KR102233714B1 - Wet Scrubber - Google Patents

Abstract

The present invention relates to a wet scrubber equipped with a wet electric dust collector, and more particularly, to a wet scrubber in which a dust collector module composed of two dust collectors is operated in sequence so that uncollected powder is not discharged, and to a control method of the wet scrubber.

Description

Wet Scrubber

The present invention relates to a wet scrubber equipped with a wet electric precipitator, and in particular, to a wet scrubber and a control method of a wet scrubber in which uncollected powder is not discharged by sequentially operating a dust collector module consisting of two dust collectors.

Dust collectors that treat dust and powder generated in various industries and plants are coal-fired power plants, after desulfurization facilities, industrial boilers and BC-Oil boilers, plasticizer coating, incinerators, combustion processes, pulp and paper processes, and steel mill processes. , And other fine dust generation processes.

The initial model of the dust collector is a dry electric dust collector, and the dry dust collector has a disadvantage of low dust collection efficiency due to the re-scattering of the powder continuously accumulated on the ground where the powder is collected due to the driving principle. There is an operational disadvantage in that the accumulated powder must be removed by applying a physical impact.

In order to improve the shortcomings of the dry electric precipitator, a wet electric precipitator has been developed.

The wet electrostatic precipitator is applied to some semiconductor processes with a large amount of powder generation, and is applied to the rear end of a wet scrubber installed for waste gas treatment.

Meanwhile, the wet electric precipitator is largely composed of a power supply, a discharge electrode, a dust collecting electrode (a dust collecting surface), and an insulator.

At this time, water is supplied to the dust collecting surface to drop the powder into a tank provided at the lower side, and the discharge electrode applying a high voltage from the power supply, and the discharge electrode which is grounded to have a potential of 0 (zero) level are used. Corona discharge occurs from the discharge electrode to the dust collection surface due to the potential difference between the dust collection surface, and at this time, the waste gas passes through the discharge region between the discharge electrode and the dust collection surface, while powder (dust) is collected on the dust collection surface. At this time, the dust collection performance varies depending on the specific resistance of the powder contained in the waste gas.

Such a wet electric precipitator has a large area, high installation cost, and it is difficult to change the load according to given conditions. In other words, it is difficult to change the operating conditions, a safety facility according to a high voltage is required, and a pretreatment facility is required depending on the nature of the dust.

In order to overcome the above problems, the size of the POU (Point Of Use) wet scrubber was reduced in size according to the limited dimensions, but the usable dust collection area was reduced, and there was a limitation in the arrangement structure. In addition, when the inflow waste gas is various types of mixing waste gas, there is a problem due to powder and corrosion.

In addition, the electric dust collector was installed at the rear end of the reactor, such as a burner or plasma, and the dust collection performance was poor due to limitations in system operation. In other words, the MTBS (Mean Time Between Stop) of the wet scrubber was not satisfied due to such limitations and limitations of the properties and structure of the incoming waste gas.

On the other hand, in order to improve these problems, only partial improvements are being made, and the overall structural and systemic limitations are faced.

Specifically, the electrostatic precipitator that came out as a remedy has an upper body having a support for discharge electrodes and an insulator, a chamber containing a discharge electrode supported by the support and an inner surface of a dust collecting electrode, and provided in the chamber. It is composed of a washer liquid supply unit that cleans the discharge electrode and the dust collecting electrode.

These electric precipitators have the following problems.

The whole wet powder accumulates inside the upper body, and the electric dust collector frequently shuts down due to carbonization caused by arcing. In addition, the average PM cycle is as short as 2 days, and the overall structure of the electric precipitator is not simple, making it difficult to work during inspection.

On the other hand, when the washer liquid supply unit is a nozzle type, powder may accumulate on the discharge electrode due to the position and spray angle of the nozzle, which acts as an important arc point.

In contrast, when the washer liquid supply part is an overflow method having a plurality of discharge holes, when some of the discharge holes accumulate and block the powder, a dead zone is generated, so that the flow velocity in the specific discharge hole increases, causing an arc, and the accumulated powder is It is connected to the discharge electrode and causes an arc.

On the other hand, since the support is supported on one side of the upper body, there is a problem that the center in the chamber is separated while the discharge electrode is inclined to one side. As a result, an arc is generated and the performance of the electric precipitator is deteriorated.

If the support force of the bracket for fixing the support body to the upper body is strengthened, the dislocation of the center of the discharge electrode is alleviated, but it is not completely prevented.

On the other hand, the above-described conventional techniques are operated by matching a wet scrubber and a wet electric precipitator in a 1:1 manner to determine the respective times of dust collection, cleaning, and drying. Accordingly, the cleaning and drying are performed in a state in which the electric precipitator is not supplied with power. Since the powder continuously passes through the electric precipitator even during the cleaning and drying, clogging of the main duct and the sub duct is caused.

In order to overcome this problem, what is known in Patent Document 1 (Korean Registered Patent No. 10-0507239) is proposed.

In Patent Document 1, a plurality of plasma discharge dust collectors are modularized, and a plurality of these dust collector modules are provided and arranged in parallel. In the case of stopping the operation of a plurality of dust collector modules for reasons such as purging, etc., only some dust collector modules are selectively operated so that collection is continuously performed.

However, in Patent Document 1, a waste gas outlet pipe connected to the duct is positioned between a plurality of discharge electrodes and an insulator in which the discharge electrodes are accommodated. At this time, the insulator is located on the side of the waste gas outlet pipe with the lower part open. Therefore, there is a possibility that moisture or powder accumulates in the discharge electrode and the insulator, and thus the performance of the dust collector may be deteriorated.

In addition, Patent Document 1 has a problem in that installation and management costs are increased because the waste gas outlet pipe is connected one by one for each dust collector module. In addition, the dust collector is purged and washed (cleaning) after a certain period of time. Even if it is dried after cleaning, the dust collector starts to operate without being completely dried, so the powder may accumulate inside during operation, which results in the performance of the dust collector. This can be degraded.

On the other hand, Korean Patent Publication No. 10-1322825 (Patent Document 2) discloses a technique for easily correcting the eccentricity of the discharge electrode of the electric precipitator.

However, according to Patent Document 2, since the gas outlet is formed on the top of the dust collector, the powder may accumulate in the insulator, the discharge electrode, the upper cleaning nozzle, and the like, which may deteriorate the dust collection performance.

In addition, Patent Document 2 does not allow the assembly and disassembly of the discharge electrode hanger bar on which the discharge electrode is installed together with the insulators on both sides of the discharge electrode hanger bar, so the operation (assembly and disassembly) is not easy. It is large, making it difficult to install a dust collector.

Korean Registered Patent Publication No. 10-0507239 (2005.08.01) Korean Registered Patent Publication No. 10-1322825 (2013.10.22)

The present invention is to solve the above-described problem, and an object of the present invention is to provide a wet scrubber in which a dust collector module is sequentially operated and a control method of the wet scrubber.

In addition, it is an object of the present invention to provide a wet scrubber in which uncollected powder is not discharged during operation.

In addition, an object of the present invention is to provide a wet scrubber having better dust collection performance by drying a dust collector in which the purge gas supplied to the dust collector during cleaning is in operation.

In addition, it is an object of the present invention to provide a wet scrubber in which installation of a dust collector module is easy and the volume is minimized.

The wet scrubber of the present invention for achieving the above object comprises: a wet tank in communication with a lower portion of the reactor; A first dust collector and a second dust collector each communicating with the tank and supplying a washer liquid therein; A first processing gas discharge pipe and a second processing gas discharge pipe connected to the first dust collector and the second dust collector, respectively; An exhaust pipe having both sides connected to the first treatment gas discharge pipe and the second treatment gas discharge pipe; And a first valve and a second valve respectively positioned between the first dust collector and the exhaust pipe and between the second dust collector and the exhaust pipe.

In addition, in the wet scrubber of the present invention, the first dust collector and the second dust collector are arranged in parallel in the same direction, and the exhaust pipe is located between the first processing gas discharge pipe and the second processing gas discharge pipe.

In addition, the wet scrubber of the present invention comprises: a grounded housing having an upper and lower portion open to the receiving portion and a lower portion communicating with the tank; A first insulator that closes the open upper portion of the housing and is accommodated in the receiving portion and formed with an insertion hole; A conductor inserted into the insertion hole; A discharge electrode connected to the conductor and accommodated in the receiving portion; A discharge space formed between the dust collecting surface, which is an inner surface of the housing, and the discharge electrode; A processing gas outlet formed in the housing so that an upper portion of the discharge space communicates with the first processing gas discharge pipe or the second processing gas discharge pipe; And a second insulator positioned between the first insulator and the process gas outlet.

In addition, in the wet scrubber of the present invention, the central axis of the first insulator coincides with the central axis of the conductor, the central axis of the conductor coincides with the central axis of the discharge electrode, and the central axis of the discharge electrode coincides with the central axis of the housing. Matches.

In addition, the wet scrubber of the present invention further includes a first purge gas inlet formed in the housing, wherein the first purge gas inlet is communicated with a space between the first insulator and the second insulator, It is eccentric about the central axis.

In addition, in the wet scrubber of the present invention, the housing includes a first receiving housing in which an open upper part is closed by the first insulator, and is coupled to an upper part of the first receiving housing, and the second insulator is supported and the processing gas A second receiving housing having an outlet formed therein, a dust collecting housing coupled to an upper portion of the second receiving housing and receiving the discharge electrode, wherein the dust collecting housing is an inclined portion connected to an upper end of the dust collecting surface, and an upper side of the inclined portion And an inlet of the washer liquid formed in the inlet, wherein the inclined portion becomes narrower in width from the upper side toward the dust collecting surface, and the inlet of the washer liquid is eccentric with respect to the central axis of the housing.

In addition, in the wet scrubber of the present invention, the housing includes a first receiving housing in which an open upper part is closed by the first insulator, and is coupled to an upper part of the first receiving housing, and the second insulator is supported and the processing gas A second receiving housing having an outlet formed therein, a dust collecting housing coupled to an upper portion of the second receiving housing and accommodating the discharge electrode, the space between the second receiving housing and the second insulator connected to the second receiving housing And a second purge gas inlet in communication with the second purge gas inlet, wherein a central axis of the second purge gas inlet and the processing gas outlet is eccentric with respect to the central axis of the second receiving housing.

In addition, the wet scrubber of the present invention further includes a disperser in communication with a lower portion of the receiving portion of the housing, wherein the dispenser is formed on a side of the screening plate and a screening plate positioned under the discharge electrode. And a passage communicating with the discharge space.

In another wet scrubber control method of the present invention, the lower portions of the first dust collector and the second dust collector are respectively connected to a tank to which a reactor is connected, and the upper portions of the first and second dust collectors are connected to one exhaust pipe. A method for controlling a scrubber, the method comprising: introducing a waste gas into a tank after primary treatment in a reactor; Among the first and second valves respectively controlling communication between the first and second dust collectors and the exhaust pipe, the first valve is open and the second valve is closed, and the first dust collector is operated and the A first dust collection step in which cleaning of the second dust collector is performed; A second dust collection step in which the first valve is closed and the first dust collector is cleaned, the second valve is opened, and the second dust collector is operated; The purge gas supplied to the inside of the dust collector is introduced into the first dust collector through the tank, and the second dust collection step includes the purge gas supplied to the inside of the first dust collector through the tank and the second dust collector. This is the step that flows into.

The wet scrubber and the control method of the wet scrubber of the present invention have the following effects.

In the present invention, the dust collector module is operated in sequence so that uncollected powder is not discharged during operation.

In addition, according to the present invention, the purge gas supplied to the cleaning dust collector dries the dust collector in which the purge gas is running, so that the dust collection performance is better than the conventional one.

In addition, since the wet scrubber is integrally assembled with the first insulator, the conductor, and the discharge electrode, it is easy to disassemble and assemble the dust collector, so that PM or maintenance is easy, and it is easy to replace the discharge electrode, which is a consumable configuration. In addition, since the center of the discharge electrode does not deviate from the center of the insulator, the quality of the dust collector is consistent.

In addition, the wet scrubber has an integral insulator and there is no or minimized occurrence of sparks and arcs due to the characteristics of the PTFE material.

In addition, since the wet scrubber is supplied in a vortex manner to prevent powder from accumulating or moisture from flowing into the dust collector, the dust collection performance of the dust collector is improved.

In addition, the wet scrubber prevents the waste gas flowing into the dust collector from directly contacting the discharge electrode by the dispenser, thereby improving dust collection performance.

1A is an example of a wet scrubber to which the dust collector of the present invention is applied
FIG. 1B is a view of FIG. 1A viewed from the rear
1C is a cross-sectional view of FIG. 1B
Figure 2a is a perspective view of the dust collector module of the present invention
Figure 2b is a cross-sectional view of Figure 2a
Figure 2c is a side view of Figure 2a
Figure 3a is a perspective view of the dust collector of the present invention
Figure 3b is a cross-sectional view of Figure 3a
3C is a partially enlarged view of FIG. 3B
4 is a perspective view of a first insulator applied to the dust collector of the present invention
5 is a perspective view of a second insulator applied to the dust collector of the present invention
6 is a perspective view of a discharge electrode applied to the dust collector of the present invention
7 is a perspective view of a conductor applied to the dust collector of the present invention
8 is a perspective view of a basket to which a dispenser applied to the dust collector of the present invention is fixed
9 is a perspective view and a cross-sectional view of a housing applied to the dust collector of the present invention

Among the configurations of the present invention to be described below, the above-described conventional technology will be referred to for the same configuration as the prior art, and a separate detailed description will be omitted.

The terminology used herein is for referring only to specific embodiments and is not intended to limit the present invention. Singular forms as used herein also include plural forms unless the phrases clearly indicate the opposite. The meaning of "comprising" as used in the specification specifies a specific characteristic, region, integer, step, action, element and/or component, and other specific characteristic, region, integer, step, action, element, component and/or group It does not exclude the existence or addition of

When a component is referred to as being "connected" or "contacted" with another component, it is understood that it may be directly connected or contacted with the other component, but other components may exist in the middle. It should be.

In the following description, the wet electric dust collector 10 is the same as the dust collector 10.

The dust collector 10 of the present embodiment is a wet electric dust collector 10 to which a washer liquid is supplied therein.

1A is an example in which a dust collector 10 forms a wet scrubber 1000 with a reactor 1500 and a wet tank 1400, and FIG. 1B is a view of FIG. 1A viewed from the rear, and FIG. 1C is a cross-sectional view of FIG. 1B showing the flow (G) of waste gas with an arrow, FIG. 2A is a perspective view of a dust collector module 10 consisting of two dust collectors 10a and 10b, and FIG. 2B is a cross-sectional view of FIG. 2A, and FIG. 2C is a side view of FIG. 2A, FIG. 3A is a perspective view of the dust collector 10 of the present invention, FIG. 3B is a cross-sectional view of FIG. 3A, FIG. 3C is a partially enlarged view of FIG. 3B, and FIG. 4 is a dust collector of the present invention ( 10) is a perspective view of the first insulator 400 applied to, FIG. 5 is a perspective view of the second insulator 500 applied to the dust collector 10 of the present invention, and FIG. 6 is a discharge electrode applied to the dust collector 10 of the present invention ( 700), FIG. 7 is a perspective view of a conductor 600 applied to the dust collector 10 of the present invention, and FIG. 8 is a basket 800 to which the dispenser 830 applied to the dust collector 10 of the present invention is fixed. 9 is a perspective view and a cross-sectional view of the housing 50 applied to the dust collector 10 of the present invention.

1A to 1C illustrate an example in which the dust collector 10 is disposed in a wet scrubber 1000 including a wet tank 1400.

The dust collector 10 (Wet Electrostatic Precipitator) of the present embodiment includes a housing 50 including a receiving portion with an upper and lower portion open and grounded; A first insulator 400 that closes the open upper portion of the housing 50 and is accommodated in the receiving portion and has an insertion hole 411 in the vertical direction; A conductor 600 inserted into the insertion hole 411; A discharge electrode 700 connected to the conductor 600 and accommodated in the receiving portion; A discharge space 323 formed between the dust collecting surface 321 which is an inner surface of the housing 50 and the discharge electrode 700; A processing gas outlet 201 formed in the housing 50 to communicate with the upper portion of the discharge space 323; And a second insulator 500 positioned between the first insulator 400 and the process gas outlet 201.

The dust collector 10 having the above-described configuration is easy to disassemble and assemble. For this reason, it is easy to work such as PM (Preventive Maintenance) or maintenance boss for field workers during replacement. In addition, the insulators 400 and 500 do not generate or minimize sparks and arcs. In addition, since the center of the discharge electrode 700 does not deviate from the center of the insulators 400 and 500, the quality of the dust collector 10 is consistent. In addition, it is easy to replace the discharge electrode 700, which is a consumable configuration.

In addition, since the central axis C of the first insulator 400, the conductor 600, and the discharge electrode 700 are arranged vertically, the width of the dust collector 10 is minimized.

On the other hand, there are a washer liquid for the dust collecting surface 321 and a washer liquid for the discharge electrode 700 supplied to the dust collector of the present embodiment.

Meanwhile, as the first insulator 400 is assembled and disassembled with the housing 50, the upper portion of the housing 50 is closed and opened. That is, the first insulator 400 also serves to open and close the upper portion of the housing 50 as well as insulation. Therefore, the configuration of the dust collector 10 is minimized.

Meanwhile, the waste gas passes through the discharge space 323 and flows into the processing gas outlet 201 after the powder is collected, and at this time, there is a possibility that moisture or powder containing moisture may accumulate on the outer surface of the second insulator 500. However, in the present invention, since the conductor 600 and the housing 50 are sufficiently separated, the insulators 400 and 500 are integral and the material is PTFE, even if powder accumulation occurs inside the dust collector 10, electricity, sparks, and arcs Does not occur or is minimized.

Meanwhile, the conductor 600 is supported by the first insulator 400 to maintain a state spaced apart from the housing 50. That is, the conductor 600 and the housing 50 are reliably separated.

In addition, the discharge electrode 700 supported by the conductor 600 is also well maintained in a state spaced apart from the dust collecting surface 321. Therefore, since the central axis C of the discharge electrode 700 is kept constant, unbalanced discharge is prevented, the dust collecting performance of the dust collector 10 is good.

On the other hand, the central axis (C) of the first insulator 400 coincides with the central axis (C) of the conductor 600, and the central axis (C) of the conductor 600 is the center of the discharge electrode 700 It coincides with the axis C, and the central axis C of the discharge electrode 700 coincides with the central axis C of the housing 50.

As described above, since the central axis C of the housing 50 coincides with the central axis C of the discharge electrode 700, the distance with the dust collecting surface 321 is constant, so that the dust collection performance is good.

The central axes (C) are shown in FIG. 3B.

Meanwhile, since the first insulator 400, the conductor 600, and the discharge electrode 700 are supported with each other, it is possible to assemble and disassemble the housing 50 together. Specifically, when the first insulator 400 and the housing 50 are disassembled, the conductor 600 and the discharge electrode 700 supported by the conductor 600 are disassembled together, so that assembly and disassembly are easy.

As shown in FIG. 9, the housing 50 is detachable from the first receiving housing 100 and the first receiving housing 100 in which the open upper part is closed by the first insulator 400 And the second receiving housing 200 in which the second insulator 500 is supported and the processing gas outlet 201 is formed, and the upper portion of the second receiving housing 200 is detachably coupled to the discharge electrode ( It includes a dust collecting housing 300 in which 700) is accommodated.

The first receiving housing 100 can be separated by lifting it upward from the second receiving housing 200, and the second receiving housing 200 can be separated by lifting it upward from the dust collecting housing 300, so the housing 50 It is easy to disassemble. A specific method of coupling the housing 50 will be described later.

The first receiving housing 100, the second receiving housing 200, and the dust collecting housing 300 all have a tubular shape in which the receiving portions 121, 221a, 221b, and 331 are formed therein by penetrating the inside in the vertical direction.

The first receiving housing 100 has a lower portion in communication with the upper portion of the second receiving housing 200, and the second receiving housing 200 has a lower portion in communication with the upper portion of the dust collecting housing 300.

Meanwhile, a plurality of support portions 227 are protruded from the inner surface of the second receiving housing 200. The second insulator 500 has a plurality of locking flanges 511 protruding outwardly.

The locking flange 511 is mounted on the upper surface of the support part 227. Therefore, the second insulator 500 can be easily supported on the second receiving housing 200.

Details of the locking flange 511 and the support 227 will be described later.

Meanwhile, the first insulator 400 is accommodated in the receiving portions 121, 221a and 221b of the first receiving housing 100 and the second insulator 500.

The first insulator 400 is formed on a body 410 surrounded by the first receiving housing 100 and the second insulator 500 and on the upper end of the body 410 to open the first receiving housing 100 It includes a flange 420 for closing the upper portion, and a receiving groove 423 formed in the flange 420.

Hereinafter, the receiving groove 423 is referred to as a conductor receiving groove.

In the conductor 600, a locking piece 613 received in the conductor receiving groove 423 and caught by the flange 420 is formed on the upper portion of the conductor 600.

The flange 420 has a substantially rectangular parallelepiped shape and has a polygonal horizontal cross section. Therefore, when the conductor 600 is rotated to disassemble the discharge electrode 700 while being inserted into the first insulator 400, the conductor 600 does not rotate and is supported by the first insulator 400, so the discharge electrode 700 ) Is easy to assemble and disassemble.

On the outer surface of the body 410, a plurality of current-preventing protrusions 413 protruding in the direction of the second insulator 500 are formed, and the plurality of current-preventing protrusions 413 are vertically spaced apart from each other.

The energization prevention protrusion 413 forms the outer circumferential surface of the body 410 of the first insulator 400 in an uneven shape to extend the insulation distance. Therefore, the energization prevention protrusion 413 prevents a situation in which energization may occur while riding the first insulator 400 even if the body 410 of the first insulator 400 is stained or accumulated with powder containing moisture or moisture. .

Specifically, the energization prevention protrusion 413 is made of a lower surface, a side surface, and an upper surface, and has a substantially rectangular vertical cross-section.

In addition, the energization prevention protrusion 413 has a left and right width greater than the vertical length.

On the other hand, the first insulator 400 protrudes upward from the flange 420 and surrounds the wire connecting piece 615 of the conductor 600, and the protective wall 430 and the protective wall 430 laterally penetrate the It further includes a wire hole 431 disposed so that a wire (not shown) connected to the conductor 600 passes.

The protective wall 430 has an open top, and is closed by a cap 440 to be described later. Therefore, the conductor 600 is not exposed to the outside.

The first insulator 400 is formed of a PTFE material, and since it is an integral type, electric current does not occur.

The insertion hole 411 is formed in the center of the first insulator 400.

The center of the insertion hole 411 coincides with the center of the first insulator 400.

The upper and lower lengths of the body 410 are substantially similar to the upper and lower lengths of the first receiving housing 100 and the second insulator 500.

At this time, the plurality of energization prevention protrusions 413 are formed over the entire portion of the body 410 surrounded by the second insulator 500.

The outer diameter of the flange 420 is larger than the outer diameter of the first receiving housing 100. Accordingly, the flange 420 may cover the open upper portion of the first receiving housing 100.

Specifically, the flange 420 includes an inner flange 421 on which the protective wall 430 is formed, and an outer flange 425 in which the first upper support ring 21 and the first O-ring 23 to be described later come into contact. .

A first O-ring 23 groove (not shown) into which a first O-ring 23 to be described later is inserted is formed on the lower surface of the outer flange 425.

----- Conductor (600) -----

The conductor 600 protrudes upward from the center of the insertion piece 611 inserted into the insertion hole 411, the locking piece 613 formed on the upper end of the insertion piece 611, and the locking piece 613 It includes a wire connection piece 615 to which the wire is connected.

The lower portion of the insertion piece 611 is not inserted into the first insulator 400 and protrudes below the first insulator 400. At this time, the protruding lower portion of the insertion piece 611 has an outer surface that is tapered, so that it is screwed with the discharge electrode 700.

The wire connection piece 615 is surrounded by the protective wall 430 and the cap 440 and is not exposed to the outside.

The cap 440 and the protective wall 430 are each formed with a male screw portion or a female screw portion, not shown in the drawings, and are coupled to each other by being fastened to each other.

In addition, when the conductor 600 is assembled with the first insulator 400, when the engaging piece 613 is accommodated in the conductor receiving groove 423 and inserted into the insertion hole 411 so that the first insulator 400 is caught, the assembly is completed. It is completed. On the contrary, when the conductor 600 is disassembled, it is only necessary to hold the wire connection piece 615 of the conductor 600 and pull it out upward from the insertion hole 411. That is, it is easy to assemble and disassemble the conductor 600 and the first insulator 400.

----- 2nd insulator (500) -----

The second insulator 500 includes a first tubular body 510 and the locking flange 511.

The engaging flange 511 is formed so that a portion of the upper end of the first body 510 protrudes outward.

A total of two locking flanges 511 are formed at intervals of 180 degrees based on the central axis (C).

The upper and lower lengths of the second insulator 500 are longer than the upper and lower lengths of the second receiving housing 200. Accordingly, the second insulator 500 is positioned so that its lower end is surrounded by the dust collecting housing 300, and the rest of the second insulator 500 is accommodated in the second receiving housing 200.

The second insulator 500 is formed to have the same inner diameter as the first receiving housing 100. Accordingly, the first purge gas may be constantly supplied to the entire first insulator 400.

----- Discharge electrode (700) -----

The discharge electrode 700 includes an installation rod 710 having a long vertical length, a discharge plate 720 radially fixed to the outer surface of the installation rod 710, and a fastening portion 730 having a lower portion inserted at the top of the installation rod 710. do.

In the discharge plate 720 having a long vertical length, a plurality of discharge protrusions 721 having a shape sharply protruding laterally are formed in a plurality of discharge protrusions 721 vertically at regular intervals.

The discharge plate 720 is radially fixed with respect to the central axis C of the mounting rod 710. In the present embodiment, eight discharge plates 720 are fixed to one mounting rod 710 at regular intervals from each other. Further, as shown in FIG. 3B, when viewed from the side, the discharge plate 720 is disposed so as to have a height opposite to that of the discharge plate 720 at the side.

The fastening part 730 is formed with an insertion part into which the conductor 600 is inserted, and is formed with a female threaded part (not shown) in the insertion part, and fastened with the male threaded part 617 formed with the tapered on the conductor 600 do. Therefore, the conductor 600 and the discharge electrode 700 are fixed to each other. The fastening part 730 is accommodated in a groove (not shown) formed in the lower surface of the first insulator 400 in a portion including the upper end. These configurations help the discharge electrode 700 to be stably fixed to the first insulator 400 so that the central axis C of the discharge electrode 700 does not deviate from the central axis C of the housing 50.

The fastening part 730 has a separation prevention hole 731 formed through inside and outside.

A fixing member (not shown) such as a bolt is inserted into the separation prevention hole 731 to prevent separation of the conductor 600 and the discharge electrode 700 due to a situation such as vibration.

------- Housing (50) -------

The housing 50 has the receiving portion formed by penetrating up and down.

----- 1st receiving housing (100) -----

The first receiving housing 100 has a tubular shape, and the receiving portion 121 formed therein is in communication with the first purge gas inlet 120 to be described later, and the body of the first insulator 400 in the receiving portion 121 ( 410) is accepted.

The first receiving housing 100 is positioned to surround the upper side of the body 410 of the first insulator 400, specifically, between the flange 420 and the energization preventing protrusion 413.

----- 2nd receiving housing (200) -----

The second receiving housing 200 includes an upper plate 220 on which the first receiving housing 100 is supported, and a second tubular body 210 in which the upper plate 220 is supported.

Accommodating portions 221a and 221b are also formed in the upper plate 220 and the second body 210, respectively.

The upper plate 220 is supported by being partially inserted into the second body 210.

As shown in FIG. 3C, a first receiving housing receiving groove 223 into which the first receiving housing 100 is inserted is formed on the upper surface of the upper plate 220.

An insulator receiving groove 225 in which the second insulator 500 is accommodated is formed on the lower surface of the upper plate 220.

As shown in FIG. 3C, the first receiving housing receiving groove 223 and the insulator receiving groove 225 communicate with the receiving portion 221a of the upper plate 220.

The diameter of the receiving portion 221a of the upper plate 220 is the same as the diameter of the receiving portion 121 of the first receiving housing 100 and the inner diameter of the second insulator 500. Therefore, the first purge gas can be smoothly supplied in a vortex form through the first receiving housing 100, the upper plate 220, and the second insulator 500.

The support part 227 is formed by protruding a portion of the lower side of the upper plate 220.

A total of two support portions 227 are formed at intervals of 180 degrees based on the central axis (C).

When supporting the second insulator 500 on the second receiving housing 200, first, the second insulator 500 is put into the open lower part of the second body 210. At this time, the locking flange 511 is prevented from engaging with each other with the support portion 227. Thereafter, the second insulator 500 is rotated about the central axis C so that the locking flange 511 is positioned above the support part 227. As a result, the locking flange 511 is mounted on the support 227 so that the second insulator 500 is supported on the second receiving housing 200.

Meanwhile, the diameter of the processing gas outlet 201 connected to the second receiving housing 200 may be formed to have a size corresponding to the vertical length of the second receiving housing 200. At this time, if the diameter of the processing gas outlet 201 is increased, the processing gas can be induced to be discharged without clogging, so the dust collection performance is good

------ Dust collection housing (300) ------

The dust collecting housing 300 includes a coupling part 310 supporting a third upper support ring 41 to be described later, the inclined portion 330 connected to the lower end of the coupling portion 310, and the lower end of the inclined portion 330 A dust collecting part 320 connected to the dust collecting surface 321, an inclined part 330 connected to the upper end of the dust collecting surface 321, and an inlet 311 of the washer liquid formed above the inclined part 330. ).

In the following description, for easy identification, the inlet 311 of the washer fluid is referred to as a first washer fluid inlet 311.

Specifically, the width of the inclined portion 330 becomes narrower toward the dust collecting surface 321 from the upper side. A plurality of central axes of the first washer fluid inlet 311 are radially formed to be eccentric with respect to the central axis C of the housing 50.

In this embodiment, four first washer fluid inlets 311 are formed in the coupling portion 310 at intervals of 90 degrees.

The first washer liquid inlet 311 flows into the circulating water, which is a washer liquid for the dust collecting surface 321.

A washer liquid supply part 313 is connected to the first washer liquid inlet 311.

The washer liquid supply unit 313 is connected to the pump 1600 shown in FIG. 1B.

The washer liquid supplied through the washer liquid supply unit 313 cleans the dust collecting surface 321 by dropping moisture or powder containing moisture collected on the dust collecting surface 321 into the tank 1400.

The washer liquid is supplied to the dust collecting surface 321 in a vortex form by the shape of the inclined portion 330. Therefore, since the washer liquid is supplied to the entire dust collecting surface 321, all of the dust collecting surface 321 is cleaned so that the powder does not accumulate, so the dust collecting performance is good.

The discharge electrode 700 is accommodated in the receiving part 331 of the dust collecting part 320, and the discharge space 323 is formed.

Meanwhile, nine second washer fluid nozzle units 325 are connected to the dust collecting unit 320 as illustrated in FIGS. 2A and 3A.

A total of 9 second washer fluid nozzle units 325 are positioned at the top, the center, and the bottom of the dust collecting unit 320, each of three.

Each of the second washer liquid nozzle units 325 are radially formed at equal intervals with respect to the central axis C of the dust collecting housing 300.

The washer liquid for the discharge electrode 700 is simultaneously supplied from the second washer liquid nozzle units 325 in the upper, middle and lower portions, and thus, the discharge electrode 700 can be cleaned without a dead zone.

Meanwhile, in FIG. 9, a hole 325a communicating with the second washer liquid nozzle part 325 is shown.

Meanwhile, the first insulator 400 is located above the first receiving housing 100, and the outer flange 425 is assembled with the following components to prevent damage.

Specifically, a first upper support ring 21 and a first O-ring 23 are positioned on each of the upper and lower portions of the outer flange 425, and a first lower support ring ( 25) is on top. That is, the first upper support ring 21, the outer flange 425, the first O-ring 23, and the first lower support ring 25 are disposed from the upper side to the lower side. At this time, the first clamp 20 presses the first upper support ring 21 and the first lower support ring 25 from the upper and lower sides to fix them so that they are not separated.

Meanwhile, the following components for preventing damage are also located between the second receiving housing 200 and the dust collecting housing 300.

Specifically, the second upper support ring 31 and the second lower support ring 35 are respectively positioned on the lower surface of the second receiving housing 200 and the upper surface of the dust collecting housing 300. A second O-ring 33 is positioned between the second upper support ring 31 and the second upper support ring 31. At this time, the second clamp 30 presses the second upper support ring 31 and the second upper support ring 31 from the upper and lower sides to fix them so that they are not separated.

------ Purge gas inlet (120, 230) ------

Two purge gas inlets are connected to the housing 50 of this embodiment.

Specifically, the purge gas inlet is connected to the second receiving housing 200 and communicates with the space HS between the inner surface of the second receiving housing 200 and the second insulator 500 ( 230) and a first purge gas inlet 120 formed in the first receiving housing 100 of the housing 50.

In this embodiment, the second purge gas is a nitrogen purge gas for preventing powder accumulation.

The second purge gas is introduced only when cleaning the dust collector 10.

The first purge gas is a high temperature nitrogen purge gas for drying.

The first purge gas is introduced into both the operation and cleaning of the dust collector 10.

Meanwhile, as shown in FIG. 1C, the second purge gas inlet 230 communicates with the space between the second insulator 500 and the second receiving housing 200. In addition, the central axis of the second purge gas inlet 230 and the central axis of the processing gas outlet 201 are eccentric with respect to the central axis C of the second receiving housing 200. Accordingly, the second purge gas is supplied to the space between the second receiving housing 200 and the second insulator 500 in a vortex shape as shown in FIG. 1C to clean the powder so as not to accumulate. Accordingly, the dust collecting performance of the dust collector 10 is improved.

The second purge gas may be supplied in a pulsing method.

Meanwhile, as shown in FIG. 3B, the first purge gas inlet 120 communicates with the space HS between the first insulator 400 and the second insulator 500, as shown in FIG. 3A. It is formed to be eccentric with respect to the central axis (C) of the housing (50). Specifically, the first purge gas inlet 120 is formed in the first receiving housing 100. Accordingly, the first purge gas is supplied to the space between the inner surface of the first receiving housing 100 and the first insulator 400 and the space HS between the first insulator 400 and the second insulator 500.

As a result, the first purge gas is supplied in a vortex form to provide moisture to the outer surface of the first insulator 400, the inner surface of the second insulator 500, the inner surface of the first receiving housing 100, and the inner surface of the second body 210. Inflow prevention and drying can be made. Accordingly, the dust collecting performance of the dust collector 10 is improved.

Meanwhile, the processing gas outlet 201 communicates with the processing gas discharge pipe 211 connected to the second receiving housing 200.

As shown in FIG. 3A, the processing gas discharge pipe 211 extends inclined upward as it goes away from the second receiving housing 200.

The central axis of the processing gas discharge pipe 211 is inclined about 45 degrees with respect to the central axis C of the second receiving housing 200.

The processing gas discharge pipe 211 is arranged vertically and side by side when viewed straight from the side as shown in FIG. 2C.

------ How to disassemble and assemble the dust collector (10) ------

Hereinafter, an example of disassembling a part of the dust collector 10 described above will be described.

First, the first clamp 20 is released and separated from the first upper and lower support rings 21 and 25.

Thereafter, the protective wall 430 of the first insulator 400 is held and lifted from the first receiving housing 100. At this time, the conductor 600 inserted into the first insulator 400 and the discharge electrode 700 supported by the conductor 600 are lifted together. That is, the first insulator 400, the conductor 600, and the discharge electrode 700 can be separated from the housing 50 at once.

Meanwhile, the discharge electrode 700 and the conductor 600 are screwed and separated, the cap 440 is released, the conductor 600 and the wire are separated, and the conductor 600 is separated from the first insulator 400 By doing so, the first insulator 400, the conductor 600, and the discharge electrode 700 can be separated from each other.

Thereafter, the first receiving housing 100 is lifted and separated from the second receiving housing 200.

Thereafter, the second clamp 30 is released and separated from the second upper and lower support rings 31 and 35, and the second receiving housing 200 is lifted. At this time, the second insulator 500 is lifted together.

Thereafter, the second insulator 500 to the dust collecting housing 300 are rotated so that the locking flange 511 of the second insulator 500 is released from the support part 227 of the second receiving housing 200.

Thereafter, when the second insulator 500 is separated from the second receiving housing 200, the disassembly is completed.

Hereinafter, an example of assembling a part of the above-described dust collector 10 will be described.

First, the second insulator 500 is inserted from the lower side to the upper side of the second receiving housing 200 and then rotated based on the central axis C so that the locking flange 511 is mounted on the support part 227.

Thereafter, the second clamp 30 is locked to fix the second receiving housing 200 and the dust collecting housing 300.

Thereafter, the first receiving housing 100 is positioned on the second receiving housing 200.

Thereafter, the assembled first insulator 400, the conductor 600, and the discharge electrode 700 are inserted from the upper side to the lower side of the second insulator 500 and inserted into the second insulator 500 and the housing 50.

Thereafter, when the first clamp 20 is locked and the first receiving housing 100 and the first insulator 400 are fixed, the assembly is completed.

------ Basket(800)(Basket) ------

A basket 800 for processing water-soluble gas is installed under the housing 50.

The basket 800 is accommodated in a through hole (not shown) formed in the upper portion of the tank 1400 and a support pipe 1410 to be described later.

The basket 800 has a configuration in which the waste gas, which has been primarily treated by the reactor 1500, flows into the tank 1400 and passes before flowing into the dust collector 10.

The basket 800 is formed by passing through the outer peripheral surface 810, the lower surface 820, and the outer peripheral surface 810 and the lower surface 820, the inner space 850 with an open top, and the outer peripheral surface 810 and the lower surface 820. Including the flow paths (811, 821).

The plurality of flow paths 811 and 821 are passages through which waste gas flows from the tank 1400 to the dust collector 10.

A third O-ring 43 is installed around the upper side of the basket 800.

------ Flow Disperser ------

Meanwhile, a flow dispenser 830 for dispersing air flow is installed in the inner space 850 of the basket 800.

The dispenser 830 communicates with a lower portion of the receiving portion of the housing 50, specifically, with the receiving portion 331 of the dust collecting housing 300.

The dispenser 830 has a substantially disk shape.

Specifically, the dispenser 830 is formed in the center and is connected to the shielding plate 831 located below the discharge electrode 700, the connecting rod 833 connected to all sides of the shielding plate 831, and the connecting rods 833 The circumferential piece 835, which surrounds the screening plate 831 and is supported by the basket 800, includes a passage 837 formed around the screening plate 831 and the connecting rod 833 and the circumferential piece 835.

The passage 837 communicates with the discharge space 323. Accordingly, the waste gas introduced after the first treatment in the reactor 1500 is guided to the discharge space 323 through the passage 837. That is, since the waste gas is prevented from directly contacting the discharge electrode 700, the dust collecting ability is improved.

As shown in FIG. 1C, the dispenser 830 is installed at a position higher than the center of the basket 800 so as to be located above the tank 1400.

A filler (not shown) may be accommodated in a space between the dispenser 830 and the lower surface 820 of the inner space 850. The filling is used to increase the contact area and disperse the waste gas when the water-soluble waste gas is passed.

Meanwhile, the assembled state of the tank 1400 and the dust collector 10 will be described with reference to FIGS. 1A to 1C.

First, the support pipe 1410 is positioned on the upper surface of the tank 1400, and the third lower support ring 45 is positioned on the upper surface of the support pipe 1410. The basket 800 is inserted into the support pipe 1410 and the tank 1400 so that the third O-ring 43 is positioned above the third lower support ring 45. A third upper support ring 41 is positioned above the third O-ring 43. The dust collecting housing 300 is located above the third upper support ring 41. At this time, the third clamp 40 fixes the basket 800 and the dust collecting housing 300 by pressing the third upper support ring 41 and the third lower support ring 45 from the upper and lower sides.

On the other hand, the support pipe 1410 penetrates vertically and communicates with a through hole (not shown) formed on the upper surface of the tank 1400.

On the other hand, the first to third upper support rings (21, 31, 41) and the first to third lower support rings (25, 35, 45) have the first to third clamps (20, 30, 40) grooves (drawing symbols Not shown) is formed.

The groove is referred to in detail in FIG. 3C.

--------- Wet scrubber (1000) (Scruuber) -----------

The wet scrubber 1000 to which the dust collector 10 of the present embodiment is applied includes: a reactor 1500 connected to a production equipment (not shown) such as a semiconductor for primary treatment of waste gas discharged from the production equipment; A wet tank 1400 in communication with a lower portion of the reactor 1500; A dust collector module 10 each communicating with the tank 1400 and including a first dust collector 10a and a second dust collector 10b through which a washer liquid is supplied; An exhaust pipe 215 having both sides connected to the first treatment gas discharge pipe 211a and the second treatment gas discharge pipe 211b; A first valve 240a and a second valve 240b respectively positioned between the first dust collector 10a and the exhaust pipe 215 and between the second dust collector 10b and the exhaust pipe 215; A control unit 1200 for controlling the wet scrubber 1000; And a power supply 1300 that supplies power required for the above configurations.

In the wet scrubber 1000 of the present embodiment having the above-described structure, the waste gas passes through the plasma reaction zone, which is the reactor 1500, and then flows into the dust collector 10 in operation, whereby powder (dust) is collected. After that, it is discharged to the outside of the wet scrubber 1000. Therefore, it is possible to prevent uncollected powder from being discharged while cleaning the dust collector 10 while the wet scrubber 1000 is being operated.

In addition, the valve of the wet scrubber 1000 is operated so that the dust collector 10 does not communicate with the exhaust pipe 215 when cleaning the dust collector 10. Specifically, in the wet scrubber 1000 of the present embodiment, when the first and second valves 240a and 240b are alternately opened and closed and one dust collector 10 is operated, the other dust collector 10 is the time for cleaning. Operated in sequence.

Accordingly, the first and second purge gases supplied to the dust collector 10 during cleaning flow into the inside of the dust collector 10 in operation through the tank 1400 as shown by arrows P1 and P2 shown in FIG. 1C and are operated. It helps to dry the dust collector 10 that is being used. That is, since moisture inside the dust collector 10 in operation is dried by the first and second purge gases, dust collection performance may be improved.

Meanwhile, since the first dust collector 10a and the second dust collector 10b are arranged in parallel in the same direction as shown in FIGS. 1A and 2A, the dust collector 10 can be easily installed.

In addition, the exhaust pipe 215 is located between the first processing gas discharge pipe 211a and the second processing gas discharge pipe 211b. That is, both sides of the exhaust pipe 215 are connected to the first and second treatment gas discharge pipes 211a and 211b. Accordingly, the size of the wet scrubber 1000 can be minimized by placing the exhaust pipe 215 between the first dust collector 10a and the second dust collector 10b.

Meanwhile, in this embodiment, the first valve 240a and the second valve 240b are angle valves 240.

The angle valve 240 is accommodated in a first cylinder 241 connected to the exhaust pipe 215, a second cylinder 243 connected to an upper portion of the first cylinder 241, and the first cylinder 241 to move up and down. It includes a piston 250 to reciprocate.

The first cylinder 241 includes a cylinder body 241a in which the piston 250 is accommodated, and an extension pipe 241b protruding toward the exhaust pipe 215 from a side of the cylinder body 241a and connected to the exhaust pipe 215 .

As shown by the arrow of FIG. 2B, the piston 250 moves up and down.

The extension pipe 241b communicates with the processing gas discharge pipe 211 when the piston 250 moves upward as shown in FIG. 2B, and does not communicate with the processing gas discharge pipe 211 when the piston 250 moves downward. Does not. For example, when the piston 250 moves upward, the waste gas processed by the second dust collector 10b is discharged to the outside (duct) through the treatment gas discharge pipe 211, the first cylinder 241, and the exhaust pipe 215. do.

The second cylinder 243 has a hollow inside and a rod hole 245 through which a piston 250 and a rod (not shown) are inserted through is formed at a lower portion thereof.

The second cylinder 243 is disposed in parallel with the cylinder body 241a.

Meanwhile, only part of the piston 250 is shown in the drawing.

Meanwhile, the left and right sides of the exhaust pipe 215 extend from the upper center of the bidirectional pipe 217 to each of the first treatment gas discharge pipe 211a and the second treatment gas discharge pipe 211b, and the two-way pipe 217 It includes a duct connector (219).

The duct connector 219 is connected to the customer's main and sub ducts (not shown).

As shown in FIG. 2B, the bidirectional pipe 217 is coupled to the process gas discharge pipe 211 by a fourth clamp 60.

The fourth clamp 60 has the same configuration as the first to third clamps 20, 30, and 40 described above, so a detailed description thereof will be omitted.

Meanwhile, the wet scrubber 1000 of this embodiment is provided in the cabinet 1100 for a compact configuration as shown in FIGS. 1A and 1B.

Meanwhile, the power supply 1300 is installed on the cabinet 1100.

The conductor 600 and the housing 50 are connected to a power supply 1300 (Negative type EP Power Supply) and are grounded.

Meanwhile, the control unit 1200 is installed on the right side of the cabinet 1100 based on FIG. 1A.

------- Control method of wet scrubber (1000) -------

In the present invention, the lower portions of the first dust collector 10a and the second dust collector 10b are respectively connected to the tank 1400 to which the reactor 1500 is connected, and the first dust collector 10a and the second dust collector 10b In the control method of the wet scrubber 1000 connected to a single exhaust pipe 215, the waste gas is first treated in the reactor 1500 and then introduced into the tank 1400; The first valve 240a of the first valve 240a and the second valve 240b respectively controlling communication between the first dust collector 10a and the second dust collector 10b and the exhaust pipe 215 is opened. A first dust collecting step in which the second valve 240b is closed, the first dust collector 10a is operated, and cleaning of the second dust collector 10b is performed; A second dust collecting step in which the first valve 240a is closed and the first dust collector 10a is cleaned, the second valve 240b is opened and the second dust collector 10b is operated; do.

In the wet scrubber 1000 having the above-described configuration, since the first dust collector 10a and the second dust collector 10b are operated alternately, uncollected powder is not discharged when the wet scrubber 1000 is operated.

Further, in the first dust collecting step, the purge gas supplied to the inside of the second dust collector 10b is introduced into the first dust collector 10a through the tank 1400, and the second dust collecting step is In this step, the purge gas supplied into the first dust collector 10a is introduced into the second dust collector 10b through the tank 1400.

Hereinafter, an example of a control method of the wet scrubber 1000 will be described based on a state in which the dust collector module 10 has been cleaned or has not been operated.

First, the first dust collector 10a is in an operating state, and the second dust collector 10b is in a standby state. At this time, the first valve 240a is in an open state and the second valve 240b is in a closed state. Therefore, the waste gas can pass through only the first dust collector 10a.

Thereafter, the plasma torch 1510 is operated.

Thereafter, the inlet valve 1520 is opened so that the waste gas flows into the reactor 1500.

Thereafter, the waste gas that has been primarily treated in the reactor 1500 for the time set in the control unit 1200 flows into the first dust collector 10a through the tank 1400, and the powder is collected, and then the first treatment gas discharge pipe 211a and It is discharged to the outside (duct) through the exhaust pipe 215.

Thereafter, the first valve 240a is closed, and the first dust collector 10a is stopped, and after cleaning, the first valve 240a enters the standby state. Meanwhile, when the operation of the first dust collector 10a is stopped, the second valve 240b is opened and the second dust collector 10b is in an operating state.

At this time, the waste gas that has been primarily treated in the reactor 1500 for the time set in the control unit 1200 flows into the second dust collector 10b through the tank 1400, and the powder is collected, and then the second processing gas discharge pipe 211b and It is discharged to the outside (duct) through the exhaust pipe 215.

After the set time has elapsed, the second valve 240b is closed again, and the second dust collector 10b is stopped in operation, and after cleaning, the second valve 240b enters the standby state. When the operation of the second dust collector 10b is stopped, the first valve 240a is opened and the first dust collector 10a is brought into operation again.

While repeating the above process, the wet scrubber 1000 is operated.

Meanwhile, reference numeral 1530, which is not described, is a combustion module 1530 that has a housing forming a combustion space therein and burns waste gas.

As described above, although it has been described with reference to a preferred embodiment of the present invention, a person of ordinary skill in the art may variously modify the present invention within the scope not departing from the spirit and scope of the present invention described in the following claims. It can be changed or modified accordingly.

** Description of key symbols **
10: dust collector module 10a, 10b: dust collector
20: first clamp 30: second clamp
40: third clamp 50: housing
100: first receiving housing 120: second purge gas inlet
200: second receiving housing 201: treatment gas outlet
211: processed gas discharge pipe 215: exhaust pipe
220: upper plate 230: first purge gas inlet
240a, 240b: angle valve 250: piston
300: third receiving housing 311: washer fluid inlet
313: washer liquid supply unit 320: dust collecting unit
321: dust collecting surface 323: discharge space
325: cleaning nozzle part 330: inclined part
400: first insulator 413: energization prevention protrusion
420: flange 423: (conductor) receiving groove
430: protective wall 431: wire hole
440: cap 500: second insulator
600: conductor 611: insert piece
613: locking piece 615: wire connection piece
617: male thread part 700: discharge electrode
721: discharge protrusion 730: fastening part
731: separation prevention hole 800: basket
811, 821: Euro 830: Disperser
850: inner space 837: passage
1000: wet scrubber 1100: cabinet
1200: control unit 1300: power supply
1400: tank 1410: support pipe
1500: reactor 1600: pump

Claims (9)

A reactor in which waste gas is introduced and treated;
A wet tank in communication with the lower portion of the reactor;
A first dust collector and a second dust collector each communicating with the tank and supplying a washer liquid therein;
A first processing gas discharge pipe and a second processing gas discharge pipe connected to the first dust collector and the second dust collector, respectively;
An exhaust pipe having both sides connected to the first treatment gas discharge pipe and the second treatment gas discharge pipe;
Including; first and second valves respectively positioned between the first dust collector and the exhaust pipe and between the second dust collector and the exhaust pipe,
The first dust collector and the second dust collector,
A housing having an upper and lower portion opened, but having a lower portion in communication with the tank and grounded;
A first insulator that closes the open upper portion of the housing and is accommodated in the receiving portion and formed with an insertion hole;
A conductor inserted into the insertion hole;
A discharge electrode connected to the conductor and accommodated in the receiving portion;
A discharge space formed between the dust collecting surface, which is an inner surface of the housing, and the discharge electrode;
A processing gas outlet formed in the housing so that an upper portion of the discharge space communicates with the first processing gas discharge pipe or the second processing gas discharge pipe;
A wet scrubber comprising a; a second insulator positioned between the first insulator and the process gas outlet. The method according to claim 1,
The first dust collector and the second dust collector are arranged in parallel in the same direction with each other,
The exhaust pipe is a wet scrubber positioned between the first treatment gas discharge pipe and the second treatment gas discharge pipe delete The method according to claim 1,
The central axis of the first insulator coincides with the central axis of the conductor,
The central axis of the conductor coincides with the central axis of the discharge electrode,
The central axis of the discharge electrode is a wet scrubber coincident with the central axis of the housing The method according to claim 1,
It further includes a first purge gas inlet formed in the housing,
The first purge gas inlet is a wet scrubber communicating with the space between the first insulator and the second insulator and eccentric with respect to the central axis of the housing The method according to claim 1,
The housing includes a first receiving housing whose open upper part is closed by the first insulator, a second receiving housing coupled with an upper part of the first receiving housing and supporting the second insulator and forming the processing gas outlet, A dust collecting housing coupled to the upper portion of the second receiving housing and accommodating the discharge electrode,
The dust collecting housing includes an inclined portion connected to an upper end of the dust-collecting surface, and an inlet of the washer liquid formed above the inclined portion,
The inclined portion becomes narrower as it goes from the upper side toward the dust collecting surface,
The inlet of the washer fluid is a wet scrubber eccentric with respect to the central axis of the housing The method according to claim 1,
The housing includes a first receiving housing whose open upper part is closed by the first insulator, a second receiving housing coupled with an upper part of the first receiving housing and supporting the second insulator and forming the processing gas outlet, A dust collecting housing coupled to the upper portion of the second receiving housing and accommodating the discharge electrode,
A second purge gas inlet connected to the second receiving housing and communicating with the space between the second receiving housing and the second insulator;
A wet scrubber in which a central axis of the second purge gas inlet and the processing gas outlet is eccentric with respect to the central axis of the second receiving housing The method according to claim 1,
Further comprising a; disperser (disperser) in communication with the lower portion of the receiving portion of the housing,
The dispenser is a wet scrubber including a screening plate positioned under the discharge electrode, and a passage formed on the side of the screening plate and communicating with the discharge space. delete

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