KR102253244B1 - Device system for constituting 3d image lidar sensor based on transceiving optical phased array - Google Patents

Abstract

The present invention relates to a device system constituting a light detection and ranging (LiDAR) sensor that acquires a 3D image based on an optical phased array (OPA) technology in which a transmission/reception function is integrated. Alternatively, a light source that is implemented on a chip and transmits a transmission optical signal of a laser, a directional coupler that extracts and mixes a reference optical signal of a part of the transmission optical signal and the reception optical signal received from the optical antenna by the transmission optical signal, the directional coupler A photodetector that converts the mixed optical signal supplied from the optical signal into an electrical signal and outputs intermediate frequency information, and the in-phase optical mode received from the light source or the optical antenna is branched and combined on an N-channel scale under constructive interference conditions. A phase controller that sequentially applies a phase difference to the optical mode according to a divider, a transmission operation, or a reception operation, or phases the optical modes, and processes the optical mode of each channel according to a phase difference condition through the phase controller. Includes an optical antenna array.

Description

Device system that composes 3D image lidar sensor based on transmission/reception optical phase array {DEVICE SYSTEM FOR CONSTITUTING 3D IMAGE LIDAR SENSOR BASED ON TRANSCEIVING OPTICAL PHASED ARRAY}

The present invention relates to a device system constituting a light detection and ranging (LiDAR) sensor that acquires a 3D image based on an optical phased array (OPA) technology in which a transmission/reception function is integrated. It relates to unit element technology and operation method constituting a phased array.

Optical phase array (OPA) technology using semiconductor integration technology can be used for LiDAR sensor technology that provides 3D images including distance information. It is advantageous for anger. However, since the optical phase array technology up to now has been mainly focused on the transmission optical phase array (Tx-OPA) technology that provides only the transmission (Tx) function, a separate reception (Rx) technology is required to construct a 3D image sensor. Technology, optical system technology and signal processing technology are indispensable.

The photodetector of the receiver is miniaturized for high-speed processing and low-noise operation, and since the intensity of the reflected beam is low, optical technology such as a lens system is required to improve the reception sensitivity, and the entrance pupil according to the angle of incidence due to refraction of the lens Because the position of the photodetector is different, an expensive array photodetector technology is indispensable. In addition, even if a near-infrared wavelength range corresponding to a longer wavelength than visible light is used, when a LiDAR sensor is used during the day, interference by infrared rays emitted from sunlight and a laser beam emitted by an adjacent external LiDAR sensor An additional technique for excluding interference was required.

In order to overcome this problem, recently, the optical phase array for transmission and reception (Tx/Rx-OPA) method that separates and integrates the same-scale optical phase array for transmission (Tx-OPA) and optical phase array for reception (Rx-OPA). As a result, a technology for a sensor that recognizes distance information has been reported. However, the aperture size of the optical antenna used in the technology is small, so there is a limit on the detection distance, power consumption for driving two independent optical phase arrays (OPA), device area, and There is a disadvantage in that the complexity of phase matching increases.

For example, when the size of the optical phase array (OPA) optical antenna in the longitudinal direction is increased, a resolution improves effect on a transmission side, and reception efficiency is improved on a reception side, thereby finally increasing a transmission/reception detection distance. In particular, when the size in the longitudinal direction is increased to the level of several mm, it may be possible to operate without a lens optical system only for applications with a viewing distance (<20m). However, due to the characteristics of the optical antenna structure used in the results of previous studies to date, it is difficult to avoid interference between optical antenna channels, and the optical antenna lengthwise size is limited to a level of mm or less.

It is an object of the present invention to improve the inefficiency of the conventional unidirectional transmission optical phase arrangement (Tx-OPA) or separate transmission optical phase arrangement (Tx/Rx-OPA). ) To provide a unit device structure to improve the structure and transmission/reception efficiency.

In the transmission/reception photoelectric device unit included in the device system constituting the 3D image lidar sensor based on the transmission/reception optical phase arrangement according to an embodiment of the present invention, it is implemented on a substrate or on a chip to transmit a laser transmission optical signal. A light source, a directional coupler that extracts and mixes the reference optical signal of a part of the transmission optical signal and the reception optical signal received from the optical antenna by the transmission optical signal, and converts the mixed optical signal supplied from the directional coupler into an electric signal, and intermediate It includes a photodetector that outputs frequency information.

The light source is implemented on an integrated optical chip including a low refractive index upper and lower clad layer and a high refractive index waveguide layer on the substrate, and frequency modulation may be possible.

The light source generates the transmission optical signal of the frequency-modulated laser beam and outputs it through an optical waveguide, and some of the reference optical signals of the output transmission optical signals are combined through the directional coupler, and the remaining transmission optical signals are transmitted/received. It can be guided by the optical phase arrangement part.

The directional coupler may obtain the intermediate frequency information corresponding to a frequency difference by combining the reference optical signal and some of the received optical signals received from the optical antenna.

The photodetector outputs the intermediate frequency information, and the device system directly acquires distance information to a target through the intermediate frequency information and provides a 3D image including the distance information.

In the device system for configuring a 3D image lidar sensor based on a transmission/reception optical phase array according to an embodiment of the present invention, a reference optical signal of a part of a transmission optical signal transmitted through a light source and an optical antenna and the transmission optical signal The transceiving photoelectric device unit for outputting intermediate frequency information by mixing received optical signals and the in-phase optical mode received from the light source or the optical antenna are branched and combined in an N-channel scale, and light according to a transmission operation or a reception operation It includes a transmission/reception optical phase arrangement unit that controls the phase of the mode and processes according to the phase difference condition.

The transmit/receive photoelectric device unit is implemented on a substrate or on a chip, and the light source for transmitting the transmission optical signal of a laser, the reception optical signal received from the optical antenna by the transmission optical signal and the reference light of a part of the transmission optical signal A directional coupler for extracting and mixing signals, and a photodetector for converting the mixed optical signal supplied from the directional coupler into an electric signal and outputting intermediate frequency information.

The transmission/reception optical phase array unit is an optical splitter that branches and combines the in-phase optical mode received from the light source or the optical antenna at an N-channel scale under constructive interference conditions, and a phase difference sequentially between the optical modes according to a transmission operation or a reception operation. It may include a phase controller that applies or phases the phases of the optical modes, and an optical antenna array that processes the optical modes of each channel through the phase controller according to a phase difference condition.

During a transmission operation, the phase controller may apply a sequential phase difference to the N-channel in-phase optical mode branched from the optical splitter in order to radiate the transmission optical signal from the optical antenna in a specific direction.

During a reception operation, the phase controller may in-phase the phase of the optical mode, which is received in a specific direction through the optical antenna and represents a sequential phase difference in each channel.

The optical antenna array passes through the phase controller and radiates the optical modes of each channel representing a sequential phase difference onto a free space, and directs the optical mode in a specific direction according to a phase difference condition, or receives the received optical signal incident from a specific direction. Thus, it can be provided to have a sequential phase difference in each channel.

The optical antenna array may exhibit a nano-hole-chain antenna structure that is advantageous in increasing the size of the array in the longitudinal direction.

The optical antenna array may be formed in a cavity structure representing a plurality of holes, thereby minimizing a gap between a plurality of channels to provide a narrow unit channel providing a wide horizontal viewing angle.

The optical antenna array may enlarge the aperture of the antenna in the longitudinal direction by minimizing interference between the plurality of channels.

In the device system for configuring a 3D image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention, a light source that is implemented on a substrate or on a chip to transmit a transmission optical signal of a laser, and the transmission optical signal A directional coupler that extracts and mixes the reference optical signal of a part of the reception optical signal and the transmission optical signal received from the optical antenna by means of a directional coupler, and a photodetector that converts the mixed optical signal supplied from the directional coupler into an electrical signal and outputs intermediate frequency information , An optical splitter for branching and combining the in-phase optical mode received from the light source or the optical antenna at an N-channel scale under constructive interference conditions, applying a phase difference sequentially to the optical mode according to a transmission operation or a reception operation, or And a phase controller for phasing the phases of the optical modes, and an optical antenna array for processing the optical modes of each channel through the phase controller according to a phase difference condition.

According to an embodiment of the present invention, a single optical phase arrangement (OPA) for performing laser beam transmission and reflection beam reception is implemented, and by performing a transmission/reception operation with only a single optical phase arrangement, power consumption is reduced, and an accurate transmission unit and Since phase matching of the receiver is unnecessary, signal processing complexity can be reduced.

In addition, according to an embodiment of the present invention, by isolating a light source (transmitter) and a photodetector (receiver) including a directional coupler including a fully absorbing waveguide, interference between the transmitter and the receiver can be minimized.

In addition, according to an embodiment of the present invention, by including an optical antenna array of a nano-hole-chain structure antenna structure, which is advantageous for increasing the horizontal viewing angle in order to improve the vertical resolution according to the increase in the size in the vertical direction and minimize the interval between channels, the sensing distance is reduced. Can be improved.

In addition, according to an embodiment of the present invention, a silicon CMOS process having advantages in low cost and mass production may be utilized through a device system constituting a 3D image lidar sensor based on a transmission/reception optical phase array.

1 is a block diagram of a device system constituting a three-dimensional image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention.
2 is a diagram illustrating a device system including a transmission/reception photoelectric device unit and an optical phase arrangement unit according to an exemplary embodiment of the present invention.
3 is a diagram illustrating a principle of detecting a distance to an object through a frequency modulation scheme according to an embodiment of the present invention.
4 and 5 are views for explaining a directional coupler and a waveguide according to an embodiment of the present invention.
6, 7A and 7B illustrate the structure of a nano-hole-chain antenna array according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. In addition, the same reference numerals shown in each drawing indicate the same member.

In addition, terms used in the present specification are terms used to properly express preferred embodiments of the present invention, which may vary according to the intention of viewers or operators, or customs in the field to which the present invention belongs. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

1 is a block diagram of a device system constituting a 3D image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention.

Referring to FIG. 1, a device system constituting a 3D image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention is a transmission/reception photoelectric device unit (TRx-OE) that provides interoperability between a light source and a photodetector. Electrical)) and a transmission/reception optical phase array unit (TRx-OPA (Optical Phased Array)) that performs laser beam scanning. To this end, the device system 100 constituting a 3D image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention includes a light source 110, a photodetector 120, a directional coupler 130, and an optical splitter. 140, a phase controller 150, and an optical antenna array 160. Further, the transmission/reception photoelectric device unit (TRx-OE) constituting the device system 100 constituting the 3D image lidar sensor based on the transmission/reception optical phase arrangement according to an embodiment of the present invention includes a light source 110 and a photodetector ( 120 and a directional coupler 130, and the transmission/reception optical phase array unit TRx-OPA includes an optical splitter 140, a phase controller 150, and an optical antenna array 160.

The device system 100 constituting a 3D image lidar sensor based on a transmission/reception optical phase arrangement according to an embodiment of the present invention is characterized by utilizing a single optical phase arrangement (OPA), through which laser beam transmission and reflection It provides a transmission/reception integrated OPA (transmission/reception optical phase array unit (TRx-OPA)) that simultaneously performs beam reception.

In addition, the element system 100 constituting a 3D image lidar sensor based on a transmission/reception optical phase array according to an embodiment of the present invention has a cavity structure (Nano By including a structure of an optical antenna array having a -hole chain, it is advantageous for receiving the directional and wide-view angle reflected beam, and a laser diode (or light source, Laser Diode; LD, 110) for transmission and a photodiode (or To isolate the photodetector, PhotoDiode; PD, 120, the structure of the directional coupler 130 is proposed. In this case, the PD may be configured in a balanced form to receive a mixed and branched differential optical signal.

The light source 110 may be implemented outside a substrate (eg, a chip) or on a substrate to transmit a laser transmission optical signal and perform frequency modulation. The device system 100 according to the embodiment of the present invention includes components (light source 110, photodetector 120, directional coupler 130) on a silicon substrate or a photonic integrated circuit (PIC) chip. An optical splitter 140, a phase controller 150, and an optical antenna array 160 may be included.

In this case, the light source 110 may be a laser that transmits a laser beam. The light source 110 modulates the frequency of the laser beam, generates a transmission optical signal of the frequency-modulated laser beam, and outputs it through an optical waveguide. Accordingly, some of the transmitted optical signals among the output transmission optical signals are coupled to the photodetector 120 through the directional coupler 130, and the remaining transmitted optical signals are guided to the transmission/reception optical phase arrangement units 140, 150, and 160. I can. The combination of the transmission optical signal and the waveguide will be described in detail through the directional coupler 130 below.

The directional coupler 130 combines the reference optical signal, which is a part of the transmission optical signal transmitted from the light source 110, and the received optical signal received through the optical phase arrangement unit 140, 150, 160, to a 2x2 MMI. It is possible to obtain intermediate frequency information by supplying a mixed optical signal to the photodetector 120 through the 2 port exit of the MMI. In this case, the signal branch ratio of the directional coupler may be adjusted to a value that maximizes reception sensitivity. The photodetector 120 receives a mixed optical signal in which a received optical signal received from an optical antenna and the reference optical signal are mixed by a transmission optical signal through the directional coupler 130 and converts it into an electrical signal. The photodetector 120 may output intermediate frequency information carried in the mixed optical signal received and may have a balanced structure.

For example, a reference optical signal of 1 in the ratio of 99 to 1 among the transmitted optical signals transmitted through the light source 110 is injected into the directional coupler 130, and 50 in the ratio of 50 to 50 among the received optical signals. The received optical signal of may also be injected into the directional coupler 130. Accordingly, the directional coupler 130 may obtain an intermediate frequency value from a frequency difference between the reference optical signal having a ratio of 1 and a received optical signal having a ratio of 50. The phase of the reference optical signal coupled to the directional coupler 130 can be adjusted by the phase controller 150 for maximum reception sensitivity strokes. The photodetector 120 outputs intermediate frequency information included in the mixed signal, and the device system 100 according to an embodiment of the present invention directly acquires distance information to an object through the intermediate frequency information A 3D image including information may be provided.

The optical splitter 140 divides and combines the in-phase optical mode transmitted from the light source 110 or received from the optical antenna on an N-channel scale under constructive interference conditions.

The phase controller 150 sequentially applies a phase difference to the optical mode according to a transmission operation or a reception operation, or phases the optical modes in phase.

For example, the phase controller 150 may sequentially apply a phase difference to the N-channel in-phase optical mode branched from the optical splitter 140 in order to radiate a transmission optical signal from the optical antenna in a specific direction during a transmission operation. . In addition, during the reception operation, the phase controller 150 may in-phase the phase of the optical mode, which is received in a specific direction through an optical antenna and represents a sequential phase difference in each channel.

The optical antenna array 160 passes through the phase controller 150 and radiates an optical mode of each channel representing a sequential phase difference onto a free space and directs it in a specific direction according to a phase difference condition, or a received optical signal incident from a specific direction. It is possible to receive in-phase through the sequential phase difference set during transmission in each channel.

For example, the transmitted optical signal phase-modulated from the phase controller 150 passing through the optical splitter 140 through the directional coupler 130 may be radiated (transmitted) into the free space through the optical antenna array 160, The optical signal radiated into the free space may hit a specific object and be reflected, and then incident (received) to the phase controller 150 through the optical antenna array 160 to be in-phase. Accordingly, the received optical signal is directed to the optical splitter 140 and the directional coupler 130, and intermediate frequency information obtained through the directional coupler 130 may be converted into an electric signal through the photodetector 120 and detected.

The optical antenna array 160 according to an embodiment of the present invention may exhibit a nano-hole-chain antenna structure that is advantageous for increasing the size in the longitudinal direction of the array.

The optical antenna array 160 includes a plurality of channels, and each of the plurality of channels is formed in a cavity structure representing a plurality of holes to provide a narrow unit-channel spacing that minimizes the spacing between the plurality of channels. It is advantageous in achieving a wide viewing angle in the horizontal direction. The optical antenna array 160 includes a hole-shaped cavity structure, providing low interference between channels, making it easy to enlarge the antenna aperture in the longitudinal direction, and minimizing interference between a plurality of channels (or light emitters). can do. Through this, the optical antenna array 160 is easy to enlarge the aperture of the antenna in the vertical direction, thereby improving the resolution in the longitudinal direction (or in the vertical direction).

2 is a diagram illustrating a device system including a transmission/reception photoelectric device unit and an optical phase arrangement unit according to an embodiment of the present invention, and FIG. 3 is a distance to a target through a frequency modulation method according to an embodiment of the present invention. It is shown to explain the principle of detection.

The device system 100 constituting a 3D image lidar sensor according to an embodiment of the present invention provides interoperability between a light source or a laser (LD, 110) and a photodetector (PD, 120), as shown in FIG. Transmitting/receiving photoelectric element unit (TRx-OE, 200) and transceiving optical phase array unit (TRx-OPA, 300) that integrates the functions of transmitting (Tx) and receiving (Rx) laser beams into a single optical phase array (OPA). ), it is possible to accurately measure the distance to the target through the coherent transmission/reception effect of the laser beam.

The transmission/reception optical phase array unit (TRx-OPA, 300) according to an embodiment of the present invention can be manufactured in a monolithic integration method based on silicon semiconductor technology, and miniaturization and ultra-thinness are achieved by excluding the lens of the light receiving unit. Can be realized. The initial part of the transceiving optical phase arrangement unit (TRx-OPA, 300) is composed of a light source or laser (LD, 110) and a photodetector (PD, 120) interlocking with each other, and the device system 100 according to the embodiment of the present invention is Distance information can be acquired by hardware, and a LiDAR sensor that acquires a 3D image can be implemented through this.

The transceiver photoelectric device unit (TRx-OE, 200) is composed of a light source (LD, 110) capable of frequency modulation and an integrated structure of a photodetector (PD, 120) providing high reception sensitivity, and a light source (LD)-photodetector ( PD) includes a directional coupler 130 for interlocking and intermediate frequency acquisition.

The transceiving optical phase array unit (TRx-OPA, 300) is an optical splitter for multi-channel optical branching, a phase controller that adjusts the lateral steering of the optical phase array (OPA) through phase control of light, and a wide viewing angle and high It includes an integrated structure of an optical antenna array that exhibits resolution, and vertical variability.

Here, the light source (FMCW-LD, 110) of the transmission/reception photoelectric device unit (TRx-OE, 200) generates a frequency-modulated laser beam and outputs it through an optical waveguide, and at this time, some light (transmission optical signal) is a directional coupler. It is coupled through 130, and the remaining light (transmitting optical signal) is guided to the transmit/receive optical phase arrangement unit (TRx-OPA, 300). Accordingly, the transmission/reception optical phase arrangement unit (TRx-OPA, 300) diverges the light transmitted from the transmission/reception photoelectric device unit (TRx-OE, 200) into N channels through the optical splitter, and independently through the N phase controllers. You can control the phase of each channel. Each independently phase-controlled light is supplied to the N array antennas and radiates into free space, and may have lateral steering according to the degree of phase control.

Thereafter, the reflected beam formed by the laser beam reaching the target to be detected is received through the optical antenna array of the transmission/reception optical phase array unit (TRx-OPA, 300), and a single mode combined through the optical splitter It may be received by the transceiving photoelectric device unit TRx-OE 200. The light (received optical signal) received by the transceiving photoelectric device unit (TRx-OE, 200) is combined with some distributed light (some transmitted optical signal) of the existing light sources (LD, 110) in the directional coupler 130. As a result, intermediate frequency information corresponding to the frequency difference may be included in the mixed signal, and the photodetector (Balanced-PD) 120 may output an intermediate frequency value of the mixed signal. Accordingly, the device system 100 according to the exemplary embodiment of the present invention may directly obtain distance information from the target through the intermediate frequency value.

Referring to FIG. 2, a conceptual diagram of the operation of the device system 100 according to the embodiment of the present invention as described above can be confirmed, and light (transmission optical signal) output from the light sources LD and 110 is transmitted/received optical phase arrangement. A target in free space is detected through the unit (TRx-OPA, 300), and reflected light (received optical signal) is received and received by the photodetector (PD, 120).

Accordingly, as shown in FIG. 3, the device system 100 according to the embodiment of the present invention includes a down-interval beat frequency (fdn) value and a light source ( Distance information from a target may be obtained through an up-interval beat frequency (fup) value occurring in a region in which the frequency of the LD 110 falls.

4 and 5 are views for explaining a directional coupler and a waveguide according to an embodiment of the present invention.

More specifically, FIG. 4 shows a structure of a directional coupler for isolating a light source and a photodetector according to an embodiment of the present invention, and FIG. 5 shows a structure of a fully absorbing waveguide according to an embodiment of the present invention. .

Referring to FIG. 4, the directional coupler according to an embodiment of the present invention may generate a reference optical signal of some of the transmitted optical signals and a received optical signal of some of the received optical signals in the first region 410 and the second region 420. Combined, and at the lower ends of both sides, a perfect absorber (PA) according to an embodiment of the present invention may be included as shown in FIG. 5. The combined reference optical signal is phase-controlled under optimal conditions by the phase controller 430 to realize an improvement in reception sensitivity.

For example, when a transmission optical signal is transmitted through a light source, light is incident from the optical waveguide from left to right, and a transmission optical signal of 1 is injected into the directional coupler at a ratio of 99 to 1 in the first region 410, The remaining 99 transmit optical signals may be transmitted to the free space through an antenna. Thereafter, when the received optical signal is received from the antenna in the free space, light is incident from the optical waveguide from right to left, and the received optical signal of 50 is injected into the directional coupler at a ratio of 50 to 50 in the second region 420. , The remaining 50 received optical signals are injected into and removed from the complete absorption waveguide PA. This is to eliminate noise.

Accordingly, the directional coupler according to an embodiment of the present invention can generate a crosstalk optical signal including intermediate frequency information from a frequency difference between a transmission optical signal having a ratio of 1 and a reception optical signal having a ratio of 50. The branch ratio of the combiners can be changed to optimize the reception sensitivity. When the intermediate frequency information (or intermediate frequency value) is included in the mixed optical signal by the directional coupler, the photodetector 120 outputs the intermediate frequency information from the mixed optical signal, and the transmission/reception optical phase arrangement according to an embodiment of the present invention The device system constituting the based 3D image lidar sensor may directly acquire distance information to an object through intermediate frequency information to provide a 3D image including distance information.

6, 7A and 7B illustrate the structure of a nano-hole-chain antenna array according to an embodiment of the present invention.

In more detail, FIG. 6 shows a structure of a nano-hole-chain antenna array according to an embodiment of the present invention, and FIG. 7A shows a cross-section of an antenna according to an embodiment of the present invention, and FIG. 7B Shows a longitudinal section of an antenna according to an embodiment of the present invention.

Referring to FIG. 6, the optical antenna array 600 according to an embodiment of the present invention may exhibit a nano-hole-chain antenna structure that is advantageous in increasing the size of the array in the longitudinal direction. The optical antenna array 600 includes a plurality of channels (or light emitters, 610), and each of the plurality of channels 610 has a cavity structure 611 representing a plurality of holes. A narrow inter-channel spacing that minimizes the spacing between the channels 610 may be provided.

The nano-hole-chain antenna structure represented by the optical antenna array 600 according to an embodiment of the present invention may provide an effect of improving a wide viewing angle in a horizontal direction and a resolution in a vertical direction. For example, a structure capable of minimizing interference between antennas even when the antenna spacing is narrowed, that is, a lateral wide viewing angle effect capable of achieving a wide viewing angle according to minimizing the antenna channel spacing may be provided. As another example, since interference between antennas is small, by forming an antenna aperture as long as possible in a longitudinal direction at a given antenna interval, an effect of improving resolution according to a large longitudinal antenna aperture can be provided.

As the distance between the channels 610 for achieving a wide viewing angle in the lateral direction decreases, the more interference occurs, and the optical antenna array 600 according to the embodiment of the present invention includes each channel 610 as shown in FIGS. 7A and 7B. ) By forming the nano-cavity structure 611, it is possible to minimize the gap between the channels 610.

Accordingly, the optical antenna array 600 according to the embodiment of the present invention includes a nano-cavity structure 611 in the shape of a hole, thereby providing low interference between channels, making it easy to enlarge the diameter of the antenna in the longitudinal direction. It is possible to minimize interference between the channels 610 of. In addition, the optical antenna array 600 can minimize the distance between the array antennas in the lateral direction, thereby widening the viewing angle in the lateral direction.

As described above, although the embodiments have been described by the limited embodiments and drawings, various modifications and variations are possible from the above description to those of ordinary skill in the art. For example, the described techniques are performed in a different order from the described method, and/or components such as systems, structures, devices, circuits, etc. described are combined or combined in a form different from the described method, or other components Alternatively, even if substituted or substituted by an equivalent, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and those equivalent to the claims also fall within the scope of the claims to be described later.

100: device system constituting a 3D image lidar sensor based on a transmission/reception optical phase array
110: light source (laser)
120: photodetector
130: directional coupler
140: optical splitter
150, 430: phase controller
160, 600: optical antenna array
200: Transmitting and receiving photoelectric device unit
300: transmission/reception optical phase array unit
410: first area
420: second area
610: channel (or light emitter)
611: cavity structure

Claims (19)

In a device system constituting a three-dimensional image lidar sensor based on a transmission/reception optical phase array,
A transmission/reception optoelectronic device for outputting intermediate frequency information by mixing a reference optical signal of a part of a transmission optical signal transmitted through a light source and an optical antenna and a reception optical signal received by the transmission optical signal; And
A transmission/reception optical phase array unit for branching and combining the in-phase optical mode received from the light source or the optical antenna in an N-channel scale, and controlling a phase of the optical mode according to a transmission operation or a reception operation and processing according to a phase difference condition ,
The transmitting and receiving optical phase arrangement unit
An optical splitter for branching and combining the in-phase optical mode received from the light source or the optical antenna in an N-channel scale under constructive interference conditions;
A phase controller that sequentially applies a phase difference to the optical modes or phases the phases of the optical modes according to a transmission operation or a reception operation; And
An optical antenna array for processing the optical mode of each channel according to a phase difference condition through the phase controller,
The phase controller is
During a transmission operation, a phase difference is applied sequentially to an N-channel in-phase optical mode branched from the optical splitter in order to radiate the transmission optical signal from the optical antenna in a specific direction. The method of claim 1,
The transceiving photoelectric device unit
The light source implemented on a substrate or on a chip to transmit the transmission optical signal of the laser;
A directional coupler for extracting and mixing the received optical signal received from the optical antenna by the transmission optical signal and a reference optical signal of a portion of the transmitted optical signal; And
A photodetector for converting the mixed optical signal supplied from the directional coupler into an electric signal and outputting intermediate frequency information
Device system comprising a. The method of claim 2,
The light source is
A device system, characterized in that it is implemented on an integrated optical chip including a low refractive index upper and lower clad layer and a high refractive index waveguide layer on the substrate, and capable of frequency modulation. The method of claim 3,
The light source is
Generates the transmission optical signal of the frequency modulated laser beam and outputs it through an optical waveguide,
The device system, characterized in that some of the reference optical signals of the output transmission optical signals are combined through the directional coupler, and the remaining transmission optical signals are guided to the transmission/reception optical phase arrangement unit. The method of claim 4,
The directional coupler is
The device system, characterized in that the intermediate frequency information corresponding to the frequency difference is obtained by combining the reference optical signal and some of the received optical signals of the received optical signals received from the optical antenna. The method of claim 5,
The photodetector is
Outputs the intermediate frequency information,
The device system
A device system for providing a 3D image including the distance information by directly acquiring distance information to an object through the intermediate frequency information. delete delete delete The method of claim 1,
The phase controller is
In a receiving operation, a phase of the optical mode that is received in a specific direction through the optical antenna and represents a sequential phase difference in each channel is in-phased. The method of claim 10,
The optical antenna array is
After passing through the phase controller, the optical mode of each channel representing the sequential phase difference is radiated onto a free space and directed in a specific direction according to a phase difference condition, or the received optical signal incident from a specific direction is received and sequentially in each channel. A device system, characterized in that it provides to have a phase difference. The method of claim 1,
The optical antenna array is
A device system, representing a nanohole-chain antenna structure, which is advantageous for increasing the array longitudinal size. The method of claim 12,
The optical antenna array is
A device system that is formed in a cavity structure representing a plurality of holes to minimize a gap between a plurality of channels to provide a wide transverse wide viewing angle. The method of claim 13,
The optical antenna array is
The device system, characterized in that the aperture of the antenna in the longitudinal direction is enlarged by minimizing interference between the plurality of channels. In a device system constituting a three-dimensional image lidar sensor based on a transmission/reception optical phase array,
A light source that is implemented on a substrate or on a chip to transmit a transmission optical signal of the laser;
A directional coupler for extracting and mixing a reference optical signal of a part of a reception optical signal and a transmission optical signal received from an optical antenna by the transmission optical signal;
A photodetector for converting the mixed optical signal supplied from the directional coupler into an electric signal and outputting intermediate frequency information;
An optical splitter for branching and combining the in-phase optical mode received from the light source or the optical antenna on an N-channel scale under constructive interference conditions;
A phase controller that sequentially applies a phase difference to the optical modes or phases the phases of the optical modes according to a transmission operation or a reception operation; And
Including an optical antenna array for processing the optical mode of each channel according to a phase difference condition through the phase controller,
The phase controller is
During a transmission operation, a phase difference is applied sequentially to an N-channel in-phase optical mode branched from the optical divider in order to radiate the transmission optical signal from the optical antenna in a specific direction. delete The method of claim 15,
The phase controller is
In a receiving operation, a phase of the optical mode that is received in a specific direction through the optical antenna and represents a sequential phase difference in each channel is in-phased. The method of claim 17,
The optical antenna array is
After passing through the phase controller, the optical mode of each channel representing the sequential phase difference is radiated onto a free space and directed in a specific direction according to a phase difference condition, or the received optical signal incident from a specific direction is received and sequentially in each channel. A device system, characterized in that it provides to have a phase difference. The method of claim 15,
The optical antenna array is
A device system, representing a nanohole-chain antenna structure, which is advantageous for increasing the array longitudinal size.

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