KR102417939B1 - Apparatus for measuring Light Detection and Ranging - Google Patents

Abstract

In the light wave detection and distance measurement apparatus according to the embodiment, a light transmission unit emitting a plurality of beams in different directions and a rear light reflected back after the emitted beam collides with a target are incident at different angles, and is incident and a light receiving unit for measuring information about the target using a plurality of back lights, and the light transmitting unit comprising a plurality of light sources emitting light and a reflector for reflecting the light emitted from the plurality of light sources, , The reflector relates to a light wave detection and distance measuring device that is arranged so that the inclination is variable.

Description

Apparatus for measuring Light Detection and Ranging

The embodiment relates to a light wave detection and distance measurement device.

Light Detection and Ranging (LiDAR) is a device that transmits a beam toward an object and receives the back light that bounces off the object and is reflected back to measure, inspect, and analyze information such as the distance or location of the object. to be.

1 is a view showing an exterior 10 of a general light wave detection and distance measurement device.

As shown in FIG. 1 , a general light wave detection and distance measurement device 10 emits beams emitted from a plurality of light sources (not shown) toward an object in various directions using a motor (not shown), and a detector (detector) ) to receive the back light.

At this time, since the portion for transmitting the plurality of beams 12 is mechanically moved in the arrow direction 20 by the motor, various restrictions may be involved. That is, it is not easy to secure the mechanical reliability of the motor part, and there is a limit in reducing the size of the light wave detection and distance measuring device 10 due to the use of the motor. In addition, a plurality of light sources and detectors are required to extend the measurement range in the vertical direction. In addition, since a condensing lens is required for a light receiving unit of a general light wave detection and distance measurement device, efficiency may be reduced, and there is a limitation in acquiring various information except to acquire distance information of an object.

This embodiment aims to solve the problem of providing a light wave detection and distance measuring device using a MEMS (Micro-Electro-Mechanical System) mirror array.

In this embodiment, a light transmission unit emitting a plurality of beams in different directions and a back light that is reflected and returned after the emitted beam collides with a target is incident at different angles, and the plurality of incident back lights is used to include a light receiving unit for measuring information on the target, and the light transmitting unit includes a plurality of light sources emitting light and a reflecting plate reflecting the light emitted from the plurality of light sources, the reflecting plate having a variable inclination It is intended as a means to solve the problem to provide a light wave detection and distance measuring device that is arranged as much as possible.

In addition, the inclination of the reflector is to provide a light wave detection and distance measuring device arranged to be variable from 0 ° to 15 ° with respect to the first direction as a means of solving the problem.

In addition, as a means of solving the problem, the plurality of light sources are disposed at different angles from a second direction intersecting the first direction to provide a light wave detection and distance measurement device.

In addition, as a means of solving the problem, the first direction is to provide a light wave detection and distance measurement device in a direction perpendicular to the ground.

In addition, the plurality of light sources may include a first light source disposed at a second angle with the second direction of the reflecting plate, a second light source disposed at a third angle with the second direction of the reflecting plate, or a second direction of the reflecting plate And to provide a light wave detection and distance measuring device including at least one of the third light source arranged to be at a fourth angle as a means of solving the problem.

In addition, the plurality of light sources may include a first light source disposed between the second direction and second to third angles of the reflecting plate, and a second light source disposed between the second direction and third to fourth angles of the reflecting plate. Or to provide a light wave detection and distance measuring device including at least one of a third light source that is disposed between the second direction and the fourth angle of the reflector to 90 degrees as a means of solving the problem.

In addition, the second angle is 0°, the third angle is 30°, and the fourth angle is 60° as a means of solving the problem to provide a light wave detection and distance measuring device.

In addition, a light transmission unit emitting a plurality of beams in different directions, and a rear light that is reflected back after the emitted beam collides with the target is incident at different angles, and the target using the plurality of incident back lights and a light receiving unit for measuring information on and a MEMS mirror module that reflects the light emitted from the reflectors and the reflector, wherein the MEMS mirror module detects a light wave that reflects the light using a single axis of rotation. and to provide a distance measuring device as a means to solve the problem.

In addition, the reflector includes a first reflector that reflects the light toward the upper surface of the MEMS mirror module, and a second reflector that reflects the light toward the lower surface of the MEMS mirror module. It is intended as a means to solve the problem to provide a light wave detection and distance measurement device including two reflection units.

In addition, the plurality of light sources are to provide a light wave detection and distance measuring device including a first light source for emitting the light toward the first reflecting unit and a second light source for emitting the light toward the second reflecting unit as a solution to

In addition, the MEMS mirror module (MEMS mirror module) as a means of solving the problem to provide a light wave detection and distance measuring device including a second housing and a rotating reflector rotatably disposed inside the housing.

In addition, as a means of solving the problem, to provide a light wave detection and distance measuring device comprising a; the rotating reflector, a body having both ends constrained to the second housing, and a reflector provided on one surface of the body.

In addition, the reflecting plate is to provide a light wave detection and distance measuring device including a coating member for reflecting the light on both the upper surface and the lower surface as a means of solving the problem.

This embodiment uses a plurality of light sources inside a MEMS (Micro-Electro-Mechanical System) mirror array to increase the detection range, thereby reducing manufacturing cost and miniaturizing a light wave detection and distance measuring device. To provide is an effect of the invention.

1 is a view showing the appearance of a general light wave detection and distance measurement device.
2 is a block diagram of an apparatus for detecting light waves and measuring a distance according to an embodiment.
3 is a block diagram of another embodiment of a light receiving unit in the light wave detection and distance measuring apparatus according to the embodiment.
4 illustrates an embodiment of a light transmitter in the light wave detection and distance measurement apparatus according to an embodiment.
5 is a diagram illustrating another embodiment of a light transmitter in the apparatus for detecting and measuring a light wave according to an embodiment.
FIG. 6 illustrates a range of light that varies depending on the angle of the light source and the angle of the reflector in the embodiment of FIG. 5 .
7 is a view showing another embodiment of a light transmitter for sensing a surface including two rotation axes in the light wave detection and distance measurement apparatus according to the embodiment.
8 is a diagram illustrating another embodiment of a light transmitter that senses a line including one rotation axis in the light wave detection and distance measurement apparatus according to the embodiment.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings to help the understanding of the present invention by giving examples and to explain the present invention in detail. However, embodiments according to the present invention may be modified in various other forms, and the scope of the present invention should not be construed as being limited to the embodiments described below. The embodiments of the present invention are provided in order to more completely explain the present invention to those of ordinary skill in the art.

Also, as used hereinafter, relational terms such as “first” and “second,” “top/top/top” and “bottom/bottom/bottom” refer to any physical or logical relationship between such entities or elements or It may be used only to distinguish one entity or element from another, without requiring or implying an order.

2 is a block diagram of a light detection and ranging (LiDAR) measuring apparatus 100A according to an embodiment.

The light wave detection and distance measurement apparatus 100A illustrated in FIG. 2 may include a light transmitter 110A, a light receiver 120A, a sensing unit 130 , and a driving controller 140 .

First, the light transmission unit 110A serves to emit a plurality of beams. To this end, the light transmission unit 110A includes a first heat sink 111 , at least one light source 112 , a transmission optical system 114 , a beam splitter 116 , and a beam steering ( It may include a beam steering) unit 118 .

At least one light source 112 serves to emit light. If the central wavelength of the light emitted from the at least one light source 112 is greater than 2 μm, since this is far-infrared light, it may not be suitable for light wave detection and distance measurement. In addition, when the wavelength of the light emitted from the at least one light source 112 is less than 0.2 μm, the beam emitted from the light transmission unit 110A may be harmful to the human body as well as an object (or object or material) It may be difficult to reach a distant target as it is absorbed by foreign substances in the air while proceeding toward the target. Accordingly, the central wavelength of the light emitted from the at least one light source 112 may be 0.2 μm to 2 μm, but the embodiment is not limited thereto.

Here, the object may be an object floating in the air or placed on the ground, or it may be a particle floating in the air. The embodiment is not limited to a specific type of object.

Also, the wavelength distribution of the at least one light source 112 may be 1 μm or less.

In addition, the at least one light source 112 may be a pulse type light source element having a constant duty rate. Also, the on time of the pulse may be 1 nm or more. In addition, the shape of the pulse may be a square wave, a triangle wave, a sawtooth wave, a sine wave, a delta function, or a sinc function. In addition, the period of the pulse may not be constant.

In addition, the at least one light source 112 may be a light source element having one or more spatial modes. In this case, the spatial mode may be expressed as the nth order of a Gaussian or Lambertian spatial mode, where n may be 1 or more.

In addition, the at least one light source 112 may be a light source element that can be expressed as a sum of linearly polarized light or circularly polarized light. In this case, the ratio of the polarization components may be expressed as 1:A based on one polarization component, and A may be 1 or less.

Although only one light source 112 is illustrated in FIG. 2 , the embodiment is not limited thereto. According to another embodiment, the number of light sources 112 may be plural. In addition, when the at least one light source 112 includes a plurality of light sources, the types of the plurality of light sources may be the same or different from each other.

Meanwhile, the heat generated by the at least one light source 112 may adversely affect the operation of the light wave detection and distance measurement apparatus 100A. Accordingly, the first heat sink 111 may discharge heat generated from the at least one light source 112 to the outside. In some cases, the first heat sink 111 may be omitted.

Meanwhile, the beam splitter 114 divides the light emitted from the at least one light source 112 into a first beam B1 and a second beam B2 . The first beam B1 split by the beam splitter 114 is emitted to the outside toward the target, while the second beam B2 is emitted to the beam steering part 118 .

Also, an intensity ratio between the first beam B1 and the second beam B2 of the light split by the beam splitter 114 may be K:1. For example, K may be greater than 0 and less than 10.

In addition, the beam splitter 114 may include an element using at least one of linear polarization, circular polarization, a spatial mode of the light source 112 , or a wavelength of the light source 112 .

Also, the beam splitter 114 may include at least one of a spatially dividing element and a temporally dividing light element.

The transmission optical system 114 may be disposed between the at least one light source 112 and the beam splitter 116 . The transmission optical system 114 may include a collimator 114A for collimating the light emitted from the at least one light source 112 . In some cases, the transmission optical system 114 may be omitted.

The beam steering unit 118 converts the second beam B2 split by the beam splitter 116 to a plurality of third beams B3 [B0, B(1-1), ... B(1-N)). , B(2-1), ... B(2-M)] to emit in different directions. Here, N may be a positive integer of 1 or more, and M may be a positive integer of 1 or more. The third beam B3 will be described in detail later.

According to an embodiment, the beam stringer 118 may include at least one optical element for transmission. In the case of FIG. 2 , the beam steering unit 118 is illustrated as including one optical element S for transmission, but the embodiment is not limited thereto. That is, the beam steering unit 118 may include only one optical element for transmission, or may include three or more optical elements for transmission. Examples are not limited thereto.

The optical element S for transmission may divide the second beam B2 incident from the beam splitter 116 into a plurality of third beams B3 to emit in different directions.

The plurality of beams emitted from the light transmitter 110A toward the target may include a first beam B1 and a third beam B3. Each of the optical elements for transmission (S) may emit a plurality of beams (B1, B3) in different directions toward a target without being mechanically rotated by a motor or the like.

The optical element S for transmission may divide the second beam B2 into a plurality of third beams B3 in different directions in response to at least one of an electrical signal, a physical signal, and a chemical signal to emit the light. Such an electrical signal, a physical signal, or a chemical signal may be provided in the form of a first control signal C1 from the driving control unit 140 to the optical transmission unit 110A. That is, there is an external stimulus, and at least one of an electrical signal, a physical signal, or a chemical signal is generated from the driving controller 140 as the first control signal C1 by the stimulus, and the generated first control signal C1 ), the traveling path (ie, emission angle) of the plurality of third beams B3 emitted from each of the optical elements S for transmission may be determined.

In addition, each of the optical elements S for transmission may be implemented as an optical phase array (OPA) for transmission. The optical phased array for transmission may generate a plurality of third beams B3 to be emitted in different directions from the second beam B2 split by the beam splitter 116 .

Each of the optical elements for transmission S that may be implemented as an optical phased array for transmission may be implemented in various ways as follows.

First, the optical element S for transmission may have a surface on which a diffraction grating is periodically formed. In this case, when at least one of the period, angle, or shape of the grating is changed, the optical element for transmission S may generate a plurality of third beams B3 to be emitted in different directions.

Also, the optical element S for transmission may have an internal structure in which a refractive index difference periodically changes. In this case, when the period is changed or the refractive index is changed, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, the optical element S for transmission may have a grating structure for polarized light that periodically turns on/off polarized light using liquid crystal. In this case, when at least one of the spacing or transmittance of the grating is adjusted, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements S for transmission may have a birefringent prism shape. In this case, when the angle of the prism is changed, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements for transmission (S) may have a structure in which an interface between air and a liquid such as oil is present. In this case, when a signal is applied from the outside to change the boundary surface or change the refractive index of the liquid, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, when the refractive index or density distribution pattern inside the medium is changed in a hologram manner, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements for transmission (S) may have a structure in which transmittance is periodically changed according to the intensity of the liquid crystal. In this case, when the period is changed or the transmittance is changed, the transmission optical element S may generate a plurality of third beams B3 to be emitted in different directions.

In addition, when the ultrasonic wave is scanned into the medium and the frequency of the ultrasonic wave is changed, the transmission optical element S may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements for transmission (S) may have a medium in which an electric field is formed in the upper, lower, left, and right sides. In this case, when the strength or frequency of the electric field is changed, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements S for transmission may have a set of lenses arranged in two or more. In this case, when the individual lenses of the lens set are moved up, down, left, and right, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements for transmission (S) may have a set of MLA (Micro Lens Array) arranged in two or more. In this case, when the individual MLAs are moved up, down, left, and right, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In addition, each of the optical elements S for transmission may have two or more MLA sets arranged therein. In this case, when the period or shape of the individual MLA is changed, the optical element S for transmission may generate a plurality of third beams B3 to be emitted in different directions.

In order for the above-described various optical elements for transmission to emit light in different directions, the range of the width for imparting a change in the above-described period (or pattern, such as a surface, etc.) is 0.1 μm to 2 mm, and is The range for changing may be greater than 1 and less than 2.7 when the wavelength is 1000 nm, and the range for changing the transmittance and reflectance described above may be greater than 0 and less than 1, but the embodiment is not limited thereto.

In addition, a plurality of third beams B3 to be emitted in different directions may be generated by complexly combining the above-described various optical elements for transmission.

In addition, in order to operate each of the optical elements for transmission (S) having various structures as described above, an electrical signal may be applied to both ends of each of the optical elements for transmission (S). In this case, the electrical signal may be a periodic voltage signal or a current signal. For example, the operating speed of the electrical signal may be 10 GHz or less.

In addition, in order to operate each of the optical elements for transmission (S) having various structures as described above, physical pressure may be applied to the optical element (S) for transmission and to change the physical position of the optical element (S) for transmission. may be In this case, the physical position of the optical element S for transmission may be moved in the optical axis direction or may be moved in two axial directions perpendicular to the optical axis direction. To this end, a magnetic field may be used, a piezoelectric element (PZT) may be used, a voice coil motor (VCM) may be used, a link structure may be used, and gravity and elasticity may be used.

The plurality of third beams B3 generated and emitted from the optical element S for transmission implementing the beam steering unit 118 are the zeroth beam BO emitted in the optical axis direction and counterclockwise from the optical axis direction. N-th 1-1 to 1-N-th beams [B(1-1), ... B(1-N)] emitted spaced apart or M-th 2-th beams emitted spaced apart clockwise from the optical axis direction It may include at least one of the 1st to 2-M beams [B(2-1), ... B(2-M)].

Further, the plurality of third beams B3 [B0, B(1-1), ... B(1-N), B(2-1), ... B(2-M)] are spaced apart from each other. and can be released. 1-1 to 1-N beams [B(1-1), ... B(1-N)] and 2-1 to 2-M beams [B(2-1), ... B(2-M)] may be emitted while being spaced apart from the 0th beam BO by a predetermined angle. For example, the 1-1 beam [B(1-1)] is spaced apart from the 0th beam BO by a 1-1 angle [θ(1-1)T], and the 1-N beam [B] (1-N)] is spaced apart from the 0th beam BO by the 1-N angle [θ(1-N)T], and the 2-1 beam [B(2-1)] is the 0th beam ( BO) and the 2-1th angle [θ(2-1)T], and the 2-M beam [B(2-M)] is the 0th beam BO and the 2-Mth angle [θ( 2-M)T].

Among the angles at which the plurality of third beams B3 are spaced apart from each other, the 1-N or 2-M beam [B(1-N), B(2-M)] is the largest from the 0th beam BO separated at an angle. The largest separation angle [θ(1-N)T or θ(2-M)T] may be less than 90°, but the embodiment is not limited thereto.

In addition, the 0th, 1-1 to 1-N and 2-1 to 2-M beams [BO, B(1-1), ... B(1-N), B(2-1) ), ... B(2-M)], the separation angle between neighboring beams may be less than 20°, but the embodiment is not limited thereto.

On the other hand, the light receiving unit 120A is a plurality of beams B1 and B3 emitted from the light transmitting unit 110A collide with a target (not shown) and then reflect and return a plurality of rear lights at different angles, Information on the object may be measured (or inspected or analyzed) by using the plurality of incident back lights.

According to an embodiment, the light receiving unit 120A may include a second heat sink 121 , a light inspecting unit 122 , a light detecting unit 124 , a filter 126A, and a receiving optical system 128 .

The light detection unit 124 receives the plurality of rear lights RB that are reflected and returned after colliding with the target at different angles and transmits them to the light inspection unit 122 at a predetermined angle.

The back light RB incident to the light detector 124 includes the 0th back light RO incident in the optical axis direction, and the i-th 1-1 to 1-i-th numbers that are spaced apart from the optical axis in the counterclockwise direction and are incident. Back light [R(1-1), ... R(1-i)] or j pieces of 2-1 to 2-j back light [R(2-1) ), ... R(2-j)]. Here, i may be a positive integer of 1 or more, and j may be a positive integer of 1 or more.

Further, the 1-1 to 1-i back lights [R(1-1), ... R(1-i)] and the 2-1 to 2-j back lights [R(2-1) , ... R(2-j)] may be incident at a distance from the 0th back light RO by a predetermined angle. For example, the 1-1 back light [R(1-1)] is spaced apart from the 0th back light RO by the 1-1 angle [θ(1-1)R], and the 1-i rear The light [R(1-i)] is spaced apart from the 0th back light RO by the 1-i angle [θ(1-i)R], and the 2-1 back light [R(2-1)] is spaced apart from the 0th back light RO by the 2-1 angle [θ(2-1)R], and the 2-j back light [R(2-j)] is the 0th back light RO and It may be spaced apart by the 2-jth angle [θ(2-j)R]. In this way, the plurality of back lights [R0, R(1-1), ... R(1-i), R(2-1), ... R(2-j)] are spaced apart from each other and the light detection unit (124) can be incident.

In addition, the light detector 124 may include at least one optical element for reception. In the case of FIG. 2 , the light detection unit 124 is exemplified as including the first and second reception optical elements D1 and D2, but the embodiment is not limited thereto. That is, according to another embodiment, the photodetector 124 may include only one optical element for reception, or may include three or more optical elements for reception. Like the optical element S for transmission, the optical elements D1 and D2 for reception may operate in response to at least one of an electrical signal, a physical signal, or a chemical signal. Such an electrical signal, a physical signal, or a chemical signal may be provided in the form of a second control signal C2 from the driving control unit 140 to the light receiving unit 120A. That is, there is an external stimulus, and at least one of an electrical signal, a physical signal, or a chemical signal is generated from the driving controller 140 as the second control signal C2 by the stimulus, and the generated second control signal C2 ), each of the first and second optical elements for reception (D1, 32) may adjust at least one of transmission or reflection efficiency for each angle.

In addition, each of the first and second optical elements for reception D1 and D2 may be implemented as an optical phased array for reception OPA. The optical phased array for reception may input a plurality of rear lights at different angles and output them at a constant angle. Each of the first and second optical elements D1 and D2 for reception that may be implemented as such an optical phased array for reception may operate in various ways as follows.

First, each of the first and second reception optical elements D1 and D2 may have a surface on which a diffraction grating is periodically formed. In this case, when at least one of the period, angle, or shape of the grating is changed, each of the first and second optical elements D1 and D2 for reception may operate.

In addition, the first and second optical elements for reception ( D1 , D2 ) may have a structure in which a difference in refractive index is periodically changed. In this case, when the period is changed or the refractive index is changed, each of the first and second optical elements D1 and D2 for reception may operate.

In addition, each of the first and second receiving optical elements D1 and D2 may have a birefringent prism shape. In this case, when the angle of the prism is changed, each of the first and second reception optical elements D1 and D2 may operate.

In addition, each of the first and second optical elements for reception ( D1 , D2 ) may have a structure in which an interface between air and a liquid such as oil is present. In this case, when an external signal is applied to change the boundary surface or change the refractive index of the liquid, each of the first and second optical elements D1 and D2 for reception may operate.

In addition, when the refractive index or density distribution pattern inside the medium is changed in a holographic manner, each of the first and second reception optical elements D1 and D2 may operate.

In addition, each of the first and second receiving optical elements D1 and D2 may have a lens set arranged in two or more. In this case, when the individual lenses in the lens set are moved up, down, left, and right, each of the first and second optical elements D1 and D2 for reception may operate.

In addition, each of the first and second receiving optical elements D1 and D2 may have a micro lens array (MLA) set arranged in two or more. In this case, when the individual MLAs are moved up, down, left, and right, each of the first and second optical elements D1 and D2 for reception may operate.

In addition, each of the first and second receiving optical elements D1 and D2 may have two or more MLA sets arranged therein. In this case, when at least one of the cycle or shape of the individual MLA is changed, each of the first and second optical elements D1 and D2 for reception may operate.

In order for the above-mentioned various receiving optical elements to operate, the range of the width for imparting a change to the aforementioned period (or a pattern such as a surface, etc.) is 0.1 μm to 2 mm, and the range for giving a change to the aforementioned refractive index is the wavelength When this is 1000 nm, it may be greater than 1 and less than 2.7, and the range for changing the transmittance and reflectance described above may be greater than 0 and less than 1, but the embodiment is not limited thereto.

In addition, the light detection unit 124 may include a combination of optical elements for reception that operate in various ways as described above.

In addition, in order to operate the first and second receiving optical elements D1 and D2 having various structures as described above, an electrical signal is applied to both ends of each of the first and second receiving optical elements D1 and D2 can be authorized to In this case, the electrical signal may be a periodic voltage signal or a current signal. For example, the operating speed of the electrical signal may be 10 GHz or less.

In addition, in order to operate the first and second receiving optical elements D1 and D2 having various structures as described above, physical pressure may be applied to the first and second receiving optical elements D1 and D2, and The physical positions of the first and second reception optical elements D1 and D2 may be changed. In this case, the physical positions of the first and second reception optical elements D1 and D2 may be moved in the optical axis direction or may be moved in two axis directions perpendicular to the optical axis direction. To this end, a magnetic field may be used, a PZT may be used, a VCM may be used, a link structure may be used, and gravity and elasticity may be used.

The angle at which the back light is incident may be adjusted in various ways. For example, the 1-i or 2-j back light [R(1-i), R(2-j)] is spaced apart from the 0th beam BO at the largest angle. The largest separation angle [θ(1-i)R or θ(2-j)R] may be made smaller than 90°, but the embodiment is not limited thereto.

In addition, the 0th, 1-1 to 1-i and 2-1 to 2-j beams [RO, R(1-1), ... R(1-i), R(2-1) ), ... R(2-j)], the separation angle between neighboring beams may be set to be smaller than 20°, but the embodiment is not limited thereto.

In addition, the reception optical system 128 may be disposed between the light inspection unit 122 and the light detection unit 124 to focus the light emitted from the light detection unit 124 and provide it to the light inspection unit 122 . . To this end, the receiving optical system 128 may include a collector 128A, but the embodiment is not limited thereto. In some cases, the receiving optical system 128 may be omitted.

In addition, the optical element S for transmission may have a MEMS (Micro-Electro-Mechanical System) mirror array. In this case, when the operating state of each pixel is controlled, the first and second optical elements for transmission S may generate a plurality of third beams B3 to be emitted in different directions. This will be described later in more detail with reference to FIGS. 4 to 8 .

3 is a block diagram of another embodiment 120B of the light receiving unit in the light wave detection and distance measurement apparatus according to the embodiment.

The light receiving unit 120B illustrated in FIG. 3 may include a second heat sink 121 , a light inspecting unit 122 , a light detecting unit 124 , a filter 126B, and a receiving optical system 128 . The light receiving unit 120B shown in FIG. 3 is the same as the light receiving unit 120A shown in FIG. 2 , except that the shape of the filter 126B is different from the filter 126A shown in FIG. 2 .

The filters 126A and 126B are disposed between the light detection unit 124 and the reception optical system 128, and selectively filter or remove noise, at least one wavelength required from the back light emitted from the light detection unit 124, and the The result may be transmitted or reflected by the optical inspection unit 122 and provided. The transmissive filter 126A as shown in FIG. 2 filters by selectively transmitting a desired wavelength, whereas the reflective filter 126A as shown in FIG. 3 may selectively reflect and filter a desired wavelength.

In some cases, filters 126A and 126B may be omitted.

Since the optical phased array for reception outputs rear light incident at different angles at a constant angle, the transmission or reflection efficiency of the filters 126A and 126B may be improved.

In addition, the wavelengths filtered by the filters 126A and 126B may be plural.

In addition, the range of the central wavelength of the at least one wavelength filtered by the filters 126A and 126B may be 0.2 μm to 2 μm, and the bandwidth of the filtered wavelength may be 1 nm or more. In addition, when the ratio of the intensity of the wavelength blocked by the filters 126A and 126B to the intensity of the selected wavelength is F:1, F may be 0.5 or less.

In addition, it may include an optical element for a filter having at least one central angle of incident light at which the transmission of the filter 126A or the reflection efficiency of the filter 126B is maximized. Here, the optical element for a filter may be implemented in various forms.

For example, the optical elements 126 - 1 and 126 - 2 for filters may be implemented in a form in which two or more layers of thin films having two or more refractive indices are stacked. Alternatively, a filter-type optical device may be implemented in a form of adjusting a refraction or reflection angle of a specific wavelength by forming a grating structure on the surface. Alternatively, an optical element for a filter may be implemented to select a specific wavelength by periodically changing the internal refractive index.

Light having a wavelength band selected by the filters 126A and 126B is transmitted or reflected and sent to the optical inspection unit 122 . At this time, when the filter 126A is a transmission type that transmits light to the light inspection unit 122, when the incident angle of the light incident on the transmission type filter 126A is 60° or less, the transmission efficiency of the filter 126A is the maximum. can be Alternatively, when the filter 126B is a reflective filter that reflects light and transmits it to the light inspection unit 122, when the angle of the light incident to the reflective filter 126B is 25° or more, the reflective efficiency of the filter 126B is maximized. can

The second heat sink 121 may serve to radiate heat generated by the optical inspection unit 122 to the outside, and may be omitted in some cases.

Meanwhile, the light inspection unit 122 may measure (or analyze) information on the object from the back light provided from the light detection unit 124 through the filters 126A and 126B.

The light inspection unit 122 may measure a time difference between the plurality of beams emitted from the light transmission unit 110A and the back light output from the light detection unit 124 . To this end, the intensity of the back light reflected back after the plurality of beams B1 and B3 emitted from the light transmission unit 110A collides with the target may be converted into an electrical signal. Alternatively, the intensity of the plurality of beams B1 and B3 emitted from the optical transmitter 110A, which is reflected back after colliding with the target, may be converted into electrical signals in time order. In this case, the optical inspection unit 122 may measure a time difference between the plurality of beams and the back light by using an electrical signal.

Also, the light inspection unit 122 may measure a time difference based on a time at which a portion of the light emitted from the light transmission unit 110A is first measured. Also, the optical inspection unit 122 may measure the time difference based on the electrical signal synchronized with the optical transmission unit 110A.

In addition, the light inspection unit 122 may be implemented by arranging one or a plurality of light receiving units in a one-dimensional or two-dimensional array. In this case, a time difference between light reflected at a predetermined position may be measured using a plurality of light receiving units. Alternatively, a spatial difference between signals and a temporal difference in each space may be measured through a plurality of light receiving units. In this case, the light-receiving signal may be classified for each pixel of the array and converted into an electric signal. For example, as a light receiving unit, APD (Avalanche Photo Diode), SPAPD (Single Photon Avalanche Photo Diode), SAPD (Single Avalanche Photo Diode), PD (Photo Diode), QWP (Quantum Well Photodiode), PMT (Photo Multiplying Tube) etc. can be used.

In addition, the light inspection unit 122 may simultaneously measure the spatial position and the time difference between the light transmitted from the light transmission unit 110A and the back light that is reflected back after colliding with the target.

In addition, the light inspection unit 122 may analyze the information on the object by using at least one of the intensity of the rear light or the spatial position of the object. Here, the information on the object to be inspected may include, for example, at least one of distance and location information of the object.

In addition, the optical inspection unit 122 may measure basic data for measuring information about the object, and transmit the measured result to an analysis unit (not shown). In this case, the analyzer may analyze the information on the object by using the basic data measured by the optical inspection unit 122 .

The light wave detection and distance measurement apparatus 100A according to the above-described embodiment may further include a first housing H1. The first housing H1 may have a shape surrounding the light transmitting unit 110A and the light receiving unit 120A. However, the first housing H1 may be omitted.

Meanwhile, the driving controller 140 may control at least one of the light transmitter 110A and the light receiver 120A. That is, the driving control unit 140 generates electrical signals, physical signals, or chemical signals in the form of first and second control signals C1 and C2, and transmits them according to the first and second control signals C1 and C2. The driving of the new optical element S and the receiving optical elements D1 and D2 can be controlled, respectively.

Here, each of the first and second control signals C1 and C2 generated by the driving control unit 140 may be in the form of a continuous wave (CW) or a continuous pulse, and the embodiment includes the first and second control signals C1 and C2. It is not limited to a specific form of the second control signals C1 and C2.

Meanwhile, the sensing unit 130 senses the first beam B1 divided by the beam splitter 116 , and transmits the sensed result to the driving control unit 140 . In this case, the driving control unit 140 generates first and second control signals C1 and C2 using the sensed result received from the sensing unit 130 , and generates the first and second control signals C1 and C2 . C2) may be used to control each of the light transmitter 110A and the light receiver 120A.

For the above-described operation, the sensing unit 130 may include a photodiode 132 and a sensing optical system 134 . The photodiode 132 senses the first beam B1 split by the beam splitter 116 and converts it into an electrical signal, and outputs the converted electrical signal to the driving controller 140 as a sensing result.

The sensing optical system 134 is disposed between the divided first beam B1 and the photodiode 132 . To this end, the sensing optical system 134 may include, for example, a plurality of prisms 134 - 1 and 134 - 2 , but the embodiment is not limited thereto.

As described above, by controlling the light transmitter 110A and the light receiver 120A using the first beam B1 split by the beam splitter 116 , the value finally inspected by the light tester 122 . can improve the precision of For example, when it is determined that the intensity of the first beam B1 is weak as a result of analyzing the result sensed by the sensing unit 130, it may be estimated that the intensity of the second beam B2 is also weak. Accordingly, in order to increase the intensity of the second beam B2 , the driving controller 140 may increase the intensity of the light emitted from the light source 112 as desired. Accordingly, due to the weak intensities of the plurality of beams B1 and B3, the intensities of the plurality of rear lights received from the light receiving units 120A and 120B are also weak, and thus the problem that information on the target cannot be accurately analyzed can be solved.

The light wave detection and distance measuring apparatus 100A according to the above-described embodiment may further include a second housing H2. The second housing H2 may have a shape surrounding the sensing unit 130 . However, the second housing H2 may be omitted.

In the light wave detection and distance measurement apparatus according to the embodiment shown in FIGS. 4 to 8 , the optical element S for transmission may have a MEMS (Micro-Electro-Mechanical System) mirror array.

4 illustrates an embodiment of the light transmitter 118A in the light wave detection and distance measurement apparatus according to the embodiment.

The light transmitting unit 118A of the present embodiment may include a first housing 118B forming an exterior, and at least one optical transmitting unit module 1181 and 1183 provided inside the first housing 118B.

The first housing 118B may have a shape surrounding the optical transmission modules 1181 and 1183, but may be omitted.

The optical transmitter modules 1181 and 1183 may be provided as a MEMS mirror array, and may include a first optical transmitter 1181 and a second optical transmitter 1183 .

In this embodiment, the illustrated sensing regions A and B may be sensed by emitting light toward the outside of the first housing 118B.

The first optical transmission unit 1181 may be disposed above the first housing 118B, and the second optical transmission unit 1183 may be disposed below the first housing 118B.

The light emitted from the first light transmission unit 1181 may sense the first sensing area B, and the light emitted from the second light transmission unit 1183 may sense the second sensing area A.

The first optical transmission unit 1181 is disposed inside the first optical transmission unit housing 118A-1 and the second optical transmission unit housing 118A-1 providing a space inside the first optical transmission unit 1181 to transmit light. The first light emitting unit 118A-5 that emits light and the light emitted from the first light emitting unit 118A-5 are reflected toward the first sensing area B among the outside of the first light transmitting unit housing 118A-1. It may include a first reflecting plate (118A-3).

The second optical transmission unit 1183 is disposed inside the second optical transmission unit housing 118A-2 and the second optical transmission unit housing 118A-2 providing a space inside the second optical transmission unit 1183 to transmit light. The second light emitting unit 118A-6 that emits light and the light emitted from the second light emitting unit 118A-6 are reflected toward the second sensing area A among the outside of the second light transmitting unit housing 118A-2. It may include a second reflecting plate (118A-4).

The sensing angles of the first optical transmission unit 1181 and the second optical transmission unit 1183 have a trade-off relationship with the size and resonance frequency of the first reflection plate 118A-3 and the second reflection plate 118A-4. Because it has, it may be 0 degrees to 30 degrees.

Equation 1 is an expression describing the relationship between the sensing angle, the sizes of the first and second reflecting plates 118A-3 and 118A-4, and the resonance frequency.

는 감지각도, f0은 공진주파수, Y는 제1반사판(118A-3) 및 제2반사판(118A-4)의 세로길이 및 Z는 제1반사판(118A-3) 및 제2반사판(118A-4)의 높이를 의미한다.To explain the main parameters in this regard,

is the sensing angle, f0 is the resonance frequency, Y is the vertical length of the first reflecting plate 118A-3 and the second reflecting plate 118A-4, and Z is the first reflecting plate 118A-3 and the second reflecting plate 118A-4 ) is the height of

)를 증가시키기 위해서는 공진주파수 및 Y는 제1반사판(118A-3) 및 제2반사판(118A-4)의 세로길이 및 Z는 제1반사판(118A-3) 및 제2반사판(118A-4)의 높이가 감소되어야 한다.That is, the sensing angle (

) to increase the resonance frequency and Y is the vertical length of the first reflecting plate 118A-3 and the second reflecting plate 118A-4, and Z is the first reflecting plate 118A-3 and the second reflecting plate 118A-4 should be reduced in height.

However, when the resonance frequency is reduced, there is a risk that the vibration system itself of this embodiment becomes unstable, and Y is the first reflecting plate 118A-3 and the second reflecting plate 118A due to the characteristics of MEMS (Micro-Electro-Mechanical System). -4) and Z, there is a limit in reducing the height of the first reflecting plate 118A-3 and the second reflecting plate 118A-4.

Therefore, as shown in FIG. 4 , in the light wave detection and distance measurement apparatus of the present embodiment for this reason, the areas detectable by the first light transmission unit 1181 and the second light transmission unit 1183 are the first sensing area (B), respectively. And since it is limited to the second sensing area (A), this embodiment may include at least two or more optical transmitter modules (1181, 1183) in order to eliminate an area where light wave detection and distance measurement are not performed.

5 is a view showing another embodiment of the light transmitter in the light wave detection and distance measurement apparatus according to the embodiment.

The other embodiment shown in FIG. 5 differs from the embodiment shown in FIG. 4 in that a plurality of light sources 118B-2 and 118B-3 are disposed inside one optical transmission unit 118B. have.

Referring to FIG. 5 , the light transmission unit 118B of the light wave detection and distance measurement device according to the present embodiment includes a first housing 118B that forms an exterior, and a plurality of light sources disposed inside the first housing 118B to emit light (118B-2 118B-3), a reflector 118B-1 that reflects the light emitted from the light source 118B-2 118B-3 to the sensing regions A and B located outside the first housing 118B. may include

The first light source 118B-2 may be disposed at an upper portion with respect to the incident normal X, and the second light source 118B-3 may be disposed below with respect to the incident normal X.

The first light source 118B-2 may emit light toward the reflective plate 118B-1 at a first angle of incidence θ1 with respect to the incident normal X, and the second light source 118B-3 may have an incident normal Light may be emitted toward the reflection plate 118B-1 at a second incident angle θ2 with respect to (X).

In this case, if necessary, the first angle of incidence θ1 and the second angle of incidence θ2 may be the same as or different from each other, and are not limited to the embodiment illustrated in FIG. 5 .

The reflector 118B-1 may have a variable inclination.

The light emitted from the first light source 118B-2 and the second light source 118B-3 at the same or different incident angles is reflected by the reflecting plate 118B-1 to the sensing region ( A, B) can be sensed.

As described above, when the resonant frequency is reduced, there is a risk that the vibration system itself of this embodiment becomes unstable, and Y is the first reflecting plate 118A-3 and the second due to the characteristics of MEMS (Micro-Electro-Mechanical System). The vertical length and Z of the second reflecting plate 118A-4 maintain the sensing angle because there is a limit to reducing the height of the first reflecting plate 118A-3 and the second reflecting plate 118A-4, but one MEMS: Micro-Electro-Mechanical System By using a mirror array, production costs can be reduced and the system itself has the effect of being simplified.

FIG. 6 illustrates a range of light that varies depending on the angle of the light source and the angle of the reflector in the embodiment of FIG. 5 .

6 (a), (c), (e) shows a state in which the reflecting plate 118B-1 is not inclined in the first direction, and FIGS. 6 (b), (d), (f) are the reflecting plates ( 118B-1) shows a state inclined by a first angle in the first direction.

The first direction may be a direction perpendicular to the ground, and the first angle may be 15 degrees.

6(a) and (b) show a state in which the first light source 118B-2 is inclined by a second angle from a second direction perpendicular to the first direction, and FIGS. 6(c), ( d) shows a state in which the first light source 118B-2 is tilted by a third angle from the second direction perpendicular to the first direction, and FIGS. 6(e) and (f) show the first light source 118B- 2) shows a state inclined by a fourth angle from the second direction perpendicular to the first direction.

The second direction may be a direction parallel to the ground, the second angle may be 0 degrees, the third angle may be 30 degrees, and the fourth angle may be 60 degrees.

Hereinafter, it will be described as shown in the drawings for convenience, but unlike shown in the present embodiment, the first to fourth angles may be modified as needed, and the present invention is not limited thereto.

If the description is based on the first light source 118B-2, when the first light source 118B-2 is positioned to form 0 degrees with the second direction as shown in FIGS. 6(a) and 6(b), the reflecting plate 118B Since -1) can be provided to be tiltable left and right by 15 degrees from the first direction, the sensing angle that can be sensed by the light transmission unit 118A with one light source is -30 degrees with respect to the second direction. to 30 degrees.

6(c) and (d), when the first light source 118B-2 is positioned to form 30 degrees with the second direction, the reflector 118B-1 tilts left and right by 15 degrees from the first direction ( Tilting), the sensing angle that can be sensed by the light transmission unit 118A with one light source may be -60 degrees to 60 degrees with respect to the second direction.

When the first light source 118B-2 is positioned to form 60 degrees with the second direction as shown in FIGS. 6(e) and 6(f), the reflector 118B-1 tilts left and right by 15 degrees from the first direction ( Tilting), the sensing angle that can be sensed by the light transmission unit 118B with one light source may be -90 degrees to 90 degrees with respect to the second direction.

In addition, since a plurality of first light sources 118B-2 can be disposed as described above, a large area in real time with a simple structure with only one MEMS (Micro-Electro-Mechanical System) mirror array It has a sensing effect.

7 is a diagram illustrating another embodiment of a light transmitter including two rotation axes to sense a surface in the light wave detection and distance measurement apparatus according to the embodiment.

The light transmission unit 118C of this embodiment includes a housing 118C-3 forming an exterior, a light source 118C-2 disposed inside the housing 118C and emitting light, and a light source 118C rotatable in both directions. -2) may include a MEMS mirror module 118C-1 that reflects the light emitted from the housing 118C-3 toward the front side.

The housing 118C-3 may be disposed to form the exterior of the optical transmission unit 118C, which is an example, and the housing 118C-3 may not be provided as needed, and the scope of rights is not limited thereto. No.

The MEMS mirror module 118C-1 is disposed inside the body 1181C-1 and the body 1181C-1, is rotatably disposed based on two axes, and reflects the light incident from the light source 118C-2. A rotation reflector 1187C may be included.

The rotation reflector 1187C has a first rotational shaft 1181C disposed so that both ends are rotatable inside the body 1181C-1 in the first direction, both ends of the body 1181C- in a second direction perpendicular to the first direction 1) disposed so as to be rotatable inside the second rotation shaft 1183C, the first rotation shaft 1181C and the second rotation shaft 1183C are disposed at the intersection point to reflect the light incident from the light source (118C-2) A reflector 1185C may be included.

In this embodiment, the reflective plate 1185C may further include a reflective coating member (not shown) for reflecting the light incident from the light source 118C-2 toward the front surface of the housing 118C-3.

The first direction and the second direction may be Y-axis and Z-axis perpendicular thereto, respectively, when it is assumed that the direction toward the front of the housing 118C-3 is the X-axis as shown in the drawing.

The above-described MEMS mirror module 118C-1 is sufficient if there are two rotation axes of the first rotation shaft 1181C and the second rotation shaft 1183C, and may be changed and applied as needed, and the scope of rights is not limited thereto.

Hereinafter, the sensing principle of the MEMS mirror module 118C of this embodiment will be described.

First, light emitted from the light source 118C-2 is incident on the reflection plate 1185C of the rotation reflection unit 118C-3.

The incident light is reflected toward one point on the front surface of the housing 118C-3 by the reflecting plate 1185C.

At this time, the reflector 1185C is rotated with respect to the first direction by the first rotational shaft 1181C, and rotated based on the second direction perpendicular to the first direction by the second rotational shaft 1183C. rotates the light.

Accordingly, the light emitted from the light source 118C-2 is reflected toward the sensing surface C. As shown in FIG.

8 is a diagram illustrating another embodiment of a light transmitter for sensing a line including one rotation axis in the light wave detection and distance measurement apparatus according to the embodiment.

The light transmission unit 118D of this embodiment includes a housing 118D-6 forming an exterior, a plurality of light sources 118D-2 and 118D-3 that are disposed inside the housing 118D-6 and emit light, in both directions. A plurality of reflectors 118D-4 and 118D-5 that are rotatably disposed and reflect light emitted from the plurality of light sources 118D-2 and 118D-3, and a plurality of reflectors 118D-4 and 118D-5 ) may include a MEMS mirror module 118D-1 that reflects the light reflected from the housing 118D-6 toward the front side.

The housing 118D-6 may be disposed to form the exterior of the optical transmission unit 118D, which is an embodiment, and the housing 118D-6 may not be provided if necessary, and the scope of rights is not limited thereto. No.

The plurality of light sources 118D-2 and 118D-3 may include a first light source 118D-2 disposed on an upper portion of the interior of the housing 118D-6 and a second light source 118D-3 disposed on a lower portion of the housing 118D-6. can

As shown in FIG. 8 , it may be disposed on the upper and lower portions, or may be disposed at different positions of the housing 118D-6.

The plurality of light sources 118D-2 and 118D-3 emit light emitted from the plurality of light sources 118D-2 and 118D-3 to sensing regions L1 and L2 provided on the front surface of the MEMS mirror module 118D-1. It suffices only to reflect toward the .

The plurality of reflectors 118D-4 and 118D-5 of the embodiment may be disposed on the upper and lower portions of the interior of the housing 118D-6, and may be disposed on the upper and lower portions as shown in FIG. 8 or the housing. (118D-6) may be placed in other locations.

It is not sufficient for the plurality of reflection units 118D-4 and 118D-5 to reflect the light emitted from the plurality of light sources 118D-2 and 118D-3 toward the MEMS mirror module 118D-1. not limited to

The MEMS mirror module 118D-1 is disposed inside the body 1180D and the body 1180D, is rotatably disposed based on two axes, and receives light incident from the plurality of light sources 118D-2 and 118D-3. It may include a rotation reflector (1185D) for reflecting.

The rotation reflector 1185D is disposed on one surface of the rotation shaft 1181D, the rotation shaft 1181D, both ends of which are rotatably disposed inside the body 1181C-1 in the first direction, and a plurality of light sources 118D-2 and 118D -3) may include a reflector 1183D that reflects light incident thereon.

In this embodiment, the reflective plate 1183D may further include a reflective coating member (not shown) for reflecting the light incident from the plurality of light sources 118D-2 and 118D-3 toward the front surface of the housing 118D-6. can

Unlike the embodiment described with reference to FIG. 7 , in the rotational reflector 1185D of this embodiment, instead of a single light source, a plurality of light sources 118D-2 and 118D-3 are disposed above and below based on the rotational reflection unit 1185D. Therefore, the reflective plate 1183D of the present embodiment may include both the upper surface and the lower surface of the reflective coating member.

Hereinafter, the sensing principle of the MEMS mirror module 118D of this embodiment will be described.

First, light is emitted from the first light source 118D-2 toward the first reflection unit 118D-4, and light is emitted from the second light source 118D-3 toward the second reflection unit 118D-5. will emit

The light reaching the first reflecting unit 118D-4 is reflected toward the upper portion of the reflecting plate 1183D of the MEMS mirror module 118D-1 in the first reflecting unit 118D-4, and the second reflecting unit ( The light reaching 118D-5 is reflected from the second reflecting unit 118D-5 toward the lower portion of the reflecting plate 1183D of the MEMS mirror module 118D-1.

The light reflected toward the upper portion of the reflector 1183D is reflected toward a point on the first sensing line L1 , and the light reflected toward the lower portion of the reflector 1183D is reflected toward a point on the second sensing line L2 . will be reflected towards

At this time, the first sensing line L1 and the second sensing line L2 by the reflecting plate 1183D which is integrally rotatably arranged by the rotating shaft 1181D which is rotatably arranged inside the rotating reflecting unit 1185D. ), the light reflected toward a point may be rotated to sense sensing lines L1 and L2 having a circumference connecting the first sensing line L1 and the second sensing line L2 as a trajectory.

100A, 100B: Light wave detection and distance measuring device 110A, 110B, 110C, 110D: Optical transmission unit
111: first heat sink 112: at least one light source
114: transmission optical system 116: beam splitter
120A, 120B: light receiving unit 124: light detecting unit 126A, 126B: filter 128: receiving optical system 132: photodiode 134: sensing optical system 1181: first light transmitting unit 1183: second light transmitting unit
118A-5: first light emitting part 118A-3: first reflecting plate
118A-1: first optical transmission unit housing 1185: rotation reflector

Claims (13)

an optical transmitter emitting a plurality of beams in different directions; and
and a light receiving unit that injects the reflected back light from different angles after the emitted beam collides with the target and measures information on the target using a plurality of incident back lights,
The optical transmission unit
a plurality of light sources emitting light; and
a reflection plate disposed in a direction facing the plurality of light sources to reflect the light emitted from the plurality of light sources; including,
The reflector is disposed such that the inclination is variable with respect to the first direction perpendicular to the ground,
The plurality of light sources
a first light source disposed above the incident normal to emit light toward the reflector at a first incident angle; and
A light wave detection and distance measurement device including a second light source disposed below the incident normal and emitting light toward the reflector at a second angle of incidence. According to claim 1,
The light wave detection and distance measuring device is disposed so that the inclination of the reflector is variable from 0° to 15°. delete delete delete delete delete an optical transmitter emitting a plurality of beams in different directions; and
and a light receiving unit that injects the reflected back light from different angles after the emitted beam collides with the target and measures information on the target using a plurality of incident back lights,
The optical transmission unit
a first housing;
a first light source and a second light source respectively disposed above and below the incident normal to emit light;
a plurality of reflection units mounted on the inner surface of the first housing to face each other and reflecting the light emitted from the first light source and the second light source, respectively; and
Including; a MEMS mirror module for reflecting the plurality of lights emitted from the reflection unit, respectively;
The MEMS mirror module reflects the plurality of lights using one rotation axis,
the reflector,
a first reflector for reflecting the light emitted from the first light source toward the upper surface of the MEMS mirror module in the same axial direction; and
Light wave detection and distance measuring apparatus including a; delete delete 9. The method of claim 8,
The MEMS mirror module (MEMS mirror module),
a second housing; and
A light wave detection and distance measuring device comprising a; a rotation reflector rotatably disposed inside the second housing. The method of claim 11, wherein the rotation reflector,
a body having both ends constrained to the second housing; and
Light wave detection and distance measuring device including; a reflector provided on one surface of the body. 13. The method of claim 12,
The reflector is a light wave detection and distance measuring device including a coating member for reflecting the light on both the upper surface and the lower surface.

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