KR102616237B1 - Pulse power supply - Google Patents

Abstract

The present invention discloses a pulsed power supply device. The pulse power supply device according to a preferred embodiment of the present invention can not only greatly increase the size of the pulse power provided to the load by connecting a plurality of pulse generation modules, but also can control the timing at which each pulse generation module generates pulse power. This allows you to adjust the repetition rate at which pulse power is provided to the load. In particular, the present invention is a process of connecting a plurality of pulse generation modules by winding a plurality of secondary coils of each pulse generation module and connecting each secondary coil in parallel with the secondary coil of another adjacent pulse generation module. It is possible to solve the imbalance problem of induced voltage and current caused by not perfectly matching all parameters of the pulse generation module. In addition, the pulse power supply device of the present invention can simply generate a bipolar pulse without adding a separate complicated circuit by using the winding direction of the transformer of the pulse generation module.

Description

Pulse power supply {Pulse power supply}

The present invention relates to a pulse power supply device, and more specifically, to a pulse power supply device having a plurality of pulse generation modules.

Generally, a pulse power supply connects a plurality of capacitors in series, stores energy in each capacitor, and then simultaneously switches on a plurality of switches connected in series to the capacitors to simultaneously transmit the energy stored in the capacitors to the output terminal. By emitting it, high voltage pulse power is provided to the load.

The prior art of such a pulse power supply device is disclosed in Korean Patent Nos. 10-1739882 and 10-0820171.

However, in the case of a high-voltage pulse generator using a conventional semiconductor switch, it has the great advantage of producing a relatively clean pulse waveform with short rising time and falling time, but the disadvantage is the large power loss caused by multiple switching elements. There is.

For example, assuming that the load supplied with pulse power is a plasma generator, the plasma generator requires a high voltage power supply, but does not require a high current, so the power consumed is relatively small.

In this case, there is a problem in that the power loss generated by the multiple switches included in the pulse power supply device becomes greater than the power consumed by the plasma generator device, which is a load. In other words, not only does the power loss in the switch become greater than the energy delivered to the actual load, but also a large heat sink is required for the pulse power device, and the power loss of the power device is increased by multiple switches stacked in series and their driving circuits. There is a problem with increasing size.

In addition, this conventional pulse power device has the problem of requiring an additional complex circuit to create a bipolar pulse.

The problem to be solved by the present invention is to provide a pulse power device that can easily drive a plurality of switches, has low power loss, and can provide bipolar pulses without adding a complicated circuit.

The pulse power device according to a preferred embodiment of the present invention for solving the above-mentioned problems is a pulse power device that supplies pulse power to a load by connecting a plurality of pulse generation modules, and each of the pulse generation modules stores electrical energy. Electrical energy is converted through a transformer and output to a load. The transformer has a plurality of secondary coils, and the secondary coils may be connected in parallel with the secondary coils included in the transformer of another pulse generation module.

In addition, when the pulse power supply device includes two pulse generation modules, the secondary coils of the transformer included in the pulse generation module are connected in parallel with the secondary coils of the transformer included in the other pulse generation module. , the secondary coils connected in parallel can be connected to each other in series again.

In addition, when the pulse power device includes three or more pulse generation modules, the secondary coils of the transformer included in each pulse generation module are parallel with the secondary coils of the transformer included in the different pulse generation modules. The secondary coils connected to each other in parallel can be connected to each other in series again.

Additionally, the pulse generation modules can generate power pulses at different timings to adjust the pulse power supply repetition rate of the pulse power device.

In addition, the winding direction of the primary or secondary coil of the transformer included in some of the pulse generating modules is opposite to the winding direction of the primary or secondary coil of the transformer included in other pulse generating modules. Thus, a bipolar power pulse can be supplied to the load.

In addition, the pulse generation modules include a semiconductor switching element; a control unit that outputs a control signal to control on/off of the semiconductor switching element; a switch driver that switches on/off the semiconductor switching element according to the control signal; a power supply element that stores electrical energy and discharges the electrical energy when the semiconductor switching element is switched on; A transformer that converts the electrical energy output from the power supply element and outputs it to a load; and a magnetizing inductor formed in parallel to the primary coil of the transformer, wherein a plurality of secondary coils of the transformer are formed, and each secondary coil may be connected in parallel with the secondary coil of another pulse generation module.

In addition, when the semiconductor switching element is switched on, the power supply element discharges the stored electric energy, and a current flows through the magnetization inductor and the semiconductor switching element by the discharged electric energy, thereby storing energy in the magnetization inductor. When the semiconductor switching element is switched off, the electrical energy stored in the magnetizing inductor is released and a current flows to the primary coil of the transformer, thereby inducing a current to the secondary coil of the transformer, thereby supplying pulse power to the load. there is.

In addition, when the pulse power device includes two pulse generation modules,

The secondary coils of the transformer included in the pulse generation module may be connected in parallel with the secondary coils of the transformer included in the other pulse generation module, and the secondary coils connected in parallel may be connected in series again.

In addition, when the pulse power device includes three or more pulse generation modules, the secondary coils of the transformer included in each pulse generation module are parallel with the secondary coils of the transformer included in the different pulse generation modules. The secondary coils connected to each other in parallel can be connected to each other in series again.

In addition, the control unit outputs a control signal at a different timing from the control unit of other pulse generation modules, thereby allowing the pulse generation modules to generate power pulses at different timings, thereby adjusting the pulse power supply repetition rate of the pulse power supply device. You can.

In addition, the winding direction of the primary or secondary coil of the transformer included in some of the pulse generating modules is opposite to the winding direction of the primary or secondary coil of the transformer included in other pulse generating modules. Thus, a bipolar power pulse can be supplied to the load.

The pulse power supply device according to a preferred embodiment of the present invention can not only greatly increase the size of the pulse power provided to the load by connecting a plurality of pulse generation modules, but also can control the timing at which each pulse generation module generates pulse power. This allows you to adjust the repetition rate at which pulse power is provided to the load.

In particular, the present invention is a process of connecting a plurality of pulse generation modules by winding a plurality of secondary coils of each pulse generation module and connecting each secondary coil in parallel with the secondary coil of another adjacent pulse generation module. It is possible to solve the imbalance problem of induced voltage and current caused by not perfectly matching all parameters of the pulse generation module.

In addition, the pulse power supply device of the present invention can simply generate a bipolar pulse without adding a separate complicated circuit by using the winding direction of the transformer of the pulse generation module.

1 is a diagram showing the configuration of a pulse power supply device according to a first preferred embodiment of the present invention.
Figure 2 is a timing diagram showing a pulse waveform output from a pulse power supply device according to a first preferred embodiment of the present invention.
Figure 3 is a diagram showing the configuration of a pulse power supply device according to a modified embodiment of the first preferred embodiment of the present invention.
Figure 4 is a diagram showing the configuration of a pulse power supply device according to a second preferred embodiment of the present invention.
Figure 5 is a timing diagram showing a pulse waveform output from a pulse power supply device according to a second preferred embodiment of the present invention.
Figure 6 is a diagram showing the configuration of a pulse power supply device according to a modified example of the second preferred embodiment of the present invention.
Figure 7 is a timing diagram showing a pulse waveform output from a pulse power supply device according to a modified example of the second preferred embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the attached drawings.

The pulse power device according to a preferred embodiment of the present invention is composed of a plurality of pulse generation modules connected to each other.

1 is a diagram showing the configuration of a pulse power supply device according to a first preferred embodiment of the present invention.

Referring to FIG. 1, the pulse power device according to the first preferred embodiment of the present invention has a structure in which two pulse generation modules (a first pulse generation module 110 and a second pulse generation module 120) are connected to each other. .

Each pulse generation module 110 and 120 includes a power supply element 113 that stores and discharges electrical energy, and a transformer T1 and T2 that converts the electrical energy output from the power supply elements 113 and 123 and outputs it to the load 200. ), a magnetizing inductor (L _m1 , L _m2 ) connected in parallel with the primary coil of the transformer (T1, T2), one end of which is connected to the magnetizing inductor (L _m1 , L _m2 ) and the primary coil, and the other end of which is grounded. It includes semiconductor switching elements (Q1, Q2), switch drivers (112, 122) that control on/off of the switching elements according to control signals, and control units (111, 121) that output control signals to the switch drivers (112, 122).

In addition, the transformers (T1, T2) have a primary coil and a secondary coil wound together on the core. The secondary coil of the present invention consists of two coils, and each secondary coil is connected to the transformer of another pulse generation module. Each is connected in parallel with the included secondary coil.

Since the pulse power device according to the first embodiment of the present invention includes two pulse generation modules (110 and 120), the secondary coils of each pulse generation module (110 and 120) are connected to the secondary coils of the remaining pulse generation modules (120 and 110). Each is connected in parallel. That is, the secondary coils belonging to the first pulse generation module 110 are respectively connected in parallel with the secondary coils belonging to the same pulse generation module 120. However, when the pulse power supply device includes three or more pulse generation modules, the two secondary coils belonging to each pulse generating module are connected in parallel with the secondary coils belonging to different pulse generating modules. This will be described in detail later.

Meanwhile, the power supply elements 113 and 123 are preferably implemented as capacitors C1 and C2 that are connected to an external power source to store electrical energy inside, and when the switching elements Q1 and Q2 are switched on, the internal The power stored in is discharged and output, and when the switching elements (Q1, Q2) are switched off (turned off), power is supplied from an external power source and stored.

The primary coil is wound around the core in the same way as a typical transformer, and a magnetizing inductor (L _m1 , L _m2 ) is naturally formed in parallel with the primary coil.

There are no limitations to the implementation of the semiconductor switching elements (Q1, Q2) as long as they can be turned on/off according to a control signal. In a preferred embodiment of the present invention, the source terminal or emitter terminal of the semiconductor switching element (Q1, Q2) is grounded, and the drain terminal or collector terminal is connected to the primary coil and the magnetizing inductor (L _m1 , L _m2 ).

The control units 111 and 121 control the semiconductor switching elements Q1 and Q2 by generating PWM control signals and outputting them to the switch drivers 112 and 122. The switch drivers 112 and 122 control the semiconductor switching elements Q1 and Q2 according to the control signals input from the control units 111 and 121. The semiconductor switching elements (Q1, Q2) are switched on/off by applying a voltage to the gate or base of the switching elements (Q1, Q2).

Figure 2 is a diagram showing a pulse waveform output from a pulse power supply device according to a first preferred embodiment of the present invention.

With further reference to FIG. 2(a), the operation of the pulse power supply device according to the first preferred embodiment of the present invention will be described. First, to describe an example in which the first pulse generation module 110 and the second pulse generation module 120 generate pulse power at the same timing, electrical energy is supplied to the capacitors C1 and C2, which are the power supply elements 113 and 123. In a power storage state, the first control unit 111 and the second control unit 121 simultaneously output control signals instructing switch on to the first switch driver 112 and the second switch driver 122, respectively.

The first switch driver 112 and the second switch driver 122 provide a signal (gate signal) (V Q1) for switching on (turn on) the first semiconductor switching element (Q1) and the second semiconductor switching element ( _Q2 ). and V _Q2 ) are output, respectively, and the semiconductor switching elements (Q1, Q2) are switched on.

When the semiconductor switching elements (Q1, Q2) are switched on, the power supply elements (113, 123) start discharging and current flows through the magnetizing inductors (L _m1 , L _m2 ) and the switching elements (Q1, Q2). At this time, since the impedance of the primary coil, which is projected from the secondary side to the primary coil, is very large compared to the reactance of the magnetized inductor (L _m1 , L _m2 ), most of the current (I _Lm1 , I _Lm2 ) flows through the magnetized inductor ( L _m1 ,L _m2 ), and accordingly, the electric energy emitted from the power supply elements 113 and 123 is stored in the magnetized inductors (L _m1 ,L _m2 ).

Afterwards, when the control units 111 and 121 stop outputting the control signal, the switch drivers 112 and 122 switch off (turn off) the semiconductor switching elements Q1 and Q2, and the energy discharge of the power supply elements 113 and 123 stops. do. At this time, the magnetized inductor (L _m1 ,L _m2 ) releases the energy stored inside by allowing the current to flow in the _same direction as the current (I _Lm1 ,I _Lm2 ) that previously flowed in the magnetized inductor (L _m1 ,L m2). do.

When the semiconductor switching elements (Q1, Q2) are turned off and the current (i _Lm1 , i _Lm2 ) continuously flows through the magnetizing inductor (L _m1 , L _m2 ), the current (i _Lm1 , i _Lm2 ) flows through the transformer (T1, T2) flows to the primary coil, and accordingly, the induced current (i _{o1_1} ,i _{o1_2} ,i _{o2_1} ,i _{o2_2} ) also flows in the secondary coil of the transformer (T1, T2). The direction of the current (i _{o1_1} ,i _{o1_2} ,i _{o2_1} ,i _{o2_2} ) flowing in the secondary coil is indicated by an arrow.

As shown in (a) of FIG. 2, the currents (i _{o1_1} ,i _{o1_2} ,i _{o2_1} ,i _{o2_2} ) induced in the secondary coil are input to the load 200, and the load 200 is driven by the input current. ) is provided with a high voltage ( _VO ).

Meanwhile, as shown in FIG. 2(b), when the switch on/off timing of the first semiconductor switching element Q1 and the second semiconductor switching element Q2 is adjusted, pulse power is provided to the load 200. The repetition rate can be adjusted.

Referring to FIG. 2(b), when explaining an example in which the first pulse generation module 110 and the second pulse generation module 120 generate pulse power at different timings, the capacitor ( In a state where power is stored in C1), the first control unit 111 first outputs a control signal instructing switch on to the first switch driver 112. Then, the first switch driver 112 outputs a signal (gate signal) (V _Q1 ) for switching on (turn on) to the first semiconductor switching element Q1, and the first semiconductor switching element Q1 is a switch. It comes.

When the first semiconductor switching element (Q1) is switched on, the first power supply element 113 starts discharging and current flows through the magnetizing inductor (L _m1 ) and the first semiconductor switching element (Q1). Afterwards, when the first control unit 111 stops outputting the control signal, the first switch driver 112 switches off (turns off) the first semiconductor switching element Q1 and turns off the power supply element 113. The electrical energy discharge stops. At this time, the magnetization inductor (L _m1 ) releases the energy stored inside by allowing a current to flow in the same direction as the current (i _Lm1 ) that previously flowed in the magnetization inductor (L _m1 ).

When the first semiconductor switching element (Q1) is turned off and the current continuously flows through the magnetizing inductor (L _m1 ), the current (i _Lm1 ) flows into the primary coil of the first transformer (T1), and thus the first 1 The induced current (i _{o1_1} ,i _{o1_2} ) also flows in the secondary coil of the transformer (T1). The direction of the current flowing in the secondary coil is indicated by an arrow.

As shown in FIG. 2(b), the currents (i _{o1_1} ,i _{o1_2} ) induced in the secondary coil are input to the load 200, and the input current generates a high voltage (V _O ) in the load 200. This is provided. At this time, assuming that the magnitude of the current provided to the load 200 is approximately 50% of the magnitude of the current supplied in the case shown in FIG. 2(a), the voltage (V _O ) supplied to the load 200 The size is also approximately 50%.

Meanwhile, after the pulse power from the first pulse generation module 110 is supplied to the load 200, the second control unit 121 outputs a control signal instructing switch on to the second switch driver 122, When the second switch driver 122 outputs a signal (gate signal) (V _Q2 ) for switching on (turn on) to the second semiconductor switching element (Q2), the second semiconductor switching element (Q2) switches on ( turn on).

When the second semiconductor switching element (Q2) is switched on, the second power supply element 123 starts discharging and the current flows through the magnetizing inductor (L _m2 ) and the second semiconductor switching element (Q2), and the second When the control unit 121 stops outputting the control signal, the second switch driver 122 switches off (turns off) the second semiconductor switching element Q2, and the electric energy discharge of the power supply element 123 stops. do.

At this time, the magnetization inductor (L _m2 ) causes the current to flow in the same direction as the current (i _Lm2 ) that previously flowed in the magnetization inductor (L _m2 ), thereby releasing the energy stored inside, and the second semiconductor switching element (Q2) ) is turned off, the current (i _Lm2 ) flowing in the magnetizing inductor (L _m2 ) flows into the primary coil of the second transformer (T2), and the current induced in the secondary coil of the second transformer (T2) is Current (i _{o2_1} ,i _{o2_2} ) flows.

Currents (i _{o2_1} ,i _{o2_2} ) induced in the secondary coil are input to the load 200, and a high voltage (V _O ) is provided to the load 200 by the input current. Likewise, assuming that the size of the current provided to the load 200 is approximately 50% of the size of the current supplied in the case shown in FIG. 2(a), the voltage (V _O ) supplied to the load 200 is The size is also approximately 50%.

As shown in FIG. 2, since the pulse power device of the present invention includes a plurality of pulse generation modules, the repetition rate of the pulse power provided to the load 200 is adjusted by adjusting the timing of generating pulse power in the pulse generation module. It can be adjusted.

As described so far, the pulse power device of the present invention can not only significantly increase the size of the pulse power provided to the load 200 by connecting a plurality of pulse power modules, but also each pulse power module can generate pulse power. By adjusting the timing, the repetition rate at which pulse power is provided to the load 200 can be adjusted.

In particular, the present invention connects a plurality of pulse generation modules by separating and winding the secondary coil of each pulse generation module into a plurality and connecting each secondary coil in parallel with the secondary coil of another adjacent pulse generation module. In the process, the imbalance problem of induced voltage and current caused by not perfectly matching all parameters of the pulse generation module was resolved.

Figure 3 is a diagram showing the configuration of a pulse power supply device according to a modified embodiment of the first preferred embodiment of the present invention.

A modified embodiment of the first embodiment shown in FIG. 3 is configured to generate a bipolar pulse by changing the winding directions of the transformers T1 and T2 of the two pulse generation modules 110 and 120 from each other.

Referring to (a) of FIG. 3, in the case of a modified example of the first embodiment, the winding direction of the primary coil of the second transformer (T2) is different from the winding direction of the primary coil of the first transformer (T1). It differs from the first embodiment only in that.

Looking at the operation, as described with reference to (b) of FIGS. 1 and 2, the first control unit and the second control unit output control signals at different timings, thereby generating the first pulse generation module 110 and the second control unit. The pulse generation module 120 generates pulse power at different timings. The process by which the first pulse generation module 110 generates pulse power is the same as described with reference to (b) of FIGS. 1 and 2.

Briefly explaining the process by which the second pulse generation module 120 generates pulse power, the second semiconductor switching element Q2 is switched on in the same manner as described with reference to (b) of FIGS. 1 and 2. The current flows through the magnetization inductor (L _m2 ) and the second semiconductor switching element (Q2), and when the second semiconductor switching element (Q2) is switched off (turned off), the magnetization inductor (L _m2 ) is the existing magnetization inductor (Q2). By allowing the current to flow in the same direction as the current flowing in L _m2 ), the energy stored inside is released.

At this time, since the primary coil of the second transformer (T2) is wound in the opposite direction to the primary coil of the first transformer (T1) (also, the primary coil of the second transformer (T2) shown in FIG. 1 (since they are wound in opposite directions), the direction of the current (i _{o2_1} , i _{o2_2} ) induced in the secondary coil is also the direction of the current (i _{o1_1} , i _{o1_2} ) induced in the secondary coil of the first transformer (T1). The directions are opposite to each other, so that the polarity of the pulse power supplied to the load 200 is opposite to that of the pulse power supplied to the load 200 from the first pulse generation module 110.

As such, the pulse power supply device of the present invention can simply generate a bipolar pulse by using the winding direction of the coils included in the transformer of the pulse generation module, without adding a separate complicated circuit. In addition, in the example shown in FIG. 3, the winding direction of the primary coil of the second transformer (T2) is reversed, but the winding direction of the primary coil of the second transformer (T2) is the primary winding of the first transformer (T1). Those skilled in the art will know that a bipolar pulse power can be provided even if the direction is the same and the winding direction of the secondary coil is opposite to the secondary winding direction of the first transformer (T1).

FIG. 4 is a diagram showing the configuration of a pulse power supply device according to a second preferred embodiment of the present invention, and FIG. 5 is a timing diagram showing a pulse waveform output from the pulse power supply device according to a second preferred embodiment of the present invention. am.

Referring to Figures 4 and 5, the pulse power supply device according to the second embodiment has three or more pulse generation modules, and accordingly, the secondary coils of the pulse generation modules are different from each other to which the secondary coils are connected in parallel. The only difference is that the rest of the configuration is the same.

Therefore, when explaining the configuration different from the first embodiment, the pulse power device of the second embodiment has four pulse generation modules (the first pulse generation module 110 to the fourth pulse generation module 140) connected to each other. It is connected and composed.

The detailed configuration of each pulse generation module (110, 120, 130, and 140) is the same as the first embodiment, and the secondary coils of the transformers (T1, T2, T3, and T4) included in each pulse generation module (110, 120, 130, and 140) are composed of two. . Secondary coils included in the same transformer are respectively connected in parallel with secondary coils included in transformers of different pulse generation modules.

Referring to FIG. 4, one of the two secondary coils included in the transformer (T1) of the first pulse generation module 110 is connected in parallel with the secondary coil of the second transformer (T2), and the other is connected to the secondary coil of the second transformer (T2). 3 Connected in parallel with the secondary coil of transformer (T3).

Likewise, one of the two secondary coils included in the transformer (T2) of the second pulse generation module 120 is connected in parallel with the secondary coil of the first transformer (T1), and the other is connected to the fourth transformer (T4) ) is connected in parallel with the secondary coil.

In the same way, one of the two secondary coils included in the transformer (T3) of the third pulse generation module 130 is connected in parallel with the secondary coil of the first transformer (T1), and the other is connected to the fourth transformer. It is connected in parallel with the secondary coil of (T4).

In addition, one of the two secondary coils included in the transformer (T4) of the fourth pulse generation module 140 is connected in parallel with the secondary coil of the second transformer (T2), and the other is connected to the third transformer (T3) ) is connected in parallel with the secondary coil.

The secondary coils connected in parallel like this are connected in series with each other to supply pulse power to the load 200.

As explained so far, each of the plurality of secondary coils of the transformer is connected in parallel with the secondary coil included in the transformer of the different pulse generation modules, thereby causing uniform voltage and current between each pulse generation module to load (200) ) can supply stable pulse power to the side.

Looking at the operation of the pulse power supply device according to the second embodiment, first, as shown in Figure 5 (a), the first control unit to the first pulse generation module 110 to the fourth pulse generation module 140. The fourth control unit simultaneously outputs control signals to the switch drivers, and the switch drivers simultaneously output signals (V _Q1 , V Q2, V Q3, V _{Q3) to switch on the semiconductor switching elements (V Q1, V Q2, V Q3, V Q3 ) .} When the switch is turned on by outputting to Q1~Q4), electrical energy is emitted from the power supply elements (C1~C4) of each pulse generation module (110~140), and the magnetization inductor (L _m1 ~L _m4 ) and the semiconductor switching element (Q1) ~Q4), energy is stored in the magnetized inductor (L _m1 ~L _m4 ), and when the semiconductor switching element (Q1~Q4) is switched off, the current flowing in the magnetized inductor (L _m1 ~L _m4 ) flows through the transformer ( As it flows into the primary coil of T1~T4), the induced current (i _{o1_1} ,i _{o1_2} ,i _{o2_1} ,i _{o2_2} ,i _{o3_1} ,i _{o3_2} ,i _{o4_1} ,i _{o4_2} ) flows in the secondary coil.

The current (i _{o1_1} ~i _{o4_2} ) induced in this way is output to the load 200, thereby providing a high voltage (V _O ) pulse to the load 200.

Meanwhile, in the same way as described with reference to (b) in FIG. 5, (b) in FIG. 5 shows the load by adjusting the on/off timing of the semiconductor switching elements (Q1 to Q4) of each pulse generation module (110 to 140). An example of adjusting the repetition rate at which pulse power is provided to the (200) side is shown.

As shown in (b) of FIG. 5, the first semiconductor switching element (Q1) of the first pulse generation module 110 and the second semiconductor switching element (Q2) of the second pulse generation module 120 are switched at the same time. When turned on, induced currents (i _{o1_1} ,i _{o1_2} ,i _{o2_1} ,i _{o2_2} ) are generated only in the secondary coils of the transformers of the first pulse generation module 110 and the second pulse generation module 120, and are transmitted to the load 200. supplied.

Thereafter, in the same manner, when the third semiconductor switching element Q3 of the third pulse generation module 130 and the fourth semiconductor switching element Q4 of the fourth pulse generation module 140 are simultaneously switched on, the third Induced currents (i _{o3_1} ,i _{o3_2} ,i _{o4_1} ,i _{o4_2} ) are generated only on the secondary side of the transformers (T3, T4) of the pulse generation module 130 and the fourth pulse generation module 140 and supplied to the load 200. do.

In this way, by sequentially operating the plurality of pulse generation modules 110 to 140, the repetition rate of the pulse power supply device can be adjusted.

Figure 6 is a diagram showing the configuration of a pulse power supply device according to a modified embodiment of the second preferred embodiment of the present invention, and Figure 7 is a diagram showing a pulse output from the pulse power supply device according to a modified embodiment of the second preferred embodiment of the present invention. This is a timing diagram showing the waveform.

Referring to Figures 6 and 7, even in the case of the second embodiment, as shown in Figure 3, a bipolar power pulse can be provided to the load 200. In order to provide a bipolar pulse, a modification of the second embodiment changes the winding direction of the primary coils of the third transformer (T3) and the fourth transformer (T4) to the first transformer (T1) and the second transformer (T2). It was set in the opposite direction.

Accordingly, the direction of the currents (i _{o3_1} ,i _{o3_2} ,i _{o4_1} ,i _{o4_2} ) induced in the secondary side of the third transformer (T3) and the fourth transformer (T4) is the direction of the third transformer (T3) shown in FIG. ) and the directions of the currents (i _{o3_1} ,i _{o3_2} ,i _{o4_1} ,i _{o4_2} ) induced in the secondary side of the fourth transformer (T4) are opposite to each other.

Therefore, as shown in FIG. 7, when the third semiconductor switching element Q3 and the fourth semiconductor switching element Q4 are switched on (turned on), the third magnetization inductor (L _m3 ) and the fourth magnetization inductor ( Energy is stored as a current flows through (L _m4 ), and when the third semiconductor switching element (Q3) and the fourth semiconductor switching element (Q4) are switched off (turned off), the third magnetization inductor (L _m3 ) and the fourth magnetization The currents (i _Lm3 ,i _Lm4 ) flowing in the inductor (L _m3 ) flow into the primary coils of the third transformer (T3) and the fourth transformer (T4), Induced current (i _{o3_1} ,i _{o3_2} ,i _{o4_1} ,i _{o4_2} ) flows in the primary coil, and as the induced current flows into the load 200, a high voltage (-V _O ) pulse, that is, the first pulse, flows into the load 200. The generation module 110 and the second pulse generation module 120 provide high voltage pulse power (-V _O ) whose polarity is opposite to the high voltage (VO ₎ pulse provided to the load 200 .

In a modified embodiment of the second embodiment, instead of the primary coil of the third transformer (T3) and the fourth transformer (T4), the secondary coil is wound in the opposite direction to that of the first transformer (T1) and the second transformer (T2). Of course, the same effect occurs.

So far, the present invention has been examined focusing on its preferred embodiments. A person skilled in the art to which the present invention pertains will understand that the present invention may be implemented in a modified form without departing from the essential characteristics of the present invention. Therefore, the disclosed embodiments should be considered from an illustrative rather than a restrictive perspective. The scope of the present invention is indicated in the claims rather than the foregoing description, and all differences within the equivalent scope should be construed as being included in the present invention.

110: first pulse generation module
111: first control unit 112: first switch driver
113: Power supply element Q1: First semiconductor switching element
L _m1 : magnetizing inductor T1: first transformer
120: second pulse generation module
121: second control unit 122: second switch driver
123: Power supply element Q2: Second semiconductor switching element
L _m2 : magnetizing inductor T2: second transformer
130: Third pulse generation module
140: Fourth pulse generation module
200: load

Claims (11)

delete A pulse power device in which a plurality of pulse generation modules are connected to supply pulse power to a load,
Each of the pulse generation modules stores electrical energy, converts the electrical energy through a transformer, and outputs it to a load,
The transformer has a plurality of secondary coils, one of the plurality of secondary coils is connected in parallel with one of the plurality of secondary coils included in the transformer of another pulse generation module, and the other pulse generation module It is connected in series with one of the plurality of secondary coils included in the transformer,
When the pulse power device includes two pulse generating modules,
One of the secondary coils of the transformer included in each pulse generation module is connected in parallel with one of the secondary coils of the transformer included in the other pulse generation module and connected in series with the other one. Characterized by pulse power supply. A pulse power device in which a plurality of pulse generation modules are connected to supply pulse power to a load,
Each of the pulse generation modules stores electrical energy, converts the electrical energy through a transformer, and outputs it to a load,
The transformer has a plurality of secondary coils, one of the plurality of secondary coils is connected in parallel with one of the plurality of secondary coils included in the transformer of another pulse generation module, and the other pulse generation module It is connected in series with one of the plurality of secondary coils included in the transformer,
When the pulse power device includes three or more pulse generating modules,
One of the secondary coils of the transformer included in each pulse generation module is connected in parallel with any one of the secondary coils of the transformer included in the other pulse generation module, and the coil of the transformer included in the other pulse generation module is connected in parallel. A pulse power supply device characterized in that it is connected in series with any one of the secondary coils. According to claim 2 or 3,
The pulse generation modules generate power pulses at different timings and adjust the pulse power supply repetition rate of the pulse power device. According to claim 2 or 3,
The winding direction of the primary or secondary coil of the transformer included in some of the pulse generating modules is opposite to the winding direction of the primary or secondary coil of the transformer included in other pulse generating modules, A pulse power supply device characterized in that it supplies bipolar power pulses to a load. According to claim 2 or 3,
Each of the pulse generation modules is
semiconductor switching device;
a control unit that outputs a control signal to control on/off of the semiconductor switching element;
a switch driver that switches on/off the semiconductor switching element according to the control signal;
a power supply element that stores electrical energy and discharges the electrical energy when the semiconductor switching element is switched on;
The transformer converts the electrical energy output from the power supply element and outputs it to a load; and
It includes a magnetizing inductor formed in parallel to the primary coil of the transformer,
A pulse power supply device characterized in that the secondary coil of the transformer is formed in plural, and each secondary coil is connected in parallel with the secondary coil of another pulse generation module. According to claim 6,
When the semiconductor switching element is switched on, the power supply element discharges the stored electric energy, and the discharged electric energy causes a current to flow through the magnetization inductor and the semiconductor switching element, storing energy in the magnetization inductor,
When the semiconductor switching element is switched off, the electrical energy stored in the magnetizing inductor is released and a current flows into the primary coil of the transformer, and a current is induced in the secondary coil of the transformer, thereby supplying pulse power to the load. Pulse power supply device. delete delete According to claim 6,
The control unit outputs control signals at different timings from the control units of other pulse generation modules, thereby allowing the pulse generation modules to generate power pulses at different timings, thereby adjusting the pulse power supply repetition rate of the pulse power supply device. Characterized by pulse power supply. According to claim 6,
The winding direction of the primary or secondary coil of the transformer included in some of the pulse generating modules is opposite to the winding direction of the primary or secondary coil of the transformer included in other pulse generating modules, A pulse power supply device characterized in that it supplies bipolar power pulses to a load.

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