KR102260165B9 - Nitrogen oxide gas detection sensor - Google Patents

Nitrogen oxide gas detection sensor

Info

Publication number
KR102260165B9
KR102260165B9 KR20190082938A KR20190082938A KR102260165B9 KR 102260165 B9 KR102260165 B9 KR 102260165B9 KR 20190082938 A KR20190082938 A KR 20190082938A KR 20190082938 A KR20190082938 A KR 20190082938A KR 102260165 B9 KR102260165 B9 KR 102260165B9
Authority
KR
South Korea
Prior art keywords
detection sensor
nitrogen oxide
gas detection
oxide gas
nitrogen
Prior art date
Application number
KR20190082938A
Other languages
Korean (ko)
Other versions
KR20210007096A (en
KR102260165B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020190082938A priority Critical patent/KR102260165B1/en
Publication of KR20210007096A publication Critical patent/KR20210007096A/en
Application granted granted Critical
Publication of KR102260165B1 publication Critical patent/KR102260165B1/en
Publication of KR102260165B9 publication Critical patent/KR102260165B9/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0037NOx
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401Multistep manufacturing processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/7869Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Ceramic Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Pathology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020190082938A 2019-07-10 2019-07-10 Nitrogen oxide gas detection sensor KR102260165B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020190082938A KR102260165B1 (en) 2019-07-10 2019-07-10 Nitrogen oxide gas detection sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190082938A KR102260165B1 (en) 2019-07-10 2019-07-10 Nitrogen oxide gas detection sensor

Publications (3)

Publication Number Publication Date
KR20210007096A KR20210007096A (en) 2021-01-20
KR102260165B1 KR102260165B1 (en) 2021-06-03
KR102260165B9 true KR102260165B9 (en) 2021-09-17

Family

ID=74304686

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190082938A KR102260165B1 (en) 2019-07-10 2019-07-10 Nitrogen oxide gas detection sensor

Country Status (1)

Country Link
KR (1) KR102260165B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101192934B1 (en) * 2011-02-28 2012-10-18 성균관대학교산학협력단 Ultraviolet detector with metal oxide nanostructures and fire monitoring apparatus using ultraviolet detector with metal oxide nanostructures
US10038060B2 (en) * 2016-05-19 2018-07-31 Qualcomm Incorporated Graphene NMOS transistor using nitrogen dioxide chemical adsorption
KR101924541B1 (en) * 2017-04-05 2018-12-03 충남대학교산학협력단 Semiconductor sensor with metal oxide nanorod structure and menufacturing method teherof
KR102003031B1 (en) * 2017-12-21 2019-07-25 주식회사 엔디디 Bio-sensing device

Also Published As

Publication number Publication date
KR20210007096A (en) 2021-01-20
KR102260165B1 (en) 2021-06-03

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Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
G170 Publication of correction