KR102257723B9 - Scan apparatus - Google Patents

Scan apparatus

Info

Publication number
KR102257723B9
KR102257723B9 KR1020190148684A KR20190148684A KR102257723B9 KR 102257723 B9 KR102257723 B9 KR 102257723B9 KR 1020190148684 A KR1020190148684 A KR 1020190148684A KR 20190148684 A KR20190148684 A KR 20190148684A KR 102257723 B9 KR102257723 B9 KR 102257723B9
Authority
KR
South Korea
Prior art keywords
scan apparatus
scan
Prior art date
Application number
KR1020190148684A
Other languages
Korean (ko)
Other versions
KR102257723B1 (en
KR20210061499A (en
Inventor
한봉석
한유진
박진홍
한주석
Original Assignee
주식회사 앤에이치씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 앤에이치씨 filed Critical 주식회사 앤에이치씨
Priority to KR1020190148684A priority Critical patent/KR102257723B1/en
Publication of KR20210061499A publication Critical patent/KR20210061499A/en
Application granted granted Critical
Publication of KR102257723B1 publication Critical patent/KR102257723B1/en
Publication of KR102257723B9 publication Critical patent/KR102257723B9/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Image Input (AREA)
KR1020190148684A 2019-11-19 2019-11-19 Scan apparatus KR102257723B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020190148684A KR102257723B1 (en) 2019-11-19 2019-11-19 Scan apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190148684A KR102257723B1 (en) 2019-11-19 2019-11-19 Scan apparatus

Publications (3)

Publication Number Publication Date
KR20210061499A KR20210061499A (en) 2021-05-28
KR102257723B1 KR102257723B1 (en) 2021-06-16
KR102257723B9 true KR102257723B9 (en) 2022-04-15

Family

ID=76140241

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190148684A KR102257723B1 (en) 2019-11-19 2019-11-19 Scan apparatus

Country Status (1)

Country Link
KR (1) KR102257723B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102681207B1 (en) * 2023-05-31 2024-07-03 주식회사 머신앤비전 Optical Inspection Systems for Wafer Level Packages

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009288050A (en) * 2008-05-29 2009-12-10 Toppan Printing Co Ltd Imaging device and inspection device
JP5538707B2 (en) * 2008-11-19 2014-07-02 株式会社メガトレード Lighting device
JP5770495B2 (en) * 2011-03-11 2015-08-26 一般社団法人モアレ研究所 Shape measuring device and lattice projection device
JP2013205202A (en) * 2012-03-28 2013-10-07 Azbil Corp Visual inspection apparatus for solder spike
KR101747172B1 (en) * 2015-05-20 2017-06-14 (주)씨소 3D scan image generation device and method
KR101875467B1 (en) * 2016-11-11 2018-07-06 (주) 인텍플러스 3-dimensional shape measurment apparatus and method thereof

Also Published As

Publication number Publication date
KR102257723B1 (en) 2021-06-16
KR20210061499A (en) 2021-05-28

Similar Documents

Publication Publication Date Title
IL287774A (en) Scanning device
GB201917727D0 (en) Apparatus
IL284444A (en) Multi-beam inspection apparatus
GB201912391D0 (en) Scanning apparatus
SG11202111411VA (en) Body-positioning apparatus
IL277822A (en) Multi-beam inspection apparatus
GB2592096B (en) Multi-Gym apparatus
GB201904079D0 (en) Apparatus
GB202007971D0 (en) Hair0styling apparatus
GB201817501D0 (en) Scanning apparatus
GB201817503D0 (en) Scanning apparatus
GB202111099D0 (en) Light-emiting apparatus
GB201914997D0 (en) Apparatus
GB201900835D0 (en) Test apparatus
KR102257723B9 (en) Scan apparatus
GB2605860B (en) An apparatus
GB201918864D0 (en) Apparatus
GB201916967D0 (en) Imaging apparatus
GB201907188D0 (en) Apparatus
GB201905243D0 (en) Radiotherepy apparatus
GB201901164D0 (en) Test apparatus
GB2588092B (en) Scanning apparatus
GB201912323D0 (en) Scanning Apparatus
GB2587352B (en) Articulable-gate apparatus
GB2580912B (en) Apparatus

Legal Events

Date Code Title Description
G170 Re-publication after modification of scope of protection [patent]