KR102535274B1 - Flow control valve - Google Patents

Abstract

Disclosed is a flow control valve capable of preventing vertical movement of a mover from deviating from the orbit.
A flow control valve according to an embodiment of the present invention is a flow control valve for a mass flow control device, and is coupled to a housing including a flow path, a mover disposed inside the housing, and configured to open and close the flow path while moving up and down, and a mover. and a guide supporter configured to align the mover coaxially with the housing and guide the mover in a direction toward a central axis of the housing.

Description

Flow control valve {Flow control valve}

The present invention relates to a flow control valve, and more particularly to a flow control valve of a mass flow control device.

In general, a mass flow controller (MFC) is a device that precisely controls the flow rate of gas, and is one of the key parts of semiconductor manufacturing equipment that mass-produces highly integrated parts.

Such a mass flowmeter is classified into a thermal type or a pressure type, and each flowmeter detects from a flow rate sensor that detects the temperature or pressure of the fluid, a flow control valve that adjusts the flow rate by opening and closing the flow path, and a flow rate sensor. It is composed of a controller that calculates the flow rate using the received signal and compares it with the set flow rate to control the flow control valve.

The flow control valve applied to the mass flow meter is applied as a solenoid valve that controls the flow rate by receiving an electrical signal.

The solenoid valve includes an electromagnet coil that generates a magnetic field, a plunger that is magnetized by the magnetic field and opens and closes the flow path while moving up and down, a core disposed above the plunger and magnetized to a different polarity from that of the plunger, and the magnetization of the plunger is released. It is composed of a leaf spring that closes the flow path by pressing the plunger when it becomes available.

However, in the conventional solenoid valve, friction is generated between the plunger and the core in a process in which the plunger is repeatedly raised and lowered, and as a result, asymmetric stress is accumulated in the leaf spring, resulting in deformation.

Accordingly, the plate spring loses its balance, and the center axis of the plunger supported by the plate spring is distorted, changing the trajectory of motion, causing wear and tear and There was a problem with breakage.

In addition, there is a problem in that the fluid is contaminated as fine particles worn in the course of friction between the housing and the plunger are introduced into the fluid.

On the other hand, the conventional solenoid valve is configured to align the position of the plunger only through a leaf spring and pressurize the plunger opening the oil passage through an elastic force.

Accordingly, in the process of repeatedly opening and closing the flow path, the elastic force of the leaf spring is lowered and the force pressing the plunger is weakened. As a result, the plunger cannot completely close the flow path, causing a problem in that a small amount of fluid flows through the flow path.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a flow control valve capable of preventing the vertical motion of a mover from deviating from the orbit.

Another object of the present invention is to provide a flow control valve capable of preventing a collision between a mover and a stationary member.

Another object of the present invention is to provide a flow control valve capable of improving flow opening and closing performance by maximizing a force that presses a mover when the flow path is closed.

The object of the present invention is not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art from the following description.

A flow control valve according to an embodiment of the present invention for solving the above problems is a flow control valve for a mass flow control device, comprising: a housing including a flow path; a mover disposed inside the housing and configured to open and close the passage while moving up and down; and a guide supporter coupled to the mover, coaxially aligning the mover with the housing, and configured to guide the mover toward a central axis of the housing.

and a stator accommodated in the housing, disposed in a fixed state above the movable member, coupled to the guide supporter and disposed in a fixed state, wherein the movable member and the stator are connected to each other via the guide supporter. While being aligned in a coaxial state, the mover can be moved up and down along the outer surface of the guide supporter.

The mover, which has risen toward the stator and opened the passage, may be spaced apart from the stator.

The mover may include a guide groove that accommodates a portion of the guide supporter and is supported by the guide supporter, and the stator may include a fixing groove that accommodates another portion of the guide supporter and supports the guide supporter. can

A guide ring press-fitted into the guide groove and moved up and down together with the mover along an outer surface of the guide supporter may be supported by the guide supporter and coaxially aligned with the mover.

The mover includes a ring support groove for supporting an outer circumferential surface of the guide ring; and a ring support step supporting one end of the guide ring along the central axis of the guide ring, wherein the guide supporter contacts the guide groove to align the mover coaxially with the housing, and A first guide surface for guiding the movement of the ruler; a second guide surface contacting an inner circumferential surface of the guide ring to coaxially align the guide ring with the mover and guide the movement of the guide ring; and a ring locking jaw disposed between the first guide surface and the second guide surface and supporting one end of the guide ring in a state in which the passage is closed.

a coil accommodated in the housing, disposed around the mover and the stator, and configured to magnetize the mover and the stator by generating a magnetic field; and a plate-like elastic body coupled to the mover, aligning the mover coaxially with the housing, and always elastically supporting the mover toward the flow path.

When the mover is magnetized by the coil, it moves toward the stator having a polarity different from that of the mover and opens the flow path. can be closed

An auxiliary elastic body accommodated in the guide groove and configured to be compressed between the guide supporter and the movable element to always elastically support the movable element toward the flow path.

The movable member may further include an elastic body supporting jaw on which one end of the upper limb auxiliary elastic body is supported along a direction of a central axis of the auxiliary elastic body.

A flow control valve according to another embodiment of the present invention for solving the above problems is a housing including a flow path; a mover disposed inside the housing and configured to open and close the passage while moving up and down; a guide supporter configured to guide the mover in the direction of the central axis of the housing; and a plate-shaped elastic body configured to elastically support the mover toward the flow path, wherein the mover is coaxially aligned with the housing at a plurality of positions by the guide supporter and the plate-shaped elastic body.

A flow control valve according to another embodiment of the present invention for solving the above problems is a housing including a flow path; a mover disposed inside the housing and configured to open and close the passage while moving up and down; a plate-like elastic body accommodated in the housing to always elastically support the mover from the outside of the mover toward the flow path and align the mover coaxially with the housing; and an auxiliary elastic body configured to always elastically support the mover toward the flow path inside the mover.

According to an embodiment of the present invention, since the mover is coaxially aligned with the housing through the guide supporter and guided in the direction of the central axis of the housing to prevent the mover from moving away from the track when the mover moves up and down, product quality reliability can be secured, It can increase the life of the product.

In addition, by preventing the mover from departing from the orbit through the guide supporter, local friction between the edge of the mover and the corresponding surface of the stator or between the edge of the mover and the corresponding surface of the housing is prevented, and contamination of the fluid due to fine particles generated during friction is prevented. It can be prevented.

In addition, since the mover is coaxially aligned with the housing at a plurality of positions by the guide supporter and the plate-like elastic body, it is possible to prevent unbalanced stress from being generated in the plate-like elastic body and to prevent deformation and breakage of the plate-like elastic body.

In addition, since the impact load between the mover and the stator is minimized through the guide supporter, the amount of impact is minimized by limiting the moving distance and acceleration of the mover when the mover rises, and the shock load generated when the mover and the stator come into contact with these It is possible to eliminate the Bauschinger effect that causes deformation of a part by limiting it to less than the yield strength of the material.

In addition, since sufficient pressure is transmitted to the mover through a plate-like elastic body that elastically supports the mover from the outside of the mover and an auxiliary elastic body that elastically supports the mover from the inside of the mover, it is possible to completely block the flow path and accurately control the fluid. This can improve the performance of the flow control valve.

In addition, since the initial bending value of the plate-like elastic body is reduced by providing an auxiliary elastic body, the time for adjusting the displacement of the plate-like elastic body is shortened to simplify the manufacturing process, and more flow rate can be controlled while minimizing electric energy for driving the mover. can

Effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the present invention.

1 is a diagram schematically showing a mass flow control device to which a flow control valve according to an embodiment of the present invention is applied.
2 is a schematic cross-sectional view of a flow control valve according to an embodiment of the present invention.
FIG. 3 is an enlarged view of part “A” in FIG. 2 .
4 is a diagram showing a flow path opening and closing process of a flow control valve according to an embodiment of the present invention.

Hereinafter, various embodiments will be described in more detail with reference to the accompanying drawings. The embodiments described in this specification may be modified in various ways. Certain embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the accompanying drawings are only intended to facilitate understanding of various embodiments. Therefore, the technical idea is not limited by the specific embodiments disclosed in the accompanying drawings, and it should be understood to include all equivalents or substitutes included in the spirit and technical scope of the invention.

Terms including ordinal numbers, such as first and second, may be used to describe various components, but these components are not limited by the above terms. The terminology described above is only used for the purpose of distinguishing one component from another.

In this specification, terms such as "comprise" or "having" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded. It is understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, but other elements may exist in the middle. It should be. On the other hand, when an element is referred to as “directly connected” or “directly connected” to another element, it should be understood that no other element exists in the middle.

Meanwhile, a “module” or “unit” for a component used in this specification performs at least one function or operation. And a "module" or "unit" may perform a function or operation by hardware, software, or a combination of hardware and software. In addition, a plurality of “modules” or “units” other than “modules” or “units” to be executed in specific hardware or to be executed in at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, in describing the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be abbreviated or omitted.

1 is a diagram schematically showing a mass flow control device to which a flow control valve according to an embodiment of the present invention is applied.

Referring to FIG. 1 , a flow control valve 11 (hereinafter referred to as 'flow control valve 11') according to an embodiment of the present invention is included in the mass flow control device 1 .

The mass flow control device 1 includes a body 12, a flow sensor 13, a flow control valve 11 and a controller 14.

The body 12 provides a flow path of the fluid, that is, the source gas, and is coupled with the flow sensor 13 and the flow control valve 11.

A main flow path 121 communicating with the flow path 111A of the flow control valve 11 may be provided inside the body 12 to provide a flow path of the fluid so that the fluid moves in a set direction.

A flow sensor 13 and a flow control valve 11 are coupled to the body 12 so as to communicate with the main flow path 121, and the front and rear ends of the body 12 communicate with the main flow path 121 to prevent inflow and outflow of fluid. Ports for evacuation may be provided.

The main flow path 121 provided inside the body 12 is arranged on the other side of the flow control valve 11 and the shear flow path disposed on one side of the flow control valve 11 based on the flow control valve 11. It may include a downstream flow path.

The front end flow path guides the fluid introduced into the inside through the port provided at the front end of the body 12 to the flow control valve 11, and the rear end flow path guides the fluid discharged through the flow control valve 11 to the body 12. It can be guided to a port provided at the rear end.

The flow sensor 13 is disposed on the body 12 and can measure the temperature and pressure of the fluid received in the main flow path 121 at a plurality of locations. For example, the flow sensor 13 may measure the temperature and pressure of the fluid accommodated in the main flow path 121 through different types of flow measurement methods.

The controller 14 receives a flow rate control command from the outside, collects signals detected from the flow rate sensor 13, and calculates an actual flow rate value of the fluid by applying this to a preset algorithm. In addition, the controller 14 may compare the calculated actual flow rate value of the fluid with the set flow rate value and control the flow control valve 11 so that the actual flow rate value becomes equal to the set flow rate value.

The flow control valve 11 is coupled to the body 12 and communicates with the main flow path 121 .

The flow control valve 11 is electrically connected to the controller 14 and opens and closes a flow path (not shown) provided therein according to a flow control command input from the controller 14 to control the flow rate of the fluid.

2 is a schematic cross-sectional view of a flow control valve according to an embodiment of the present invention.

Referring to FIG. 2 , the flow control valve 11 includes a housing 111 , a mover 112 , and at least one guide supporter 113 .

The housing 111 is coupled to the body 12 and accommodates the mover 112 and at least one guide supporter 113 therein.

The housing 111 includes a passage 111A that communicates with the main passage 121 provided in the body 12 and is opened and closed by a mover 112 that moves up and down inside the housing 111 .

The mover 112 is disposed inside the housing 111 and is configured to open and close the passage 111A while moving up and down by an external force.

The mover 112 may come into contact with the outer surface of the body 12 to close the flow path 111A when descending, and may open the flow path 111A by being spaced apart from the body 12 when ascending.

The mover 112 may be an electromagnet that is magnetized when a magnetic field is applied and has a specific polarity.

FIG. 3 is an enlarged view of part “A” in FIG. 2 .

2 and 3, at least one guide supporter 113 is coupled to the mover 112 to align the mover 112 with the housing 111 in a coaxial state, and the housing 111 It is configured to guide the mover 112 in the direction of the central axis of.

In an embodiment of the present invention, being coaxially aligned means that the central axis of one object and the central axis of another object are aligned to coincide with each other.

Accordingly, the mover 112 and the housing 111 may be aligned with their central axes aligned with each other by the guide supporter 113 .

One or more guide supporters 113 may be provided.

When the single guide supporter 113 is provided, the single guide supporter 113 may be disposed inside the housing 111 in a coaxial state with the housing 111 . Also, one guide supporter 113 may be inserted into the guide groove 112A provided at the center of the mover 112 to align the mover 112 with the housing 111 in a coaxial state.

Although not shown in the drawing, when a plurality of guide supporters 113 are provided, the plurality of guide supporters 113 may be disposed parallel to the housing 111 . That is, the central axes of the plurality of guide supporters 113 may be arranged parallel to the central axis of the housing 111 . Also, the plurality of guide supporters 113 may be inserted into a plurality of guide grooves (not shown) provided in the mover 112 to align the mover 112 with the housing 111 in a coaxial state.

Referring to FIGS. 2 and 3 , the flow control valve 11 may further include a stator 114 , a coil 116 , and a plate-like elastic body 117 .

The stator 114 may be accommodated in the housing 111 and disposed on the upper part of the mover 112 in a fixed state.

At least one guide supporter 113 may be coupled to the stator 114 and disposed in a fixed state. That is, the stator 114 may support and fix at least one guide supporter 113 .

The stator 114 may become an electromagnet by being magnetized by a coil 116 disposed inside the housing 111 to generate a magnetic field. At this time, the stator 114 may have a polarity different from that of the mover 112 . Accordingly, the magnetized mover 112 may open the passage 111A while moving toward the stator 114 having the opposite polarity.

The mover 112 and the stator 114 may be coaxially aligned while being connected to each other via at least one guide supporter 113 .

That is, the guide supporter 113 is coupled to and supported by the stator 114 accommodated inside the housing 111, and is coaxially aligned with the housing 111 together with the stator 114, and in this state, the stator 114 While being coupled to the mover 112 disposed on the lower side, the mover 112 may be supported and aligned with the housing 111 in a coaxial state.

Accordingly, the mover 112, the guide supporter 113, and the stator 114 may all be arranged to share the same central axis.

For example, the mover 112 includes a guide groove 112A that accommodates a portion of the guide supporter 113 and is formed in a shape corresponding to the portion of the guide supporter 113 and supported by the guide supporter 113. can do. In addition, the stator 114 may include a fixing groove 114A that accommodates another part of the guide supporter 113 and is formed in a shape corresponding to the other part of the guide supporter 113 to support the guide supporter 113. can

The mover 112 coaxially aligned with the guide supporter 113 and the stator 114 may be guided by the guide supporter 113 and moved up and down in the direction of the central axis of the housing 111 .

The mover 112 may move up and down in the direction of the central axis of the housing 111 along the outer surface of the at least one guide supporter 113 .

Through this, the track of the mover 112 being lifted is prevented from being separated, and the edge of the mover 112 and the corresponding surface of the stator 114 or the edge of the mover 112 and the corresponding surface of the housing 111 are prevented. can prevent local friction of

4 is a diagram showing a flow path opening and closing process of a flow control valve according to an embodiment of the present invention.

Referring to FIGS. 3 and 4 , the mover 112 that rises toward the stator 114 and opens the passage 111A may be spaced apart from the stator 114 . However, the mover 112 is not necessarily disposed away from the stator 114, and may come into contact with the stator 114 in a state in which acceleration is reduced while being rubbed against the outer surface of the guide supporter 113 when ascending.

Therefore, there is no impact between the mover 112 and the stator 114 or the impact between the mover 112 and the stator 114 is minimized, so that deformation due to collision can be prevented and the Bauschinger effect can be eliminated. there is.

The coil 116 may be accommodated in the housing 111 and disposed around the mover 112 and the stator 114 . The coil 116 is configured to receive power from the outside, and when current flows, a magnetic field may be generated to magnetize the mover 112 and the stator 114 . For example, the mover 112 and the stator 114 magnetized by the coil 116 have different polarities.

The plate-shaped elastic body 117 may be accommodated in the housing 111 and coupled to the mover 112 . One side of the plate-shaped elastic body 117 may be coupled to the inner surface of the housing 111 and supported, and the other side of the plate-shaped elastic body 117 may be coupled to the outer surface of the mover 112 .

The plate-shaped elastic body 117 coupled to the housing 111 may be coaxially aligned with the housing 111 . Accordingly, the plate-shaped elastic body 117 coupled to the outer surface of the mover 112 and supporting the mover 112 may align the mover 112 and the housing 111 in a coaxial state.

That is, the mover 112 of the flow control valve 11 is coaxially aligned with the housing 111 at a plurality of positions by the guide supporter 113 and the plate-like elastic body 117, and through this, the track is controlled during elevation. Without departing, the vertical movement is performed only in a predetermined direction, that is, in the direction of the central axis of the housing 111 .

The plate-shaped elastic body 117 may always press the mover 112 toward the body 12 through bending deformation to close the passage 111A.

Specifically, the plate-like elastic body 117 supporting the mover 112 maintains a compressed state while bending upward when the magnetized mover 112 rises, and then the magnetization state of the mover 112 is released. Then, the flow path 111A can be closed by pressing the mover 112 downward, that is, toward the body 12, by the elastic force.

That is, when the mover 112 is non-magnetized by the coil 116, the plate-shaped elastic body 117 presses the mover 112 toward the body 12 through elastic force to remove the mover 112. While spaced apart from the stator 114, the flow path 111A may be closed by completely adhering to the body 12.

The magnitude of the pressure applied to the mover 112 through the elastic force of the plate-shaped elastic body 117 is smaller than the magnetic force acting between the magnetized mover 112 and the magnetized stator 114, and closes the flow path 111A. It may be greater than the pressure of the fluid applied to the moving element 112.

For example, the plate-like elastic body 117 supporting the outer surface of the mover 112 is at a predetermined angle along the central axis so as to always support the mover 112 in the direction of the central axis of the housing 111. It can be configured to bend.

Referring to FIG. 3 , the flow control valve 11 may further include a guide ring 115 .

The guide ring 115 may be configured to be press-fitted into the guide groove 112A and move up and down along the outer surface of the guide supporter 113 together with the mover 112 .

The guide ring 115 may be in contact with the outer surface of the guide supporter 113, supported by the guide supporter 113 in a radial direction, and aligned coaxially with the mover 112.

At this time, the mover 112 includes a ring support groove 112B supporting the outer circumferential surface of the guide ring 115 and a ring support jaw supporting one end of the guide ring 115 along the central axis of the guide ring 115. (112C).

In addition, the guide supporter 113 is in contact with the guide groove 112A to align the mover 112 coaxially with the housing 111, and the first guide surface 113A for guiding the movement of the mover 112 and , may include a second guide surface 113B that contacts the inner circumferential surface of the guide ring 115 to align the guide ring 115 coaxially with the mover 112 and guides the movement of the guide ring 115 .

In addition, the guide supporter 113 is disposed between the first guide surface 113A and the second guide surface 113B, and supports one end of the guide ring 115 in a state in which the flow path 111A is closed. (113C) may be further included.

Referring to FIGS. 3 and 4 , the flow control valve 11 may further include an auxiliary elastic body 118 .

The auxiliary elastic body 118 is accommodated in the guide groove 112A and is disposed between the guide supporter 113 and the mover 112 in a compressed state to elastically support the mover 112 toward the flow path 111A at all times. there is.

At this time, the mover 112 may be provided with an elastic body supporting jaw 112D supporting one end of the auxiliary elastic body 118 accommodated in the guide groove 112A along the direction of the central axis of the auxiliary elastic body 118 .

Accordingly, the non-magnified mover 112 is pressed by the plate-shaped elastic body 117 and the auxiliary elastic body 118 to come into close contact with the body 12, thereby closing the passage 111A.

The plate-shaped elastic body 117 can reduce stress received during operation of the mover 112 by the auxiliary elastic body 118 that presses the mover 112 .

In addition, the bending of the plate-like elastic body 117 may be minimized by the auxiliary elastic body 118 .

That is, in this embodiment, since the force for pressing the mover 112 is supplemented by the auxiliary elastic body 118, the bending of the plate-like elastic body 117 can be minimized. For example, the degree of bending of the plate-like elastic body 117 may be determined in consideration of the pressing force of the auxiliary elastic body 118 .

Therefore, in this embodiment, the process of adjusting the displacement (bending) of the plate-like elastic body 117 for determining the elastic force of the plate-like elastic body 117 can be quickly performed, and accordingly, the entire manufacturing process time can be shortened and productivity can be improved. .

As described above, according to the embodiment of the present invention, the mover 112 is coaxially aligned with the housing 111 through the guide supporter 113, and guided in the direction of the central axis of the housing 111 to move the mover 112. Since deviation from the track is prevented during elevation, product quality reliability can be secured and product lifespan can be increased.

In addition, by preventing the mover 112 from departing from the orbit through the guide supporter 113, the edge of the mover 112 and the corresponding surface of the stator 114 or the edge of the mover 112 and the housing 111 Local friction of the mating surface can be prevented, and contamination of the fluid due to fine particles generated during friction can be prevented.

In addition, since the mover 112 is coaxially aligned with the housing 111 at a plurality of positions by the guide supporter 113 and the plate-shaped elastic body 117, the generation of unbalanced stress in the plate-shaped elastic body 117 is prevented. , deformation and breakage of the plate-like elastic body 117 can be prevented.

In addition, since the impact load between the mover 112 and the stator 114 is minimized through the guide supporter 113, the moving distance of the mover 112 and the acceleration of the mover 112 when the mover 112 rises It is possible to minimize the amount of impact by limiting the impact load, and to limit the impact load generated when the mover 112 and the stator 114 come into contact with less than the yield strength of these materials to remove the Bauschinger effect that causes deformation of the part.

In addition, through the plate-like elastic body 117 that elastically supports the mover 112 from the outside of the mover 112 and the auxiliary elastic body 118 that elastically supports the mover 112 from the inside of the mover 112. Since sufficient pressure is transmitted to the mover 112, the flow path 111A can be completely blocked to accurately control the fluid, and through this, the performance of the flow control valve 11 can be improved.

In addition, since the initial bending value of the plate-shaped elastic body 117 is reduced by providing the auxiliary elastic body 118, the time for adjusting the displacement of the plate-like elastic body 117 is shortened to simplify the manufacturing process and drive the mover 112 More flow can be controlled while minimizing the electrical energy required to do so.

Although the preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the specific embodiments described above, and is common in the art to which the present invention pertains without departing from the gist of the present invention claimed in the claims. Of course, various modifications are possible by those with knowledge of, and these modifications should not be individually understood from the technical spirit or prospect of the present invention.

1. Mass flow controller
11. Flow control valve
111. Housing
111A. Euro
112. Mover
112A. guide home
112B. ring support groove
112 C. ring support jaw
112D. elastic support jaw
113. Guide Supporter
113A. 1st guide surface
113B. 2nd guide surface
113 C. ring snag
114. Stator
114A. fixed groove
115. Guide ring
116. Coil
117. Plate-like elastic body
118. Auxiliary elastic body
12. Body
121. State Euro
13. Flow sensor
14. Controller

Claims (12)

As a flow control valve for a mass flow control device,
A housing containing a flow path;
a mover disposed inside the housing and configured to open and close the passage while moving up and down; and
a guide supporter coupled to the mover, aligning the mover coaxially with the housing, and configured to guide the mover toward a central axis of the housing; and
A guide ring that moves up and down along the outer surface of the guide supporter together with the mover;
The mover,
a guide groove that accommodates a portion of the guide supporter, is supported by the guide supporter, and has the guide ring press-fitted therein;
a ring support groove recessed into the mover from an upper portion of the guide groove and fixed to an outer circumferential surface of the guide ring;
Including; ring support jaw fixed to one end of the lower part of the guide ring,
The guide supporter,
a first guide surface contacting the guide groove and guiding movement of the mover;
a second guide surface formed inside the first guide surface based on the radial direction of the guide supporter and contacting the inner circumferential surface of the guide ring in a relatively movable manner; and
A flow control valve comprising a; ring locking step disposed horizontally with the ring support step between the first guide surface and the second guide surface and supporting the other end of the lower part of the guide ring. According to claim 1,
Further comprising a stator accommodated in the housing and disposed in a fixed state on the upper part of the mover, coupled to the guide supporter and disposed in a fixed state;
The mover and the stator are aligned in a coaxial state while being connected to each other via the guide supporter,
The flow control valve, wherein the mover moves up and down along the outer surface of the guide supporter. According to claim 2,
The flow control valve of claim 1 , wherein the mover, which has risen toward the stator and opened the passage, is spaced apart from the stator. According to claim 2,
The stator is
A flow control valve comprising a fixing groove for accommodating another part of the guide supporter and supporting the guide supporter. According to claim 4,
The flow control valve, wherein the guide ring is supported by the guide supporter and coaxially aligned with the mover. delete According to claim 2,
a coil accommodated in the housing, disposed around the mover and the stator, and configured to magnetize the mover and the stator by generating a magnetic field; and
and a plate-like elastic body coupled to the mover, aligning the mover coaxially with the housing, and configured to elastically support the mover toward the flow path at all times. According to claim 7,
When the mover is magnetized by the coil, it opens the passage while moving toward the stator having a polarity different from that of the mover. A flow control valve that closes the flow path while being spaced apart from. According to claim 4,
and an auxiliary elastic body accommodated in the guide groove and compressed between the guide supporter and the mover so as to always elastically support the mover toward the flow path. According to claim 9,
The mover,
, Flow control valve further comprising an elastic body supporting jaw on which one end of the auxiliary elastic body is supported along the direction of the central axis of the auxiliary elastic body. A housing containing a flow path;
a mover disposed inside the housing and configured to open and close the passage while moving up and down;
a guide supporter configured to guide the mover in the direction of the central axis of the housing; and
a plate-like elastic body configured to elastically support the mover toward the flow path;
A guide ring that moves up and down along the outer surface of the guide supporter together with the mover;
The mover is coaxially aligned with the housing at a plurality of positions by the guide supporter and the plate-like elastic body,
The mover,
a guide groove that accommodates a portion of the guide supporter, is supported by the guide supporter, and has the guide ring press-fitted therein;
a ring support groove recessed into the mover from an upper portion of the guide groove and fixed to an outer circumferential surface of the guide ring;
Including; ring support jaw fixed to one end of the lower part of the guide ring,
The guide supporter,
a first guide surface contacting the guide groove and guiding movement of the mover;
a second guide surface formed inside the first guide surface based on the radial direction of the guide supporter and contacting the inner circumferential surface of the guide ring in a relatively movable manner; and
A flow control valve comprising a; ring locking step disposed horizontally with the ring support step between the first guide surface and the second guide surface and supporting the other end of the lower part of the guide ring. A housing containing a flow path;
a mover disposed inside the housing and configured to open and close the passage while moving up and down;
a plate-like elastic body accommodated in the housing to always elastically support the mover from the outside of the mover toward the flow path and align the mover coaxially with the housing; and
an auxiliary elastic body configured to always elastically support the mover toward the flow path inside the mover;
a guide supporter coupled to the mover, aligning the mover coaxially with the housing, and configured to guide the mover toward a central axis of the housing; and
A guide ring that moves up and down along the outer surface of the guide supporter together with the mover;
The mover,
a guide groove that accommodates a portion of the guide supporter, is supported by the guide supporter, and has the guide ring press-fitted therein;
a ring support groove recessed into the mover from an upper portion of the guide groove and fixed to an outer circumferential surface of the guide ring;
Including; ring support jaw fixed to one end of the lower part of the guide ring,
The guide supporter,
a first guide surface contacting the guide groove and guiding movement of the mover;
a second guide surface formed inside the first guide surface based on the radial direction of the guide supporter and contacting the inner circumferential surface of the guide ring in a relatively movable manner; and
A flow control valve comprising a; ring locking step disposed horizontally with the ring support step between the first guide surface and the second guide surface and supporting the other end of the lower part of the guide ring.

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