KR102525456B1 - Method and system for safe operation of manufacturing equipment - Google Patents

Abstract

The present invention relates to a method and system for safe operation of manufacturing equipment that enables safe operation of manufacturing equipment in consideration of the operating state of the manufacturing equipment or the presence or absence of a worker. The present invention, a human body detection sensor for sensing a human body present inside the protective cover accommodating the manufacturing equipment; and an equipment controller controlling the manufacturing equipment or a warning unit outputting a warning signal according to a sensing result of the human body sensor.

Description

Manufacturing equipment safety operation method and system {METHOD AND SYSTEM FOR SAFE OPERATION OF MANUFACTURING EQUIPMENT}

The present invention relates to a method and system for safe operation of manufacturing equipment. More specifically, the present invention relates to a method and system for safely operating manufacturing equipment that enables safe operation of manufacturing equipment in consideration of the operating state of the manufacturing equipment or the presence of a worker.

Various types of manufacturing equipment are used in a semiconductor manufacturing process or a display manufacturing process.

Taking the liquid crystal display manufacturing process as an example, a thin film transistor (TFT) array substrate and a color filter substrate are manufactured respectively, sealant and liquid crystal are applied to one substrate, and both substrates are bonded. , cutting and fixing to divide into cells is performed to manufacture a unit substrate. Various equipment such as thin film deposition equipment, coating equipment for creating an alignment film or color filter, a liquid crystal dispenser, a seal dispenser, and a substrate scriber are used in this process.

A precision manufacturing process, such as a semiconductor manufacturing process or a display manufacturing process, is usually performed in a clean room where high cleanliness is maintained. Manufacturing equipment for performing each detailed process may be located within an equipment cover for protecting the equipment and blocking foreign substances from the outside. That is, the equipment cover can accommodate manufacturing equipment and form an installation space for manufacturing equipment.

In some cases, a predetermined process gas may be supplied to the inside of the equipment cover. For example, purified nitrogen may be supplied into the equipment cover to prevent damage to electronic devices caused by moisture or oxygen in the air. In addition, the pressure inside the equipment cover may be set to be lower than atmospheric pressure.

The equipment located in the equipment cover may include various operating structures driven during a process, such as an arm of a robot device for transferring a substrate or the like, or a gantry that moves on top of a substrate.

There are cases in which a worker enters the equipment cover for inspection or maintenance of manufacturing equipment, replacement of consumable parts, and the like. However, when a process gas such as nitrogen is supplied to the inside of the equipment cover, in a vacuum state, or when a worker enters the equipment cover while the process is in progress, there is a risk of life-threatening or injury.

In addition, even if the operator enters the equipment cover while the operation of the manufacturing equipment is stopped and the safety within the equipment cover is secured, the manufacturing equipment in the system that manages other workers or the manufacturing process overlooks that the worker remains in the equipment cover There is a problem that can lead to a serious accident when operating.

Meanwhile, among manufacturing equipment for a semiconductor process, a gas chamber for storing a gas used in the process may be provided. An example is a nitrogen gas chamber for storing nitrogen gas. When a worker enters such a gas chamber in the presence of harmful gas, there is a problem that leads to an accident of the worker due to the presence of the harmful gas or suffocation.

Republic of Korea Patent Publication No. 10-2003-0054751 (published on July 2, 2003) Republic of Korea Patent Publication No. 10-2005-0069028 (published on July 5, 2005)

In order to solve the above problems, an object of the present invention is to provide a safe driving method and system for manufacturing equipment that enables safe operation of manufacturing equipment in consideration of the operating state of the manufacturing equipment and the presence of workers.

In addition, an object of the present invention is to provide a safe driving method and system for manufacturing equipment that prohibits or stops the operation of manufacturing equipment in the presence of a worker or enables the worker to work in a safe state.

In addition, an object of the present invention is to provide a method and system for safely operating manufacturing equipment that prevents human accidents by preventing workers from entering manufacturing equipment having an environment harmful to the human body in advance or confirming the presence of workers.

The present invention, a human body detection sensor for sensing a human body present inside the protective cover accommodating the manufacturing equipment; and an equipment control unit configured to control a warning unit that controls the manufacturing equipment or outputs a warning signal according to a sensing result of the human body sensor.

In one embodiment, the manufacturing equipment safety driving system further includes an operation panel for inputting an operation command of the manufacturing equipment, and the equipment control unit displays the operation panel when a human body is detected by the human body detection sensor. A warning message may be output or operation of the manufacturing equipment may be prohibited.

In addition, when a human body is detected by the human body sensor, the equipment control unit may prohibit the operation of the manufacturing equipment despite an operation command of the manufacturing equipment by an integrated control unit that centrally controls the manufacturing equipment.

In addition, an environmental sensor for sensing at least one of temperature, pressure, and gas concentration inside the protective cover may be further included.

In addition, according to a sensing result of the environment sensor, the equipment controller may prohibit opening of a door provided in the protective cover or output a warning signal through the warning unit.

In addition, the human body detection sensor senses the state of the human body, and the equipment control unit may notify the integrated controller when an abnormality occurs in the state of the human body.

According to another embodiment of the present invention, the present invention provides a human body detection sensor for sensing a human body present in a gas chamber storing process gas; and an equipment controller controlling the gas chamber or a warning unit outputting a warning signal according to a sensing result of the human body sensor.

In one embodiment, an environmental sensor for sensing at least one of temperature, pressure, and gas concentration inside the gas chamber may be further included.

In addition, when the human body detection sensor senses that a human body exists inside the gas chamber and the environment sensor detects that the environment inside the gas chamber is harmful to the human body, a warning signal is output through the warning unit. can

In one embodiment, the human body detection sensor may be a sensor based on IR-UWB (Impulse Radio Ultra Wideband) communication technology.

In addition, the human body detection sensor may sense at least one of motion information of the human body, a breathing state, and a heartbeat state.

In addition, the human body detection sensor emits electromagnetic waves to receive a reflected signal, determines a maximum signal position based on the intensity of the reflected distance of the signal, and detects respiration or heartbeat of the human body according to the periodicity of the signal. can

In addition, the human body sensor may determine the periodicity by calculating a similarity of the signal according to autocorrelation of the signal extracted for a predetermined time.

According to another embodiment of the present invention, the present invention provides a sensing step of sensing the presence or absence of a human body inside a protective cover separating manufacturing equipment from the outside or inside a gas chamber using a human body sensor; and a protection step of outputting a warning signal through a warning unit or prohibiting the operation of the manufacturing equipment or the gas chamber when the human body is detected in the sensing step.

In one embodiment, in the sensing step, the body detection sensor may be a sensor based on IR-UWB (Impulse Radio Ultra Wideband) communication technology.

In addition, the human body detection sensor senses breathing or heart rate information of the human body, and when it is determined that an abnormality of the human body has occurred, a warning signal is output in the protection step, or the manufacturing equipment or the gas chamber is centrally controlled. can be notified to the integrated control unit.

In addition, the human body detection sensor emits electromagnetic waves to receive a reflected signal, determines a maximum signal position based on the intensity of the reflected distance of the signal, and detects respiration or heartbeat of the human body according to the periodicity of the signal. can

In addition, the human body sensor may determine the periodicity by calculating a similarity of the signal according to autocorrelation of the signal extracted for a predetermined time.

In one embodiment, the method may further include an environment sensing step of sensing at least one of temperature, pressure, and gas concentration inside the protective cover or inside the gas chamber using an environment sensor.

Also, according to the sensing result of the environment sensing step, the protection step may prohibit entry into the inside of the protective cover or the inside of the gas chamber.

In addition, when the presence of a human body is detected in the sensing step and the sensing result in the environment sensing step is determined to be harmful to the human body, the protection step notifies the integrated control unit that centrally controls the manufacturing equipment or the gas chamber. can do.

According to the present invention, it is possible to determine whether a worker exists in the protective cover in which manufacturing equipment is installed and to control the operation of the manufacturing equipment, thereby improving safety in equipment operation.

In addition, according to the present invention, it is possible to accurately detect whether or not an operator exists within the protective cover based on the operator's breathing or heart rate information, thereby improving reliability in equipment operation.

In addition, according to the present invention, there is an effect of blocking risk factors and preventing loss of life based on the worker's condition and/or environmental information within the protective cover.

In addition, according to the present invention, loss of human life is prevented in advance by sensing a state in manufacturing equipment such as a gas chamber for storing harmful gases and confirming the presence of an operator.

1 is a perspective view showing manufacturing equipment and equipment covers in a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.
2 is a block diagram showing the configuration of a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.
3 is a block diagram showing an example of a human body monitoring sensor applied to a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.
4 is a flowchart illustrating a method of detecting a human body detection sensor of the IR-UWB method used in a manufacturing equipment safe driving system according to a preferred embodiment of the present invention.
5 is a flowchart illustrating a method of determining periodicity in an IR-UWB type human body sensor.
6 is a diagram illustrating an example of processing a signal of an IR-UWV type human body sensor.
7 is a flowchart illustrating a safe driving method for manufacturing equipment according to a preferred embodiment of the present invention.
8 is a diagram showing a manufacturing equipment safety driving system according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to components of each drawing, it should be noted that the same components have the same numerals as much as possible even if they are displayed on different drawings. In addition, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description will be omitted. In addition, although preferred embodiments of the present invention will be described below, the technical idea of the present invention is not limited or limited thereto and can be modified and implemented in various ways by those skilled in the art.

1 is a perspective view showing manufacturing equipment and equipment covers in a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.

The manufacturing equipment safety driving system according to a preferred embodiment of the present invention aims to promote safe operation of manufacturing equipment 20, and the manufacturing equipment 20 is provided inside the protective cover 10.

The manufacturing equipment 20 may be equipment such as equipment for performing a semiconductor production process, thin film deposition equipment for manufacturing a display, coating equipment for producing an alignment film or color filter, a liquid crystal dispenser, a seal dispenser, a substrate scriber, and the like.

The protective cover 10 is installed outside the manufacturing equipment 20 . The protective cover 10 separates the passage of workers and the installation space of the equipment. A carrying passage (not shown) for carrying in a substrate to be processed or the like may be installed on one side of the protective cover 10 . An object to be processed, such as a substrate, brought in through the carrying passage of the protective cover 10 may be processed through a predetermined process in the manufacturing equipment 20 . On the other hand, the upper portion of the protective cover 10 may be opened to lead to the ceiling of the clean room, or may be closed in some cases.

One side of the protective cover 10 may be provided with a door 12 for the worker 60 to enter and exit the inside of the protective cover 10 . In addition, an operation panel 30 may be provided outside the protective cover 10 to allow the operator 60 to input commands for operating the manufacturing equipment 20 or to display the operating state of the manufacturing equipment 20 . The manipulation panel 30 may be composed of a plurality of manipulation buttons or may be provided in the form of a touch panel capable of inputting in a touch manner and capable of visual display.

At least one human sensor 40 is provided in the protective cover 10 . The human body detection sensor 40 performs a function of detecting the operator 60 when the operator 60 exists inside the protective cover 10 .

The human body detection sensor 40 may be installed to detect at least a part of a place where the operator 60 may be located within the protective cover 10, preferably the entire area. To this end, a plurality of human body detection sensors 40 may be provided in the protective cover 10, and the plurality of human body detection sensors 40 may be set to have respective detection ranges.

At least one warning unit 50 may be provided outside or around the protective cover 10 . The warning unit 50 may be a warning light 52 or a speaker 54. In one embodiment, the warning light 52 may be turned on in green (safety), yellow (caution), or red (danger) depending on the safety state. In addition, the speaker 54 may output a warning broadcast or a warning sound according to the state of the manufacturing equipment 20 .

2 is a block diagram showing the configuration of a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.

A system for promoting safe operation of the manufacturing equipment 20 located within the protective cover 10 shown in FIG. 1 is shown in FIG. 2 .

Referring to FIG. 2 , the manufacturing equipment safe driving system 100 according to an embodiment of the present invention includes a door open/close sensor 14 for sensing an open/closed state of a door 12 and the presence of a worker inside a protective cover 10 A human body detection sensor 40 for detecting, an operation panel 30 for inputting an operating command or displaying an operating state of the manufacturing equipment 20, and manufacturing equipment 20 and / or includes an equipment control unit 70 that controls the operation of the warning unit 50. In addition, the manufacturing equipment safe driving system 100 may include an environment sensor 16 that senses at least one of temperature, air pressure, and gas concentration within the protective cover 10 .

In one embodiment, the manufacturing equipment safety driving system 100 may include an integrated control unit 80 that centrally controls the manufacturing equipment 20 or controls a plurality of manufacturing equipment 20 in an integrated manner.

The door open/close sensor 14 senses whether the door 12 provided in the protective cover 10 is opened or closed. In one embodiment, the door open/close sensor 14 may include a mechanical sensor mounted on the door 12 or a magnetic sensor and a magnet respectively provided on the door 12 and the door frame.

The human body detection sensor 40 senses the presence or absence of the worker 60 within the protective cover 10 . In one embodiment, the human body detection sensor 40 may detect a human body using a heat ray detection method or an infrared detection method. However, heat ray detection is vulnerable to indoor heat changes, and accurate detection may be difficult when the human body is covered by protective clothing or masks or manufacturing equipment. In addition, infrared detection may have a disadvantage in that it is sensitive to external environments such as scattering by moisture or a light source. Therefore, in the present invention, it is further proposed to apply a sensor based on IR-UWB (Impulse Radio Ultra Wideband) communication technology as the human body detection sensor 40. A specific technology of the human body detection sensor 40 will be described later.

The equipment controller 70 controls safe operation of the manufacturing equipment 20 . The equipment controller 70 may receive sensing information from the door open/close sensor 14 and/or the human body sensor 40 . The equipment control unit 70 may receive information from the operation panel 30 and output information on the operating state of the manufacturing equipment 20 to the operation panel 30 . In addition, the equipment control unit 70 may output an operating state or a dangerous state of the manufacturing equipment 20 through the warning unit 50 .

The equipment control unit 70 may prohibit opening of the door 12 during operation of the manufacturing equipment 20 . In this case, a locking device (not shown) is provided on the door 12, and the equipment controller 70 may maintain the locking device in a locked state.

When the worker wants to enter the protective cover 10 for inspection or maintenance of the manufacturing equipment 20, the worker stops the operation of the manufacturing equipment 20 through the operation panel 30 and enters the protective cover 10. can be input to the operation panel 30. In this case, the equipment control unit 70 may approve the entry and exit of the worker, and may detect the opening of the door 12 according to the sensing of the door opening/closing sensor 14 .

When a worker enters the protective cover 10, the human body detection sensor 40 detects the worker. When the equipment control unit 70 transmits a signal that the human body detection sensor 40 detects a worker, the equipment control unit 70 visually or audibly through the warning unit 50 indicates that there is a worker within the protective cover 10. A warning can be issued, and a warning message can also be output through the operation panel 30 . In addition, the equipment controller 70 may prohibit the operation of the manufacturing equipment 20 when an operator is present in the protective cover 10 .

Meanwhile, the equipment control unit 70 may monitor state information of the worker according to the sensing of the human body sensor 40 . In one embodiment, the human body sensor 40 senses at least one of movement information, a breathing state, and a heartbeat state of the worker, and the equipment control unit 70 detects the human body sensor 40 according to the sensing result of the worker. An abnormality may be determined and notified through a warning unit 50 or the like. In addition, the equipment control unit 70 determines that the operator's entry into the protective cover 10 is dangerous according to the sensing result of the environmental sensor 16, or the protective cover in a state in which the operator enters the protective cover 10. If it is determined that the environment in (10) is harmful to the worker, the worker's entry may be prohibited or a warning message may be output through the warning unit 50.

In one embodiment, when it is detected by the human body detection sensor 40 that a worker is present in the protective cover 10, another worker from the outside uses the operation panel 30 to control the operation of the manufacturing equipment 20. Even if input, the equipment controller 70 may prohibit the operation of the manufacturing equipment 20 .

With this configuration, the equipment controller 70 can promote safe operation of the manufacturing equipment 20 .

Meanwhile, the equipment control unit 70 may communicate with the integrated control unit 80. The integrated control unit 80 may be a device that centrally controls the operation of the manufacturing equipment 20 . The integrated control unit 80 may perform a function of centrally controlling one manufacturing equipment 20 or a plurality of manufacturing equipment 20 . In one embodiment, the manufacturing equipment 20 is a device that performs a specific process of manufacturing a liquid crystal display, and the integrated control unit 80 is a plurality of manufacturing equipment 20 that performs a plurality of processes for manufacturing a liquid crystal display can be centrally controlled.

The equipment control unit 70 may transmit the operating state of the manufacturing equipment 20 and/or whether a worker exists in the protective cover 10 to the integrated control unit 80 . In addition, the equipment control unit 70 may transmit the occurrence of a problem to the integrated control unit 80 when a problem occurs to the operator in the protective cover 10 so that rescue measures can be taken immediately.

When the operation of the manufacturing equipment 20 is instructed by the integrated control unit 80, the equipment control unit 70 does not operate the manufacturing equipment 20 in a state in which a worker is present in the protective cover 10. You can control not to.

3 is a block diagram showing an example of a human body monitoring sensor applied to a manufacturing equipment safety driving system according to a preferred embodiment of the present invention.

In one embodiment of the present invention, the human body detection sensor 40 may be a sensor that emits electromagnetic waves in the IR-UWB band and receives a signal reflected from an object to detect motion and distance of the object. IR-UWB communication technology detects a radio signal reflected from an arbitrary object with higher accuracy than narrowband signals by using a very narrow width impulse ranging from a few ns to hundreds of ps, and uses it as a respiration or heartbeat signal. can be extracted.

Referring to FIG. 3, the human body sensor 40 includes an interface unit 42 connected to the system, a sensor controller 44 that controls the operation of the sensor, a transceiver 46 that emits and receives electromagnetic waves, and An antenna 48 for radiating and receiving electromagnetic waves may be included.

The human body detection sensor 40 may calculate distance information with an object. In addition, the human body detection sensor 40 may detect a movement according to a change in distance information in the case of an object or a human body operating within a detection area. In addition, the body detection sensor 40 may sense breathing information or heartbeat information of the human body. When breathing information or heart rate information is sensed from an object whose movement is detected by the human body sensor 40, it may be possible to sense that the corresponding object is a human body.

In addition, in the present invention, when the human body sensor 40 detects breathing or heart rate information, but other movements of the human body stop, or when the sensing result of breathing or heart rate information gradually slows down, the protective cover ( 10) It can be determined that an abnormality occurs in the physical condition of the worker located inside.

A detailed operation method of the human body detection sensor 40 of the IR-UWB method is described as follows.

4 is a flowchart illustrating a detection method of an IR-UWB type human body sensor used in a safe driving system for manufacturing equipment according to a preferred embodiment of the present invention, and FIG. It is a flow chart showing how to judge.

The human sensor 40 emits electromagnetic waves, receives a signal reflected from an object, and removes a background signal from the received signal (S200). The background signal may be a signal reflected from a stationary object that is not moving, or a signal with a certain intensity below or above a certain intensity.

The sensor controller 44 may classify the radio signal from which the background signal is removed according to the reflected distance. The reflected distance may be calculated according to the time-of-flight. The sensor control unit 44 classifies the radio signal according to the distance, records the radio signal for each time-reflection distance based on the intensity for each reflection distance of the signal, and determines the position of the maximum signal having the maximum dispersion or maximum energy in the signal intensity. Do (S202). A point where the signal strength has the maximum variance or maximum energy may be a first candidate position where a dynamic object is expected to exist.

The sensor control unit 44 extracts a radio wave signal for a predetermined time at the maximum signal position (S204).

The sensor control unit 44 may observe the periodicity of the radio signal extracted for a predetermined period of time, and detect the respiration or heartbeat of the human body according to whether or not the periodicity is observed. A detailed description of this is as follows.

With respect to the radio signal extracted in step S204, the sensor control unit 44 determines the self-correlation between the first radio signal extracted for a predetermined time and the second radio signal obtained by delaying the first radio signal by a predetermined time. is performed (S206), the similarity between the two radio signals is calculated according to the autocorrelation operation (S208), and the periodicity of the radio signals is determined (S210).

A specific embodiment of steps S206 to S210 is shown in FIG. 5 .

Calculate similarity between two radio signals through an autocorrelation operation between a first radio signal obtained by extracting a radio signal reflected from a maximum signal position and received for a predetermined time and a second radio signal obtained by delaying the first radio signal by a predetermined time And, the reciprocal value f1 of the period between the peaks representing the maximum similarity between the two propagation signals is calculated (S300).

After extracting the received radio signal reflected from the position of the maximum signal for a predetermined time, the maximum frequency value f2 of the radio signal is calculated through a Fourier transform operation (S302).

It is determined whether the absolute value of the difference between the reciprocal value f1 and the frequency value f2 is within a predetermined range (S304). If it is within the predetermined range, it is determined that there is periodicity, and if it is out of the predetermined range, It is judged that there is no periodicity.

The "predetermined time (T1)" for extracting the received radio signal reflected from the maximum signal position in steps S300 and S302 is to obtain a meaningful result when autocorrelation operation and Fourier transform operation are performed on the extracted radio signal It means a sufficient time (ie, at least a time during which periodicity that can be estimated from a respiration or heart rate signal can be sufficiently expressed).

In addition, in step S304, the "predetermined range (d)" in which the absolute value of the difference between the reciprocal value (f1) and the frequency value (f2) should exist is a typical breathing pattern or heartbeat pattern of a person corresponding to a representative meaningful dynamic object. However, since the human respiration or heart rate signal is very similar to a sine or cosine waveform, the difference between the reciprocal value (f1) and the frequency value (f2) is the radio signal extracted from the maximum signal position. In the case of representing the periodicity estimated by the breathing signal, the "predetermined range (d)" may be less than 10%, preferably less than 5% of any one of the reciprocal value (f1) and the frequency value (f2).

6 is a diagram illustrating an example of processing a signal of an IR-UWV type human body sensor.

Figure 6 (a) shows the extraction result of the radio wave signal in which the periodicity of the signal estimated as a respiration signal exists, and (b) shows the result of Fourier transform operation of the radio signal shown in (a). , (c) shows the auto-correlation calculation result of the radio signal shown in (a).

As shown in (b) of FIG. 6, after performing the Fourier transform operation on the radio signal shown in (a) of FIG. 6 and then calculating the respiratory rate through the maximum frequency value, the result is 29.7 times/minute While the value is obtained, as shown in (c) of FIG. 6, the similarity between the two signals obtained through the autocorrelation operation between the propagation signal shown in (a) of FIG. 6 and the signal delayed by a certain time is The respiratory rate obtained through the reciprocal value of the period between peaks representing the maximum value is 30.2 times/min.

The difference between the reciprocal value f1 and the frequency value f2 calculated from the radio signal shown in (a) of FIG. 6 corresponds to less than 10% of either of the reciprocal value f1 and the frequency value f2. As such, it can be determined that the indicated radio signal has a periodicity estimated as a respiration signal.

7 is a flowchart illustrating a safe driving method for manufacturing equipment according to a preferred embodiment of the present invention.

First, it is assumed that the manufacturing equipment 20 is operating (S400).

If the manufacturing equipment 20 is in operation, prohibiting the opening of the door 12 from the outside or opening the door 12 and entering the protective cover 10, the equipment control unit 70 issues a warning so that the protective cover ( 10) The entry into the inside is blocked (S402).

When a worker wants to enter into the protective cover 10, the equipment controller 70 stops the operation of the manufacturing equipment 10 by the operator manipulating the operation panel 30 or under the control of the integrated controller 80. (S404).

The human body detection sensor 40 detects a human body entering the protective cover 10 (S406). When the human body detection sensor 40 detects a human body within the protective cover 10, the following measures are taken.

Even when a human body is detected within the protective cover 10, if there is a request to operate manufacturing equipment through the operation panel 30 or integrated control unit 80 outside the protective cover 10 (S408), the equipment control unit 70 While prohibiting the operation of the manufacturing equipment 20, a warning signal may be output through the warning unit 50 (S410).

Meanwhile, the human body detection sensor 40 may sense respiration or heartbeat information of a human body entering the protective cover 10 and determine the human body condition (S412). When it is determined that an abnormality has occurred in the human body, the equipment controller 70 outputs a warning signal (S416).

In addition, the environmental sensor 16 provided in the protective cover 10 senses environmental information in the protective cover 10 (S414), and if the environment in the protective cover 10 is harmful to the human body, the equipment control unit 70 warns A signal is output (S416).

In addition, in step S416, the equipment control unit 70 may transmit the occurrence of an abnormality to the integrated control unit 80.

8 is a diagram showing a manufacturing equipment safety driving system according to another preferred embodiment of the present invention.

Referring to FIG. 8 , the manufacturing equipment safe driving system according to another embodiment of the present invention detects the manufacturing equipment 90, the human body detection sensor 40 installed in the manufacturing equipment 90, and the human body detection sensor 40. It may include an equipment control unit 510 that receives information, and a warning unit 520 that generates a warning signal under the control of the equipment control unit 510.

The manufacturing equipment shown in FIG. 8 is characterized in that it is a gas chamber 90 for storing a process gas used in a manufacturing process such as a semiconductor process or a display. In one embodiment, the gas chamber 90 may store nitrogen.

The gas chamber 90 may include a container part 92 for storing gas and a cover part 94 covering an open portion of the container part 92 . When maintenance or inspection such as cleaning of the gas chamber 90 is required, the cover part 94 can be opened and an operator can enter the inside of the gas chamber 90 .

An opening/closing sensor 96 for recognizing opening/closing of the cover unit 94 may be provided at a predetermined location of the cover unit 94 or the container unit 92 . The equipment control unit 510 may recognize that the cover unit 94 is opened according to the sensing of the opening/closing sensor 96 .

In addition, an environment sensor 98 for sensing at least one of temperature, pressure, and concentration may be provided inside the container part 92 . The equipment control unit 510 may recognize the temperature, pressure, or concentration of harmful gases inside the storage unit 92 according to the sensing of the environment sensor 98 .

When a worker enters the container part 92, the human body sensor 40 senses the human body and transmits the sensing result to the equipment control unit 510. The human body detection sensor 40 may sense the movement of the human body or detect the existence of the human body by sensing respiration or heartbeat. In addition, the human body detection sensor 40 may sense the degree of respiration or heart rate of the human body. In one embodiment, the human body detection sensor 40 may be set to operate when it is recognized that the cover part 94 is opened by the opening/closing sensor 96 .

The equipment controller 510 warns that a worker exists in the gas chamber 90 through the warning unit 520 according to the sensing of the human body sensor 40, or the integrated controller 80 alerts the operator to the gas chamber 90. You can be notified that you have entered.

In addition, the equipment control unit 510 determines whether the worker's breathing or heart rate is normal according to the sensing result of the human body sensor 40, and if it is not normal, the warning unit 520 issues a warning or an integrated control unit. (80).

In addition, the equipment control unit 510 determines whether the operator is in an inappropriate state to enter the gas chamber 90 according to the sensing result of the environment sensor 98 or the gas chamber ( 90) When the internal state is changed to a state harmful to the human body, a warning may be given through the warning unit 520.

In some cases, the integrated control unit 80 may control other devices so that gas is supplied to the gas chamber 90 . When the human body sensor 40 senses that an operator exists inside the gas chamber 90, the integrated control unit 80 controls the gas chamber 90 even when gas supply to the gas chamber 90 is requested. ) can be controlled so that gas supply is not made.

According to the embodiment shown in FIG. 8 , when the state of the gas chamber 90 for storing harmful gas is harmful to the human body, it is possible to prevent workers from entering. In addition, the risk of a safety accident can be prevented in advance by sensing the human body detection sensor 40 that a worker enters the gas chamber 90 or sensing the human body state sensor 40 of the worker.

The above description is merely an example of the technical idea of the present invention, and those skilled in the art can make various modifications, changes, and substitutions without departing from the essential characteristics of the present invention. will be. Therefore, the embodiments disclosed in the present invention and the accompanying drawings are not intended to limit the technical idea of the present invention, but to explain, and the scope of the technical idea of the present invention is not limited by these embodiments and the accompanying drawings. . The protection scope of the present invention should be construed according to the following claims, and all technical ideas within the equivalent range should be construed as being included in the scope of the present invention.

10: protective cover
12: door
14: door open sensor
16: environment sensor
20: manufacturing equipment
30: operation panel
40: human body detection sensor
42: interface unit
44: sensor control unit
46: transceiver
48: antenna
50: warning part
70: equipment control unit
80: integrated control unit
90: gas chamber

Claims (21)

A human body detection sensor for sensing a human body existing inside a protective cover accommodating manufacturing equipment;
an equipment controller controlling the manufacturing equipment or a warning unit outputting a warning signal according to a sensing result of the human body sensor; and,
an environmental sensor for sensing at least one of temperature, pressure, and gas concentration inside the protective cover;
Manufacturing equipment safety driving system comprising a. According to claim 1,
An operation panel for inputting an operation command of the manufacturing equipment is further provided,
The equipment control unit outputs a warning message to the operation panel or prohibits the operation of the manufacturing equipment when a human body is detected by the human body sensor. According to claim 1,
When a human body is detected by the human body sensor, the equipment control unit prohibits the operation of the manufacturing equipment despite an operation command of the manufacturing equipment by an integrated control unit that centrally controls the manufacturing equipment Equipment safety driving system. delete According to claim 1,
According to the sensing result of the environment sensor, the equipment control unit prohibits the opening of the door provided in the protective cover or outputs a warning signal through the warning unit. According to claim 3,
The human body detection sensor senses the state of the human body, and the equipment control unit notifies the integrated controller when an abnormality occurs in the state of the manufacturing equipment. A human body detection sensor for sensing a human body present in a gas chamber storing process gas;
an equipment control unit controlling the gas chamber or a warning unit outputting a warning signal according to a sensing result of the human body sensor; and
an environmental sensor for sensing at least one of temperature, pressure, and gas concentration inside the gas chamber;
Manufacturing equipment safety driving system comprising a. delete According to claim 7,
Characterized in that the human body detection sensor senses that a human body exists inside the gas chamber, and outputs a warning signal through the warning unit when it is determined that the environment inside the gas chamber is harmful to the human body as a result of sensing by the environment sensor. manufacturing equipment safety operation system. The method of any one of claims 1 to 3, 5 to 7 and 9,
The human body detection sensor is a manufacturing equipment safety driving system, characterized in that the sensor is based on IR-UWB (Impulse Radio Ultra Wideband) communication technology. According to claim 10,
The human body detection sensor senses at least one of the motion information of the human body, a breathing state, and a heartbeat state. According to claim 11,
The body detection sensor emits electromagnetic waves to receive a reflected signal, determines a maximum signal position based on the intensity of each reflection distance of the signal, and detects the respiration or heartbeat of the human body according to the periodicity of the signal. manufacturing equipment safety operation system. According to claim 12,
The human body detection sensor determines the periodicity by calculating the similarity of the signal according to the autocorrelation of the signal extracted for a predetermined time. A sensing step of sensing the presence or absence of a human body inside a protective cover separating manufacturing equipment from the outside or inside a gas chamber using a human body detection sensor;
a protection step of outputting a warning signal through a warning unit or prohibiting operation of the manufacturing equipment or the gas chamber when the human body is detected in the sensing step; and
an environment sensing step of sensing at least one of temperature, pressure, and gas concentration inside the protective cover or inside the gas chamber using an environment sensor;
Manufacturing equipment safe driving method comprising a. 15. The method of claim 14,
In the sensing step, the human body detection sensor is a sensor based on IR-UWB (Impulse Radio Ultra Wideband) communication technology. According to claim 15,
The human body detection sensor senses respiration or heart rate information of the human body, and when it is determined that an abnormality of the human body has occurred,
In the protection step, a warning signal is output or notified to an integrated control unit that centrally controls the manufacturing equipment or the gas chamber. 17. The method of claim 16,
The body detection sensor emits electromagnetic waves to receive a reflected signal, determines a maximum signal position based on the intensity of each reflection distance of the signal, and detects the respiration or heartbeat of the human body according to the periodicity of the signal. How to operate manufacturing equipment safely. 18. The method of claim 17,
The human body detection sensor determines the periodicity by calculating the similarity of the signal according to the autocorrelation of the signal extracted for a predetermined time. delete 15. The method of claim 14,
According to the sensing result of the environment sensing step, the protection step prohibits entry into the inside of the protective cover or the inside of the gas chamber. 15. The method of claim 14,
In the sensing step, when the presence of a human body is detected and the sensing result in the environment sensing step is determined to be harmful to the human body, in the protection step, the integrated control unit that centrally controls the manufacturing equipment or the gas chamber is notified. Manufacturing equipment safety operation method characterized by.

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