KR102665903B1 - fluid flow control device - Google Patents

Abstract

A process fluid flow control device comprising an inlet, an outlet, an operating mechanism and a diaphragm; the diaphragm is in direct operative communication with the outlet and/or the inlet; The mechanism includes a driven piezoelectric component, the device configured to: use the driven piezoelectric component to adjust a force applied to the diaphragm to regulate flow of process fluid through the device within a first rate range. It is composed.

Description

fluid flow control device

A mass flow controller (MFC) is a device used to measure and control the flow of liquids and gases.

Mass flow controllers are designed and calibrated to control a specific type of liquid or gas over a specific range of flow rates. The MFC can be given a set point from 0 to 100% of its full scale range, but is typically operated from 10 to 90% of full scale, where the best accuracy is achieved. The device will then control the flow rate to a given set point. MFC can be analog or digital. Digital flow controllers are typically capable of controlling more than one type of fluid, whereas analog controllers are limited to calibrated fluids.

All mass flow controllers have an inlet port, an outlet port, a mass flow sensor, and a proportional control valve. The MFC is equipped with a closed loop control system where input signals are given by an operator (or external circuit/computer) which compares the values from the mass flow sensor and adjusts the proportional valves accordingly to achieve the required flow. The flow rate is specified as a percentage of the corrected full scale flow and is supplied to the MFC as a voltage signal.

Mass flow controllers require the supply gas or liquid to be within a certain pressure range. Low pressure will deplete the fluid's MFC and prevent it from reaching the set point. High pressure can cause irregular flow.

According to one aspect, fluid flow control devices are provided, each comprising an actuation mechanism having a driving piezoelectric component. These devices are, for example, MFC.

The new devices can significantly improve the response time to fully execute commands to change the flow for fluid passing through the devices.

These devices can also be configured to precisely control any flow rate over a range of preset values for the fluid passing through them, rather than having only endpoints to that range by on/off settings, as in some commercially available MFCs. Can provide improved ability to configure

Some device embodiments include a plurality of actuation mechanisms, at least one of the actuation mechanisms including a driven piezoelectric component.

According to one aspect, a process fluid flow control device is provided comprising an inlet, an outlet, an actuating mechanism and a diaphragm:

The diaphragm is in direct operative communication with the outlet and/or inlet;

The mechanism includes a driven piezoelectric component,

The device is:

and configured to regulate the flow of process fluid through the device within a first flow rate range using the actuating piezoelectric component to adjust the force applied to the diaphragm.

For example, a high purity gas line may include a device.

In some embodiments, the actuating piezoelectric component is selected from the group consisting of a layered actuating piezoelectric component, and a flexure-type actuating piezoelectric component.

In some embodiments, the mechanism further includes at least one non-piezoelectric drive component in direct operative communication with the diaphragm,

The device is:

Using a driven piezoelectric component to adjust the force applied to the non-piezoelectric drive component and at least one non-piezoelectric drive component to apply a force to the diaphragm to reduce or block the flow of process fluid through the device. It is more structured.

In some embodiments, the at least one non-piezoelectric drive component includes a piston.

In some embodiments, the device is normally open and the device further includes pneumatic means for applying a force to the at least one non-piezoelectric drive component to block flow through the device.

In some embodiments, the piston has a first end contacting the diaphragm and a second end contacting the piezoelectric drive component.

In some embodiments, the second end contacts the free end of the piezoelectric actuation component;

The piezoelectric actuation component is curved.

In some embodiments, the device is normally closed, the device further comprising pneumatic means for applying a force to the at least one non-piezoelectric drive component,

The device is configured to allow flow of process fluid through the device, using a piezoelectric component to allow flow of pressurized air via pneumatic means to the at least one non-piezoelectric drive component.

In some embodiments, the at least one non-piezoelectric drive component includes a hollow piston having an upper portion adjacent the drive piezoelectric component and snugly enclosed within the barrel;

When the driven piezoelectric element is not in use, it blocks the barrel and thus prevents passage of pressurized air through the piston.

In some embodiments, when a driven piezoelectric component is used, pressurized air pushes against a spring that presses the piston against the diaphragm, thus allowing flow of process fluid through the device.

Some embodiments use a piezoelectric component to measure a first position of a piston and drive the piezoelectric component according to the measured position to adjust the position of the piston to a second predetermined position to direct the flow of process fluid through the device to a predetermined desired position. It further includes means for adjusting to the flow.

According to another aspect, a kit is provided comprising any of the devices described above and at least one replacement actuating mechanism comprising a replacement actuating piezoelectric component,

The device is configured to use at least one replaceable actuated piezoelectric component to regulate the flow of fluid through the device within a rate range other than the first rate range.

According to another aspect, a method is provided for controlling fluid flow from an inlet to an outlet, the method comprising:

providing a diaphragm in direct operative communication with the outlet and/or inlet;

providing a driven piezoelectric component;

Regulating the flow of fluid through the device within a first rate range using a driven piezoelectric component to adjust the force applied to the diaphragm.

Some embodiments further include:

providing at least one non-piezoelectric drive component in direct operative communication with the diaphragm;

using the driven piezoelectric component to adjust the force applied to the non-piezoelectric driven component, and

thereafter causing the at least one non-piezoelectric drive component to apply a force to the diaphragm to reduce or block the flow of fluid through the device.

Some embodiments further include:

Applying pressurized air to at least one non-piezoelectric drive component to block fluid flow from the inlet to the outlet.

Some embodiments further include:

applying pressurized air to at least one non-piezoelectric drive component;

Allowing fluid flow from an inlet to an outlet using a piezoelectric component to allow flow of pressurized air to the at least one non-piezoelectric drive component.

Some embodiments further include:

measuring a first position of the non-piezoelectric drive component;

Adjusting the fluid flow from the inlet to the outlet to a predetermined desired flow using a driven piezoelectric component according to the measured position to adjust the position of the piston to the second predetermined position.

Some embodiments further include:

measuring the mass flow of fluid from the outlet;

comparing the measured mass flow to a predetermined desired mass flow from the outlet, and

Using a driven piezoelectric component to adjust the force applied to the diaphragm to adjust the fluid flow from the outlet to a desired mass flow.

This summary is provided to introduce in a simplified form a selection of concepts that are further described in the Brief Description and Detailed Description of the Figures below. This Summary is not intended to identify key features or essential features of the claimed subject matter, and is not intended to be used to limit the scope of the claimed subject matter.

The drawings generally illustrate, but are not limited to, various embodiments discussed herein.

For simplicity and clarity, elements shown in the drawings are not necessarily drawn to scale. For example, the dimensions of some elements may be exaggerated relative to others for clarity. Additionally, reference numerals may be repeated to indicate corresponding or similar elements among the drawings. The drawings are listed below.

The number of elements shown in the drawings should not be construed as limiting but are illustrative only.

Figure 1 schematically shows a prior art MFC.
Figure 2 shows a schematic block diagram of an MFC with driven piezoelectric components.
Figure 3a shows a prior art layered actuated piezoelectric component in a perspective view.
Figure 3b shows a perspective view of a valve including a layered actuating piezoelectric component.
Figure 4a shows in a perspective view a typical commercially available prior art curved drive piezoelectric component with an elastic cover.
Figure 4b shows the component in perspective view with the cover removed.
Figure 4c shows in a side view the movement of a prior art driven piezoelectric element fixed to a surface.
Figure 5a shows in side view an MFC device comprising a driven piezoelectric curved component that is part of the actuation mechanism for the device, which is NO (normally open) and the device is in the open state.
FIG. 5B shows the device shown in FIG. 5A in a closed state.
Figure 6a shows a partially cut-away side view of an NC (normally closed) device with pneumatic means comprising a piston and a driving piezoelectric curved component for adjusting the position of the piston, showing in advance the flow of fluid through the device. Adjust to the desired flow determined. The device is in a closed state.
Figure 6b shows the device shown in Figure 6a in an open state.

1 shows a prior art MFC 1000'. MFC 1000' includes electronics 100, sensors 200, prior art control valve 400' and bypass 500.

Prior art control valves 400' for control of gas flow are typically solenoid operated pistons (not shown). Electronic device 100 can receive commands to change the flow. These commands can be compared to sensor readings of the current flow of fluid through valve 400'. Depending on the settings of the electronics 100 and the results of the comparison, this valve 400' allows full retraction or expansion of the piston, thereby changing the flow of fluid. However, this flow control is limited between two values. Moreover, the movement of the piston is slow and thus reaching the desired set point may be undesirably long. If a different flow is required, both the valve 400' and the electronics 100 will require replacement, and possibly the sensor 200 as well, thus involving replacement of the entire MFC 1000'. .

One goal is to provide a simple MFC with improved responsiveness. Another objective is to improve the ease of adapting the gas line to new desired flow settings. According to one aspect, a fluid flow control device is provided including an inlet, an outlet, an actuation mechanism and a diaphragm;

The diaphragm is in direct operative communication with the outlet and/or inlet;

The mechanism includes a driven piezoelectric component,

The device is:

and configured to regulate flow of fluid through the device within a first rate range using the actuating piezoelectric component to adjust the force applied to the diaphragm.

“Direct acting communication” means that the diaphragm, in some use conditions, is in direct contact with and/or between the inlet and/or outlet, as shown and described below when describing certain embodiments in detail. do.

JP H04370401 relates to a device capable of transporting fluid. The device includes a nozzle flapper drive mechanism that controls the pressure acting on a diaphragm or piston connected to the valve rod to block communication between the input and output ports. An electropneumatic regulator capable of controlling output pressure by controlling the displacement of a nozzle flapper based on detected pressure on the output port side is described.

The nozzle flapper drive mechanism includes piezoelectric components. However, the diaphragm in JP H04370401 does not directly communicate with the inlet (input port 2 therein) and/or the outlet (output port 3 therein). Rather, the diaphragm therein is located in a control pressure chamber remote from the inlet and outlet and serves to regulate the output pressure. The use of a diaphragm allows the diaphragm to push the piston.

The device described in JP H04370401 does not allow fine tuning of the mass flow. For the other purpose of improved flow control an overall much simpler device was invented.

2 shows a schematic block diagram of an MFC 1000" including a valve 400" with an actuator or actuation mechanism 420" including an actuating piezoelectric component 422". There is a diaphragm in direct operational communication with the outlet and/or inlet (not shown).

A sensor of mass flow 200, typically located downstream of the valve 400", may report to a PLC (programmable logic controller) 300, which transmits commands to the actuator 420". Modifying the MFC 1000" for a new flow regime involves changing the actuating piezoelectric component 422" to a different range of capacities (from the actuating piezoelectric component 422" to the actuator 420"). It can be as simple as disconnecting the two wires), and reusing the PLC 300 and often the sensor 200 as well, depending on the range of mass flows that can be accurately measured.

Generally speaking, there are three types of piezo motors. The most common type is the impulse-driven stick-slip piezo motor. The second category consists of stepper type piezo motors, also called walking piezo motors, which are commonly used to apply high forces. The third type is ultrasonic or resonant piezo motors. All three types have specific advantages and uses, which can be explained by examining their working principles in more detail, see for example https://xeryon.com/technology/how-do-piezo-motors-work/ do.

Figure 3a shows a prior art layered actuating piezoelectric component 422"' that can be used in a device (not shown) for an MFC. Figure 3b shows a diaphragm (not shown) located within the actuator body 423"'. A perspective view of a valve 400"' is shown, including a layered actuated piezoelectric component (not shown) coupled to the diaphragm to adjust the force applied to the diaphragm to regulate the flow of fluid through the device within a first rate range. .

The advantages of this particular type of drive component for use in mass flow control are a very fast response rate, typically of a few microseconds, and being relatively robust, thus allowing, in some embodiments, complete isolation of flow when this is required. It means doing it.

Although some commercially available actuation mechanisms are also powerful and fast and therefore also good shut-off valves, such commercial devices do not have any layered actuating piezoelectric components, and thus the flow in them can only be set to zero or a certain value. On the other hand, the inventive device with such layered actuated piezoelectric components can allow both strong and fast blocking and fine tuning of the flow to discrete values up to a maximum flow rate.

The maximum movement distance of the component is typically about 80 μm and the maximum driving force is 9600 N. When the voltage applied to the component is stopped, the component returns to its non-moving position.

Flow control devices incorporating these components can enable complete blocking in the valve, thereby making it possible to omit additional blocking components, since the range of mass flow rate (zero to maximum expansion of the component) is known in advance. May allow the use of off-the-shelf sensors for MFC.

FIG. 4A shows a conventional, commercially available prior art curved drive piezoelectric component 422″ with an elastic cover 425.

Figure 4b shows the component 422" in perspective view with the cover 425 removed. This curved drive piezoelectric component 422" has a cantilever shape, i.e. an elongated shape, and has a free first end 427b. ) has. Figure 4c shows in side view the movement of a prior art driven piezoelectric element 422" fixed to the surface 8 at the second end 427a. The fixation has a lever that can be biased at the free end 427b. It acts as a stand for

Additionally, this component has a very fast response and can enable complete blocking. The maximum travel distance is significantly longer than that of layered actuated piezoelectric components, typically 400 micrometers, and in this respect may be more suitable for many actuators. On the one hand, the maximum driving force is small at 150 N. Therefore, in some applications requiring very high reliability, additional components may be added to the actuator to complete the blocking. When the voltage applied to the component is stopped, the component returns to its non-moving position.

These bend-inducing lever amplification components are typically very compact, thus helping to minimize the size of the gas cabinet, where size can be a particularly important consideration. Curved components have high positioning accuracy, typically with resolution in the sub-nanometer range; It is suitable for both dynamic and static applications along with its responsiveness.

Some embodiments are now described in more detail. 5A shows a normally open [NO] MFC including a driven curved piezoelectric component 422" as also shown in FIGS. 4A-4C, which is part of an actuation mechanism 420" for device 400". Device 400" is shown in side view. Device 400" is shown in an open state in Figure 5A, with piezoelectric component 422" in a resting state. The process fluid-mass flow control device 400" also includes an inlet 412, an outlet 414, and a diaphragm 430. Diaphragm 430 is in direct operative communication with outlet 414.

Note that in other embodiments, the diaphragm may communicate directly with an inlet or an inlet and an outlet. Device 400" can use actuated piezoelectric component 422" to modulate the force applied to diaphragm 430. Accordingly, the driven piezoelectric component 422" regulates the flow of process fluid 10 through the device 400" within the first rate range 423a.

Device 400" is shown in FIG. 5B in a closed state, with a voltage applied across piezoelectric element 422" and the diaphragm closing outlet 414.

Mechanism 420" further includes a non-piezoelectric drive component, a piston 424, in direct operational communication with diaphragm 430. Accordingly, device 400" is capable of controlling the force applied to non-piezoelectric drive component 424. A drive piezoelectric component 422" can be used to regulate . The non-piezoelectric drive component 424 then applies a force to the diaphragm 430 to force the flow of fluid 10 through the device 400". Reduces flow.

In other words, application of voltage on the piezoelectric component 422" drives this piezoelectric component to push the piston 424, which in turn pushes the diaphragm 430. In this state of use, the diaphragm 430 ) is in direct contact with the outlet 414.

Device 400" also includes pneumatic means 440 for applying a force to non-piezoelectric drive component 424, thereby blocking flow throughout device 400".

It should be noted that the piston 424 has a first end 426a in contact with the diaphragm and a second end 426b in contact with the piezoelectric drive component 422″.

In particular, the second end 426b contacts the free end 427b of the piezoelectric drive component 422″.

The second end 426b is preferably positioned relative to the curved piezoelectric component 422" directly below the tip of the free end 427b of the component 422". The longitudinal direction of the piston is parallel to the direction in which it is intended to move and is the general direction of curvature of the component 422". Therefore, application of voltage to the piezoelectric component 422" causes maximum movement of the piston 424 and , providing particularly fast and sensitive mass flow control.

5A and 5B, and indeed other embodiments described herein, have a fairly simple structure and are used for regulation of mass flow. The actuating piezoelectric component 422" is an amplified bending guide lever that may be particularly suitable for use to drive mass flow control, for example in MFC systems that need to be compact. Device 400" also has a diaphragm (430) It is configured to block the flow by receiving air pressure. In other embodiments, the blocking capability is provided by electrically activated, non-piezoelectric mechanical components that may be included in the device.

The use of piezoelectric component 422" alone does not cause device 400" to assume a closed state but rather causes mass flow through device 400" to decrease in direct proportion to the voltage applied to piezoelectric component 422". You should be aware that you can do this.

Device 400" is configured such that air pressure from pressurized air 11 impinging on piston 424 exerts pressure on diaphragm 430. The combination of pressurized air 11 with piezoelectric element 422" The applied force can be used to block the flow of process fluid 10. In some embodiments, pneumatic means 440 are used only to block flow. In some embodiments, only pneumatic means 440 are used to block flow.

Currently, these embodiments work best, but other embodiments are also considered satisfactory.

In some other NO embodiments, the piezoelectric component is in direct communication with the diaphragm, ie the piston is eliminated.

In some embodiments, the piezoelectric component is configured to restrict the flow of pressurized air and thereby regulate the flow of fluid through the device. For example, the pneumatic means may comprise at least one conduit through which air is supplied to the surface of the diaphragm, wherein the actuating piezoelectric component moves within the conduit to create dead volume/turbulence therein, thereby reducing the pressure on the diaphragm. Can be used to increase flow.

Some device embodiments are normally closed (NC). Some of these NC devices include pneumatic means for applying a force on a non-piezoelectric drive component (such as a piston). The device uses a piezoelectric component to allow the flow of pressurized air via pneumatic means to the non-piezoelectric actuation component, thereby allowing the flow of fluid through the device.

Device embodiments may further include means for measuring the first position of the piston. Depending on the measured position, the actuating piezoelectric component can be used to adjust the position of the piston to a second predetermined position. Accordingly, the device adjusts the flow of fluid through the device to a predetermined desired flow.

An example of this embodiment is shown in Figure 6A. Device 500 is normally closed as shown in Figure 6A. The piston 524 is hollow and has an upper portion 525 adjacent the drive piezoelectric component 522, which fits snugly within the barrel 528. When the driven piezoelectric component 522 is not used, i.e., no voltage is applied, the driven piezoelectric component 522 blocks the barrel 528 to prevent the passage of pressurized air 11 through the piston 524. prevent.

As shown in FIG. 6B, when the driven piezoelectric component 522 is used, the driven piezoelectric component 522 is bent so that the barrel is no longer blocked and the pressurized air 11 enters the barrel 528 and fills the hollow It can pass through the entire piston (524). Pressurized air 11 then pushes against spring 527, which presses piston 524 against diaphragm 530, allowing flow of process fluid through device 500.

The piston 524 has gradations 529 marked along it, which are read by an encoder 550 that can convert specific gradations into specific flows.

Depending on the reading of the scale, encoder 550 commands drive piezoelectric component 522 to increase or decrease the influx of pressurized air 11 into barrel 528. This feedback control can be performed multiple times to achieve the exact desired flow due to the very fast response of the driven piezoelectric component 522.

The above-described embodiments allow continuous control of flow rather than binary control and can be much more effective in allowing both flow blocking and flow regulation.

Some high purity gas line embodiments include devices as described above.

Actuating piezoelectric components may include, for example, layered actuating piezoelectric components; It may be selected from the group consisting of curved driven piezoelectric elements, and motorized driven piezoelectric elements.

Any of these devices may in some embodiments further include a non-piezoelectric drive component, wherein the drive non-piezoelectric component is further configured to apply a force to the diaphragm to block flow of fluid through the device. .

According to another aspect, a kit is provided comprising any of the above devices and a plurality of interchangeable actuation mechanisms, at least one of the plurality of interchangeable mechanisms comprising an actuating piezoelectric component.

Explanation of Terms

In the description, unless otherwise stated, adjectives such as "substantially" and "about" that modify the condition or relational nature of a feature or feature of the invention mean that the condition or characteristic is carried out for the application for which it is intended. It should be understood to mean that the operation of the form is specified within acceptable tolerances.

It should be noted that the term "item" as used herein refers to any physically identifiable and individually identifiable unit of merchandise or merchandise, packaged or unpackaged. “top”, “bottom”, “right”, “left”, “bottom”, “bottom”, “lowered”, “low”, “top”, “top”, “elevated”, “high”, Positional terms such as “vertical” and “horizontal”, as well as their grammatical variations as used herein, necessarily mean, for example, that a “bottom” component is below a “top” component, or “below” does not mean that a component in is actually "below" another component, or that a component that is "above" is actually "above" another component, for example if the orientation, component, or both are flipped. It can be tilted, rotated, moved in space, positioned diagonally or in a position, positioned horizontally or vertically, or similarly modified. Accordingly, the terms “bottom,” “bottom,” “top,” and “above” are for illustrative purposes only and to describe the relative positioning or arrangement of particular components, such as a first component and a second component. It will be understood that it may be used herein to refer to or both.

“Connected with” means indirectly or directly “connected with.”

It is important that the methods described above are not limited to the corresponding description. For example, the method may include additional or even fewer processes or operations compared to those described herein and/or in the accompanying drawings. Additionally, embodiments of the method are not necessarily limited to the chronological order as described and shown herein.

Where a claim or specification refers to a single element or feature, such reference should not be construed as indicating the presence of only one of those elements. Thus, for example, reference to “an element” or “at least one element” may include “one or more elements.”

Unless otherwise stated, the use of the expression “and/or” between the last two members of a list of options for selection indicates that selection of one or more of the listed options is appropriate and can be performed.

It should be noted that, as used herein, the term "perspective view" can also refer to "isometric view" and vice versa.

For clarity, it is understood that certain features that are described in connection with separate embodiments may also be provided in combination in a single embodiment. Conversely, for brevity, various features that are described in connection with a single embodiment, example and/or option may also be provided separately or in any suitable sub-combination or in any other described embodiment as appropriate. . Certain features described in connection with various embodiments should not be considered essential features of the embodiments, examples, and/or options without them being inoperable. Accordingly, for clarity, features, structures, characteristics, stages, methods, modules, elements, entities or systems disclosed herein that are described in connection with separate embodiments also refer to a single embodiment. It may be provided in combination in the example. Conversely, for clarity, various features, structures, characteristics, stages, methods, modules, elements, entities or systems disclosed herein that are described in connection with single embodiments may also be described separately. or may be provided in any suitable sub-combination.

It should be noted that the term “exemplary” is used herein to refer to examples of implementations and/or embodiments and is not necessarily intended to convey a preferred use-case.

In alternative and/or different embodiments, additional, fewer, and/or different elements may be used.

Throughout this description, various embodiments may be presented in range format. It is to be understood that the description in scope format is for convenience and brevity only and should not be construed as a firm limitation on the scope of the invention. Accordingly, the description of a range should be regarded as specifically disclosing not only the individual numerical values within that range but also all possible subranges. For example, description of a range such as 1 to 6 refers to individual numbers within that range, such as 1, 2, 3, 4, 5, and 6, as well as specifically disclosed subranges such as 1 to 3, 1 to 4, and 1 to 6. Should be considered to have 5, 2 to 4, 2 to 6, 3 to 6, etc. This applies regardless of the width of the scope.

Whenever a numerical range appears herein, it is intended to include any recited numerical value (fractional or integral) if applicable within the indicated range. The phrases "range/ranges between" a first denotation number and a second denotation number and "range/ranges" of a first denotation number to "a" second denotation number are used interchangeably herein, and the first denotation number It is meant to include a number and a second displayed digit and all fractional and integer numbers between them.

Although aspects have been described with respect to a limited number of embodiments, these should not be construed as scope limitations, but rather as examples of some of the embodiments.

Claims (15)

1. A process fluid flow control device comprising an inlet, an outlet, an actuating mechanism and a diaphragm, comprising:
the diaphragm is in direct operative communication with the outlet and/or the inlet,
The actuating mechanism includes a driving piezoelectric component,
The device is,
configured to regulate the flow of process fluid through the device within a first rate range using the actuating piezoelectric component to adjust the force applied to the diaphragm,
the actuating mechanism further comprising a hollow piston in direct operational communication with the diaphragm, having an upper portion adjacent the drive piezoelectric element and snugly enclosed within a barrel,
The device is,
further configured to reduce or block flow of the process fluid through the device using the drive piezoelectric component to adjust a force applied to the hollow piston and the hollow piston to apply a force to the diaphragm; ,
The device is normally closed,
The device further comprises pneumatic means for applying a force to the hollow piston,
The device is configured to allow flow of the process fluid through the device, using the driven piezoelectric component to allow flow of pressurized air to the hollow piston via pneumatic means, wherein the driven piezoelectric component uses When not, the driven piezoelectric component blocks the barrel, thus preventing passage of pressurized air through the hollow piston. A high purity gas line comprising the device of claim 1. According to claim 1,
The process fluid flow control device of claim 1, wherein the actuating piezoelectric component is selected from the group consisting of a layered actuating piezoelectric component, and a curved actuating piezoelectric component. 1. A process fluid flow control device comprising an inlet, an outlet, an actuating mechanism and a diaphragm, comprising:
the diaphragm is in direct operative communication with the outlet and/or the inlet,
The actuating mechanism includes a driving piezoelectric component,
The device is,
configured to regulate the flow of process fluid through the device within a first rate range using the actuating piezoelectric component to adjust a force applied to the diaphragm;
the actuation mechanism further comprises at least one piston having a first end in contact with the diaphragm and a second end in contact with the drive piezoelectric component,
The device is,
Using the actuating piezoelectric component to adjust a force applied to the at least one piston, and the at least one piston to apply a force to the diaphragm, reduce or block flow of the process fluid through the device. A process fluid flow control device further configured to: According to claim 4,
The device is normally open,
The device further comprises pneumatic means for applying a force to the at least one piston to block flow through the device. According to claim 5,
the second end contacts the free end of the actuating piezoelectric component,
The process fluid flow control device of claim 1, wherein the actuating piezoelectric component is curved. According to claim 1,
The process fluid flow control device of claim 1, wherein the actuating piezoelectric component is a bend-inducing lever amplifying component. According to claim 1,
When the driven piezoelectric component is used, the pressurized air pushes against a spring that presses the piston against the diaphragm, thus allowing flow of the process fluid through the device. According to claim 4,
Measuring a first position of the piston and using the actuating piezoelectric component to adjust the position of the piston to a second predetermined position according to the measured position, thereby directing the flow of the process fluid through the device to a predetermined desired position. A process fluid flow control device further comprising means for regulating the flow. A kit comprising a device according to any one of claims 1 and 3 to 9 or a high purity gas line comprising the device of claim 1 and at least one replacement actuating mechanism comprising a replacement actuating piezoelectric component,
wherein the device is configured to use at least one replacement actuated piezoelectric component to regulate the flow of fluid through the device within a rate range other than the first rate range. delete delete A method for controlling fluid flow from an inlet to an outlet, comprising:
providing a diaphragm in direct operative communication with said outlet and/or said inlet;
providing a driven piezoelectric component;
regulating the flow of fluid through the device within a first rate range using the actuating piezoelectric component to adjust a force applied to the diaphragm;
providing a hollow piston in direct operative communication with the diaphragm and having an upper portion adjacent the drive piezoelectric component and snugly enclosed within a barrel;
Applying pressurized air to the hollow piston,
using the actuating piezoelectric component to adjust a force applied to the hollow piston;
Thereafter, the hollow piston applies a force to the diaphragm to reduce or block the flow of fluid through the device, and
using the driven piezoelectric component to allow flow of pressurized air to the hollow piston, allowing fluid flow from the inlet to the outlet, and when the driven piezoelectric component is not in use, the driven piezoelectric component blocking the barrel and thus preventing passage of pressurized air through the hollow piston.
A method for controlling fluid flow, comprising: According to claim 13,
measuring a first position of the hollow piston,
adjusting the fluid flow from the inlet to the outlet to a predetermined desired flow using the drive piezoelectric component in accordance with the measured position to adjust the position of the hollow piston to a second predetermined position.
A method for controlling fluid flow, further comprising: The method of claim 13 or 14,
measuring the mass flow of fluid from the outlet;
comparing the measured mass flow to a predetermined desired mass flow from the outlet, and
Using the driven piezoelectric component to adjust the force applied to the diaphragm to adjust fluid flow from the outlet to a desired mass flow.
A method for controlling fluid flow, further comprising: