KR102330079B1 - Refrigerating device - Google Patents

Abstract

A cooling device according to an embodiment of the present invention includes: a first pump connected to a first tank in which a high-temperature coolant is accommodated; a second pump connected to a second tank in which the cryogenic coolant is received; a first pump line in which the first pump and the first tank are installed, the first pump line performing heat exchange with a load to generate the high-temperature coolant; a second pump line in which the second pump and the second tank are installed and heat exchange with a heat exchanger to generate the low-temperature coolant; a high-temperature bridge pipe branching from the first pump line and extending to the second tank; and a low-temperature bridge pipe branching from the second pump line and extending to the first tank.

Description

chiller {REFRIGERATING DEVICE}

The present invention relates to a cooling device.

Since the use temperature is different depending on the semiconductor process, a cooling device technology capable of simultaneously controlling the cryogenic temperature and the room temperature to follow the use temperature is recently required. As an example, the cryogenic temperature may be set to -50 degrees Celsius (°C) or less.

On the other hand, the conventional cooling device may be configured such that the coolant circulated from one coolant tank cools the load.

Here, the load may be understood as a device that is maintained or controlled at a temperature required in a semiconductor process or other industrial process by a coolant provided from the cooling device. For example, the load may include an atomic layer deposition apparatus (Atomic Laver Deposition).

However, the conventional cooling device has the following problems when implementing the cryogenic temperature and the room temperature.

First, since the temperature difference between the cryogenic temperature and the room temperature is large, there is a problem that a lot of energy consumption is required to form the room temperature from the cryogenic temperature.

Second, due to the temperature difference, there is a problem that the time to reach the target temperature is relatively long.

In this regard, Korean Patent Publication No. 10-0785313 B1 (hereinafter, “prior literature”) discloses a technique for cooling a load by separately providing a high-temperature coolant tank and a low-temperature coolant tank and controlling the flow rate of a circulating coolant. .

In the prior art, the temperature of the load can be kept constant by controlling the relatively low-temperature coolant to be mixed in the high-temperature coolant tank in which the relatively high-temperature coolant is accommodated.

And the prior document causes the mixed coolant to flow into the low-temperature coolant tank when the coolant mixed in the high-temperature coolant tank exceeds the capacity of the high-temperature coolant tank due to the low-temperature coolant introduced into the high-temperature coolant tank.

However, in this case, since the flow of the coolant flowing into the low-temperature coolant tank and the flow of the coolant circulating in the high-temperature coolant tank occur at the same time, there is a problem that the mixed coolant cannot be completely used for cooling the load.

Accordingly, energy loss may occur, and there is a problem in that the refrigeration capacity is relatively reduced.

It is an object of the present invention to provide a cooling device capable of solving the above problems.

Another object of the present invention is to provide a cooling device capable of controlling the temperature of the coolant provided to the load within a relatively wide temperature range from cryogenic to room temperature by controlling the mixing level of the coolant.

Another object of the present invention is to provide a cooling device capable of rapidly reaching a target temperature of a coolant.

Another object of the present invention is to provide a cooling device capable of realizing both cryogenic temperature and room temperature while relatively reducing energy loss.

In order to achieve the above object, a cooling device according to an embodiment of the present invention includes a first tank in which a high-temperature coolant is accommodated; a second tank in which the low-temperature coolant is received; a first pump connected to the first tank for circulating the hot coolant; a second pump connected to the second tank for circulating the cryogen; a first discharge line extending so that the coolant discharged from the first pump passes through a load; a second discharge line extending so that the coolant discharged from the second pump passes through a heat exchanger for heat exchange with cooling water; a first valve coupled to the first discharge line and configured to control a flow direction of the coolant passing through the load; a second valve coupled to the second discharge line and configured to control a flow direction of the coolant passing through the heat exchanger; a first tank inlet pipe connecting the first valve and the first tank; a second tank inlet pipe connecting the second valve and the second tank; a first bridge pipe connecting the first valve and the second tank; and a second bridge pipe connecting the second valve and the first tank.

In addition, the first bridge pipe extends from one outlet of the first valve to the inlet of the second tank, and the first tank inlet pipe extends from the other outlet of the first valve to the inlet of the first tank. can be extended

In addition, the second bridge pipe extends from one outlet of the second valve to the inlet of the first tank, and the second tank inlet pipe extends from the other outlet of the second valve to the inlet of the second tank. can be extended

In addition, the first valve may control the flow rate of the coolant branched into the first tank inlet pipe and the first bridge pipe according to the opening degree of the outlet end.

In addition, the second valve may control the flow rate of the coolant branched into the second tank inlet pipe and the second bridge pipe according to the opening degree of the outlet end.

In addition, the load may be a device for maintaining or controlling a temperature required in the process by the coolant discharged from the first pump.

Also, the coolant passing through the heat exchanger may include a fluid having a lower temperature than that of the low-temperature coolant.

In addition, the load inlet pipe extending from the discharge end of the first pump to the load; and a load discharge pipe extending from the load to the inlet end of the first valve.

In addition, the second discharge line may include a heat exchanger inlet pipe extending from the discharge end of the second pump to the heat exchanger; and a heat exchanger discharge pipe extending from the heat exchanger to the inlet end of the second valve.

In addition, a coolant heated by heat exchange for cooling the load may be introduced into the load discharge pipe, and a coolant cooled by heat exchange with the cooling water may be introduced into the heat exchanger discharge pipe.

In addition, the first valve and the second valve may include a three-way valve.

In addition, the first tank may include a heating device for heating the contained coolant.

In addition, a first tank connection pipe extending from the outlet of the first tank to the inlet end of the first pump; and a second tank connection pipe extending from the outlet of the second tank to the inlet end of the second pump.

In addition, the first valve may include an inlet end to which the first discharge line is coupled, a first outlet end to which the first tank inlet pipe is coupled, and a second outlet end to which the first bridge pipe is coupled. .

In addition, the second valve may include an inlet end to which the second discharge line is coupled, a first outlet end to which the second tank inlet pipe is coupled, and a second outlet end to which the second bridge pipe is coupled. .

In addition, the first bridge pipe and the second tank inlet pipe may be laminated at the inlet of the second tank.

In addition, the second bridge pipe and the first tank inlet pipe may be laminated at the inlet of the first tank.

Also, as the opening degrees of one outlet of the first valve and one outlet of the second valve increase, the temperature of the coolant provided to the load may increase.

Also, as the opening degrees of the other outlet of the first valve and the other outlet of the second valve increase, the temperature of the coolant provided to the load may be lowered.

In addition, the cooling device may further include a control unit for controlling the outlet opening degree of the first valve and the outlet opening degree of the second valve to correspond to each other.

In addition, when the control unit decreases the opening degree of one outlet of the first valve to which the first tank inlet pipe is connected, the control unit may also decrease one outlet opening degree of the second valve to which the second tank inlet pipe is connected.

In addition, when the control unit increases the opening degree of the other outlet of the first valve to which the first bridge pipe is connected, the other outlet opening degree of the second valve to which the second bridge pipe is connected may also increase.

In addition, the control unit controls the opening degree of one outlet of the first valve and the opening degree of the other outlet of the first valve in an inverse proportion to the opening degree of one outlet of the second valve and the other outlet of the second valve. The opening degree can be controlled in an inverse proportion.

In another aspect, a cooling device according to an embodiment of the present invention includes: a first pump connected to a first tank in which a high-temperature coolant is accommodated; a second pump connected to a second tank in which the cryogenic coolant is received; a first pump line in which the first pump and the first tank are installed, the first pump line performing heat exchange with a load to generate the high-temperature coolant; a second pump line in which the second pump and the second tank are installed and heat exchange with a heat exchanger to generate the low-temperature coolant; a high-temperature bridge pipe branching from the first pump line and extending to the second tank; and a low-temperature bridge pipe branching from the second pump line and extending to the first tank.

In addition, the cooling device increases the ratio of the coolant flowing to the low-temperature bridge pipe and the high-temperature bridge pipe when the supply temperature of the coolant provided to the load is relatively low, and the supply temperature of the coolant provided to the load increases When it is relatively high, it is characterized in that the ratio of the coolant flowing to the low-temperature bridge pipe and the high-temperature bridge pipe is lowered.

In addition, the cooling device may include: a first valve installed at a branching point of the high-temperature bridge pipe; and a second valve installed at the branching point of the low-temperature bridge pipe.

According to the present invention, since the mixing level of the coolant can be precisely and easily controlled, the energy consumption can be relatively reduced, and the target temperature of the coolant supplied to the load can be quickly reached.

According to the present invention, since all of the coolant mixed to reach the target temperature set according to each process can be provided without loss to the load, energy loss can be relatively reduced and the refrigeration capacity can be improved.

According to the present invention, the flow rate ratio of the coolant circulating through the load and the coolant circulating through the heat exchanger can be easily controlled.

According to the present invention, energy efficiency can be improved and power consumption can be reduced.

1 is a view showing the configuration of a cooling device according to an embodiment of the present invention;
2 is a view exemplarily showing a flow of a coolant for a low-temperature operation of a cooling device according to an embodiment of the present invention;
3 is a view exemplarily showing a flow of a coolant for high-temperature operation of a cooling device according to an embodiment of the present invention;

Hereinafter, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to the components of each drawing, it should be noted that the same components are given the same reference numerals as much as possible even though they are indicated on different drawings. In addition, in describing the embodiment of the present invention, if it is determined that a detailed description of a related known configuration or function interferes with the understanding of the embodiment of the present invention, the detailed description thereof will be omitted.

In addition, in describing the components of the embodiment of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the component from other components, and the essence, order, or order of the component is not limited by the term. When it is described that a component is “connected”, “coupled” or “connected” to another component, the component may be directly connected or connected to the other component, but another component is between each component. It will be understood that may also be "connected", "coupled" or "connected".

1 is a view showing the configuration of a cooling device according to an embodiment of the present invention.

Referring to FIG. 1 , a cooling device according to an embodiment of the present invention may include a first tank 10 and a second tank 20 in which a coolant is accommodated.

The first tank 10 may be called a “process tank” or a “high temperature tank”. And the second tank 20 may be called a “cold tank” or “low temperature tank”.

The first tank 10 may include a heating device 15 for heating the coolant so as to maintain the temperature of the coolant received at a constant level.

By the heating device 15 , the coolant flowing in and out of the first tank 10 can form and maintain a relatively high temperature. Accordingly, the first tank 10 will preferably contain a relatively high temperature coolant. And the second tank 20 can accommodate a relatively low-temperature coolant.

That is, the high-temperature coolant may be accommodated in the first tank 10 , and the low-temperature coolant may be accommodated in the second tank 20 .

For example, assuming no-load operation in which heat exchange with the load 50 is not required, a high-temperature coolant may be introduced into and out of the first tank 10 by the first pump 30, and the second tank At 20 , a low-temperature coolant exchanged with low-temperature coolant in a heat exchanger 60 to be described later may enter and exit.

The first tank 10 may form tank inlets 12 and 13 for introducing a coolant and a tank outlet 11 for discharging the contained coolant.

The second tank 20 may also form tank inlets 22 and 23 into which a coolant is introduced and a tank outlet 21 through which the contained coolant is discharged.

The tank inlets 12 and 13 of the first tank 10 are a first tank inlet 12 to which a high-temperature tank inlet pipe 71 to be described later is coupled and a second tank to which a low-temperature bridge pipe 85 to be described later is coupled. It may include an inlet 13 .

Of course, the tank inlets 12 and 13 of the first tank 10 may be formed as one. For example, the high-temperature tank inlet pipe 71 and the low-temperature bridge pipe 85 may be formed to be laminated at the inlet of the first tank 10 .

The tank inlets 22 and 23 of the second tank 20 are a second tank to which a first tank inlet 23 to which a high temperature bridge pipe 75 to be described below is coupled and a low temperature tank inlet pipe 81 to be described later are coupled. It may include an inlet 23 .

Of course, the tank inlets 22 and 23 of the second tank 20 may be formed as one. For example, the low-temperature tank inlet pipe 81 and the high-temperature bridge pipe 75 may be formed to be laminated at the inlet of the second tank 20 .

In addition, the cooling device includes a first pump 30 and a second pump 40 for circulating the coolant, and a high-temperature tank connection pipe 19 connecting the first tank 10 and the first pump 30 and a low-temperature tank connection pipe 29 connecting the second tank 30 and the second pump 40 to each other.

The first pump 30 may circulate the coolant discharged from the first tank 10 . Accordingly, the first pump 30 may be referred to as a “high temperature pump”.

And the second pump 40 may circulate the coolant discharged from the second tank 20 . Accordingly, the second pump 40 may be referred to as a “low temperature pump”.

The high-temperature tank connection pipe 19 may extend from the tank outlet 11 of the first tank 10 to the inlet end of the first pump 30 . That is, the high-temperature tank connection pipe 19 may be provided so that the coolant flows from the first tank 10 to the first pump 30 . Here, the high-temperature tank connection pipe 19 may be referred to as a “first tank connection pipe”.

The low-temperature tank connection pipe 29 may extend from the tank outlet 21 of the second tank 20 to the inlet end of the second pump 40 . That is, the low-temperature tank connection pipe 29 may be provided so that the coolant flows from the second tank 20 to the second pump 40 . Here, the low-temperature tank connection pipe 29 may be referred to as a “second tank connection pipe”.

In addition, the cooling device connects a load 50 capable of maintaining or controlling the temperature required in the process by the coolant discharged from the first pump 30 , and the first pump 30 and the load 50 . a load inlet pipe 31 to ) may be further included.

The load inlet pipe 31 may extend from the discharge end of the first pump 30 to the load 50 . That is, the load inlet pipe 31 may be provided so that the coolant flows from the first pump 30 to the load 50 .

The coolant flowing through the load inlet pipe 31 may be provided to the load 50 to perform a function of maintaining or controlling a required temperature according to the process of the load 50 .

For example, the coolant provided from the load inlet pipe 31 to the load 50 may maintain the fluid at a set temperature by exchanging heat with a fluid circulating in the load 50 .

That is, the coolant discharged from the first pump 30 is supplied to the load 50 and/or heat exchanges with a fluid circulating in the load 50 , and is generated by the process of the load 50 . heat can be cooled. Accordingly, the cooling device may perform a function of maintaining or controlling the temperature required for the process of the load 50 .

The load 50 may be a device maintained or controlled at a temperature required in a semiconductor process or other industrial process by a coolant provided from the cooling device.

The load discharge pipe 33 may be understood as a pipe through which a coolant (“high temperature coolant”) heated as a result of heat exchange by the load 50, that is, heat exchange for cooling the load 50, flows in. .

And the load discharge pipe 33 may extend from the load 50 to the inlet end of the first valve 70 .

Meanwhile, the load inlet pipe 31 and the load discharge pipe 33 may be collectively referred to as a “first discharge line”. That is, the first discharge line may guide the coolant discharged from the first pump 30 to flow through the load 50 .

The first valve 70 may include a three-way valve.

For example, the first valve 70 has an inlet end to which the load discharge pipe 33 is coupled, a first outlet end to which a high temperature tank inlet pipe 71 to be described later is coupled, and a high temperature bridge pipe 75 to be described later are coupled. It may include a second outlet end. Here, the first outlet end may be understood as one outlet of the first valve 70 , and the second outlet end may be understood as the other outlet of the first valve 70 .

That is, the high-temperature coolant introduced into the inlet end may be branched out to the first outlet end and the second outlet end.

In addition, the first valve 70 may control the flow rate of the coolant discharged through the opening degree control. For example, the first valve 60 may control the flow rate of the coolant discharged to each outlet end by adjusting the opening degrees of the first outlet end and the second outlet end, respectively.

In addition, the cooling device includes a heat exchanger (60) for heat exchange between the coolant discharged from the second pump (40) and the coolant flowing along the coolant pipe (65), the second pump (40), and the heat exchanger (60). ), a second valve 80 controlling the flow direction of the coolant passing through the heat exchanger 60, and connecting the heat exchanger 60 and the second valve 80 It may further include a heat exchanger discharge pipe (43).

The heat exchanger inlet pipe 41 may extend from the discharge end of the second pump 40 to the heat exchanger 60 . That is, the heat exchanger inlet pipe 41 may be provided so that the coolant flows from the second pump 40 to the heat exchanger 50 .

The coolant flowing through the heat exchanger inlet pipe 41 may exchange heat with the low-temperature coolant flowing through the coolant pipe 65 while passing through the heat exchanger 60 .

The coolant may have a temperature capable of cooling the coolant discharged from the second pump 40 . For example, the coolant may have a lower temperature than the low-temperature coolant accommodated in the second tank 20 .

In addition, the coolant may include a coolant or fluid for cooling the coolant discharged from the second pump 40 to form a cryogenic temperature.

That is, the heat exchanger 60 can be understood as a configuration for generating a cryogenic coolant.

The cooling water pipe 65 may be connected to the heat exchanger 60 to exchange heat with the coolant flowing into the heat exchanger inlet pipe 41 . Accordingly, the low-temperature coolant flowing through the coolant pipe 65 may exchange heat with the coolant discharged from the second pump 40 while passing through the heat exchanger 60 . For example, the cooling water pipe 65 may be connected to an inlet and an outlet of a flow path through which the cooling water flows in the heat exchanger 60 .

The heat exchanger discharge pipe 43 may be understood as a pipe through which a coolant (“low temperature coolant”) that has been exchanged with heat in the heat exchanger 60, ie, cooled by heat exchange with the coolant, flows. In addition, the heat exchanger discharge pipe 43 may extend from the heat exchanger 60 to the inlet end of the second valve 80 .

Meanwhile, the heat exchanger inlet pipe 41 and the heat exchanger outlet pipe 43 may be collectively referred to as a “second discharge line”. That is, the second discharge line may guide the coolant discharged from the second pump 40 to flow through the heat exchanger 60 .

The second valve 80 may include a three-way valve.

For example, the second valve 80 has an inlet end to which the heat exchanger outlet pipe 43 is coupled, a first outlet end to which a low temperature tank inlet pipe 81 to be described later is coupled, and a low temperature bridge pipe 85 to be described later. It may include a second outlet to be coupled. Here, the first outlet end may be understood as one outlet of the second valve 80 , and the second outlet end may be understood as the other outlet of the second valve 80 .

That is, the low-temperature coolant introduced into the inlet end may be branched and discharged into a first outlet end of the second valve 80 and a second outlet end of the second valve 80 .

In addition, the second valve 80 may control the flow rate of the coolant discharged through the opening degree control. For example, the second valve 80 may control the flow rate of the coolant discharged to each outlet end by adjusting the opening degrees of the first outlet end and the second outlet end, respectively.

In addition, the cooling device includes a high-temperature tank inlet pipe 71 connecting the first valve 70 and the first tank 10, and connecting the first valve 70 and the second tank 20. High-temperature bridge pipe 75, low-temperature bridge pipe 85 connecting the second valve 80 and the first tank 10, and connecting the second valve 80 and the second tank 20 It may further include a low-temperature tank inlet pipe (81).

The high-temperature tank inlet pipe 71 may extend from the first outlet end of the first valve 70 to the first tank inlet 12 of the first tank 10 . For example, the high-temperature tank inlet pipe 71 may guide the high-temperature coolant introduced into the first valve 70 to be recovered into the first tank 10 .

The high-temperature tank inlet pipe 71 may be referred to as a “first tank inlet pipe”.

The high-temperature bridge pipe 75 may extend from the second outlet end of the first valve 70 to the second tank inlet 23 of the second tank 20 . For example, the high-temperature bridge pipe 75 may guide the high-temperature coolant introduced into the first valve 70 to flow into the second tank 20 .

The low temperature tank inlet pipe 81 may extend from the first outlet end of the second valve 80 to the first tank inlet 22 of the second tank 20 . For example, the low-temperature tank inlet pipe 81 may guide the low-temperature coolant introduced through the second valve 80 to be recovered into the second tank 20 .

The low-temperature tank inlet pipe 81 may be referred to as a “second tank inlet pipe”.

The low-temperature bridge pipe 85 may extend from the second outlet end of the second valve 80 to the second tank inlet 13 of the first tank 10 . For example, the low-temperature bridge pipe 85 may guide the low-temperature coolant introduced into the second valve 80 to flow into the first tank 10 .

On the other hand, the high-temperature bridge pipe 75 may be called a “first bridge pipe”, and the low-temperature bridge pipe 85 may be called a “second bridge pipe”. In addition, the high-temperature bridge pipe 75 and the low-temperature bridge pipe 85 may be collectively referred to as a “bridge line”.

The bridge lines 75 and 85 may guide the coolants having different temperatures to be mixed in the first tank 10 and the second tank 20 .

That is, the coolant introduced through the first valve 70 and the second valve 80 may be mixed in the first tank 10 and the second tank 20 . Accordingly, the first tank 10 and the second tank 20 may generate a mixed coolant in which a high-temperature coolant and a low-temperature coolant are mixed.

Here, the mixed coolant generated in the first tank 10 is called “first coolant”, and the mixed coolant generated in the second tank 20 is called “second coolant”.

According to the level of controlling the opening degree of the first valve 70 and the opening degree of the second valve 80 , the mixing level of the coolant mixed in the first tank 10 and the second tank 20 also varies. can Here, the mixing level may include the temperature of the mixing coolant. A detailed description related thereto will be provided later.

On the other hand, according to the bridge pipes 75 and 85, the first valve 70 and the second valve 80, the first coolant mixed in the first tank 10 can all be used for cooling the load. In addition, since all of the second coolant mixed in the second tank 20 can be heat exchanged in the heat exchanger 60, energy loss can be reduced compared to the conventional cooling device, and refrigeration efficiency can be increased.

For convenience of description, the first discharge lines 31 and 32 , the high-temperature tank inlet pipe 71 and the high-temperature tank connection pipe 19 may be referred to as a “first pump line”. The first pump 30 may be installed in the first pump lines 31 , 33 , 71 , and 19 . In addition, the high-temperature bridge pipe 75 may be branched from the first pump line and extend to the second tank 20 . In addition, the first valve 70 may be installed at a point where the high temperature bridge pipe 75 is branched.

In addition, the second discharge lines 41 and 43, the low-temperature tank inlet pipe 81, and the low-temperature tank connection pipe 29 may be referred to as a “second pump line”. The second pump 40 may be installed in the second pump lines 41 , 43 , 81 , and 29 . And the low-temperature bridge pipe 85 may branch from the second pump line and extend to the first tank 10 . In addition, the second valve 80 may be installed at a point where the low temperature bridge pipe 85 is branched.

Meanwhile, in order to maintain or control the temperature required for the process of the load 50 , the temperature of the coolant supplied from the cooling device (hereinafter, “supply temperature”) may reach from cryogenic temperature to room temperature.

For example, when the process of the load 50 is to be maintained at a relatively high temperature, the cooling device provides the load 50 with a coolant having a high temperature supply temperature (eg, room temperature) to satisfy this. can

In addition, when other processes of the load 50 need to be maintained at a relatively low temperature, the cooling device provides the load 50 with a coolant having a low temperature supply temperature (eg, cryogenic temperature) to satisfy this. can

That is, the cooling device may provide a coolant having a supply temperature set according to the process of the load 50 . Accordingly, the cooling device may provide the coolant at a required temperature according to the process of the load 50 within a relatively wide temperature range from cryogenic to room temperature.

For example, the supply temperature of the cryogenic temperature may be set to -100 degrees Celsius (°C), and the supply temperature of the room temperature may be set to 50 degrees Celsius (°C).

Hereinafter, a control method for the above-described cooling device to provide a coolant at a supply temperature set according to the load 50 will be described in detail.

To this end, the cooling device may further include a control unit (not shown) capable of controlling each configuration. For example, the controller may control the operations of the first pump 30 , the second pump 40 , the first valve 70 , and the second valve 80 .

The cooling device increases the flow rate from the second pump line generating the low-temperature coolant to the first tank 10 through the bridge line when the supply temperature is relatively low, and increases the flow rate to the first tank 10 The high-temperature coolant may flow from the first pump line to the second tank 20 through the bridge line.

In addition, when the supply temperature is relatively high, the cooling device can reduce the ratio of the low-temperature coolant flowing into the first tank 10 to reach the supply temperature.

Meanwhile, the cooling device may assume a no-load operation.

In the no-load operation, the temperature of the coolant flowing through the load inlet pipe 31 may be the same as the temperature of the coolant flowing through the load outlet pipe 33 .

For example, if the temperature (“supply temperature”) of the coolant flowing through the load inlet pipe 31 is 10°C (°C), the temperature of the coolant flowing through the load discharge pipe 33 is 10°C (°C). C) can be.

That is, the no-load operation may be understood as an operation in which heat exchange for cooling the load 50 does not occur.

2 is a view exemplarily showing a flow of a coolant for a low-temperature operation of a cooling device according to an embodiment of the present invention.

Referring to FIG. 2 , when heat is generated while the process of the load 50 is performed, the cooling device may perform a load operation to cool the load 50 . That is, the load operation may be understood as an operation in which the coolant of the cooling device cools the load 50 by heat exchange.

Hereinafter, for convenience of description, it is assumed that the supply temperature of the coolant provided to the load 50 is set to -10 degrees Celsius (°C).

The cooling device may provide the load 50 with a coolant having a supply temperature lower than the supply temperature of the previous (no-load operation).

To this end, the controller may control the opening degrees of the first valve 70 and the second valve 80 to correspond to each other.

In detail, the controller may decrease the opening degree of the first outlet end of the first valve 70 and increase the opening degree of the second outlet end of the first valve 70 .

That is, the controller may control the opening degree of the first outlet end of the first valve 70 and the opening degree of the second outlet end of the first valve 70 in an inverse proportion.

For example, when the opening degree of the first outlet of the first valve 70 decreases by 30%, the opening degree of the second outlet of the first valve 70 may increase by 30%. Accordingly, if the coolant flow rate flowing into the first valve 70 is 100 LPM (L/min), 70 to the first outlet end and 30 to the second outlet end can be sent.

That is, the controller may control the flow rate so that the high-temperature coolant (thick dashed-dotted line) introduced into the first valve 70 flows into the high-temperature bridge pipe 75 .

In more detail, as the opening degree of the second outlet end of the first valve 70 increases, the flow rate of the high-temperature coolant flowing into the high-temperature bridge pipe 75 will increase (thick dashed-dotted line).

A portion of the high-temperature coolant may be introduced into the second tank 20 along the opening degree of the second outlet of the first valve 70 . And as the opening degree of the second outlet end of the first valve 70 gradually increases, the amount of the high-temperature coolant flowing into the second tank 20 will increase (thick dashed-dotted line). On the other hand, as the amount of the high-temperature coolant flowing into the second tank 20 increases, the amount of the high-temperature coolant flowing into the first tank 10 will decrease (thin dash-dotted line).

Meanwhile, the control unit decreases the opening degree of the first outlet end of the second valve 80 to correspond to the control of the first valve 70 , and reduces the opening of the second outlet end of the second valve 80 . opening can be increased.

That is, the controller may control the opening degree of the first outlet end of the second valve 80 and the opening degree of the second outlet end of the second valve 80 in an inverse proportion.

For example, when the opening degree of the first outlet end of the second valve 80 is reduced by 30% to correspond to the opening degree of the first outlet end of the first valve 70 , the second outlet end of the second valve 80 is The degree of opening can be increased by 30%. Of course, in this case, it can be understood that the second outlet end opening degree of the second valve 80 is controlled to correspond to the second outlet end opening degree of the first valve 70 .

Accordingly, if the coolant flow rate flowing into the second valve 80 is 100LPM, 70 may be sent to the first outlet end and 30 may be sent to the second outlet end. In addition, the low-temperature coolant of 30LPM discharged to the second outlet end of the second valve 80 may be mixed with the high-temperature coolant of 70LPM in the first tank 10 .

Accordingly, the first tank 10 and the second tank 20 can be maintained at a constant flow rate (100 LPM). And since all of the flow rate of the first coolant, which is a mixed coolant, can be provided to the load 50, energy loss can be reduced compared to the related art.

That is, the controller may control the flow rate of the low-temperature coolant (thick solid line) introduced into the second valve 80 to flow into the low-temperature bridge pipe 85 .

In more detail, as the opening degree of the second outlet end of the second valve 80 increases, the flow rate of the low-temperature coolant flowing into the low-temperature bridge pipe 85 will increase (bold solid line).

Accordingly, a portion of the low-temperature coolant may be introduced into the first tank 10 . And as the opening degree of the second outlet end of the second valve 80 gradually increases, the amount of the low-temperature coolant flowing into the first tank 10 will increase (bold solid line). On the other hand, as the amount of low-temperature coolant flowing into the first tank 10 increases, the amount of low-temperature coolant flowing into the second tank 20 will decrease (thin solid line).

As a result, as the opening degree of the second outlet end of the first valve 70 increases, the ratio of the low-temperature coolant mixed in the first tank 10 increases, and the opening degree of the second outlet end of the second valve 80 increases. As it increases, the ratio of the high-temperature coolant mixed in the second tank 20 may be increased.

Accordingly, the first coolant flowing into the first pump 30 from the first tank 10 can form a lower temperature according to the mixing ratio of the low-temperature coolant, and the first coolant flowing from the second tank 20 to the The second coolant flowing into the second pump 40 may form a higher temperature according to the mixing ratio of the high-temperature coolant.

In addition, the second coolant discharged from the second pump 40 may be cooled (low-temperature coolant) by the low-temperature coolant in the heat exchanger 60 , and may be introduced into the second valve 80 . And, as described above, the low-temperature coolant may be branched back to the first outlet end and the second outlet end of the second valve 80 to repeat the flow.

Similarly, the first coolant discharged from the first pump 30 may be heated (high-temperature coolant) in a heat exchange process for cooling the load 50 and introduced into the first valve 70 . And as described above, the high-temperature coolant may be branched back to the first outlet end and the second outlet end of the first valve 70 to repeat the flow.

In summary, the ratio of the coolant mixed in the first tank 10 and the second tank 20, that is, the mixing level, is controlled according to the opening degrees of the outlet ends of the first valve 70 and the second valve 80 . can do.

According to this, the temperature of the first coolant may be adjusted according to the process of the load 50 , and the temperature of the second coolant may also be adjusted depending on this. Accordingly, the cooling device can reach the target supply temperature more quickly.

On the other hand, the control unit closes the first outlet end of the first valve 70 and closes the second outlet end of the first valve 70 in order to form the supply temperature provided to the load 50 to a cryogenic temperature. can be fully opened.

And to correspond to the control of the first valve 70 , the regular control unit may close the first outlet end of the second valve 80 and completely open the second outlet end of the second valve 80 . .

As an example, the cryogenic temperature may be set to -100 degrees Celsius (°C).

Accordingly, the coolant that is heat-exchanged with the coolant in the heat exchanger 60 to form a cryogenic temperature may be introduced into the first tank 10 as it is and provided to the load 50 .

3 is a view exemplarily showing a flow of a coolant for high-temperature operation of a cooling device according to an embodiment of the present invention.

Referring to FIG. 3 , the controller may control the first valve 70 and the second valve 80 to correspond to each other in order to provide a load 50 with a coolant that forms a relatively high supply temperature. have.

In detail, the controller may increase the opening degree of the first outlet end of the first valve 70 and decrease the opening degree of the second outlet end of the first valve 70 .

That is, the controller may increase the opening degree of the first outlet end of the first valve 70 to increase the flow rate of the high-temperature coolant flowing into the high-temperature tank inlet pipe 71 (thick dashed-dotted line).

And the controller reduces the opening degree of the second outlet end of the first valve 70, which is controlled to have an inversely proportional relationship with the first outlet end of the first valve 70, to flow into the high-temperature bridge pipe 75 It is possible to reduce the flow rate of the hot coolant (thin dashed line).

And the control unit increases the opening degree of the first outlet end of the second valve 80 to correspond to the control of the first valve 70 , and increases the opening degree of the second outlet end of the second valve 80 . can be reduced

That is, the control unit may increase the flow rate of the low-temperature coolant flowing into the low-temperature tank inlet pipe 81 (thick solid line) by increasing the opening degree of the first outlet end of the second valve 80 . And the controller reduces the opening degree of the second outlet end of the second valve 80, which is controlled to have an inversely proportional relationship with the first outlet end of the second valve 80, to flow into the low-temperature bridge pipe 85. It is possible to reduce the flow rate of the low temperature coolant (thin solid line).

Accordingly, the ratio of the low-temperature coolant mixed in the first tank 10 is reduced, so that the first coolant having a higher temperature than before can be introduced into the first pump 30 . For example, the increased temperature of the first coolant, that is, the supply temperature may be set to 30 degrees Celsius (°C). And the highest supply temperature can be set to 35 degrees Celsius (°C).

At the same time, the ratio of the high-temperature coolant mixed in the second tank 20 is reduced, so that the second coolant having a lower temperature than before can be introduced into the second pump 40 .

Accordingly, the first coolant discharged from the first pump 30 may be provided to the load 50 at a higher supply temperature than before, and the load 50 may be cooled.

And the high-temperature coolant heated by the cooling of the load 50 is branched while passing through the first valve 70 again, and among them, the high-temperature coolant introduced into the first tank 10 is the low-temperature bridge pipe 85 ) may be cooled by the low-temperature coolant introduced through and supplied to the first pump 30 . Accordingly, the temperature of the first coolant supplied to the first pump 30 may be maintained at, for example, 30 degrees Celsius (°C).

10: first tank 20: second tank
30: first pump 40: second pump
50: load 60: heat exchanger
70: first valve 80: second valve

Claims (21)

a first pump for circulating the hot coolant;
a second pump for circulating the cryogen;
a first discharge line extending so that the coolant discharged from the first pump passes through a load;
a second discharge line extending so that the coolant discharged from the second pump passes through a heat exchanger for heat exchange with cooling water;
a first valve coupled to the first discharge line and through which the coolant that has passed through the load is introduced;
a second valve coupled to the second discharge line and through which the coolant that has passed through the heat exchanger flows;
a first tank in which the high-temperature coolant is accommodated, directly connected to the first valve by a first tank inlet pipe, and directly connected to the second valve by a second bridge pipe; and
and a second tank in which the low-temperature coolant is accommodated, directly connected to the second valve by a second tank inlet pipe, and directly connected to the first valve by a first bridge pipe,
the first valve controls the flow rate of the coolant discharged to the first tank inlet pipe and the first bridge pipe so that the coolant introduced into the first valve is distributed to the first tank and the second tank;
the second valve controls the flow rate of the coolant discharged to the second tank inlet pipe and the second bridge pipe so that the coolant introduced into the second valve is distributed to the first tank and the second tank;
An outlet opening degree for discharging coolant of the first valve and an outlet opening degree for discharging coolant of the second valve are controlled to correspond to each other.
delete delete delete delete The method of claim 1,
The load is a cooling device that maintains or controls a temperature required in the process by the coolant discharged from the first pump.
The method of claim 1,
The first discharge line,
a load inlet pipe extending from the discharge end of the first pump to the load; and
and a load discharge pipe extending from the load to the inlet end of the first valve.
8. The method of claim 7,
The second discharge line,
a heat exchanger inlet pipe extending from the discharge end of the second pump to the heat exchanger; and
and a heat exchanger discharge pipe extending from the heat exchanger to the inlet end of the second valve.
9. The method of claim 8,
In the load discharge pipe, a coolant heated by heat exchange for cooling the load is introduced,
The heat exchanger discharge pipe is a cooling device into which a coolant cooled by heat exchange with the coolant flows in.
The method of claim 1,
The first valve and the second valve include a three-way valve.
The method of claim 1,
a first tank connection pipe extending from the outlet of the first tank to the inlet end of the first pump; and
The cooling device further comprising a second tank connection pipe extending from the outlet of the second tank to the inlet end of the second pump.
The method of claim 1,
The first valve is
an inlet end to which the first discharge line is coupled;
a first outlet end to which the first tank inlet pipe is coupled; and
and a second outlet end to which the first bridge pipe is coupled.
13. The method of claim 1 or 12,
The second valve is
an inlet end to which the second discharge line is coupled;
a first outlet end to which the second tank inlet pipe is coupled; and
and a second outlet end to which the second bridge pipe is coupled.
delete The method of claim 1,
As the opening degrees of one outlet of the first valve and one outlet of the second valve increase, the temperature of the coolant provided to the load increases,
A cooling device in which the temperature of the coolant provided to the load decreases as the opening degrees of the other outlet of the first valve and the other outlet of the second valve increase.
delete The method of claim 1,
Further comprising a control unit for controlling the operation of the first valve and the second valve,
The control unit is
When the opening degree of one outlet of the first valve to which the first tank inlet pipe is connected is reduced, the opening degree of one outlet of the second valve to which the second tank inlet pipe is connected is also reduced,
When the other outlet opening degree of the first valve to which the first bridge pipe is connected is increased, the other outlet opening degree of the second valve to which the second bridge pipe is connected is also increased.
The method of claim 1,
Further comprising a control unit for controlling the operation of the first valve and the second valve,
The control unit is
controlling the opening degree of one outlet of the first valve and the opening degree of the other outlet of the first valve in an inverse proportion;
A cooling device for controlling an opening degree of one outlet of the second valve and an opening degree of the other outlet of the second valve in an inverse proportion.
delete The method of claim 1,
When the supply temperature of the coolant provided to the load is relatively low, increasing the ratio of the coolant flowing to the first bridge pipe and the second bridge pipe,
A cooling device for lowering the ratio of the coolant flowing to the first bridge pipe and the second bridge pipe when the supply temperature of the coolant provided to the load is relatively high.
delete

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