KR102525096B1 - High sensitive Gas Sensor System - Google Patents

Abstract

The present invention a highly sensitive gas sensor system. More specifically, the highly sensitive gas sensor system improves detection sensitivity by allowing an infrared ray generated from a light source to have a wavelength spectrum corresponding to an intrinsic absorption spectrum of target gas. The present invention relates to the highly sensitive gas sensor system which comprises: a waveform generator generating a waveform; a power generator generating a power source having periodicity according to output of the waveform generator; the light source generating the infrared ray of which wavelength is varied by the power source; a measurement chamber; a light reception sensor module; a control module; an optical module; and a visible light generator generating visible light.

Description

High sensitive gas sensor system {High sensitive Gas Sensor System}

The present invention relates to a high-sensitivity gas sensor system, and more particularly, to a high-sensitivity gas sensor system in which infrared light generated from a light source has a wavelength spectrum corresponding to a specific absorption spectrum of a target gas to improve detection sensitivity.

As interest in environmental pollution continues to continue, gas sensor technology for measuring gas containing environmental pollutants is being actively developed. In particular, gas sensor technology using a light source operating in the infrared to mid-infrared wavelength range is one of the technologies that is attracting attention because it can detect a target gas in real time and remotely and is relatively reliable in qualitative and quantitative terms.

Patent Documents 1 and 2 disclose a technique of detecting a gas by irradiating a light source having a wavelength value in the mid-infrared region and comparing a spectrum absorbed by the gas. This corresponds to the most common gas sensing technology. Furthermore, as disclosed in Patent Documents 3 and 4, a technique for quickly detecting several gases at once by setting different wavelength values of several light sources is also being developed. Recently, as shown in Patent Documents 5 to 8, active imaging technology has been applied to gas sensing technology. Patent Documents 5 to 8 disclose a technique of imaging a specific area using an infrared camera or mid-infrared sensor and detecting gas based on the obtained image.

However, the conventional technology uses a light source that generates infrared light having a wavelength spectrum that does not exactly match the specific absorption spectrum of the target gas, so detection sensitivity is low and issues regarding accuracy and reliability may still occur. there is a problem with

US Patent Application US16/771265 (System and method for detecting peractic acid and hydrogen peroxide vapor) US registered patent US10,473,550 (Multi-laser gas leakage detector) US registered patent US9,983,126 (Quantum cascade laser (qcl) based gas sensing system and method) US Patent Application US12/917399 (Tunable quantum cascade lasers and photoacoustic detection of trace gases, tnt, tatp and precursors acetone and hydrogen peroxide) US Patent Application US16/572508 (Wavelength band based passive infrared gas imaging) US Patent Application US16/593808 (System and method of sensing for petroleum, oil, and gas leaks using optical detection) US Patent Application US11/962010 (Gas imaging system) US Patent Application US16/754683 (A gas detection system and method)

An object of the present invention is to provide a highly sensitive gas sensor system that improves detection sensitivity by allowing infrared light generated from a light source to have a wavelength spectrum corresponding to a specific absorption spectrum of a target gas.

In order to solve the above problems, an embodiment of the present invention is a highly sensitive gas sensor system, comprising: a waveform generator for generating a waveform having periodicity; a power generator generating power having periodicity according to the output of the waveform generator; a light source generating infrared light having a variable wavelength by the power source; a measurement chamber into which the infrared light irradiated from the light source is introduced and a target gas to be measured is disposed therein; a light receiving sensor module for receiving the infrared light passing through the measuring chamber; and a control module for determining the presence or absence of a specific gas in the gas to be measured based on the sensing result of the light receiving sensor module and the waveform having periodicity of the waveform generator.

In some embodiments of the present invention, the wavelength of the infrared light generated from the light source may be changed while having periodicity by the power source having periodicity.

In some embodiments of the present invention, the high-sensitivity gas sensor system includes a plurality of light sources, and each of the light sources may emit infrared light having a different specific wavelength range for sensing the specific gas.

In some embodiments of the present invention, the light source includes one or more DFB-QCL laser modules that generate infrared light by receiving power having periodicity output from the power generator, and in the one or more DFB-QCL laser modules The wavelength of the generated infrared light may be changed while having periodicity by the power supply having periodicity.

In some embodiments of the present invention, the light source includes one or more DFB-QCL laser modules that generate infrared light by receiving power having periodicity output from the power generator, and each of the one or more DFB-QCL lasers The module may emit infrared light having different specific wavelength ranges for sensing the specific gas.

In some embodiments of the present invention, the high-sensitivity gas sensor system includes at least one mirror and at least one lens for irradiating infrared light emitted from the light source to the measurement chamber between the light source and the measurement chamber. module; and a visible light generator generating visible light, wherein the visible light generated from the visible light generator and the infrared light generated from the light source may be introduced into the measuring chamber through the optical module through the same path.

In some embodiments of the present invention, the measurement chamber may include: a light inlet unit into which the visible light generated from the visible light generator and the infrared light generated from the light source are introduced; and a light output unit through which the visible light and the infrared light introduced from the light input unit passing through the measurement chamber are discharged, wherein the optical module transmits the visible light and the infrared light through the light input unit for the measurement. It can be drawn into the interior of the chamber.

In some embodiments of the present invention, the control module scales the sensing result of the light receiving sensor module with respect to the waveform having periodicity of the waveform generator, and then receives the light in a state in which the measurement target gas is not disposed inside the measurement chamber. The concentration of the specific gas is calculated by calculating a difference between the first sensing result detected through the sensor module and the second sensing result detected through the light receiving sensor module in a state where the measurement target gas is disposed inside the measurement chamber. can do.

In order to solve the above problems, one embodiment of the present invention is a method for sensing a specific gas using a high-sensitivity gas sensor system, wherein the high-sensitivity gas sensor system includes a waveform generator for generating a waveform having periodicity; a power generator generating power having periodicity according to the output of the waveform generator; a light source generating infrared light having a variable wavelength by the power source; a measurement chamber into which the infrared light irradiated from the light source is introduced and a target gas to be measured is disposed therein; a light receiving sensor module for receiving the infrared light passing through the measuring chamber; and a control module, wherein the control module determines whether or not the specific gas is present in the gas to be measured, based on a sensing result of the light receiving sensor module and a waveform having periodicity of the waveform generator. A method of sensing a specific gas using a sensor system is provided.

In order to solve the above problems, an embodiment of the present invention is a method of manufacturing a highly sensitive gas sensor system, comprising: arranging a waveform generator for generating a waveform having periodicity; arranging a power generator that generates power having periodicity according to an output of the waveform generator; arranging a light source that generates infrared light having a variable wavelength by the power source; arranging a measurement chamber into which infrared light irradiated from the light source is introduced and a gas to be measured is disposed therein; arranging a light receiving sensor module for receiving the infrared light passing through the measuring chamber; And based on the sensing result of the light receiving sensor module and the waveform having periodicity of the waveform generator, arranging a control module for determining the presence or absence of a specific gas in the gas to be measured; manufacturing a highly sensitive gas sensor system including provides a way

According to one embodiment of the present invention, as the wavelength of infrared light generated from a light source to which power is applied by a power source having periodicity changes while having periodicity, the wavelength spectrum of infrared light may match the specific absorption spectrum of the target gas. effect can be exerted.

According to an embodiment of the present invention, as the wavelength spectrum of a light source changes while having a periodicity to correspond to the specific absorption spectrum of a target gas, the effect of providing a highly sensitive gas sensor system with improved detection sensitivity, accuracy, and reliability can exert

According to an embodiment of the present invention, by analyzing a specific gas with a highly sensitive gas sensor system using mid-infrared light, an effect of accurately detecting a specific gas at a long distance can be exhibited.

According to one embodiment of the present invention, as the DFB-QCL is used as a light source, the wavelength spectrum of infrared light generated from the light source can be controlled to be adjacent to the specific absorption spectrum of a specific gas.

According to one embodiment of the present invention, as the visible light generator for generating visible light is applied to the high-sensitivity gas sensor system, the path of the infrared light introduced into the measurement chamber through the optical module is aligned in advance to ensure the analysis accuracy of the high-sensitivity gas sensor system. can exert an effect that can improve.

According to an embodiment of the present invention, after scaling the sensing result of the light receiving sensor module and the reference value by the control module, the accuracy of the quantitative analysis value of the highly sensitive gas sensor system is increased by integrating the graph area absorbed by the specific gas. It can exert an effect that can be further improved.

1 schematically shows a high-sensitivity gas sensor system according to an embodiment of the present invention.
2 conceptually illustrates a path of infrared light generated from a light source according to an embodiment of the present invention.
3 conceptually illustrates a path of visible light generated from a visible light generator according to an embodiment of the present invention.
4 schematically shows a measurement chamber according to an embodiment of the present invention.
5 schematically illustrates the wavelength of infrared light generated from a light source according to an embodiment of the present invention.
6 schematically illustrates an embodiment of calculating the concentration of a specific gas using a highly sensitive gas sensor system according to an embodiment of the present invention.
7 schematically illustrates the result of determining the presence or absence of methane gas using a highly sensitive gas sensor system according to an embodiment of the present invention.
8 schematically illustrates the result of determining the presence or absence of ammonia gas using a highly sensitive gas sensor system according to an embodiment of the present invention.

In the following, various embodiments and/or aspects are disclosed with reference now to the drawings. In the following description, for purposes of explanation, numerous specific details are set forth in order to facilitate a general understanding of one or more aspects. However, it will also be appreciated by those skilled in the art that such aspect(s) may be practiced without these specific details. The following description and accompanying drawings describe in detail certain illustrative aspects of one or more aspects. However, these aspects are exemplary and some of the various methods in principle of the various aspects may be used, and the described descriptions are intended to include all such aspects and their equivalents.

Moreover, various aspects and features will be presented by a system that may include a number of devices, components and/or modules, and the like. It should also be noted that various systems may include additional devices, components and/or modules, and/or may not include all of the devices, components, modules, etc. discussed in connection with the figures. It must be understood and recognized.

"Example", "example", "aspect", "exemplary", etc., used herein should not be construed as preferring or advantageous to any aspect or design being described over other aspects or designs. .

In addition, the term “or” is intended to mean an inclusive “or” rather than an exclusive “or”. That is, unless otherwise specified or clear from the context, “X employs A or B” is intended to mean one of the natural inclusive substitutions. That is, X uses A; X uses B; Or, if X uses both A and B, "X uses either A or B" may apply to either of these cases. Also, the term "and/or" as used herein should be understood to refer to and include all possible combinations of one or more of the listed related items.

Also, the terms "comprises" and/or "comprising" mean that the feature and/or element is present, but excludes the presence or addition of one or more other features, elements and/or groups thereof. It should be understood that it does not.

In addition, terms including ordinal numbers, such as first and second, may be used to describe various components, but the components are not limited by the terms. These terms are only used for the purpose of distinguishing one component from another. For example, a first element may be termed a second element, and similarly, a second element may be termed a first element, without departing from the scope of the present invention. The terms and/or include any combination of a plurality of related recited items or any of a plurality of related recited items.

In addition, terms used in this specification are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "include" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

In addition, in the embodiments of the present invention, unless otherwise defined, all terms used herein, including technical or scientific terms, are generally understood by those of ordinary skill in the art to which the present invention belongs. has the same meaning as Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the embodiments of the present invention, an ideal or excessively formal meaning not be interpreted as

Conventionally, the presence or absence of a specific gas is detected or the concentration is detected using a light source 300 having a wavelength spectrum in the infrared region. However, since this method detects a gas in a state where the wavelength spectrum of the light source 300 does not match the specific absorption spectrum of the specific gas, detection sensitivity is low and reliability may be deteriorated.

In order to solve this problem, the present invention uses a light source 300 that generates infrared light having a specific wavelength range for sensing a specific gas, and the wavelength spectrum of the infrared light generated from the light source 300 is changed with periodicity. A high-sensitivity gas sensor system 1 was implemented that allows the wavelength spectrum of the infrared light to accurately match the specific absorption spectrum of the specific gas by applying power with periodicity so that Infrared light according to an embodiment of the present invention may include a wavelength range of 2.5 to 1000 um.

Hereinafter, the high-sensitivity gas sensor system 1 with improved detection sensitivity compared to the prior art will be described in detail.

1 schematically shows a high-sensitivity gas sensor system 1 according to an embodiment of the present invention.

A high-sensitivity gas sensor system (1) according to an embodiment of the present invention, comprising: a waveform generator (100) for generating a waveform having periodicity; a power generator 200 generating power having periodicity according to an output of the waveform generator 100; A light source 300 generating infrared light having a variable wavelength by the power supply; a measurement chamber 400 into which the infrared light irradiated from the light source 300 is introduced and a gas to be measured is disposed therein; a light receiving sensor module 500 for receiving the infrared light passing through the measurement chamber 400; and a control module 600 that determines whether a specific gas is present in the gas to be measured based on a sensing result of the light receiving sensor module 500 and a waveform having periodicity of the waveform generator 100. .

The waveform generator 100, in one embodiment of the present invention, can generate a waveform having periodicity.

The waveform generator 100 is a kind of electronic test equipment, and may correspond to a device for generating a waveform that is an electronic signal. The waveform may include one of a sine wave, a square wave, a triangle wave, and a sawtooth wave. In one embodiment of the present invention, the waveform having periodicity that can be generated by the waveform generator 100 may include a sine wave.

The power generator 200, in one embodiment of the present invention, can generate power having periodicity according to the output of the waveform generator 100.

As shown in FIG. 1 , the power generator 200 may be disposed on one side of the waveform generator 100 and connected to the waveform generator 100 . When the waveform generator 100 generates a waveform having the periodicity in a state in which the power generator 200 is connected to the waveform generator 100, the power generator 200 is configured by the waveform generator 100. A power source corresponding to the generated waveform having periodicity may be generated.

In one embodiment of the present invention, the power having periodicity generated by the power generator 200 may include a sine wave according to the output of the waveform generator 100 . In this case, the waveform having the periodicity generated by the waveform generator 100 preferably has a sine wave.

In one embodiment of the present invention, the light source 300 may generate infrared light whose wavelength is varied by the power source. As shown in FIG. 1 , the light source 300 may be disposed on one side of the power generator 200 and connected to the power generator 200 . When the power generator 200 generates power having the periodicity while the light source 300 is connected to the power generator 200, the light source 300 generates power generated by the power generator 200. A wavelength may be changed by the waveform having periodicity.

More specifically, when the power generator 200 generates power having the periodicity in a state in which the light source 300 and the power generator 200 are connected to each other, the light source 300 generates power having the periodicity. temperature can change. The wavelength of the infrared light generated from the light source 300 may change depending on the temperature of the light source 300 being changed. The change in the wavelength of the infrared light may correspond to the change in the position of the wavelength spectrum of the infrared light.

Preferably, the wavelength of the infrared light generated from the light source 300 can be changed while having periodicity by the power supply having periodicity. Alternatively, as the temperature of the light source 300 is changed by the power source having periodicity, the wavelength of infrared light generated from the light source 300 may change while having periodicity.

For example, when the power generator 200 generates power having a periodicity including a sine wave, the light source 300 changes the temperature by the power having a periodicity including the sine wave, so that the wavelength spectrum The position of may change. When the waveform of the power source rises toward the first peak, the temperature of the light source 300 rises and the position of the wavelength spectrum of infrared light generated by the light source 300 shifts to the right. In addition, when the waveform of the power source descends toward the second peak, the temperature of the light source 300 decreases and the position of the wavelength spectrum of the infrared light generated by the light source 300 may move to the left. In one embodiment of the present invention, when the temperature of the light source 300 changes by 1 ° C, the position of the wavelength of the infrared light generated from the light source 300 may move by 0.1 to 1 nm based on the center wavelength value, , preferably 0.5 nm.

Also, as described above, the high-sensitivity gas sensor system 1 may use the light source 300 that generates infrared light having a specific wavelength range for sensing a specific gas.

In one embodiment of the present invention, the high-sensitivity gas sensor system 1 includes a plurality of light sources 300, and each of the light sources 300 has an infrared ray having a different specific wavelength range for sensing the specific gas. light can be irradiated. The plurality of light sources 300 may include a first light source 310 and a second light source 320 . More specifically, it is preferable that the specific gas is a plurality of specific gases, and the number of the plurality of specific gases corresponds to the number of the plurality of light sources 300 . In addition, each of the plurality of specific gases has a different specific absorption spectrum according to the type of gas, and the plurality of light sources 300 have infrared rays having a specific wavelength range corresponding to the specific absorption spectrum of each of the plurality of specific gases. may be irradiated, respectively, and the plurality of light sources 300 may irradiate infrared light having different specific wavelength ranges according to the specific absorption spectrum of each of the plurality of specific gases. At this time, each of the plurality of light sources 300 is preferably connected to the power generator 200 individually.

In addition, the light source 300 according to an embodiment of the present invention may include one or more DFB-QCL laser modules that generate infrared light by receiving power having periodicity output from the power generator 200. . In this case, the wavelength of the infrared light generated from the one or more DFB-QCL laser modules can be changed while having periodicity by the power supply having the periodicity, and each of the one or more DFB-QCL laser modules emits the specific gas. Infrared light having different specific wavelength ranges for sensing may be irradiated.

The DFB-QCL laser module may include a distributed feedback-quantum cascade laser (DFB-QCL). The DFB-QCL is a light emitting device that operates in the mid-infrared wavelength region with the best absorption of gas molecules, and can generate mid-infrared light as electrons pass through the quantum well and emit photons, and diffracts in the active region of the laser. A diffractive element including a grating is disposed to selectively emit light when power is applied to the light source 300 . That is, in one embodiment of the present invention, as the DFB-QCL is used as the light source 300, the wavelength spectrum of the infrared light generated from the light source 300 can be controlled to be adjacent to the specific absorption spectrum of a specific gas. .

In one embodiment of the present invention, the one or more DFB-QCL laser module is a first DFB-QCL for irradiating infrared light having a specific wavelength range for sensing methane gas; and a second DFB-QCL irradiating infrared light having a specific wavelength range for sensing ammonia gas. Preferably, the first DFB-QCL has a wavelength range of 7.3 to 8.3 um, which is a wavelength range corresponding to the intrinsic absorption spectrum of methane gas, and the second DFB-QCL is a wavelength range corresponding to the intrinsic absorption spectrum of ammonia gas It may have a wavelength range of 9.8 to 10.8 um. More preferably, the first DFB-QCL may include a wavelength value of 7.8 um, and the second DFB-QCL may include a wavelength value of 10.3 um. In this way, by analyzing a specific gas with the highly sensitive gas sensor system 1 using mid-infrared light, an effect of accurately detecting a specific gas at a long distance can be exhibited.

In the measurement chamber 400, in one embodiment of the present invention, infrared light irradiated from the light source 300 is introduced, and a target gas to be measured may be disposed therein.

The measurement chamber 400 is a gas cell accommodating the gas to be measured including a specific gas therein, and may correspond to a device that allows infrared light irradiated from the light source 300 to be reflected multiple times therein. there is. In one embodiment of the present invention, the measurement chamber 400 may include a 36m Herriott gas cell.

In addition, as shown in FIG. 1, the measurement chamber 400 is disposed on one side and includes a pressure control module 410 for controlling the pressure of the measurement target gas accommodated in the measurement chamber 400. can In one embodiment of the present invention, the pressure control module 410 may include a diaphragm pump.

In addition, the measurement chamber 400 mixes the specific gas and the inert gas to prepare the measurement target gas, and a gas supply module 420 for supplying the measurement target gas into the measurement chamber 400; can include In one embodiment of the present invention, the gas supply module 420 may include a gas mixer, and the inert gas may include nitrogen gas. For example, the gas supply module 420 produces a gas to be measured including nitrogen gas as the inert gas and methane gas or ammonia gas as the specific gas, and the gas to be measured is stored in the measuring chamber 400 ) can be supplied inside.

The light receiving sensor module 500 may receive the infrared light passing through the measurement chamber 400 in one embodiment of the present invention.

In one embodiment of the present invention, the light receiving sensor module 500 may include an infrared detector, and preferably may include a photocurrent detector (Mercury cadmium telluride detector; MCT detector). Due to this, the light receiving sensor module 500 can receive the infrared light from the measuring chamber 400 and detect the signal of the infrared light.

In addition, as shown in FIG. 1 , the light receiving sensor module 500 may be connected to the amplifier module 510 by placing an amplifier module 510 on one side thereof. The amplifier module 510 may correspond to a device that senses and detects or amplifies a specific signal, detects the signal of the infrared light received from the measurement chamber 400 to the light receiving sensor module 500, and if necessary A signal of the infrared light may be amplified. In this case, the light receiving sensor module 500 may detect or amplify the infrared light received from the measurement chamber 400 through the amplifier module 510 and transmit the infrared light to the control module 600 .

The control module 600, in one embodiment of the present invention, based on the sensing result of the light receiving sensor module 500 and the waveform having a periodicity of the waveform generator 100, the control module 600, in the target gas to be measured for a specific gas existence can be determined.

In a state in which the control module 600 is connected to the amplifier module 510 and the measurement target gas does not exist inside the measurement chamber 400, the infrared light generated from the light source 300 is transmitted to the measurement chamber ( 400), the control module 600 may generate a reference graph when light is received by the light receiving sensor module 500. The reference graph corresponds to a graph in which the shape of a waveform based on the waveform having periodicity of the waveform generator 100 is maintained without deformation. In one embodiment of the present invention, the reference graph may be a graph having a sine wave shape.

In addition, in a state where the control module 600 is connected to the amplifier module 510 and a measurement target gas exists inside the measurement chamber 400, the infrared light generated from the light source 300 is transmitted to the measurement chamber 400. When light is received by the light receiving sensor module 500 after passing through 400, the control module 600 may generate a specific gas graph. The specific gas graph corresponds to a graph in which a waveform shape is partially modified due to partial absorption caused by a specific gas included in the measurement target gas disposed inside the measurement chamber 400 . In one embodiment of the present invention, the specific gas graph may be a graph in which a peak occurs in a portion of a sine wave.

That is, the reference graph and the specific gas graph may be respectively detected through the light receiving sensor module 500 according to the presence or absence of the target gas to be measured inside the measurement chamber 400 . The control module 600 may compare the reference graph and the specific gas graph to determine whether a specific gas to be measured exists in the measurement target gas accommodated in the measurement chamber 400 . Additionally, the control module 600 may calculate the concentration of the specific gas, which will be described in detail through drawings to be described later.

Meanwhile, in the high-sensitivity gas sensor system 1 according to an embodiment of the present invention, the infrared light irradiated from the light source 300 is transmitted between the light source 300 and the measurement chamber 400 to the measurement chamber 400. ) An optical module 800 including one or more mirrors and one or more lenses for irradiation; and a visible light generator 700 generating visible light 710.

In one embodiment of the present invention, the optical module 800 may be disposed between the light source 300 and the measurement chamber 400, and the infrared light generated from the light source 300 is transmitted to the measurement chamber 400. ), it is possible to change the path of the infrared light to irradiate. Preferably, in the optical module 800, the infrared light generated from the light source 300 is irradiated to the measurement chamber 400 and the infrared light passing through the measurement chamber 400 is transmitted to the light receiving sensor module 500. It is possible to adjust the path of the infrared light so that it can be irradiated with. As shown in FIG. 1, the optical module 800 may include 6 mirrors and 2 lenses, but the scale of the high-sensitivity gas sensor system 1 and the arrangement in the high-sensitivity gas sensor system 1 Depending on factors including the number of the light sources 300 and the like, a plurality of combinations that can be combined using the one or more mirrors and the one or more lenses may be configured. By the optical module 800 as described above, the infrared light irradiated from the light source 300 can be introduced into the measurement chamber 400, and the infrared light passing through the measurement chamber 400 is transmitted to the light receiving sensor module. (500).

The visible light generator 700 may generate visible light 710 in one embodiment of the present invention.

In order for the infrared light generated from the light source 300 to be irradiated to the measurement chamber 400 and the infrared light that has passed through the measurement chamber 400 to be irradiated to the light receiving sensor module 500, the path of the infrared light must be precisely determined. Adjustment and alignment is important. However, since the infrared light includes a wavelength spectrum that is not included in the wavelength range of visible light that can be seen by the human eye, it may be difficult for a worker to align the path of the infrared light. Nevertheless, it is preferable that the operator align the path of the infrared light generated by the light source 300 in advance before operating the high-sensitivity gas sensor system 1 using the light source 300 .

In the present invention, visible light 710 is generated using a visible light generator 700, and the optical module 800 is aligned so that the infrared light passes through a path corresponding to the path through which the infrared light passes, thereby aligning the path of the infrared light in advance. made it possible As shown in FIG. 1 , the visible light generator 700 may be disposed adjacent to the light source 300 . The visible light generator 700 can introduce the visible light 710 generated by the visible light generator 700 into the measurement chamber 400 by the optical module 800, and the measurement chamber 400 The visible light 710 passing through may be received by the light receiving sensor module 500 .

Preferably, the visible light 710 generated from the visible light generator 700 and the infrared light generated from the light source 300 follow the same path through the optical module 800 according to an embodiment of the present invention. It may be drawn into the measurement chamber 400 . In this way, as the visible light generator 700 generating visible light is applied to the high-sensitivity gas sensor system 1, the position of the optical module 800 can be more accurately calibrated, and the light source 300 It is possible to achieve an effect of improving analysis accuracy of the high-sensitivity gas sensor system 1 by aligning the path of the generated infrared light in advance.

On the other hand, the high-sensitivity gas sensor system 1 measures the temperature of the light source 300, and the cooling device 900 for cooling the light source 300 when the temperature of the light source 300 is above a predetermined temperature range ; may be further included.

As described above, as the temperature of the light source 300 is changed by the power supply having periodicity, the wavelength of infrared light generated from the light source 300 may change while having periodicity.

When the power having the periodicity is applied to the light source 300 for a predetermined time or more, the temperature of the light source 300 may rise above a predetermined temperature range. When the temperature of the light source 300 rises above the predetermined temperature range, the infrared light generated from the light source 300 becomes relatively unstable, and the reproducibility of gas detection using the high-sensitivity gas sensor system 1 is reduced. It can be. In order to prevent this, in one embodiment of the present invention, by connecting the cooling device 900 to the light source 300, the temperature of the light source 300 is measured using the cooling device 900 and the light source When the temperature of 300 is measured above a predetermined temperature range, the light source 300 may be cooled to ensure wavelength stability of the infrared light generated from the light source 300 . In one embodiment of the present invention, the cooling device 900 may include a TEC controller (Thermo Electric Cooler Controller).

That is, by such a structure, the high-sensitivity gas sensor system 1 uses a light source 300 that generates infrared light having a specific wavelength range for sensing a specific gas, and the infrared rays generated by the light source 300 are used. By applying power with periodicity to the light source 300 so that the wavelength spectrum of light can be changed with periodicity, the wavelength spectrum of the infrared light generated from the light source 300 exactly matches the specific absorption spectrum of the specific gas. can be implemented to

In this way, as the wavelength spectrum of the light source 300 changes while having a periodicity to correspond to the specific absorption spectrum of the target gas, a highly sensitive gas sensor system 1 with improved detection sensitivity, accuracy, and reliability can be provided can be effective.

2 conceptually illustrates a path of infrared light generated from a light source 300 according to an embodiment of the present invention.

As described above, the infrared light emitted from the light source 300 is irradiated into the measurement chamber 400 through the optical module 800 disposed between the light source 300 and the measurement chamber 400, After passing through the measurement chamber 400, the light may be irradiated to the light receiving sensor module 500.

The highly sensitive gas sensor system 1 according to an embodiment of the present invention shown in FIG. 2 corresponds to an embodiment including a plurality of light sources 300 .

As shown in FIG. 2 , when the first infrared light 311 is generated from the first light source 310 among the plurality of light sources 300, the first infrared light 311 is applied to the first mirror ( 810), rotated 90 degrees by the first mirror 810, and irradiated to the second mirror 820 disposed below the first mirror 810, and by the second mirror 820 The third mirror 830 and the fourth mirror 840 are continuously arranged on one side of the second mirror 820 by rotating 90 degrees, and the fourth mirror 840 rotates 90 degrees to irradiate the light. Irradiated to the fifth mirror 860 disposed above the fourth mirror 840, and focused by the first lens 850 disposed between the fourth mirror 840 and the fifth mirror 860 In this state, it is rotated 90 degrees by the fifth mirror 860 and introduced into the measuring chamber 400 disposed on one side of the fifth mirror 860, and after passing the measuring chamber 400, the measuring chamber ( 400) and the light receiving sensor module 500, the light can be received by the light receiving sensor module 500 in a condensed state by the second lens 870.

At the same time, when the second infrared light 321 is generated from the second light source 320 among the plurality of light sources 300, the second infrared light 321 is irradiated to the second mirror 820, Light may be received by the light receiving sensor module 500 through a path corresponding to the path of the first infrared light 311 . At this time, the second mirror 820 may serve as a laser combiner combining the first infrared light 311 and the second infrared light 321 .

That is, when the high-sensitivity gas sensor system 1 arranges a plurality of light sources 300 as shown in FIG. 2, the plurality of light sources 300 each have a plurality of infrared rays having different specific wavelength ranges. can be generated to detect several types of gas at once. However, it is not limited thereto, and the high-sensitivity gas sensor system 1 may detect one specific gas using one light source 300, and the number of light sources 300 and the optical module ( The number of mirrors and lenses included in 800) may be designed to be variable.

3 conceptually illustrates a path of visible light 710 generated from a visible light generator 700 according to an embodiment of the present invention.

As described above, the visible light 710 generated from the visible light generator 700 and the infrared light generated from the light source 300 are introduced into the measurement chamber 400 through the optical module 800 through the same path. It can be.

As shown in FIG. 3 , when visible light rays 710 are generated by the visible light generator 700, the visible light rays 710 are irradiated to the sixth mirror 880, and the sixth mirror 880 is rotated by 90 degrees and irradiated to the third mirror 830 disposed below the sixth mirror 880, and irradiated to the fourth mirror 840 disposed at one side of the third mirror 830. and is rotated by 90 degrees by the fourth mirror 840 and irradiated to the fifth mirror 860 disposed above the fourth mirror 840, and the fourth mirror 840 and the fifth mirror ( 860), the measuring chamber 400 arranged on one side of the fifth mirror 860 rotated by 90 degrees by the fifth mirror 860 in a state of condensing by the first lens 850 disposed between the , and after passing through the measuring chamber 400, the light receiving sensor module 500 in a state in which the light is collected by the second lens 870 disposed between the measuring chamber 400 and the light receiving sensor module 500. ) can be received. That is, the visible light 710 is introduced into the measurement chamber 400 through the same path as the infrared light generated by the light source 300 through the optical module 800 and received by the light receiving sensor module 500. It can be.

In one embodiment of the present invention, the visible light generator 700 and the light source 300 may operate simultaneously, and the visible light 710 generated by the visible light generator 700 and the light source 300 Infrared light may be introduced into the measurement chamber 400 at the same time. At this time, the fourth mirror 840 is a laser combiner for combining at least one of the visible light 710, the first infrared light 311, and the second infrared light 321. can play a role

That is, as the visible light generator 700 generating visible light is applied to the high-sensitivity gas sensor system 1, the path of the infrared light entering the measurement chamber 400 through the optical module 800 is aligned in advance to An effect capable of improving the analysis accuracy of the high-sensitivity gas sensor system 1 can be exerted.

4 schematically shows a measurement chamber 400 according to an embodiment of the present invention.

The measuring chamber 400 according to an embodiment of the present invention includes a light inlet portion 401 into which visible light 710 generated from the visible light generator 700 and infrared light generated from the light source 300 are introduced; and a light output unit 402 through which the visible light 710 and the infrared light introduced from the light input unit 401 passing through the measurement chamber 400 are discharged, and by the optical module 800 The visible light 710 and the infrared light may be introduced into the measurement chamber 400 through the light inlet 401 .

As described above, the visible light 710 generated from the visible light generator 700 and the infrared light generated from the light source 300 are introduced into the measurement chamber 400 through the optical module 800 through the same path. It can be.

That is, the infrared light and the visible light 710 pass through the optical module 800 to the inside of the measurement chamber 400 through the light inlet 401 provided in the measurement chamber 400 along the same path. The infrared light and the visible light 710 that can be introduced and passed through the measurement chamber 400 pass through the light discharge unit 402 provided in the measurement chamber 400 to the outside of the measurement chamber 400. and may be received by the light receiving sensor module 500. In one embodiment of the present invention, the infrared light and the visible light 710 discharged to the outside of the measurement chamber 400 pass through the optical module 800 and may be received by the light receiving sensor module 500. .

In addition, as shown in FIG. 4, the measurement chamber 400 includes a first port 403 disposed on one side; and a second port 404 disposed adjacent to the first port 403. In one embodiment of the present invention, the first port 403 corresponds to a port through which the measurement chamber 400 and the pressure control module 410 are connected to each other, and the second port 404 corresponds to the measurement chamber 400. The chamber 400 may correspond to the gas supply module 420 and a port connectable to each other.

5 schematically illustrates the wavelength of infrared light generated from the light source 300 according to an embodiment of the present invention.

As described above, the high-sensitivity gas sensor system 1 according to an embodiment of the present invention uses a light source 300 that generates infrared light having a specific wavelength range for sensing a specific gas, and the light source 300 ) Apply power having periodicity to the light source 300 so that the wavelength spectrum of infrared light generated from the light source 300 can be changed while having periodicity, so that the wavelength spectrum of the infrared light generated from the light source 300 is unique to the specific gas. It can be precisely matched to the absorption spectrum.

FIG. 5(a) schematically shows a specific absorption spectrum of methane gas and a spectrum of infrared light having a specific wavelength range for sensing methane gas. As shown in Figure 5 (a), methane gas has a relatively strong absorption spectrum at a wave number of about 1280 cm ^-1 (corresponding to a wavelength of 7.8125 um).

At this time, the high-sensitivity gas sensor system 1 applies power having periodicity to the light source 300 for irradiating infrared light having a specific wavelength range for sensing the methane gas, and the light source 300 generates the The wavelength spectrum of infrared light can be accurately matched to the specific absorption spectrum of the methane gas. In one embodiment of the present invention, the light source 300 emitting infrared light having a specific wavelength range for sensing the methane gas may correspond to a first DFB-QCL having a wavelength range of 7.3 to 8.3 um.

5(b) schematically shows a specific absorption spectrum of ammonia gas and a spectrum of infrared light having a specific wavelength range for sensing ammonia gas. As shown in FIG. 5 (b), ammonia gas has a relatively strong absorption spectrum at a wave number of about 968 cm ^-1 (corresponding to a wavelength of 10.3306 um).

At this time, the high-sensitivity gas sensor system 1 applies power having a periodicity to the light source 300 that irradiates infrared light having a specific wavelength range for sensing the ammonia gas, and the The wavelength spectrum of infrared light can be precisely matched to the specific absorption spectrum of the ammonia gas. In one embodiment of the present invention, the light source 300 emitting infrared light having a specific wavelength range for sensing the ammonia gas may correspond to a second DFB-QCL having a wavelength range of 9.8 to 10.8 um.

As such, in the high-sensitivity gas sensor system 1 according to an embodiment of the present invention, the wavelength of infrared light generated from the light source 300 to which the power is applied is changed while having periodicity by the power having periodicity. , It is possible to exert the effect of allowing the wavelength spectrum of the infrared light to match the specific absorption spectrum of the target gas.

6 schematically illustrates an embodiment in which the concentration of a specific gas is calculated using the high-sensitivity gas sensor system 1 according to an embodiment of the present invention.

After the control module 600 according to an embodiment of the present invention scales the sensing result of the light receiving sensor module 500 with respect to the waveform having periodicity of the waveform generator 100, the inside of the measuring chamber 400 The first sensing result detected through the light receiving sensor module 500 in a state in which the target gas to be measured is not disposed and the light receiving sensor module 500 in a state in which the target gas is disposed in the measurement chamber 400 The concentration of the specific gas may be calculated by calculating a difference value between the second sensing results detected through the sensor.

6(a) is a graph of the change in laser intensity with time derived by the control module 600 based on the sensing result of the light receiving sensor module 500 and the waveform having periodicity of the waveform generator 100. show schematically.

The solid line shown in FIG. 6 (a) indicates that infrared light generated from the light source 300 passes through the measurement chamber 400 in a state in which a target gas to be measured does not exist inside the measurement chamber 400 and receives the light. Corresponds to the first sensing result detected by the sensor module 500, that is, the reference graph, and the dotted line indicates the infrared light generated from the light source 300 in a state in which the measurement target gas exists inside the measurement chamber 400. This may correspond to the second sensing result detected by the light receiving sensor module 500 through the measurement chamber 400, that is, a specific gas graph. The specific gas graph may correspond to a graph in which a waveform shape is partially modified due to partial absorption by a specific gas included in the measurement target gas disposed inside the measurement chamber 400 .

The light source 300 preferably generates infrared light having a specific wavelength range for sensing the specific gas. That is, when a peak occurs in a part of the graph as in the specific gas graph shown in FIG. 6 (a), the control module 600 may determine that the specific gas is included in the measurement target gas. .

Preferably, a method of sensing a specific gas using a high-sensitivity gas sensor system (1), wherein the high-sensitivity gas sensor system (1) includes a waveform generator (100) for generating a waveform having periodicity; a power generator 200 generating power having periodicity according to an output of the waveform generator 100; A light source 300 generating infrared light having a variable wavelength by the power supply; a measurement chamber 400 into which the infrared light irradiated from the light source 300 is introduced and a gas to be measured is disposed therein; a light receiving sensor module 500 for receiving the infrared light passing through the measurement chamber 400; and a control module 600, and by the control module 600, based on the sensing result of the light receiving sensor module 500 and the waveform having periodicity of the waveform generator 100, the target gas to be measured It is possible to determine the presence or absence of the specific gas. At this time, the control module 600 scales the sensing result of the light receiving sensor module 500 with respect to the waveform having periodicity of the waveform generator 100, and then arranges the measurement target gas inside the measurement chamber 400. The first sensing result detected through the light-receiving sensor module 500 in a state in which it is not detected and the second sensing result detected through the light-receiving sensor module 500 in a state in which the target gas to be measured is disposed inside the measurement chamber 400 The concentration of the specific gas can be calculated by calculating the difference between the results.

Meanwhile, as described above, the control module 600 may additionally calculate the concentration of the specific gas.

In this case, the control module 600 may scale the graph of FIG. 6(a) as shown in FIG. 6(b) in order to calculate the concentration of the specific gas included in the measurement target gas. In one embodiment of the present invention, the control module 600 may scale the reference graph and the specific gas graph to have values corresponding to each other, except for a region where a peak is generated due to absorption of a portion of the infrared light.

Thereafter, the control module 600 may calculate a difference value between the reference graph and the specific gas graph based on the scaled graph. More specifically, as shown in FIG. 6(c) , the control module 600 derives a region where a peak is generated as a part of the infrared light is absorbed by the specific gas, and integrates the region to obtain the The concentration of a specific gas can be calculated.

As such, in one embodiment of the present invention, the high-sensitivity gas sensor system 1 scales the sensing result and reference value of the light receiving sensor module 500 by the control module 600, and then detects the gas absorbed by a specific gas. By integrating the graph area, an effect of further improving the accuracy of the quantitative analysis value of the high-sensitivity gas sensor system 1 can be exhibited.

At this time, the reference value is, in one embodiment of the present invention, as a result of the light receiving sensor module 500 sensing the intensity of infrared light in a state in which a light source having periodicity has passed through the measuring chamber 400 without a specific gas, the specific gas Since there is no absorption of infrared light, it may correspond to a graph in which the shape of a sine wave is maintained as it is.

7 schematically illustrates the result of determining the presence or absence of methane gas using the highly sensitive gas sensor system 1 according to an embodiment of the present invention.

Figure 7 (a) schematically shows the result of determining the presence or absence of methane gas using the high-sensitivity gas sensor system (1). The black line shown in FIG. 7 (a) indicates that the infrared light generated from the light source 300 passes through the measurement chamber 400 in a state where no target gas exists inside the measurement chamber 400. The first sensing result detected by the light receiving sensor module 500, that is, corresponds to the reference graph, and the red line corresponds to the light source in a state in which a measurement target gas containing methane gas exists inside the measurement chamber 400 The infrared light generated from 300 may pass through the measuring chamber 400 and correspond to a second sensing result detected by the light receiving sensor module 500, that is, a specific gas graph. The specific gas graph may correspond to a graph in which a waveform shape is partially modified due to partial absorption by methane gas included in the measurement target gas disposed inside the measurement chamber 400 . The light source 300 preferably generates infrared light having a wavelength range of 7.3 to 8.3 um in order to sense the methane gas.

In one embodiment of the present invention, as the high-sensitivity gas sensor system 1 derives a graph as shown in FIG. 7 (a) by the control module 600, the measurement target accommodated in the measurement chamber 400 The methane gas contained in the gas may be detected.

7(b) schematically shows the concentration of the methane gas calculated based on the difference between the reference graph and the target gas graph partially absorbed by the methane gas included in the measurement target gas; do. FIG. 7(c) schematically shows the average value of the laser intensity according to the methane gas concentration based on FIG. 7(b).

In this way, the highly sensitive gas sensor system 1 according to an embodiment of the present invention may not only determine the presence or absence of a target gas, but also calculate and provide the concentration of the target gas in various ways.

8 schematically illustrates the result of determining the presence or absence of ammonia gas using the highly sensitive gas sensor system 1 according to an embodiment of the present invention.

Figure 8 (a) schematically shows the result of determining the presence or absence of ammonia gas using the high-sensitivity gas sensor system (1). The black line shown in FIG. 8(a) indicates that the infrared light generated from the light source 300 passes through the measurement chamber 400 in a state in which the measurement target gas does not exist inside the measurement chamber 400. The first sensing result detected by the light receiving sensor module 500, that is, corresponds to the reference graph, and the red line indicates the presence of a gas to be measured including ammonia gas inside the measuring chamber 400, the light source The infrared light generated from 300 may pass through the measuring chamber 400 and correspond to a second sensing result detected by the light receiving sensor module 500, that is, a specific gas graph. The specific gas graph may correspond to a graph in which a waveform shape is partially modified due to partial absorption by ammonia gas included in the measurement target gas disposed inside the measurement chamber 400 . The light source 300 preferably generates infrared light having a wavelength range of 9.8 to 10.8 um in order to sense the ammonia gas.

In one embodiment of the present invention, as the high-sensitivity gas sensor system 1 derives a graph as shown in FIG. 8 (a) by the control module 600, the measurement target accommodated in the measurement chamber 400 The ammonia gas contained in the gas can be detected.

8(b) schematically shows the concentration of the ammonia gas calculated based on the difference between the reference graph and the target gas graph partially absorbed by the ammonia gas included in the measurement target gas. do. FIG. 8(c) schematically shows an average value of laser intensity according to the ammonia gas concentration based on FIG. 8(b).

In this way, the highly sensitive gas sensor system 1 according to an embodiment of the present invention may not only determine the presence or absence of a target gas, but also calculate and provide the concentration of the target gas in various ways.

The high-sensitivity gas sensor system 1 can be manufactured by the following steps.

1) arranging a waveform generator 100 that generates a waveform having periodicity;

2) arranging a power generator 200 that generates power having periodicity according to the output of the waveform generator 100;

3) arranging a light source 300 generating infrared light whose wavelength is varied by the power source;

4) arranging a measurement chamber 400 into which the infrared light irradiated from the light source 300 is introduced and a gas to be measured is disposed therein;

5) arranging a light receiving sensor module 500 that receives the infrared light passing through the measuring chamber 400; and

6) arranging a control module 600 for determining whether a specific gas is present in the gas to be measured based on the sensing result of the light receiving sensor module 500 and the waveform having periodicity of the waveform generator 100;

The high-sensitivity gas sensor system 1 implemented by the above steps applies power having periodicity generated by a waveform having periodicity to the light source 300 to specify the wavelength spectrum of infrared light generated from the light source 300. By accurately matching the specific absorption spectrum of the gas to determine the presence or absence of the specific gas in the target gas to be measured, and calculating the concentration of the specific gas by comparing it with a reference value when the specific gas exists, the detection sensitivity compared to the prior art is increased. can improve

According to one embodiment of the present invention, as the wavelength of infrared light generated from a light source to which power is applied by a power source having periodicity changes while having periodicity, the wavelength spectrum of infrared light may match the specific absorption spectrum of the target gas. effect can be exerted.

According to an embodiment of the present invention, as the wavelength spectrum of a light source changes while having a periodicity to correspond to the specific absorption spectrum of a target gas, the effect of providing a highly sensitive gas sensor system with improved detection sensitivity, accuracy, and reliability can exert

According to an embodiment of the present invention, by analyzing a specific gas with a highly sensitive gas sensor system using mid-infrared light, an effect of accurately detecting a specific gas at a long distance can be exhibited.

According to one embodiment of the present invention, as the DFB-QCL is used as a light source, the wavelength spectrum of infrared light generated from the light source can be controlled to be adjacent to the specific absorption spectrum of a specific gas.

According to one embodiment of the present invention, as the visible light generator for generating visible light is applied to the high-sensitivity gas sensor system, the path of the infrared light introduced into the measurement chamber through the optical module is aligned in advance to ensure the analysis accuracy of the high-sensitivity gas sensor system. can exert an effect that can improve.

According to an embodiment of the present invention, after scaling the sensing result of the light receiving sensor module and the reference value by the control module, the accuracy of the quantitative analysis value of the highly sensitive gas sensor system is increased by integrating the graph area absorbed by the specific gas. It can exert an effect that can be further improved.

As described above, although the embodiments have been described with limited examples and drawings, those skilled in the art can make various modifications and variations from the above description. For example, the described techniques may be performed in an order different from the method described, and/or components of the described system, structure, device, circuit, etc. may be combined or combined in a different form than the method described, or other components may be used. Or even if it is replaced or substituted by an equivalent, appropriate results can be achieved. Therefore, other implementations, other embodiments, and equivalents of the claims are within the scope of the following claims.

1: High-sensitivity gas sensor system
100: waveform generator 200: power generator
300: light source
310: first light source 311: first infrared light
320: second light source 321: second infrared light
400: measuring chamber
401: light inlet 402: light outlet
403: first port 404: second port
410: pressure control module 420: gas supply module
500: light receiving sensor module 510: amplifier module
600: control module
700: visible light generator 710: visible light
800: optical module
810: first mirror 820: second mirror
830: third mirror 840: fourth mirror
850: first lens 860: fifth mirror
870: second lens 880: sixth mirror
900: cooling device

Claims (10)

As a highly sensitive gas sensor system,
a waveform generator for generating a waveform having periodicity;
a power generator generating power having periodicity according to the output of the waveform generator;
a light source generating infrared light having a variable wavelength by the power source;
a measurement chamber into which the infrared light irradiated from the light source is introduced and a target gas to be measured is disposed therein;
a light receiving sensor module for receiving the infrared light passing through the measuring chamber;
a control module for determining the presence or absence of a specific gas in the gas to be measured, based on a sensing result of the light receiving sensor module and a waveform having periodicity of the waveform generator;
an optical module including one or more mirrors and one or more lenses between the light source and the measurement chamber for irradiating the infrared light emitted from the light source to the measurement chamber; and
Including; a visible light generator for generating visible light;
The visible light generated from the visible light generator and the infrared light generated from the light source are introduced into the measurement chamber through the same path through the optical module.
The method of claim 1,
The infrared light generated from the light source is a high-sensitivity gas sensor system in which the wavelength changes while having periodicity by the power source having periodicity.
The method of claim 1,
The high-sensitivity gas sensor system includes a plurality of light sources,
Each of the light sources irradiates infrared light having a different specific wavelength range for sensing the specific gas, a highly sensitive gas sensor system.
The method of claim 1,
The light source includes one or more DFB-QCL laser modules that generate infrared light by receiving power having periodicity output from the power generator,
The infrared light generated from the one or more DFB-QCL laser modules has a wavelength that is changed while having periodicity by the power supply having periodicity, a highly sensitive gas sensor system.
The method of claim 1,
The light source includes one or more DFB-QCL laser modules that generate infrared light by receiving power having periodicity output from the power generator,
Each of the at least one DFB-QCL laser module irradiates infrared light having a different specific wavelength range for sensing the specific gas, a highly sensitive gas sensor system.
delete The method of claim 1,
The measuring chamber,
a light input unit through which the visible light generated from the visible light generator and the infrared light generated from the light source are introduced; and
A light discharge unit through which the visible light and the infrared light introduced from the light input unit past the measurement chamber are discharged;
The high-sensitivity gas sensor system, wherein the visible light and the infrared light are introduced into the measurement chamber through the light inlet by the optical module.
The method of claim 1,
After the control module scales the sensing result of the light receiving sensor module with respect to the waveform having the periodicity of the waveform generator, the first detected through the light receiving sensor module in a state in which the target gas to be measured is not disposed inside the measurement chamber. A high-sensitivity gas sensor system that calculates the concentration of the specific gas by calculating a difference between the sensing result and the second sensing result detected through the light receiving sensor module in a state in which the measurement target gas is disposed inside the measurement chamber.
As a method of sensing a specific gas using a high-sensitivity gas sensor system,
The high-sensitivity gas sensor system includes a waveform generator for generating a waveform having periodicity; a power generator generating power having periodicity according to the output of the waveform generator; a light source generating infrared light having a variable wavelength by the power source; a measurement chamber into which the infrared light irradiated from the light source is introduced and a target gas to be measured is disposed therein; a light receiving sensor module for receiving the infrared light passing through the measuring chamber; and a control module;
By the control module, based on the sensing result of the light receiving sensor module and the waveform having periodicity of the waveform generator, it is determined whether or not the specific gas is present in the gas to be measured;
The high-sensitivity gas sensor system,
an optical module including one or more mirrors and one or more lenses between the light source and the measurement chamber for irradiating the infrared light emitted from the light source to the measurement chamber; and
A visible light generator for generating visible light; further comprising,
The method of sensing a specific gas using a highly sensitive gas sensor system, wherein the visible light generated from the visible light generator and the infrared light generated from the light source are introduced into the measurement chamber through the same path through the optical module.
As a method of manufacturing a high-sensitivity gas sensor system,
arranging a waveform generator that generates a waveform having periodicity;
arranging a power generator that generates power having periodicity according to an output of the waveform generator;
arranging a light source that generates infrared light having a variable wavelength by the power source;
arranging a measurement chamber into which infrared light irradiated from the light source is introduced and a gas to be measured is disposed therein;
arranging a light receiving sensor module for receiving the infrared light passing through the measuring chamber;
arranging a control module for determining whether or not a specific gas is present in the gas to be measured, based on a sensing result of the light receiving sensor module and a waveform having periodicity of the waveform generator;
disposing an optical module including one or more mirrors and one or more lenses for irradiating infrared light emitted from the light source to the measurement chamber between the light source and the measurement chamber; and
arranging a visible light generator that generates visible light;
The method of manufacturing a highly sensitive gas sensor system, wherein the visible light generated from the visible light generator and the infrared light generated from the light source are introduced into the measurement chamber through the same path through the optical module.

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