KR102412917B1 - microscope - Google Patents

Abstract

The present invention provides a microscope. The microscope includes a measuring unit on which a sample is disposed, a first optical system providing a first light toward a side surface of the measuring unit, a second optical system providing a second light toward a lower surface of the measuring unit, and disposed on the upper surface of the measuring unit, A third optical system providing a third light to the measuring unit, and receiving the first light or the second light incident on the measuring unit to detect a first optical signal obtained from the sample, and the third optical system are provided and a detection optical system for detecting a second light signal from the sample by the third light.

Description

microscope

The present invention relates to a microscope, and more particularly to a microscope having the functions of a near-field scanning microscope (NSOM/SNOM) and a penetrating light microscope (PSTM).

In general, a near-field scanning microscope (NSOM/SNOM) or a photon scanning-tunneling microscope (PSTM) may detect an optical signal of a sample existing in a near-field. This method can overcome the diffraction limit of a conventional far-field microscope, so that it has a resolving power of less than half (1/2) the wavelength of the incident light. do.
In a general near-field scanning microscope (NSOM/SNOM), incident light is guided to an optical fiber probe, irradiated to a sample in the near field, and an optical signal is reflected in a far-field (far-field) using an objective lens present on the opposite side. field) is detected. A photon scanning-tunneling microscope (PSTM) transmits total internal reflection (TIR) of an incident light source to a prism from the opposite side of the sample at an angle of incidence greater than or equal to a critical angle, and is then applied to the total reflection surface of the prism. The near-field optical signal of the sample existing inside the generated evanescent wave can be collected and measured with a fiber probe.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a microscope having functions of a near-field scanning microscope and a light scanning penetrating microscope.

The present invention provides a microscope. The microscope includes a measuring unit on which a sample is disposed, a first optical system providing a first light toward a side surface of the measuring unit, a second optical system providing a second light toward a lower surface of the measuring unit, and disposed on an upper surface of the measuring unit, A third optical system providing a third light to the measurement unit and receiving the first light or the second light incident on the measurement unit to detect a first optical signal obtained from the sample, and the third optical system are provided and a detection optical system for detecting a second light signal from the sample by the third light.
In one example, the third optical system has a tapered tip toward the measurement unit, and is connected to a fiber probe tip for acquiring the first optical signal from the measurement unit, and the optical probe tip, and transmits the first optical signal and an optical fiber, and a light receiving element receiving the optical signal from the optical fiber.
In one example, the light receiving element includes a photomultiplier tube (PMT) or a photodiode (APD).
In one example, the third optical system provides a third light source providing the third light, an optical fiber transmitting the third light provided by the third light source, and the third light to the measurement unit, and a fiber probe tip with a tip toward the measurement portion tapered.
According to an example, it further includes a piezo scanning device for moving the position of the third optical system.
In an example, the first optical system includes a light source unit providing the first light to the measuring unit and an angle adjusting unit adjusting an incident angle at which the first light is incident to the measuring unit.
In one example, the angle adjusting unit includes a micrometer capable of vertical movement, a protrusion connected to the micrometer, a lever physically connected to the protrusion and a goniometer connected to the lever to adjust the angle of the light source unit.
In an example, the light source unit includes a first light source providing the first light, a collimator collimating the first light, a reflector reflecting the first light to the measuring unit, and a filter disposed between the collimator and the reflector includes wealth.
In one example, the measuring unit is one of a slide glass, a prism, or a combination of a slide glass and a prism.
In one example, the prism has a refractive index of 1.4 to 1.9.
In one example, the detection optical system includes at least one barrel, at least one eyepiece on the barrel, and an image pickup device on the eyepiece.
In one example, it further includes a connection part for connecting the detection optical system and the second optical system, and an objective lens provided between the connection part and the measurement part.
According to an example, the imaging device further includes a lighting device disposed to face the measurement unit, and an illumination stage for adjusting positions of the imaging device and the lighting device.
A microscope according to another embodiment of the present invention is provided. The microscope includes a measuring unit disposed on the upper surface of the housing, an angle adjusting unit coupled to the upper surface of the housing, contacting the angle adjusting unit, and coupled to a side wall of the housing to provide first light toward the side of the measuring unit A light source unit, an upper optical system disposed on the upper surface of the measuring unit to provide a third light, and receiving the first light or the second light to the measuring unit to detect a first optical signal obtained from the sample, the measuring unit A lower optical system that provides a second light toward a lower surface, a detection optical system that receives the third light provided by the third optical system and detects a second optical signal from the sample, and a stage that moves the detection optical system and the upper optical system including, wherein the upper optical system has an optical part, an optical fiber connected to the optical part, and a fiber probe tip connected to the optical fiber and tapering a tip toward the measuring part.
In an example, the optical unit is a light receiving element that receives the optical signal obtained from the sample by the second light from the optical fiber.
In an example, the optical unit is a light source providing the third light.
In one example, the tip of the fiber probe tip toward the measuring part is tapered, and the diameter of the tip is 100 nm or less.
The present invention provides a microscope according to another embodiment. The microscope includes a measuring unit on which a sample is disposed, an upper surface of the measuring unit, an incident optical system providing incident light to the measuring unit, and a lower surface of the measuring unit, and is disposed from the sample through the incident light provided by the optical system. a detection optical system for detecting an optical signal obtained, wherein the incident optical system includes a light source, an optical fiber that transmits the incident light provided by the light source, and a fiber that provides the incident light to the measurement unit, and a tip portion toward the measurement unit is tapered It has a probe tip.
In one example, the detection optical system includes an objective lens, at least one barrel connected to the objective lens, at least one eyepiece on the barrel, and an imaging device on the eyepiece.

According to an embodiment of the present invention, a microscope having functions of a near-field scanning microscope and a light scanning penetrating microscope may be provided. The microscope can measure the optical signal of the sample according to reflection and scattering at various angles with one microscope, and can measure the optical signal of the sample through transmission.

1 is a cross-sectional view showing a microscope according to an embodiment of the present invention.
2 is a cross-sectional view showing a lower portion of a microscope according to an embodiment of the present invention.
3 is a side view showing a lower portion of a microscope according to an embodiment of the present invention.
4 is a cross-sectional view showing an upper portion of a microscope according to an embodiment of the present invention.
5 is an enlarged view of a measurement unit and a sample according to an embodiment of the present invention.
6 is an enlarged view of a measurement unit and a sample according to another embodiment of the present invention.
7 is a cross-sectional view showing a microscope according to an application example of the present invention.
8 is a cross-sectional view showing an upper portion of a microscope according to an application example of the present invention.
9 is a plan cross-sectional view showing an upper portion of a microscope according to an application example of the present invention.

Advantages and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only this embodiment serves to complete the disclosure of the present invention, and to obtain common knowledge in the technical field to which the present invention pertains. It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.
In addition, the embodiments described herein will be described with reference to cross-sectional and/or plan views, which are ideal illustrative views of the present invention. In the drawings, thicknesses of films and regions are exaggerated for effective description of technical content. Accordingly, the shape of the illustrative drawing may be modified due to manufacturing technology and/or tolerance. Accordingly, embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process. For example, the etched region shown at a right angle may be rounded or have a predetermined curvature. Accordingly, the regions illustrated in the drawings have a schematic nature, and the shapes of the illustrated regions in the drawings are intended to illustrate specific shapes of regions of the device and not to limit the scope of the invention.
1 is a cross-sectional view showing a microscope according to an embodiment of the present invention.
Referring to FIG. 1 , the microscope 1 includes a measurement unit 10 , a first optical system 100 , a second optical system 210 , a detection optical system 220 , a third optical system 320 , and a stage 430 . can do. The measurement unit 10 , the first optical system 110 , the second optical system 210 , and the detection optical system 220 may be disposed inside the housing 20 . The measuring unit 10 may be fixedly coupled to the upper surface of the housing 20 , and the third optical system 320 may be disposed on the upper surface of the housing 20 . The microscope 1 may further include a piezo injection device 310 provided on the upper surface of the housing 20 . The third optical system 320 , the measurement unit 10 , and the detection optical system 220 may be vertically aligned. The second optical system 210 and the detection optical system 220 may be aligned back and forth as shown in FIG. 3 . The first optical system 100 may include a light source unit 110 and an angle adjustment unit 120 . The angle adjusting unit 120 may be coupled to the upper surface of the housing 20 . The light source unit 110 is coupled to the sidewall of the housing 20 , and may be moved by the angle adjusting unit 120 . The second optical system 210 and the detection optical system 220 may be moved by a stage 430 to be described later.
2 is a cross-sectional view showing a lower portion of a microscope according to an embodiment of the present invention.
1 and 2 , a sample ( 12 of FIG. 5 ) may be disposed on the measurement unit 10 . The measuring unit 10 may include a slide glass 11 and a prism 13 (see FIGS. 5 and 6 ). The measurement unit 10 may be a preparation that supports the sample (12 of FIG. 5 ). The sample (12 in FIG. 5 ) may be nanoparticles. The slide glass 11 may transmit incident light. The prism 13 may have a refractive index of about 1.4 to about 1.9. For example, the prism 13 may include silica (n=1.459). Alternatively, the prism 13 may include at least one of BK7 (n=1.517), SF10 (n=1.728), SF11 (n=1.784), or LaSF N9 (n=1.850) commercially called in the glass industry. . The prism 13 is capable of diffusing, refracting, and reflecting the provided light. The prism 13 may have a triangular, hemi-cylindrical, hemi-spherical, or trapezoidal shape.
The first optical system 100 may include a light source unit 110 and an angle adjustment unit 120 . The first optical system 100 may be disposed on a side surface of the measurement unit 10 . The light source unit 110 may include a first light source 112 , a filter unit 114 , a collimator 116 , and a reflector 118 . The first light source 112 may provide monochromatic or multi-colored first light to the measurement unit 10 . For example, the first light source 112 may generate a monochromatic light such as a gas laser, a semiconductor laser, or a laser diode, or may generate a multicolored light such as a halogen lamp, a xenon lamp, or a white light emitting diode. . The filter unit 114 may include a chromatic filter or a polarizer. The color filter may filter the multicolor first light into monochromatic incident light. The polarization filter may linearly or elliptically polarize the first light. The collimator 116 may be disposed between the first light source 112 and the reflector 118 . The first light provided by the first light source 112 may be collimated as expanded parallel light in the collimator 116 . The collimator 116 may include a plurality of lenses. The reflector 118 may reflect the collimated first light to the measurement unit 10 .
The angle adjustment unit 120 may include a micrometer 122 , a goniometer 124 , a lever 126 , and a protrusion 128 . The micrometer 122 may move up and down. The position of the light source unit 110 may be adjusted through the micrometer 122 . The goniometer 124 may adjust the angle at which the first light generated from the first light source 112 is incident on the measurement unit 10 . The goniometer 124 may be in the form of a bar having a constant radius of curvature. The light source unit 110 is connected to the goniometer 124 to move. The lever 126 may be fixed to the light source unit 110 . The lever 126 may include a spring and may be physically connected to the protrusion 128 to adjust the angle of the light source 110 . As the micrometer 122 moves up and down, the lever 126 and the protrusion 128 may come into contact with each other, and as the lever 126 moves, the position of the light source unit 110 may be moved. As the position of the light source unit 110 moves, the angle of incidence of the first light incident on the measurement unit 10 may be adjusted.
The stage 430 may move the second optical system 210 and the detection optical system 220 vertically or horizontally. The stage 430 may include a first stage 432 , a second stage 434 , and a stage micrometer 436 . The first stage 432 may be disposed at the lower end of the stage 430 to be coupled to the housing 20 . The first stage 432 may move the second optical system 210 and the detection optical system 220 left and right. The second stage 434 and the stage micrometer 436 are connected to the first stage 432 , and may move the second optical system 210 and the detection optical system 220 up and down. The second stage 434 , the second optical system 210 , and the detection optical system 220 may be connected to each other.

3 is a side view showing a lower portion of a microscope according to an embodiment of the present invention.
1 and 3 , the second optical system 210 may be disposed on the lower surface of the measurement unit 10 . The second optical system 210 may include a second light source 212 , a collimator 214 , a half mirror 216 , and a reflection mirror 218 . The second light source 212 may provide monochromatic or multi-colored second light to the measurement unit 10 . For example, the second light source 212 may generate a monochromatic light such as a gas laser, a semiconductor laser, or a laser diode, or may generate a multicolored light such as a halogen lamp, a xenon lamp, or a white light emitting diode. . The collimator 214 may be disposed between the second light source 212 and the half mirror 216 . The second light provided by the second light source 212 may be collimated by the collimator 214 as expanded collimated light. The collimator 214 may include a plurality of lenses. The second light may pass through the semi-mirror 216 and may be transmitted to the connection unit 230 to be described later through the reflection mirror 218 .
The detection optical system 220 measures the scattering or absorption generated by the third light irradiated to the measuring unit 10, or the remote field or the second optical signal of the light emitted therefrom to collect the information of the sample (12 in FIG. 5). can be detected. The detection optical system 220 may include a barrel 224 , an eyepiece 226 , and an imaging device 228 . The barrel 224 may fix the eyepiece 226 and the objective lens 240 to be described later. The eyepiece 226 may be disposed at the lower end of the barrel 224 . At least one of the barrel 224 and the eyepiece 226 may be provided. The imaging device 228 may include a charge coupled device (CCD) or a CMOS image sensor. The image of the sample (12 of FIG. 5 ) may be enlarged according to the magnifications of the objective lens 240 and the eyepiece 228 and the distance between the objective lens 240 and the eyepiece 228 .
The objective lens 240 may be disposed adjacent to the sample (12 of FIG. 5 ) positioned on the measurement unit 10 . The objective lens 240 may be connected to a connector 230 to which the second optical system 210 and the detection optical system 220 are coupled. The objective lens 240 is disposed between the measurement unit 10 and the connection unit 230 , and may provide an enlarged image of the sample ( 12 of FIG. 5 ) on the measurement unit 10 to the imaging device 228 .
4 is a cross-sectional view showing an upper portion of a microscope according to an embodiment of the present invention.
1 and 4 , a third optical system 320 and a piezo scanning device 310 may be disposed above the microscope 1 . The third optical system 320 is an incident light source that provides the third light to the measurement unit 10 and/or a detection unit that detects the first optical signal through the first or second light incident on the measurement unit 10 . can
The third optical system 320 may include a fiber probe tip 322 , an optical fiber 324 , and an optical unit 325 . The optical unit 325 may include at least one of a third light source 326 and a light receiving element 328 .
The third light source 326 may provide monochromatic or multi-colored third light to the measurement unit 10 . For example, the third light source 326 may generate a monochromatic light such as a gas laser, a semiconductor laser, or a laser diode, or may generate a multicolored light such as a halogen lamp, a xenon lamp, or a white light emitting diode. .
The light receiving element 328 may include a photomultiplier tube (PMT) or a photodiode (eg, avalanche photodiode (APD)). Optionally, an objective lens, an optical fiber coupler, and a stage may be provided on an optical path between the light receiving element 328 and the measuring unit 10 .
The optical fiber 324 may extend from the third light source 326 or the light receiving element 328 toward the measurement unit 10 . The optical fiber 324 may be a path through which the third light or the first optical signal travels. Although not shown, the optical fiber 324 may be connected to an external spectrometer.
The fiber probe tip 322 may be disposed adjacent to the measurement unit 10 . The fiber probe tip 322 has a pointed tip of the optical fiber 324 and may have a diameter of 100 nm or less. The fiber probe tip 322 may be tapered toward the measurement unit 10 . The fiber probe tip 322 may be formed through laser pulling or chemical etching. The tip of the probe tip 322 may be coated with one or more different types of metal. The coded metal may include at least one of titanium (Ti), chromium (Cr), aluminum (Al), copper (Cu), silver (Ag), gold (Au), and vanadium (V). The tip of the probe tip 322 may be blocked with a metal coating, or the tip may be opened to expose the material of the optical fiber 324 . When the tip of the probe tip 322 is opened, the diameter of the hole of the tip may be 100 nm or less.
For example, when the third optical system 320 is an incident light source unit including the third light source 326 , the third light (19 in FIG. 6 ) is transmitted to the fiber probe tip 322 through the optical fiber 324 and , the fiber probe tip 322 may irradiate the third light (19 of FIG. 6 ) to the sample (12 of FIG. 6 ). The second optical signal generated from the sample (12 in FIG. 5 ) on the measurement unit 10 may be condensed by the objective lens 240 and detected by the detection optical system 220 . That is, the third light (19 in FIG. 6) is irradiated to the sample (12 in FIG. 6) in the near field, and the optical signal is detected in the far-field by the objective lens 240 on the opposite side. can do. In addition, when the third light ( 19 in FIG. 6 ) is a poly-chromatic light source, the spectrum of the second light signal may be detected at each position in space.
As another example, when the third optical system 320 is a detection unit including the light receiving element 328 , the first optical signal detected by the third optical system 320 is an evanescent field generated on the surface of the measurement unit 10 . ) may be from a sample (12 in FIG. 5) present in the . An optical component such as an optical fiber aligner, a fiber chuck, and an objective lens may additionally be used between the optical fiber 324 and the light receiving element 328 to effectively transmit an optical signal. The fiber probe tip 322 may provide the first optical signal obtained from the sample ( 12 of FIG. 5 ) to the light receiving element 328 . The optical fiber 324 may transmit the first optical signal obtained from the probe tip 322 to the light receiving element 328 . The third optical system 320 may detect an optical signal that is scattered, absorbed, or extinct in the sample (12 of FIG. 5 ) in a near-field. At this time, the third optical system 320 has a near-field (half-wavelength) range of the first light (16 of FIG. 5 ) or the second light (17 of FIG. 5 ) from the sample (12 of FIG. 5 ). near-field) the first optical signal may be obtained. In addition, when the first light (16 in FIG. 5 ) or the second light ( 17 in FIG. 5 ) is a poly-chromatic light source, the spectrum of the first light signal may be detected at each position in space.
As another example, when the third optical system 320 includes both the third light source 326 and the light receiving element 328 , the third optical system 320 may have both the functions of the light source unit and the detection unit. When the third optical system 320 operates as a light source unit, the third light source 326 may provide the third light to the optical fiber 324 . When the third optical system 320 operates as a detector, the optical fiber 324 may transmit the detected first optical signal to the light receiving element 328 . Since the third optical system 320 includes both the third light source 326 and the light receiving element 328 , the microscope 1 can have both the functions of a light scanning penetrating microscope or a near-field scanning microscope without replacing equipment.
The piezo injection device 310 may be disposed on the housing 20 . The piezo scanning device 310 may adjust the distance between the third optical system 320 and the measurement unit 10 sample (12 in FIG. 5 ) in units of nanometers or less. If the first optical signal on the sample (12 of FIG. 5) is measured while the piezo scanning device 310 is moved in the horizontal direction, a two-dimensional near-field image of the first optical signal can be obtained. The piezo injection device 310 may include a support 312 , a quartz-crystal resonator 314 , a body 316 , and an orifice 318 . The support 312 may be coupled to the housing 20 to fix the piezo injection device 310 . The resonant fork 314 may be attached to the side of the optical fiber 324 . The resonance fork 314 may measure the distance between the optical fiber 324 and the sample ( 12 of FIG. 5 ) by measuring a change in frequency between the optical fiber 324 and the sample ( 12 of FIG. 5 ). The orifice 318 may support the optical fiber 324 and provide a space through which the optical fiber 324 passes.
5 is an enlarged view of a measurement unit and a sample according to an embodiment of the present invention.
1, 4 and 5, when the incident angle 14 of the first light 16 in the prism 13 of the measuring unit 10 is greater than the critical total reflection angle to the critical angle θ _c , The refracted light refracted by the prism 13 substantially disappears, and only the total reflected light 18 may exist. At this time, only the evanescent field constrained on the prism 13 exists. The fiber probe tip 322 may detect a first optical signal provided by the sample 12 existing in an evanescent field. The first optical system 100 may total internal reflection (TIR) of the first light 16 to the prism 13 . The angle adjusting unit 120 may be adjusted to a range larger than a critical angle (θ _c ) of the incident light 16 at which total reflection starts to occur.
The numerical aperture (NA) of the prism 13 may be determined by the refractive index of the prism 13 and the angle of incidence 14 of the incident light 16 {NA=n*sinθ, θ=angle of incidence 14} . In this case, the numerical aperture of the prism 13 may be changed in proportion to the incident angle 14 of the first light 16 . For example, the goniometer 124 may have a maximum driving angle θ _max of about 70°. Accordingly, the first light 16 may have an incident angle 14 from the critical angle θ _c to the maximum driving angle θ _max of the goniometer 124 (θ _c <θ < θ _max ). When the prism is BK7 (n _D = 1.517), it may have a critical angle of about 41.3° with respect to the first light 16 of the He-Ne laser light (λ = 632.8 nm). When the maximum driving angle θ _max of the goniometer 124 is about 70°, the driving range of the incident light may be 41.3<θ<70°.
The goniometer 124 may continuously change the numerical aperture of the prism 13 by adjusting the incident angle 14 of the first light 16 . The microscope 1 according to an embodiment of the present invention may include a dark-field imaging microscope, a photon scanning-tunneling microscope (PSTM), or a near-field scanning microscope (NSOM/SNOM). have.
6 is an enlarged view of a measurement unit and a sample according to another embodiment of the present invention. For brevity of description, description of overlapping content is omitted.
1, 4, and 6 , the fiber probe tip 322 may provide the third light 19 toward the sample 12 on the slide glass 11 . Most of the third light 19 incident on the sample 12 may be scattered or absorbed. At this time, an evanescent field constrained to the portion of the fiber probe tip 322 may be formed. The second optical signal of the sample existing in the dissipation field formed at the fiber probe tip 322 may be detected through the objective lens 240 and the third light 19 . The second optical signal may be an enlarged image of the sample 12 and a spectrum due to an evanescent field.
In addition, the second light 17 may be provided toward the sample 12 on the slide glass 11 . Most of the second light 17 incident on the sample 12 may be scattered or absorbed. At this time, only the evanescent field confined between the slide glass 11 and the sample 12 through the second light 17 exists. The fiber probe tip 322 may detect the first optical signal through an evanescent field.
7 is a cross-sectional view showing a microscope according to an application example of the present invention, FIG. 8 is a cross-sectional view showing an upper portion of the microscope according to an application example of the present invention, and FIG. It is a cross section. For brevity of description, description of overlapping content is omitted.
7 to 9 , an illumination unit 510 may be provided on the top of the microscope 1 . The lighting unit 510 may include a lighting device 512 , an illumination stage 514 , an imaging device 516 , and a linear stage 522 . The illumination device 512 illuminates the vicinity of the measurement unit 10 and the fiber probe tip 322 to help find an accurate position when the probe tip 322 approaches the sample 12 . The lighting stage 514 may be connected to the lighting device 512 to adjust a position of the lighting device 512 . The imaging device 516 may include a charge coupled device (CCD) or a CMOS image sensor. The linear stage 522 may finely adjust the position of the piezo injection device 310 in the horizontal direction. The linear stage 522 may adjust the position of the moving groove 524 in conjunction with the linear stage 522 and the position of the support part 312 of the piezo injection device 310 placed in the groove 524 . Accordingly, the linear stage 522 may finely adjust the relative position between the position of the fiber probe tip 322 and the sample 12 .

Claims (19)

a measurement unit on which the sample is disposed;
a first optical system disposed on a side surface of the measurement unit to provide a first light toward the side surface of the measurement unit to have an incident angle from the measurement unit;
a second optical system providing a second light toward a lower surface of the measuring unit;
Detecting a first optical signal obtained from the sample by a third light source disposed on the upper surface of the measuring unit and providing a third light to the measuring unit, and the first or second light incident to the measuring unit a third optical system including a light receiving element; and
and a detection optical system for detecting a second optical signal obtained from the sample by the third light provided by the third optical system. The method of claim 1,
The third optical system includes:
an optical probe tip having a tapered tip facing the measuring part and acquiring the first optical signal from the measuring part;
An optical fiber connected to the optical probe tip and transmitting the first optical signal;
The light receiving element is a microscope for receiving the first optical signal transmitted from the optical fiber. 3. The method of claim 2,
The light receiving element is a microscope comprising a photomultiplier tube (PMT) or a photodiode (APD). The method of claim 1,
The third optical system includes:
an optical fiber transmitting the third light provided by the third light source; and
and a fiber probe tip that provides the third light to the measuring unit and has a tapered tip toward the measuring unit. The method of claim 1,
The microscope further comprising a piezo scanning device for moving the position of the third optical system. The method of claim 1,
The first optical system includes:
a light source unit providing the first light to the measurement unit; and
The microscope including an angle adjusting unit for adjusting an incident angle at which the first light is incident on the measuring unit. 7. The method of claim 6,
The angle adjustment unit:
a micrometer that can move up and down;
a protrusion connected to the micrometer;
a lever physically connected to the protrusion; and
A microscope connected to the lever and including a goniometer for adjusting the angle of the light source. 7. The method of claim 6,
The light source unit:
a first light source providing the first light;
a collimator for collimating the first light;
a reflector for reflecting the first light to the measuring unit; and
A microscope comprising a filter unit disposed between the collimator and the reflector. The method of claim 1,
The measuring unit is one of a slide glass, a prism, or a slide glass and a prism combined microscope. 10. The method of claim 9,
The prism is a microscope having a refractive index of 1.4 to 1.9. The method of claim 1,
The detection optical system comprises:
at least one neck;
at least one eyepiece on the barrel; and
A microscope comprising an imaging element on said eyepiece. 12. The method of claim 11,
a connection unit connecting the detection optical system and the second optical system; and
The microscope further comprising an objective lens provided between the connecting part and the measuring part. The method of claim 1,
an imaging device spaced apart from the third optical system;
a lighting device disposed adjacent to the imaging device and facing the measuring unit; and
The microscope further comprising an illumination stage for adjusting positions of the imaging element and the illumination device. a measuring unit disposed on the upper surface of the housing and configured to place a sample;
an angle adjusting unit coupled to the upper surface of the housing;
a light source unit in contact with the angle adjusting unit and coupled to a sidewall of the housing to provide a first light toward a side surface of the measuring unit;
a lower optical system providing a second light toward a lower surface of the measuring unit;
A third light source disposed on the upper surface of the measuring unit to provide a third light to the measuring unit, and a light receiving unit that receives the first or second light to the measuring unit and detects a first optical signal obtained from the sample an upper optical system including a device;
a detection optical system receiving the third light provided by the upper optical system and detecting a second optical signal obtained from the sample; and
A stage for moving the detection optical system and the upper optical system,
The upper optical system comprises:
optics;
an optical fiber connected to the optical unit; and
A microscope having a fiber probe tip connected to the optical fiber and tapering a tip toward the measurement unit.
delete delete 15. The method of claim 14,
The fiber probe tip has a tapered tip toward the measuring part, and the diameter of the tip is 100 nm or less. delete delete

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