KR102604757B1 - Appartus for eliminating water or powder in wet type waste gas cleaning unit - Google Patents

Abstract

The disclosed content is that moisture or dust contained in waste gas is effectively collected and removed by centrifugal force resulting from the rotation of the rotating brush within a wet cleaning unit such as a wet scrubber and a wet cleaning unit of a mixed scrubber, thereby preventing blockage of the exhaust duct in advance. This relates to a device for removing moisture or dust from a wet cleaning unit that can prevent this.
The disclosed content includes a lower shaft support installed on the inner lower side of a wet cleaning unit for wet cleaning waste gas, an upper shaft support installed on the inner upper side of the wet cleaning unit, and a central axis spanning the lower shaft support and the upper shaft support. The rotating brush is rotatably installed vertically and has a plurality of brush bristles on the outer peripheral surface, a driving actuator provided on one side of the wet cleaning unit, and the central axis of the driving actuator and the rotating brush are electrically connected to the rotating brush. A device for removing moisture or dust from a wet cleaning unit including an electric module that rotates the central axis is presented as an example.

Description

Moisture or dust removal device for wet cleaning unit {APPARTUS FOR ELIMINATING WATER OR POWDER IN WET TYPE WASTE GAS CLEANING UNIT}

The disclosed content relates to a moisture or dust removal device for a wet cleaning unit that is installed in a wet cleaning unit to purify and discharge waste gas used in a semiconductor or display manufacturing process to a level below an appropriate standard and remove moisture or dust.

Unless otherwise indicated herein, the material described in this section is not prior art to the claims of this application, and is not admitted to be prior art by inclusion in this section.

Although there are significant differences depending on the type of semiconductor such as DRAM, SD RAM, flash memory, and silicon semiconductor, the manufacturing of semiconductors usually involves wafer manufacturing process, circuit design and mask manufacturing process, oxidation, photosensitization, exposure, and development. , a wafer processing process including etching, ashing, and chemical vapor deposition (CVD), and a package process. For example, the semiconductor manufacturing process described above is applied to the manufacture of displays such as flat panel displays (FPD).

In the case of semiconductor manufacturing processes, process gases such as high purity H ₂ , SiH ₄ (monosilane) or SiHCl ₃ (trichlorosilane) are used, and for chemical vapor deposition, high purity SiH ₄ , SiH ₂ Cl ₂ , SiHCl ₃ and SiCl ₄ are used. , GeH ₄ , B ₂ H ₆ , BBr ₃ , BCl ₃ , AsH ₃ , PH ₃ , TeH _2, SnCl ₄ , GeCl ₄ , WF ₆ , NH _{3, CH 4} , Cl _{2 ,} MoF _6, etc. High purity hydrogen (H ₂ ) and nitrogen (N ₂ ) are used as carrier gas. In addition, process gases such as SiF ₄ , CF ₄ , C ₃ F ₈ , C ₂ F ₆ , CHF ₃ , CClF ₃ , and O ₂ are used for plasma etching, and C ₃ F ₈ , CHF ₃ , CClF ₃ , and CF are used for ion beam etching. Special process gases such as ₄ are used.

Meanwhile, process gases used in semiconductor manufacturing are highly toxic, flammable, and corrosive and contain harmful ingredients such as volatile organic compounds (VOC _S ). Here, volatile organic compounds are a general term for liquid or gaseous organic compounds that easily evaporate into the atmosphere due to their high vapor pressure. They cause photochemical reactions in the atmosphere to generate photochemical oxidizing substances such as ozone, causing photochemical smog. It is not only a cause of air pollution but also global warming, and is also known to be a carcinogen.

Only a portion of these process gases participate in reactions within the manufacturing facility, and the remaining 90% of the process gas is discharged from the manufacturing facility in an unreacted state. If the process gas discharged in this way (hereinafter referred to as 'waste gas') is released into the atmosphere without a separate purification process, it will cause damage to surrounding manufacturing facilities, serious environmental pollution, and safety accidents for workers. Therefore, each manufacturing facility must have an exhaust duct. A scrubber is installed on the connected gas discharge line to decompose or purify the waste gas to a level below the standard level.

These scrubbers decompose or purify waste gas using the characteristics of the waste gas, namely, the property of reacting explosively upon contact with air, the property of combustion, the property of reacting with gas treatment agents, and the property of dissolving in water. It is largely divided into dry scrubbers, wet scrubbers, and mixed scrubbers that combine dry and wet scrubbers.

Dry scrubbers allow waste gas to pass through the flame or plasma of a burner to directly combust or oxidize it, or have a structure to thermally decompose it by passing it into a high-temperature chamber formed by a heat source such as a heater. These dry scrubbers are excellent at treating ignitable (combustible) waste gases, but are unsuitable for treating waste gases that do not easily burn, such as water-soluble gases.

Wet scrubbers have a relatively simple structure that collects waste gases using water spray, then cleans and cools them, and has the advantage of being easy to manufacture and capable of increasing capacity. However, it is impossible to treat insoluble waste gas, and it is especially unsuitable for treatment of waste gas containing highly flammable hydrogen groups.

The mixed scrubber has a structure that first combusts the waste gas in the reactor to remove ignitable and explosive gases, and then secondarily dissolves the aqueous toxic waste gas in water through water injection. An example of such a mixed scrubber is used in Korea. Model Registration No. 20-0405303 (announced on January 10, 2006), Republic of Korea Patent Publication No. 10-2010-0021135 (published on February 24, 2010), Republic of Korea Patent Registration No. 10-1431452 (announced on August 12, 2014), Korea It is disclosed in Patent Registration No. 10-1568804 (announced on November 12, 2015).

Looking at the process of treating waste gas by the above-mentioned mixed scrubber, waste gas generated in the process chamber of a semiconductor manufacturing facility flows into the dry reactor and is then primarily burned/oxidized by the flame of the burner or high-temperature plasma. The waste gas that has gone through primary purification treatment or is primarily thermally decomposed by a heater is moved to a wet zone with a water spray structure, where water-soluble toxic components contained in the waste gas are dissolved and at the same time dust (powder) is collected. It falls into the lower water tank and undergoes secondary cleaning where it is collected, and the cleaned processed gas is finally discharged into the atmosphere through a filter (moisture removal, etc.) and exhaust duct.

However, if moisture and dust are not properly collected and removed in a wet cleaning unit such as a wet scrubber and a wet cleaning unit of a mixed scrubber, there is a problem in that the exhaust duct is blocked by moisture condensation and dust adhesion.

As an example of a solution to this problem, polling is installed in the wet cleaning unit, such as in Korea Utility Model Registration No. 20-0405303 (announced on January 10, 2006), or in Korea Patent Registration No. 10-1312414 (announced on October 14, 2013). As shown in the notice), an electrostatic precipitator using corona discharge is sometimes installed within a wet cleaning unit.

However, in the former case, treatment of water-soluble toxic ingredients is easy, but the phenomenon of moisture and dust flowing into the exhaust duct cannot be prevented. In the latter case, the dust collection and treatment efficiency is increased, but moisture still flows into the exhaust duct. There is.

1. Republic of Korea Utility Model Registration No. 20-0405303 (announced on January 10, 2006) 2. Republic of Korea Patent Publication No. 10-2010-0021135 (published on February 24, 2010) 3. Republic of Korea Patent Registration No. 10-1431452 (announced on August 12, 2014) 4. Republic of Korea Patent Registration No. 10-1568804 (announced on November 12, 2015) 5. Republic of Korea Patent Registration No. 10-1312414 (announced on October 14, 2013)

In a wet cleaning unit such as the wet cleaning part of a wet scrubber and a mixed scrubber, the moisture or dust contained in the waste gas is effectively collected and removed by the centrifugal force caused by the rotational drive of the rotating brush, thereby preventing blockage of the exhaust duct in advance. The object is to provide a device for removing moisture or dust from a wet cleaning unit.

Additionally, it is not limited to the technical challenges described above, and it is obvious that other technical challenges may be derived from the description below.

The disclosed content includes a lower shaft support installed on the inner lower side of a wet cleaning unit for wet cleaning waste gas, an upper shaft support installed on the inner upper side of the wet cleaning unit, and a central axis spanning the lower shaft support and the upper shaft support. The rotating brush is rotatably installed vertically and has a plurality of brush bristles on the outer peripheral surface, a driving actuator provided on one side of the wet cleaning unit, and the central axis of the driving actuator and the rotating brush are electrically connected to the rotating brush. A device for removing moisture or dust from a wet cleaning unit including an electric module that rotates the central axis is presented as an example.

According to a preferred feature of the disclosed content, one end is fixed to the lower shaft support and the upper shaft support, extends vertically away from the central axis of the rotating brush, and is collected in the brush bristles of the rotating brush when the rotating brush rotates. It further includes a brushing bar that shakes off moisture or dust.

According to a preferred feature of the disclosed content, the brush bristles are formed to be divided into lower brush bristles and upper brush bristles based on the longitudinal center of the central axis of the rotating brush.

According to a preferred feature of the disclosed content, the driving actuator is a driving motor, and the electric module includes a driving sprocket installed on the output shaft of the driving actuator, an electric sprocket installed on the central axis of the rotating brush, the driving sprocket and the It includes an electric chain that electrically connects the electric sprocket, and a side protruding frame is installed on one side of the wet cleaning unit in communication, and the drive actuator is installed so that the output shaft protrudes into the side protruding frame.

According to a preferred feature of the disclosed content, the driving actuator is a cylinder mechanism, and the electric module includes a rack gear formed on the piston rod of the driving actuator, and a pinion gear provided on the central axis of the rotating brush and engaged with the rack gear. It includes, and the driving actuator is installed in the wet cleaning unit so that the piston rod penetrates into the wet cleaning unit.

According to the moisture or dust removal device of the wet cleaning unit according to the disclosed embodiment, moisture contained in the waste gas is removed by centrifugal force resulting from the rotational drive of the rotating brush within the wet cleaning unit, such as the wet cleaning unit of the wet scrubber and the mixed scrubber. Alternatively, there is an advantage that blockage of the exhaust duct can be prevented in advance as dust is effectively collected and removed.

According to the moisture or dust removal device of the wet cleaning unit according to the disclosed embodiment, the brushing bar is fixedly installed on the lower shaft support and the upper shaft support, so that when the rotating brush rotates, the brush bristles of the rotating brush collide with the brushing bar. There is an advantage that moisture or dust collected on the brush bristles of the rotating brush can be shaken off and removed, and the brush bristles of the rotating brush can be automatically cleaned.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

1 is a schematic installation structure diagram of a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.
Figure 2 is a partially cut-away perspective view of a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.
Figure 3 is a cross-sectional view of a device for removing moisture or dust from a wet cleaning unit according to an embodiment of the disclosed content.
Figure 4 is a structural diagram of an embodiment of a driving actuator and an electric module in a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.
Figure 5 is a structural diagram of another embodiment of a driving actuator and an electric module in a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.

Hereinafter, the configuration and effects of the preferred embodiment will be examined with reference to the attached drawings. For reference, in the drawings below, each component is omitted or schematically shown for convenience and clarity, and the size of each component does not reflect the actual size. In addition, the same reference numerals refer to the same components throughout the specification, and reference numerals for the same components in individual drawings will be omitted.

As shown in FIG. 1, the moisture or dust removal device 1 of the wet cleaning unit according to an embodiment of the disclosed content is a wet scrubber or mixed type that wet cleans waste gas used in, for example, a semiconductor manufacturing process or a display manufacturing process. It is installed in the wet cleaning unit (3), such as the wet cleaning part of the scrubber, and serves to improve the effect of collecting and removing moisture or dust contained in the waste gas.

Due to the installation of the moisture or dust removal device (1) of the wet cleaning unit according to the embodiment of the disclosed content, the exhaust duct (5) connected to the wet cleaning unit (3), such as the wet cleaning unit of a wet scrubber or a mixed scrubber. Moisture or dust is prevented from reaching the exhaust duct 5, and blockage due to adsorption of moisture or dust can be prevented in advance.

FIG. 2 is a detailed structural diagram of a device for removing moisture or dust from a wet cleaning unit according to an embodiment of the disclosure, and FIG. 3 is a cross-sectional view of a device for removing moisture or dust from a wet cleaning unit according to an embodiment of the disclosure.

As shown in FIGS. 2 and 3, the moisture or dust removal device 1 of the wet cleaning unit according to an embodiment of the disclosed content includes a lower shaft installed on the inner lower side of the wet cleaning unit 3 for wet cleaning of waste gas. The central axis 31 rotates vertically across the support 10, the upper shaft support 20 installed on the inner upper side of the wet cleaning unit 3, the lower shaft support 10, and the upper shaft support 20. A rotating brush 30 that can be installed and has a plurality of brush bristles 33 on the outer peripheral surface, a driving actuator 40 provided on one side of the wet cleaning unit 3, and a driving actuator 40 and a rotating brush ( It includes an electric module 50 that rotates the central axis 31 of the rotary brush 30 by electrically connecting the central axis 31 of the rotary brush 30.

Here, the lower shaft support 10 rotatably supports the lower end of the central shaft 31 of the rotating brush 30, which will be explained later, and is fixedly installed on the lower inside of the wet cleaning unit 3.

The lower shaft support 10 has a horizontal bar shape extending across the inner lower center of the wet cleaning unit 3, and at the center of its upper surface, the lower end of the central axis 31 of the rotating brush 30 is, for example, an axis. It is installed rotatably through bearings. Waste gas can flow through the space between both sides of the lower shaft support 10 and the inner lower edge of the wet cleaning unit 3.

The upper shaft support 20 rotatably supports the upper end of the central shaft 31 of the rotating brush 30, which will be described later, and is fixedly installed on the upper inside of the wet cleaning unit 3.

The upper shaft support 20 has the shape of a horizontal bar extending across the inner upper center of the wet cleaning unit 3, and at the center of its lower surface, the upper end of the central axis 31 of the rotating brush 30 is, for example, an axis. It is installed rotatably through bearings. Waste gas can flow through the space between both sides of the upper shaft support 20 and the inner upper edge of the wet cleaning unit 3.

The aforementioned lower shaft support 10 and upper shaft support 20 can be installed integrally on the flange connection portion of the wet cleaning unit 3.

Inside the wet cleaning unit 3, a rotating brush 30 is rotatably installed across the lower shaft support 10 and the upper shaft support 20 described above. The rotating brush 30 is rotated within the wet cleaning unit 3 and collects moisture or dust that cannot be treated despite the wet cleaning of the wet cleaning unit 3, and at the same time removes moisture or dust through centrifugal force generated by rotation. It serves to double the wet cleaning effect by colliding dust with the inner wall of the wet cleaning unit (3).

The rotating brush 30 has a structure in which the central axis 31 is installed to be rotatable vertically and a plurality of brush bristles 33 are provided on the outer peripheral surface of the central axis 31, and the brush bristles 33 are rotary brushes. It is preferable that the brush is divided into lower brush bristles 35 and upper brush bristles 37 based on the longitudinal center of the central axis 31 of (30).

The brush bristles 33 may extend radially and horizontally with respect to the central axis 31, or may extend radially and inclined downwardly with respect to the central axis 31.

In this case, the wet cleaning unit (3) is provided on the lower side of the lower shaft support (10) and sprays water to the lower part before cleaning by the rotating brush (30) to perform the first wet cleaning nozzle (7). ) and a second wet cleaning nozzle (9) provided between the lower shaft support (10) and the upper shaft support (20) and spraying water onto the lower brush bristles (35) to perform secondary wet cleaning. desirable.

The lower brush bristles 35 of the brush bristles 33 of the rotating brush 30 remove the water-soluble gas from the waste gas that has not been treated despite the first wet cleaning by the first wet cleaning nozzle 7 through the second wet cleaning nozzle ( Secondary wet cleaning is performed using water sprayed from 9), and moisture or dust that has not been treated despite the primary wet cleaning by the first wet cleaning nozzle (7) in the waste gas is collected and at the same time, the rotating brush (30) is cleaned. The centrifugal force generated by rotation causes moisture or dust to collide with the inner wall of the wet cleaning unit (3) and move downward, thereby doubling the secondary wet cleaning effect.

In addition, the upper brush bristles (37) of the brush bristles (33) of the rotating brush (30) are subjected to primary wet cleaning by the first wet cleaning nozzle (7) and secondary wet cleaning by the second wet cleaning nozzle (9) in the waste gas. It collects moisture or dust that has not been treated despite cleaning, and at the same time, centrifugal force generated by the rotation of the rotating brush (30) causes the moisture or dust to collide with the inner wall of the wet cleaning unit (3) and move downward, thereby moving the moisture or dust downward through the exhaust duct. It serves to remove it just before exhausting to (5).

It is preferable that the above-described rotating brush 30 is entirely manufactured from a synthetic resin material having a certain level of rigidity and chemical resistance. However, depending on the embodiment, only the upper and lower ends of the central axis 31 are manufactured from a high-strength metal material so that the central axis 31 is made of a high-strength metal material. It may also be integrally coupled to the axis 31.

A driving actuator 40 is provided on one side of the wet cleaning unit 3 described above. The drive actuator 40 serves to generate a driving force that rotates the central axis 31 of the rotary brush 30, for example, a rotary actuator that generates rotary motion, such as a drive motor, or a cylinder mechanism. Linear actuators that generate linear reciprocating motion, such as the like, can be applied.

The above-described driving actuator 40 and the central axis 31 of the rotating brush 30 are electrically connected by the electric module 50. The electric module 50 serves to rotate the rotary brush 30 by transferring the driving force of the drive actuator 40 to the central axis 31 of the rotary brush 30, for example, an electric chain mechanism, an electric motor. It can be formed with a belt mechanism, electric gear set, etc.

Figure 4 is a structural diagram of an embodiment of a driving actuator and an electric module in a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.

As shown in FIG. 4, the drive actuator 40 may be a drive motor, and the power module 50 may be formed as a power chain mechanism.

In this case, in order to install the drive actuator 40 formed by the drive motor, a side protruding frame 3a is installed in communication with one side of the wet cleaning unit 3, and the output shaft of the drive actuator 40 protrudes from the side in the vertical direction. It can be installed to protrude into the frame (3a). It is preferable that the drive actuator 40 formed of a drive motor is integrally equipped with a reduction gear unit.

The electric module 50 formed of an electric chain mechanism includes a driving sprocket 51 installed on the output shaft of the driving actuator 40, an electric sprocket 53 installed on the central axis 31 of the rotating brush 30, and It may include a power chain 55 that electrically connects the drive sprocket 51 and the power sprocket 53.

Although not shown, the power module 50 may also be formed as a power belt mechanism. In this case, the power module 50 includes a drive pulley installed on the output shaft of the drive actuator 40 and the center of the rotating brush 30. It may include an electric pulley installed on the shaft 31 and an electric belt that electrically connects the driving pulley and the electric pulley.

Figure 5 is a structural diagram of another embodiment of a driving actuator and an electric module in a moisture or dust removal device for a wet cleaning unit according to an embodiment of the disclosed content.

As shown in FIG. 5, the drive actuator 40 may be a cylinder mechanism, and the electric module 50 may be an electric gear set including a rack gear 57 and a pinion gear 59.

The driving actuator 40, which is a pneumatic or hydraulic cylinder mechanism, is preferably installed on the side of the wet cleaning unit 3 so that the piston rod penetrates horizontally into the vertically arranged wet cleaning unit 3.

The electric module 50 formed of an electric gear set is provided on the rack gear 57 formed on the piston rod of the drive actuator 40 and the central axis 31 of the rotating brush 30 and is connected to the rack gear 57. It may include a pinion gear 59 that engages.

Additionally, the brush bristles 33 of the aforementioned rotating brush 30 may be contaminated by adsorption of moisture or dust contained in the waste gas. In order to prevent contamination of the brush bristles 33, the lower shaft support 10 and the upper shaft support 20 are provided with a brushing bar 60 to shake off moisture or dust adsorbed on the brush bristles 33. Can be fixedly installed.

The brushing bar 60 collides with the brush bristles 33 of the rotating brush 30 when the rotating brush 30 rotates, and the moisture or dust collected on the brush bristles 33 of the rotating brush 30 is shaken off. To enable it to be removed, one end is fixed to the lower shaft support 10 or the upper shaft support 20 and extends vertically away from the central axis 31 of the rotating brush 30.

The brushing bar 60 is for automatic cleaning of the brush bristles 33 of the rotating brush 30, which may be contaminated by adsorption of moisture or dust, and is formed of a metal rod or pipe with a certain level of rigidity and chemical resistance. Alternatively, it can be formed from a synthetic resin rod or pipe that has a certain level of rigidity and chemical resistance.

As described above, the moisture or dust removal device 1 of the wet cleaning unit according to the disclosed embodiment has a rotating brush 30 within the wet cleaning unit 3, such as the wet cleaning unit of the wet scrubber and the mixed scrubber. As it is formed in a rotary drive structure, moisture or dust contained in the waste gas is collected by the rotary brush 30 due to the centrifugal force caused by the rotary drive of the rotary brush 30 and is simultaneously generated by the rotation of the rotary brush 30. Due to the centrifugal force, it collides with the inner wall of the wet cleaning unit 3 and moves downward to be removed, thereby preventing blockage of the exhaust duct.

According to the moisture or dust removal device of the wet cleaning unit according to the disclosed embodiment, the brushing bar 60 is fixedly installed on the lower shaft support 10 and the upper shaft support 20, so that when the rotary brush 30 rotates As the brush bristles 33 of the rotating brush 30 collide with the brushing bar 60, moisture or dust collected on the brush bristles 33 of the rotating brush 30 can be shaken off and removed, and the rotating brush 30 )'s brush bristles (33) are automatically cleaned.

The wet cleaning unit 3 in which the moisture or dust removal device of the wet cleaning unit according to the disclosed embodiment is installed is shown as being arranged in a vertical direction, but may be arranged in a horizontal direction depending on the embodiment. In this case, terms indicating positional relationships such as lower and upper can be replaced with one side and the other.

Although preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the embodiments described in this specification and the configuration shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent the entire technical idea of the present invention. Since this is not the case, it should be understood that there may be various equivalents and modifications that can replace them at the time of filing this application. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive, and the scope of the present invention is indicated by the claims described later rather than the detailed description, and the meaning and scope of the claims and their All changes or modified forms derived from the equivalent concept should be construed as falling within the scope of the present invention.

1: Moisture or dust removal device of wet cleaning unit
3: Wet cleaning unit
3a: Side protruding frame
5: exhaust duct
7: First wet cleaning nozzle
9: Second wet cleaning nozzle
10: Lower shaft support
20: Upper shaft support
30: Rotating brush
31: central axis
33: Brush bristles
35: Lower brush bristles
37: Upper brush bristles
40: Driving actuator
50: Electric module
51: Drive sprocket
53: Electric sprocket
55: electric chain
57: Rack gear
59: pinion gear
60: Brushing bar

Claims (5)

A lower shaft support installed on the inner lower side of a wet cleaning unit for wet cleaning waste gas;
an upper shaft support installed on the inner upper side of the wet cleaning unit;
a rotating brush whose central axis is installed to be rotatable vertically across the lower shaft support and the upper shaft support and is provided with a plurality of brush bristles on an outer peripheral surface;
A driving actuator provided on one side of the wet cleaning unit; and
an electric module that electrically connects the driving actuator and the central axis of the rotating brush to rotate the central axis of the rotating brush;
A brushing bar that has one end fixed to the lower shaft support and the upper shaft support, extends vertically away from the central axis of the rotating brush, and shakes off moisture or dust collected in the bristles of the rotating brush when the rotating brush rotates. Includes,
The brush bristles are formed to be divided into lower brush bristles and upper brush bristles based on the longitudinal center of the central axis of the rotating brush,
The wet cleaning unit is provided on the lower side of the lower shaft support and includes a first wet cleaning nozzle that sprays water downward before cleaning with the rotating brush to perform primary wet cleaning, the lower shaft support, and the upper shaft support. It includes a second wet cleaning nozzle provided between the lower brush bristles and spraying water onto the lower brush bristles to perform secondary wet cleaning.
The lower shaft support has a horizontal bar shape extending across the inner lower center of the wet cleaning unit, and the upper shaft support has a horizontal bar shape extending across the inner upper center of the wet cleaning unit. Moisture or dust removal device. delete delete In claim 1,
The driving actuator is a driving motor,
The electric module includes a driving sprocket installed on the output shaft of the driving actuator, an electric sprocket installed on the central axis of the rotating brush, and an electric chain electrically connecting the driving sprocket and the electric sprocket,
A moisture or dust removal device for a wet cleaning unit, characterized in that a side protruding frame is installed in communication with one side of the wet cleaning unit, and the drive actuator is installed so that the output shaft protrudes into the side protruding frame. In claim 1,
The driving actuator is a cylinder mechanism,
The electric module includes a rack gear formed on the piston rod of the drive actuator, and a pinion gear provided on the central axis of the rotating brush and engaged with the rack gear,
A device for removing moisture or dust from a wet cleaning unit, wherein the driving actuator is installed in the wet cleaning unit so that a piston rod penetrates into the wet cleaning unit.

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