KR102475731B1 - Quartz Glass Tube Processing Equipment - Google Patents

Abstract

Disclosed is a quartz glass tube processing device. The quartz glass tube processing device comprises: a main body part; a tube rotating part which is rotated by a drive motor in an electrically driven manner, is horizontally installed on one side of the main body part, and has a tube fixing part having a distal end at which the quartz glass tube is fixed; a transfer table device which is configured on the other side of the main body and has a transfer table provided on an upper portion thereof to move in the back-and-forth direction and the right-and-left direction; a tube size processing part which is fixedly installed on the transfer table, has a cutting wheel or a grinding wheel interchangeably mounted at the distal end thereof to be rotatable, thereby enabling length cutting of the quartz glass tube through the cutting wheel, and grinds the inner and outer circumferences of the quartz glass tube through the grinding wheel to process the quartz glass tube not into an elliptical shape but into a complete circular tube shape with uniform wall thickness; a tube surface processing part which is fixedly installed on the transfer table and arranged parallel to the tube size processing part in the back-and-forth direction, and has a wrapping member or a polishing pad interchangeably mounted at the distal end thereof, thereby pressing the inner circumferential surface and the outer circumferential surface of the quartz glass tube by the wrapping member or the polishing pad and reciprocating from side to side in the length direction of the quartz glass tube to enable wrapping and polishing processing on the quartz glass tube; and a processing liquid supply means which selectively injects wrapping liquid or polishing liquid into the quartz glass tube in accordance with the wrapping or polishing processing performed by the tube surface processing part. The quartz glass tube processing device can efficiently improve surface roughness.

Description

Quartz Glass Tube Processing Equipment}

The present invention relates to a quartz glass tube processing apparatus, and more particularly, to a quartz glass tube processing apparatus capable of greatly improving light transmittance by minimizing surface roughness by lapping and polishing a quartz glass tube while rotating it, and producing a defect-free quartz glass tube. It's about the device.

Quartz glass (silica glass or quartz glass), which is widely used in optics, semiconductors, and chemical industries, is a glass made of only pure SiO2, and refers to an impurity content of several hundred ppm or less.

SiO2 is called silica, and is divided into various types according to its crystal form, but since quartz is a representative type that exists in nature, high-purity SiO2 glass is called quartz glass.

Quartz glass can be classified into fused quartz glass and synthetic quartz glass according to manufacturing methods. While fused quartz glass is manufactured by melting natural quartz or silica sand at high temperature, synthetic quartz glass uses gaseous or liquid compounds containing Si, such as high-purity silicon chloride (SiCl4), as raw materials through chemical vapor deposition, alkoxide made according to law.

Quartz glass has a very low coefficient of thermal expansion (0.5 × 10 ^-6 /℃), excellent chemical durability, a very low coefficient of thermal expansion, and is very resistant to thermal shock and has excellent heat resistance, so it can be used even at high temperatures of 1100 ℃ or higher. In addition, it has high transmittance especially in the ultraviolet region, so it is a very essential material in the semiconductor process. It is used in various optical materials.

The flatness and surface roughness of the quartz glass substrate are processed through lapping and fixing the surface of the quartz glass substrate, polishing process, etc., in order to comply with required specifications such as flatness and low coupling, and to increase light transmittance.

On the other hand, in addition to the substrate form, there are quartz glass tubes in the form of circular tubes (drums) according to the purpose of use or installation location and shape, and these quartz glass tubes are manufactured by processing the thickness of the raw material to the design dimensions, It is necessary to increase the light transmittance by finishing the surface roughness of the inner and outer circumferential surfaces, but it is difficult to efficiently process the quartz glass tube with the existing apparatus for lapping and polishing plate-shaped quartz glass.

Accordingly, there is a demand for the development of a quartz glass tube processing apparatus capable of effectively performing surface roughness processing by lapping and polishing exclusively for the quartz glass tube.

Registered Patent No. 10-2419569 Registered Patent No. 10-1977435

The present invention was devised to solve the conventional development needs as described above, and by installing a quartz glass tube, cutting and grinding to the designed pipe length and pipe thickness, and effectively performing lapping and polishing to minimize surface roughness, An object of the present invention is to provide a quartz glass tube processing apparatus capable of improving transmittance and producing a defect-free quartz glass tube.

In addition, the present invention performs lapping and polishing while rotating the quartz glass tube by fixing it to the rotating shaft, so that the quartz glass tube is coupled to the rotating shaft in a structure that prevents eccentric rotation, as well as grinding the quartz glass tube through grinding. Another object is to provide a quartz glass tube processing apparatus having an improved form so that the surface roughness is efficiently improved by lapping and polishing by matching the concentricity of the rotation shaft with the quartz glass so that the quartz glass rotates at high speed without eccentric rotation.

In addition, according to the present invention, a lapping member for lapping and a polishing pad for polishing are provided exclusively for the outer and inner circumferences of the quartz glass tube, so that effective lapping and polishing of the inner and outer circumferences of the quartz glass tube can be performed, as well as the quartz glass tube. Regardless of the length of the tube, an improved quartz glass tube processing apparatus is provided so that the entire surface of the quartz glass tube can be uniformly surface-processed while the wrap member and the polishing pad pressurize the quartz glass tube with an appropriate pressing force and reciprocate left and right. It has a different purpose.

However, the object of the present invention is not limited thereto, and even if not explicitly mentioned, the purpose or effect that can be grasped from the solution or embodiment of the problem is also included therein, of course.

A quartz glass tube processing apparatus according to the present invention for achieving the above object includes a body portion; a tube rotating device that is electrically rotated by a driving motor, is installed horizontally on one side of the main body, and has a tube fixing portion to which a quartz glass tube is fixed and mounted at an end portion; a transfer table device provided with a transfer table moving in front and rear directions and left and right directions at an upper portion formed on the other side of the main body; It is fixed to the transfer table, and a cutting wheel or polishing wheel is mounted and rotated at the distal end, so that the length of the quartz glass tube is cut through the cutting wheel, and the inner and outer surfaces of the quartz glass tube are cut through the polishing wheel. Tube size processing unit for processing into a complete circular tube shape having a uniform tube thickness rather than an elliptical tube by grinding; It is fixedly installed on the transfer table, and is configured to be arranged side by side with the tube size processing unit in front and back, and is configured to replace and mount a wrap member or polishing pad on the end portion, so that the inner and outer peripheral surfaces of the quartz glass tube are covered with the wrap member or polishing pad. a tube surface processing unit for lapping or polishing the quartz glass tube while pressurizing and reciprocating left and right along the length of the quartz glass tube; and a processing liquid supply means for selectively injecting a lapping liquid or a polishing liquid into the quartz glass tube according to the lapping or polishing of the tube surface processing unit.

The tube surface processing unit includes movement guide means configured to move left and right on the transfer table and guide the left and right movement of the lap member and the polishing pad along the length direction of the quartz glass tube; reciprocating driving means for providing a driving force so that the lap member and the polishing pad perform left and right reciprocating motions by moving the moving guide means left and right; The front end of the movement guide means is configured to be rotatable up and down, and a mounting pin for selectively fitting and coupling the lap member or the polishing pad is configured at the distal end, so that the lap member or the polishing pad coupled to the mounting pin is placed in quartz. It may be configured to include; a tool mounting and pressurizing unit for pressurizing and adhering to the glass tube with a predetermined pressing force.

The wrap member includes an outer lap member for lapping in close contact with the outer circumferential surface of the quartz glass tube and an inner lap member for lapping in close contact with the inner circumferential surface of the quartz glass tube. It may be configured to include a polishing pad for the outer circumferential surface to perform polishing in close contact with the inner circumferential surface of the quartz glass tube and polishing in close contact with the inner circumferential surface of the quartz glass tube.

The tool mounting and pressing unit may include a hinge bar rotatably installed between a pair of rotation support units installed on both sides of the front end of the moving guide means; a pivoting panel connected to the hinge bar and configured to be rotatable up and down with respect to the movement guide means; a tool mounting panel installed at right angles to the front end of the rotating panel so as to be able to adjust the height up and down, and having a fixing hole at one end; An extension pin having the mounting pin fixed at a right angle to the front end portion and fixedly mounted to the fixing hole at the rear end portion to arrange the mounting pin parallel to the tool mounting panel at a predetermined distance.

The tool mounting panel is installed in a first position in which the fixing hole is disposed upward when the lap member or the polishing pad processes the outer circumferential surface of the quartz glass tube, and the lap member or the polishing pad is disposed on the quartz glass tube. In the case of surface processing of the inner circumferential surface, it may be configured to be installed in a second posture in which the fixing hole is disposed downward so as to be vertically reversed from the first posture.

The tool mounting and pressing unit further includes a weight unit configured to provide a pressure applied by the lap member or the polishing pad to press the quartz glass tube, wherein the weight unit includes a weight support unit having a first pin insertion hole; It includes a weight member supported by the weight supporting portion to provide a predetermined weight and having a second pin insertion hole formed therein, and when the tool mounting panel is in the first posture, the weight portion moves toward the upper end of the mounting pin to the weight supporting portion. and the weight member are sequentially fitted, and when the tool mounting panel is in the second posture, the weight portion protrudes from an end of the tool mounting panel and is inverted toward the top by the second posture. The weight support portion and the weight member may be sequentially fitted to the disposed weight coupling pin.

The tube rotating device may be configured to further include a mounting disc for coupling the quartz glass tube to the tube fixing part in an adhesive and bolted manner.

The mounting disc is made of quartz glass by filling an adhesive between a coupling end which is fitted and coupled to the inside of the end of the quartz glass tube around the front end in an interference fitting manner and a quartz glass tube to the rear side of the coupling end around the rear end. An adhesive receiving groove for adhesive bonding with the tube is formed, and a plurality of bolt coupling holes are formed through the circumferentially spaced apart and bolted to the end surface of the tube fixing part, and the bolts An eccentricity prevention hole may be formed around the coupling hole to suppress eccentric rotation of the quartz glass tube by inserting and coupling a protrusion formed at an end of the tube fixing portion to prevent the mounting disk from moving outside the tube fixing portion. .

According to the above, the present invention performs the function of improving the light transmittance by properly fitting the design dimensions well and processing the surface roughness excellently by performing all of the cutting, grinding, lapping, and polishing of the quartz glass tube. Of course, since it is configured to properly perform all functions through a simple structure and components, there is an excellent effect of ease of use.

In addition, since the lapping or polishing process is performed while the quartz glass tube is rotated in perfect concentricity with the rotation axis, it is possible to rotate at high speed without eccentricity, and thus the surface roughness can be efficiently improved.

In addition, the present invention selects a weight member of various weights and presses the quartz glass tube with an appropriate pressing force to process the surface of the quartz glass tube with a wrap member or a polishing pad, and performs uniform surface processing over the entire area of the quartz glass tube while reciprocating left and right. There are possible effects.

In addition, the various beneficial advantages and effects of the present invention are not limited to the above description, and will be more easily understood in the process of describing specific embodiments of the present invention.

1 is a front view showing a quartz glass tube processing apparatus according to an embodiment of the present invention;
2 is a plan view schematically showing a quartz glass tube processing apparatus according to an embodiment of the present invention;
3 is a cross-sectional view showing a coupling structure for mounting a tube fixing part and a quartz glass tube according to the present invention;
4 is a view showing the mounting disk of FIG. 3;
5 is a view showing the length processing state of a quartz glass tube through the tube size processing unit of the present invention;
6 is a view showing the tube thickness processing state of the quartz glass tube through the tube size processing unit of the present invention,
7 is a view showing the rotational relationship between the polishing wheel of the tube size processing unit and the quartz glass tube;
8 is a view showing a tube surface processing unit of the present invention,
9 is a view showing the state of lapping the outer circumferential surface of a quartz glass tube through the tube surface processing unit of the present invention;
10 is a view showing the state of lapping the inner circumferential surface of a quartz glass tube through the tube surface processing unit of the present invention;
11 is a view showing a state in which the tool mounting panel of FIG. 9 is viewed from the side;
12 is a view showing a coupled state of a pivoting panel and a hinge bar in the present invention;
13 is a view showing a contact state between a quartz glass tube and a wrap member in the state of lapping the quartz glass tube through the tube surface processing unit of the present invention;
Figure 14 is a perspective view showing a wrap member of the present invention, (a) is a wrap member for the outer peripheral surface, (b) is a wrap member for the inner peripheral surface.
Fig. 15 is a perspective view showing the polishing pad of the present invention, where (a) is a view showing the polishing pad for the outer circumferential surface turned upside down, and (b) is a view showing the polishing pad for the inner circumferential surface turned upside down.
16 is a view showing another form of the cam member and the second connecting shaft of the reciprocating motion driving means in the present invention;
FIG. 17 is a view showing the second connecting shaft part installed on the cam member and connected to the link bar in FIG. 16 .

The above objects, other objects, features and advantages of the present invention will be easily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed content will be thorough and complete and the spirit of the present invention will be sufficiently conveyed to those skilled in the art.

In this specification, when an element is referred to as being on another element, it means that it may be directly formed on the other element or a third element may be interposed therebetween. Also, in the drawings, the thickness of components is exaggerated for effective description of technical content.

Embodiments described in this specification will be described with reference to cross-sectional views and/or plan views, which are ideal exemplary views of the present invention. In the drawings, the thicknesses of films and regions are exaggerated for effective explanation of technical content. Accordingly, the shape of the illustrated drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes. For example, an etched region shown at right angles may be round or have a predetermined curvature. Accordingly, the regions illustrated in the drawings have attributes, and the shapes of the regions illustrated in the drawings are for exemplifying a specific form of a region of an element and are not intended to limit the scope of the invention. Although terms such as first and second are used to describe various components in various embodiments of the present specification, these components should not be limited by these terms. These terms are only used to distinguish one component from another. Embodiments described and illustrated herein also include complementary embodiments thereof.

Terms used in this specification are for describing embodiments, and are not intended to limit the present invention. In this specification, singular forms also include plural forms unless specifically stated otherwise in a phrase. The terms 'comprises' and/or 'comprising' used in the specification do not exclude the presence or addition of one or more other elements.

In describing the specific embodiments below, various specific contents are prepared to more specifically describe the invention and aid understanding. However, a reader having knowledge in this field to the extent of being able to understand the present invention can recognize that it can be used without these various specific details. In some cases, it is mentioned in advance that parts that are commonly known in describing the invention and are not greatly related to the invention are not described in order to prevent confusion for no particular reason in explaining the present invention.

Hereinafter, a quartz glass tube processing apparatus according to an embodiment of the present invention will be described with reference to the drawings.

1 and 2, the quartz glass tube processing device 10 of the present invention includes a main body 101, a tube rotating device 100, a tube size processing unit 200, a tube surface processing unit 300, It is configured to include a transfer table device 400 and a processing fluid supply means 500 .

The body part 101 supports the coupling installation of the tube rotating device 100, the tube size processing unit 200, the tube surface processing unit 300, the transfer table device 400, and the processing fluid supply means 500, It is a configuration that forms the outer appearance of the entire device.

The tube rotating device 100 is electrically rotated by a driving motor 121 and has a rotational shaft 110 installed horizontally to one side of the main body 101, and a quartz glass tube is provided at the end of the rotational shaft 110. (p) is provided with a tube fixing part 112 where the fixed mounting is made.

Specifically, the drive motor 121 is composed of a rotating shaft 110 rotated by a power transmission unit 122 made of a connection method such as a belt or chain and a pulley, and a tube fixing part 112 at the end of the rotating shaft 110 is composed

1 to 4, in the present invention, the tube rotating device 100 includes a mounting disk 130 for fixing the tube fixing part 112 and the quartz glass tube p by bonding and bolting to each other. It consists of

The mounting disk 130 is formed in a circular plate shape, and around the front end, a coupling end 131 inserted into the end of the quartz glass tube p in an interference fit is formed around the front end, and around the rear end, the coupling end 131 An adhesive receiving groove 133 filled with adhesive is formed between the quartz glass tube (p) on the rear side of the. As the adhesive 135 is filled in the adhesive receiving groove 133, the mounting disk 130 can be adhesively bonded to the quartz glass tube p.

In addition, the mounting disk 130 is circumferentially formed with a plurality of bolt coupling holes 132 spaced apart at predetermined intervals, and an eccentric prevention hole 131 is formed in the center of the bolt coupling holes 132.

At the end of the tube fixing part 112, a protrusion 113 is formed at the center, and a bolt fastening hole 114 is formed in a circumferential shape around the protrusion 113. The protrusion 113 is inserted into the eccentricity prevention hole 131, and the bolt b passes through the bolt coupling hole 132 and is screwed into the bolt coupling hole 114. In this way, the mounting disk 130 is coupled to the tube fixing part 112 with a bolt (b), and when coupled, the protrusion 113 is inserted into the eccentricity prevention hole 131, so that the mounting disk 130 rotates the shaft ( 110) does not move to the outside of the tube fixing part 112 even during high-speed rotation and is precisely positioned on the same axis as the center of the rotation shaft 110, so that the quartz glass tube (p) is not rotated eccentrically and stable rotation is achieved, resulting in good processing efficiency can be obtained.

The tube size processing unit 200 replaces the cutting wheel 201 or the polishing wheel 202 to cut the length of the quartz glass tube (p) or grind the inner and outer circumferential surfaces of the quartz glass tube to make the tube thickness uniform It is a configuration for processing into a complete circular tube shape.

In the present invention, the tube size processing unit 200 is configured on the other side of the body unit 101, and the tube rotating device 100 is configured on the left side of the body unit 101, and the rotation axis of the tube rotating device 100 The tube size processing unit 200 is formed on the right side of the main body 101 facing the 110.

On the right side of the body part 101, a transfer table device 400 having a transfer table 420 moving in the forward and backward directions and left and right directions is configured on the upper side, and the tube size processing unit 200 is configured with a transfer table 420 It is configured to be fixedly installed on top of.

The tube size processing unit 200 includes a motor 210, a power transmission unit 213 that transmits the motor 210, a spindle 215 connected to the power transmission unit 213 and rotating, and the spindle It is configured at the end of 215 and is configured to include a fixed chuck 220 coupled with the cutting wheel 201 or the grinding wheel 202.

Referring to FIG. 5, the tube size processing unit 200 is transferred left and right and back and forth through the transfer table device 400 in a state where the cutting wheel 201 is coupled to the fixed chuck 215, and the cutting wheel 201 It may be configured to cut the quartz glass tube (p) according to a set length by closely pressing the quartz glass tube (p) while rotating.

At this time, in the tube rotating device 100, only the tube size processing unit 200 rotates the cutting wheel 201 while the quartz glass tube p is not rotated and the rotation is stopped because the rotation shaft 110 is not rotated. It may be configured to cut the length of the glass tube p, and the quartz glass tube p is rotated by driving the tube rotating device 100 to increase the cutting efficiency of the quartz glass view p, and the tube dimension processing unit The cutting wheel 201 is also rotated by the driving of the 200 so that the cutting process can be performed. In addition, the quartz glass tube (p) and the cutting wheel 201 may be configured to rotate in the same direction, that is, in a clockwise direction both in a clockwise direction and in a counterclockwise direction in a counterclockwise direction.

6 and 7, the tube size processing unit 200 rotates while transferring left and right and back and forth through the transfer table device 400 in a state where the polishing wheel 202 is coupled to the fixed chuck 215. While grinding the cutting wheel 201 in close contact with the outer and inner circumferential surfaces of the quartz glass tube p, it is possible to process the quartz glass tube p to have the same tube thickness as a whole so that it can be processed into a perfect round tube shape.

The tube size processing unit 200 rotates the quartz glass tube p by first driving the tube rotating device 100 before rotating the polishing wheel 202, and then rotationally drives the polishing wheel 202 to produce the polishing wheel ( 202) is brought into close contact with the outer circumferential surface of the quartz glass tube p, as shown in FIG. As shown in (b) of FIG. 6, the polishing wheel 202 is drawn into the inside of the quartz glass tube p and moved left and right through the transfer table device 400 while making close contact with the inner circumferential surface of the quartz glass tube p. The inner circumferential surface of the tube (p) is processed into a perfect circle to make the tube thickness of the quartz glass tube (p) uniform, and the concentricity of the quartz glass tube (p) and the rotating shaft 110 are matched to match the quartz glass tube (p). It is possible to increase the processing efficiency of lapping and polishing.

In the pipe thickness processing of the quartz glass tube (p) through the polishing wheel 202, as shown in FIG. And the polishing wheel 202 rotates clockwise in the same direction, that is, clockwise, and both rotate counterclockwise in the counterclockwise direction, which is good for grinding efficiency, and as shown in FIG. When grinding the inner circumferential surface of the glass view p, it is preferable that the quartz glass tube p and the polishing wheel 202 rotate in opposite directions to each other.

Referring to Figures 1, 2, 9 to 14, the tube surface processing unit 300 is fixed to the top of the transfer table 420, and installed so as to be arranged side by side with the tube size processing unit 200, , Wrap members 301 and 302 or polishing pads 303 and 304 are replaced and mounted on the distal end, so that the inner and outer circumferential surfaces of the quartz glass tube p are pressed with the wrap member or polishing pad, and the length direction of the quartz glass tube p is It is a configuration for performing a lapping or polishing process on the quartz glass tube (p) while reciprocating left and right along it.

In the present invention, in the state in which the lapping liquid is supplied to the quartz glass tube (p) by the processing liquid supply means 500, the tube surface processing unit 300 uses the wrap members 301 and 302 to wrap the outer and inner circumferential surfaces of the quartz glass tube p can be wet lapping, and in a state in which the polishing liquid is supplied to the quartz glass tube (p) by the processing liquid supply unit 500, the tube surface processing unit 300 uses the polishing pads 303 and 304 to polish the quartz glass tube (p). ) The outer and inner circumferential surfaces of the can be polished.

Here, the lapping fluid is a lapping oil such as light oil, petroleum, mineral oil, water, olive oil, and seed oil, and a lapping agent such as GC (Green Silicon Carbide), C (silicon Carbide), WA (White Alumina), and A (Alumine). is a mixture of

The tube surface processing unit 300 is configured to include wrap members 301 and 302, polishing pads 303 and 304, an inner circumferential movement guide unit 310, a tool mounting and pressing unit 320, and a reciprocating driving unit 340. .

The moving guide means 310 is configured on the transfer table 420 and moves left and right so that the lap members 301 and 302 or the polishing pads 303 and 304 mounted at the ends move left and right along the length direction of the quartz glass tube p. It is a guide structure.

As shown in FIG. 8, the movement guide means 310 includes a vertical frame 311a vertically configured on the transfer table 420 and a support frame 311b installed horizontally on top of the vertical frame 311a. .

The movement guide means 310 is fixed to the support frame 311b and includes a movement support panel 312 having a guide bar 313, and a left and right movement panel configured to slide left and right along the movement support panel 312. (314). At this time, the left and right moving panel 314 is configured with a rotation support portion 315 configured as a pair spaced apart from each other at a predetermined interval.

The tool mounting and pressing unit 320 is configured to be rotatable up and down at the front end of the moving guide means 310 and has a mounting pin 325 for selectively fitting the wrap members 301 and 302 or the polishing pads 303 and 304 at the distal end. The lap members 301 and 302 or the polishing pads 303 and 304 coupled to the mounting pin 325 are pressed and adhered to the quartz glass tube p with a predetermined pressing force to wrap the inner and outer surfaces of the quartz glass tube p. , It is a configuration for making a polishing process.

The tool mounting and pressing unit 320 includes a hinge bar 321 rotatably installed between a pair of rotation support units 315 and a rotation panel 322 detachably bolted to the hinge bar 321 And, the tool mounting panel 323 installed perpendicularly to the front end of the rotation panel 322 so as to be able to adjust the height up and down and having a fixing hole 323a at one end, the tool mounting panel 323 and the mounting pin 325 A mounting pin 325 is fixed at right angles to the front end to be connected, and the rear end is inserted and fixed into the fixing hole 323a so that the mounting pin 325 is arranged parallel to the tool mounting panel 323 at a predetermined distance (324). ), and a mounting pin 325 installed at the front end of the extension pin 324 to selectively fit the wrap members 301 and 302 or the polishing pads 303 and 304 to the distal end.

In the present invention, the tool mounting and pressing unit 320 is in a storage state in which it is erected perpendicular to the guide means 310 as shown in FIG. 8 when not in use, and when used for lapping or polishing as shown in FIGS. 9 and 10 In the storage state, it is configured to be rotated downward by 90 degrees so that the position and posture can be changed from the guide means 310 to the use state extended toward the quartz glass tube p.

The pivoting panel 322 is configured to be detachably coupled to the hinge bar 321 by a bolt 322b as shown in FIG. 12, and is coupled to the tool mounting panel 323 as shown in FIG. 12 (a). (322a) may be configured to be coupled downward, as shown in Figure 12 (b) may be configured such that the coupling block (322a) is coupled upward.

9 to 11, a fixing hole 323a is formed at one end of the tool mounting panel 322, and a tightening bolt for tightening and fixing the rear end of the extension pin 324 inserted into the fixing hole 323a ( 323c) may be configured. In addition, the tool mounting panel 322 is formed in the form of a long hole having a predetermined length and spaced apart from the fixing hole 323a at a predetermined interval, and is made of bolts and nuts by adjusting the height of the rotation panel 322 and the tool mounting panel 322 at right angles. A coupling hole 323b is formed so that the coupling is made by the fastening member 323d.

The coupling hole 323b is connected to the bolt passing rail 323bb through which the bolt of the fastening member 323 penetrates and the coupling block 322a is coupled with the nut, and the bolt passing rail 323bb. It is configured to include a head mounting rail 323ba into which the bolt header of the fastening member 323 is inserted.

In this way, since the tool mounting panel 323 is perpendicular to the front end of the rotation panel 322 and can be installed by adjusting the height up and down, the wrap members 301 and 302 or the polishing pads 303 and 304 depend on the diameter and size of the quartz glass tube p. ) can adjust the height at which it stably adheres to the quartz glass tube (p).

The tool mounting panel 323 is in a first position in which the fixing hole 323a is disposed upward when the lap members 301 and 302 or the polishing pads 303 and 304 process the outer circumferential surface of the quartz glass tube p (see FIG. 9). ), and when the wrap members 301 and 302 or the polishing pads 303 and 304 surface-process the inner circumferential surface of the quartz glass tube p, they are upside down compared to the first posture, and the fixing holes 323a are disposed at the bottom. It is configured to be installed in two positions.

The tool mounting and pressing unit 320 may further include a weight unit 326 to adjust the pressing force by which the wrap members 301 and 302 or the polishing pads 303 and 304 press the quartz glass tube p.

The weight portion 326 is supported by a weight supporting portion 326 having a first pin fitting hole h1 and a weight supported by the weight supporting portion 326 to provide a predetermined weight and having a second pin fitting hole h2 formed therein It is configured to include member 326b.

When the tool mounting panel 323 is installed in the first posture, as shown in FIG. 9, the weight unit 326 is fitted with the weight support 326 on top of the mounting pin 325, and the weight member 326b is placed thereon. It is formed by fitting. On the other hand, when the weight unit 326 is installed in the second posture as shown in FIG. 10, the weight support 326 is inserted into the coupling pin 323e protruding from the end of the tool mounting panel 323, and the weight member ( 326b) is configured by fitting.

The weight unit 326 includes weight members 326b having various weights, and weight members 326b having an appropriate weight may be selected and applied according to the purpose of lapping or polishing or a desired finished surface.

The reciprocating driving unit 340 is configured to provide a driving force so that the lap members 301 and 302 or the polishing pads 303 and 304 move left and right by moving the moving guide unit 340 left and right.

The lap members 301 and 302 or the polishing pads 303 and 304 are configured to be smaller than the length of the quartz glass tube p to be processed, and the reciprocating motion driving means 340 is the lap members 301 and 302 or the polishing pads 303 and 304 When lapping or polishing is performed while being in contact with the rotating quartz glass tube (p), the entire surface of the quartz glass tube (p) is wrapped by reciprocating from side to side along the length direction of the quartz glass tube (p) Allows machining or polishing to take place.

The reciprocating driving means 340 is coupled to the rotating shaft of the motor 342 fixed to the side of the support frame 311b, and the cam member 343 in the form of a circular disc 343 driven to rotate, and the side of the left and right moving panel 314 A first connecting shaft portion 344 constituted by, a second connecting shaft portion 345 installed at an eccentric position on the upper end of the cam member 343, and both ends of the first connecting shaft portion 344 and the second connecting shaft portion ( 345) is configured to be rotatably connected to each other, and pushes and pulls the left and right moving panel 314 according to the rotation of the cam member 343 to reciprocate left and right, and accordingly, the wrap members 301 and 302 or the polishing pad mounted on the mounting pin 325 While reciprocating left and right (303, 304), lapping or polishing of the quartz glass tube (p) is performed.

Meanwhile, the present invention may be configured to adjust the reciprocating distance of the wrap members 301 and 302 or the polishing pads 303 and 304 according to the length of the quartz glass tube p.

16 and 17, the upper surface of the cam member 343 has an axis position for adjusting the position of the second connecting shaft portion 345 to adjust the reciprocating distance of the lap members 301 and 302 or the polishing pads 303 and 304. It includes an adjustment rail 347, and the shaft position adjustment rail 347 is formed in an inverted T shape and is formed long from the circumference of the cam member 343 toward the center. In this case, the second connecting shaft portion 345 is configured to be positioned and fixedly installed on the shaft positioning rail 347 while rotatably connecting the circular ring formed at the end of the link bar 346.

The second connecting shaft portion 345 is inserted into the positioning rail 347 and is formed in an inverted T-shape installed to be movable along the positioning rail 347 and is a positioning member having a male thread 3452 ( 3451), a fastening means 3453 made of a nut and screwed to the male screw thread 3452 to fix the positioning member 3451 to a predetermined position of the positioning rail 347, and a female screw part 3455. The lower end is screwed to the upper end of the male screw thread 3452 and the female screw part 3455 is inserted into the circular ring formed at the end of the link bar 346 to rotatably support the link bar 346. Rotation support pin 3454 and an anti-fallout member 3456 screwed to an upper end of the female screw portion 3455 and preventing the end of the link bar 346 from being removed from the female screw portion 3455.

With the above configuration, the second connecting shaft portion 345 is positioned along the positioning rail 347 to adjust the installation position of the second connecting shaft portion 345 at a distance from the center of the cam member 343, thereby adjusting the wrap members 301 and 302. ) or the left and right reciprocating distances of the polishing pads 303 and 304 can be easily adjusted.

In the transfer table device 400, the tube size processing unit 200 and the tube surface processing unit 300 are installed side by side in front and rear at the upper end, and the tube size processing unit 200 and the tube surface processing unit 300 are moved forward and backward It is configured to move the position in the direction.

The transfer table device 400 includes a left and right moving frame 410 that slides along the left and right rails 411 installed left and right on the main body 101, and a front and rear moving rail 421 installed on top of the left and right moving frame 410. ) to include a transfer table 420 that slides forward and backward, a left and right movement driver 430 that moves the left and right frame 410 left and right, and a forward and backward movement driver 440 that moves the transfer table 420 forward and backward. It consists of

The left and right driving unit 430 includes a motor 431, a power transmission unit 432 that transmits rotational force of the motor 430, and a screw thread formed on an outer circumferential surface that receives rotational force by the power transmission unit 432 and rotates. It is composed of the left and right moving screw 433 and the lower end of the left and right moving frame 410, and the left and right moving screw 433 is formed through and connected in a ball-screw method, so that the left and right movement is performed according to the rotation of the left and right moving screw 433. It is configured to include a guide block 434 to move the position of the frame 410 left and right.

The forward and backward movement driving unit 440 is disposed along the longitudinal direction of the left and right movement frame 410, is configured to be rotatable on the left and right movement frame 410, and is configured to be connected to the transfer table 420 in a ball-screw method, according to rotation. A forward and backward movement screw 441 that moves the forward and backward movement of the transfer table 420, and a front end of the forward and backward movement screw 441 is configured so that the user manually rotates the forward and backward movement screw 441 to move the transfer table 420. It is configured to include a rotation knob 443 for back and forth movement manipulation.

The processing liquid supply unit 500 is a component for selectively injecting the lapping or polishing liquid into the quartz glass tube p during lapping or polishing of the tube surface processing unit 300 .

The processing fluid supply means 500 is constituted in the main body 101, and includes a lapping fluid storage unit 512 for storing the lapping fluid, a polishing fluid storage unit 516 for storing the polishing fluid, and a lapping fluid or polishing fluid. It is configured to include a processing fluid supply passage part 520 for selectively discharging and supplying the quartz glass tube (p).

In the present invention, the lapping of the quartz glass tube (p) consists of primary lapping, secondary lapping, and tertiary lapping, and the lapping process is performed while supplying a lapping liquid containing a lapping agent of a finer particle size step by step. In particular, in the first lapping, a lapping solution containing a lapping agent having a particle size of #400 mesh is used, in the second lapping, a lapping solution containing a lapping agent having a particle size of #600 mesh is used, and in the third lapping, a lapping solution containing a lapping agent having a particle size of #800 mesh is used. A lapping liquid containing a lapping agent is used.

Accordingly, the langpi liquid storage unit 512 includes a first lapping liquid storage unit 513 for storing a lapping liquid containing a lapping agent having a #400 mesh particle size, and a second lapping liquid storage unit 513 for storing a lapping liquid containing a lapping agent having a #600 mesh particle size. It is configured to include a lapping liquid storage unit 514 and a third lapping liquid storage unit 515 for storing a lapping liquid containing a lapping agent having a particle size of #800 mesh, and the processing liquid supply passage unit 520 is a first lapping liquid. The first lapping liquid, the second lapping liquid, and the third lapping liquid stored in the storage unit 513, the second lapping liquid storage unit 514, the third lapping liquid storage unit 515, and the polishing liquid storage unit 516; It is configured to selectively supply one of the polishing liquids to the exhaust of the quartz glass tube (p).

To this end, the processing fluid supply passage 520 includes a processing fluid discharge passage 521 having a nozzle 521a at the distal end, a first lapping fluid storage section 513, a second lapping fluid storage section 514, A supply passage 521 consisting of a plurality of supply connection passages 523 connecting each of the third lapping fluid storage unit 515 and the polishing fluid storage section 516 to the processing fluid discharge passage 512, and a plurality of supply connection passages It is configured to connect the 523 and the discharge passage 521, and is installed on the supply passage 521 to connect the transfer pump 525 and any one of the plurality of supply connection passages 523 to the discharge passage 521. It is configured to include a supply flow path switching valve 530. In the present invention, the processing fluid discharge passage 521 is made of a bendable flexible pipe, and when lapping or polishing the outer circumferential surface of the quartz glass tube (p), the nozzle 521a is used to supply the lapping fluid or polishing fluid to the quartz glass tube ( When lapping or polishing the inner circumferential surface of the quartz glass tube (p), the nozzle 521a directs the lapping liquid or polishing liquid to the so circumferential surface of the quartz glass tube (p). It can be positioned to release.

During the first lapping operation of the tube surface processing unit 300, the first lapping liquid is discharged and supplied to the quartz glass tube p through the nozzle 521a, and the first lapping process is performed. The second lapping process is performed as the second lapping liquid is discharged and supplied to the quartz glass tube p through the nozzle 521a. During the third lapping operation, the third lapping liquid passes through the nozzle 521a to the quartz glass tube p. ), the tertiary lapping process can be performed while being discharged and supplied. In addition, during the polishing operation of the tube surface processing unit 400, the polishing liquid may be discharged and supplied to the quartz glass tube p through the nozzle 521a to perform the polishing process.

On the other hand, the present invention further includes a processing liquid recovery unit 540 to circulate and supply the lapping liquid or polishing liquid discharged and supplied to the quartz glass tube (p) for lapping and polishing processing to the quartz glass tube (p). configured to include

The processing fluid recovery unit 540 collects the lapping fluid or polishing fluid collected through the processing fluid receiver 541 installed to be disposed below the quartz glass tube (p) mounted on the rotating shaft 112 and the machining fluid receiver 541. A recovery tank 543 in which the liquid is discharged and stored, and a recovery pump 543 that transports the lapping liquid or polishing liquid recovered in the recovery tank 543 to the lapping liquid storage unit 512 and the polishing liquid storage unit 516. The first lapping liquid storage unit 513, the second lapping liquid storage unit 514, the third lapping liquid storage unit 515, and the polishing liquid storage unit 516 are connected to the recovery tank 543, respectively. a recovery passage part 545, and a first lapping liquid storage part 513, a second lapping liquid storage part 514, a third lapping liquid storage part 515 installed on the recovery passage part 545, By selectively connecting one of the polishing liquid storage units 516 and the recovery tank 543, one of the first lapping liquid, the second lapping liquid, the third lapping liquid, and the polishing liquid is recovered and stored in the originally stored storage unit. It is configured to include a recovery passage conversion unit 544 to be.

That is, during the first lapping process, the first lapping liquid discharged and supplied to the quartz glass tube p through the nozzle 521a is recovered to the first lapping liquid storage unit 513 through the processing liquid recovery unit 540 and circulated. While being continuously discharged and supplied to the quartz glass tube (p) through the nozzle 521a, the first lapping process is performed. Likewise, during the second lapping process, the second lapping liquid discharged and supplied to the quartz glass tube (p) is The second lapping process is performed by being recovered and circulated into the second lapping liquid storage unit 514, and during the third lapping process, the third lapping liquid is recovered and circulated to the third lapping liquid storage unit 515 to perform the third lapping process. Lapping is done. Also, during the polishing process, the polishing liquid discharged and supplied to the quartz glass tube p is recovered to the polishing liquid storage unit 516 and circulated so that the polishing process can be performed while continuously discharged and supplied to the quartz glass tube p.

On the other hand, the wrap members 301 and 302 of the tube surface processing unit 300 of the present invention are configured to include a wrap member 301 for the outer peripheral surface and a wrap member 302 for the inner peripheral surface, and the polishing pads 303 and 304 are polishing pads for the outer peripheral surface 303 and a polishing pad 304 for the inner circumferential surface,

9 to 14, the outer circumferential wrap member 301 and the inner circumferential wrap member 302 are made of a metal material, and the outer circumferential wrap member 301 is in close contact with the outer circumferential surface of the quartz glass tube p. It is made of a curved shape as much as possible, and the wrap member 302 for the inner circumferential surface is made of a curved shape so that it comes into close contact with the inner circumferential surface of the quartz glass tube (p).

At this time, each of the outer circumferential wrap member 301 and the inner circumferential wrap member 302 is provided with coupling grooves 301b and 302b into which the ends of the mounting pin 325 are fitted, respectively, and are fitted with the mounting pin 325. It can be configured to do this. Each of the wrap member 301 for the outer circumferential surface and the wrap member 302 for the inner circumferential surface is formed through long holes at both left and right ends along the width direction, and the lapping liquid is continuously supplied to the quartz glass tube (p) that rotates while the lapping liquid is accommodated. Lapping liquid accommodating holes 301a and 302a are formed. On the other hand, the inner side of the coupling groove (301b, 302b) may be configured with a magnet member that can be coupled by the mounting pin 325 and magnetic force.

In addition, each of the polishing pad 303 for the outer circumferential surface and the polishing pad 304 for the inner circumferential surface may also have coupling grooves to be fitted and coupled with the mounting pin 325, and closely adhered to the quartz glass tube (p) for polishing. Grid-shaped polishing fluid flow grooves 303a and 304a may be formed on the contact surface where contact is made to improve polishing efficiency while the polishing fluid moves.

The material of the outer circumferential polishing pad 303 and the inner circumferential polishing pad 304 may be made of ordinary polishing pads such as wool, cotton fabric, non-woven fabric, or sponge. may be configured to include a pad support panel in which a fitting groove is formed to maintain the curved shape of the polishing pad and to be fitted with the mounting pin 325 as an outer surface of such a conventional polishing pad.

Hereinafter, the operation of lapping and polishing in the present invention will be described.

As shown in FIG. 9, in the lapping process of the outer circumferential surface of the quartz glass tube (p), the quartz glass tube (p) is mounted on the rotary shaft 110 and rotates while the outer circumferential wrap member 301 is fitted to the end of the mounting pin 325. In close contact with the outer circumferential surface of the glass tube p, according to the reciprocating motion of the reciprocating driving means 340, the wrap member 301 for the outer circumferential surface reciprocates left and right along the length direction of the quartz glass tube p, and at this time, processing The lapping process can be performed by discharging the lapping liquid from the wrap member 301 covering the quartz glass tube p through a nozzle by the liquid supply means 500 and supplying the lapping liquid to the quartz glass tube p.

At this time, the outer circumferential lapping of the quartz glass tube (p) is performed by first lapping while supplying the first lapping liquid, second lapping while supplying the second lapping liquid, and progressing while supplying the third lapping liquid. The tertiary lapping process may proceed sequentially.

In the lapping process of the inner circumferential surface of the quartz glass tube p, as shown in FIG. 10, the tool mounting panel 323 and the pivoting panel 322 are reversed by 180 degrees relative to the hinge bar 321 with respect to FIG. 9 and coupled and installed, In a state where the inner circumferential wrap member 302 is fitted to the end of the mounting pin 325, the reciprocating driving means 340 is brought into close contact with the inner circumferential surface of the quartz glass tube p, which is mounted on the rotating shaft 110 and rotates. ), the inner circumferential wrap member 302 reciprocates left and right along the length direction of the quartz glass tube p, and at this time, the lapping liquid is supplied through the nozzle by the processing liquid supply means 500. By discharging and supplying to the inside of (p), lapping can be performed.

At this time, the lapping process of the inner circumferential surface of the quartz glass tube (p) is performed by first lapping process performed while supplying the first lapping liquid, second lapping process progressed while supplying the second lapping liquid, and progressed while the third lapping liquid was supplied. The tertiary lapping process may proceed sequentially.

The polishing process of the outer circumferential surface of the quartz glass tube (p) is carried out in the same manner as in FIG. The polishing process of the inner circumferential surface of the quartz glass tube p is performed in the same manner as in FIG. The polishing process can be performed with

Meanwhile, although not shown, in the present invention, when lapping or polishing the outer circumferential surface of the quartz glass tube (p), the quartz glass tube (p) prevents the lapping or polishing liquid from entering the inside of the quartz glass tube (p). ) A sealing tape may be attached to the open end.

In the above, the present invention has been shown and described in relation to preferred embodiments for illustrating the principles of the present invention, but the present invention is not limited to the configuration and operation as shown and described. Rather, those skilled in the art will appreciate that many changes and modifications to the present invention can be made without departing from the spirit and scope of the appended claims. Accordingly, all such appropriate changes and modifications and equivalents should be regarded as belonging to the scope of the present invention.

101 ... main body
100 ... tube rotating device
110 ... axis of rotation
112 ... tube fixing part
113 ... protrusion
114 ... bolt fastening hole
120 ... rotary drive
121 ... drive motor
130 ... mounting disk
131...combined end
132 ... bolt coupling hole
133 ... adhesive receiving groove
135... glue
136... eccentric prevention hole
200...Tube size processing part
201 ... cutting wheel
202 ... polishing wheel
20...motor
215...Spindle
220... fixed chuck
301... wrap member for outer surface
302... wrap member for the inner surface
303...polishing pad for outer surface
304...polishing pad for inner surface
310 ... moving guide means
312 ... movable support panel
313 ... information bar
314 ... left and right movement panel
315 ... rotation support
320 ... tool mounting and pressurization
321... hinge bar
322 ... pivoting panel
323 ... tool mounting panel
324 ... extension pin
325...mounting pin
326 ... weight part
340 ... reciprocating drive means
342 ... motor
343 ... cam member
344 ... first connecting shaft part
345 ... second connecting shaft part
346 ... link bar
347...
400 ... transfer table device
410....Left and right movement frame
420 ... transfer table
430 ... left and right movement drive unit
431...Motor
433...Left and right movement screw
434 ... guide block
440 ... front and rear movement drive unit
441... Forward and backward movement screw
443 ... rotary knob
500 ... process liquid supply means
510 ... processing liquid storage unit
512 ... lapping liquid storage unit
516 ... polishing liquid reservoir
520 ... part of the processing fluid supply passage
525 ... transfer pump
530 ... supply passage conversion unit
540 ... processing liquid recovery unit
541... processing fluid receiver
542 ... recovery tank
543 ... recovery pump
544 ... recovery passage conversion unit

Claims (5)

body part;
a tube rotating device that is electrically rotated by a driving motor, is installed horizontally on one side of the main body, and has a tube fixing portion to which a quartz glass tube is fixed and mounted at an end portion;
a transfer table device provided with a transfer table moving in front and rear directions and left and right directions at an upper portion formed on the other side of the main body;
It is fixed to the transfer table, and a cutting wheel or polishing wheel is mounted and rotated at the distal end, so that the length of the quartz glass tube is cut through the cutting wheel, and the inner and outer surfaces of the quartz glass tube are cut through the polishing wheel. Tube size processing unit for processing into a complete circular tube shape having a uniform tube thickness rather than an elliptical tube by grinding;
It is fixedly installed on the transfer table, and is configured to be arranged side by side with the tube size processing unit in front and back, and is configured to replace and mount a wrap member or polishing pad on the end portion, so that the inner and outer peripheral surfaces of the quartz glass tube are covered with the wrap member or polishing pad. a tube surface processing unit for lapping or polishing the quartz glass tube while pressurizing and reciprocating left and right along the length of the quartz glass tube;
A processing liquid supply means for selectively injecting a lapping liquid or a polishing liquid into the quartz glass tube according to the lapping or polishing of the tube surface processing unit;
The tube surface processing part,
movement guide means configured to move left and right on the transfer table and guide the left and right movement of the lap member and the polishing pad along the length direction of the quartz glass tube;
reciprocating driving means for providing a driving force so that the lap member and the polishing pad perform left and right reciprocating motions by moving the moving guide means left and right;
The front end of the movement guide means is configured to be rotatable up and down, and a mounting pin for selectively fitting and coupling the lap member or the polishing pad is configured at the distal end, so that the lap member or the polishing pad coupled to the mounting pin is placed in quartz. A tool mounting and pressing unit for pressurizing and adhering to the glass tube with a predetermined pressing force;
The wrap member includes an outer circumferential wrap member for lapping in close contact with the outer circumferential surface of the quartz glass tube and an inner circumferential wrap member for lapping in close contact with the inner circumferential surface of the quartz glass tube,
The polishing pad is configured to include a polishing pad for the outer circumference of the quartz glass tube to perform polishing in close contact with the outer circumference of the quartz glass tube, and a polishing pad for the inner circumference of the quartz glass tube to perform polishing in close contact with the inner circumference of the quartz glass tube,
The tool mounting and pressing unit,
a hinge bar rotatably installed between a pair of rotation support units installed on both sides of the front end of the moving guide means;
a pivoting panel connected to the hinge bar and configured to be rotatable up and down with respect to the movement guide means;
a tool mounting panel installed at right angles to the front end of the rotating panel so as to be able to adjust the height up and down, and having a fixing hole at one end;
and an extension pin having the mounting pin fixed at a right angle to the front end and fixedly mounted to the fixing hole at the rear end so as to arrange the mounting pin parallel to the tool mounting panel at a predetermined distance. Device.
According to claim 1,
The tool mounting panel is installed in a first position in which the fixing hole is disposed upward when the lap member or the polishing pad processes the outer circumferential surface of the quartz glass tube, and the lap member or the polishing pad is disposed on the quartz glass tube. When surface processing the inner circumferential surface of the quartz glass tube processing apparatus characterized in that it is configured to be installed in a second posture in which the fixing hole is disposed downward so as to be upside down from the first posture.
According to claim 2,
The tool mounting and pressing unit,
A weight unit configured to adjust and provide a pressure applied by the lap member or the polishing pad to the quartz glass tube,
The weight unit includes a weight supporting portion having a first pin fitting hole and a weight member supported by the weight supporting portion to provide a predetermined weight and having a second pin fitting hole formed therein,
When the tool mounting panel is in the first posture, the weight portion is configured by sequentially fitting the weight support portion and the weight member to the upper end of the mounting pin,
When the tool mounting panel is in the second posture, the weight portion protrudes from an end of the tool mounting panel and is inverted upwards by the second posture. The weight support portion and the weight member Quartz glass tube processing apparatus, characterized in that the configuration is sequentially fitted.
According to claim 3,
The quartz glass tube processing apparatus according to claim 1 , further comprising a mounting disc for coupling the quartz glass tube to the tube fixing part in an adhesive and bolted manner.
According to claim 4,
The mounting disk,
An adhesive is filled between the coupling end fitted and coupled to the inside of the end of the quartz glass tube in an interference fit manner around the front end and the quartz glass tube to the rear side of the coupling end around the rear end, and is adhesively bonded with the quartz glass tube. An adhesive receiving groove is configured to make this happen,
A plurality of bolt coupling holes are formed circumferentially at predetermined intervals to allow bolt coupling with the end face of the tube fixing unit, and a protrusion formed at an end of the tube fixing unit is inserted into and coupled to the circumference of the bolt coupling hole. and an eccentricity prevention hole for suppressing eccentric rotation of the quartz glass tube by preventing the mounting disc from moving outside the tube fixing part.

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