KR102564495B1 - Sample holders, systems and methods - Google Patents

Abstract

A sample holder for holding a sample during an X-ray imaging process, the sample holder having a sample placement surface on which the sample is placed for positioning the sample in the depth direction of the sample holder, a first for aligning the sample in the width direction of the sample holder. It includes an alignment unit, and a second alignment unit for aligning the sample in the height direction of the sample holder.

Description

Sample holders, systems and methods

The present disclosure relates to a sample holder for holding a sample during an X-ray imaging process, a system including such a sample holder, and a method for performing an X-ray imaging process using such a sample holder.

The present application, filed on March 20, 2019, is titled "Method for imaging a region of interest of a sample using a tomography X-ray microscope, microscope, system, and computer program (Method for imaging a region of interest of Commonly owned U.S. Provisional Patent Application Serial No. 62/821,090, "a sample using a tomographic X-ray microscope, microscope, system and computer program", incorporated herein by reference in its entirety.

3D X-ray imaging techniques, such as X-ray microscopy (XRM) and microCT, enable fault isolation and physical failure because they enable visualization of faults without the need to destroy the device under test. It has become an established failure analysis (FA) tool for bridging physical failure analysis (PFA). Furthermore, these tools provide FA analysts with better information to determine the best approach for performing PFA for root cause analysis. The XRM advantage of non-destructive high-resolution imaging makes it an excellent option for routine inspection of semiconductor package features such as traces, C4 bumps and micro-bumps. MicroCT is also valuable, but its resolution when applied to larger sample geometries is lower than that achievable with XRM. Because XRM and microCT share many similarities, these terms will be used interchangeably throughout the remainder of this document.

XRM setup and acquisition times have limited its spread and adoption beyond FA and manual measurement applications. XRM workflow improvements provide an opportunity to realize the efficiency and throughput advantages of automated device processing for productivity in high-resolution, site-specific inspection and metrology applications.

In order to perform XRM, it is necessary to accurately and repeatably secure one or more samples, e.g., integrated circuit (IC) packages, to a sample holder so that the sample remains securely held and free from movement in the presence of X-ray radiation. . It is imperative that the placement of the sample on the sample holder does not change significantly in all three spatial dimensions between repeated uses on different sample holders or on the same sample holder.

Against this background, one object of the present disclosure is to provide an improved sample holder.

Accordingly, a sample holder is provided for holding the sample during the X-ray imaging process. The sample holder includes a sample placement surface on which the sample is placed to position the sample in the depth direction of the sample holder, a first alignment portion for aligning the sample in the width direction of the sample holder, and a sample arrangement in the height direction of the sample holder. It includes a second alignment unit for

Due to the fact that the sample holder has a sample placement surface and two alignment parts, it is possible to precisely and repeatably position the sample in all three spatial directions. Thus, the sample remains securely held without movement in the presence of X-ray radiation. The placement of the sample does not change significantly in the three spatial directions between different sample holders or repeated use on the same sample holder.

The X-ray imaging process is preferably XRM. The sample may be an electronic device, particularly an IC package. The sample placement surface is preferably a flat surface of the sample holder on which the sample can be placed. The alignment part is preferably bar-shaped and is arranged on two different edges of the sample placement surface. The sample placement surface is preferably rectangular. The sample placement surface can be easily adapted to different sizes of samples. The sample placement surface is in particular a plane defined by a width direction and a height direction.

The first alignment portion extends along the height direction. The second alignment portion extends along the width direction. The first alignment unit may be referred to as a vertical ledge. The second alignment unit may be referred to as a horizontal ledge. In use of the sample holder, the first edge of the sample abuts the first alignment portion and the second edge of the sample abuts the second alignment portion. Thus, the sample is guided into the corner of the sample receiving section of the sample holder by the aligning portion. In the front view of the sample placement surface, the corner is the lower right corner of the sample receiving section. The alignment part can also serve as an X-ray alignment mark, in particular as a so-called reference point.

The sample holder preferably has a coordinate system having a first spatial direction or x-direction, a second spatial direction or y-direction and a third spatial direction or z-direction. The spatial directions are arranged perpendicular to each other. The z-direction should be understood as the depth direction. The x-direction should be understood as the width direction. The y-direction should be understood as the height direction.

A sample may be placed on the sample holder as follows. In a first step, a sample is placed on the sample placement surface to position the sample in the depth direction of the sample holder. In the second step, the sample abuts on the first aligning portion to align the sample in the width direction of the sample holder. In the third step, the sample abuts on the second aligning portion to align the sample in the height direction of the sample holder. The steps described above may be performed simultaneously or sequentially. The third step may be performed after the second step or vice versa.

According to an embodiment, the first alignment part is arranged perpendicular to the sample arrangement surface, and the second alignment part is arranged perpendicular to the sample arrangement surface and perpendicular to the first alignment part.

In this way, the sample placing surface, the first aligning portion and the second aligning portion form a box-shaped sample receiving section that receives and aligns samples in all three spatial directions. Preferably, the sample receiving section is open on two sides, while the other two sides are closed by alignment parts acting as side walls of the sample receiving section.

According to another embodiment, the cutout is disposed at the intersection of the first alignment unit and the second alignment unit.

Preferably, the cutout is circular. The cut-out may be a bore arranged at the intersection of the two alignment parts. The cutout receives the corner of the sample.

According to another embodiment, the sample holder further comprises a fixing element for pressing the sample against the sample placement surface, the first alignment portion and the second alignment portion.

The fixing element allows the user to apply an appropriate holding force between the sample and the sample holder. When using the sample holder, time is saved by quick assembly, quick release of the sample by means of the fixing element. Since no adhesive is used to secure the sample to the sample holder, no cleaning of the sample and/or sample holder is required. A fixing element can be used multiple times.

According to another embodiment, the fixation element extends diagonally above the sample placement surface.

By "diagonal" is meant that the fixation element extends between two transversely opposed corners of the sample placement surface. Thus, the fixing element also extends diagonally over the sample and thus secures it to the sample holder.

According to another embodiment, the securing element is made of a flexible and radiation-stable material, in particular of ethylene propylene diene methylene rubber.

Thus, the fixing element is flexible or elastic. In other words, the fixation element can be stretched. The fixing element may be termed a resilient fixing element. The fixing element may be an O-ring.

According to another embodiment, the sample holder further comprises a first hook portion and a second hook portion, and the fixing element is hooked into the first hook portion and the second hook portion.

The first hook part and the second hook part are preferably arranged at two opposite corners of the sample placement surface.

According to another embodiment, the sample placement surface is arranged between the first hook part and the second hook part.

The hook portion is arranged diagonally so that the fixing element extends diagonally over the sample and secures it to the sample holder.

According to another embodiment, the sample holder further comprises a rear surface arranged opposite to the sample placement surface, the first hook portion has a first notch provided in the rear surface for receiving a fixing element, and the second hook portion is fixed. It has a second notch provided in the back surface for receiving an element.

In this way, good retention of the fastening element is ensured. Thus, the fixing element is prevented from slipping out of the hook portion.

According to another embodiment, the first hook portion is arranged flush with the sample placing surface, and the second hook portion protrudes from the sample placing surface in the depth direction.

This has the effect that the fixing element extends obliquely with respect to the sample placement surface. This ensures that the sample is firmly pressed against the alignment as well as the sample placement surface. "Equal height" means that the first hook portion does not protrude above the sample placement surface.

According to another embodiment, the sample holder further comprises a sample receptacle having a plurality of sample receiving sections, each sample receiving section having a sample placement surface, a first alignment portion and a second alignment portion.

The number of sample receiving sections is arbitrary. For example, three sample receiving sections are provided. Each sample receiving section is capable of receiving one sample. Each sample receiving section has a holding element. When viewed along the height direction, the sample receiving sections are arranged in a row.

According to another embodiment, the sample receptacle is integrally formed.

The phrase "integrally formed" means a structure formed from the same material or materials using a single continuous process. For example, when the sample receptacle is formed using a 3D printer, the 3D printer may release the same material or materials during the printing process to form the sample receptacle as a single piece. The sample receptacle is preferably made of a material that allows radiation to readily pass through the sample receptacle. Materials used to fabricate the sample receptacle may include aluminum, glassy carbon, glass fiber filled epoxy or other low damping and structurally stable materials.

According to another embodiment, the sample holder further includes a column to which the sample receptacle is attached and a gripper disk to which the column is attached, and the column is fixed to the gripper disk in a form-locking manner by a key connection. .

The posts may be made of aluminum or any other suitable material. The column preferably has a circular cross section. The sample receptacle may be attached to the post by a fixing element such as a screw. Additionally, a pin connection between the sample receptacle and the post may be provided. The pin connection includes an alignment pin and two bores for receiving the alignment pin. One bore is provided in the sample receptacle and one bore is provided in the post. The gripper disk is suitable for being gripped by a gripper or robot. The gripper disc has a central bore for receiving the end of the post. The sample holder further includes a base plate to which the gripper disk is attached. A "form locking" connection can be created by two elements interlocking and blocking each other. The post may have a keyway for receiving a key, particularly a Woodruff key. The central bore of the gripper disc has a notch for receiving a key. The keyed connection positively prevents the post from rotating relative to the gripper disc.

Moreover, a system for performing an X-ray imaging process is provided. The system includes a radiation source that emits radiation, a radiation detector that receives radiation emitted from the radiation source, and at least one sample holder as described above, the sample holder being arranged between the radiation source and the radiation detector.

The system is preferably an XRM system. The system may have multiple sample holders. Each sample holder can hold a plurality of samples. A sample holder holds at least one sample. In particular, the radiation detector receives or detects radiation that passes through the sample and sample holder.

Also provided is a method for performing an X-ray imaging process using such a sample holder. The method includes the following method steps: a) placing a sample on a sample holder, b) emitting radiation by a radiation source, and c) receiving radiation that has passed through the sample by a radiation detector. .

In particular, the radiation also passes through the sample holder. Method steps a) to c) may all be carried out simultaneously or sequentially. While performing the X-ray imaging process, the sample holder with the sample or samples is preferably rotated stepwise to a plurality of positions. At each location, at least one X-ray image is taken. All collected X-ray images together form a three-dimensional data set of the sample, in particular of the region of interest of the sample.

Disclosed features of the sample holder are applicable to the method as well as the system, and vice versa.

Other possible implementations or alternative solutions of the present disclosure also include combinations of features described above or below with respect to embodiments - not explicitly mentioned herein. A person skilled in the art may also add individual or separate aspects and features to the present disclosure in its most basic form.

Other embodiments, features and advantages of the present disclosure will become apparent from the following description and dependent claims taken in conjunction with the accompanying drawings, wherein:
1 shows a schematic perspective view of one embodiment of a sample holder.
FIG. 2 shows a schematic exploded view of the sample holder according to FIG. 1 .
3 shows a schematic cross-sectional view of the sample holder according to FIG. 1 .
FIG. 4 shows a schematic perspective view of one embodiment of a sample receptacle for a sample holder according to FIG. 1 .
Figure 5 shows a schematic front view of the sample receptacle according to Figure 4;
Figure 6 shows a schematic rear view of the sample receptacle according to Figure 4;
FIG. 7 shows a schematic cross-sectional view of the sample receptacle along the intersection line VII-VII of FIG. 5 .
FIG. 8 shows a schematic block diagram of one embodiment of a method for performing an X-ray imaging process using the sample holder according to FIG. 1 .

In the drawings, like reference numbers indicate similar or functionally equivalent elements unless otherwise indicated.

1 shows a schematic perspective view of one embodiment of a sample holder 100 for holding a sample (not shown) during X-ray imaging, particularly X-ray CT imaging, of a sample. 2 shows an exploded view of sample holder 100 . 3 shows a cross-sectional view of sample holder 100 . Hereinafter, FIGS. 1 to 3 are simultaneously referred to.

In particular, the sample holder 100 is used for high-resolution 3D X-ray microscopy (XRM) of semiconductor package interconnects. The sample holder 100 has a base plate 102 . The base plate 102 has a flattened cylindrical shape and has side flats 104 . The base plate 102 further has an upper side 106 and a lower side 108 . Sides 106 and 108 are arranged parallel to each other. The base plate 102 has a stepped bore 110 arranged in the center of the base plate 102 . A bore 110 passes through the base plate 102 . An additional stepped bore 112 is provided in the base plate 102 . The number of bores 112 is arbitrary. For example, three bores 112 are provided.

Fastening elements 114 and 116 are included in bores 110 and 112 . The fixing elements 114 and 116 may be screws. The underside 108 is placed on a stage (not shown). The stage can laterally move the sample holder 100 in a first spatial direction or x-direction (x), a second spatial direction or y-direction (y) and a third spatial direction or z-direction (z). . Hereinafter, the x-direction (x) is referred to as the width direction of the sample holder 100, the y-direction (y) is referred to as the height direction of the sample holder 100, and the z-direction (z) is referred to as the sample holder ( 100) is named as the depth direction. The stage can also rotate the sample holder 100 around the height direction (y). The base plate 102 is preferably made of metal. Base plate 102 may be made of aluminum, steel or other suitable material.

The sample holder 100 further includes a gripper disk 118 . The gripper disk 118 has a flat, cylindrical shape with an upper side 120 and a lower side 122 . The sides 120 and 122 are arranged parallel to each other. The lower side 122 is disposed on the upper side 106 of the base plate 102 . The gripper disc 118 is laterally flattened on two sides. One of the sides has a notch 124 while the other side has a conical bore 126. Notch 124 and bore 126 may be used to grip sample holder 100 by a gripping robot (not shown).

The gripper disk 118 has a number of threaded bores 128 into which a securing element 116 is threaded to secure the gripper disk 118 to the base plate 102 . Bore 128 may pass through gripper disk 118 . The gripper disk 118 includes a central bore 130 passing through the gripper disk 118 . The bore 130 has a notch 132 extending in the height direction y. The gripper disc 118 is made of metal. Preferably, the gripper disc 118 is made of aluminum. The gripper disk 118 may also be made of steel or other suitable material.

A post 134 is received within the bore 130 . The post 134 has a keyway 136 for receiving a key 138. Key 138 is a Woodruff key. Key 138 engages notch 132 in gripper disc 118 and prevents post 134 from rotating relative to gripper disc 118 . The post 134 is secured to the base plate 102 by a fixing element 114 that is screwed into a central bore 140 of the post 134 . Instead of the Woodruff key 138, other keys may also be used.

Post 134 is preferably made of metal. Post 134 may be made of aluminum. Opposite the keyway 136, the post 134 has a side flat 142 with two threaded bores 144,146. Bores 144 and 146 receive fixing elements 148 and 150 . The fixing elements 148 and 150 may be screws. Between the bores 144 and 146 another bore 152 is arranged. Bore 152 receives an alignment dowel or alignment pin 154 . The sample holder 100 has a source side 156 facing a radiation source 500, in particular an X-ray source, and a detector side 158 facing a radiation detector 600, in particular an X-ray detector. Radiation source 500 emits radiation 502, particularly X-rays. Radiation detector 602 detects radiation 504 that passes through sample holder 100 and a sample disposed within sample holder 100 . Sample holder 100, radiation source 500 and radiation detector 600 are part of system 1000 for performing an X-ray imaging process, in particular an XRM process. System 1000 is an XRM system or an X-ray CT system.

The sample holder 100 includes a sample receptacle 200 secured to a post 134 by alignment pins 154 and securing elements 148 and 150 . Sample receptacle 200 is shown in different views in FIGS. 4-7. Hereinafter, FIGS. 4 to 7 are simultaneously referred to.

Sample receptacle 200 is made of a material that allows radiation 502 to readily pass through sample receptacle 200 . For example, sample receptacle 200 may be formed from a polymeric material such as plastic. In this regard, sample receptacle 200 may be formed using a three-dimensional printing device (“3D printer”), allowing sample receptacle 200 to include a variety of custom sizes and shapes for carrying a variety of samples. "Three-dimensional printer" refers to a printing device that ejects a polymeric material to form a three-dimensional structure.

However, the sample receptacle 200 may be formed by other methods. For example, sample receptacle 200 may include a polymeric material that is injection molded into a mold cavity that defines the size and shape of sample receptacle 200 . Sample receptacle 200 may also be formed from a block of polymeric or metallic material that undergoes a material removal process. Materials used to fabricate the sample receptacle 200 may include aluminum, glassy carbon, glass fiber filled epoxy or other low damping and structurally stable materials.

Sample receptacle 200 is preferably integrally formed. The sample receptacle 200 is bar-shaped and has a base portion 202 secured to a post 134 . The base portion 202 has two stepped bores 204, 206 for receiving fixing elements 148, 150 and one bore 208 for receiving an alignment pin 154. Alignment pins 154 are used to accurately position sample receptacle 200 on post 134 . Fixation elements 148 and 150 are used to attach sample receptacle 200 to post 134 .

Sample receptacle 200 includes a plurality of sample receiving sections 210 , 212 , 214 . The number of sample receiving sections 210, 212, 214 is arbitrary. For example, three sample receiving sections 210, 212, 214 are provided. Sample receptacle 200 may accommodate more or fewer sample receiving sections 210 , 212 , 214 depending on the scanning range of system 1000 . Each sample accommodating section 210, 212, 214 is capable of accommodating one sample 300 (see FIG. 5). Sample 300 may be an electronic device such as an integrated circuit. The sample accommodating sections 210, 212 and 214 are arranged in a row when viewed in the height direction (y). The sample receiving sections 210, 212 and 214 are attached to each other. The sample receiving sections 210, 212 and 214 are integrally formed. All sample receiving sections 210, 212 and 214 have the same technical characteristics. For this reason, only the sample receiving section 214 is referred to below.

The sample receiving section 214 is generally plate shaped and has a sample placement surface 216 and a back surface 218 . In use of the sample holder 100 , the sample placement surface 216 is oriented towards the radiation detector 600 and the back surface 218 is oriented towards the radiation source 500 . A sample 300 is placed on the sample placement surface 216 . The sample accommodating section 214 has a first aligning part 220 and a second aligning part 222 . When placing the sample 300 on the sample placement surface 216, the sample 300 may be positioned in the depth direction z. However, sample holder 100 may be positioned such that sample placement surface 216 faces radiation source 500 and back surface 218 faces radiation detector 600 . Accordingly, the sample 300 may be positioned to face the radiation detector 600 or to face the radiation source 500 .

The first alignment part 220 extends along the height direction (y) and is capable of positioning the sample 300 in the width direction (x). The first alignment unit 220 is a vertical ledge or may be referred to as a vertical ledge. The second aligning portion 222 extends along the width direction (x) and is capable of positioning the sample 300 in the height direction (y). The second alignment unit 222 is a horizontal ledge or may be referred to as a horizontal ledge. The alignment parts 220 and 222 are arranged perpendicular to each other. The alignment parts 220 and 222 can also serve as X-ray alignment marks, in particular as so-called reference points.

Sample 300 may have four side edges 302, 304, 306, 308. When placing the sample 300 on the sample placement surface 216, the two edges 306, 308 of the sample 300 are positioned so that the sample 300 is at the lower right corner of the sample receiving section 214 (see FIG. 5). ) and is guided along the first aligning part 220 and the second aligning part 222 until it is positioned within. Thus, with the sample placement surface 216 and the two aligning portions 220, 222, the sample receiving section 214 positions the sample 300 in all three spatial directions (x, y, z). possible. Other alignments may be used such that the origin of the sample 300 is somewhere other than the lower right corner of the sample receiving section 214 .

A circular cutout 224 is arranged where the alignment parts 220 and 222 intersect. Cutout 224 receives a corner of sample 300 . The sample placement surface 216 may be bounded by an upper edge 226 . The sample receiving section 210 does not have such an upper edge 226 . A circular cutout 228 is provided where the upper edge 226 and the first alignment portion 220 cross each other.

The sample accommodating section 214 further includes a first hook portion 230 and a second hook portion 232 arranged diagonally. At the rear surface 218, each hook portion 230, 232 has a notch 234, 236. The first hook portion 230 has a first notch 234 . The second hook portion 232 has a second notch 236 . The hook portions 230 and 232 are capable of receiving the resilient fixing element 400 (see FIG. 5). The second hook portion 232 is arranged between the two notches 238 and 240 passing through the alignment portions 220 and 222 . Fixation element 400 extends through notches 238 and 240 . By means of the fixation element 400 , the sample 300 may be pressed against the sample placement surface 216 and the alignment parts 220 , 222 .

At the back surface 218, the fixation element 400 extends through notches 234 and 236. The fixing element 400 may be an O-ring. The fixation element 400 is made of a flexible and radiation-stable material. For example, the securing element 400 may be made of ethylene propylene diene methylene rubber (EPDM). By means of the fixing element 400 , the sample 300 can be easily fixed to the sample holder 100 in a non-permanent manner. The fixation element 400 imparts a fixation force for registering the sample 300 to the sample placement surface 216 and the alignment parts 220 and 222 .

The function of the sample holder 100 is as follows. In a first step, the sample 300 is placed on the sample placement surface 216 to position the sample 300 in the depth direction z of the sample holder 100 . In the second step, the sample 300 abuts on the first alignment unit 220 to align the sample 300 in the width direction (x) of the sample holder 100 . In the third step, the sample 300 abuts on the second aligning part 222 to align the sample 300 in the height direction (y) of the sample holder 100 . The third step may be performed after the second step or vice versa. The steps described above may be performed simultaneously or sequentially. In particular, the last two steps can be performed by applying a fixing element 400 . In other words, the fixation element 400 presses the sample 300 against the aligners 200 and 222 . Alternatively, the fixation element 400 may be applied after aligning the sample 300 has been performed.

A sample 300 is disposed on each sample receiving section 210, 212, 214. The sample 300 is aligned on the sample placement surface 216 of each sample receiving section 210 , 212 , 214 by the aligners 220 , 222 . Before or after aligning the sample 300, the fixation element 400 is hooked into the hook portion 230, 232 of each sample receiving section 210, 212, 214. The fixation element 400 presses the sample 300 against the sample placement surface 216 and the alignment parts 220 and 222 . Thus, reliable and reproducible positioning of the sample 300 is ensured. After fixing the sample 300, an X-ray scanning procedure is performed. Preferably, a number of sample holders 100 , for example 14, are equipped with samples 300 . These sample holders 100 can be tested in turn within the system 1000. This significantly reduces operator set-up time.

By means of the sample holder 100 described above, one or more samples 300, in particular IC, for X-ray imaging such that the sample 300 or samples 300 remain securely held without movement in the presence of radiation 502 It is possible to secure the package accurately and repeatably. The placement of the sample 300 or samples 300 does not change significantly in the three spatial directions (x, y, z) between different sample holders 100 or repeated use on the same sample holder 100.

The sample holder 100 allows the efficiency of repeatable X-ray CT imaging of the sample 300 optimized for maximum throughput, ease of use, without changing the physical sample 300. Thus, the sample holder 100 enables automation of the X-ray CT imaging workflow. The sample holder 100 supports high-resolution imaging during exposure to radiation 502, particularly X-rays, during the period of 3D tomography. Due to the materials used for the sample holder 100 and the fixation element 400, slight deterioration of the sample holder 100 and its components over time is expected. The sample holder 100 is advantageously adapted for holding the sample 300 vertically. The fixing element 400 allows a user to apply an appropriate holding force between the sample 300 and the sample receptacle 200 .

The radiation-resistant material used for the fixation element 400 enables long life and stability to accommodate high-resolution X-ray imaging. As mentioned above, EPDM rubber is a suitable material for the securing element 400 . The sample holder 100 allows for accurate and repeatable positioning of the sample 300 on the sample holder 100, the positioning being done by the alignment units 220 and 222. With the sample holder 100 it is possible to accommodate more than one sample 300 per sample holder 100 . The sample holder 100 is designed for repeatable sample mounting accuracy to the sample holder 100, particularly for sample-to-sample, holder-to-holder and holder-to-systems.

No tools are required to hold the sample 300. This facilitates installation. Sample holder 100 is optimized for maximum X-ray imaging throughput. This is done using a low attenuation material and a minimum depth profile of the sample receptacle 200 . The sample holder 100 does not damage or deform the sample 300 to be held and scanned. Sample holder 100 is preferably made entirely of non-magnetic material. Therefore, the sample holder 100 does not affect X-rays.

A thermally stable material is used for the sample holder 100 . The material's coefficient of thermal expansion accommodates the highest resolution scans. The key 138 allows accurate and repeatable assembly of the sample holder 100. Key 138 ensures that sample 300 maintains a repeatable angular orientation in the X-ray beam path. The sample holder 100 may be shape optimized to optimize X-ray transmission. This can be done using cutouts. Registration features, so-called fiducials, may be added to the sample holder 100 for its alignment. A unique identifier, for example a barcode, may be added for automatic recognition of the sample holder 100 and sample 300. Also, laser-engraved identifiers may be used.

The sample holder 100 has an expandable design that can be easily customized for each new sample geometry. A CAD model of the sample holder 100 may be used as an input for collision avoidance guidance to the instrument. The sample holder 100 may be packaged with a 3D printer and a design template library. The scalable design allows rapid creation of new designs with minimal effort to optimize high-speed X-ray imaging of samples 300 with slightly different geometries.

When using the sample holder 100, time is saved by quick assembly and quick release of the sample 300. No cleaning of the sample 300 and/or the sample holder 100 is required because no adhesive is used. Because the sample 300 is placed in a repeatable position on the sample holder 100, it is easier to position a region of interest on the sample 300 for X-ray imaging. This location is defined by the design of the sample receptacle 200. The manual alignment step of sample 300 can be replaced by automation. Due to the precise positioning of the sample 300, higher yields in imaging can be achieved as it is less likely to have a failed scan and the need for reimaging. Built-in features 222 of sample holder 100, such as aligner 220, may be used as fiducial marks for alignment in an automated recipe. This improves X-ray scan positional accuracy for all samples 300, saving time and labor of rescanning or placing manual fiducial marks.

8 shows a block diagram of one embodiment of a method for performing an X-ray imaging process using the sample holder 100 . The X-ray imaging process is an iterative 3D imaging and/or measurement process. In method step S1, the sample 300 is placed on the sample holder 100 as described above. A plurality of samples 300 may be attached to the sample holder 100 by a plurality of fixing elements 400 . In method step S2 , radiation 502 is emitted by the radiation source 500 . In method step S3 , radiation 504 that has passed through sample 300 is received by radiation detector 600 .

Method steps S1 to S3 may all be performed simultaneously or sequentially. While performing the X-ray imaging process, the sample 300 or the sample holder 100 with the samples 300 is rotated stepwise to a plurality of positions. At each location, at least one X-ray image is taken. All the collected X-ray images together form a three-dimensional data set of the sample 300, in particular of the region of interest of the sample 300.

Although the present disclosure has been described according to preferred embodiments, it is apparent to those skilled in the art that modifications are possible in all embodiments.

Claims (15)

A sample holder for holding a sample during an X-ray imaging process;
A sample placement surface on which the sample is placed for positioning the sample in the depth direction of the sample holder;
A first alignment unit for aligning the sample in the width direction of the sample holder;
A second alignment unit for aligning the sample in the height direction of the sample holder;
a fixing element for pressing the sample against the sample placement surface, the first alignment portion and the second alignment portion; and
Including a first hook portion and a second hook portion,
The sample holder, wherein the fixing element hooks into the first hook portion and the second hook portion. The sample holder according to claim 1, wherein the first alignment part is arranged perpendicular to the sample arrangement surface, and the second alignment part is perpendicular to the sample arrangement surface and arranged perpendicular to the first alignment part. The sample holder according to claim 1, wherein the cutout portion is disposed at an intersection of the first alignment portion and the second alignment portion. The sample holder according to claim 1 , wherein the fixation element extends diagonally above the sample placement surface. The sample holder according to claim 1 , wherein the fixation element is made of a flexible and radiation-stable material. The sample holder according to claim 1 , wherein the fixing element is made of ethylene propylene diene methylene rubber. 7. The sample holder according to claim 6, wherein the sample placement surface is arranged between the first hook portion and the second hook portion. 7. The method of claim 6, further comprising a rear surface arranged opposite to the sample placement surface, the first hook portion having a first notch provided in the rear surface for receiving the fixing element, and the second hook portion receiving the fixing element. A sample holder having a second notch provided on the back surface for The sample holder according to claim 6, wherein the first hook portion is arranged flush with the sample placing surface, and the second hook portion protrudes from the sample placing surface in the depth direction. The sample holder according to claim 1 , further comprising a sample receptacle having a plurality of sample receiving sections, each sample receiving section having a sample placement surface, a first alignment portion and a second alignment portion. 11. The sample holder according to claim 10, wherein the sample receptacle is integrally formed. 11. The sample holder according to claim 10, further comprising a post to which the sample receptacle is attached and a gripper disk to which the post is attached, wherein the post is secured to the gripper disk in a form-locking manner by a key connection. A system for performing an X-ray imaging process,
a radiation source that emits radiation;
a radiation detector receiving radiation emitted from the radiation source; and
comprising at least one sample holder according to claim 1;
wherein the sample holder is arranged between the radiation source and the radiation detector. A method for performing an X-ray imaging process using the sample holder according to claim 1, comprising the following method steps:
a) placing the sample on the sample holder;
b) emitting radiation by a radiation source, and
c) receiving radiation that has passed through the sample by a radiation detector. delete

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