KR102260165B9 - Nitrogen oxide gas detection sensor - Google Patents
Nitrogen oxide gas detection sensorInfo
- Publication number
- KR102260165B9 KR102260165B9 KR20190082938A KR20190082938A KR102260165B9 KR 102260165 B9 KR102260165 B9 KR 102260165B9 KR 20190082938 A KR20190082938 A KR 20190082938A KR 20190082938 A KR20190082938 A KR 20190082938A KR 102260165 B9 KR102260165 B9 KR 102260165B9
- Authority
- KR
- South Korea
- Prior art keywords
- detection sensor
- nitrogen oxide
- gas detection
- oxide gas
- nitrogen
- Prior art date
Links
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 title 3
- 238000001514 detection method Methods 0.000 title 1
- 239000007789 gas Substances 0.000 title 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Ceramic Engineering (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Pathology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Medicinal Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190082938A KR102260165B1 (en) | 2019-07-10 | 2019-07-10 | Nitrogen oxide gas detection sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190082938A KR102260165B1 (en) | 2019-07-10 | 2019-07-10 | Nitrogen oxide gas detection sensor |
Publications (3)
Publication Number | Publication Date |
---|---|
KR20210007096A KR20210007096A (en) | 2021-01-20 |
KR102260165B1 KR102260165B1 (en) | 2021-06-03 |
KR102260165B9 true KR102260165B9 (en) | 2021-09-17 |
Family
ID=74304686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020190082938A KR102260165B1 (en) | 2019-07-10 | 2019-07-10 | Nitrogen oxide gas detection sensor |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR102260165B1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101192934B1 (en) * | 2011-02-28 | 2012-10-18 | 성균관대학교산학협력단 | Ultraviolet detector with metal oxide nanostructures and fire monitoring apparatus using ultraviolet detector with metal oxide nanostructures |
US10038060B2 (en) * | 2016-05-19 | 2018-07-31 | Qualcomm Incorporated | Graphene NMOS transistor using nitrogen dioxide chemical adsorption |
KR101924541B1 (en) * | 2017-04-05 | 2018-12-03 | 충남대학교산학협력단 | Semiconductor sensor with metal oxide nanorod structure and menufacturing method teherof |
KR102003031B1 (en) * | 2017-12-21 | 2019-07-25 | 주식회사 엔디디 | Bio-sensing device |
-
2019
- 2019-07-10 KR KR1020190082938A patent/KR102260165B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20210007096A (en) | 2021-01-20 |
KR102260165B1 (en) | 2021-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
E701 | Decision to grant or registration of patent right | ||
G170 | Publication of correction |