KR102499321B1 - Valve structure for semiconductor vacuum - Google Patents

Abstract

In one embodiment, the present invention provides a first valve plate for closing the first valve opening; a second valve plate for closing the second valve opening; a support plate disposed between the first and second valve plates and connected to and detached from the first and second valve plates; a clamping member fixing the first and second valve plates to the support plate at an upper portion of the support plate; screws interlocking with the clamping member to fix the first and second valve plates to the support plate and fastened to the support plate; a pillar-shaped intermediate member into which the head of the screw is inserted and whose outer surface is inclined at a first angle with respect to the extension direction of the screw; a first guide part for guiding positions of the first and second valve plates under the support plate; and a second guide part that guides the first and second valve plates in cooperation with the first guide part below the first and second valve plates.

Description

Valve structure for semiconductor vacuum {VALVE STRUCTURE FOR SEMICONDUCTOR VACUUM}

The present invention relates to a valve structure for semiconductor vacuum.

A valve capable of closing an opening using a pair of valve plates is known from Patent Document 1.

In a valve with two valve plates, the valve rod is connected. In the open state, the valve rod withdraws to open the opening. In the closed state, the valve rod extends and the valve mechanism rises and is placed between the two openings, and the valve rod moves left and right. It is a structure that seals the opening while moving.

Here, the valve plates are parts that are in direct contact with the opening, and thus are scheduled to be replaced. Therefore, the valve plate is replaced at regular intervals or when sealing is defective. In the case of the structure of Patent Document 1, a structure for fastening a support plate between a valve plate and a valve plate through an inclined surface is disclosed, but this structure has a limitation in that replacement work is inconvenient.

(Patent Document 1) KR 10-1494925 B

The present invention is to overcome the limitations of the prior art, and an object of the present invention is to provide a valve structure for semiconductor vacuums including a clamping member that can be easily replaced and fastened firmly.

The present invention discloses the following valve structure for semiconductor vacuum in order to achieve the above object.

In one embodiment, the present invention provides a first valve plate for closing the first valve opening; a second valve plate for closing the second valve opening; a support plate disposed between the first and second valve plates and connected to and detached from the first and second valve plates; a clamping member fixing the first and second valve plates to the support plate at an upper portion of the support plate; screws interlocking with the clamping member to fix the first and second valve plates to the support plate and fastened to the support plate; a pillar-shaped intermediate member into which the head of the screw is inserted and whose outer surface is inclined at a first angle with respect to the extension direction of the screw; a first guide part for guiding positions of the first and second valve plates under the support plate; and a second guide part for guiding the first and second valve plates in cooperation with the first guide part under the first and second valve plates, wherein the clamping member is configured to insert the intermediate member into the clamping member. an inner groove inclined at the first angle in a shape corresponding to the intermediate member; A first clamping member including an extension part extending in the direction of the first valve plate, an insertion part inserted into a groove formed in the first valve plate, and having a shape corresponding to the intermediate member so that the intermediate member is inserted into the first clamping member. Inner groove inclined at an angle; and a second clamping member including an extension portion extending toward the second valve plate and an insertion portion inserted into a groove formed in the second valve plate, wherein the inner groove of the first or second clamping member is connected to the support plate. As the distance of is increased, the distance from the first or second valve plate is inclined to increase, and the groove faces the first surface relatively close to the support plate and the first surface and is relatively far from the support plate. It includes a second surface, and the groove provides a valve structure for semiconductor vacuum in contact with the insertion part on the first surface when the insertion part is fastened with a screw.

The present invention can provide a valve structure for a semiconductor vacuum including a clamping member capable of being easily replaced and firmly fastened through the above configuration.

1 is a schematic diagram of a state in which an embodiment of a semiconductor vacuum valve according to the present invention is installed.
2 is a perspective view of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
3 is an exploded perspective view of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
4 is a detailed exploded perspective view of a clamping member of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
5 is a front view of a support plate of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
6 is a perspective cross-sectional view of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
7 is a cross-sectional view of a valve structure for semiconductor vacuum according to an embodiment of the present invention.
8 and 9 are partial cross-sectional views of a semiconductor vacuum valve structure according to an embodiment of the present invention. FIG. 8 is a cross-sectional view when the clamping member is fastened, and FIG. 9 is a cross-sectional view when the clamping member is released.

Hereinafter, preferred embodiments will be described in detail so that those skilled in the art can easily practice the present invention with reference to the accompanying drawings. However, in describing a preferred embodiment of the present invention in detail, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description will be omitted. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and actions. In addition, in this specification, terms such as 'upper', 'upper', 'upper surface', 'lower', 'lower', 'lower surface', and 'side surface' are based on the drawings, and are actually elements or components may vary depending on the direction in which is placed.

In addition, throughout the specification, when a part is said to be 'connected' to another part, this is not only the case where it is 'directly connected', but also the case where it is 'indirectly connected' with another element in between. include In addition, 'including' a certain component means that other components may be further included, rather than excluding other components unless otherwise stated.

1 is a schematic diagram of a state in which a semiconductor vacuum valve 100 according to an embodiment of the present invention is installed. As shown in FIG. 1, a valve 1 for semiconductor vacuum according to an embodiment of the present invention is installed in a wall 2 formed with first and second valve openings 3 on both sides. A valve (1) for semiconductor vacuum includes a valve rod (10) and a valve structure (100) connected to the valve rod (10), and the valve rod (10) includes an up/down driving means (4) for vertically moving and It is connected to the front and rear driving means 5 for moving in the front and rear directions. The valve structure 100 for semiconductor vacuum is connected to the valve rod 10 and lowered by the up and down driving means 4 to the open position, as shown in FIG. 1, the valve rod 10 is raised by the up and down driving means 4 It can be moved forward or backward by the forward and backward driving means 5 at the intermediate position and the intermediate position to close the valve opening 3 on one side of the wall 2 to a closed position. Since the operation of the semiconductor vacuum valve 1 is not different from that described in Patent Document 1, etc., a detailed description thereof will be omitted, and one of the valve structures 100 connected to the valve rod 10 of the semiconductor vacuum valve 1 An embodiment will be described through FIGS. 2 to 9 .

2 is a perspective view of a valve structure 100 for semiconductor vacuum according to an embodiment of the present invention, and FIG. 3 is an exploded perspective view of the valve structure 100 for semiconductor vacuum according to an embodiment of the present invention. 4 is a detailed exploded perspective view of the clamping member 150 of the valve structure 100 for semiconductor vacuum according to an embodiment of the present invention, and FIG. 5 shows a semiconductor vacuum according to an embodiment of the present invention. A front view of the support plate 110 of the valve structure is shown, FIG. 6 is a perspective cross-sectional view of the valve structure 100 for semiconductor vacuum according to an embodiment of the present invention, and FIG. 7 is one of the present invention A cross-sectional view of a valve structure 100 for semiconductor vacuum according to an embodiment is shown.

The valve structure 100 for semiconductor vacuum according to the present invention is combined with the valve rod 10. As shown in FIGS. 2 to 7 , in one embodiment, the valve structure 100 includes a first valve plate 120 for closing one side valve opening 3 (see FIG. 1); a second valve plate 130 for closing the other valve opening 3 (see FIG. 1); a support plate 110 disposed between the first and second valve plates 120 and 130 and connected to and detached from the first and second valve plates 120 and 130; a clamping member 150 fixing the first and second valve plates 120 and 130 to the support plate 110; a screw 170 interlocked with the clamping member 150 to fix the first and second valve plates 120 and 130 to the support plate 110 and fastened to the support plate 110; and a columnar intermediate member 160 into which the head 171 of the screw 170 is inserted and whose outer surface 162 is inclined at a first angle with respect to the screw extension direction (Z direction). In the present invention, the valve mechanism 100 is one component of the valve 1 and is connected to the valve rod 10 to close/open the valve opening 3 .

First and second valve plates 120 and 130 are disposed on both sides of the support plate 110 in the front-back direction (Y direction). The support plate 110 includes a body 111, a plurality of screw insertion grooves 113 arranged in a row on the upper surface 114 of the body 111, and the first and second valve plates ( 120, 130 includes a first guide portion 115 for guiding the position and a connection hole 112 into which the valve rod 10 (see FIG. 1) is inserted and connected.

The main body 111 of the support plate 110 has a different thickness at the position where the first guide part 115 is formed and the position where the first guide part is not formed, and as shown in FIGS. 6 and 7, the first guide part ( 115) is formed relatively thicker than other positions in the front-back direction (Y direction). That is, the first guide portion 115 protrudes toward the first and second valve plates 120 and 130 compared to other portions. The size of the support plate 110 corresponds approximately to the shape of the opening 3 . After the positions of the first and second valve plates 120 and 130 are guided by the first guide part 115 with respect to the support plate 110, the clamping members 140 and 150 are fastened, and the first and second valve plates 120 and 150 are fastened. The second valve plates 120 and 130 are closely coupled to the support plate 110, and the clamping members 140 and 150 are released from the support plate 110 so that the first and second valve plates 120 and 130 are It becomes a state in which it is easy to disassemble from the support plate 110.

The first and second valve plates 120 and 130 are disposed facing each other with the support plate 110 interposed therebetween, and each is disposed on the side where the seals 129 and 139 face the valve opening 3, and support The valve opening 3 is closed while coming into contact with the valve opening 3 according to the operation of the valve rod 10 connected to the plate 110 . The first valve plate 120 has a groove 122 formed on the upper portion of the surface facing the support plate 110, and a lower portion formed with second guide portions 125 and 135 in a shape corresponding to the first guide portion 115. ) is formed. The groove 122 is formed on both sides of the valve structure 100 in the width direction (X direction) and is not formed in the center. The groove 122 extends in the width direction and may include a second surface 122b relatively far from the support plate 110 and a first surface 122a relatively close from the support plate 110, the groove ( Since the height of the first surface 122a from the bottom surface of 122 is lower than that of the second surface 122b, the clamping member 150 may be located at a position not higher than the upper surface of the first valve plate 120.

The second valve plate 130 has a structure substantially symmetrical to the first valve plate 120 . The second valve plate 130 has grooves 132 formed on the top and bottom of the surface facing the support plate 110, and the position corresponding to the first guide part 115 on the surface facing the support plate 110. The second guide portion 135 is formed on. The groove 132 is formed on both sides of the valve structure 100 in the width direction (X direction) and is not formed in the center. The groove 132 extends in the width direction and may include a second surface 132b relatively far from the support plate 110 and a first surface 132a relatively close from the support plate 110, the groove ( Since the height of the first surface 132a from the bottom surface of 132 is lower than that of the second surface 132b, the clamping member 150 may be located at a position not higher than the upper surface of the second valve plate 130.

Referring to FIGS. 5 to 7 , the first and second guide parts 115 , 125 , and 135 will be described in detail.

As described above, the first guide part 115 protrudes in the direction of the first and second valve plates and includes a guide protrusion 115a formed along the upper surface of the first guide part 115, The guide parts 125 and 135 include guide grooves 125a and 135a formed along the lower surfaces of the second guide parts 125 and 135 to correspond to the guide protrusions 115a.

The first guide part 115 includes a first central guide part 116 of the center line portion in the width direction (X direction) of the support plate 110 and first side guides on both sides from the first central guide part 116. It includes section 117. As shown in FIG. 5, the first guide portion 115 includes concave portions 1151 and 1153 having a small height and convex portions 1152 and 1154 having a high height in the height direction (Z direction), that is, in the extension direction of the screw 170. ), Including, the first central guide portion 116 has a concave portion 1151 located on the center line and a pair of convex portions 1152 symmetrical about the concave portion 1151, and the first side guide In each of the portions 117, an outermost convex portion 1154 and a concave portion 1153 inside the convex portion 1154 are positioned. Since the heights of the concave portions 1151 and 1153 and the heights of the convex portions 1152 and 1154 are the same, the average of the first central guide portions 116 in which a pair of convex portions 1152 are disposed in one concave portion 1151 The height is higher than the average height of the first side guide parts 117 in which each concave part 1153 and one convex part 1154 are disposed. This structure is applied to both the first guide portion 115 in the direction of the first valve plate and the direction of the second valve plate.

The concave portion 1151 of the first central guide portion 116 is shorter in the width direction (X direction) than the concave portion 1153 of the first side guide portion 117, so that the convex portion 1152 located right next to it Together with the first or second valve plate (120, 130) may serve to guide the position of the second guide portion (125, 135) in the width direction and the height direction.

On the other hand, as shown in Figures 6 and 7, the guide protrusion (115a) has a semicircular shape in the cross section cut in the forward and backward direction, and the guide grooves (125a, 135a) have the same diameter as the semicircle but have a smaller angle arc than the semicircle. have a shape In the second guide parts 125 and 135, flat surfaces 125b and 135b are formed next to the guide grooves 125a and 135a. The degree of matching of the guide grooves 125a and 125b to the guide protrusion 115a can be controlled by the planes 125b and 135b next to the guide grooves 125a and 135a, which is a valve on the support plate 110. The plates 120 and 130 may be used as a design factor for adjusting the degree of coupling. Since the guide protrusion 115a has a semicircular cross section, when the first and second valve plates 120 and 130 approach the support plate 110 by a certain distance or more, the first and second valve plates 120 and 130 ) is guided in a direction in close contact with the support plate 110, and conversely, when it exceeds a certain distance, the first and second valve plates 120 and 130 may be guided in a direction away from the support plate 110. Due to these properties, in connection with the screw 170, the intermediate member 160, and the clamping member 150 to be described later, the first and second valve plates 120 and 130 are attached to and detached from the support plate 110. will affect

The clamping members 140 and 150 have a first clamping member 140 having an extension 153 extending to the first valve plate 120 and an extension 153 extending to the second valve plate 130. It includes the second clamping member 150. Since the configurations of the first clamping member 140 and the second clamping member 150 are substantially the same except for the direction, the description is centered on the second clamping member 150. do. As for the clamping members 140 and 150 , the first clamping member 140 and the second clamping member 150 are alternately disposed along the width direction (X direction) of the supporting plate 110 .

4, 6 and 7 show the configuration of the clamping member 150 well. 4, 6 and 7, the second clamping member 150 includes a main body 151, an inner groove 152 formed in the main body 151 into which the intermediate member 160 is inserted, and the second valve plate ( 130), and an insertion portion 154 bent from the extension portion 153 to be inserted into the groove 132 formed in the second valve plate 130. As described above, in the first clamping member 140, the direction in which the extension portion is formed is toward the first valve plate 120, except that the insertion portion is inserted into the groove 122 of the first valve plate 120. same.

In the second clamping member 150, the inner groove 152 has a shape corresponding to the shape of the intermediate member 160, and is inclined at a first angle θ with respect to the extension direction (Z direction) of the screw 170. , the first angle θ is inclined so that the distance from the second valve plate 120 increases as the distance from the second clamping member 150 to the upper surface 114 of the support plate 110 increases. That is, the inner groove 152 is inclined so that the center of the bottom surface of the inner groove 152 is closer to the second valve plate 120 than the center of the bottom surface of the inner hole 152 in the second clamping member 150 . In the case of the inner groove of the first clamping member 140, the inner groove 152 of the second clamping member 150 is inclined in the opposite direction at a first angle θ.

The first angle θ is preferably in the range of 5 to 45 degrees, and the length at which the clamping members 140 and 150 pull the first and second valve plates 120 and 130 according to the length at which the screw 170 is tightened. Since is related to the sine value of the first angle θ, if it exceeds 45 degrees, a result of pulling it abruptly may result in limiting the fastening depth of the screw 170, and if it is less than 5 degrees, the valve plate 120 , 130), it may be difficult to pull it sufficiently because the fastening depth for pulling it becomes long.

The intermediate member 160 has a first hole 161a having a diameter greater than or equal to the diameter of the head 171 so that the head 171 of the screw 170 enters and the pillar 172 of the screw 170 enters and the head 171 It includes a through-hole 161 and an outer surface 162 including a second hole 161b for which is caught. The intermediate member 160 has a smaller thickness and a height in the Z direction than the first and second clamping members 140 and 150, has upper and lower surfaces parallel to the front and rear direction (Y direction), and has an inclined column shape. have The intermediate member 160 is inserted into the inner groove 152 of the first and second clamping members 140 and 150, and the outer surface 162 of the intermediate member 160 is the first and second clamping members 140 and 150. It is moved while sliding on the inner groove 152 of ). The intermediate member 160 and the inner groove 152 have the shape of an inclined prism, in this embodiment, a quadrangular prism. By having a prismatic shape, the intermediate member 160 may not rotate within the inner groove 152 . The intermediate member 160 restricts the movement of the screw 170 in the height direction, but allows the rotation of the screw 170 through the through hole 161 into which the screw 170 is inserted and the head of the screw 170. (171) may have a groove/protrusion structure.

8 and 9 show a state according to the fastening of the clamping members 140 and 150 according to the present invention.

As shown in FIG. 8 , the first and second valve plates 120 and 130 are guided to the support plate 110 by the first and second guide parts 115 and 125 and 135, and the clamping members are guided. The intermediate member 160 is inserted into (140, 150), and the screw thread 173 of the screw 170 is inserted into the screw insertion groove of the support plate 110 in a state where the screw 170 is inserted into the intermediate member 160 ( 113) is concluded. Since the position of the screw insertion groove 113 of the support plate 110 is fixed, as the screw 170 is fastened, the intermediate member 160 descends along the inner groove 152 of the second clamping member 150. While descending, the second clamp member 150 is pulled so that the gap with the second valve plate 130 becomes smaller. 132), as the second clamp member 150 is moved in the direction of the first valve plate 120, the inner surface of the insertion part 154 adheres to the first surface 132a of the groove 132 while maintaining control. The second valve plate 130 is pulled toward the support plate 110 , whereby the second valve plate 130 can be firmly coupled to the support plate 110 .

Meanwhile, as shown in FIG. 9 , when the intermediate member 160 rises together with the head 171 of the screw 170 as the screw 170 is loosened, the shape of the inner groove 152 of the second clamping member 150 Accordingly, the distance from the second valve plate 130 increases, and the insertion part 154 of the second clamp member 150 is inserted into the second surface 132b of the groove 132 of the second valve plate 130. ) to move the second valve plate 130 away from the support plate 110. Even if the intermediate member 160 does not rise together with the loosening of the screw 170 because the second clamping member 150 is disposed thereon, the second valve plate 130 is moved to the support plate 110 using its own weight. Removal of the second valve plate 130 can be easily performed because there is no configuration to make it close.

In addition, although not shown, the intermediate member 160 allows the head 171 of the screw 170 to rotate, but moves in the vertical direction together with the head 171 so that the head of the screw 1701 ( 171) may include a protrusion or groove constrained, in which case the separation of the guide protrusion 115a and the guide grooves 125a and 135a occurs as the clamping members 140 and 150 push the groove 132 out. This may occur, and the first and second valve plates 120 and 130 may be easily detached from the support plate 110 .

1: valve 2: wall
3: valve opening 100: valve structure
110: support plate 111: body
113: screw insertion groove 114: upper surface
115: first guide portion 115a: guide protrusion
1151, 1153: concave portion 1152, 1154: convex portion
116: first central guide part 117: first side guide part
120: first valve plate 122: groove
125: second guide part 125a: guide groove
125b: plane 130: second valve plate
132: groove 135: second guide part
135a: guide groove 135b: plane
140, 150: clamping member
151: main body 152: inner home
153: extension part 154: insertion part
160: intermediate member 161: through hole
162: outer surface 170: screw
171: head

Claims (9)

a first valve plate for closing the first valve opening;
a second valve plate for closing the second valve opening;
a support plate disposed between the first and second valve plates and connected to and detached from the first and second valve plates;
a clamping member fixing the first and second valve plates to the support plate at an upper portion of the support plate;
screws interlocking with the clamping member to fix the first and second valve plates to the support plate and fastened to the support plate;
a pillar-shaped intermediate member into which the head of the screw is inserted and whose outer surface is inclined at a first angle with respect to the extension direction of the screw;
a first guide part for guiding positions of the first and second valve plates under the support plate; and
A second guide part for guiding the first and second valve plates in cooperation with the first guide part below the first and second valve plates,
The clamping member is
an inner groove inclined at the first angle in a shape corresponding to the intermediate member to insert the intermediate member; a first clamping member including an extension part extending in the direction of the first valve plate and an insertion part inserted into a groove formed in the first valve plate;
an inner groove inclined at the first angle in a shape corresponding to the intermediate member to insert the intermediate member; A second clamping member including an extension portion extending in the direction of the second valve plate and an insertion portion inserted into a groove formed in the second valve plate;
The inner groove of the first or second clamping member is inclined so that the distance from the first or second valve plate increases as the distance from the support plate increases,
The groove includes a first surface that is relatively close to the support plate and a second surface that faces the first surface and is relatively far from the support plate. A valve structure for semiconductor vacuum in contact with the insertion portion at a surface.
According to claim 1,
The first guide portion and the second guide portion include a guide protrusion protruding upward and a guide groove corresponding to the guide protrusion,
In the support plate, the thickness of the first guide part is thicker than the thickness of the part to which the screw is fastened,
A valve structure for semiconductor vacuum, characterized in that the thickness of the second guide portion of the first and second plates is smaller than the thickness of the groove.
According to claim 2,
The first guide part includes a first central guide part at the center of the support plate and first side guide parts on both sides of the central guide part,
The valve structure for semiconductor vacuum, characterized in that the end of the first side guide portion has a height higher than the average height of the first guide portion.
According to claim 3,
The first central guide part includes a concave part having a relatively small height at the center of the support plate in the width direction and a convex part having a relatively high height between the concave part, and the second guide part includes the concave part and the convex part. A valve structure for semiconductor vacuum, characterized in that it has a corresponding shape.
According to claim 2,
The guide protrusion is formed along the upper surface of the first guide part and has a semicircular cross section.
According to claim 5,
The guide groove has a diameter corresponding to the diameter of the semicircle of the guide protrusion in cross section, but comprises an arc of an angle smaller than the semicircle.
According to claim 1,
The valve structure for semiconductor vacuum according to claim 1, wherein the intermediate member includes a protrusion or a groove that is constrained to the head of the screw in the vertical direction so as to move in the vertical direction together with the head of the screw.
According to claim 1,
The intermediate member has a rectangular pillar shape with upper and lower surfaces parallel to the horizontal plane and inclined.
According to claim 8,
The insertion part is formed by bending from the extension part,
A valve structure for semiconductor vacuum, characterized in that a distance between the first surface and the second surface in the groove of the valve plate is greater than a thickness of the insertion portion.

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