KR102492901B1 - A single crystal composite hydrophone and array hydrophone - Google Patents

Abstract

The present invention is a piezoelectric single crystal composite acoustic sensor comprising a rectangular parallelepiped piezoelectric single crystal composite containing a piezoelectric single crystal material and a polymer material, and a shape plate interviewing upper and lower surfaces of the piezoelectric single crystal composite, according to the present invention, sound reception sensitivity characteristics can be maximized.

Description

Piezoelectric single crystal composite acoustic sensor and array acoustic sensor including the same {A SINGLE CRYSTAL COMPOSITE HYDROPHONE AND ARRAY HYDROPHONE}

The present invention relates to an acoustic sensor using a piezoelectric single crystal composite applied to an underwater acoustic sensor and the like, and an array sensor in which such an acoustic sensor is arranged.

Piezoelectric material is an electro-mechanical energy conversion material that outputs an electrical signal by mechanical deformation or changes its shape in response to an input electrical signal. come.

Piezoelectric materials generally have higher acoustic impedance (Z = ρ × c, ρ: density, c: sound velocity) than medium (air, water, etc.). When transmitting and receiving sound signals with piezoelectric materials, the sensitivity is reduced and the frequency bandwidth is narrowed. In order to solve this impedance mismatch, a piezoelectric-polymer composite in which a polymer material having low acoustic impedance is filled between structures made of piezoelectric materials has been proposed. The piezoelectric composite can lower the acoustic impedance to a level similar to that of the medium, and when used as an acoustic sensor sensitive element, it can have high acoustic transmission/reception sensitivity and a wide frequency bandwidth.

In addition, piezoelectric materials are generally anisotropic materials in which magnitudes and signs of piezoelectric constants are different for each direction. When a piezoelectric material is used as an acoustic sensor sensitive element for reception, the magnitude and sign of the voltage output signal for each direction are different, and the destructive interference of the signal may significantly decrease the receiving sensitivity. The piezoelectric composite inserts a polymer material with low rigidity in a direction opposite to the sign of the piezoelectric constant to blunt the sensitivity to pressure in the corresponding direction, thereby preventing a decrease in reception sensitivity due to destructive interference of the output signal for each direction. The piezoelectric composite may have a shape such as a 1-3 composite, a 2-2 composite, or an 0-3 composite depending on the structure of the piezoelectric body and the shape of the polymer filling.

An acoustic sensor using a piezoelectric composite as a sensitive element generally has the following multilayer structure. A matching layer in contact with the medium and composed of a material having an intermediate impedance between the medium and the piezoelectric ceramic composite and having a thickness of 1/4 wavelength of the input sound wave, and a piezoceramic composite in contact with the lower surface of the matching layer and having a thickness of 1/2 wavelength of the input sound wave Layer, a sound-absorbing baffle layer made of sound-absorbing material to attenuate sound waves transmitted to the rear of the composite in contact with the bottom of the piezoelectric ceramic composite. In the case of the sensing structure, although a matching layer is applied to the front and a sound-absorbing baffle is applied to the rear, there is an advantage in that wideband frequency reception is possible, but the reception sensitivity is relatively low.

PZT (Lead zirconate titanate) piezoelectric ceramic material has been commonly used as the piezoelectric material of the piezoelectric composite acoustic sensor. Recently, a piezoelectric single crystal material with superior piezoelectric performance compared to existing piezoelectric ceramics has been developed and a lot of research is being conducted. In particular, in the case of a piezoelectric single crystal material polarized in the <011> direction, it has been announced that it is composed of a type 2-2 piezoelectric single crystal composite and can have higher sound reception performance than conventional acoustic sensors.

The present invention proposes an acoustic sensor and an array acoustic sensor capable of having high acoustic reception performance by using the 2-2 type piezoelectric single crystal composite. The proposed piezoelectric single crystal composite acoustic sensor is characterized by having the following configuration. A piezoelectric single crystal composite layer having a thickness of 1/4 wavelength of the input sound wave, a regular plate structure for reducing the stress applied to the piezoelectric single crystal composite in the longitudinal or width direction contacting the upper and lower surfaces of the piezoelectric single crystal composite layer, and the lower surface of the regular plate A hard baffle layer for contacting and forming the lower surface of the piezoelectric single crystal composite as a fixed end and excluding vibration mode interference in the longitudinal and width directions, and a mount structure for aligning the acoustic sensor. In the case of the above sensitive structure, it is possible to have higher reception sensitivity than conventional piezoelectric ceramic composites by excluding interference in reception sensitivity in the length and width directions according to the 1/4 wavelength thickness mode driving of the piezoelectric single crystal composite according to the application of the hard baffle and the application of the regular plate structure. . In addition, flat frequency band characteristics can be achieved by applying a structure for excluding vibration mode interference of the shape plate and the hard baffle.

Matters described in the background art above are intended to aid understanding of the background of the invention, and may include matters other than those of the prior art already known to those skilled in the art.

Korean Patent Publication No. 10-2017-0099133

The present invention has been made to solve the above problems, and an object of the present invention is to provide a piezoelectric single crystal composite acoustic sensor and an array acoustic sensor including the same that can maximize acoustic reception sensitivity characteristics and have flat frequency characteristics. .

A piezoelectric single crystal composite acoustic sensor according to one aspect of the present invention includes a piezoelectric single crystal composite including a piezoelectric single crystal material and a polymer material, a piezoelectric single crystal composite that is interviewed on the upper or lower surface of the piezoelectric single crystal composite, and a hard plate that is interviewed on the lower surface of the lower shaping plate. Includes a baffle.

In addition, the piezoelectric single crystal composite is characterized in that the piezoelectric single crystal material and the polymer material are alternately laminated in the longitudinal direction, characterized in that the type 2-2 piezoelectric single crystal composite structure. In addition, the type 2-2 piezoelectric single crystal composite is characterized by having continuity in the width direction and the height direction.

In addition, the thickness of the piezoelectric single crystal composite is characterized in that it is designed to be 1/4 wavelength of the input sound wave.

Here, the piezoelectric single crystal material is PMN-PT (Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), PIN-PMN-PT (Pb(In _1/2 Nb _1/2 )O ₃ -Pb (Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), Mn:PIN-PMN-PT (Mn doped Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _{1/ 3} ) O ₃ -PbTiO ₃ ) and PMN-PZT (Pb(Mg _2/3 Nb _1/3 ) O ₃ -PbZrO ₃ -PbTiO ₃ ).

Meanwhile, the piezoelectric single crystal material is characterized in that it is polarized in a crystal direction having a Miller Indies of <011> in the crystal direction.

In addition, the polymer material is characterized in that it is a polymer material containing at least one of polyurethane, silicone, epoxy, rubber, and polyethylene, or a synthetic polymer material or porous foam material including microspheres in the polymer material.

And, the shape plate is characterized in that the plate shape of a metal material, GRP (Glass fiber Reinforced Plastic) material or CRP (Carbon fiber Reinforced Plastic) material.

Alternatively, it may be characterized in that it has a shape including a plurality of dimples on the shaping plate.

Alternatively, the shaping plate may be characterized in that a first material and a second material are alternately arranged in a width direction of the shaping plate, and the second material is a polymer material having lower rigidity than the first material.

The hard baffle is characterized in that it has a sufficiently larger impedance than the piezoelectric single crystal composite and is designed to have a 1/4 wavelength of an input sound wave, forming a lower surface of the piezoelectric single crystal composite as a fixed end.

Alternatively, the hard baffle may be characterized in that a groove is formed upward from the lower surface in order to prevent vibration mode interference.

Alternatively, the hard baffle may have an impedance sufficiently greater than that of the piezoelectric single crystal composite, and may be designed to have 1/2 wavelength of an input sound wave to receive sound signals of two frequency bands.

Meanwhile, an insulating plate may be included between the hard baffle and the shaping plate.

On the other hand, for the purpose of watertightness, an acoustic window of polyurethane or rubber material having an acoustically transparent property may be included covering the piezoelectric single crystal composite, the shape plate, and the baffle.

Next, the array acoustic sensor according to one aspect of the present invention further includes a mount having a plurality of acoustic sensor alignment grooves formed on one surface, and the piezoelectric single crystal composite acoustic sensor is mounted on each of the plurality of acoustic sensor alignment grooves. characterized by

And, the mount is characterized in that an engineering plastic material, or a sound-absorbing material.

In addition, for the purpose of watertightness, an acoustic window of polyurethane or rubber material having an acoustically transparent property may be included surrounding the plurality of piezoelectric single crystal composites and the mount.

According to the piezoelectric single crystal composite acoustic sensor and the array acoustic sensor of the present invention, it is possible to maximize the acoustic reception sensitivity by minimizing the reception sensitivity interference in the lateral direction while maintaining the reception sensitivity performance in the thickness direction by applying the shaped plate structure, and the hard baffle With the application of , it is possible to have high reception sensitivity by driving the piezoelectric single crystal composite in a 1/4 wavelength thickness mode. In addition, flat reception sensitivity frequency characteristics can be obtained by applying a structure of a shaped plate and a hard baffle capable of preventing interference to reception sensitivity due to vibration modes of the structure.

1 is a perspective view of a piezoelectric single crystal composite.
2 shows a piezoelectric single crystal composite acoustic sensor according to an embodiment of the present invention.
3 shows a piezoelectric single crystal array acoustic sensor according to an embodiment of the present invention.
4 shows a piezoelectric single crystal array acoustic sensor according to another embodiment of the present invention.
5 shows a piezoelectric single crystal composite acoustic sensor for an application embodiment of the present invention.
FIG. 6 shows acoustic figure of merit characteristics according to the embodiment of FIG. 5 .
7 shows a piezoelectric single crystal composite acoustic sensor according to another application embodiment of the present invention.
FIG. 8 shows acoustic reception sensitivity according to the embodiment of FIG. 7 .

In order to fully understand the present invention and the advantages in operation of the present invention and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings illustrating preferred embodiments of the present invention and the contents described in the accompanying drawings.

In describing the preferred embodiments of the present invention, known techniques or repetitive descriptions that may unnecessarily obscure the subject matter of the present invention will be reduced or omitted.

1 is a perspective view of a piezoelectric single crystal composite. 2 shows a piezoelectric single crystal composite acoustic sensor according to an embodiment of the present invention, and FIG. 3 shows a piezoelectric single crystal array acoustic sensor according to an embodiment of the present invention. And, FIG. 4 shows a piezoelectric single crystal array acoustic sensor according to another embodiment of the present invention.

Hereinafter, a piezoelectric single crystal composite acoustic sensor and an array acoustic sensor including the same according to an embodiment of the present invention will be described.

As shown in FIG. 1 of the present invention, the acoustic sensor 100 has a 2-2 type piezoelectric single crystal composite 10 in which a piezoelectric single crystal material and a polymer material are layered and interviewed as a sensitive element. The advantages of the 2-2 type piezoelectric single crystal composite acoustic sensor can be explained as follows.

When an acoustic signal having a longer wavelength compared to the size of the element is applied to the piezoelectric single crystal composite sensing element, sound pressure of the same magnitude and phase is applied to the omnidirectional surfaces of the sensing element. The magnitude of the voltage signal output with respect to the input sound signal applied in these omnidirectional directions can be defined as a _hydrostatic pressure piezoelectric constant. The magnitude of the output charge is defined as the hydrostatic piezoelectric charge constant (d _h ). The voltage piezoelectric constant and the charge piezoelectric constant are calculated as the sum of piezoelectric constants in three directions as shown in Equation 1 below.

At this time, the product of the hydrostatic voltage piezoelectric constant and the hydrostatic charge piezoelectric constant can be defined as the figure of merit (FOM) of the acoustic sensor as shown in Equation 2 below, which is the signal to noise ratio of the acoustic sensor It is used as a representative figure of merit.

Piezoelectric materials are anisotropic materials, and the signs and values of the piezoelectric constants (d ₃₁ , d ₃₂ , d ₃₃ or g ₃₁ , g ₃₂ , g ₃₃ ) for each direction are different, so the hydrostatic pressure piezoelectric constant expressed as the sum of the piezoelectric constants in the three directions. The value of is very low. Therefore, when such a piezoelectric material is used in a simple block form, the sound reception sensitivity is very low. The piezoelectric composite can lower the stress in the corresponding direction and lower the value of the piezoelectric constant by filling the polymer material with weak rigidity in a direction opposite to the sign of the piezoelectric material. Therefore, the piezoelectric composite makes it possible to design a sensitive element with a high figure of merit (FOM), that is, a high signal-to-noise ratio characteristic.

The type 2-2 piezoelectric single crystal composite 10 of the present invention is characterized by a structure in which piezoelectric single crystals and polymers are arranged layer by layer along the (2) direction in which the sign of the piezoelectric constant is opposite. Here, the i-j composite means the number of directions in which the piezoelectric material has continuity, and j means the number of directions in which the polymer material has continuity (i, j ≤ 3). In the 2-2 type piezoelectric single crystal composite, the piezoelectric single crystal and the polymer have continuity in two directions (1) and (3).

As shown in FIG. 1, the proposed type 2-2 piezoelectric single crystal composite 10 is filled with a polymer having relatively low rigidity between the piezoelectric single crystals, thereby reducing the acoustic response characteristics in the direction (two directions) perpendicular to the surface where the polymer is inserted. can Therefore, when using a piezoelectric single crystal in which the signs of the piezoelectric constants in directions (1) and (3) are the same and the signs of the piezoelectric constants in the direction (2) are opposite, the response characteristics can be maximized.

PMN-PT (Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ) polarized in the crystal direction having a Miller index <011> as a piezoelectric single crystal material suitable for the type 2-2 piezoelectric single crystal composite 10, PIN-PMN-PT (Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), Mn:PIN-PMN-PT (Mn doped (Pb (In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), PMN-PZT(Pb(Mg _2/3 Nb _1/3 )O ₃ -PbZrO ₃ -PbTiO ₃ ) Since the piezoelectric single crystal material has positive piezoelectric constants in the (1) and (3) directions and negative piezoelectric constants in the (2) direction, it is a type 2-2 piezoelectric single crystal composite. If the response characteristics of (2) direction are lowered by application, the reception sensitivity characteristics can be maximized.

Polymer materials applicable to the piezoelectric single crystal composite 10 may include polymer materials such as polyurethane, silicone, epoxy, rubber, and polyethylene, synthetic polymer materials including microspheres in the polymer materials, and porous foam materials.

In the present invention, a piezoelectric single crystal composite acoustic sensor 100 sensitive structure as shown in FIG. 2 using the piezoelectric single crystal composite as a sensitive element is proposed.

The acoustic sensor sensitive structure has a multi-layer structure including a piezoelectric single crystal composite 10, a shape plate 20 and a hard baffle 30. The piezoelectric single crystal composite is designed with 1/4 wavelength of the input sound wave and detects the sound signal in the vibration mode in the thickness direction.

The piezoelectric single crystal composite acoustic sensor 100 is characterized by having a shaping plate 20 interviewed on both upper and lower surfaces of the piezoelectric single crystal composite 10 . The shape plate 20 increases the rigidity of the piezoelectric single crystal composite in the plane direction (1), (2) direction, or (2) direction to minimize deformation of the piezoelectric single crystal composite due to sound waves incident in the corresponding direction, which is the main response direction ( 3) Prevents interference caused by the reception sensitivity in the plane direction without changing the reception sensitivity in the direction. At this time, the thickness of the shape plate is designed to be sufficiently thin compared to the wavelength of the input sound wave so as not to affect the vibration mode in the thickness direction of the piezoelectric single crystal composite. The material of the shaping plate 20 may be a material having high rigidity enough to withstand stress applied in a horizontal direction. Metal materials such as iron, aluminum, copper, and copper compounds, or composite materials such as GRP (Glass fiber Reinforced Plastic) and CRP (Carbon fiber Reinforced Plastic) may be used as the material for the shaping plate. When a conductive material is used as a shape plate, it can be used as an electrode plate for signal acquisition.

FIG. 5 shows the shape of the regular plate 20 applicable to the piezoelectric single crystal composite acoustic sensor 100, and FIG. 6 shows the acoustic figure of merit characteristics according to the embodiment of FIG.

First, the flat plate-shaped shaping plate 21 of FIG. 5 (a) is a general plate-shaped shaping plate corresponding to an embodiment of the present invention, without change in stiffness in the (3) direction, in the (1) and (2) directions. By increasing the rigidity, the reception sensitivity characteristics are improved.

In addition, the dimple-type shaping plate 22 of FIG. 5 (b) has a structure in which a plurality of dimples 22-1 (dimples) are formed to minimize the mass of the shaping plate while increasing the rigidity in the (1) and (2) directions. As a result, it is possible to maximize the effect of increasing the reception sensitivity by minimizing the change in the reception sensitivity in the thickness direction by the shaping plate.

And, in the composite type shaping plate 23 of FIG. 5(c), a shaping plate material having high rigidity, the first material 23-1, and a low rigidity shaping material, the second material 23-2, made of a polymer material, are formed in one direction. It has the form of a cross-arranged arrangement. Such a shape plate has a relatively low stiffness in the (1) direction and high stiffness in the (2) direction. ) direction, it is possible to effectively lower the sensitivity characteristics of reception.

In FIG. 6, the horizontal axis of the graph represents the volume ratio of the piezoelectric single crystal material of the piezoelectric single crystal composite, and the vertical axis represents the hydrostatic pressure figure of merit (FOM) representing signal-to-noise ratio performance. The figure of merit has a characteristic that changes according to the volume ratio of the piezoelectric single crystal composite and has a maximum value at a specific volume ratio. It can be seen that the maximum figure of merit increases in the order of the flat shape shaping plate 21, the dimple shaping plate 22, and the composite shaping plate 23 according to the shape of the shaping plate.

In addition, the acoustic sensor 100 has a hard baffle 30 structure that interviews the lower surface of the piezoelectric single crystal composite 10 or the shape plate 20, and is a material with higher impedance (density x stiffness) than the piezoelectric single crystal composite 10. Phosphorus iron, aluminum, tungsten, brass, CRP, GRP, etc. can be applied. The hard baffle 30 forms the lower surface of the piezoelectric single crystal composite 10 as a fixed end so that the piezoelectric single crystal composite 10 enables sonar detection in a 1/4 wavelength thickness mode. The hard baffle 30 may have a structure for preventing interference with reception sensitivity due to a vibration mode of the structure of the hard baffle 30 within a reception frequency band. In addition, an insulating plate may be applied between the piezoelectric single crystal composite 10 and the hard baffle 30 or between the shape plate 20 and the hard baffle 30 in order to maintain insulating properties. An insulating material such as alumina, GRP, or the like may be applied to the insulating plate.

FIG. 7 shows the shape of a hard baffle 30 applicable to the piezoelectric single crystal composite acoustic sensor 100, and FIG. 8 shows reception sensitivity characteristics according to the embodiment of FIG. 7 .

First, the block-type hard baffle 31 of FIG. 7 (a) is the most basic hard baffle structure and is designed to be about 1/4 wavelength thick, and a 1/4 wavelength thickness direction resonance mode of the piezoelectric single crystal composite can be designed.

In addition, the grooved hard baffle 32 of FIG. 7 (b) forms a groove inside the hard baffle to remove the vibration mode of the hard baffle that interferes with the reception sensitivity, thereby securing flat reception sensitivity characteristics. there is. In the case of the hard baffle structure, the inside of the groove (groove) may be filled with an acoustic window material.

In addition, the two-band receiving hard baffle 33 of FIG. 7 (c) is designed to have a thickness of 1/2 wavelength, and uses two resonance modes, the thickness mode of the piezoelectric single crystal composite and the thickness mode of the hard baffle. It can have high reception sensitivity in a frequency band.

8, the horizontal axis of the graph represents frequency, and the vertical axis represents reception sensitivity. Referring to the graph, the block-type hard baffle 31 exhibits the characteristics of having the maximum reception sensitivity at the resonance mode frequency in the thickness direction of the composite. However, it can be confirmed that fluctuations in reception sensitivity are formed by the vibration mode interference of the hard baffle. The groove-type fixed baffle 32 eliminates the vibration mode in the plane direction of the hard baffle, and thus, a flat receiving sensitivity characteristic is confirmed compared to the block-type fixed baffle. The two-band receiving type hard baffle 33 is characterized by having high reception sensitivity in two frequency bands by designing two resonance modes of the composite and hard baffle around the center frequency.

Next, the piezoelectric single crystal composite acoustic sensor 100 may have an acoustic window 40 structure in which an outer surface is wrapped with a polymer material for watertightness. The acoustic window 40 should have properties similar to those of the medium in order to transfer the input sound wave to the sensitive element without loss.

That is, the acoustic window 40 serves to seal internal components and transmits an acoustic signal incident from the front to the piezoelectric single crystal composite 10 . In order to effectively transmit the acoustic signal to the composite, it is preferable to be made of a polyurethane or rubber material having a similar impedance to the medium and having high manufacturability.

Furthermore, the acoustic sensing structure proposed in the present invention may be composed of an array acoustic sensor 400 as shown in FIG. 3 consisting of a plurality of piezoelectric single crystal composite acoustic sensors 100. The array acoustic sensor 400 may have a mount 200 structure for fixing the piezoelectric single crystal composite acoustic sensor 100 and stabilizing an input sound field. Acoustic sensor alignment grooves 210 for aligning the acoustic sensor 100 elements may be formed on the structure of the mount 200 . The structure of the mount 200 may be made of a sound-absorbing material to stabilize a sound signal input from the front and block noise from the rear.

An array acoustic sensor 400 according to another embodiment of the present invention may be configured as shown in FIG. 4 .

The array sensor 400 includes a mount 200 structure for fixing the acoustic sensor 100 and stabilizing an input sound field. The shape of the mount is determined according to the shape of the arrangement and is characterized in that it has an edge larger than the sensing area of the piezoelectric single crystal composite in order to stabilize the input sound signal. As shown in FIG. 4, a linear acoustic sensor array can be configured by applying a straight mount 200, and as an application embodiment, a planar acoustic sensor array can be configured by applying a flat mount 201 as shown in the drawing below in FIG. . The mount structure may have acoustic sensor alignment grooves 210 capable of aligning individual acoustic sensors.

The material of the mount 200 may be an engineering plastic material having little effect on acoustic performance, or a porous polymer having high sound absorbing properties or a mixed polymer material mixed with a scattering material to block noise flowing in from the rear.

Although the present invention as described above has been described with reference to the illustrated drawings, it is not limited to the described embodiments, and it is common knowledge in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. It is self-evident to those who have Therefore, such modified examples or variations should be included in the claims of the present invention, and the scope of the present invention should be interpreted based on the appended claims.

100: piezoelectric single crystal composite acoustic sensor
10: piezoelectric single crystal composite
20, 21: shape plate
22: dimple type shaping plate
22-1: dimple
23: composite type shaping plate
23-1: first material 23-2: second material
30: hard baffle
31: block type baffle
32: grooved baffle
32-1: Groove
33: 2-band receiving baffle
40: sound window
200: mount
210: Acoustic sensor alignment groove
201: flat mount
400: array acoustic sensor

Claims (22)

A piezoelectric single crystal composite comprising a piezoelectric single crystal material and a polymer material;
A regular plate for interviewing the upper and lower surfaces of the piezoelectric single crystal composite;
a hard baffle for interviewing the lower surface of the piezoelectric single crystal composite; and
Including an acoustic window of polyurethane or rubber material surrounding the piezoelectric single crystal composite, the shape plate, and the hard baffle,
Piezoelectric single crystal composite acoustic sensor. The method of claim 1,
Characterized in that the piezoelectric single crystal material and the polymer material are alternately laminated in the longitudinal direction of the piezoelectric single crystal composite to form a type 2-2 piezoelectric single crystal composite structure,
Piezoelectric single crystal composite acoustic sensor. The method of claim 2,
The piezoelectric single crystal material is characterized in that the Miller Indies in the crystal direction are polarized to <011>.
Piezoelectric single crystal composite acoustic sensor. The method of claim 3,
The piezoelectric single crystal material is PMN-PT (Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), PIN-PMN-PT (Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), Mn:PIN-PMN-PT (Mn doped Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 ) O ₃ -PbTiO ₃ ), PMN-PZT (Pb (Mg _2/3 Nb _1/3 ) O ₃ -PbZrO ₃ -PbTiO ₃ ) Characterized in that any one of,
Piezoelectric single crystal composite acoustic sensor. The method of claim 4,
Characterized in that the shape plate has a flat structure,
Piezoelectric single crystal composite acoustic sensor. The method of claim 5,
Characterized in that the hard baffle has a block structure having a thickness of 1/4 wavelength of the input sound wave,
Piezoelectric single crystal composite acoustic sensor. The method of claim 5,
The hard baffle has a block structure having a thickness of 1/4 wavelength of an input sound wave, and a groove is formed upward from the bottom surface.
Piezoelectric single crystal composite acoustic sensor. The method of claim 5,
Characterized in that the hard baffle has a block structure having a thickness of 1/2 wavelength of the input sound wave,
Piezoelectric single crystal composite acoustic sensor. The method of claim 4,
The shaping plate is characterized in that a plurality of dimples are formed on a flat plate structure,
Piezoelectric single crystal composite acoustic sensor. The method of claim 9,
Characterized in that the hard baffle has a block structure having a thickness of 1/4 wavelength of the input sound wave,
Piezoelectric single crystal composite acoustic sensor. The method of claim 9,
The hard baffle has a block structure having a thickness of 1/4 wavelength of an input sound wave, and a groove is formed upward from the bottom surface.
Piezoelectric single crystal composite acoustic sensor. The method of claim 9,
Characterized in that the hard baffle has a block structure having a thickness of 1/2 wavelength of the input sound wave,
Piezoelectric single crystal composite acoustic sensor. The method of claim 4,
The shaping plate is characterized in that a first material and a second material are alternately arranged in the width direction of the shaping plate, and the second material is a polymer material having lower rigidity than the first material.
Piezoelectric single crystal composite acoustic sensor. The method of claim 13,
Characterized in that the hard baffle has a block structure having a thickness of 1/4 wavelength of the input sound wave,
Piezoelectric single crystal composite acoustic sensor. The method of claim 13,
The hard baffle has a block structure having a thickness of 1/4 wavelength of an input sound wave, and a groove is formed upward from the bottom surface.
Piezoelectric single crystal composite acoustic sensor. delete A piezoelectric single crystal composite including a piezoelectric single crystal material and a polymer material, a piezoelectric single crystal composite for interviewing the upper and lower surfaces of the piezoelectric single crystal composite, and a hard baffle for interviewing the lower surface of the lower shaping plate for interviewing with the lower surface of the piezoelectric single crystal composite. A plurality of piezoelectric single crystal composite acoustic sensors comprising; and
A plurality of acoustic sensor alignment grooves are formed on one surface, and a mount to which a plurality of the piezoelectric single crystal composite acoustic sensors are mounted in the acoustic sensor alignment grooves, respectively,
array acoustic sensor. The method of claim 17
Characterized in that the piezoelectric single crystal material and the polymer material are alternately laminated in the longitudinal direction of the piezoelectric single crystal composite to form a type 2-2 piezoelectric single crystal composite structure,
array acoustic sensor. The method of claim 18
The piezoelectric single crystal material is characterized in that the Miller Indies in the crystal direction are polarized to <011>.
array acoustic sensor. The method of claim 19
The piezoelectric single crystal material is PMN-PT (Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), PIN-PMN-PT (Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 )O ₃ -PbTiO ₃ ), Mn:PIN-PMN-PT (Mn doped Pb(In _1/2 Nb _1/2 )O ₃ -Pb(Mg _2/3 Nb _1/3 ) O ₃ -PbTiO ₃ ), PMN-PZT (Pb (Mg _2/3 Nb _1/3 ) O ₃ -PbZrO ₃ -PbTiO ₃ ) Characterized in that any one of,
array acoustic sensor. The method of claim 20
Characterized in that the shape plate has a flat structure,
array acoustic sensor. The method of claim 21,
Characterized in that the hard baffle has a block structure having a thickness of 1/4 wavelength of the input sound wave,
array acoustic sensor.

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