KR102336061B1 - Pressure regulating valve apparatus with improved potentiometer and diaphragms - Google Patents

Abstract

Disclosed is a pressure regulating valve device having an improved potentiometer and diaphragm. According to the present invention, the pressure regulating valve device comprises: a metal diaphragm having a bellows shape connected to a valve driving unit; a potentiometer for non-contact measurement of a valve movement distance spaced apart from a reference position of the valve driving unit using a laser; and a control unit calculating the valve movement distance based on digital data provided from the potentiometer and adjusting the valve opening degree for pressure control according to the calculated result.

Description

Pressure regulating valve apparatus with improved potentiometer and diaphragms

The present invention relates to a valve control technology for regulating pressure, and more particularly, to a pressure regulating valve device having an improved potentiometer and a diaphragm.

A pressure control valve device is often installed in a chamber used in a semiconductor manufacturing process to adjust the pressure in the chamber (eg, vacuum pressure) to a constant pressure through the opening of the valve.

Such a pressure regulating valve device includes a potentiometer for detecting the opening degree of the valve and a diaphragm used for sealing and adjusting a set pressure.

A typical diaphragm is made of a resin-based material, so its durability is weak and its lifespan is generally short. In addition, since the potentiometer measures the valve movement distance in a mechanical contact method, there is a limitation in durability, and the measurement deviation is severe and the measurement accuracy is poor.

Accordingly, a more improved pressure regulating valve arrangement is desired.

The technical problem to be solved by the present invention is to provide a pressure control valve device having an improved potentiometer and a diaphragm.

According to an embodiment of the present invention for achieving the above technical problem, the pressure regulating valve device is a metal diaphragm configured to be connected to a valve driving part to form a diaphragm valve having a bellows shape, at a reference position of the valve driving part A potentiometer for non-contact measurement of the spaced valve movement distance using a laser, and the valve movement distance calculated based on digital data provided from the potentiometer, and adjusting the valve opening degree for pressure control according to the calculated result includes a control unit.

According to another embodiment of the present invention for achieving the above technical problem, a pressure control valve device for a semiconductor manufacturing process is connected to a communication unit communicating with the process main device and a valve driving unit to provide a self-diagnosis function and having a bellows shape A diaphragm made of stainless steel configured to form a diaphragm valve, a potentiometer for non-contact measurement of a valve moving distance spaced apart from the reference position of the valve driving unit using a laser, and digital data provided from the potentiometer. and a control unit which calculates the valve movement distance and adjusts the valve opening degree for pressure control according to the calculated result.

According to an embodiment of the present invention, the accuracy of the pressure regulating operation of the pressure regulating valve is improved by employing a potentiometer that calculates the valve movement distance in a non-contact manner.

In addition, the durability of the potentiometer is dramatically improved, thereby reducing maintenance time and cost.

According to an embodiment of the present invention, the reliability of the pressure regulating valve and the stability of the pressure regulating operation are improved by employing a diaphragm made of a metal material. In addition, since the durability of the diaphragm is significantly improved compared to the resin-based diaphragm, the time and cost for maintenance are reduced.

1 is a structural diagram of a pressure regulating valve device according to the present invention.
2 is a block diagram of a pressure control valve device according to an embodiment of the present invention.
3 is a flowchart of calculating the moving distance of the control unit in FIG. 2 .
4 is a diagram illustrating an operation example of the laser module of FIG. 2 .
5 is a diagram illustrating a shape of a diaphragm according to an embodiment of the present invention.
6 is a view for explaining the degree of improvement in durability of the diaphragm of FIG. 5 as a graph.

The above objects, other objects, features and advantages of the present invention will be easily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed content may be more thorough and complete, and the spirit of the present invention may be sufficiently conveyed to those skilled in the art, without any intention other than to provide convenience of understanding.

In this specification, when it is mentioned that certain devices or lines are connected to the target device block, it includes not only direct connection but also the meaning of indirectly connected to the target device block through some other device.

In addition, the same or similar reference numerals in each drawing indicate the same or similar components as much as possible. In some drawings, the connection relationship between elements and lines is only shown for effective description of technical content, and other elements or circuit blocks may be further provided.

Reference throughout this detailed description to “one embodiment” or “an embodiment” means that a particular feature structure, or characteristic described in connection with the embodiment may be included in at least one embodiment disclosed herein. Thus, the appearances of the phrases "in an embodiment" or "in an embodiment" or "according to an embodiment" (or other constructions having a similar meaning) in various places throughout this specification are all necessarily identical. It may not refer to an embodiment. Moreover, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. As used herein in this regard, the word “exemplary” means “to provide an illustration, illustration, or illustration.” Any embodiment described herein as “exemplary” should not necessarily be construed as preferred or advantageous over other embodiments. Also, depending on the context of this specification, a singular term may include its plural forms, and a plural term may include its singular forms. It should be noted that the various drawings shown and discussed herein (including component diagrams) are for illustrative purposes only and are not drawn to scale. Similarly, various waveforms and timing diagrams may be shown for illustrative purposes only. For example, the dimensions of some elements may be exaggerated relative to others for clarity. Also where considered appropriate, reference numerals have been repeated among the figures to indicate corresponding and/or analogous elements.

The terminology used herein is for the purpose of describing particular exemplary embodiments only, and is not intended to limit the claimed invention. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms unless the context clearly dictates otherwise. do. The terms “comprise” and/or “comprising,” when used in the specification, specify the presence of specified features, integers, steps, operations, elements, and/or components, but include one or more other It will be further understood that this does not exclude the presence or addition of features, integers, steps, operations, elements, and/or components, and/or groups thereof.

As used herein, terms such as "first", "second", etc. are used as labels of preceding nouns, and unless explicitly defined so, in any type of order (eg, spatial, temporal, logical etc.) is not implied. Also, the same reference numbers may be used throughout two or more drawings to refer to parts, components, blocks, circuits, units, or modules having the same or similar function. However, this use is only for the sake of simplification of the city and ease of discussion. This does not mean that the configuration or structural details of such components or units are the same across all embodiments, or that these commonly referenced parts/modules are the only way to implement the guidelines of the specific embodiments disclosed herein. doesn't mean that

Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the related art, and should not be interpreted in an idealized or overly formal sense unless explicitly defined herein. This will make more sense.

As used herein, the term “module” refers to any combination of software, firmware, and/or hardware configured to provide the functionality described herein in connection with a module. The term “software,” as applied to any implementation described herein, may be implemented as a software package, code, and/or an instruction set or instructions. The term "hardware" as applied to any implementation described herein, for example, individually or in any combination, includes hardwired circuitry, programmable circuitry, state machine circuitry, and/or firmware that stores instructions to be executed by the programmable circuit. Modules, collectively or individually, may be implemented as integrated circuits, system-on-a-chip (SoC), etc., but may be implemented as circuitry forming part of a larger system, including but not limited to.

Each of the embodiments described and illustrated herein may also include complementary embodiments thereof, and specific operation principles or functions of the diaphragm and the laser module will not be described in detail so as not to obscure the gist of the present invention.

1 is a structural diagram of a pressure regulating valve device according to the present invention. Referring to FIG. 1 , the pressure control valve device includes a pressure control valve 10 for controlling a vacuum or a set pressure. The pressure control valve 10 comprises a first flange 1 attachable to the chamber and a second flange 2 attachable to a pneumatic line (eg vacuum line). Although it is described in FIG. 1 that the first flange 1 is attached to the chamber and the second flange 2 is attached to the vacuum line, the first flange 1 is attached to the pneumatic line and the second flange 2 is attached to the pneumatic line without being limited thereto. 2) can be attached to the chamber.

The pressure control valve 10 also includes a drive shaft 3 driven by a solenoid valve, a front diaphragm valve 4, a rear diaphragm valve 5, a spring 6, and a potentiometer 7 do.

The valve opening degree (degree of opening) is controlled by the linear movement of the drive shaft 3, and the contraction and relaxation of the front diaphragm valve 4 and the rear diaphragm valve 5 having a bellows shape are repeatedly performed. can be performed. Typically, the diaphragm constituting the diaphragm valve is made of a resin-based material, so its durability is weak and the replacement cycle may be short due to its short lifespan.

On the other hand, the potentiometer 7 is used for adjusting the valve opening degree for controlling the pressure. The potentiometer 7 measures the distance between the drive shaft 3 functioning as a valve drive part and the front diaphragm valve 4 coupled to the drive shaft 3, that is, the valve movement distance. installed in the standard position. In general, the potentiometer 7 measures the valve movement distance (or the separation distance between the drive shaft and the diaphragm valve coupled to the drive shaft) in a mechanical contact manner. The valve moving distance can be obtained by measuring the resistance value that changes when the measuring bar of the potentiometer 7 is contracted or extended while in contact with the reference position. When the valve movement distance is measured by a mechanical contact method, there is a limit to the durability of the potentiometer 7 . In addition, the measurement deviation may be severe and the measurement accuracy may be deteriorated.

In the embodiment of the present invention, a method for improving the disadvantages of the above-described diaphragm and potentiometer will be devised and will be described below.

2 is a block diagram of a pressure control valve device according to an embodiment of the present invention. Referring to FIG. 2 , the pressure control valve device includes a pressure control valve 10 , a potentiometer circuit unit 50 , a control unit 100 , a valve driving unit 110 , a display unit 120 , a storage unit 130 , and I/O 140 , and a communication unit 150 .

The pressure control valve device may be used in a diffusion process, a thin film deposition process, an ion implantation process, and an etching process in a semiconductor manufacturing process, and may also be used in a display panel production gas process, a gas manufacturing (refining) device industry, and the like. It can be used in the equipment industry using gas.

The pressure control valve 10 in the pressure control valve device may have a shape as described with reference to FIG. 1 and a diaphragm made of stainless steel configured to be connected to a valve actuator to form a diaphragm valve having a bellows shape ( 5A of FIG. 5) may be included.

The diaphragm may be made of SUS316L series stainless steel. The diaphragm made of SUS316L series stainless steel has a much stronger fatigue limit for contraction and relaxation compared to the resin type diaphragm, so it has excellent durability. The diaphragm can be more usefully and suitably used for the rear side, ie the secondary side diaphragm valve 5, which is arranged closer to the spring 6 located at the rear of the pressure regulating valve.

The communication unit 150 may communicate with the process main device by wire or wirelessly in order to provide a self-diagnosis function. The communication unit 150 may include a BLE module for low-power short-range communication with the process main device or a user's smart phone.

Bluetooth communication through the BLE module is only an exemplary communication method, and in other cases, the following communication protocols may be used. The communication protocols are Code Division Multiple Access (CDMA), Global System for Mobile Communications (GSM), North American Digital Communications (NADC), Extended Time Division Multiple Access (E-TDMA), Wideband CDMA (WCDMA), CDMA2000, Wi- Fi, Municipal Wi-Fi (Muni Wi-Fi), Bluetooth, Digital Enhanced Cordless Telecommunications (DECT), Wireless Universal Serial Bus (Wireless USB), Fast low-latency access with seamless handoff Orthogonal Frequency Division Multiplexing (Flash-OFDM), IEEE 802.20, General Packet Radio Service (GPRS), iBurst, Wireless Broadband (WiBro), WiMAX, WiMAX-Advanced, Universal Mobile Telecommunication Service - Time Division Duplex (UMTS-TDD), High Speed Packet Access (HSPA), Evolution Data Optimized (EVDO), Long Term Evolution - Advanced (LTE Advanced), Multichannel Multipoint Distribution Service (MMDS), and so on.

In the case of the prior art, the control of the pressure control valve has been performed according to a semi-auto calibration method. Therefore, although fine and precise control of the pressure control valve is required, the calibration operation for zero point adjustment is inefficient and takes a long time. However, in the pressure control valve control of the present invention, the control unit 100 implemented by at least one of a CPU, an MCU, and an MPU is mounted on the pressure control valve 10 itself. The control unit 100 performs automatic calibration by itself based on a pulse width modulation method. Accordingly, the operation efficiency is improved and the performance of the pressure control valve is optimized by performing the automatic calibration.

The control unit 100 may be linked with the potentiometer circuit unit 50 to implement a potentiometer according to an embodiment of the present invention. The control unit 100 may receive the digital voltage data output from the potentiometer circuit unit 50 and calculate the valve movement distance. The potentiometers 10 to 200 non-contactly measure the valve movement distance spaced apart from the reference position of the valve driving unit using a laser.

In addition, the control unit 100 calculates the valve movement distance based on digital data (or digital voltage, digital current, pulse data) provided from the potentiometer, and adjusts the valve opening degree for pressure control according to the calculated result. .

The potentiometer circuit unit 50 includes a laser driver 52 , a laser module 54 , an amplification unit 56 , a comparator 58 , a peak detection unit 62 , a time correction unit 64 , and an A/D converter 66 . ) may be included.

The laser driving unit 52 receives the laser driving control signal RC from the control unit 100 to drive the laser module 54 .

The laser module 54 transmits laser pulses and receives laser pulses reflected from the target. The received laser pulse is photoelectrically converted through the light receiving unit of the laser module 54 . The transmitted laser pulse may be emitted from at least two or more laser pulse emitting units.

The amplifying unit 56 amplifies the photoelectric conversion signal received through the laser module 54 to a set decibel. In this case, the decibel set may be in the range of 5 dB to 55 dB.

The comparator 58 compares the laser pulse signal of the amplification unit 56 with a threshold value to generate a signal of whether a reflected pulse has arrived.

The peak detection unit 62 receives the laser pulse signal of the amplifying unit 56 and detects the maximum value of the laser pulse signal amplitude.

The time correction unit 64 integrates, delays, and switches using the laser pulse signal of the amplifying unit 56 and the arrival or non-arrival signal of the reflected pulse of the comparator 58 to generate the reflected laser pulses. Voltage signals corresponding to the area are generated.

The analog-to-digital converter (A/D converter: 66) receives the maximum value of the laser pulse signal amplitude and the voltage signals and converts them into digital voltage data DD. The digital voltage data DD is applied to the controller 100 . The control unit 100 calculates the valve movement distance by calculating the arrival time of the laser pulse from the transmission time of the laser pulse using the digital voltage data DD.

The control unit 100 may include at least one of a CPU and a CPU. The CPU executes software (application programs, operating systems, device drivers) to be executed in the pressure regulating valve device. The CPU may execute an operating system (OS) loaded into the storage unit 130 . The CPU may execute various application programs to be driven based on an operating system (OS). The CPU may be provided as a multi-core processor. A multi-core processor may be a computing component having at least two independently drivable processors (hereinafter, a core). Each of the cores may independently read and execute program instructions. The GPU may perform various graphic operations according to the request of the CPU. The GPU may process and convert data displayable on the display unit 120 . The GPU may have an arithmetic structure advantageous for parallel processing of data, such as a matrix multiplication operation. The GPU may have a structure that can be used not only for graphic operations but also for various operations requiring high-speed parallel processing. As an example, the GPU may perform general-purpose tasks other than graphic processing tasks, and may perform image processing and object recognition.

The storage unit 130 may store an operating system (OS) or basic application programs (Application Program). The storage unit 130 is provided as a storage medium of the device. The storage unit may store application programs, an operating system image, and various data. The storage unit 130 may be provided as a memory card (MMC, eMMC, SD, MicroSD, etc.), and may include a NAND-type flash memory or a NOR flash memory having a large storage capacity. . Alternatively, the storage unit 130 may include a nonvolatile memory such as PRAM, MRAM, ReRAM, or FRAM.

The storage unit 130 may include a memory. When the pressure control valve device starts to operate, the OS image stored in the storage unit 130 may be loaded into the memory based on a booting sequence. Various input/output (I/O) operations of the device may be supported by the OS. Similarly, application programs may be loaded into the memory to be selected by a user or to provide basic services. The memory may be used as a buffer memory for storing data. The memory may be a volatile memory such as a static random access memory (SRAM) or a dynamic random access memory (DRAM), or a nonvolatile memory such as a PRAM, MRAM, ReRAM, FRAM, or NOR flash memory.

The I/O 140 may be connected to various sensors and an alarm device as an input/output unit.

The valve driving unit 110 receives the valve driving control signal VC from the control unit 100 to drive the vacuum valve 10 .

3 is a flowchart of calculating the moving distance of the control unit in FIG. 2 . Referring to FIG. 3 , the controller ( 100 in FIG. 2 ) performs system initialization in operation S310 . During system initialization, various buffers and flags are converted to their initial state.

In operation S311 , the control unit 100 applies the laser driving control signal RC to the laser driving unit 52 . The laser driving unit 52 drives the laser module 54 in response to the laser driving control signal RC. In this case, the laser pulse emitted through the laser module 54 may be output from at least two or more laser pulse emitting units to improve measurement accuracy. As a result of the operation S311, at least one of the first and second laser signals is transmitted.

In operation S312, the controller 100 controls the reflected laser signals to be received, amplified, compared, and time-corrected. The laser pulse reflected from the target and received is photoelectrically converted through the light receiving unit of the laser module 54 . The photoelectric conversion signal is amplified by the amplification unit 56 to a designated decibel within a range of 5 dB to 55 dB. The laser pulse signal output from the amplifying unit 56 is compared with a threshold value by the comparing unit 58 . As a result of the comparison, an arrival or non-arrival signal of the reflected pulse is generated. That is, a laser pulse signal less than the threshold value is generated as “0”, and a laser pulse signal greater than the threshold value is generated as “1”. If the arrival presence signal is generated as 0, there is no arrival, and when the arrival status signal is generated as 1, it is arrival presence. On the other hand, the maximum value of the laser pulse signal amplitude is detected by the peak detection unit 62 that receives the laser pulse signal of the amplification unit 56 . The time correction unit 64 integrates, delays, and switches using the laser pulse signal of the amplifying unit 56 and the arrival or non-arrival signal of the reflected pulse of the comparator 58 to generate the reflected laser pulses. Voltage signals corresponding to the area are generated. The time corrector 64 may include an integrator, a delay device, and switches electronically. The voltage signals are the result signal that the reflected laser pulse is switched and integrated.

In operation S313, the controller 100 controls A/D conversion to be performed. More specifically, the analog-to-digital converter (A/D converter: 66) receives the maximum value of the laser pulse signal amplitude and the voltage signals and converts them into digital voltage data DD. The A/D conversion may be performed in one of 8, 16, 32, and 64 bits.

In operation S314, the control unit 100 checks the completion of the A/D conversion. In this case, the controller 100 may receive at least several to several tens of digital voltage data DD per unit time and check whether the deviation is within a set reference value. Also, the controller 100 may calculate an average value of the received number to tens of digital voltage data DD and determine it as a target value for distance calculation.

In operation S315, the control unit 100 may calculate the distance by decoding the received data for which the A/D conversion has been completed. When the digital voltage data DD is applied to the controller 100, the controller 100 calculates the arrival time of the laser pulse from the transmission time of the laser pulse using the digital voltage data DD. Calculate the valve travel distance.

In operation S316, the control unit 100 controls the movement distance calculation result to be displayed and stored. Display is performed through the display unit 120 and storage is performed through the storage unit 130 .

4 is a diagram illustrating an operation example of the laser module of FIG. 2 . Referring to FIG. 4 , the laser module 54 includes a first emitting part 54-1 that emits the laser pulse at a predetermined angle at a first fixed position, and a second vertically spaced apart from the first fixed position. A second emitting unit emitting the laser pulse at a fixed angle at a fixed position, a reflective module 53 installed opposite the first and second emitting units at a moving position to collect and reflect the laser pulse at a predetermined angle, and a photodiode It is composed of an array and includes a light receiving unit 54-3 for receiving the laser pulse reflected from the reflection module and generating the photoelectric conversion signal.

The laser diode output of the first and second emission units 54-1 and 54-2 may be 0.5 mW. The emission angles of the first and second emitting units 54-1 and 54-2 are 25 degrees, respectively, and the condensing reflection angle of the reflection module 53 is set to about 42 degrees for the condensing efficiency related to the reflected laser pulse. can be

The reflection module 53 may have a concave mirror surface 53-1 on the reflection surface for the condensed reflection.

In other cases, the concave mirror surface 53 - 1 may be manufactured in a detachable form to be replaced with another mirror surface to vary the angle of condensing light.

The reflective module 53 is installed on the moving bracket 12 interlocked with the movement of the drive shaft to form a stroke ST that is linearly moved in the horizontal direction.

In the case of using 16-bit digital data, the measurement range for the movement distance L is 0 mm to 300 mm, and the measurement speed is 1/10,000, that is, within 0.0001 sec.

5 is a diagram illustrating a shape of a diaphragm according to an embodiment of the present invention.

Referring to FIG. 5, unlike the bellows-shaped diaphragm made of synthetic resin, a diaphragm made of SUS316L series stainless steel is shown by reference numeral 5A. Manufacturing SUS316L series stainless steel seamless pipe in bellows shape, that is, corrugated pipe shape, requires meticulous attention and skill as well as raw material supply and demand, mold manufacturing, and heat treatment technology. More specifically, once the stainless steel seamless pipe is annealed to increase ductility, it is put into a bellows-shaped mold. And after inserting the urethane rod so that the upper part protrudes into the stainless steel seamless pipe, press the urethane rod with a press. As the urethane rod expands in the stainless steel seamless pipe, the stainless steel seamless pipe is expanded to have a bellows shape according to the shape of the mold.

The diaphragm manufactured in this way has superior sealing characteristics and durability compared to the bellows-shaped diaphragm made of resin.

6 is a view for explaining the degree of improvement in durability of the diaphragm of FIG. 5 as a graph. Referring to FIG. 6 , the vertical axis of the graph indicates the operating time and the horizontal axis of the graph indicates the period of use (lifetime). The graph (PAG) shows the lifespan of a bellows-shaped diaphragm made of a resin series, that is, a diaphragm according to the prior art. In contrast, the graph (PIG) shows the lifespan of a diaphragm manufactured according to the technique of the present invention. . As can be seen from the graph (PIG), the durability of the diaphragm is improved by about 3 times.

As described above, according to an embodiment of the present invention, the accuracy of the pressure control operation of the pressure control valve is improved by employing a potentiometer that calculates the valve movement distance in a non-contact manner. In addition, by employing a semi-permanent metal diaphragm, the reliability of the pressure regulating valve and the stability of the pressure regulating operation are improved.

Although specific terms are used herein, they are used only for the purpose of describing the present invention and are not used to limit the meaning or the scope of the present invention described in the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. For example, in other cases, without departing from the spirit of the present invention, the type or number of rays used to measure the moving distance, and the detailed control function for measuring the distance may be changed or modified.

*Explanation of symbols for main parts of the drawing*
10: pressure control valve
50: potentiometer
54: laser module
100: control unit
150: communication department

Claims (13)

delete delete delete delete delete delete delete delete delete delete a communication unit including a BLE module and performing low-power short-distance communication with a process main device or a user's smart phone using the BLE module to provide a self-diagnosis function;
a diaphragm made of stainless steel connected to the valve driving unit and configured to form a diaphragm valve having a bellows shape;
a potentiometer for non-contact measurement of a valve moving distance spaced apart from the reference position of the valve driving unit using a laser; and
A control unit for calculating the valve movement distance based on the digital data provided from the potentiometer and adjusting the valve opening degree for pressure control according to the calculated result,
The control unit executes automatic calibration by itself based on a pulse width modulation method,
The potentiometer is
a laser module for transmitting laser pulses and receiving laser pulses reflected from the target;
a laser driving unit that receives a laser driving control signal from the control unit and drives the laser module;
an amplifier for amplifying the photoelectric conversion signal received through the laser module;
a comparator comparing the laser pulse signal of the amplifying unit with a threshold value to generate a signal indicating whether a reflected pulse has arrived;
a peak detection unit receiving the laser pulse signal of the amplifying unit and detecting a maximum value of the laser pulse signal amplitude;
a time correcting unit generating voltage signals corresponding to an area of the reflected laser pulse by performing integration, delay, and switching using the laser pulse signal of the amplifying unit and the arrival or non-arrival signal of the reflected pulse of the comparator; and
and an analog-to-digital converter for receiving the maximum value of the laser pulse signal amplitude and the voltage signals and converting them into digital voltage data,
The control unit calculates the valve movement distance by calculating the arrival time of the laser pulse from the transmission time of the laser pulse using the digital voltage data,
The laser module is
a first emitting unit emitting the laser pulse at a predetermined angle at a first fixed position;
a second emission unit emitting the laser pulse at a predetermined angle at a second fixed position;
It is installed on a moving bracket that is interlocked according to the movement of the drive shaft to form a stroke that is linearly moved in the horizontal direction, and the first discharge unit and the second discharge unit are opposed to the first and second discharge units at the moving position of the moving bracket. a reflection module that collects and reflects the laser pulses at a predetermined angle; and
A pressure control valve device for a semiconductor manufacturing process comprising a photodiode array and a light receiving unit configured to receive the laser pulse reflected from the reflection module and generate the photoelectric conversion signal. 12. The method of claim 11,
The emission angle of the first and second emission parts is 25 degrees,
The condensing reflection angle of the reflection module is 42 degrees. A pressure control valve device for a semiconductor manufacturing process. 12. The method of claim 11,
The reflective module is a pressure control valve device for a semiconductor manufacturing process having a concave mirror surface for condensed reflection on the reflective surface.

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