KR102577124B1 - Driving shaft assembly, pendulum valve, appratus for treating substrate - Google Patents

Abstract

The present invention provides a driving shaft assembly for a pendulum valve, capable of suppressing discharge of a hardening material and an unnecessary particle while surely maintaining sealing. According to an embodiment of the present invention, the driving shaft assembly includes: a shaft which can rotate by receiving a driving force from a motor; a shaft housing enclosing the circumference of the shaft, wherein the shaft housing does not rotate by being fixed and connected to a housing of a pendulum valve; a shaft cap positioned in the upper part of the shaft housing and rotating with the shaft by being fixed and connected to the upper surface of the shaft; a bearing positioned between the shaft and the shaft housing; an energized seal positioned between the shaft and the shaft housing and installed to be closer to the shaft cap than the bearing; a ring seal positioned on an opposite side of the energized seal around the bearing and installed in a groove formed on the shaft, wherein the ring seal is in contact with an inner wall of the shaft housing; and a housing cover positioned on an opposite side of the shaft cap around the shaft housing, wherein the housing cover is fixed and connected to the shaft housing.

Description

Drive shaft assembly for pendulum valve, pendulum valve, and substrate processing device {DRIVING SHAFT ASSEMBLY, PENDULUM VALVE, APPRATUS FOR TREATING SUBSTRATE}

The present invention relates to a pendulum valve that is installed in a connection pipe connecting a vacuum pump and a chamber of a substrate processing apparatus to regulate the pressure of the chamber.

The substrate processing device includes a chamber in which substrates are processed, a vacuum pump that provides vacuum pressure to exhaust the atmosphere of the processing space to the outside, and an opening/closing valve installed in a connection pipe that connects the chamber and the vacuum pump to form a passage. do. The on-off valve has a pendulum valve. The pendulum valve controls the opening of the passage by moving a valve gate capable of pendulum movement.

The pendulum valve includes a valve housing having an inlet and an outlet, a valve gate located in an internal space of the valve housing and rigidly connected to a rotating shaft. Many patents relating to pendulum valves have been disclosed. For example, Korean Patent No. 2006-0013810 discloses the basic structure of a pendulum valve.

In the conventional pendulum valve, an O-ring is installed between the shaft and the valve housing. Due to repeated rotation of the shaft, the O-ring is easily stressed and worn, and the sealing force decreases over time, increasing the water leakage rate. In particular, there is a problem in that fine sludge-like particles are generated due to the pulverization of the material due to frequent friction between the shaft and the valve housing.

To prevent this, when a lubricant such as a grease type is applied to the O-ring, there is a problem that process gas or plasma reacts with the lubricant and hardens it. The hardened material hardened in this way is pulverized again by the movement of the O-ring, causing particle generation. In other words, the lubricant hardens due to heat from rotation, contact with corrosive gas, and ambient heat to generate particles that not only adhere to the wafer but also affect rotation, so there is a limit to solving this problem by applying the lubricant.

One object of the present invention is to provide a pendulum valve that can suppress the discharge of unnecessary particles and hardened substances while reliably maintaining sealing.

One object of the present invention is to provide a pendulum valve that can solve problems caused by lubricants.

One object of the present invention is to provide a pendulum valve that prevents structural deformation and does not cause problems such as noise or inability to rotate.

The problem to be solved by the present invention is not limited here, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

The present invention provides a drive shaft assembly for a pendulum valve. In one embodiment, the drive shaft assembly includes a shaft rotatable by receiving driving force from a motor; a shaft housing that surrounds the shaft and is fixedly coupled to the housing of the pendulum valve and does not rotate; a shaft cap located on the upper part of the shaft housing, fixedly coupled to the upper surface of the shaft, and rotating together with the shaft; a bearing located between the shaft and the shaft housing; an energized seal located between the shaft and the shaft housing and installed closer to the shaft cap than the bearing; a ring seal located on an opposite side of the energized seal with respect to the bearing, installed in a groove formed on the shaft, and in contact with an inner wall of the shaft housing; and a housing cover located on an opposite side of the shaft cap with respect to the shaft housing and fixedly coupled to the shaft housing.

In one embodiment, the bearing may be a plastic bushing.

In one embodiment, the plastic bushing may be made of PEEK.

In one embodiment, the groove includes: a first protrusion protruding outward from the circumference of the shaft; and a second protrusion that is spaced apart from the first protrusion and protrudes outward around the shaft.

In one embodiment, the outer diameter of the bearing and the outer diameters of the first protrusion and the second protrusion may be the same.

In one embodiment, the first protrusion and the single housing cover may face each other.

In one embodiment, the outside of the first protrusion and the second protrusion may be located inside the shaft housing.

In one embodiment, the ring seal may be a quad seal.

In one embodiment, the energized seal is located on the upper part of the bearing, and the upper part of the energized seal is covered by the shaft housing. In one embodiment, the upper part of the energized seal is in the shaft housing. The covered part is defined as the first part, and at least the upper surface of the first part can be covered by the shaft cap.

The present invention provides a pendulum valve installed in a connection pipe between a substrate processing chamber and a vacuum pump in a substrate processing apparatus. In an embodiment, the pendulum valve includes a housing coupled to the connector; a valve gate located within the housing and opening and closing the connection pipe through a pendulum motion; and the drive shaft assembly described above, wherein the valve gate is fixedly coupled to the shaft cap.

The present invention provides an apparatus for processing a substrate. In one embodiment, a substrate processing apparatus includes a chamber providing a processing space for processing a substrate; a vacuum pump that provides vacuum pressure to exhaust the atmosphere of the processing space from the processing space; a connection pipe connecting the chamber and the vacuum pump to form a passage; It includes a pendulum valve installed in a connection pipe, wherein the pendulum valve includes a housing coupled to the connection pipe; a valve gate located within the housing and opening and closing the connection pipe through a pendulum motion; and the drive shaft assembly described above, wherein the valve gate is fixedly coupled to the shaft cap.

According to an embodiment of the present invention, it is possible to suppress the discharge of unnecessary particles and hardened materials while reliably maintaining sealing.

According to an embodiment of the present invention, process gas, plasma, etc. are prevented from contacting the lubricant, so there is freedom from various problems caused by the lubricant.

According to an embodiment of the present invention, structural deformation is prevented, and problems such as noise and inability to rotate can be prevented.

The effects of the present invention are not limited to the effects described above, and effects not mentioned can be clearly understood by those skilled in the art from this specification and the attached drawings.

Figure 1 schematically shows an environment in which the pendulum valve 1000 according to an embodiment is installed.
Figure 2 is a perspective view of the pendulum valve 1000 according to an embodiment as seen from above.
Figure 3 is a bottom perspective view of the pendulum valve 1000 according to an embodiment, viewed from below.
Figure 4 is an enlarged cross-sectional view of the driving part 1300 of the pendulum valve 1000 according to an embodiment so that the driving part 1300 can be seen in detail.
Figure 5 is a perspective view of the drive shaft assembly 100 according to an embodiment.
Figure 6 is a cross-sectional view of the drive shaft assembly 100 according to an embodiment.
Figure 7 is an exploded perspective view of the drive shaft assembly 100 according to an embodiment.
8 to 11 are diagrams explaining the operation of the pendulum valve 1000 according to an embodiment.
FIG. 12 is a cross-sectional view of the drive shaft assembly 200 of an embodiment different from the embodiment described in FIGS. 5 to 7.
Figure 13 is an exploded perspective view of the drive shaft assembly 200.

Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the attached drawings. The configuration or control method of the device described below is only for explaining the embodiments of the present disclosure and is not intended to limit the scope of the present disclosure, and the same reference numbers used throughout the specification indicate the same components. .

Specific terms used in this specification are merely for convenience of explanation and are not used to limit the illustrated embodiments.

For example, expressions such as “same” and “is the same” not only indicate a strictly identical state, but also indicate a state in which there is a difference in tolerance or the degree to which the same function can be obtained.

In this specification, when a component is referred to as being 'connected' or 'connected' to another component, it may be directly connected or connected to the other component, but there is another component in the middle. It must be understood that it may exist. On the other hand, in this specification, when it is mentioned that a component is 'directly connected' or 'directly connected' to another component, it should be understood that there are no other components in between.

In this specification, terms such as 'include' or 'have' are only intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and one or more other It should be understood that this does not exclude in advance the presence or addition of features, numbers, steps, operations, components, parts, or combinations thereof.

For example, expressions that express relative or absolute arrangement such as “in a certain direction,” “along a certain direction,” “side by side,” “perpendicularly,” “at the center,” “concentric,” or “coaxial,” Not only does it strictly represent the arrangement, but it also represents the state of relative displacement with a tolerance, or an angle or distance that achieves the same function.

The use of terms such as 'first, second, and third' in front of the components mentioned below is only to avoid confusion about the components to which they are referred, as well as the order, importance, or master-slave relationship between the components, etc. is irrelevant. For example, an invention that includes only the second component without the first component can also be implemented.

As used herein, singular expressions include plural expressions unless the context clearly dictates otherwise.

Also, in this specification, the term 'and/or' includes a combination of a plurality of listed items or any of the plurality of listed items. In this specification, 'A or B' may include 'A', 'B', or 'both A and B'.

Figure 1 schematically shows an environment in which the pendulum valve 1000 according to an embodiment is installed. The installation location of the pendulum valve 1000 will be described with reference to FIG. 1.

A substrate processing apparatus provided with the pendulum valve 1000 may include a chamber 10, a vacuum pump 20, and a connection pipe 30. The chamber 10 provides a processing space where a substrate processing process (eg, etching process, deposition process, ashing process, etc.) is performed. The vacuum pump 20 can create a vacuum in the chamber 10 or discharge gas within the chamber 10. The connection pipe 30 is a fluid passage connecting the chamber 10 and the vacuum pump 20. The pendulum valve 1000 opens and closes the connection pipe 30.

The pendulum valve 1000 controls the vacuum state of the chamber by opening and closing the connection pipe 30 connected to the vacuum pump 20. When the pendulum valve 1000 closes the connection pipe 30 connected to the vacuum pump 20, the vacuum level of the chamber 10 is maintained as is, and when the connection pipe 30 is opened, the vacuum level of the chamber is increased by the pumping action of the vacuum pump. becomes a high vacuum state. The opening and closing action of the pendulum valve 1000 is achieved by pendulum movement of a plate called the valve gate 1200 (see FIG. 2).

Figure 2 is a perspective view of the pendulum valve 1000 according to an embodiment as seen from above. Figure 3 is a bottom perspective view of the pendulum valve 1000 according to an embodiment, viewed from below. The appearance and function of the pendulum valve 1000 will be described with reference to FIGS. 2 and 3.

The pendulum valve 1000 includes a valve housing 1100, a valve gate 1200, and a driving unit 1300.

The valve housing 1100 includes a first housing 1110 and a second housing 1120. The first housing 1110 is a housing installed on the connector 30. A top flange 1400 may be installed on the upper surface of the first housing 1110. The second housing 1120 is a housing in which the valve gate 1200 in an open state is located. The second housing 1120 is coupled to the first housing 1110.

The valve gate 1200 opens and closes the passage 33. The valve gate 1200 according to the embodiment includes a disc plate capable of closing the passage 33. The disc plate covers the passageway (33). The disk plate according to the embodiment has a disk shape with a thin center and a thick peripheral portion. The valve gate 1200 according to the embodiment is provided with sealing members 1910 and 1920 (see FIG. 4). A first sealing member 1910 is located on the upper side of the valve gate 1200. The first sealing member 1910 contacts the plate ring 1520 referenced in FIG. 4 to form a seal. The first sealing member 1910 contacts the first housing 1110 to form a seal.

The driving unit 1300 provides driving force to move the valve gate 1200. A heat dissipation element 1390 may be provided in the driving unit 1300. In an embodiment, the heat dissipation element 1390 is provided in the form of a heat sink.

Figure 4 is an enlarged cross-sectional view of the driving part 1300 of the pendulum valve 1000 according to an embodiment so that the driving part 1300 can be seen in detail. Figure 4 shows a state in which the passage 33 is opened. With reference to FIG. 4 , the driving unit 1300 of the pendulum valve 1000, the coupling relationship between the surrounding components of the driving unit 1300, and the pressure ring 1500 will be described in detail.

The pendulum valve 1000 opens and closes the passage 33. In the pendulum valve 1000, the first housing (1110, see FIG. 2) communicates with the passage 33. The second housing (1120, see FIG. 2) stores the valve gate 1200.

The valve gate 1200 operates with driving force applied from the driving unit 1300.

The driving unit 1300 may be mounted on the lower part of the valve housing 1100. The drive unit 1300 includes a drive unit housing 1310, a power transmission unit 1320, a motor 1330, and a drive shaft assembly 100.

The drive unit housing 1310 forms a space that accommodates various components that make up the drive unit 1300. The driving unit housing 1310 may be formed by sequentially stacking the first housing 1311, the second housing 1312, and the third housing 1313. Inside the drive unit housing 1310, a power transmission unit 1320, a motor 1330, and a drive shaft assembly 100 are accommodated and provided. The driving unit housing 1310 according to the embodiment is coupled to the lower part of the valve housing 1100. A portion of the drive shaft assembly 100 protrudes toward the top of the drive unit housing 1310. The protruding portion is fixedly coupled to the valve housing 1100.

The motor 1330 operates according to signals from the control unit. Motor 1330 may be a step motor. The motor 1330 is connected to the drive shaft assembly 100 and the power transmission unit 1320. A rotational force transmission unit 1334 is provided at the end of the rotation shaft 1331 of the motor 1330. The rotational force transmission unit 1334 may be implemented as a gear. The rotational force transmission unit 1334 according to the embodiment is provided as a cylindrical gear. It is not limited to this, and various gear types such as helical gears and worm gears can be applied.

The power transmission unit 1320 is engaged with the rotational force transmission unit 1334. In an embodiment, the power transmission unit 1320 includes a gear unit 1321. The gear unit 1321 according to the embodiment is formed in the power transmission unit 1320. The power transmission unit 1320 includes a drive shaft coupling unit 1323. The drive shaft coupling portion 1323 is coupled to the drive shaft assembly 100. The drive shaft coupling portion 1323 coupled to the drive shaft assembly 100 transmits the rotational force of the drive unit 1300 to the drive shaft assembly 100. The drive shaft assembly 100 is coupled to the valve gate 1200. The valve gate 1200 opens and closes the passage 33 by performing a pendulum movement using the rotational power received from the drive shaft assembly 100.

The pressure ring 1500 is provided at the upper portion of the first housing 1110 on the passage 33 side. The pressure ring 1500 prevents the vacuum level of the chamber 10 from being affected by the vacuum pump 20 when the valve gate 1200 closes the passage 33. The pressure ring 1500 prevents unnecessary air or other impurities from entering the chamber 10 through the gap between the valve gate 1200 and the passage 33. The pressure ring 1500 may prevent defects in semiconductor devices from occurring due to a decrease in pressure in the chamber 10. The pressure ring 1500 according to the embodiment includes a guide ring 1510 and a plate ring 1520.

The pressure ring 1500 may be connected to the actuator 1600. In the pressure ring 1500 according to the embodiment, a plate ring 1520 is connected to the actuator 1600. Actuator 1600 may be a pneumatic cylinder. A plurality of actuators 1600 are installed, usually 5 or more. A sealing member 1940 may be provided around the rod of the actuator 1600.

The guide ring 1510 moves up and down along the inner wall of the first housing 1110 and maintains the left and right positions of the pressure ring 1500. A sealing member 1930 may be provided at a portion where the guide ring 1510 and the inner wall of the first housing 1110 contact each other. The sealing member 1930 according to the embodiment is installed on the guide ring 1510.

Figure 5 is a perspective view of the drive shaft assembly 100 according to an embodiment. Figure 6 is a cross-sectional view of the drive shaft assembly 100 according to an embodiment. Figure 7 is an exploded perspective view of the drive shaft assembly 100 according to an embodiment. The drive shaft assembly 100 will be described in detail with reference to FIGS. 5, 6, and 7.

The drive shaft assembly 100 according to the embodiment includes a shaft 110, a shaft housing 120, a housing cover 130, a shaft cap 140, a bearing 160, a ring seal 171, and an energized seal 173. Includes.

The shaft 110 rotates by receiving driving force from the motor 1330 (see FIG. 4). The shaft 110 may include a first part 111 and a second part 112. The first part 111 constitutes the upper part of the shaft 110. The second part 112 constitutes the lower part of the shaft 110. The second part 112 has a smaller diameter than the first part 111. The shaft 110 is provided with a configuration for being coupled to the power transmission unit 1320. The shaft 110 has a fastening groove 133 formed at a predetermined depth from the bottom to the inside. The fastening groove 133 may include a first part 113a having a first diameter and a second part 113b having a second diameter. The first portion 113a is further outward, and its first diameter is larger than the second diameter. A pin groove 114 may be formed in the second portion 113b. A drive shaft coupling portion 1323 is inserted into the fastening groove 133.

Spring 190 may be provided around the second portion 112. The upper end of the spring 190 pushes the bottom surface of the first portion 111, and the lower end of the spring 190 may be supported by the second housing 1312. The valve gate 1200 may be strongly adhered to the valve seat by the elastic force of the spring 190. The spring 190 can prevent a portion of the contact surface between the valve gate 1200 and the guide ring 1510 from lifting.

A bearing 160, a ring seal 171, and an energized seal 173 are disposed around the first part 111. A first protrusion 111a is formed around the shaft 110 and protrudes outward. A second protrusion 111b is formed around the shaft 110 and protrudes outward. The first protrusion 111a is formed lower than the second protrusion 111b. The first protrusion 111a is formed closer to the second portion 112 than the second protrusion 111b. The first protrusion 111a and the second protrusion 111b are spaced apart from each other by a predetermined distance. A groove 111c is formed between the first protrusion 111a and the second protrusion 111b due to the separation of the first protrusion 111a and the second protrusion 111b. A ring seal 171 is inserted into the groove 111c. In an embodiment, the protrusion heights of the first protrusion 111a and the second protrusion 111b are the same. In the embodiment, the outer diameters of the first protrusion 111a and the second protrusion 111b are the same.

Shaft housing 120 surrounds the shaft 110. The shaft housing 120 according to the embodiment is located around the first portion 111 of the shaft 110. The bearing 160, ring seal 171, and energized seal 173 arranged around the shaft 110 are located inside the shaft housing 120. The first protrusion 111a and the second protrusion 111b formed on the shaft 110 are also located inside the shaft housing 120. The shaft housing 120 is fixedly coupled to the valve housing 1100 of the pendulum valve 1000. The shaft housing 120 does not rotate despite the rotation of the shaft 110. The lower part of the shaft housing 120 is formed with a stepped portion 122 extending outward in the radial direction. A sealing member 172 is located on the upper surface of the stepped portion 122. In an embodiment, the sealing member 172 is an O-ring.

The housing cover 130 is located on the opposite side of the shaft cap 140 with respect to the shaft housing 120. The housing cover 130 is fixedly coupled to the shaft housing 120. In an embodiment, the housing cover 130 is fixedly coupled to the step portion 122. In an embodiment, the housing cover 130 is screwed to the step portion 122. A screw hole 131 for coupling to the shaft housing 120 may be formed in the housing cover 130. A screw hole 122a may be formed in the stepped portion 122 of the shaft housing 120 at a position corresponding to the screw hole 131. The inner diameter side of the housing cover 130 according to the embodiment faces the outer diameter of the shaft 110. A portion of the upper surface of the housing cover 130 according to the embodiment faces the first protrusion 111a.

The shaft cap 140 is fixedly coupled to the upper surface of the shaft 110. The shaft cap 140 may be coupled to the shaft 110 and the fixing pin 180. The shaft cap 140 is located on the top of the shaft housing 120. The shaft cap 140 rotates together with the shaft 110. The valve gate 1200 is fixedly coupled to the shaft cap 140. The shaft cap 140 and the valve gate 1200 may be screwed together. A fastening hole 144 may be formed in the shaft cap 140. The shaft cap 140 forms a fastening hole 144 and may include an extension portion 145 extending downward. The shaft cap 140 forms a fastening hole 144 and may include an extension portion 145 extending downward. The extension portion 145 is inserted into the coupling hole 116 formed on the upper surface of the shaft 110. When the fastening member 1800 is inserted and fixed in the fastening hole 144, the extension portion 145 is slightly expanded by the fastening member 1800, and the coupling force between the shaft 110 and the shaft cap 140 increases.

Protrusions 142 and 143 for coupling with the valve gate 1200 may be formed on the upper surface of the shaft cap 140. The protrusions 142 and 143 may include a first protrusion 142 and a second protrusion 143. The heights of the first protrusion 142 and the second protrusion 143 may be different from each other. Protrusions 142 and 143 may guide the coupling position. Additionally, the protrusions 142 and 143 may prevent the coupling axis of the valve gate 1200 from being twisted when the drive shaft assembly 100 and the valve gate 1200 are coupled.

The bearing 160 is located between the shaft 110 and the shaft housing 120. The bearing 160 is supported on the shaft housing 120 and supports the rotating shaft 110. The bearing 160 according to the embodiment is provided as a roller bearing. The outer diameter of the bearing 160 according to the embodiment is the same as the outer diameter of the first protrusion 111a. The outer diameter of the bearing 160 according to the embodiment is the same as the outer diameter of the second protrusion 111b.

The bearing referred to in this specification and claims is a structure that facilitates movement by reducing the friction between two parts, unless there is a special reason. Bearings are used as a concept that includes bushings. In this specification, a bushing is defined as a type of bearing.

The ring seal 171 is provided by being inserted into the groove 111c. The ring seal 171 is disposed lower than the bearing 160. The ring seal 171 contacts the inner wall of the shaft housing 120. The ring seal 171 according to the embodiment is a quad seal. A lubricant may be applied to the ring seal 171.

The energized seal 173 is disposed above the bearing 160. A bearing 160 is located between the energized seal 173 and the ring seal 171. The energized seal 173 is located between the shaft 110 and the shaft housing 120. The energized seal 173 is installed closer to the shaft cap 140 than the bearing 160. The energized seal 173 may be a spring energized seal. The energized seal 173 prevents the lubricant (eg, grease) applied to the ring seal 171 from coming into contact with substances that react with the lubricant, such as process gas or plasma. If the level of sealing between the shaft 110 and the shaft housing 120 is sufficient to perform the above function while the shaft 110 is rotating, a person skilled in the art can replace the energized seal 173 with another sealing configuration. It may be possible, and this should be viewed as the equivalent of the energized seal (173).

The top of the energized seal 173 is covered by the shaft housing 120. If the part of the shaft housing 120 that covers the top of the energized seal 173 is defined as the first part, the upper surface of the first part is covered by the shaft cap 140.

Since the structure forming the drive shaft assembly 100 according to the embodiment does not require a lubricant such as grease, it is free from various problems caused by the lubricant.

8 to 11 are diagrams explaining the operation of the pendulum valve 1000 according to an embodiment. The operation of the pendulum valve 1000 will be described with reference to the following order: Figure 4 -> Figure 8 -> Figure 9 -> Figure 10 -> Figure 11.

Figure 4 shows the passage 33 of the connection pipe 30 in an open state. 8 shows a state in which the valve gate 1200 rotates in the first direction about the drive shaft assembly 100 and moves to a position where the passage 33 of the connection pipe 30 is closed. 9 shows a state in which the pressure ring 1500 descends to pressurize the valve gate 1200, and the passage 33 of the connection pipe 30 is completely closed. Figure 10 shows the pressure ring 1500 rising to open the passage 33 of the connection pipe 30. 11 shows a state in which the valve gate 1200 moves in a second direction (a direction opposite to the first direction) around the drive shaft assembly 100, thereby opening the passage 33 of the connection pipe 30.

FIG. 12 is a cross-sectional view of the drive shaft assembly 200 of an embodiment different from the embodiment described in FIGS. 5 to 7. Figure 13 is an exploded perspective view of the drive shaft assembly 200. The drive shaft assembly 200 will be described in detail with reference to FIGS. 12 and 13 . In the drive shaft assembly 200, the description will focus on parts that are different from the drive shaft assembly 100 described above, and the same or similar components will be briefly mentioned by name, replacing the description of the drive shaft assembly 100.

The drive shaft assembly 200 according to the embodiment includes a shaft 210, a shaft housing 220, a housing cover 230, a shaft cap 240, a bearing 260, a first ring seal 271a, and a second ring seal 271b. ), including the energized seal (273).

The shaft 210 may include a first part 211, a second part 212, and a third part 213.

The first part 211 constitutes the middle part of the shaft 210. The second part 212 constitutes the lower part of the shaft 210. The third part 213 constitutes the upper part of the shaft. The second part 212 has a smaller diameter than the first part 211. The third part 213 has a smaller diameter than the first part 211. The third part 213 according to the embodiment has a smaller diameter than the second part 212. A fastening groove 233 is formed on the bottom of the shaft 210. The fastening groove 233 may include a first part 213a and a second part 213b. A pin groove 214 may be formed in the second portion 213b. A drive shaft coupling portion 2323 is inserted into the fastening groove 233. Spring 290 may be provided around the second portion 212. A first ring seal (271a) and a second ring seal (271b) are disposed around the first portion (211). A bearing 260 and an energized seal 273 are disposed around the third part 213.

A first protrusion 211a is formed around the shaft 210 and protrudes outward. A second protrusion 211b is formed around the shaft 210 and protrudes outward. The first protrusion 211a is formed lower than the second protrusion 211b. The first protrusion 211a is formed closer to the second portion 212 than the second protrusion 211b. The first protrusion 211a and the second protrusion 211b are spaced apart from each other by a predetermined distance. A groove 211c is formed between the first protrusion 211a and the second protrusion 211b due to the separation of the first protrusion 211a and the second protrusion 211b. The first ring seal (271a) is inserted into the groove (211c).

Shaft housing 220 surrounds the shaft 210. The shaft housing 220 according to the embodiment is located around the first part 211 and the third part 213 of the shaft 210. The bearing 260, the first ring seal 271a, the second ring seal 271b, and the energized seal 273 arranged around the shaft 210 are located inside the shaft housing 220. The lower part of the shaft housing 220 is formed with a stepped portion 222 extending outward in the radial direction. A sealing member 272 is located on the upper surface of the stepped portion 222.

The housing cover 230 is fixedly coupled to the shaft housing 220. In an embodiment, the housing cover 230 is screwed to the step portion 222. A screw hole 231 for coupling to the shaft housing 220 may be formed in the housing cover 230. A screw hole 222a may be formed in the stepped portion 222 of the shaft housing 220 at a position corresponding to the screw hole 231. A portion of the upper surface of the housing cover 230 according to the embodiment faces the first protrusion 211a. The inner diameter side of the housing cover 230 according to the embodiment faces the outer diameter of the shaft 210. A groove 232 is formed on the inner diameter side of the housing cover 230. A second ring seal (271b) is inserted into the groove 232.

The drive shaft assembly 200 is provided with two ring seals, and grooves into which the ring seals are inserted are formed separately on the shaft 210 and the housing cover 230. As a result, deformation of the shaft housing 120 can be prevented, and problems caused by deformation of the shaft housing 120, such as noise and inability to rotate, can be solved. Additionally, when quad seals are applied, higher sealing performance can be achieved than O-rings.

The shaft cap 240 is fixedly coupled to the upper surface of the shaft 210. The shaft cap 240 is located on the top of the shaft housing 220. The shaft cap 240 rotates together with the shaft 210. The valve gate 1200 is fixedly coupled to the shaft cap 240. The shaft cap 240 and the valve gate 1200 may be screwed together. A fastening hole 244 may be formed in the shaft cap 240. The shaft cap 240 forms a fastening hole 244 and may include an extension portion 245 extending downward. The extension portion 245 is inserted into the coupling hole 216 formed on the upper surface of the shaft 210. When the fastening member 1800 is inserted and fixed in the fastening hole 244, the extension portion 245 is slightly expanded by the fastening member 1800, and the coupling force between the shaft 210 and the shaft cap 240 increases. Protrusions 242 and 243 for coupling with the valve gate 1200 may be formed on the upper surface of the shaft cap 240. The shaft cap 240 has an extension portion 246 formed around it. The extension portion 246 has a ring shape when viewed as a whole. The extension portion 246 surrounds the side of the housing cover 230. The inner wall of the extension portion 246 faces the housing cover 230. The outer wall of the extension portion 246 has no contact with the housing cover 230.

The bearing 260 is located between the shaft 210 and the shaft housing 220. The bearing 260 is supported on the shaft housing 220 and supports the rotating shaft 210. The bearing 260 according to the embodiment is provided as a bushing. Bearing 260 is provided as a plastic bushing. The bushing according to the embodiment is provided as made of PEEK material. The outer diameter of the bearing 260 according to the embodiment is the same as the outer diameter of the first protrusion 211a. The outer diameter of the bearing 260 according to the embodiment is the same as the outer diameter of the second protrusion 211b.

The first ring seal 271a and the second ring seal 271b are disposed lower than the bearing 260. The first ring seal 271a contacts the inner wall of the shaft housing 220. The first ring seal 271a according to the embodiment is a quad seal. The second ring seal 271b contacts the shaft 110. The second ring seal 271b according to the embodiment is a quad seal.

The energized seal 273 is disposed above the bearing 260. A bearing 260 is located between the energized seal 273 and the ring seal 271. The energized seal 273 is located between the shaft 210 and the shaft housing 220. The energized seal 273 is installed closer to the shaft cap 240 than the bearing 260. It may be a spring energized seal. The energized seal 273 prevents the lubricant (eg, grease) applied to the first ring seal 271a and the second ring seal 271b from coming into contact with substances that react with the lubricant, such as process gas or plasma. If the sealing level between the shaft 210 and the shaft housing 220 is configured to perform the above function while the shaft 210 is rotating, a person skilled in the art can replace the energized seal 273 with another sealing configuration. It may be possible, and this should be viewed as the equivalent of the energized seal (273).

The top of the energized seal 273 is covered by the shaft housing 220. If the part of the shaft housing 220 that covers the top of the energized seal 273 is defined as the first part, the upper surface of the first part is covered by the shaft cap 240.

The structure of the drive shaft assembly 200 according to the embodiment rarely causes wear and damage to the shaft 210 and the shaft cap 240. Additionally, since it does not require lubricants such as grease, it is free from various problems caused by lubricants.

The pendulum valve to which the drive shaft assembly 200 is applied can be understood as replacing the drive shaft assembly 100 with the drive shaft assembly 200 in the pendulum valve 1000 described above.

The above description is merely an illustrative explanation of the technical idea of the present invention, and various modifications and variations will be possible to those skilled in the art without departing from the essential characteristics of the present invention. Accordingly, the embodiments described in the present invention are not intended to limit the technical idea of the present invention, but are for illustrative purposes, and the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be interpreted in accordance with the claims below, and all technical ideas within the equivalent scope should be construed as being included in the scope of rights of the present invention.

Claims (12)

In the drive shaft assembly for a pendulum valve,
A shaft that can rotate by receiving driving force from a motor;
a shaft housing that surrounds the shaft and is fixedly coupled to the housing of the pendulum valve and does not rotate;
a shaft cap located on the upper part of the shaft housing, fixedly coupled to the upper surface of the shaft, and rotating together with the shaft;
a bearing located between the shaft and the shaft housing;
an energized seal located between the shaft and the shaft housing and installed closer to the shaft cap than the bearing;
a ring seal located on an opposite side of the energized seal with respect to the bearing, installed in a groove formed in the shaft, and in contact with an inner wall of the shaft housing; and
A housing cover is located on the opposite side of the shaft cap with respect to the shaft housing and is fixedly coupled to the shaft housing,
The groove is,
a first protrusion protruding outward from the circumference of the shaft; and
A second protrusion is spaced apart from the first protrusion and protrudes outward around the shaft,
The first protrusion and the single housing cover face each other,
Drive shaft assembly. According to paragraph 1,
The bearing is a plastic bushing,
Drive shaft assembly. According to paragraph 2,
The plastic bushing is made of PEEK,
Drive shaft assembly. delete According to paragraph 1,
The outer diameter of the bearing and the outer diameters of the first protrusion and the second protrusion are the same,
Drive shaft assembly. delete According to paragraph 1,
The outside of the first protrusion and the second protrusion are located inside the shaft housing,
Drive shaft assembly. According to paragraph 1,
The ring seal is a quad seal,
Drive shaft assembly. According to paragraph 1,
The energized seal is located at the top of the bearing,
The top of the energized seal is covered by the shaft housing,
Drive shaft assembly. According to clause 9,
The part of the shaft housing that covers the upper part of the energized seal is defined as the first part,
At least the upper surface of the first portion is covered by the shaft cap,
Drive shaft assembly. In the pendulum valve installed in the connection pipe between the substrate processing chamber and the vacuum pump in the substrate processing device,
a housing coupled to the connector;
a valve gate located within the housing and opening and closing the connection pipe through a pendulum motion; and
Comprising the drive shaft assembly of any one of claims 1 to 3, 5, and 7 to 10,
The valve gate is fixedly coupled to the shaft cap,
Pendulum valve. In a device for processing a substrate,
A chamber providing a processing space for processing a substrate;
a vacuum pump that generates a vacuum to exhaust the atmosphere of the processing space from the processing space;
a connection pipe connecting the chamber and the vacuum pump to form a passage;
It includes a pendulum valve installed in the connector,
The pendulum valve is,
a housing coupled to the connector;
a valve gate located within the housing and opening and closing the connection pipe through a pendulum motion; and
Comprising the drive shaft assembly of any one of claims 1 to 3, 5, and 7 to 10,
The valve gate is fixedly coupled to the shaft cap,
Substrate processing equipment.

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