KR102269079B1 - vaporizer - Google Patents

Abstract

body; a plurality of stacked cells positioned inside the body and capable of storing chemicals; and a plurality of communication holes for communicating the plurality of stacked cells, wherein any one of the plurality of communication holes-a first communication hole- is selected from among the plurality of stacked cells. Vaporizer, which is positioned to communicate with one opening of one cell - the first cell - and allows the first cell to communicate with the cell - the second cell - adjacent to the upper or lower direction of the first cell is initiated.

Description

Easy filling and improved vaporization efficiency {vaporizer}

The present invention relates to a vaporizer that is easy to fill and has improved vaporization efficiency.

The vaporizer may be used to transport a material of a carrier gas to a process chamber of a semiconductor processing equipment such as, for example, a chemical vapor deposition (CVD) apparatus or an ion implanter. can

In general, the vaporizer is easy to fill, and it is required to uniformly vaporize as many chemicals as possible. For example, Korean Patent Publication No. 10-2007-0035527 (2007. 3. 30) (Method and apparatus for assisting contact promotion of gas and vaporized material) discloses a vaporizer, which increases the surface area of the chemical and However, it is a very cumbersome structure to fill with chemicals and check for leaks.

According to an embodiment of the present invention, there is provided a vaporizer capable of allowing a large surface area of a chemical to be vaporized (an area in contact with a carrier gas and an area receiving heat) and allowing the carrier gas to pass through all the surface areas.

According to an embodiment of the present invention, there is provided a vaporizer capable of vaporizing a chemical to be vaporized by maintaining a constant surface area for as long as possible.

According to an embodiment of the present invention, there is provided a vaporizer having a structure in which it is easy to fill a chemical to be vaporized.

According to an embodiment of the present invention

body;

a plurality of stacked cells positioned inside the body and capable of storing chemicals; and

and a plurality of communication holes for communicating the plurality of stacked cells.

Any one of the plurality of communication holes - the first communication hole - is positioned to communicate with one opening of any one of the plurality of stacked cells - the first cell, , a vaporizer characterized in that the first cell communicates with the adjacent cell-second cell- in the upper or lower direction of the first cell.

According to an embodiment of the present invention, the surface area of the chemical to be vaporized (the area in contact with the carrier gas and the area receiving heat) is increased, and the carrier gas can pass through all the chemicals.

According to an embodiment of the present invention, the surface area of the chemical to be vaporized is kept constant for as long as possible, so that it can be vaporized constantly.

According to an embodiment of the present invention, it is very easy to fill the chemical to be vaporized.

1 to 6 are views for explaining a vaporizer according to an embodiment of the present invention.
FIG. 7 is a cross-section of plane A in FIG. 1 , FIG. 8 is a cross-section of plane C in FIG. 1 , and FIG. 9 is a cross-section of plane B in FIG. 1 .
10 and 11 are views for explaining the vaporizer according to the embodiment of FIG. 1 .
12 to 16 are views for explaining a vaporizer according to another embodiment of the present invention.
17 is a view for explaining an example in which a filter is used in a vaporizer according to an embodiment of the present invention.
18 is a view for explaining a vaporizer according to another embodiment of the present invention.

The above objects, other objects, features and advantages of the present invention will be easily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed subject matter may be thorough and complete, and that the spirit of the present invention may be sufficiently conveyed to those skilled in the art. In this specification, when a component is referred to as being on another component, it means that it may be directly formed on the other component or a third component may be interposed therebetween.

Terms

In the present specification, the term 'structure for communication' refers to a structure for communication in the embodiment described with reference to FIGS. 1 to 16, and a structure for communication in the embodiment described with reference to FIGS. 18 to 21. It is used in an inclusive meaning, but this is not the case when it is necessary to distinguish between the two. In addition, the term 'communication hole' includes both the communication hole in the embodiment described with reference to FIGS. 1 to 16 and the communication hole in the embodiment described with reference to FIGS. 18 to 21 . It is used as a concept as a meaning, but not when it is necessary to distinguish between the two.

Chemicals vaporized by the vaporizer according to the present invention are, for example, boron (B: boron), phosphorous (P: phosphorous), copper (Cu: copper), gallium (Ga: gallium), arsenic (As: arsenic), Ruthenium (Ru: ruthenium), indium (In: indium), antimony (Sb: antimony), lanthanum (La: lanthanum), tantalum (Ta: tantalum), iridium (Ir: iridium), decaborane (B ₁₀ H ₁₄ : decaborane), _{hafnium tetrachloride (HfC l4} : hafnium tetrachloride), _{zirconium tetrachloride (ZrC l4} : zirconium tetrachloride), _{indium trichloride (InCl 3} : indium trichloride), metal organic beta-diketonate complex, Cyclopentadienyl cycloheptatriethyl titanium (CpTiChT: cyclopentadienyl cycloheptatrienyl titanium), _{aluminum trichloride (AlCl 3} : aluminum trichloride), titanium iodide (TixIy: titanium iodide), cyclooctatetraene cyclopentadienyl titanium ((Cot) (Cp)Ti: cyclooctatetraene cyclopentadienyltitanium), bis(cyclopentadienyl)titanium diazide [bis(cyclopentadienyl)titanium diazide], tungsten carbonyl (Wx(CO)y: tungsten carbonyl) (where x and y are natural numbers) , bis (cyclopentadienyl) ruthenium (II) [Ru (Cp) _2: bis (cyclopentadienyl) ruthenium (II)], phosphorus trichloride ruthenium (RuCl _3: ruthenium trichloride), and / or tungsten chloride (WxCly) (wherein, x and y are natural numbers).

1 to 11 are views for explaining a vaporizer according to an embodiment of the present invention, FIG. 7 is a cross-section of the A side in FIG. 1, FIG. 8 is a cross-section of the C side in FIG. 1, and FIG. is a cross-section of the B side in FIG. 1 .

Hereinafter, a vaporizer according to an embodiment of the present invention will be described with reference to all or part of these drawings.

Referring to FIG. 1 , the vaporizer according to an embodiment of the present invention includes a body 1 and at least one outer cover 3 and 5, and the body 1 has a space for storing (filling) chemicals (hereinafter referred to as 'filling'). , 'cell') is formed by stacking a plurality of them. As will be described later, the plurality of cells are stacked to communicate with each other.

The body 1 has an inlet 9 for injecting a carrier gas and an outlet through which the vaporized gas is discharged. In the vaporizer, a heating unit (not shown) for heating may be disposed to surround the outside of the body 1 , and a heating rod may also be disposed to be inserted into the hole H formed in the body 1 .

Referring to FIG. 2 , the outer cover 3 of the vaporizer according to an embodiment of the present invention may be separated from the body 1 or mounted on the body 1 . Although it has been described that the outer cover 3 is detached in this embodiment, it is possible to implement such that the outer cover 5 is detached or mounted.

3 and 4, the vaporizer according to an embodiment of the present invention, the inner cover 7 disposed between the outer cover 3 and the body 1 (hereinafter referred to as 'first inner cover') ) may be further included. Meanwhile, the vaporizer according to an embodiment of the present invention may further include an inner cover 107 (hereinafter referred to as a 'second inner cover') disposed between the outer cover 5 and the body 1 . .

According to an embodiment of the present invention, at least one cover of the first inner cover 7 and the second inner cover 107 may be made of a fluororesin (Teflon, etc.)-based material. For example, all or part of the first inner cover 7 may be made of a fluororesin (Teflon, etc.)-based material. In addition, all or part of the second inner cover 107 may be made of a fluororesin (Teflon, etc.)-based material.

3 and 4, the vaporizer according to an embodiment of the present invention, the cells that can be filled with chemicals (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60) , 61), and these cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 may be in communication with the communication structures and the communication holes. In the present specification, the term 'communication' means that there is a path through which the carrier gas and/or the vaporized gas can move.

According to an embodiment of the present invention, the heating rod is inserted into at least one of the spaces between the cells (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61). can Referring to FIG. 1 , two heating rods are inserted into the holes H formed between the cells 51 , 52 , 52 , 53 , 54 , 55 and the cells 56 , 57 , 58 , 59 , 60 , 61 .

3 and 4, the vaporizer according to an embodiment of the present invention, the communication holes (31, 32, 33, 34, 35) and the communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82). A plurality of stacked by these communication holes (31, 32, 33, 34, 35) and the communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82) The cells 51 , 52 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , and 61 communicate with each other.

3 and 4, in the vaporizer according to an embodiment of the present invention, the communication holes (31, 32, 33, 34, 35) are cells (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61) may provide a path through which carrier gas and/or vaporized gas may move. On the other hand, among the communication holes 31, 32, 33, 34, 35, the communication holes 31, 32, 33, 34 (hereinafter, and a communication hole 35 (hereinafter, 'adjacent cell communication hole') for communicating between the 'up and down cell communication hole') and the cells adjacent in the left and right direction (ie, horizontal direction). For example, the upper and lower cell communication holes 31 , 32 , 33 , and 34 may have a shape having a length in the vertical direction, and the adjacent cell communication hole 35 may have a shape having a length in the left and right direction. have.

Each of the communication holes 31 , 32 , 33 , and 34 communicates two vertically adjacent cells. For example, the communication hole 31 is for communicating the cell 52 and the cell 53 stacked under the cell 52 , and the communication hole 34 is the cell 54 and the cell 54 . ) is for communicating the cells 54 stacked below, and the communication hole 32 is for communicating the cell 58 and the cell 59 stacked under the cell 58, and the communication hole Reference numeral 33 is for communicating the cell 60 with the cell 61 stacked under the cell 60 . Meanwhile, the communication hole 35 is for communicating the cell 56 and the cell 62 adjacent to the cell 56 .

The communication holes 31 , 32 , 33 , 34 , 35 are formed between the cells 51 , 52 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 with carrier gas and/or vaporized gas. may provide a path through which to move. On the other hand, among the communication holes (31, 32, 33, 34, 35), the communication holes (31, 32, 33, 34) for communication between the cells stacked in the vertical direction and the connection between the adjacent cells to communicate It includes a through hole (35).

3 and 4, the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 in the vaporizer according to an embodiment of the present invention are each in a rectangular shape. It consists of a tubular shape. In this embodiment, the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 are configured in a cylindrical shape with openings facing each other on both sides, and these openings The inner cover in which the communication structures are formed and the cover in which the communication holes are formed are combined.
Each of the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, and 61 has a rectangular tubular shape, and thus consists of six surfaces. Meanwhile, for the purpose of explanation, these six surfaces are often referred to as top, bottom, front, back, left, and right sides. The upper surface and the lower surface are surfaces facing each other in the vertical direction (ie, the vertical direction), and the left surface and the rear surface are surfaces facing each other in the horizontal direction (ie, the left and right direction). Further, the front and rear surfaces face each other in the front and rear directions, and the direction in which the first inner cover 7 is coupled is the front side, and the direction in which the second inner cover 107 is coupled is the rear side.

In this embodiment, the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 are the first vertical stacked cells 51, 52, 53, 54, 55 , 56) and second vertical stacked cells 57, 58, 59, 60, 61, 62. In this embodiment, the first vertical stacking cells 51, 52, 53, 54, 55, 56 and the second vertical stacking cells 57, 58, 59, 60, 61, 62 are parallel to each other. disposed adjacent to each other, the first vertical stacked cells 51, 52, 53, 54, 55, 56 communicate with each other, and the second vertical stacked cells 57, 58, 59, 60, 61, 62 are connected to each other In addition, at least one of the first vertical stacked cells 51, 52, 53, 54, 55, 56 (for example, 56) and the second vertical stacked cells 57, 58, At least one of the stacked cells (eg, 62) among 59, 60, 61, and 62 communicates with each other. Cells (eg, 56 and 62 ) communicating with each other in the left and right directions may be located, for example, at the same height.

On the other hand, the cells (eg, 56 and 62) communicating with each other in the left and right directions may be located at the bottom, respectively, but this is an example, and the first vertical stacked cells 51, 52, 53, 54, 55 and 56) and a cell located in the middle among the second vertical stacked cells 57, 58, 59, 60, 61, and 62, it may be possible to communicate with each other.

3 and 4, in the vaporizer according to an embodiment of the present invention, the communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82) are cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 so that the chemical filled in the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 does not leak to the outside, respectively. 55, 56, 57, 58, 59, 60, 61) and performs the function of sealing, and the communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82) of some of the communication structures 72, 73, 74, 75, 76, 78, 79, 80, 81, 82 are communication holes 31, 32, 33, 34, 35 (hereinafter, 'first 1) holes for communication with (hereinafter, 'second communication holes)' 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52.

For example, the second communication hole 42 is formed in the communication structure 72 , is for communicating the first communication hole 31 and the cell 52 , and the second communication hole 43 . ) is formed in the communication structure 73 , and is for communicating the first communication hole 31 and the cell 53 . In the same way, the remaining second communication holes 44, 45, 46, 47, 48, 49, 50, 51, 52 are also for communicating cells.

3 and 4, in the vaporizer according to an embodiment of the present invention, the communication structures on one surface of the inner cover 7 (71, 72, 73, 74, 75, 76, 77, 78, 79 , 80 , 81 , 82 are formed, and communication holes 31 , 32 , 33 , 34 and 35 are formed on one surface of the outer cover 3 . Cells (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61) of both sides of the inner cover (7) and the facing structure for communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82 are formed, and communication holes 31, 32, 33 are formed on the surface facing the inner cover 7 among both surfaces of the outer cover 3 , 34, 35) are formed.

For example, the communication structures 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82 are located on one surface of the inner cover 7 and protrude a predetermined length, Each of the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 is configured to match one surface of the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61) is sealed so that the chemicals filled in it do not leak and provides a path through which the vaporized gas can move. Accordingly, when the chemical filled in the cells 51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 is vaporized, the vaporized gas is formed in the second communication holes 44, 45, 46, 47, 48, 49, 50, 51, 52).

According to an embodiment of the present invention, all or part of the communication structures 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82 formed on the first inner cover 7 are It may be composed of a fluororesin (Teflon, etc.)-based material.

In addition, all or part of the communication structures formed on the second inner cover 107 may also be made of a fluororesin (Teflon, etc.)-based material.

5 is a view for explaining a method of filling a chemical in the vaporizer according to an embodiment of the present invention.

Referring to FIG. 5 , the outer cover 3 and the inner cover 7 are separated from the body 1 . In this state, the direction of the body (1) is adjusted so that the cells (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61) formed in the body (1) face the sky direction. After that, chemicals may be filled in the cells 51 , 52 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 . Although not shown, numerical values indicating the amount of chemical filling may be expressed on inner sides of the cells 51 , 52 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , and 61 . The amount of chemical filled in each of the cells 51 , 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61 may be, for example, less than 100% of the volume of each cell. . That is, rather than completely filling the cells (51, 52, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61) with the chemical, as exemplarily shown in FIG. Preferably, this is to provide a space through which the carrier gas can move.

On the other hand, for the purpose of explaining the present invention, the direction of the body 1 when the chemical is filled (that is, the direction in which the cells are arranged to face the sky) is defined as the 'filling direction', and the chemical is The direction of the body 1 disposed to vaporize will be defined as a 'vaporization direction'.

As exemplarily shown in FIG. 5 , when all chemicals are filled in the vaporizer according to an embodiment of the present invention, the inner cover 70 and the outer cover 3 are coupled to the body 1 . Then, for vaporization, the body 1 is arranged in the vaporization direction.

According to an embodiment of the present invention, the body 1 may have a rectangular parallelepiped shape for ease of filling. In addition, at least one of the outer covers 3 and 5 coupled to the body 1 may have a rectangular parallelepiped shape.

In the above description, although the outer cover 3 in which the communication hole is formed and the first inner cover 70 in which the communication structures are formed have been described as an example, the outer cover 5 and the second inner cover 107 (Fig. 6 and Referring to FIG. 7 ), communication holes and communication structures may be formed, respectively. This will be described with reference to the drawings to be described later.

6 is a cross-sectional perspective view of the side A in FIG. 1 , FIG. 7 is a cross-sectional view of the side A in FIG. 1 , FIG. 8 is a cross-sectional view of the surface C in FIG. 1 , and FIG. 9 is a cross-sectional view of the side B in FIG. 1 . to be.

6 and 7, as a cross-section in a state in which the chemical-filled vaporizer according to an embodiment of the present invention is disposed in the vaporization direction, the cells 51, 52, 53, 54, 55, and 56 The principle of communication will be explained with an example. For convenience of understanding, a path through which the carrier gas moves is indicated by arrows in FIG. 7 .

6 and 7 , in the vaporizer according to an embodiment of the present invention, one opening of the cells 51 , 52 , 53 , 54 , 55 , 56 has a first inner cover 7 and an outer cover 3 . ) is coupled, and the second inner cover 107 and the outer cover 5 are coupled to the remaining openings of the cells 51 , 52 , 53 , 54 , 55 and 56 . In the present specification, the opening in which the first inner cover 7 and the outer cover 3 are combined is referred to as a 'first opening', and the opening in which the second inner cover 107 and the outer cover 5 are combined is referred to as a 'first opening'. 2 opening is defined.

According to an embodiment of the present invention, the first opening and the second opening are disposed to face each other.

6 and 7, the vaporizer according to an embodiment of the present invention is also connected to the communication structures that seal the second opening and provide a path through which the carrier gas and the vaporized gas can move. Includes passage holes. The excitation seat and the communication structures are formed on one surface of the second inner cover 107 - a surface facing the second opening - and the communication holes are formed on one surface of the outer cover 5 - the inner cover 107 and opposite to each other It is formed on the viewing side. The structure or function of the communication structures for sealing the second opening and providing a path through which the carrier gas and the vaporized gas can move and the communication holes are in the first inner cover 7 and the outer cover 3 . The communication structures (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82) and the communication holes (31, 32, 33, 34, 35) respectively formed are similar to those of the same , please refer to the description of FIGS. 1 to 5 .

Meanwhile, in FIGS. 6 and 7 , some of the communication structures and the communication holes respectively formed in the second inner cover 107 and the outer cover 5 are exemplarily shown. That is, the communication structures (171, 172, 173, 174, 175, 176), the communication structures (171, 172, 173, 174, 175, 176) formed in the holes (141, 142, 143, 144, 145) , 146), and the communication holes 131, 133, and 134 are shown.

6 and 7, in the vaporizer according to an embodiment of the present invention, in the first opening of the cells (51, 52, 53, 54, 55, 56) sequentially stacked in the vertical direction, communication structures are The formed first inner cover 7 and the outer cover 3 having communication holes are combined, and the second opening has a second inner cover 107 having communication structures formed thereon and an outer cover 5 having communication holes formed therein. are joined and sealed.

6 and 7, the cell 51 in the uppermost layer is in communication with the injection port 9, the first opening of the cell 51 is coupled to the communication structure 71, the cell ( The second opening of 51 is coupled to the communication structure 171 . In addition, the communication structure 72 is coupled to the first opening of the cell 52 , and the communication structure 172 is coupled to the second opening of the cell 52 . In addition, the communication structure 73 is coupled to the first opening of the cell 53 , and the communication structure 173 is coupled to the second opening of the cell 53 . In addition, the communication structure 74 is coupled to the first opening of the cell 54 , and the communication structure 174 is coupled to the second opening of the cell 54 . In this way, the communication structures are also coupled to the remaining cells.

On the other hand, the communication hole 131 surrounds the communication structure 171 and the communication structure 172 coupled to the second opening, and the communication structure 173 and the communication structure 174 coupled to the second opening. The communication hole 133 surrounds, and the communication hole 135 surrounds the communication structure 175 and the communication structure 176 coupled to the second opening, the second inner cover 107 is a second coupled to the opening. In addition, the communication hole 31 surrounds the communication structure 72 and the communication structure 73 coupled to the first opening, and the communication structure 74 and the communication structure 75 coupled to the first opening. The communication hole 33 surrounds the first inner cover so that the communication hole 35 surrounds the communication structure 76 coupled to the first opening and the communication structure 76 coupled to the second opening. (7) is coupled to the first opening.

On the other hand, the communication structure 171 has a hole 141 communicating with the communication hole 131 is formed, the communication structure 172 is formed with a hole 142 communicating with the communication hole 131, And, the communication structure 173 has a hole 143 communicating with the communication hole 133 is formed, and the communication structure 174 has a hole 144 communicating with the communication hole 133 is formed, and a hole 145 communicating with the communication hole 134 is formed in the communication structure 175, and a communication hole 146 communicating with the communication hole 134 is formed in the communication structure 176, have. In addition, the communication structure 72 has a hole 42 communicating with the communication hole 31 is formed, and the communication structure 73 has a hole 43 communicating with the communication hole 31 is formed, There is, the communication structure 74 has a hole 44 communicating with the communication hole 33 is formed, and the communication structure 75 has a hole 45 communicating with the communication hole 33 is formed, In the structure 76 for communication, a hole 46 communicating with the hole 34 for communication is formed.

As described above, communication structures are coupled to both openings of the cells 51, 52, 53, 54, 55, and 56 sequentially stacked in the vertical direction, respectively, so that the cells 51, 52, 53, 54, 55, 56 ) is sealed. On the other hand, at least one of the communication structures coupled to both openings of the cells 51 , 52 , 53 , 54 , 55 and 56 has a hole for communicating with the communication hole (eg, 42, 43, 44, 45, 46, 141, 142, 143, 144, 145, 146) are formed. In the present embodiment, all of the communication structures coupled to both openings of the cells 52, 53, 54, 55 and 56 have holes for communicating with the communication hole (for example, 42, 43, 44, 45, 46, 142, 143, 144, 145, 146) are formed. On the other hand, in the case of the cell 51 in the uppermost layer, there is no hole in the communication structure 71 coupled to the first opening, and a hole 141 is formed in the communication structure 171 coupled to the second opening. have.

Further, in the vaporizer according to an embodiment of the present invention, the communication holes coupled to the first opening side of the cell and the communication holes coupled to the second opening side of the cell are arranged in a zigzag shape.

Taking the cell 52 as an example, the communication hole 31 coupled to the first opening side of the cell 52 and the communication hole 131 coupled to the second opening side of the cell 52 are different from each other. to communicate with That is, the communication hole 31 coupled to the first opening side of the cell 52 is for communicating with the cell 53 stacked under the cell 52 , and is connected to the second opening side of the cell 52 . The combined communication hole 131 is for communicating with the cell 51 stacked on top of the cell 52 .

9 and 10 are for explaining a path through which the carrier gas and/or vaporized gas is moved in the cell 52 and the cell 58 located in the middle.

9 and 10 , the carrier gas and/or the vaporized gas introduced through the hole 142 formed in the communication structure 131 coupled to the second opening of the cell 52 is It may be moved to the cell 53 via the communication hole 31 through the hole 42 formed in the communication structure 72 coupled to the first opening. On the other hand, the cell 58 arranged side by side with the cell 52 does not communicate with the cell 52 , and the cell 58 communicates with the cell at the top and the cell at the bottom of the cell 58 .

In addition, taking the cell 53 as an example, the communication hole 31 coupled to the first opening side of the cell 53 and the communication hole 133 coupled to the second opening side of the cell 53 are each other It allows communication with other cells. That is, the communication hole 31 coupled to the first opening side of the cell 53 is for communicating with the cell 52 stacked on the top of the cell 53 , and is connected to the second opening side of the cell 53 . The coupled communication hole 133 is for communicating with the cell 54 stacked under the cell 53 . On the other hand, the communication hole 33 coupled to the first opening side of the cell 54 is for communicating with the cell 55 stacked under the cell 54 , and is connected to the second opening side of the cell 54 . The combined communication hole 133 is for communicating with the cell 53 stacked on the top of the cell 54 . The cell 55 may also be configured in the same manner as shown in FIGS. 6 and 7 .

In this embodiment, the cell 51 located in the uppermost layer receives the carrier gas injected through the injection hole 9 , and the carrier gas and vaporized gas into the cell 52 stacked under the cell 51 . has a configuration that allows it to be moved. For example, the cell 51 communicates with the injection hole 9 and a hole formed in the communication structure 171 coupled to any one of the openings of the cell 51 (eg, the second opening). It communicates with the communication hole 131 through 141 to communicate with the cell 52 .

In this embodiment, the cell 56 located in the lowest layer is in communication with the cell 62 located adjacently. FIG. 8 is for explaining a path through which a carrier gas and/or vaporized gas moves in the cell 56 and the cell 62 located in the lowermost layer.

Referring to FIG. 8 , the carrier gas and/or vaporized gas introduced through the hole 146 formed in the communication structure 176 coupled to the second opening of the cell 56 is the first opening of the cell 56 . It can be moved to the cell 62 via the communication hole 34 through the hole 46 formed in the communication structure 76 coupled to. The carrier gas and/or vaporized gas introduced into the cell 62 moves to the cell 61 on top of the cell 62 , then the cell 60 , the cell 59 , the cell 58 , and the cell It is discharged to the outside via (57). As described above, the process passing through the cell 60 , the cell 59 , the cell 58 , and the cell 57 moves through the hole formed in the communication structure and the communication hole.

11 is a diagram illustrating a flow of a carrier gas and/or vaporized gas in a vaporizer according to an embodiment of the present invention.

Referring to FIG. 11 , a path through which the carrier gas and/or the vaporized gas moves in the vaporizer according to an embodiment of the present invention may be understood. That is, the carrier gas injected into the inlet passes through the cells 51, 52, 53, 54, 55, 56, 62, 61, 60, 59, 58, 57, and the vaporized gas is also discharged to the outside along the same path.

12 to 16 are views for explaining a vaporizer according to another embodiment of the present invention.

12 to 16 , in the vaporizer according to another embodiment of the present invention, a diaphragm (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31) is installed inside each cell. has been

The present embodiment described with reference to FIGS. 12 to 16 is different from the embodiment described with reference to FIGS. 1 to 11 , the diaphragms 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31) is different in that it is additionally installed, and the rest of the configuration is the same. Therefore, the differences will be mainly described.

For the purpose of description, the diaphragms 21 and 22 disposed in the cell 52 will be described as a reference. The diaphragm 21 is positioned to cover the hole 42 formed in the communication structure and spaced apart from each other by a predetermined distance, and the diaphragm 23 is also spaced apart from the hole 142 formed in the communication structure by a predetermined distance. In the present embodiment, two diaphragms 21 and 22 are provided in the cell 52, however, this is exemplary and one can be provided.

When only one diaphragm is provided for each cell, it is preferable to provide only on the side of the first opening or only on the side of the second opening. For example, only 21, 23, 25, 27, 29 and 31 diaphragms are provided, or 22, 24, 26, 28 and 30 diaphragms are provided.

The reason for installing the diaphragms 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , and 31 inside the cells is for ease of filling with chemicals. When the body (1) is placed in the filling direction and there is no diaphragm (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31) when filling each cell with chemicals, for communication This is to prevent this to some extent because chemicals can move through the holes formed in the structure.

17 is a view for explaining an example in which a filter is used in a vaporizer according to an embodiment of the present invention.

A filter for preventing scattering of solids may be used in the vaporizer according to an embodiment of the present invention.

Referring to FIG. 17 , the filter F may be mounted at one end of the inlet through which the carrier gas is injected or the outlet through which the vaporized gas is discharged. The filter F does not pass the solid chemical to be vaporized, but allows the vaporized gas or carrier gas to pass therethrough.

17, the filter is mounted at an arbitrary position P1 on the inside of the inlet coupled to the inlet through which the carrier gas is injected, or the filter is mounted on the inside of the outlet coupled to the outlet through which the vaporized gas is discharged. A filter may be mounted at an arbitrary position P1 of .

That is, a filter that does not pass solids and passes only vaporized gas or carrier gas may be mounted inside the inlet or outlet, or at one end of the inlet or outlet.

Alternatively, a filter that passes only a vaporized gas or a carrier gas without passing solids may be mounted inside the inlet and outlet, or at one end of the inlet and outlet.

For example, in the vaporizer described with reference to FIGS. 1 to 16, a filter that passes only vaporized gas or carrier gas without passing solids as described in FIG. 17 is mounted inside the inlet and/or outlet, or It can be mounted on one end of the inlet and outlet. Alternatively, in the vaporizer to be described later with reference to FIGS. 17 to 21, as described in FIG. 17, a filter that passes only vaporized gas or carrier gas without passing solids is mounted inside the inlet and/or outlet, or is connected to the inlet and the inlet. It can be mounted on one end of the outlet.

18 to 21 are views for explaining a vaporizer according to another embodiment of the present invention.

With reference to these drawings, the vaporizer according to an embodiment of the present invention includes a body 301 and at least one outer cover 303 and 305, and the body 301 stores (fills) chemicals. A plurality of spaces ('cells') are stacked and formed.

An inlet 309 for injecting a carrier gas and an outlet 302 through which the vaporized gas is discharged are formed in the body 301 . In the vaporizer, a heating unit (not shown) for heating may be disposed to surround the outside of the body 301 , and a heating rod may also be disposed to be inserted into the hole H formed in the body 301 .

18 to 21, the vaporizer according to an embodiment of the present invention, the inner cover 307 ('first inner cover') disposed between the outer cover 303 and the body 301, and, It may further include an inner cover 307 ('second inner cover') disposed between the outer cover 305 and the body 301 . Here, at least one of the first inner cover 307 and the second inner cover 307 may be made of a fluororesin (Teflon, etc.)-based material. For example, all or part of the first inner cover 307 may be made of a fluororesin (Teflon, etc.)-based material. In addition, all or part of the second inner cover 307 may be made of a fluororesin (Teflon, etc.)-based material.

18 to 21 , the vaporizer according to an embodiment of the present invention includes cells 351, 352, 353, 354, 355, 356, 357, 358, 359, 360, 361 that can be filled with chemicals. , 362), and these cells 351 , 352 , 353 , 354 , 355 , 356 , 357 , 358 , 359 , 360 , 361 , 362 may communicate with the communication structures through the communication holes.

18 to 21 , the vaporizer according to an embodiment of the present invention may include communication holes and communication structures. The difference between the embodiment described with reference to FIGS. 18 to 21 and the embodiment described with reference to FIGS. 1 to 16 is in the location and configuration of the communication holes and the communication structures.

That is, the communication holes described with reference to FIGS. 1 to 16 are formed in the outer cover, and the communication structures are located in the inner cover. In contrast, in the embodiment described with reference to FIGS. 18 to 21 , the communication holes and the communication structures are different in that they are not located on the inner covers 307 and 317 or the outer covers 303 and 305 . .

In the embodiment described with reference to FIGS. 18 to 21 , the communication holes are formed on the opening side of the cells. For example, referring to FIG. 18 , a communication hole 331 is formed at one opening side of the cell 352 . The communication hole 331 is for communicating between the cell 352 and the cell 353 stacked under the cell 352 . More specifically, the communication hole 331 is for communicating one opening of the cell 352 with one opening of the cell 353 stacked under the cell 352 .

In addition, the vaporizer according to the embodiment described with reference to FIGS. 18 to 21, a communication hole for communicating the cell 351 and the cell 352 stacked under the cell 351, the cell 353 and A communication hole for communicating the cell 354 stacked under the cell 353, a communication hole for communicating the cell 354 with the cell 355 stacked under the cell 354, and the cell 355 ) and a communication hole for communicating the cell 356 stacked under the cell 355, and a communication hole for communicating the cell 356 and the cell 357 located in the horizontal direction of the cell 356 ( 335), a communication hole for communicating the cell 357 and the cell 362 stacked on the cell 357, and a connection for communicating the cell 362 and the cell 361 stacked on the cell 362 A common hole, a communication hole for communicating the cell 361 and the cell 360 stacked on the cell 361, and a connection for communicating the cell 360 and the cell 359 stacked on the cell 360 The communication hole includes a communication hole for communicating the cell 359 and the cell 358 stacked on the cell 359 .

Meanwhile, in the vaporizer according to the embodiment described with reference to FIGS. 18 to 21 , communication structures are respectively coupled to at least some of the aforementioned communication holes. For example, in this embodiment, the communication structure is configured to include a filter (eg, 313, 316, 319, 372, 383, 379, 386) that passes only vaporized gas or carrier gas without passing solids. can be Meanwhile, the communication structure may be coupled to all the communication holes, or the communication structure may be coupled to all other communication holes except for the communication hole 335 for communicating cells located in the horizontal direction.

In the present specification, for the purpose of explanation, a communication structure configured to include a filter is often referred to as a communication structure having a filtering function.

Referring to FIG. 18 , the communication structure 372 used in the vaporizer according to an embodiment of the present invention is configured to include a filter 373 . The filter 373 passes only gas (carrier gas or vaporized gas) without passing solids. In addition, the communication structure 372 may further include a fixing part 373 , and the fixing part 372 fixes the filter 373 so that the filter 373 seals the communication hole 331 . . For example, one side of the fixing part 372 is coupled to the filter 373 , and the other side of the fixing part 372 is coupled to the upper portion of the cell 352 .

On the other hand, in the embodiment of Figures 18 to 21, although it has been described that the communication structures having a filtering function are configured in a T-shape, this is exemplary and may be configured to have other shapes. That is, any structure may be used as long as it is capable of sealing the communication hole having a filtering function.

18 , an enlarged view showing a communication hole 331 after removing the communication structure 372 from the cell 352 is displayed in the upper left for the purpose of explaining the present invention. The communication hole 331 communicates the cell 352 and the cell 353 , and the communication hole 331 is closed by the communication structure 372 having a filtering function. Accordingly, only the gas vaporized in the cell 352 and the carrier gas are moved to the cell 353 through the communication hole 331 .

Since the structures and functions of the other communication structures and communication holes are similar to those of the communication structure 371 and the communication hole 331 , a detailed description thereof will be omitted.

Meanwhile, for components not described in the embodiment described with reference to FIGS. 18 to 21 , refer to the description of the embodiment described with reference to FIGS. 1 to 16 .

The vaporizer described above with reference to one or more embodiments has been described as having a rectangular shape, but it is exemplary and those skilled in the art will readily understand that the present invention may be implemented in other shapes. In addition, those skilled in the art can easily understand that the number of cells or the number of communication holes and structures for communication are exemplary and that the present invention may be implemented with a number different from these. Furthermore, those skilled in the art will readily understand that the number of components implemented as a plurality is exemplary and may be implemented with a different number.

1: body
3, 5: Outer cover
7, 107: inner cover
9: Inlet
31, 32, 33, 34: hole for communication
21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31: barrier
51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62: cell
71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82: communication structure
42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52: Hall

Claims (28)

a body including a plurality of cells capable of storing chemicals;
a first outer cover coupled to one surface of the body;
a first inner cover disposed between the body and the first outer cover; and
a plurality of communication holes for communicating the plurality of cells;
The plurality of cells are each configured in a cylindrical shape, and each of the plurality of cells has an opening,
The plurality of communication holes include first communication holes, and the first communication holes are formed in the first inner cover,
The plurality of cells includes a first cell and a second cell adjacent to each other in an upper or lower direction, and a third cell and a fourth cell adjacent to each other in a left-right direction,
Any one of the first communication holes is for communicating the opening of the third cell and the opening of the fourth cell. According to claim 1,
It further includes; a plurality of communication structures for sealing the plurality of cells,
The plurality of communication structures are formed on the first inner cover,
The plurality of communication structures are coupled to respective openings of the plurality of cells to seal the plurality of cells,
The first communication holes are vaporizer, characterized in that formed in the plurality of communication structures. 3. The method of claim 2,
The plurality of communication holes further include second communication holes, and the second communication holes are formed in the first outer cover, the vaporizer. 4. The method of claim 3,
The vaporizer, characterized in that any one of the second communication holes communicates with any one of the first communication holes and any one of the plurality of cells. 4. The method of claim 3,
The plurality of communication structures includes a communication-type structure coupled to the opening of the third cell and a communication-type structure coupled to the opening of the fourth cell,
Any one of the first communication holes is formed in the communication-type structure coupled to the opening of the third cell, and the other of the first communication holes is formed in the communication-type structure coupled to the opening of the fourth cell,
Any one of the second communication holes communicates the fourth cell with the first communication hole formed in the communication-type structure coupled to the opening of the third cell. 4. The method of claim 3,
The plurality of cells further include a fifth cell and a sixth cell vertically adjacent to the fifth cell,
The plurality of communication structures includes a communication-type structure coupled to the opening of the fifth cell and a communication-type structure coupled to the opening of the sixth cell,
Any one of the first communication holes is formed in the communication-type structure coupled to the opening of the fifth cell, and the other of the first communication holes is formed in the communication-type structure coupled to the opening of the sixth cell,
Any one of the second communication holes communicates the sixth cell with the first communication hole formed in the communication-type structure coupled to the opening of the fifth cell. According to claim 1,
a second outer cover coupled to the other surface opposite to one surface of the body; and
a second inner cover disposed between the body and the second outer cover; Vaporizer, characterized in that it further comprises. 8. The method of claim 7,
A rear surface of the plurality of cells is an opening
A plurality of communication structures are formed on the second inner cover,
The plurality of communication structures formed in the second inner cover are coupled to the rear opening,
The vaporizer, characterized in that the communication holes are formed in the plurality of communication structures formed in the second inner cover. 9. The method according to any one of claims 1 to 8,
an injection hole formed in the body;
an inlet mounted on the inlet for injecting a carrier gas;
an outlet formed in the body;
an outlet mounted on the outlet for discharging at least one of a vaporized gas and a carrier gas;
It further includes; at least one filter that passes the vaporized gas and the carrier gas without passing the solid;
The inlet is in communication with any one cell among the plurality of cells, and the outlet is in communication with another cell among the plurality of cells,
the at least one filter
i) the end of the inlet or the inside of the inlet
ii) the end of the outlet or the interior of the outlet
Vaporizer, characterized in that mounted on at least one of. 9. The method of any one of claims 2 to 6 and 8, wherein
The vaporizer, characterized in that the material of the communication structure is a fluororesin series. 9. The method according to any one of claims 1 to 8,
Vaporizer, characterized in that the heating rod is inserted between the plurality of cells. 9. The method of any one of claims 2 to 6 and 8, wherein
The communication structures are vaporizer, characterized in that provided with a filtering function. 9. The method according to any one of claims 1 to 8,
The first inner cover is detachably coupled to the cells, and the first outer cover is detachably coupled to the body. 9. The method according to any one of claims 1 to 8
The body is a vaporizer, characterized in that the rectangular parallelepiped shape. 9. The method according to any one of claims 1 to 8
Another one of the first communication holes is for communicating the opening of the first cell and the opening of the second cell. delete delete delete delete delete delete delete delete delete delete delete delete delete

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