined position by moving the pallet in the forward direction and then in the reverse direction. there is.

In one embodiment, the linear conveyor control method is performed when the first pallet is detected by the hall sensor and the occupancy sensor of the first linear motor, and the second linear conveyor adjacent to the first linear motor and in which the first pallet is not detected After moving the first pallet with a motor so that the first pallet is not detected by the hall sensor of the first linear motor, the first pallet is moved in the reverse direction to secure the origin of the first pallet at a predetermined position. It may include a control step to achieve this.

In one embodiment, the linear conveyor control method includes, when the first pallet is detected by the hall sensor of the first linear motor, the second linear motor adjacent to one side of the first linear motor and the other side of the first linear motor. It may include the step of driving the third linear motor adjacent to the control to move the first pallet onto the first linear motor so that the origin of the first pallet is secured at a predetermined position.

In one embodiment, the linear conveyor control method detects the second pallet at the Hall sensor of the fourth linear motor and the Hall sensor of the fifth linear motor adjacent to the fourth linear motor, and the second pallet is relatively After selecting the linear motor with the most occupied linear motor as the main motor and the linear motor with relatively small occupancy of the second pallet as the auxiliary motor, the second pallet is moved to the auxiliary motor to detect the second pallet from the hall sensor of the main motor. This may include controlling the second pallet to be moved in the reverse direction so that the origin of the second pallet is secured at a predetermined position after the second pallet is not detected.

In one embodiment, the linear conveyor control method is such that, when the third pallet cannot move on the sixth linear motor, when both ends of the third pallet are detected by a pair of position sensors, the sixth linear motor It may include the step of determining that the origin of the third pallet has been secured.

A linear conveyor control method according to another embodiment of the present invention includes setting a predetermined linear motor as a main motor and setting a predetermined linear motor adjacent to the main motor as an auxiliary motor, the main motor and the auxiliary motor. Detecting the occupancy of the pallet through an occupancy sensor provided in the motor and based on the occupancy of the pallet on the main motor and the auxiliary motor, moving the pallet in the forward or reverse direction to secure the origin of the pallet on the main motor It may include a control step to achieve this.

In one embodiment, the linear conveyor control method may include driving the auxiliary motor to move the pallet toward the main motor, based on occupancy of the pallet on the main motor.

A linear conveyor control method according to another embodiment of the present invention includes detecting the occupancy rate of a pallet through an occupancy sensor provided in a linear motor, and detecting the presence or absence of the pallet through a hall sensor provided in the linear motor. and determining the moving direction of the pallet based on the occupancy rate of the pallet on the linear motor and the presence or absence of the pallet, and then controlling the pallet to secure the origin of the pallet at a predetermined location.

In one embodiment, the linear conveyor control method includes, when the pallet is detected by an occupancy sensor provided on the linear motor and the pallet is not detected by a hall sensor provided on one side of the linear motor, the pallet is moved to the linear conveyor. It may include the step of controlling the pallet to secure its origin at a predetermined position by moving it to one side of the motor.

In one embodiment, the linear conveyor control method includes, when the pallet is detected by an occupancy sensor provided on the linear motor and the pallet is not detected by a hall sensor provided on the other side of the linear motor, the pallet is moved to the linear conveyor. It may include the step of controlling the pallet to secure its origin at a predetermined position by moving it to the other side of the motor.

This technology has the effect of making the operation of the system easier by allowing multiple pallets operated in a linear conveyor system to perform the origin at the current location, thereby shortening the time to secure the origin.

In addition, various effects that can be directly or indirectly identified through this document may be provided.

1 is a diagram showing a linear conveyor system according to an embodiment of the present invention,
Figure 2 is a diagram showing a linear conveyor control device according to an embodiment of the present invention;
3 to 8 are diagrams for explaining the process of securing the origin through a linear conveyor control device according to an embodiment of the present invention;
9 to 11 are diagrams for explaining the process of securing an origin through a linear conveyor control device according to another embodiment of the present invention.

Hereinafter, various embodiments of the present invention are described with reference to the accompanying drawings. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include various modifications, equivalents, and/or alternatives to the embodiments of the present invention.

The various embodiments of this document and the terms used herein are not intended to limit the technical features described in this document to specific embodiments, and should be understood to include various changes, equivalents, or replacements of the embodiments.

In connection with the description of the drawings, similar reference numbers may be used for similar or related components. The singular form of a noun corresponding to an item may include one or more of the items, unless the relevant context clearly indicates otherwise.

As used herein, “A or B”, “at least one of A and B”, “at least one of A or B”, “A, B or C”, “at least one of A, B and C”, and “A Each of phrases such as “at least one of , B, or C” may include any one of the items listed together in the corresponding phrase, or any possible combination thereof.

Terms such as "first", "second", or "first" or "second" may be used simply to distinguish one component from another, and to refer to those components in other respects (e.g., importance or order) is not limited. One (e.g., first) component is said to be “coupled” or “connected” to another (e.g., second) component, with or without the terms “functionally” or “communicatively.” Where mentioned, it means that any of the components can be connected to the other components directly (e.g. wired), wirelessly, or through a third component.

FIG. 1 is a diagram showing a linear conveyor system according to an embodiment of the present invention, and FIG. 2 is a diagram showing a linear conveyor control device according to an embodiment of the present invention.

1 and 2, the linear conveyor system according to an embodiment of the present invention uses a linear motor to transport the substrate between diffusion, etching, photography, and cleaning processes performed to manufacture a semiconductor device. It may be a system that transfers the loaded pallet 520 to another process.

For example, the pallet 520 may be formed in a square plate shape for transporting substrates between processes, and may be provided with a movable part 510 formed at the bottom including a magnet.

A plurality of linear motors may be arranged on a linear motor rail to generate driving force for transporting the pallet 520. The plurality of linear motors may each include a linear motor coil for reacting with the movable part 510 mounted on the pallet 520.

Using the linear motor coil constituting the linear motor as a stator, a driving force is generated in the moving part 510 through electromagnetic action between the linear motor coil and the moving part 510, and the pallet 520 provided in the moving part 510 is driven by this driving force. ) can be returned.

The linear motor may include a first Hall sensor 311, a second Hall sensor 312, and an occupancy sensor 313. The first Hall sensor 311 may be provided on one side of the linear motor, the second Hall sensor 312 may be provided on the other side of the linear motor, and the occupancy sensor 313 may be provided on the top of the linear motor. The first Hall sensor 311 and the second Hall sensor 312 can detect the presence or absence of the pallet 520 on the linear motor, and the occupancy sensor 313 can detect the occupancy rate of the pallet 520 on the linear motor. there is. Occupancy sensors 313 may be provided in plural numbers.

Meanwhile, the linear conveyor system may be equipped with a lift to move the pallet 520 from the lower process to the upper process or from the upper process to the lower process. The lift may be equipped with a pair of position sensors 315. The position sensor 315 can detect both ends of the pallet 520.

Meanwhile, the linear conveyor system may be equipped with a control unit 150 to control the operation of the linear motor. The control unit 150 can properly control a plurality of linear motors that generate driving force in conjunction with each other in order to transport the pallet 520 in a certain direction without collision. For example, the control unit 150 may include a general-purpose PLC (Program Logic Controller).

In addition, the control unit 150 may control at least one other component (eg, hardware or software component) of the linear conveyor control device and may perform various data processing or calculations. According to one embodiment, as at least part of data processing or calculation, the control unit 150 stores commands or data received from other components (e.g., sensors) in a volatile memory, and processes the commands or data stored in the volatile memory. And the resulting data can be stored in non-volatile memory. According to one embodiment, the control unit 150 is a main processor (e.g., a central processing unit or an application processor) or an auxiliary processor that can operate independently or together with the main processor (e.g., a graphics processing unit, an image signal processor, a sensor hub processor, or a communication processor). processor). For example, when the control unit 150 includes a main processor and a auxiliary processor, the auxiliary processor may be set to use less power than the main processor or be specialized for a designated function. The auxiliary processor may be implemented separately from the main processor or as part of it.

In addition, although not shown in the drawings, according to embodiments, the linear conveyor control device may further include a storage unit. The storage unit may store commands for controlling the linear conveyor control device, control command codes, control data, or user data. For example, the storage unit may include at least one of an application program, an operating system (OS), middleware, or a device driver. The storage unit may include one or more of volatile memory or non-volatile memory. Volatile memory includes dynamic random access memory (DRAM), static RAM (SRAM), synchronous DRAM (SDRAM), phase-change RAM (PRAM), magnetic RAM (MRAM), resistive RAM (RRAM), and ferroelectric RAM (FeRAM). It can be included. Non-volatile memory may include read only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), flash memory, etc.

In the linear conveyor system according to the present invention, when a plurality of pallets 520 lose their origin positions due to a power outage or power failure, the stopping position of the pallets 520 may appear in various forms depending on the situation.

Since the linear conveyor system can operate normally after going through the process of securing the origin of the pallet 520, it automatically checks the status of the pallet 520 located in the linear motor and sets the pallet 520 for each linear motor. You must check the occupancy rate, check whether there is a possibility of collision, and check whether there is a risk of falling.

3 to 8 are diagrams for explaining the process of securing an origin through a linear conveyor control device according to an embodiment of the present invention.

3 and 4, when the pallet 520 of the linear conveyor system is located as shown in FIG. 3, that is, the pallet 520 located on the first linear motor 210 is moved to the first linear motor 210. 1 The Hall sensor 311 and the second Hall sensor 312 of the first linear motor 210 all detect (S110), and the occupancy sensor 313 that checks the pallet occupancy rate of the first linear motor 210 all detects When detected (S120), the process of securing the origin of the pallet 520 is as follows.

First, the control unit 150 checks whether the pallet 520 is detected in the second linear motor 220 on the left and the third linear motor 230 on the right of the pallet 520, and then checks whether the pallet 520 is detected. The pallet 520 can be moved in a different direction (S130). At this time, the first linear motor 210, the second linear motor 220, and the third linear motor 230 detect the pallet 520 by detecting the mover 510 provided at the lower part of the pallet 520. It could be.

Subsequently, the pallet 520 was not detected in both the second linear motor 220 and the third linear motor 230, but since the right direction is the forward direction, the direction of the third linear motor 230 in which the pallet 520 was not detected You can move the pallet 520. For reference, if the left direction is the forward direction, the pallet 520 can be moved in the direction of the second linear motor 220, which has not detected the pallet 520.

Subsequently, the pallet 520 is moved in the direction of the third linear motor 230 until the pallet 520 is not detected by the first Hall sensor 311 or the second Hall sensor 312 of the first linear motor 210. can be moved (S140).

Subsequently, if the pallet 520 is not detected by the first Hall sensor 311 or the second Hall sensor 312 of the first linear motor 210, the pallet 520 is moved in the reverse direction and the pallet (520) is moved at a predetermined position. 520) can be secured (S150).

For example, the pallet 520 located on the first linear motor 210 is detected by all of the first Hall sensor 311, the second Hall sensor 312, and the occupancy sensor 313 of the first linear motor 210. When detected and the right direction is the forward direction, the pallet 520 can be moved in the direction of the third linear motor 230, which was not detected. Subsequently, the pallet 520 is moved in the direction of the third linear motor 230 until the pallet 520 is not detected by the first hall sensor 311 of the first linear motor 210, and then the pallet 520 is moved in the direction of the third linear motor 230. By moving again to the left, the origin of the pallet 520 can be secured at the position where the pallet 520 is detected by the first Hall sensor 311 of the first linear motor 210.

When the left direction is the forward direction, the pallet 520 can be moved in the direction of the second linear motor 220, which has not detected the pallet 520. Subsequently, the pallet 520 is moved in the direction of the second linear motor 220 until the pallet 520 is not detected by the second hall sensor 312 of the first linear motor 210, and then the pallet 520 is moved. By moving again to the right, the origin of the pallet 520 can be secured at the position where the pallet 520 is detected by the second Hall sensor 312 of the first linear motor 210.

Meanwhile, the linear motor at the position where the pallet 520 should stop is selected as the command motor, and the linear motor at the position where it moves and passes is selected as the auxiliary motor, and then the pallet 520 detects one or two Hall sensors of the command motor. When a dog is detected, the origin of the pallet 520 is secured at a predetermined position while moving the pallet 520 by driving the left and right auxiliary motors together based on the command motor without checking the occupancy sensor of the linear motor. can do.

For example, after selecting the first linear motor 210 as the command motor and the third linear motor 230 as the auxiliary motor, the pallet 520 detects the first Hall sensor ( 311) or the second Hall sensor 312, the first linear motor 210 and the third linear motor 230 are operated together without checking the occupancy sensor 313 of the first linear motor 210. While driving and moving the pallet 520, the origin of the pallet 520 is secured at the position where the pallet 520 is detected by the first hall sensor 311 and the second hall sensor 312 of the first linear motor 210. can do.

Referring to FIGS. 5 and 6, when the pallet 520 of the linear conveyor system is located as shown in FIG. 5, that is, the second Hall sensor 312 of the fourth linear motor 240 and the fifth linear motor 250 When the first hall sensor 311 detects the pallet 520 (S210), the process of securing the origin of the pallet 520 is as follows.

First, the control unit 150 may select the linear motor with relatively large occupancy of the pallet 520 as the main motor, and select the linear motor with relatively small occupancy of the pallet 520 as the auxiliary motor (S220).

For example, since the occupancy sensor 313 of the fourth linear motor 240 detects 60% and the occupancy sensor 313 of the fifth linear motor 250 detects 40%, the fourth linear motor ( 240) can be selected as the main motor, and the fifth linear motor 250 can be selected as the auxiliary motor.

Next, the pallet 520 can be moved in the direction of the fifth linear motor 250 in the forward direction by driving the main motor and the auxiliary motor in the same direction (S230).

Subsequently, the pallet 520 may be moved in the direction of the fifth linear motor 250 until the pallet 520 is not detected by the second hall sensor 312 of the fourth linear motor 240 (S240). .

Subsequently, if the pallet 520 is not detected by the second hall sensor 312 of the fourth linear motor 240, the origin of the pallet 520 can be secured at a predetermined position while moving the pallet 520 in the reverse direction. There is (S250). Therefore, while moving the pallet 520 in the reverse direction, the pallet 520 is detected by the second Hall sensor 312 of the fourth linear motor 240 and the first Hall sensor 311 of the fifth linear motor 250. The origin of the pallet 520 can be secured at this location.

Referring to FIGS. 7 and 8, when the pallet 520 of the linear conveyor system is located as shown in FIG. 7, that is, the pallet 520 located on the sixth linear motor 260 is connected to the sixth linear motor 260. 1 The Hall sensor 311 and the second Hall sensor 312 of the sixth linear motor 260 all detect (S310), and the occupancy sensor 313 that checks the pallet occupancy rate of the sixth linear motor 260 all detects (S310) If it is detected (S320), but the pallet 520 cannot be moved (S330), the process of securing the origin of the pallet 520 is as follows.

First, when both ends of the pallet 520 located on the sixth linear motor 260 are detected by a pair of position sensors 315 (S340), the control unit 150 detects the pallet on the sixth linear motor 260. The origin of (520) can be secured (S350).

For example, the pallet 520 located on the sixth linear motor 260 is detected in all of the first Hall sensor 311, the second Hall sensor 312, and the occupancy sensor 313 of the sixth linear motor 260. It is detected (S320), but if the pallet 520 cannot be moved, such as because the pallet 520 is located within the lift or at the end of the linear conveyor system, the first hall sensor 311 of the sixth linear motor 260 ), instead of relying on the second hall sensor 312 and the occupancy sensor 313, the pallet ( 520) can be secured.

At this time, a metal material or a reflector may be further included in the lower portions of both ends of the pallet 520 so that it can be detected by the position sensor 315.

Figure 9 is a diagram for explaining the process of securing the origin through a linear conveyor control device according to another embodiment of the present invention.

While designing a linear conveyor system, among a plurality of linear motors, the linear motor for securing the origin of the pallet can be set in advance as the main motor, and the motor adjacent to the main motor can be set in advance as the auxiliary motor.

For example, referring to FIG. 9, the 1st linear motor is previously referred to as the 1st main motor 710, the 3rd linear motor is referred to as the 2nd main motor 730, and the 6th linear motor is referred to as the 3rd main motor 750. You can set the 2nd linear motor as the first auxiliary motor 720, the 4th linear motor as the 2nd auxiliary motor 740, and the 5th linear motor as the third auxiliary motor 750.

Subsequently, when a situation arises where it is necessary to secure the origin of the pallet, the origin of the pallet can be secured on the main motor by moving the pallet toward the preset main motor. The auxiliary motor adjacent to the main motor drives the pallet to face the main motor, allowing the pallet to move more quickly. At this time, when the pallet is moved, based on the occupancy sensor provided in the main motor or auxiliary motor, the pallet can be moved in a direction so that the pallet and the adjacent pallet do not collide with each other.

Referring to FIG. 9, when a situation occurs where it is necessary to secure the origin of the pallet 920, the occupancy sensor 813 of the first main motor 710 detects the pallet 920 while the pallet 920 is moved in the forward direction. ) is detected, the first main motor 710 can be driven to move the pallet 920 in the reverse direction toward the first main motor 710. At this time, when the pallet 920 is detected by the occupancy sensor 813 of the first auxiliary motor 720, the first auxiliary motor 720 is driven so that the pallet 920 moves in the reverse direction toward the first main motor 710. It can assist you in moving to . Subsequently, the occupancy sensor 813 of the first main motor 710, the first Hall sensor 811 of the first main motor 710, and the second Hall sensor 812 of the first main motor 710 are detected. The origin of the pallet 920 can be secured on the first main motor 710.

Likewise, when the pallet 920 is detected by the occupancy sensor 813 of the second main motor 730 while the pallet 920 is moved in the forward direction, the second main motor 730 is driven to move the pallet 920. can be moved in the reverse direction toward the second main motor 730. At this time, when the pallet 920 is detected by the occupancy sensor 813 of the second auxiliary motor 740, the second auxiliary motor 740 is driven so that the pallet 920 moves in the reverse direction toward the second main motor 730. It can assist you in moving to . Subsequently, the occupancy sensor 813 of the second main motor 730, the first Hall sensor 811 of the second main motor 730, and the second Hall sensor 812 of the second main motor 730 are detected. The origin of the pallet 920 can be secured on the second main motor 730.

Meanwhile, when the pallet 920 is detected by the occupancy sensor 813 of the third main motor 750 while the pallet 920 is moved in the reverse direction, the third main motor 750 is driven to move the pallet 920. It can be moved in the forward direction toward the third main motor 750. At this time, when the pallet 920 is detected by the occupancy sensor 813 of the third auxiliary motor 760, the third auxiliary motor 760 is driven so that the pallet 920 moves in the forward direction toward the third main motor 750. It can assist you in moving to . Subsequently, the occupancy sensor 813 of the third main motor 750, the first Hall sensor 811 of the third main motor 760, and the second Hall sensor 812 of the third main motor 750 are detected. The origin of the pallet 920 can be secured on the third main motor 750.

As described above, the pallet 920 is detected by the occupancy sensor 813 of the first main motor 710, the pallet 920 is moved to the first main motor 710 to secure the origin, and the origin is secured by the second main motor 710. The pallet 920 is detected by the occupancy sensor 813 of 730, and the pallet 920 is moved to the second main motor 730 to secure the origin, so that the pallet 920 on the first main motor 710 and A gap is formed between the pallets 920 on the second main motor 730, thereby preventing a situation where a pallet and an adjacent pallet collide with each other.

In addition, the pallet 920 is detected by the occupancy sensor 813 of the third main motor 750, and the pallet 920 is moved to the third main motor 750 to secure the origin, so that the second main motor 730 A gap is formed between the pallet 920 on the top and the pallet 920 on the third main motor 750, thereby preventing a situation where a pallet and an adjacent pallet collide with each other.

10 and 11 are diagrams for explaining the process of securing the origin through a linear conveyor control device according to another embodiment of the present invention.

As a general method for securing the origin of the pallet, the occupancy rate of the pallet 930 detected through the occupancy sensor 823 provided in the linear motor 770 and the hall sensor 821, 822 provided in the linear motor 770 Based on the presence or absence of the pallet 930 detected through , the moving direction of the pallet 930 can be determined and the origin of the pallet 930 can be secured at a predetermined position.

For example, referring to FIG. 10, the occupancy sensor 823 provided in the linear motor 770 detects the pallet 930 beyond a predetermined range capable of driving the pallet 930, and the linear motor 770 If the pallet 930 is not detected by the first Hall sensor 821 provided on one side and the pallet 930 is detected by the second Hall sensor 822 provided on the other side of the linear motor 770, the pallet ( It can be seen that 930) has been moved to the other direction, the forward direction. In this case, the occupancy sensor 823, the first Hall sensor 821, and the second Hall sensor 822 of the linear motor 770 are detected by moving the pallet 930 in the reverse direction to one side. The origin of the pallet 930 can be secured on the image.

Meanwhile, referring to FIG. 11, the occupancy sensor 823 provided in the linear motor 770 detects the pallet 930 beyond a predetermined range capable of driving the pallet 930, and the other side of the linear motor 770 If the pallet 930 is not detected by the second Hall sensor 822 provided in and the pallet 930 is detected by the first Hall sensor 821 provided on one side of the linear motor 770, the pallet 930 It can be seen that it has been moved in the reverse direction, which is one direction. In this case, the linear motor 770 senses the occupancy sensor 823, the first Hall sensor 821, and the second Hall sensor 822 of the linear motor 770 by moving the pallet 930 in the other direction, the forward direction. The origin of the pallet 930 can be secured on the image.

As described above, according to the present invention, the time to secure the origin can be shortened by allowing a plurality of pallets operated in the linear conveyor system to perform the origin at the current position, and the operator By easily executing control commands through the PLC's touch panel, etc., the user can easily operate the linear conveyor system.

Various embodiments of this document may be implemented as software (e.g., a program) including one or more instructions stored in a storage medium (e.g., internal memory or external memory) that can be read by a machine. For example, the device may call at least one command among one or more commands stored from a storage medium and execute it. This allows the device to be operated to perform at least one function according to the at least one instruction called. The one or more instructions may include code generated by a compiler or code that can be executed by an interpreter.

A storage medium that can be read by a device may be provided in the form of a non-transitory storage medium. Here, 'non-transitory' only means that the storage medium is a tangible device and does not contain signals (e.g. electromagnetic waves). This term refers to cases where data is stored semi-permanently in the storage medium. There is no distinction between temporary storage cases.

According to one embodiment, methods according to various embodiments disclosed in this document may be included and provided in a computer program product. Computer program products are commodities and can be traded between sellers and buyers. A computer program product may be distributed on a machine-readable storage medium (e.g. compact disc read only memory (CD-ROM)) or distributed online, directly through an application store or between two user devices (e.g. : can be downloaded or uploaded). In the case of online distribution, at least a portion of the computer program product may be at least temporarily stored or temporarily created in a machine-readable storage medium, such as the memory of a manufacturer's server, an application store's server, or a relay server.

According to various embodiments, each component (e.g., module or program) of the above-described components may include a single or multiple entities, and some of the multiple entities may be separately placed in other components. .

According to various embodiments, one or more of the components or operations described above may be omitted, or one or more other components or operations may be added.

Alternatively or additionally, multiple components (eg, modules or programs) may be integrated into a single component. In this case, the integrated component may perform one or more functions of each component of the plurality of components identically or similarly to those performed by the corresponding component of the plurality of components prior to the integration. .

According to various embodiments, operations performed by a module, program, or other component may be executed sequentially, in parallel, iteratively, or heuristically, or one or more of the operations may be executed in a different order, omitted, or , or one or more other operations may be added.

The above description is merely an illustrative explanation of the technical idea of the present invention, and various modifications and variations will be possible to those skilled in the art without departing from the essential characteristics of the present invention.

Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but rather to explain it, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention shall be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope shall be construed as being included in the scope of rights of the present invention.

Claims (15)

A pallet, which is a transported object on which a substrate is loaded;
A linear motor that drives the pallet;
A Hall sensor provided in the linear motor to detect the presence or absence of the pallet;
An occupancy sensor provided on a linear motor to detect the occupancy rate of the pallet; and
A control unit that moves the pallet in the forward direction and then moves it in the reverse direction based on the presence or occupancy of the pallet on the linear motor and the linear motor adjacent to the linear motor to secure the origin of the pallet at a predetermined position.
Including,
The control unit,
Based on the occupancy rate of the pallet between the linear motor and the linear motor adjacent to the linear motor, one of the linear motor and the linear motor adjacent to the linear motor is selected as the main motor, and the remaining linear motor is selected as the auxiliary motor. A linear conveyor control device that moves the pallet in the forward or reverse direction and controls it to secure the origin of the pallet on the main motor. In claim 1,
When the first pallet is detected by the hall sensor and the occupancy sensor of the first linear motor, the control unit moves the first pallet to a second linear motor adjacent to the first linear motor and in which the first pallet is not detected. After the first pallet is not detected by the hall sensor of the first linear motor, the first pallet is moved in the reverse direction to secure the origin of the first pallet at a predetermined position. Linear conveyor control device. In claim 2,
When the first pallet is detected by the hall sensor of the first linear motor, the control unit operates the second linear motor adjacent to one side of the first linear motor and the third linear motor adjacent to the other side of the first linear motor. A linear conveyor control device, characterized in that it is controlled to secure the origin of the first pallet at a predetermined position by driving the first pallet onto the first linear motor. In claim 1,
When the control unit detects the second pallet from the Hall sensor of the fourth linear motor and the Hall sensor of the fifth linear motor adjacent to the fourth linear motor, the control unit selects the linear motor relatively occupied by the second pallet as the main motor. , after selecting a linear motor in which the second pallet is relatively less occupied as an auxiliary motor, moving the second pallet with the auxiliary motor so that the second pallet is not detected by the hall sensor of the main motor, A linear conveyor control device characterized in that the second pallet is moved in the reverse direction and controlled to secure the origin of the second pallet at a predetermined position. In claim 1,
When the third pallet cannot move on the sixth linear motor, when both ends of the third pallet are detected by a pair of position sensors, the control unit secures the origin of the third pallet on the sixth linear motor. A linear conveyor control device characterized in that it is determined that has been achieved. Detecting the presence or absence of a pallet through a hall sensor provided in a linear motor;
Detecting the occupancy rate of the pallet through an occupancy sensor provided in a linear motor; and
Based on the presence or occupancy of the linear motor and the pallet on the linear motor adjacent to the linear motor, moving the pallet in the forward direction and then moving it in the reverse direction, comprising controlling the pallet to secure the origin of the pallet at a predetermined position; ,
The controlling step is,
Based on the occupancy rate of the pallet between the linear motor and the linear motor adjacent to the linear motor, one of the linear motor and the linear motor adjacent to the linear motor is selected as the main motor, and the remaining linear motor is selected as the auxiliary motor. A linear conveyor control method that controls to secure the origin of the pallet on the main motor by moving the pallet in the forward or reverse direction. In claim 6,
The linear conveyor control method includes, when a first pallet is detected by a hall sensor and an occupancy sensor of a first linear motor, a second linear motor adjacent to the first linear motor and in which the first pallet is not detected is used to control the first pallet. Moving the pallet so that the first pallet is not detected by the hall sensor of the first linear motor, and then moving the first pallet in the reverse direction to control the origin of the first pallet to be secured at a predetermined position. A linear conveyor control method comprising: In claim 7,
The linear conveyor control method includes, when a first pallet is detected by the Hall sensor of the first linear motor, a second linear motor adjacent to one side of the first linear motor and a third linear motor adjacent to the other side of the first linear motor. A linear conveyor control method comprising the step of controlling the first pallet to secure the origin of the first pallet at a predetermined position by driving the motors together to move the first pallet onto the first linear motor. In claim 6,
The linear conveyor control method is such that, when the second pallet is detected by the hall sensor of the fourth linear motor and the hall sensor of the fifth linear motor adjacent to the fourth linear motor, the linear motor in which the second pallet is relatively occupied After selecting the main motor and the linear motor in which the second pallet is relatively less occupied as the auxiliary motor, the second pallet is moved by the auxiliary motor so that the second pallet is not detected by the hall sensor of the main motor. Afterwards, a linear conveyor control method comprising controlling the second pallet to move in the reverse direction to secure the origin of the second pallet at a predetermined position. In claim 6,
The linear conveyor control method is that, when the third pallet cannot move on the sixth linear motor, when both ends of the third pallet are detected by a pair of position sensors, the third pallet is moved on the sixth linear motor. A linear conveyor control method comprising the step of determining that the origin has been secured. Setting a predetermined linear motor as a main motor and setting a predetermined linear motor adjacent to the main motor as an auxiliary motor;
detecting occupancy of a pallet through an occupancy sensor provided in the main motor and the auxiliary motor; and
A linear conveyor control method comprising controlling the pallet to secure its origin on the main motor by moving the pallet in a forward or reverse direction based on the occupancy of the pallet on the main motor and the auxiliary motor. In claim 11,
The linear conveyor control method is,
Based on the occupancy of the pallet on the main motor, driving the auxiliary motor to move the pallet toward the main motor. delete delete delete

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