KR102572053B1 - Collecting device capable of automatically discharging foreign substances - Google Patents

Abstract

The present invention relates to a collection device capable of automatically discharging foreign substances implemented to collect and remove debris generated during the plasma process of CVD (Chemical Vapor Deposition) equipment, and foreign substances generated during the process of CVD equipment A scrubber body that receives and moves the gas containing the gas downwardly; A plurality of collecting units installed while crossing the inside of the scrubber body to collect and remove foreign substances contained in the gas descending in the internal space of the scrubber body; and a washing water supply unit for injecting washing water for washing foreign substances collected in the collecting unit and discharging them to the outside of the scrubber body into an internal space of the scrubber body through the upper side of the scrubber body.

Description

Collecting device capable of automatically discharging foreign substances}

The present invention relates to a collection device capable of automatically discharging foreign substances, and more particularly, to a collection device capable of automatically discharging foreign substances implemented to collect and remove debris generated during a plasma process of CVD (Chemical Vapor Deposition) equipment. It is about.

In general, a dust collector is installed in a workplace where a lot of dust is generated, and is one of air purifiers for preventing air pollution caused by dust by collecting dust floating in the air indoors, purifying it into clean air, and discharging it to the outside.

Such a dust collector generally filters polluted air using a bag filter having a large capacity and a long lifespan, filters out dust, and discharges clean air to the outside. By spraying compressed air intermittently or continuously in the direction to exhaust contaminants collected in the bag filter, clogging of a bag made of nonwoven fabric is prevented and safe operation is ensured.

On the other hand, the above-mentioned background art is technical information that the inventor possessed for derivation of the present invention or acquired in the process of derivation of the present invention, and cannot necessarily be said to be known art disclosed to the general public prior to filing the present invention. .

Korean Patent Registration No. 10-1128900 (2012.06.27. Announcement)

One aspect of the present invention collects debris generated during the plasma process of CVD (Chemical Vapor Deposition) equipment by inserting it into a collecting device, and at this time, flowing a fluid into the foreign substances collected in the collecting device and releasing it to the outside together with the fluid to separate Provided is a collecting device capable of automatically discharging foreign substances implemented to remove foreign substances from the collecting device without a removal process.

The technical problem of the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

A collection apparatus capable of automatically discharging foreign substances according to an embodiment of the present invention includes a scrubber body that receives and moves downwardly a gas containing foreign substances generated during a process of a CVD equipment; A plurality of collecting units installed while crossing the inside of the scrubber body to collect and remove foreign substances contained in the gas descending in the internal space of the scrubber body; and a washing water supply unit for injecting washing water for washing foreign substances collected in the collecting unit and discharging them to the outside of the scrubber body into an internal space of the scrubber body through the upper side of the scrubber body.

In one embodiment, the scrubber body includes a cylindrical tank formed in a cylindrical shape forming a sealed inner space; a gas inlet installed on the upper side of the cylindrical tank to inject gas containing foreign substances generated during the process of the CVD equipment; a gas outlet installed on the lower side of the cylindrical tank to discharge the gas from which foreign substances are removed; and a washing water outlet installed at a lower side of the cylindrical tank to discharge washing water washing the foreign matter collected in the collecting unit.

In one embodiment, the collecting device capable of automatically discharging foreign substances according to another embodiment of the present invention includes at least one filtering foreign substances included in the washing water discharged through the washing water outlet, which is installed inside the cylindrical washing water outlet. The above foreign matter filter unit; may further include.

In one embodiment, the foreign matter filter unit may include a ring seat formed along an inner circumferential surface of the washing water outlet; a rotating ring formed in a circular ring shape having an outer diameter corresponding to an inner diameter of the ring seating jaw and seated on the ring seating jaw; a filter installed inside the rotating ring to remove foreign substances contained in the washing water discharged through the inside of the rotating ring; And a plurality of pieces spaced apart at regular intervals along the lower side of the rotating ring are installed and seated on the lower side of the ring seating jaw, and at the same time supporting the rotating ring on the ring seating jaw, a ring driving unit for driving rotation in a forward or reverse direction; can include

In one embodiment, the ring drive unit, while forming an opening to the lower side of the rotating ring block seating groove formed recessed; A buffer block seated on the lower side of the block seating groove; a buffer spring installed inside the block seating groove to support the upper side of the buffer block seated in the block seating groove and at the same time to buffer vibration or shock transmitted from the buffer block; a spherical receiving groove recessed in the lower portion of the buffer block while forming an opening to the lower side of the buffer block; a drive unit installation groove extending along the inner side of the buffer block upwardly from the upper end of the sphere seating groove; a driving sphere rotatably connected to the sphere seating groove so that the lower side is exposed to the lower side of the buffer block and seated on the lower side of the ring seating jaw; First support balls spaced apart at regular intervals along the lower side of the inner circumferential surface of the sphere receiving groove and installed in plurality to support the lower side of the driving sphere; second support balls spaced apart at regular intervals along the upper side of the inner circumferential surface of the sphere seating groove and installed in plurality to support the upper side of the driving sphere; and a sphere driving unit installed in the driving unit installation groove to support the upper side of the driving sphere and at the same time rotationally drive the driving sphere.

In one embodiment, the spherical driving unit may include a rotation drive motor installed on the upper side of the driving unit installation groove; a support frame installed on the driving shaft of the rotary driving motor; Ji 1 support roller installed on one side of the support frame; a second support roller installed on the other side of the support frame while facing the first support roller; And one side and the other side are engaged and connected to the first support roller and the second support roller, and are rotationally driven in a forward or reverse direction by the first support roller and the second support roller, and are disposed in close contact with the lower outward surface. It may include; a driving belt that rotates the driving sphere in a forward or reverse direction.

According to one aspect of the present invention described above, the debris generated in the process of plasma process of CVD (Chemical Vapor Deposition) equipment is put into the collecting device and collected, and at this time, the fluid is flowed to the foreign substances collected in the collecting device to the outside together with the fluid It is possible to remove foreign substances from the collection device without a separate removal process by releasing them.

Effects of the present invention are not limited to the effects mentioned above, and various effects may be included within a range apparent to those skilled in the art from the contents to be described below.

1 is a diagram showing a schematic configuration of a collecting device capable of automatically discharging foreign substances according to an embodiment of the present invention.
FIG. 2 is a view illustrating the discharge of foreign substances by the collecting device capable of automatically discharging foreign substances in FIG. 1 .
3 is a diagram showing a schematic configuration of a collecting device capable of automatically discharging foreign substances according to another embodiment of the present invention.
FIG. 4 is a view showing the foreign matter filter unit of FIG. 3 .
FIG. 5 is a view showing the ring driving unit of FIG. 4 .
FIG. 6 is a view showing the spherical driving unit of FIG. 5 .

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The detailed description of the present invention which follows refers to the accompanying drawings which illustrate, by way of illustration, specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable one skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other but are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in another embodiment without departing from the spirit and scope of the invention in connection with one embodiment. Additionally, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. Accordingly, the detailed description set forth below is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all equivalents as claimed by those claims. Like reference numbers in the drawings indicate the same or similar function throughout the various aspects.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 is a diagram showing a schematic configuration of a collecting device capable of automatically discharging foreign substances according to an embodiment of the present invention.

Referring to FIG. 1 , a collecting device 10 capable of automatically discharging foreign substances according to an embodiment of the present invention includes a scrubber body 100, a collecting unit 200, and a washing water supply unit 300.

The scrubber body 100 receives the gas containing foreign substances generated during the process of the CVD equipment and moves it downward, and components such as a collection unit 200 and a washing water supply unit 300 are installed.

In one embodiment, the scrubber body 100 may include a cylindrical tank 110, a gas inlet 120, a gas outlet 130, and a washing water outlet 140.

The cylindrical tank 110 is formed in a cylindrical shape forming a sealed inner space.

The gas inlet 120 is installed on the upper side of the cylindrical tank 110 to inject gas containing foreign substances generated during the process of the CVD equipment.

The gas outlet 130 is installed on the lower side of the cylindrical tank 110 so that the gas from which foreign substances are removed can be discharged from the cylindrical tank 110 using a negative pressure pump.

The washing water outlet 140 is installed on the lower side of the cylindrical tank 110 to discharge the washing water W washing the foreign substances collected in the collecting unit 200 when the collecting process is finished.

A plurality of collecting units 200 are installed while intersecting along the inside of the scrubber body 100, and collect and remove foreign substances contained in gas descending in the internal space of the scrubber body 100.

When the collection process is completed, the washing water supply unit 300, through the upper side of the scrubber body 100, the washing water (W) for washing foreign substances collected in the collection unit 200 and discharging them to the outside of the scrubber body 100. It is injected into the inner space of the scrubber body 100.

The collecting device 10 capable of automatically discharging foreign substances according to an embodiment of the present invention having the configuration as described above, collects the debris generated during the plasma process of CVD (Chemical Vapor Deposition) equipment by introducing the collecting device, , At this time, the foreign matter collected in the collecting device is discharged to the outside together with the fluid by flowing the fluid, so that the foreign matter can be removed from the collecting device without a separate removal process.

3 is a diagram showing a schematic configuration of a collecting device capable of automatically discharging foreign substances according to another embodiment of the present invention.

Referring to FIG. 3, the collecting device 20 capable of automatically discharging foreign substances according to another embodiment of the present invention includes a scrubber body 100, a collecting unit 200, a washing water supply unit 300, and at least one foreign material filter unit. (400).

Here, since the scrubber body 100, the collecting unit 200, and the washing water supply unit 300 are the same as the components of FIG. 1, their descriptions will be omitted.

At least one foreign substance filter unit 400 is installed inside the cylindrical washing water outlet 140 to filter foreign substances included in the washing water W discharged through the washing water outlet 140 .

The collecting device 20 capable of automatically discharging foreign substances according to another embodiment of the present invention having the configuration described above, prior to discharging the foreign substances contained in the washing water W to the outside through the washing water outlet 140. By discharging after the first filtering, it is possible to realize the effect of simplifying the post-treatment process such as filtering the washing water (W) and reducing costs.

FIG. 4 is a view showing the foreign matter filter unit of FIG. 3 .

Referring to FIG. 4 , the foreign matter filter unit 400 includes a ring seating jaw 410, a rotating ring 420, a filter 430, and a ring driving unit 500.

The ring seat 410 is formed along the inner circumferential surface of the washing water outlet 140 so that the rotary ring 420 can be seated and rotated.

The rotating ring 420 is formed in a circular ring shape forming an outer diameter corresponding to the inner diameter of the ring seating jaw 410 and is seated on the ring seating jaw 410, and the filter 430 and the ring drive unit 500 are installed

The filter 430 is installed inside the rotary ring 420 to remove foreign substances included in the washing water W discharged through the inside of the rotary ring 420 .

The ring driving unit 500 is spaced apart at regular intervals along the lower side of the rotary ring 420, and a plurality of them are installed and seated on the lower side of the ring seating jaw 410, and the rotation ring 420 is installed on the ring seating jaw 410. It supports and rotates in the forward or reverse direction at the same time.

The foreign matter filter unit 400 having the configuration described above is installed in the washing water outlet 140, which is a passage of the washing water W, and removes foreign substances contained in the washing water W discharged along the washing water outlet 140. By filtering while rotating, it is possible to achieve more effective foreign matter removal by the filter 430 .

FIG. 5 is a view showing the ring driving unit of FIG. 4 .

Referring to FIG. 5, the ring drive unit 500 includes a buffer block 510, a buffer spring 520, a sphere seating groove 530, a driving unit installation groove 540, a driving sphere 550, a first support ball ( 560), a second support ball 570, a spherical driving unit 580, and a block seating groove 590.

The block seating groove 590 is recessed while forming an opening at the lower side of the rotary ring 420 so that the buffer block 510 can be supported and seated by the buffer spring 520 .

The upper end of the buffer block 510 is supported by the buffer spring 520 and is seated on the lower side of the block seating groove 590 .

The buffer spring 520 is installed inside the block seating groove 590 to support the upper side of the buffer block 510 seated in the block seating groove 590 and at the same time to absorb vibration or shock transmitted from the buffer block 510. it fills up

The spherical seating groove 530 is recessed at the bottom of the buffer block 510 while forming an opening to the lower side of the buffer block 510 .

The drive unit installation groove 540 extends along the inner side of the buffer block 510 upward from the upper end of the spherical seating groove 530 .

The driving sphere 550 is supported by the first support ball 560 and the second support ball 570 so that the lower side is exposed to the lower side of the buffer block 510 and seated on the lower side of the ring seating jaw 410. It is connected and installed to be rotatably connected to the sphere seating groove 530.

A plurality of first support balls 560 are spaced apart at regular intervals along the lower side of the inner circumferential surface of the sphere seating groove 530 and are installed to support the lower side of the driving sphere 550 .

A plurality of second support balls 570 are spaced apart at regular intervals along the upper side of the inner circumferential surface of the sphere receiving groove 530 and are installed to support the upper side of the driving sphere 550 .

The sphere driving unit 580 is installed in the driving unit installation groove 540 to support the upper side of the driving sphere 550 and rotate the driving sphere 550 at the same time.

The ring driving unit 500 having the configuration described above not only rotates and drives the rotary ring 420 in the forward or reverse direction on the ring seating jaw 410, but also effectively absorbs vibration or shock generated during the rotation process. can do it

FIG. 6 is a view showing the spherical driving unit of FIG. 5 .

Referring to FIG. 6 , the spherical drive unit 580 includes a rotation drive motor 581, a support frame 582, a first support roller 583, a second support roller 584, and a driving belt 585. .

The rotation drive motor 581 is installed on the upper side of the drive unit installation groove 540 to rotate and drive the support frame 582 in a forward or reverse direction.

The support frame 582 is installed on the drive shaft of the rotational drive motor 581, and a 1 support roller 583 and a second support roller 584 are installed.

The first support roller 583 is installed on one side of the support frame 582 and supports one side inward side of the drive belt 585 .

The second support roller 584 is installed on the other side of the support frame 582 while facing the first support roller 583 to support the inward surface of the other side of the driving belt 585 .

One side and the other side of the drive belt 585 are engaged with and connected to the first support roller 583 and the second support roller 584, and are installed in the forward direction by the first support roller 583 and the second support roller 584. Alternatively, it is rotationally driven in the reverse direction to rotate and drive the driving sphere 550 closely disposed on the lower outward surface in the forward or reverse direction.

The spherical driving unit 580 having the configuration described above can rotate and drive the driving sphere 550 in various directions to easily change the direction of rotation of the rotating ring 420 .

The above-described embodiments are for illustrative purposes, and those skilled in the art to which the above-described embodiments belong can easily transform into other specific forms without changing the technical spirit or essential features of the above-described embodiments. You will understand. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope to be protected through this specification is indicated by the following claims rather than the detailed description above, and should be construed to include all changes or modifications derived from the meaning and scope of the claims and equivalent concepts thereof. .

10, 20: Collecting device capable of automatically discharging foreign substances
100: scrubber body
200: collection unit
300: washing water supply unit
400: foreign matter filter unit

Claims (3)

A scrubber body that receives and moves a gas containing foreign substances generated during a process of a CVD equipment and moves it downward;
A plurality of collecting units installed while crossing the inside of the scrubber body to collect and remove foreign substances contained in the gas descending in the internal space of the scrubber body; and
A washing water supply unit for injecting washing water for washing foreign substances collected in the collecting unit and discharging them to the outside of the scrubber body into the inner space of the scrubber body through the upper side of the scrubber body; includes,
The scrubber body,
A cylindrical tank formed in a cylindrical shape forming a sealed inner space;
a gas inlet installed on the upper side of the cylindrical tank to inject gas containing foreign substances generated during the process of the CVD equipment;
a gas outlet installed on the lower side of the cylindrical tank to discharge the gas from which foreign substances are removed; and
A washing water outlet installed at the lower side of the cylindrical tank to discharge the washing water washing the foreign substances collected in the collecting unit; includes,
It further includes; at least one foreign matter filter unit installed inside the cylindrical washing water outlet to filter foreign substances contained in the washing water discharged through the washing water outlet,
The foreign matter filter unit,
a ring seat formed along an inner circumferential surface of the washing water outlet;
a rotating ring formed in a circular ring shape having an outer diameter corresponding to an inner diameter of the ring seating jaw and seated on the ring seating jaw;
a filter installed inside the rotating ring to remove foreign substances contained in the washing water discharged through the inside of the rotating ring; and
A ring driving unit that is spaced apart at regular intervals along the lower side of the rotating ring and is seated on the lower side of the ring seating jaw, and at the same time supports the rotating ring at the ring seating jaw and rotates it in a forward or reverse direction. contains,
The ring driving part,
A block seating groove formed recessed while forming an opening to the lower side of the rotating ring;
A buffer block seated on the lower side of the block seating groove;
a buffer spring installed inside the block seating groove to support the upper side of the buffer block seated in the block seating groove and at the same time to buffer vibration or shock transmitted from the buffer block;
a spherical receiving groove recessed in the lower portion of the buffer block while forming an opening to the lower side of the buffer block;
a drive unit installation groove extending along the inner side of the buffer block upwardly from the upper end of the sphere seating groove;
a driving sphere rotatably connected to the sphere seating groove so that the lower side is exposed to the lower side of the buffer block and seated on the lower side of the ring seating jaw;
First support balls spaced apart at regular intervals along the lower side of the inner circumferential surface of the sphere receiving groove and installed in plurality to support the lower side of the driving sphere;
second support balls spaced apart at regular intervals along the upper side of the inner circumferential surface of the sphere seating groove and installed in plurality to support the upper side of the driving sphere; and
A collecting device capable of automatically discharging foreign substances including; a sphere driving unit installed in the driving unit installation groove to support the upper side of the driving sphere and rotationally drive the driving sphere.
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