KR102278782B1 - Active variable speckle illumination wide-field high-resolution imaging appatatus and imaging method using the same - Google Patents

Abstract

An imaging device according to an embodiment of the present invention includes a light source configured to irradiate coherent light having a single wavelength, an active light modulator configured to change any one of a wavefront and a polarization state of light irradiated from the light source, and an active A diffuser having an irregular structure surface that forms a speckle pattern by scattering the light modulated by the light modulator, an optical system including the speckle pattern and filtering the light passing through the sample as an object, and the light passing through the optical system An image sensor for acquiring a generated image, and a processor for obtaining a high-resolution image by repeatedly superimposing a plurality of low-resolution images acquired from the image sensor in a Fourier domain, wherein each of the plurality of low-resolution images uses an active light modulator to emit different light It can be obtained by modulating

Description

ACTIVE VARIABLE SPECKLE ILLUMINATION WIDE-FIELD HIGH-RESOLUTION IMAGING APPATATUS AND IMAGING METHOD USING THE SAME

The present invention relates to a device for acquiring a large-area high-resolution image using active variable speckle illumination and a method for acquiring an image using the same.

Conventionally, in the case of an imaging device such as a microscope, the acceptable spatial frequency range is determined according to the numerical aperture of the objective lens, so a microscope using a low numerical aperture lens has no choice but to obtain a relatively low-resolution image. In order to obtain a high-resolution image, even if an expensive lens with a high numerical aperture is used, the FOV (Field of View) value is small, so it is impossible to obtain a large-area image.

In order to obtain a large-area and high-resolution image, attempts have been made to calculate an image through arithmetic calculation using a Fourier Ptychography method or an arithmetic phase retrieval method relatively recently.

However, in the large-angled illumination method using a light source array (eg, an LED matrix) having different incident angles of light incident on the sample, the size of the applied light source array is large, so that the imaging device is compact. It was not possible to do this, and there was a high possibility that an installation error or an error according to use occurred, which would negatively affect the performance of the imaging device. In the case of the related art, there is a mechanical driving part such as a mirror control using a galvanometer, so there is a problem that an error occurs due to the driving and it takes a long time to measure.

An object of the present invention is to provide an imaging device capable of obtaining a large-area high-resolution image through on-axis illumination using active variable speckle illumination and an imaging method using the same.

An imaging device according to an embodiment of the present invention includes a light source configured to irradiate coherent light having a single wavelength, an active light modulator configured to change any one of a wavefront and a polarization state of light irradiated from the light source, and an active A diffuser having an irregular structure surface that forms a speckle pattern by scattering the light modulated by the light modulator, an optical system including the speckle pattern and filtering the light passing through the sample as an object, and the light passing through the optical system An image sensor for acquiring a generated image, and a processor for obtaining a high-resolution image by repeatedly superimposing a plurality of low-resolution images acquired from the image sensor in a Fourier domain, wherein each of the plurality of low-resolution images uses an active light modulator to emit different light It can be obtained by modulating

The active light modulator of the imaging device according to an embodiment of the present invention may be any one of a polarization modulator for changing a polarization state of light and a tunable lens for changing a wavefront of light.

The polarization modulator of the imaging device according to the embodiment of the present invention may be formed of a single pixel liquid crystal.

The diffuser of the imaging device according to an embodiment of the present invention may be integrally formed on one surface of the sample chamber for accommodating the sample.

The irregular structure surface of the diffuser of the imaging device according to the embodiment of the present invention may be formed to satisfy the following equation.

[Equation 1]

로서,

는 불규칙한 구조의 피크 사이의 거리인

의 중간값이며, NA는 광학계의 개구수,

는 광원에서 조사되는 광의 파장을 나타낼 수 있다.From here,

as,

is the distance between the peaks of the irregular structure,

is the median value of , NA is the numerical aperture of the optical system,

may represent the wavelength of light irradiated from the light source.

An optical system of an imaging device according to an embodiment of the present invention includes one or more objective lenses configured to receive light transmitted through a sample, and may filter the received light based on a numerical aperture of the objective lens.

The optical system of the imaging device according to the embodiment of the present invention may further include a tube lens for focusing the light passing through the objective lens in the image sensor.

The imaging device according to an embodiment of the present invention may further include a display for displaying a low-resolution image acquired from an image sensor or a high-resolution image processed by the processor.

The processor of the imaging device according to an embodiment of the present invention includes at least an initial hypothetical image generation instruction for determining and Fourier transforming a predetermined initial hypothetical image for obtaining a high-resolution image in the spatial domain, and a diffuser and an optical system for the initial hypothetical image in the Fourier domain. A low-resolution image calculation instruction that calculates a low-resolution image by inverse Fourier transform after filtering with a function related to any one or more, and replaces the calculated intensity information of the low-resolution image with the intensity information of the low-resolution image obtained from the image sensor and performs Fourier transform In the Fourier domain, an initial hypothetical image polymerization instruction for superimposing an initial hypothetical image is performed, and a low-resolution image calculation instruction and an initial hypothetical image polymerization instruction are repeatedly performed for each of a plurality of low-resolution images acquired from the image sensor to converge into a high-resolution image. can do.

The high-resolution image processed by the processor of the imaging device according to an embodiment of the present invention may include phase information in addition to intensity information.

An imaging method according to another embodiment of the present invention changes any one of a wavefront and a polarization state of light in an active light modulator with light irradiated from a light source configured to irradiate coherent light having a single wavelength, and provides an irregular structure surface. A step of forming a speckle pattern by means of a diffuser to obtain a plurality of low-resolution images from an image sensor by forming a speckle pattern including the speckle pattern and filtering the light passing through the sample as an object into the optical system and a high-resolution image processing step of repeatedly polymerizing the low-resolution images in a Fourier domain to obtain a high-resolution image, wherein each of the plurality of low-resolution images may be obtained by differently modulating light by an active light modulator.

In the imaging method according to another embodiment of the present invention, the diffuser is integrally formed on one surface of the sample chamber for accommodating the sample, and the irregularly structured surface of the diffuser may be formed by adjusting the roughness of one surface of the sample chamber.

In the imaging method according to another embodiment of the present invention, the high-resolution image processing step includes: an initial hypothetical image generation step of defining a predetermined initial hypothetical image for obtaining a high-resolution image in a spatial domain and Fourier transforming the initial hypothetical image in a Fourier domain A low-resolution image calculation step of calculating a low-resolution image by inverse Fourier transform after filtering with a function related to at least one of the diffuser and the optical system, and the calculated intensity information of the low-resolution image as the intensity information of the low-resolution image obtained from the image sensor It includes an initial hypothetical image polymerization step of superimposing an initial hypothetical image in a Fourier domain by substituting a Fourier transform, and repeatedly performing the low-resolution image calculation step and the initial hypothetical image polymerization step for each of a plurality of low-resolution images acquired from the image sensor It can converge to a high-resolution image.

In the imaging method according to another embodiment of the present invention, the high-resolution image may include phase information in addition to intensity information.

The active variable speckle illumination large-area high-resolution imaging device and imaging method according to the present invention uses a speckle pattern including high spatial frequency information and uses an active light modulator to obtain a large-area and high-resolution image at the same time. Also, since the calculated high-resolution image may include phase information, various types of images can be obtained using the same.

In addition, by using a single light source and an active light modulator without using a light source array, the imaging device can be compactly and compactly implemented by an axial illumination method rather than a large-angle illumination method, and there is a possibility that an installation error or error due to use may occur. can reduce

Furthermore, since there is no mechanical driving unit in realizing the imaging device, an error due to driving does not occur, and it is possible to have the effect of shortening the measurement time.

1 is a schematic conceptual diagram of an imaging device according to an embodiment of the present invention.
2 is a block diagram of an imaging device according to an embodiment of the present invention.
3 is a perspective view and a partially enlarged view of a sample chamber in which a diffuser is installed according to an embodiment of the present invention;
4 is a flowchart illustrating an imaging method according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims. On the other hand, the terms used herein are for the purpose of describing the embodiments and are not intended to limit the present invention. As used herein, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, "comprises" and/or "comprising" refers to the presence of one or more other components, steps, operations and/or elements mentioned. or addition is not excluded. Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic conceptual diagram of an image acquisition unit 100 of an imaging device according to an embodiment of the present invention, and FIG. 2 is an image acquisition unit 100 and an image processing unit of an imaging device according to an embodiment of the present invention. It is a block diagram showing 200.

An imaging device according to an embodiment of the present invention includes a light source 110 for irradiating light, an active light modulator 120 for modulating the irradiated light, and a diffuser 130 for scattering the modulated light to form a speckle pattern. ), an optical system 140 through which the light including the speckle pattern passes through the sample S as an imaging target, is incident, and is filtered, and an image sensor 150 for acquiring an image generated by the filtered light through the optical system. low-resolution images can be obtained.

Here, the meaning of the term “low resolution” is a description for indicating a relative difference from a “high resolution” image whose resolution is increased as a result through image processing by an imaging device according to an embodiment of the present invention, and the optical system, That is, it means an image obtained within the limit of the intensity of the spatial frequency determined by the numerical aperture of the objective range.

The light source 110 should be configured to irradiate high coherence light having a single wavelength in order to form a speckle pattern, and the light source 110 may be configured with a laser or a laser diode. Since the speckle pattern cannot be formed by the diffuser 130 unless it has high coherence like laser light, a light source 110 suitable for an imaging device is selected.

The light irradiated from the light source 110 may be modulated by an active light modulator 120 . In general, the Fourier Ptychography method uses an LED matrix to obtain a plurality of low-resolution images having various information by using a variable illuminator so that the angle of incidence to the sample S varies. In the imaging device according to an exemplary embodiment, the active light modulator 120 modulates light differently for each low-resolution image, thereby obtaining the same effect as variable illumination.

In particular, when the light modulated by the active light modulator 120 forms a speckle pattern by the diffuser 130, passes through the sample and enters the optical system 140, it is possible to effectively obtain a plurality of low-resolution images, This is because the on-axis illumination method can be selected instead of the large-angled illumination method used in the conventional Fourier typography method in which the incident angle of light is different, so that the imaging device can be more simplified or compact. In addition, it is possible to reduce errors caused by mechanical driving or installation errors such as LED Matrix.

The active light modulator 120 may be a polarization modulator that changes the polarization state of incident light, and when the polarization modulator is used, the polarization state of the polarization modulator may be differently changed for each low-resolution image obtained. The polarization modulator may be implemented by mechanically adjusting the rotation angle of the polarizer. However, when the polarization state is changed by an electronic signal using a single pixel liquid crystal, errors due to mechanical driving can be reduced. there will be

Another example of the condensed light modulator 120 is a tunable lens, which uses a tunable lens whose refractive index distribution changes according to an applied voltage to differently change the wavefront curve of the light irradiated for each low-resolution image be able to do

Accordingly, in the imaging device according to an embodiment of the present invention, any one of a wavefront and a polarization state of the light irradiated from the light source 110 may be changed in the active light modulator 120 .

As the light modulated by the active light modulator 120 passes through the diffuser 130 , a speckle pattern may be formed. A speckle pattern is generated when high coherence light, such as a laser, is irradiated to a surface on which an irregular structure or pattern is formed, and contains a high spatial frequency component. Therefore, when speckle pattern information is acquired, a high-resolution image can be restored.

As shown in FIG. 3 , the diffuser 130 of the imaging device according to an embodiment of the present invention has an irregular structured surface. If the irregular structure is not sufficiently formed, a weakly scattering pattern (Weakly Scattering) is obtained. pattern), so that high spatial frequency components cannot be included, and a high-resolution image cannot be obtained through processing in the processor 210, which will be described later. Accordingly, the diffuser 130 according to an embodiment of the present invention may be formed to satisfy Equation 1 below.

[Equation 1]

로서,

는 불규칙한 구조의 피크 사이의 거리인

의 중간값이며, NA는 광학계의 개구수,

는 광원에서 조사되는 광의 파장을 나타낼 수 있다. From here,

as,

is the distance between the peaks of the irregular structure,

is the median value of , NA is the numerical aperture of the optical system,

may represent the wavelength of light irradiated from the light source.

The diffuser 130 of the imaging device according to an embodiment of the present invention may be integrally formed on one surface of the sample chamber 160 accommodating the sample S. By installing the diffuser 130 on the upper surface of the sample chamber 160, the light passing through the active light modulator 120 can be scattered and directed to the sample S. In contrast, the diffuser ( By installing 130), it is also possible that the light passing through the active light modulator 120 is scattered after passing through the sample S. When the diffuser 130 is integrally formed on one surface of the sample chamber 160 , the irregular structure surface of the diffuser 130 may be formed by adjusting the roughness of the corresponding surface of the sample chamber 160 . When the roughness is adjusted so as not to generate a weak scattering pattern, the roughness may be adjusted by processing the surface of a mold for injection-processing the sample chamber 160 .

In an embodiment of the present invention, the diffuser 130 is integrally formed on one surface of the sample chamber 160, but the present invention is not limited thereto, and the diffuser 130 may be separately installed in the imaging device, and even in this case, Of course, it can be positioned before or after the sample (S) along the irradiation path.

In one embodiment of the present invention, the sample (S) is from whole blood, plasma, serum, saliva, ocular fluid, cerebrospinal fluid, sweat, blood, milk, ascites fluid, synovial fluid, peritoneal fluid, and cell lysate from a living tissue such as cells. Images of various samples (S) as well as transparent samples (S) can be imaged, ranging from liquid samples of tissue hair to solid samples of sub-organs of the skin system of nails. A known biochip or the like may be used for the sample chamber 160 according to the characteristics of the sample S.

Light scattered by the diffuser 130 may pass through the sample S and be incident on the optical system 140 . Light incident on the optical system 140 is filtered according to the characteristics of the optical system 140 and directed to the image sensor 150, and the optical system 140 includes one or more lenses configured to receive the light transmitted through the sample S. may be included, which may be composed of a first lens 141 and a second lens 142 . When the first lens 141 and the second lens 142 are configured as an objective lens, an enlarged image may be formed by filtering the received light based on the numerical aperture of the objective lens.

In the case of an objective lens used in a conventional microscope, since the intensity of a spatial frequency that can be filtered according to the numerical aperture of the lens is limited, only a low-resolution image is obtained. In the case of an active variable speckle illumination large-area high-resolution imaging device used, light modulated by the active light modulator 120 and having a speckle pattern formed while passing through the diffuser 130 passes through the sample S to generate the optical system 140 . ), it is possible to receive spatial frequency information higher than the spatial frequency that can be accepted by the actual lens, so it is processed by the processor 210 to be described later and is high resolution that cannot be obtained with the objective lens forming the optical system 140 . image can be produced.

In another embodiment of the present invention, the optical system 140 is disposed upstream along the light irradiation path, and the first lens 141 that is an objective lens that forms an enlarged image, and the light passing through the first lens 141 is an image The sensor may further include a second lens 142 that is a tube lens disposed downstream of the first lens 141 along the light irradiation path so that the sensor is focused. Furthermore, the present invention is not limited thereto, and the optical system 140 may be configured using lenses of various combinations.

The lenses of the optical system 140 may form an enlarged image of the sample S based on light irradiated from the light source 110 and transmitted through the sample S, and may transmit the formed image to the image sensor 150 .

The image sensor 150 may acquire an image of the sample S corresponding to the viewing range of the optical system 140 by capturing an image passing through the optical system 140 . As the image sensor 150 , a CCD or CMOS image sensor may be used.

A plurality of low-resolution images obtained by the image sensor 150 are processed by the processor 210 to obtain a high-resolution image calculated. Specifically, a plurality of low-resolution images are repeatedly performed in a Fourier domain by using a Fourier typography method. By polymerization, high-resolution images can be obtained. Meanwhile, in this case, each of the plurality of low-resolution images is obtained by modulating light differently by the active light modulator 120 , so that different information can be included for each low-resolution image.

Referring back to FIG. 2 , in the functional view of the imaging device according to an embodiment of the present invention, the light irradiated from the light source 110 passes through the sample S, is incident on the optical system 140 , and is filtered, and the image sensor At 150 , the image acquisition unit 100 may be configured to acquire an image, and the image processing unit 200 may process the acquired image or display it on a screen. In this case, the image acquisition unit 100 may include a light source 100 , an active light modulator 120 , a diffuser 130 , an optical system 140 , and an image sensor 150 , and the image processing unit 200 . may include a processor 210 .

The image processing unit 200 of the imaging device according to an embodiment of the present invention may further include a display 220 that displays a low-resolution image acquired by the image sensor 150 or a high-resolution image processed by the processor 210 . . In addition, various instructions for image processing performed by the processor 210 or images obtained by calculating such processing, or a memory (not shown) capable of storing and reading image information obtained from the image sensor 150 or image acquisition It may further include a communication unit (not shown) configured to enable communication by connecting the unit 100 and the image processing unit 220 by wire or wirelessly.

As described above, the low-resolution image information obtained from the image sensor 150 is transmitted to the processor 210 , and the processor 210 can calculate a high-resolution image using the Fourier typography method. Furthermore, the processor 210 may control the irradiation intensity, time, or interval of the light source 110 , and may control the active light modulator 120 to differently modulate the light emitted from the light source 110 . Specifically, light may be modulated by controlling an electrical signal applied to a single-pixel liquid crystal or a tunable lens of the polarization modulator.

The processor 210 of the imaging device according to an embodiment of the present invention may obtain a high-resolution image by repeatedly superimposing a plurality of low-resolution images obtained from the image sensor 150 in a Fourier domain. The iterative arithmetic algorithm of the processor 201 is known to those skilled in the art by a phase retrieval or Fourier tychography method, and in an embodiment of the present invention, the image acquisition unit 100 It is possible to acquire a large-area and high-resolution image through arithmetic phase restoration calculation for low-resolution images, which are speckle images of a large area, acquired while modulating light by Through this, it is possible to calculate and generate a high-resolution image that exceeds the image quality that can be obtained according to the numerical aperture of the objective lens, and the high-resolution image processed and calculated by the processor includes phase information in addition to the intensity information. may include A phase image can be obtained without configuring a separate interferometer system, and an additional effect can be obtained in that a brightfield image, a darkfield image, and a differential interference phase difference (DIC) image can be obtained.

Looking at the phase restoration or Fourier typography method in which the processor 210 of the present invention calculates a high-resolution image based on a plurality of low-resolution images in more detail, the processor 210 may perform the following instructions, The instruction may be stored in a memory (not shown) and configured to be read and executed by the processor 21 .

First, (1) the initial hypothetical image generation instruction may determine a predetermined initial hypothetical image for obtaining a high-resolution image in the spatial domain and perform Fourier transform. In this case, the initial hypothetical image may be determined by determining an arbitrary value in relation to intensity and phase information or by interpolating low-resolution images obtained by the image sensor 210 . The initially assumed image information is then repeatedly superimposed into low-resolution images to be converged into a high-resolution image.

Next, in the (2) low-resolution image calculation instruction, the low-resolution image may be calculated by filtering the initial hypothesized image with a function related to at least one of a diffuser and an optical system in the Fourier domain, and then performing inverse Fourier transform. That is, the difference between the image actually captured by the image sensor 150 and the image obtained by calculation by comparing and repeatedly calculating the images calculated by the processor 210 using the information of the imaging device in addition to the image actually obtained by the image sensor 150 . It can be thought of as a pre-process to reduce

Finally, (3) the initial hypothetical image polymerization instruction replaces the calculated intensity information of the low-resolution image with the intensity information of the low-resolution image obtained from the image sensor and performs Fourier transform to superpose the initial hypothetical image in the Fourier domain. As described above, by repeatedly performing polymerization in the Fourier domain, the resulting image converges to yield a high-resolution image.

For each of the plurality of low-resolution images obtained from the image sensor 150, the low-resolution image calculation instruction and the initial hypothetical image polymerization instruction may be repeatedly performed to converge into a high-resolution image, and the image obtained from the image sensor 150 is N In the case of an individual, all N low-resolution images may be superimposed to converge into a high-resolution image, and the number N of images may be determined differently according to the configuration of an imaging device according to an embodiment of the present invention.

An imaging method capable of obtaining a high-resolution image using an active variable speckle illumination large-area high-resolution imaging device according to an embodiment of the present invention may be divided into an image acquisition step and an image processing step.

The low-resolution image acquisition step includes (1) irradiating light from the light source 110, irradiating coherent light having a single wavelength, and (2) modulating light from the active light modulator 120. , changing any one of a wavefront and a polarization state of the light in the active light modulator 120 with the light irradiated from the light source 110, and (3) forming a speckle pattern. A diffuser 130 having an irregular structure surface. and (4) filtering the optical system 140, wherein the light including the speckle pattern passes through the sample S as an object, is incident on the optical system 140, and is filtered; , (5) a low-resolution image acquisition step, comprising acquiring a plurality of low-resolution images from the image sensor 150, each low-resolution image with an active light modulator 120 for every image until N images are obtained. It can be obtained by modulating it differently.

In the high-resolution image processing step, a high-resolution image can be obtained by repeatedly superimposing a plurality of low-resolution images acquired from the image sensor in the Fourier domain, and more specifically, (1) as an initial hypothetical image generation step, a high-resolution image in the spatial domain determining a predetermined initial hypothetical image to obtain and performing Fourier transform; and (2) calculating a low-resolution image. After filtering the initial hypothetical image by a function related to at least one of a diffuser and an optical system in a Fourier domain, the inverse Fourier transform to calculate a low-resolution image, and (3) an initial hypothetical image polymerization step, replacing the calculated intensity information of the low-resolution image with the intensity information of the low-resolution image obtained from the image sensor and performing Fourier transform to perform Fourier transform to the initial hypothetical image in the Fourier domain and polymerization, and repeatedly performing the low-resolution image calculation step and the initial hypothetical image polymerization step for each of the plurality of low-resolution images obtained from the image sensor 150 to converge into a high-resolution image.

The above description is merely illustrative of the technical idea of the present invention, and various modifications and variations will be possible without departing from the essential characteristics of the present invention by those skilled in the art to which the present invention pertains. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments. The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

100 Image Acquisition Unit 110 Light Source
120 Active Light Modulator 130 Diffuser
140 optical system 141 first lens
142 second lens 150 image sensor
160 sample chamber S sample
200 image processing unit 210 processor
220 display

Claims (14)

a light source configured to irradiate coherent light having a single wavelength;
an active light modulator configured to change any one of a wavefront and a polarization state of the light irradiated from the light source;
a diffuser having an irregular structure surface that scatters the light modulated by the active light modulator to form a speckle pattern;
an optical system including the speckle pattern and filtering the light passing through the sample as an object;
an image sensor for acquiring an image generated by the light passing through the optical system; and
A processor for obtaining a high-resolution image by repeatedly superimposing a plurality of low-resolution images obtained from the image sensor in a Fourier domain,
each of the plurality of low-resolution images is obtained by differently modulating light by the active light modulator,
The diffuser is integrally formed on one surface of the sample chamber for accommodating the sample,
The irregular structure surface of the diffuser is formed to satisfy Equation 1 below.
[Equation 1]

From here,

as,

is the distance between the peaks of the irregular structure,

is the median value of , NA is the numerical aperture of the optical system,

may represent the wavelength of light irradiated from the light source. The method according to claim 1,
The active light modulator is any one of a polarization modulator for changing a polarization state of light and a tunable lens for changing a wavefront of light. 3. The method according to claim 2,
The polarization modulator is made of a single pixel liquid crystal (Single Pixel Liquid Crystal), an imaging device. The method according to claim 1,
wherein the diffuser is integrally formed on one surface of the sample chamber for receiving the sample. delete The method according to claim 1,
The optical system includes one or more objective lenses configured to receive light transmitted through the sample, and filters the received light based on a numerical aperture of the objective lens. 7. The method of claim 6,
The optical system further comprises a tube lens for allowing the light passing through the objective lens to be focused by the image sensor. The method according to claim 1,
The imaging device further comprising a display for displaying the low-resolution image acquired by the image sensor or the high-resolution image processed by the processor. The method according to claim 1,
The processor is
an initial hypothetical image generation instruction for determining a predetermined initial hypothetical image for obtaining the high-resolution image in a spatial domain and Fourier transform;
A low-resolution image calculation instruction for calculating a low-resolution image by filtering the initial hypothetical image with a function related to at least one of the diffuser and the optical system in the Fourier domain and performing inverse Fourier transform;
Substitutes the calculated intensity information of the low-resolution image with the intensity information of the low-resolution image obtained from the image sensor and performs a Fourier transform to perform an initial hypothetical image polymerization instruction for superimposing the initial hypothesized image in a Fourier domain,
An imaging device that converges to a high-resolution image by repeatedly performing the low-resolution image calculation instruction and the initial hypothetical image polymerization instruction for each of the plurality of low-resolution images obtained from the image sensor. 10. The method of claim 9,
The high-resolution image processed by the processor includes phase information in addition to intensity information. The light irradiated from a light source configured to irradiate coherent light having a single wavelength changes any one of a wavefront and a polarization state of the light in an active light modulator, and forms a speckle pattern by a diffuser having an irregular structure surface, A method comprising: obtaining a plurality of low-resolution images from an image sensor by including a speckle pattern and passing light passing through a sample, which is an object, incident on an optical system; and
A high-resolution image processing step of repeatedly superimposing a plurality of low-resolution images obtained from the image sensor in a Fourier domain to obtain a high-resolution image,
each of the plurality of low-resolution images is obtained by differently modulating light by the active light modulator,
The diffuser is integrally formed on one surface of the sample chamber for accommodating the sample,
The imaging method, wherein the irregular structure surface of the diffuser is formed to satisfy Equation 1 below.
[Equation 1]

From here,

as,

is the distance between the peaks of the irregular structure,

is the median value of , NA is the numerical aperture of the optical system,

may represent the wavelength of light irradiated from the light source. 12. The method of claim 11,
wherein the diffuser is integrally formed on one surface of the sample chamber for accommodating the sample, and the irregularly structured surface of the diffuser is formed by adjusting the roughness of one surface of the sample chamber. 12. The method of claim 11,
The high-resolution image processing step is,
An initial hypothetical image generating step of determining a predetermined initial hypothetical image for obtaining the high-resolution image in a spatial domain and Fourier transforming;
A low-resolution image calculating step of calculating a low-resolution image by filtering the initial hypothetical image with a function related to at least one of the diffuser and the optical system in the Fourier domain and performing inverse Fourier transform;
An initial hypothetical image polymerization step of replacing the calculated intensity information of the low-resolution image with the intensity information of the low-resolution image obtained from the image sensor and performing a Fourier transform to polymerize the initial hypothetical image in a Fourier domain,
An imaging method for converging into a high-resolution image by repeatedly performing the low-resolution image calculation step and the initial hypothetical image polymerization step for each of the plurality of low-resolution images acquired from the image sensor. 14. The method of claim 13,
wherein the high resolution image includes phase information in addition to intensity information.

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