KR102264672B1 - Electron emission and x-ray apparatus having the same - Google Patents

Abstract

The disclosed electron emission source according to the present invention includes an emitter unit emitting electrons for generating X-rays, a guider unit guiding the installation of the emitter unit, and a gate unit extracting electrons emitted from the emitter unit, and the emitter unit includes a guider unit. It is inserted into the part and the posture is fixed, but the surface from which electrons are emitted has a non-planar shape. According to this configuration, it is advantageous to induce the growth of carbon nanotubes in the non-planar region of the emitter portion, thereby contributing to the improvement of electron emission efficiency.

Description

Electron emission source and X-ray apparatus including same {ELECTRON EMISSION AND X-RAY APPARATUS HAVING THE SAME}

The present invention relates to an electron emission source and an X-ray apparatus including the same, and more particularly, to an electron emission source capable of improving electron emission efficiency according to induction of growth of carbon nanotubes, and an X-ray apparatus including the same.

In general, X-rays are provided with an X-ray tube, which is a vacuum tube, to emit X-rays. The cathode of this X-ray tube is formed of a tungsten filament and is heated by an electric current to emit hot electrons. In contrast, when a high voltage of tens of thousands of volts or more is applied to the anode of the X-ray tube, the electron current emitted from the cathode moves toward the anode at high speed. At this time, when the electron current collides with the counter electrode made of tungsten, molybdenum, etc. of the anode, the energy it has is emitted as X-rays.

Meanwhile, in recent years, the development of X-rays using the growth of carbon nanotubes (CNTs) as a field emission source of X-rays is being actively conducted. A carbon nanotube (CNT) is a carbon allotrope made of carbon, and one carbon atom is combined with another carbon atom in a hexagonal honeycomb pattern to form a tube, and thus has been applied in various electrical and electronic fields.

For reference, the X-rays to which carbon nanotubes (CNTs) are applied form a desired pattern by a lithography process using a resistor on the upper portion of the catalyst metal layer, and then grow carbon nanotubes, an electron emission source, on the pattern. A manufacturing method of forming a shaped electron-emitting source is common. This lithography manufacturing method has disadvantages in that it is uneconomical and not easy to control the growth of carbon nanotubes (CNTs) compared to simple manufacturing.

Accordingly, in recent years, research on carbon nanotube (CNT) growth control methods of various methods capable of overcoming the disadvantages of lithography manufacturing methods is continuously being studied.

Korean Patent Registration No. 10-0851950 (2018.08.06)

It is an object of the present invention to provide an electron emission source capable of improving electron emission efficiency by inducing growth of carbon nanotubes according to a non-planar shape.

Another object of the present invention is to provide an X-ray apparatus including an electron emission source in which the above object is achieved.

Electron emission source according to the present invention for achieving the above object, an emitter unit for emitting electrons for generating X-rays, a guider unit for guiding the installation of the emitter unit, and a gate unit for extracting electrons emitted from the emitter unit Including, wherein the emitter part is inserted in the plane direction to the guider part, the surface on which the electrons are emitted has a non-planar shape.

In addition, the emitter part has a bar shape extending in the longitudinal direction, an emitter bar made of a metal material, and a carbon nanotube protruding from an emission surface from which the electrons are emitted of the emitter bar. It may contain an emitter acid that grows

In addition, the emitter mountain has a sharp tip, and may be provided singly or in plurality so as to be parallel to each other in the longitudinal direction of the emitter bar.

In addition, a plurality of the emitter bars may be provided, overlapping each other in the longitudinal direction, and may be coupled to each other.

In addition, a plurality of emitter mountains each protrude from the plurality of emitter bars, and the number of the emitter mountains each protruding from the plurality of emitter bars may be the same or different from each other.

In addition, the guider part may have a plate shape in which an insertion groove formed to a predetermined depth in the plane direction is provided so that the emitter part is inserted in the longitudinal direction.

In addition, the insertion groove includes an extension region that gradually narrows in width from the outer periphery of the guider part toward the center, and a fixed region connected from the extension region and having a width corresponding to the emitter part, and the emitter part is the expanded region. It is inserted through the region and the inserted posture in the fixed region may be fixed.

In addition, the gate part has a plate shape in which a gate mesh for extracting the electrons emitted from the emitter part and a gate hole formed through a gate hole in a region facing the emitter part are provided, and laminated on the guider part into which the emitter part is inserted. can be

In addition, a cover portion provided between the guider portion into which the emitter portion is inserted and the gate portion, a cover hole through which a cover hole is formed in a region facing the emitter portion, and a spacing between the emitter portion with respect to the gate portion It may include a spacer part provided between the cover part and the gate part to adjust the spacer part through which a spacer hole is formed in a region facing the emitter part.

X-ray apparatus according to a preferred embodiment of the present invention, the body portion having a vacuum internal space, is provided inside the body portion to emit electrons, electron emission comprising any one of claims 1 to 9 It includes a source and an anode for guiding to the outside of the main body by generating X-rays by collision with the electrons emitted from the electron emission source.

In addition, the electron emission source may be provided at a lower portion of the main body, and the anode unit may be provided at an upper portion of the main body to face the electron emission source.

According to the present invention having the above configuration, first, by providing a surface from which electrons are emitted from the emitter in a non-planar shape, it is advantageous to induce carbon nanotube growth according to the non-planar shape. In particular, since the emitter portion includes a plurality of emitter acids protruding in a pointed tip shape, it is possible to contribute to the improvement of carbon nanotube growth efficiency. .

Second, since a plurality of emitter bars provided with emitter acids are provided and coupled to each other, it is easy to change the electron emission conditions according to the control of the number of emitter bars and the number of emitter acids according to the X-ray generation conditions.

Third, workability is improved due to the simple installation in which the emitter part is inserted into the guider part insertion groove, and the emitter part can be positioned at the correct position, so that the quality of X-ray generation can be improved.

1 is a perspective view schematically showing an X-ray apparatus including an electron emission source in a preferred embodiment of the present invention.
FIG. 2 is a schematic enlarged perspective view of the electron emission source shown in FIG. 1 .
FIG. 3 is an exploded perspective view schematically exploded view of the electron emission source shown in FIG. 2 . And,
FIG. 4 is a schematic enlarged perspective view of the emitter unit shown in FIG. 3 .

Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. However, the spirit of the present invention is not limited to such embodiments, and the spirit of the present invention may be proposed differently by adding, changing, and deleting components constituting the embodiment, but this is also included in the scope of the present invention. will become

1 is a perspective view schematically showing an X-ray apparatus 1 including an electron emission source in a preferred embodiment of the present invention. Referring to FIG. 1 , the X-ray apparatus 1 according to an embodiment of the present invention includes a body portion 10 , an electron emission source 20 , and an anode portion 30 .

The body portion 10 has a cylindrical shape in which a space is provided, and the inside is in a vacuum state. At one side of the main body 10 , a window 11 which is an entrance and exit of X-rays emitted from the inside of the main body 10 to the outside is provided. The window 11 may be formed of a metal material such as beryllium and aluminum, or a glass material coated with a fluorescent material.

When the window 11 is formed of a metal material such as beryllium, it may be filtered so that only X-rays L of a predetermined wavelength or less are emitted. In addition, when the window 11 is formed of a glass material coated with a fluorescent material, visible light may be emitted through the window 11 .

The body portion 10 may be formed of a non-metallic material, and in this case, insulation is provided to prevent a high-voltage current of 70,000 volts or more applied to the electron emission source 20 to be described later from flowing along the inner wall of the body portion 10 . can be obtained

The electron emission source 20 emits electrons from the inside of the body part 10 . Here, the electron emission source 20 includes an electron emission module or an electron gun that emits electrons (E) to generate X-rays, and is provided in the lower portion of the body portion 10 . The configuration of such an electron emission source 20 will be described later in more detail.

The anode unit 30 collides with electrons emitted from the electron emission source 20 to generate light such as X-rays and guides it to the outside of the body unit 10 . The light including X-rays generated from the anode unit 30 may vary depending on the material of the anode unit 30 and the magnitude of the voltage applied to the X-ray apparatus 1 , specifically, among X-rays, visible rays, infrared rays, and ultraviolet rays. can be any one

The anode part 30 is provided on the upper part of the body part 10 to face the electron emission source 20 . In addition, the anode unit 30 may be provided with a reflective surface (not shown) to generate X-rays (L) or light by collision with electrons to guide them to the outside of the body unit 10 . Since the configuration of the anode unit 30 having such a reflective surface is not a gist of the present invention, detailed description thereof will be omitted.

For reference, the reflective surface (not shown) of the anode part 30 is formed of the same material as the anode part 30 or is formed of a fluorescent material to generate at least one of X-rays, visible rays, infrared rays, and ultraviolet rays. . In addition, when the reflective surface (not shown) is formed of a material such as glass rather than a metal, a modified example of generating light for illumination by collision with electrons is also possible.

2 and 3, the electron emission source 20 according to a preferred embodiment of the present invention is enlarged.

2 and 3 , the electron emission source 20 includes an emitter unit 210 , a guider unit 220 , a gate unit 230 , a cover unit 240 , and a spacer unit 250 .

The emitter unit 210 emits electrons for generating X-rays. To this end, the emitter unit 210 includes an emitter bar 211 and an emitter acid 212 as shown in FIG. 4 .

The emitter bar 211 is provided in the shape of a bar made of a metal material. Here, the emitter bar 211 is provided so as to be insertable in the radial direction with respect to the guider part 220 to be described later. In addition, a plurality of emitter bars 211 are provided so as to overlap each other. In this case, the plurality of emitter bars 211 may be coupled to each other by an adhesive means such as an adhesive.

For reference, the number of emitter bars 211 is not limited to the illustrated example, and it is natural that various modifications are possible according to electron emission conditions.

A plurality of emitter acids 212 are protruded so as to be parallel to each other in the longitudinal direction on a surface (hereinafter referred to as an emission surface) 213 from which electrons are emitted of the emitter bar 211 . The emitter acid 212 is formed to protrude from the emission surface 213 toward the above-described anode portion 30 such that the emission surface 213 of the emitter bar 211 has a non-planar shape.

As shown in FIG. 4 , the emitter mountain 212 protrudes singly or in plurality so as to have a pointed tip in the longitudinal direction of the emitter bar 211 . In addition, as a plurality of emitter bars 211 are provided and are adjacent to each other so as to overlap each other in the longitudinal direction, a plurality of emitter mountains 212 protruding from the plurality of emitter bars 211, respectively, and adjacent emitter bars 211 ) to be adjacent to the emitter acid 212 of .

However, the present invention is not limited thereto, and it is natural that the shape, number, size, etc. of the plurality of emitter mountains 212 protruding from the plurality of emitter bars 211 may be variously modified according to electron emission conditions. In addition, in FIG. 4 , the number of the plurality of emitter mountains 212 protruding from the plurality of emitter bars 211 is exemplified as being the same, but the number of emitter mountains 212 is not limited thereto. may be different from each other.

Meanwhile, the emitter acid 212 is advantageous in inducing growth of carbon nanotubes (CNTs), which are nanomaterials, in the emitter acid 212 due to its pointed shape. To this end, the emitter acid 212 may be made of a metal or a carbon-based material on which carbon nanotubes can be grown. For reference, the emitter bar 211 on which the emitter acid 212 is provided may also be formed of a metal or a carbon-based material to be integrally formed with the emitter acid 212 , but it is of course not limited thereto. .

The guider unit 220 guides the installation of the emitter unit 210 . The guider part 220 has a plate shape, and an insertion groove 221 formed to a predetermined depth in the plane direction so that the emitter part 210 is inserted is provided.

The insertion groove 221 includes an extended region 222 whose width is gradually narrowed from the outer periphery toward the center, and a fixed region 223 connected from the extended region 222 and having a width corresponding to the width of the emitter unit 210 . have That is, the insertion groove 221 is connected in a Y-shape from the extended area 222 to the fixed area 223 . Due to the shape of the insertion groove 221 , the emitter unit 210 is inserted through the extension area 222 and enters the fixed area 223 , so that it does not flow in the fixed area 223 and is fixed in its posture.

On the other hand, a pair of guider installation holes 224 are provided at positions spaced apart from each other in the radial direction of the guider part 220 , so that the installation position of the guider part 220 with respect to the body part 10 can be guided.

The gate unit 230 extracts electrons emitted from the emitter unit 210 . The gate part 230 is provided with a gate mesh 231 for extracting electrons emitted from the emitter part 210 and a gate hole 232 formed therethrough in a region facing the emitter part 210 . In this case, the gate mesh 231 may be made of a metallic material.

The gate part 230 has a plate shape stacked to face the guider part 220 , and a pair of gate installation holes 233 are formed through the guider part 220 at a position corresponding to the guider installation hole 224 . do. In addition, the gate hole 232 has a shape extending in a radial direction to expose the emitter portion 210 , and the emitter mountain 212 of the emitter portion 210 is exposed through the gate hole 232 .

In the cover part 240 , a cover hole 241 is formed through a region facing the emitter part 210 , and is provided between the guider part 220 into which the emitter part 210 is inserted and the gate part 230 . Here, the cover part 240 covers the emitter part 210 inserted into the insertion groove 221 of the guider part 220 , but exposes the emitter mountain 212 through the cover hole 241 . The cover part 240 is laminated to be in close contact with the upper surface of the guider part 220 to cover the emitter bar 211 of the emitter part 210 inserted into the insertion groove 221 . At the same time, the cover part 240 is provided so as not to interfere with electron emission by exposing the emitter acid 212 through the cover hole 241 .

The spacer part 250 is provided between the cover part 240 and the gate part 230 to adjust the spacing between the emitter part 210 with respect to the gate part 230 . In the spacer part 250 , a spacer hole 251 is formed through a region facing the emitter part 210 to expose the emitter mountain 212 of the emitter part 210 .

On the other hand, the bottom surface of the spacer part 250 may be provided with a step difference so that the cover part 240 can be inserted. That is, the cover part 240 is inserted into the bottom surface of the spacer part 250 , and the spacer part 250 is stacked with the cover part 240 to be interposed between the guide part 220 and the gate part 230 . it can be

In addition, a pair of cover installation holes 242 and spacer installation holes 252 are provided in the cover portion 240 and the spacer portion 250 so as to face the radial direction in order to guide the installation position with respect to the body portion 10 . Each may be formed through. For reference, by sequentially communicating with the guider installation hole 224, the cover installation hole 242, the spacer installation hole 252, and the guider installation hole 224, one installation hole is formed in the body portion 10. It is possible to guide the installation position of the electron emission source 20 for the.

An electron emission operation of the electron emission source 20 having the above configuration will be described with reference to FIGS. 2 to 4 .

2 and 3 , the emitter unit 210 is inserted along the insertion groove 221 of the guider unit 220 . At this time, the emitter unit 210 is guided to be easily inserted through the extended area 222 of the insertion groove 221 , and then enters the fixed area 223 and the posture is fixed. In addition, as shown in FIG. 4 , the emitter unit 210 has a shape in which a plurality of emitter bars 211 are coupled to each other, and a plurality of emitter mountains 212 are provided in the emitter bar 211 . As a result, it has a non-planar shape.

In a state in which the emitter unit 210 is inserted into the insertion groove 221 and fixed, the cover unit 240 is stacked on the guider unit 220 . At this time, the emitter mountain 212 of the emitter part 210 is exposed through the cover hole 241 of the cover part 240 . The spacer part 250 is stacked on the upper surface of the cover part 240 , and the gate part 230 is stacked on the upper surface of the spacer part 250 . Accordingly, a gap between the gate part 230 and the emitter part 210 may be adjusted by the spacer part 250 .

Meanwhile, the emitter mountain 212 of the emitter part 210 is exposed through the cover hole 241 , the spacer hole 251 , and the gate hole 232 , and carbon nanotubes are formed from the exposed emitter mountain 212 . As it grows, electrons are emitted.

Electrons emitted from the emitter unit 210 collide with the anode unit 30 to generate X-rays, as shown in FIG. 1 , and the generated X-rays are guided to the outside through the window 11 of the body unit.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the following claims. You will understand that it can be done.

1: X-ray device
10: body part
20: electron emission source
30: anode unit
210: emitter unit
211: emitter bar
212: Emitter Mountain
220: guider
221: insertion groove
230: gate unit
231: gate mesh
232: gatehole
240: cover part
241: cover hole
250: spacer part
251: spacer hole

Claims (11)

an emitter unit emitting electrons for generating X-rays;
a guider unit for guiding the installation of the emitter unit; and
a gate part for extracting electrons emitted from the emitter part;
includes,
The emitter part is inserted into the guider part and the posture is fixed, the surface from which the electrons are emitted has a non-planar shape,
The guider part is provided with an insertion groove formed to a predetermined depth in the plane direction so that the emitter part is inserted in the longitudinal direction,
The insertion groove includes an extended region whose width is gradually narrowed from the outer periphery of the guider part toward the center, and a fixed region connected from the extended region and having a width corresponding to the emitter part,
The emitter unit is inserted through the extension region, the electron emission source in which the inserted posture in the fixed region is fixed. According to claim 1,
The emitter part,
an emitter bar having a bar shape extending in the longitudinal direction and made of a metal material; and
an emitter acid protruding from the emission surface from which the electrons are emitted of the emitter bar to grow carbon nanotubes;
An electron emission source comprising a. 3. The method of claim 2,
The emitter acid has a sharp tip, and a single or a plurality of electron emission sources are provided so as to be parallel to each other in the longitudinal direction of the emitter bar. 3. The method of claim 2,
The emitter bar is provided with a plurality of electron emitting sources that are coupled to overlap each other in the longitudinal direction so as to be adjacent. 5. The method of claim 4,
The emitter acid is an electron-emitting source each projecting a plurality of the emitter bar. delete delete According to claim 1,
The gate portion has a plate shape in which a gate mesh for extracting the electrons emitted from the emitter portion and a gate hole formed through a gate hole in a region facing the emitter portion are provided, and electrons stacked on the guider portion into which the emitter portion is inserted emission source. According to claim 1,
a cover part provided between the guider part into which the emitter part is inserted and the gate part, the cover part having a cover hole formed therethrough in a region facing the emitter part; and
a spacer part provided between the cover part and the gate part so as to adjust a spacing between the emitter part with respect to the gate part, and having a spacer hole formed therethrough in a region facing the emitter part;
An electron emission source comprising a. a body portion having an internal space of vacuum;
an electron emitting source provided inside the main body to emit electrons, the electron emitting source including claim 1; and
an anode unit for guiding to the outside of the body unit by generating X-rays by collision with the electrons emitted from the electron emission source;
An X-ray device comprising a. 11. The method of claim 10,
The electron emission source is provided in the lower portion of the body, the X-ray apparatus in which the anode unit is provided to face the electron emission source in the upper portion of the main body.

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