KR102250139B1 - Apparatus and method for vaporizing liquid material - Google Patents

Abstract

The present invention relates to a liquid source vaporization apparatus and a vaporization method, and to a liquid source vaporization apparatus and a vaporization method in which a liquid source and a carrier gas carrying the liquid source are mixed and vaporized. For this purpose, a diaphragm valve block that primarily turns on/off the incoming liquid source, a liquid source flow control block that turns on/off secondary by receiving a liquid source from the diaphragm valve block, and a liquid source supplied from the liquid source flow control block. And a mixing block having an air-fluid mixing part in which the carrier gas supplied from the outside meets and mixes with each other outside of the liquid source flow control block, and a vaporization block receiving and vaporizing the mixed air mixed in the air-fluid mixing part. A liquid source vaporizing apparatus is disclosed.

Description

Apparatus and method for vaporizing liquid material

The present invention relates to a liquid source vaporization apparatus and a vaporization method, and more particularly, to a liquid source vaporization apparatus and vaporization method for vaporizing by mixing a liquid source and a carrier gas carrying the liquid source.

KR 10-0386217 (title of the invention: method and apparatus for vaporizing liquid material), a prior art document, discloses a technique in which a liquid material and a carrier gas are mixed in an actuator. However, when the liquid material and the carrier gas are mixed in the actuator, it is difficult to precisely control the flow rate due to an increase in the internal pressure, and there is a problem that a clogging phenomenon occurs due to an increase in the internal pressure at the outlet of the mixed gas.

Meanwhile, KR 10-1058976 (name of the invention: liquid material vaporization device) discloses a technology for preheating the gas introduction path, but when the supply of liquid material is turned off, the precursor remaining in the gas introduction path due to heating of the gas introduction path There is a problem that is converted into particles by pyrolysis.

KR 10-0386217 B1 KR 10-1058976 B1 KR 10-1431290 B1 KR 10-2014-0118756 A KR 10-0878575 B1

Accordingly, the present invention has been created to solve the above-described problems, and solves the problem of an increase in internal pressure generated in the liquid source flow control block by mixing the liquid source and the carrier gas outside the liquid source flow control block. There is a purpose.

In addition, the present invention heats the mixed airflow in advance before the mixed airflow is injected from the nozzle part, and accordingly, in order to prevent thermal decomposition of the remaining air mixture, the carrier gas is further injected for a certain time or longer when the liquid source is turned off. It is an object of the present invention to provide an invention that prevents the precursor from being converted into particles.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

An object of the present invention described above is a diaphragm valve block that primarily turns on/off an incoming liquid source, a liquid source flow control block that secondarily turns on/off by receiving a liquid source from the diaphragm valve block, and a liquid source flow rate control. The liquid source supplied from the block and the carrier gas supplied from the outside meet each other at the outside of the liquid source flow control block and are mixed with a mixing block having an air-fluid mixing part, and a mixed air-fluid mixed in the air mixing part are supplied and vaporized. It can be achieved by providing a liquid source vaporization device, characterized in that it comprises a vaporization block to allow.

In addition, the mixing block includes a liquid source input flow path that receives a liquid source from the liquid source flow control block, a carrier gas input flow path that receives a carrier gas, and a mixed airflow body discharge flow path that discharges the mixed airflow body to the vaporization block, The air-fluid mixing unit is formed in a region where the liquid source input flow path and the carrier gas input flow path meet each other.

In addition, the mixing block further includes a first liquid source inlet passage for transporting the liquid source from the liquid source inlet receiving the liquid source from the outside to the diaphragm valve block, and the vertical length of the liquid source input passage is the first liquid source inlet. Less than or equal to the vertical length of the flow path.

In addition, the mixing block further includes a second liquid source inlet passage for transporting the liquid source from the diaphragm valve block to the liquid source flow control block, and when the diaphragm valve block and the liquid source flow control block are disposed on one side of each other, the second liquid The source inlet flow path consists of a "V" shape, and when the diaphragm valve block and the liquid source flow control block are arranged on the other side of each other, the second liquid source inlet flow path is made up of a "straight line" so that the distance between the second liquid source inflow flow path is relatively Minimize it.

In addition, the first liquid source inlet passage and the second liquid source inlet passage have a diameter of 0.1 to 4.0mm, the liquid source input passage has a diameter of 0.1 to 2.0mm, and the mixed airflow discharge passage has a diameter of 0.1 to 4.0mm. has a diameter of mm.

In addition, it further includes a mixed air-fluid transport block for transporting the mixed air-fluid discharged from the mixing block, and the vaporization block is a mixed air-fluid inlet flow path for transporting the mixed air air discharged from the mixed air-fluid transport block, and the mixed air flow inflow And a nozzle part for receiving and spraying the mixed airflow body from the flow path, a vaporization chamber part for vaporizing the mixed airflow body sprayed from the nozzle part, and a heater part provided in the circumferential direction of the vaporization block. The mixed airborne transport block is connected and coupled to the vaporization block so as to be heated in advance by the heater unit, so that the mixed airborne body is heated in advance before being injected from the nozzle unit.

In addition, the heater unit is disposed in a relatively outer circumferential direction with respect to the vaporization chamber unit and the mixed airflow transport block, so that the mixed airflow body is heated in advance before being injected from the nozzle unit.

In addition, the nozzle portion has a nozzle hole having a diameter proportional to the injection flow rate of the mixed airflow body and inversely proportional to the supply pressure of the carrier gas, and the diameter of the nozzle hole is determined within a range of 0.1 to 4.0 mm.

In addition, after turning off the supply of the liquid source from the diaphragm valve block or the liquid source flow control block, the carrier gas is injected into the mixed airborne transport block for a predetermined time period to remove the mixed airflow remaining in the mixed airborne transport block. Particles are not generated due to heating of the mixed airborne transport block.

In addition, the mixed airborne transport block has a relatively small width compared to the vaporization block, so that the heat of the heater is minimized and transferred to the liquid source flow control block.

On the other hand, a liquid source vaporization method according to an embodiment of the present invention includes the process of controlling the flow rate of the supplied liquid source; Mixing the liquid source and the carrier gas; Injecting a mixed airflow body in which the liquid source and the carrier gas are mixed; And heating and vaporizing the injected mixed airflow body; wherein the mixing of the liquid source and the carrier gas includes the liquid source and the carrier gas in a space different from the space controlling the flow rate of the liquid source. Mix.

In addition, before the supply of the liquid source, the process of determining the diameter of the nozzle hole for spraying the mixed airflow body; further comprising, the process of spraying the mixed airflow body, by using a nozzle having the determined diameter of the nozzle hole Mixed airflow can be sprayed.

In addition, the process of determining the diameter of the nozzle hole may include determining an injection flow rate of the mixed airflow body according to the type and supply flow rate of the liquid source; Checking the supply pressure of the carrier gas; And calculating the diameter of the nozzle hole according to the injection flow rate of the mixed airflow body and the supply pressure of the carrier gas.

In the process of calculating the diameter of the nozzle hole, the diameter of the nozzle hole may be calculated so as to be proportional to the injection flow rate of the mixed airflow body and inversely proportional to the supply pressure of the carrier gas.

According to the present invention as described above, by mixing the liquid source and the carrier gas in the mixing block, there is an effect that the internal pressure does not increase in the liquid source flow control block.

In addition, according to the present invention, when the supply of the liquid source is stopped, the carrier gas is further supplied for a predetermined period of time or more, thereby preventing the liquid source from changing into particles.

Further, according to the present invention, there is an effect that the liquid source can be turned on/off without leakage by disposing the diaphragm valve block adjacent to the liquid source flow rate control block.

The following drawings attached to the present specification illustrate a preferred embodiment of the present invention, and serve to further understand the technical idea of the present invention together with the detailed description of the present invention. It is limited and should not be interpreted.
1 is a view showing a liquid source vaporizing apparatus according to a first embodiment of the present invention,
2 is a view showing a liquid source vaporizing apparatus according to a second embodiment of the present invention,
3 is an enlarged view of a liquid source vaporizing apparatus according to a first embodiment of the present invention,
4 is a view showing an air-fluid mixing unit according to the present invention,
5 is a diagram showing a vaporization block according to the present invention,
6 is a view in which the heater unit according to the present invention is arranged in the vaporization block,
7 is a diagram schematically showing a liquid source vaporization method according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, one embodiment described below does not unreasonably limit the content of the present invention described in the claims, and the entire configuration described in the present embodiment cannot be said to be essential as a solution to the present invention. In addition, descriptions of the prior art and those that are obvious to those skilled in the art may be omitted, and descriptions of such omitted components (methods) and functions may be sufficiently referenced within the scope of the technical spirit of the present invention.

The liquid source vaporization device 10 of the present invention is a liquid source 21 through a diaphragm valve block 100 and a liquid source flow control block 200 (hereinafter referred to as a flow control block) as shown in FIGS. 1 to 3. ) To turn on/off the supply or transport (in this case, on/off means to control the flow rate of the liquid source). That is, a liquid source is supplied from the outside to the liquid source inlet 11, and the introduced liquid source flows into the diaphragm valve block 100 through the first liquid source inlet passage 311 from the liquid source inlet 11 do. At this time, the diaphragm valve block 100 is driven by pneumatic pressure as an example to primarily turn on/off the supply of the liquid source, and the flow control block 200 through the second liquid source inflow passage 312 To be supplied.

The flow control block 200 may be embodied as a piezo actuator as an example, and secondaryly turns on/off the supply of the liquid source supplied from the diaphragm valve block 100. Meanwhile, since the supply of the liquid source has been turned on/off only by the flow control block 200 in the related art, a minute leakage occurs when the liquid source is turned off in the flow control block 200. In order to solve this problem, in the present invention, the diaphragm valve block (100) is provided for safety purposes. Accordingly, the diaphragm valve block 100 primarily turns on/off the supply of the liquid source, and secondly turns the supply of the liquid source on/off in the flow control block 200.

At this time, if the interval between the supply flow paths 311 and 312 of the liquid source between the diaphragm valve block 100 and the flow control block 200 is long, the responsiveness is degraded, so the diaphragm valve block 100 and the flow control block ( When 200) are disposed on the same side, the V-shaped flow path 312 is formed to minimize the spacing of the flow paths. In addition, as shown in FIG. 2, when the diaphragm valve block 100 and the flow control block 200 are disposed on different sides, a vertical flow path 312 is formed to minimize the gap between the flow paths.

The mixing block 300 is provided on the lower surface of the diaphragm valve block 100 and the flow control block 200 as shown in FIG. 1 or the diaphragm valve block 100 and the flow control block 200 as shown in FIG. ) Is provided between. 1 and 3, in the mixing block 300, a first liquid source inlet passage 311 for transporting a liquid source from the liquid source inlet 11 to the diaphragm valve block 100 is "inverted letter". The second liquid source inlet flow path 312 is formed in a shape and transfers the liquid source from the diaphragm valve block 100 to the flow control block 200 in a "V-shape". 3 and 4, a liquid source inlet hole 312a of a "V-shaped" flow path 312 is formed on the liquid source inlet/outlet surface 210, and through the liquid source inlet hole 312a. The introduced liquid source is conveyed to the air-fluid mixing zone 320 (or air-fluid mixing part) through the liquid source input flow path 313.

On the other hand, as shown in Figure 2, the mixing block 300 has a first liquid source inlet passage 311 for transporting a liquid source from the liquid source inlet 11 to the diaphragm valve block 100 in a "L" shape. The second liquid source inlet flow path 312 for transporting the liquid source from the diaphragm valve block 100 to the flow control block 200 is formed in a "vertical line" shape. As shown in FIG. 4, a liquid source inlet hole 312a of a "V-shaped" flow path 312 is formed on the liquid source inlet/outlet surface 210, and the liquid introduced through the liquid source inlet hole 312a. The source is conveyed to the air-fluid mixing area 320 (or air-fluid mixing part) through the liquid source input hole 313a of the liquid source input flow path 313.

Here, the first liquid source inflow passage 311 and the second liquid source inflow passage 312 shown in FIG. 1 or 2 may have a diameter of 0.1 mm or more and 4.0 mm or less. When the diameter of the first liquid source inflow passage 311 and the second liquid source inflow passage 312 is less than 0.1mm, the transport space of the liquid source is insufficient, and the first liquid source inflow passage 311 and the second liquid When the diameter of the source inflow passage 312 exceeds 4.0mm, it is difficult to secure sufficient pressure for transporting the liquid source. The first liquid source inflow passage 311 and the second liquid source inflow passage 312 are It may have a diameter of 0.1 to 4.0 mm. At this time, in order for the liquid source to smoothly move through the first liquid source inflow passage 311 and the second liquid source inflow passage 312 in sequence, the first liquid source inflow passage 311 and the second liquid source inflow The flow path 312 may have the same diameter.

As shown in FIG. 4, the liquid source 21 introduced through the liquid source input flow path 313 and the carrier gas 22 introduced through the carrier gas input flow path 314 meet and collide with each other in a vertical direction, thereby causing mixing. Forms a fluid. The mixed airborne body 23 is supplied to the mixed airborne body transport block 400 through the mixed airborne body discharge passage 315. In FIG. 4, the liquid source inlet hole 312a is located on the upper side (that is, because it is formed on the liquid source inlet/outlet surface 210 because it is a discharge hole of the “V-shaped” flow path), the liquid source inlet hole 313a is on the lower side. It is located (that is, because the liquid source input passage 313 is formed in a vertical direction in the mixing block 300, and the liquid source input hole 313a communicates with the mixed airflow discharge passage 315), and the liquid source The input hole 313a communicates with the mixed airflow discharge passage 315 with each other. Therefore, the air mixing unit 320 discharges the mixed air flow in which the carrier gas 22 supplied from the carrier gas input passage 314 and the liquid source 21 supplied through the liquid source input hole 313a meet each other and are mixed. It is a mixing space of the flow path 315.

Here, the liquid source input passage 313 may have a diameter of 0.1 mm or more and 2.0 mm or less. When the diameter of the liquid source input passage 313 is less than 0.1 mm, the space for moving the liquid source for injection is not sufficient, and when the diameter of the liquid source input passage 313 exceeds 2.0 mm, mixing with the carrier gas is prohibited. The liquid source input flow path 313 may have a diameter of 0.1 to 2.0 mm because it cannot be supplied to the mixed airflow discharge passage 315 with sufficient pressure.

In addition, the mixed airflow discharge passage 315 may have a diameter of 0.1 mm or more and 4.0 mm or less. When the diameter of the mixed airflow discharge passage 315 is less than 0.1mm, the space for mixing the liquid source and the carrier gas is insufficient, and when the diameter of the mixed airflow discharge passage 315 exceeds 4.0mm, the mixed airflow As it becomes difficult to secure sufficient pressure to move to the mixed airborne transport block 400 to be described later, the mixed airborne discharge passage 315 may have a diameter of 0.1 to 4.0 mm. At this time, the mixed airflow discharge passage 315 may have a larger diameter than the liquid source input passage 313 for smooth mixing and movement with the carrier gas.

Meanwhile, the first and second liquid source inflow passages 311 and 312 and the liquid source inlet passage 313 are sequentially formed in the mixing block 300 from left to right (ie, along the supply path of the liquid source), and the liquid source The input passage 313 is formed in a vertical direction of the mixing block 300 in a lower region of the liquid source on/off region 220 of the flow control block 200. The mixed airborne discharge passage 315 is formed in the horizontal direction of the mixing block 300 so as to communicate with each other with the liquid source input passage 313 and communicate with the mixed airborne transport block 400 to be described later. The mixed airborne transport block 400 is formed in an approximately middle area of the right area of the mixing block 300. The carrier gas input passage 314 is formed in the mixing block 300 so as to have a predetermined angle with the mixed airflow discharge passage 315 (or so that the liquid source and the carrier gas are well mixed in the airborne mixing region). The area where the liquid source input passage 313 and the mixed airflow discharge passage 315 meet each other (that is, the location of the liquid source input hole 313a) is the carrier gas input passage 314 and the mixed airflow discharge passage 315 It is preferable to be spaced to the right by a preset distance in the horizontal direction in the area where) meet each other.

Rounding R is formed in the bent portions of the first and second liquid source inflow passages 311 and 312 to prevent the liquid source from moving smoothly and the liquid source remaining in the bent portion. In addition, the vertical length of the liquid source inlet passage 313 is formed to be less than or equal to the vertical length of the first liquid source inlet passage 311. That is, when the flow path 313 moving from the flow control block 200 to the air mixing unit 320 is long, there is a problem that the vaporization reaction rate is slowed. Therefore, it is desirable to minimize the vertical length of the liquid source input flow path 313. Accordingly, in the present invention, the liquid source input flow path 313 and the mixed airflow discharge flow path 315 communicate with each other and at the same time, the mixed airflow discharge flow path ( Adopt a vertical length of the liquid source input channel 313 so that the liquid source and the carrier gas are well mixed and the carrier gas transports the liquid source well by allowing the carrier gas input channel 315 to communicate with each other. do. Preferably, the liquid source input passage 313 and the mixed airflow discharge passage 315 communicate at right angles to each other, and the carrier gas input passage 314 and the mixed airflow discharge passage 315 communicate at right angles with each other. .

In the prior art document, the carrier gas and the liquid source are mixed with each other in the flow control block 200, and the mixed gas is turned on/off. However, in the present invention, the carrier gas and the liquid source are mixed outside the flow control block 200, that is, in the air mixing unit 320 of the mixing block 300. When mixed with each other in the flow control block 200 as in the prior art document, clogging occurs in the mixed gas outlet of the flow control block or the mixed gas on/off region according to the increase of the internal pressure, and further fine flow control by the increase of the internal pressure There is a problem that does not work well. Therefore, in the present invention, the liquid source and the carrier gas are mixed with each other outside the flow control block 200.

The mixed airborne transport block 400 is coupled to the mixing block 300 so as to communicate with the mixed airborne discharge passage 315 to transport the mixed airborne to the vaporization block 500. The mixed airborne transport block 400, the mixing block 300, and the vaporization block 500 may use SUS of the same material. In the interior of the mixed airborne transport block 400, an internal flow path for transporting the mixed airborne body may be formed. In the present invention, since the preheating area 550 is provided in the vaporization block as described later, the heated heat can be transferred to the flow rate control block 200, and thus precise control of the flow rate may be a problem. Accordingly, as shown in FIGS. 1 and 2, the mixed airborne transport block 400 has a relatively smaller width compared to the vaporization block 500 or the mixing block 300 so that heat transfer is difficult.

As shown in FIG. 5, the gasification block 500 is formed in a horizontal direction with a mixed airflow flow path 510 through which the mixed airflow body is transported, and the mixed airflow body transport block 400 is in the vaporization block 500. Connection is combined. The mixed airflow passage 510 is connected and coupled to the nozzle portion 520, and the mixed airflow body is injected at high speed from the nozzle portion 520 to the vaporization chamber portion 540. In this case, the nozzle unit 520 is preferably formed to have a narrower width compared to the mixed airflow passage 510 or the vaporization chamber unit 540 so that the mixed airflow body is sprayed into the vaporization chamber unit 540 at high speed.

In this case, the nozzle part 520 may determine the diameter of a nozzle hole formed in the nozzle part 520 in order to inject the mixed airflow body into the vaporization chamber part 540 at high speed. In this case, the nozzle unit 520 may have a nozzle hole having a diameter proportional to the injection flow rate of the mixed airflow body 23 and inversely proportional to the supply pressure of the carrier gas 22.

The mixed airflow body 23 differs in an amount that can be vaporized in the vaporization chamber unit 540 according to the type of the liquid source 21 and the supply flow rate of the liquid source 21. That is, when the liquid source 21 that is easily vaporized or a small amount of the liquid source 21 is mixed to form the mixed airflow body 23, the mixed airflow body 23 is compared to the vice versa. A relatively large amount may be vaporized in the vaporization chamber part 540. Here, the user determines in advance the injection flow rate of the mixed airflow body 23 sprayed from the nozzle unit 520 according to the type of the liquid source 21 and the supply flow rate of the liquid source 21, and the determined mixed airflow body 23 By using the nozzle unit 520 having a nozzle hole diameter according to the injection flow rate of ), the vaporization efficiency of the mixed airflow body 23 can be improved. At this time, the nozzle hole diameter of the nozzle unit 520 is determined to be proportional to the flow rate of the mixed airflow body 23 sprayed from the nozzle unit 520.

On the other hand, even in the case of using the nozzle unit 510 having the same diameter nozzle hole, when the supply pressure of the carrier gas 22 increases, the injection flow rate of the mixed airflow body 23 injected from the nozzle unit 510 increases. It is done. Accordingly, in order to inject the mixed airflow body 23 at the injection flow rate determined by the user, the nozzle hole diameter of the nozzle part 510 installed in the mixed airflow flow passage 510 is equal to the supply pressure of the carrier gas 22. It needs to be determined to be inversely proportional. Therefore, when a nozzle part 520 having a nozzle hole of a diameter proportional to the injection flow rate of the mixed airflow body 23 and having a diameter inversely proportional to the supply pressure of the carrier gas 22 is used in the mixed airflow body inflow passage 510 It is possible to maximize the vaporization efficiency of the mixed airflow body (23).

As such, the diameter of the nozzle hole may be determined within a range of 0.1 mm or more and 4.0 mm or less. When the diameter of the nozzle hole is less than 0.1mm, it becomes difficult to spray a sufficient amount of mixed airflow from the nozzle unit 520, and when the diameter of the nozzle hole exceeds 4.0mm, there is a problem that it is difficult to supply the mixed airflow body at sufficient pressure. Bar, the diameter of the nozzle hole may be determined within the range of 0.1 to 4.0mm.

In this way, in order to use the nozzle part 510 having the nozzle hole of the determined diameter, the nozzle part 520 may be installed to be replaceable in the mixed airflow passage 510. That is, a plurality of nozzle units 520 are provided to have different hole diameters, and a nozzle unit 520 having a selected hole diameter among the provided plurality of nozzle units 520 is a mixed airflow flow path ( 510).

The heater unit 530 is disposed in a plurality in the inner circumferential direction of the vaporization block 500. That is, as shown in FIG. 6, in the heater unit 530, the first, second, third and fourth heater units 531, 532, 533, and 534 are disposed in the outer circumferential direction of the vaporization chamber unit 540. The first, second, third, and fourth heater units 531, 532, 533, and 534 are connected in series with power supply lines 530a and 530b, respectively. As shown in FIG. 5, in the present invention, the mixed airflow body is heated in advance before the mixed airflow body is sprayed from the nozzle part 520 to the vaporization chamber part 540. That is, it is difficult to form the internal structure of the vaporization chamber unit in a structure with uniform heat transfer (or the heat transfer varies depending on the concentration of the mixed airflow body to be sprayed), and there is a problem in that the vaporization efficiency is deteriorated. In order to solve this problem, in the present invention, the gasification efficiency is increased by heating the mixed airflow body before spraying the nozzle unit. Therefore, as shown in Figs. 5 and 6, the heater unit 530 is disposed in a horizontal direction in the inner circumferential direction of the vaporization block 500 so that a partial area of the mixed airflow transport block 400, the mixed airflow flow path ( 510), the mixed airflow body introduced into the nozzle part 520 (that is, the mixed airflow body in the preheating zone 550) is heated in advance. Meanwhile, even if the supply of the liquid source is turned off by the diaphragm valve block 100 or the flow control block 200, the mixed airflow body may remain in the preheating region 550. In this case, since the preheating region 550 is heated by the heater unit 530, the precursor remaining in the preheating region 550 may be converted into particles by thermal decomposition, causing process contamination. Accordingly, in the present invention, even after the supply of the liquid source from the diaphragm valve block 100 or the flow control block 200 is turned off, the carrier gas is injected for a certain period of time, so that the mixed airflow remaining in the preheating region 550 is removed from the vaporization chamber unit ( 540) side. After a certain period of time, the supply of the carrier gas is turned off. Accordingly, the on/off operation of the diaphragm valve block 100 or the flow control block 200 may be controlled and sensed, and the supply of the carrier gas may be monitored and controlled as a whole by the controller.

Hereinafter, a method for vaporizing a liquid source according to an embodiment of the present invention will be described in detail. In the description of the liquid source vaporization method according to the exemplary embodiment of the present invention, descriptions overlapping with those described above in relation to the liquid source vaporization apparatus according to the exemplary embodiment of the present invention will be omitted.

7 is a diagram schematically showing a liquid source vaporization method according to an embodiment of the present invention.

Referring to FIG. 7, the liquid source vaporization method according to an embodiment of the present invention includes a process of controlling a flow rate of a supplied liquid source (S100), a process of mixing the liquid source and a carrier gas (S200), and the liquid source and Including a process (S300) of vaporizing the mixed airflow body in which the carrier gas is mixed, and the process of mixing the liquid source and the carrier gas comprises the liquid source and the carrier gas in a space different from the space controlling the flow rate of the liquid source. Mix.

The process of controlling the flow rate of the liquid source (S100) is performed by turning on/off the supply or transport of the liquid source 21. Here, the process of controlling the flow rate of the liquid source (S100) is a process of primarily turning on/off the supply of the liquid source in the diaphragm valve block 100 and secondary supplying the liquid source in the flow control block 200. It may include a process of on/off. Here, the diaphragm valve block 100 is provided for safety purposes, and is to prevent minute leakage when the liquid source is turned off when the supply of the liquid source is turned on/off only by the flow control block 200. In addition, at this time, the diaphragm valve block 100 and the flow control block 200 are disposed on the same side as shown in FIG. 1, or the diaphragm valve block 100 and the flow control block 200 are disposed on different sides as shown in FIG. It can be as described above.

In the process of mixing the liquid source and the carrier gas (S200), the liquid source whose flow rate is controlled in the diaphragm valve block 100 and the flow control block 200 is mixed with the carrier gas supplied from the outside in the mixing block 300. That is, in the process of mixing the liquid source and the carrier gas (S200), the liquid source and the carrier gas are mixed in a space (diaphragm valve block/flow rate control block) and a space (mixing block) that controls the flow rate of the liquid source. In this case, when the liquid source and the carrier gas are mixed in the flow control block 200, a clogging phenomenon occurs in the mixed gas outlet or the mixed gas on/off region of the flow control block 200 due to an increase in the internal pressure, and furthermore, the internal pressure It is as described above that it is possible to solve the problem of poorly controlling the fine flow rate due to the rise.

The process of vaporizing the mixed airflow body (S300) vaporizes the mixture airflow body in which the liquid source and the carrier gas are mixed in the vaporization block 500. Here, the process of vaporizing the mixed airflow body (S300) may include a process of spraying the mixed airflow body and a process of heating the sprayed mixture airflow body. That is, in the vaporization block 500, the mixed airflow flow path 510 through which the mixed airflow body is transported is formed in a horizontal direction, and the mixture airflow body introduction flow path 510 is connected to the nozzle part 520 and coupled to the nozzle part. The mixed airflow body is injected at high speed from the 520 to the vaporization chamber unit 540. At this time, the heater unit 530 is disposed in a plurality of inner circumferential directions of the vaporization block 500 to heat the vaporization chamber unit 540 to vaporize the mixed airflow body.

Here, in the process of spraying the mixed airflow body, the mixture airflow body may be preheated and sprayed. That is, by extending and disposing the heater unit 530 disposed in the outer circumferential direction of the vaporization chamber unit 540 to the mixed airflow flow path 510, the mixed airflow body is heated in advance before being injected into the vaporization chamber unit 540. As described above, the vaporization efficiency can be improved accordingly.

In addition, in the process of spraying the mixed airflow body, the mixed airflow body may be sprayed using a nozzle unit having a predetermined diameter. That is, the liquid source vaporization method according to the embodiment of the present invention further includes the process of determining the diameter of the nozzle hole for spraying the mixed airflow body before supplying the liquid source, and in the process of spraying the mixed airflow body, the determined nozzle The mixed airflow body can be sprayed using a nozzle part having a hole diameter.

As described above, the nozzle unit 520 may be installed in the mixed airflow passage 510. In this case, the nozzle unit 520 may have a hole diameter within a range of, for example, 0.1 to 4.0 mm. Here, in the process of spraying the mixed airflow body, before supplying the liquid source, the diameter of the nozzle hole for spraying the mixture airflow body was determined, and the nozzle part 520 having the determined nozzle hole diameter was placed in the mixture airflow body inflow passage 510. By installing and using it, the mixed airflow body can be sprayed through the nozzle unit 520.

At this time, the process of determining the diameter of the nozzle hole is a process of determining the injection flow rate of the mixed airflow body according to the type of liquid source and the supply flow rate, the process of checking the supply pressure of the carrier gas, and the spraying flow rate of the mixed airflow body and It may include a process of calculating the diameter of the nozzle hole according to the supply pressure of the carrier gas.

As described above, the amount of the mixed airflow body that can be vaporized in the vaporization chamber is different depending on the type of liquid source and the supply flow rate of the liquid source. That is, when a liquid source that is easily vaporized is mixed or a mixed air flow is formed by mixing a small amount of a liquid source, compared to the opposite case, a relatively large amount of the mixed air flow is vaporized in the vaporization chamber. I can. Accordingly, in the process of determining the injection flow rate of the mixed airflow body, the injection flow rate of the mixed airflow body sprayed from the nozzle unit 520 may be determined in advance according to the type of the liquid source and the supply flow rate of the liquid source. For example, the user may determine the injection flow rate of the mixed airflow body sprayed from the nozzle unit 520 to 5,000 mL/min according to the type of the liquid source and the supply flow rate of the liquid source.

In the process of checking the supply pressure of the carrier gas, the supply pressure of the carrier gas supplied from the outside is checked. That is, since the injection flow rate of the mixed airflow body has a relationship that increases as the supply pressure of the carrier gas increases, in order to inject the mixed airflow body at the determined injection flow rate of the mixed airflow body, the supply pressure of the carrier gas supplied from the outside You need to check. In this case, the supply pressure of the carrier gas may be an average pressure or a maximum pressure of the carrier gas supplied from the outside, and may have a value of, for example, 5 to 80 psi.

In the process of calculating the diameter of the nozzle hole, the diameter of the nozzle hole is calculated according to the injection flow rate of the mixed air flow and the supply pressure of the carrier gas determined as described above. That is, as described above, the nozzle unit 520 may use a nozzle hole having a diameter in the range of 0.1 to 4.0 mm, and the process of calculating the diameter of the nozzle hole is It is possible to calculate the diameter of the nozzle hole so as to be proportional to the injection flow rate and inversely proportional to the supply pressure of the carrier gas. That is, when the determined injection flow rate of the mixed airflow body 23 increases, the diameter of the nozzle hole must also increase accordingly. Even when the nozzle part 510 having the nozzle hole of the same diameter is used, the carrier gas 22 When the supply pressure of is increased, the injection flow rate of the mixed airflow body 23 injected from the nozzle unit 510 increases. Therefore, by calculating the diameter of the nozzle hole to be proportional to the injection flow rate of the mixed airflow body and inversely proportional to the supply pressure of the carrier gas, it is possible to spray the mixed airflow body at the injection flow rate determined by the user, whereby the vaporization chamber unit ( 540), it is possible to maximize the gasification efficiency of the mixed air.

In this way, after vaporizing the mixed airflow body, the supply of the liquid source may be terminated by turning off the supply of the liquid source in the diaphragm valve block 100 or the flow control block 200. At this time, even if the supply of the liquid source is turned off, the mixed airflow may remain in the preheating region 550, for example, the mixed airflow passage 510, and the like. At this time, since the preheating region 550 is heated by the heater unit 530, the precursor remaining in the preheating region 550 may be converted into particles by thermal decomposition, causing process contamination. Accordingly, in the liquid source vaporization method according to the embodiment of the present invention, even after the supply of the liquid source is terminated, the carrier gas is additionally supplied for a certain period of time from the end of the supply of the liquid source to vaporize the mixed airflow remaining in the preheating region 550. It is discharged to the chamber part 540 side. When all the mixed airflow remaining in the preheating area 550 is discharged to the vaporization chamber 540, the additional supply of the carrier gas is terminated.

In describing the present invention, descriptions of the prior art and matters that are obvious to those skilled in the art may be omitted, and descriptions of these omitted components (methods) and functions will be sufficiently referenced within the scope of the technical spirit I will be able to.

The descriptions of the configurations and functions of the respective parts have been described separately from each other for convenience of description, and one configuration and function may be implemented by being integrated into other components or further subdivided as necessary.

As described above, with reference to an embodiment of the present invention, the present invention is not limited thereto, and various modifications and applications are possible. That is, those skilled in the art will be able to easily understand that many modifications can be made without departing from the gist of the present invention. In addition, when it is determined that a detailed description of a known function related to the present invention and its configuration or a coupling relationship for each configuration of the present invention may unnecessarily obscure the subject matter of the present invention, it should be noted that the detailed description has been omitted. something to do.

10: liquid source vaporization device
11: Liquid source input section
21: liquid source
22: carrier gas
23: mixed air flow (mixed gas of liquid source and carrier gas)
100: diaphragm valve block
200: liquid source flow control block (or drive block)
210: liquid source inflow/outflow surface
220: liquid source on/off area
300: mixing block
311: first liquid source inflow passage
312: The second liquid source inflow passage
312a: liquid source inlet hole
313: liquid source input flow path
313a: liquid source input hole
314: carrier gas input flow path
315: mixed airflow discharge channel
320: air mixture unit (or air mixture region)
400: mixed air carrier transport block
500: vaporization block
510: mixed pressure airflow flow path
520: nozzle part
530: heater part
530a: first electric wire
530b: second electric wire
531: first heater unit
532: second heater unit
533: 3rd heater part
534: fourth heater unit
540: vaporization chamber part
550: preheating unit (or preheating area)

Claims (14)

A diaphragm valve block that primarily turns on/off the incoming liquid source,
A liquid source flow rate control block for secondary on/off by receiving the liquid source from the diaphragm valve block,
A mixing block having a two-fluid mixing unit in which the liquid source supplied from the liquid source flow control block and the carrier gas supplied from the outside meet and mix with each other outside the liquid source flow control block, and
It includes a vaporization block for vaporizing by receiving the mixed air flow mixed in the air-fluid mixing unit,
The mixing block,
A first liquid source inlet passage for transporting the liquid source from the liquid source inlet part receiving the liquid source from the outside to the diaphragm valve block, and
A second liquid source inlet passage for transferring the liquid source from the diaphragm valve block to the liquid source flow control block,
When the diaphragm valve block and the liquid source flow control block are disposed on one side of each other, the second liquid source inlet flow path is formed of a "V",
When the diaphragm valve block and the liquid source flow control block are disposed on the other side of each other, the second liquid source inlet flow path is formed in a "straight line" to relatively minimize the distance between the second liquid source inflow flow path. Vaporizer.
The method of claim 1,
The mixing block,
A liquid source input flow path receiving the liquid source from the liquid source flow control block,
A carrier gas input passage receiving the carrier gas, and
Further comprising a mixed airflow discharge passage for discharging the mixed airflow to the vaporization block,
The air-fluid mixing unit,
The liquid source vaporization apparatus, characterized in that formed in a region where the liquid source input flow path and the carrier gas input flow path meet each other.
The method of claim 2,
The liquid source vaporizing apparatus, wherein a vertical length of the liquid source input flow path is less than or equal to a vertical length of the first liquid source input flow path.
delete The method of claim 2,
The first liquid source inlet passage and the second liquid source inlet passage have a diameter of 0.1 to 4.0 mm, the liquid source input passage has a diameter of 0.1 to 2.0 mm, and the mixed airflow discharge passage has a diameter of 0.1 to 4.0 mm Liquid source vaporization device having a diameter of.
The method of claim 1,
Further comprising a mixed airborne transport block for transporting the mixed airborne air discharged from the mixing block,
The vaporization block,
A mixed airflow inflow passage for transporting the mixed airflow discharged from the mixed airflow transport block,
A nozzle part receiving and spraying the mixed airflow from the mixed airflow passage,
A vaporization chamber part for vaporizing the mixed airflow body sprayed from the nozzle part, and
It includes a heater provided in the circumferential direction of the vaporization block,
The mixed air transport block is vaporized so that it is preheated by the heater unit.
The liquid source vaporization apparatus, characterized in that the mixed airflow body is heated in advance before being sprayed from the nozzle unit by being connected to the block.
The method of claim 6,
The heater part,
The liquid source vaporization apparatus, characterized in that the liquid source vaporization apparatus is preheated before the mixed airflow body is sprayed from the nozzle part by being disposed in a relatively outer circumferential direction with respect to the vaporization chamber part and the mixed airborne transport block.
The method of claim 6,
The nozzle portion has a nozzle hole of a diameter proportional to the injection flow rate of the mixed airflow body and inversely proportional to the supply pressure of the carrier gas,
The liquid source vaporizing apparatus is determined in the range of 0.1 to 4.0 mm in diameter of the nozzle hole.
The method of claim 7,
After turning off the supply of the liquid source from the diaphragm valve block or the liquid source flow control block, the carrier gas is injected into the mixed airborne transport block for a predetermined time period to remove the mixed airflow remaining in the mixed airborne transport block. The liquid source vaporizing device, characterized in that the particle is not generated due to the heating of the mixed air carrier block.
The method of claim 6,
The liquid source vaporization device, characterized in that the mixed air transport block is formed to have a relatively small width compared to the vaporization block, so that the heat of the heater is minimized and transmitted to the liquid source flow control block.
A liquid source vaporization method for vaporizing a liquid source using the liquid source vaporization device according to any one of claims 1 to 3 and 5 to 10, comprising:
Controlling the flow rate of the supplied liquid source;
Mixing the liquid source and the carrier gas;
Injecting a mixed airflow body in which the liquid source and the carrier gas are mixed; And
Including; a process of vaporizing by heating the sprayed mixed airflow body,
The process of mixing the liquid source and the carrier gas,
A liquid source vaporization method for mixing the liquid source and the carrier gas in a space different from the space controlling the flow rate of the liquid source.
The method of claim 11,
Before supplying the liquid source,
The process of determining the diameter of the nozzle hole for spraying the mixed airflow body; further comprising,
The process of spraying the mixed airflow body,
A liquid source vaporization method for injecting a mixed airflow body using a nozzle portion having the determined nozzle hole diameter.
The method of claim 12,
The process of determining the diameter of the nozzle hole,
Determining the injection flow rate of the mixed airflow body according to the type and supply flow rate of the liquid source;
Checking the supply pressure of the carrier gas; And
Liquid source vaporization method comprising; calculating the diameter of the nozzle hole according to the injection flow rate of the mixed air flow and the supply pressure of the carrier gas.
The method of claim 13,
The process of calculating the diameter of the nozzle hole,
A liquid source vaporization method for calculating a diameter of the nozzle hole in proportion to the injection flow rate of the mixed airflow body and inversely proportional to the supply pressure of the carrier gas.

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