KR102219705B1 - Spectro-sensor and spectrometer employing the spectro-sensor - Google Patents

Abstract

The spectral sensor includes a nano-antenna array unit including a plurality of nano-antennas having different resonance wavelength bands; And a photodetector array unit including a plurality of photodetectors respectively detecting light from the plurality of nanoantennas.

Description

Spectro-sensor and spectrometer employing the spectro-sensor

The present disclosure relates to a spectroscopic sensor using a nano-antenna array and a spectrometer employing the same.

Raman spectroscopy (Raman Spectroscopy) can measure the inelastic scattering (inelastic scattering) occurring in the object by the excitation light irradiated to the object, it is possible to analyze components of various substances.

However, such inelastic scattering has a disadvantage that it is difficult to measure because the signal intensity is very small, and to compensate for this, a configuration for amplifying the signal intensity is required, and thus a bulky optical system structure is obtained.

Recently, various studies have been conducted to develop a data analysis method and a miniaturized Raman sensor in order to miniaturize the structure of such a spectrometer and improve its performance.

US registered patent US8355767 B2 (2013.01.15) US registered patent US5615673 A (1997.04.01)

The present disclosure is to provide a spectroscopic sensor using a nano-antenna array and a spectrometer employing the same.

A spectroscopic sensor according to one type includes a nano-antenna array unit including a plurality of nano-antennas having different resonance wavelength bands; And a photodetector array unit including a plurality of photodetectors respectively detecting light from the plurality of nanoantennas.

Each of the plurality of nano-antennas includes a support; It includes; a plurality of plasmonic nanoparticles disposed on the support.

The plasmonic nanoparticles may be formed in a form in which a conductive material is embossed.

Alternatively, the plasmonic nanoparticles may be formed in a form in which a conductive material is engraved.

The support may be made of a dielectric material.

Alternatively, the support may be made of a material whose optical properties change according to an external signal.

The external signal may be an electric signal, an acoustic wave, heat, or a mechanical force.

Each of the plurality of nano-antennas includes a stacked structure in which a first dielectric layer and a second dielectric layer having a refractive index greater than that of the first dielectric layer are alternately stacked along a first direction, and a plurality of nanoholes formed through the stacked structure. An upper nanostructure layer comprising; A lower nanostructure layer including a stacked structure in which a third dielectric layer and a fourth dielectric layer having a refractive index greater than that of the third dielectric layer are alternately stacked along a first direction, and a plurality of nanoholes formed through the stacked structure; It may include; disposed between the upper nanostructure layer and the lower nanostructure layer, an intermediate layer made of a dielectric material.

The period of the stacked structure formed on the upper nanostructure layer and the lower nanostructure layer may be less than or equal to λ/2 when the resonance wavelength is λ.

The plurality of nanoholes may be disposed on a plane perpendicular to the first direction with a predetermined regularity.

The period indicating the regularity may be smaller than λ/3 when the resonance wavelength is λ.

The first dielectric layer and the third dielectric layer may be made of the same material, and the second dielectric layer and the fourth dielectric layer may be made of the same material.

The plurality of nanoholes may be filled with air or a dielectric material having a refractive index greater than 1.

The plurality of nanoholes formed in the upper nanostructure layer and the plurality of nanoholes formed in the lower nanostructure layer may have a form connected to each other through the intermediate layer.

A spectroscopic sensor module according to one type includes a light source for irradiating excitation light to an object; It includes any one of the aforementioned spectroscopic sensors capable of sensing the scattered light by the excitation light from the object.

The spectroscopic sensor may be arranged to sense the scattered light reflected from the object.

The spectroscopic sensor module may further include a base made of a light-transmitting material and having a first surface and a second surface facing each other, wherein the light source includes the second surface on the first surface of the base. The spectroscopic sensor may be disposed to irradiate excitation light to the object through the base, and the spectroscopic sensor may be disposed to sense the scattered light from the object incident through the second surface on the first surface of the base.

The spectroscopic sensor module may further include an optical lens disposed on the second surface to focus the excitation light from the light source on the object and the scattered light from the object to the spectroscopic sensor.

The base may be made of a flexible material.

The spectroscopic sensor module may have a shape that can be worn on an object.

The spectroscopic sensor may be arranged to sense the scattered light transmitted through the object.

The spectroscopic sensor module may have a shape that can be worn on an object in the form of an earring.

A spectroscope according to one type includes a spectroscopic sensor module including a light source for irradiating excitation light to an object, and any one of the aforementioned spectroscopic sensors capable of sensing scattered light by the excitation light from the object; And a signal processing unit that analyzes the physical properties of the object from the signal sensed by the spectroscopic sensor.

The light source may irradiate light in a near-infrared band.

The signal processor may analyze physical properties of the object by Raman spectroscopy.

The spectroscopic sensor module may be configured to be worn on an object.

The spectroscope may further include a display unit that displays a result analyzed by the signal processing unit.

The above-described spectroscopic sensor has a structure in which a nano-antenna array and a photo-detector array are combined, and a signal from an object can be strongly concentrated and detected by wavelength. Accordingly, the above-described spectral sensor has a high resolution and a high signal-to-noise ratio, and may be implemented with a thickness of about tens to hundreds of nanometers. Therefore, the above-described spectroscopic sensor is suitable to be applied in the form of a wearable and portable compact spectrometer.

In addition, the above-described spectroscopic sensor can be manufactured in a relatively simple process since a process of continuously forming a nanoantenna array can be performed in a semiconductor process step of forming a photodetector array.

1 is a conceptual diagram illustrating a schematic structure and operation of a spectroscopic sensor according to an exemplary embodiment.
2A and 2B show exemplary structures of a nano-antenna that may be employed in the spectroscopic sensor of FIG. 1.
3A to 3E show exemplary arrangement forms of plasmonic nanoparticles that may be employed in the nanoantenna of FIG. 2.
FIG. 4 shows another exemplary structure of a nano-antenna that may be employed in the spectral sensor of FIG. 1.
5 is a cross-sectional view taken along line A-A' of the nano-antenna of FIG. 3.
6A and 6B show examples of the shape and arrangement of nanoholes that may be employed in the nanoantenna of FIG. 4.
FIG. 7 shows another exemplary structure of a nano-antenna that may be employed in the spectral sensor of FIG. 1.
8 is a block diagram showing a schematic structure of a spectrometer according to an embodiment.
9 shows an example of an optical arrangement of a spectroscopic sensor module that can be employed in the spectroscope of FIG. 8.
10 shows another example of an optical arrangement of a spectroscopic sensor module that may be employed in the spectroscope of FIG. 8.
11 shows a schematic structure of a spectrometer according to another embodiment.
12 shows a schematic structure of a spectrometer according to another embodiment.

Hereinafter, an optical shutter according to an embodiment of the present invention and a 3D image acquisition apparatus employing the same will be described in detail with reference to the accompanying drawings. In the following drawings, the same reference numerals refer to the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of description. Meanwhile, the embodiments described below are merely exemplary, and various modifications are possible from these embodiments. Hereinafter, what is described as "top" or "top" may include not only those directly above by contact, but also those above non-contact.

FIG. 1 is a conceptual diagram illustrating a schematic structure and operation of a spectro-sensor 100 according to an exemplary embodiment.

The spectroscopic sensor 100 includes a nano-antenna array unit 110 including a plurality of nano-antennas 111 having different resonance wavelength bands, and a plurality of photo detectors each detecting light from the plurality of nano-antennas 111 ( It includes a photodetector array unit 120 having 121.

Each of the nano-antennas 111 may transmit some specific wavelengths of the optical signals L from the target to be spectroscopically analyzed to the photodetector 121 below. To this end, the nano-antennas 111 have a material and a structure so that only specific wavelength components among the light coming at various angles can be resonated and transmitted. The transmission method can be the actual progress of light or the energy transmission method by the near field. In addition, when the resonance wavelengths between the adjacent nano-antennas 111 are different from each other, the energy distribution (spatial mode type) of light resonated by the nano-antennas 111 may cross each other with the adjacent nano-antennas 111.

The nano-antennas 111 have, for example, a thickness of each and a spacing between the nano-antennas 111 having a dimension of a sub-wavelength, and may be configured to strongly collect light of a predetermined wavelength band. have. This function is known to be due to surface plasmon resonance occurring at the boundary between a metallic material and a dielectric material, and the resonance wavelength varies according to the detailed pattern of the nano-antenna 111.

In the present embodiment, all of the nano-antennas 111 constituting the nano-antenna array unit 110 may be configured to have different resonance wavelengths, or several groups may be formed to have different resonance wavelengths for each group. Alternatively, they may be arranged to have different resonance wavelengths in rows or columns.

The photodetector 121 may include various types of sensors that convert incident light into electrical signals, for example, a photo diode, a charge coupled device (CCD), or a complementary metal-oxide semiconductor (CMOS). It may include an element.

The nanoantenna array unit 110 and the photodetector array unit 120 are arranged in a structure in which signals from the nanoantenna array unit 110 can be optically transmitted to the photodetector array unit 120. For example, as shown, the nano-antenna array unit 110 and the photodetector array unit 120 may be integrated in such a manner that optical loss can be reduced as much as possible. The photodetector array unit 120 may be directly formed on the nano-antenna array unit 110 to make physical contact with each other, but is not limited thereto.

When light L including various wavelength components is incident on the spectroscopic sensor 100, it is reflected and scattered in various directions by the nano-patterns forming the surface of the nano-antenna array unit 110. At this time, the nano-antenna ( Light belonging to the resonance wavelength band of 111) is not reflected or scattered in other directions, but is resonated and amplified in the nano region of the nano antenna 111. Therefore, light of various wavelength components included in the incident light L is focused near the corresponding nano-antenna 111, and the focused light is detected by the photodetector 121 provided corresponding to each nano-antenna 111 It can create a high signal-to-noise ratio. Since the resonant wavelength bandwidth of the nano-antenna 111 can be formed very narrow, the spectral sensor 100 of the embodiment can have a very high resolution.

In addition, since the spectral sensor 100 according to the embodiment has a form in which the photodetector array unit 120 and the nano-antenna array unit 110 are integrally combined, the loss due to the optical path is small and the signal-to-noise ratio (SNR) is increased. In addition, since the step of continuously forming the nano-antenna array unit 110 may be performed in the semiconductor process step of forming the photodetector array unit 120, the overall process may be simplified.

2A and 2B show exemplary structures of a nano-antenna 111 that may be employed in the spectroscopic sensor 100 of FIG. 1.

Referring to the drawings, the nano-antenna 111 includes a support portion S and a plurality of plasmonic nanoparticles NP disposed on the support portion S.

As shown in FIG. 2A, the plasmonic nanoparticles NP may be formed in a form in which the conductive material M is embossed. Alternatively, as shown in FIG. 2B, the conductive material M may be formed in an intaglio shape.

As the conductive material M, a metal material having high conductivity capable of generating surface plasmon excitation may be used. For example, Cu, Al, Ni, Fe, Co, Zn, Ti, ruthenium (Ru), rhodium (Rh), palladium (Pd), platinum (Pt), silver (Ag), At least one selected from osmium (Os), iridium (Ir), platinum (Pt), and gold (Au) may be employed, and may be made of an alloy containing any one of them. In addition, a two-dimensional material having good conductivity, such as graphene, or a conductive oxide may be employed.

The support S may be made of a dielectric material, or may be made of a flexible material. The support part S is not limited to the illustrated shape, and all of the support parts S provided in each of the nano antennas 111 may be connected to form a single dielectric substrate.

The support (S) is also external It may be made of a material whose optical properties change depending on the signal. The external signal can be, for example, an electrical signal, an acoustic wave, heat, or a mechanical force. For example, an electro-optic material whose effective refractive index changes when an electric signal is applied, for example, conductive oxides such as ITO and IZO, LiNbO ₃ , LiTaO ₃ , and the like may be employed in the support S. Alternatively, when an elastic wave is incident, an elastic medium whose effective refractive index is changed, for example, oxide or nitride, may be employed. Alternatively, when heat is applied, a material in which a phase transition occurs at a predetermined temperature or higher and a refractive index is changed may be employed in the support portion S. With such a material, for example, VO ₂ , VO ₂ O ₃ , EuO, MnO, CoO, CoO ₂ , LiCoO ₂ , or Ca ₂ RuO ₄ Can be employed.

When the support part S is made of a material whose optical properties change according to the external signal as described above, the spectroscopic sensor 100 changes the resonance wavelength band of each nano-antenna 111 by appropriately adjusting the signal applied to the support part S. I can make it.

Although the nano-antenna 111 is shown to include four plasmonic nanoparticles (NP) having the same rod shape, this is exemplary. Plasmonic nanoparticles (NP) provided in the nano-antenna 111 may have different shapes, and the number or arrangement may be variously changed.

3A to 3E show exemplary arrangement forms of plasmonic nanoparticles that may be employed in the nanoantenna 111 of FIG. 2.

As shown in FIG. 3A, two plasmonic nanoparticles NP1 having the same shape may be employed, and as shown in FIG. 3B, two plasmonic nanoparticles NP2 and NP2 having different lengths may be employed. As shown in FIG. 3C, three plasmonic nanoparticles (NP3) having the same shape may be employed, and two plasmonic nanoparticles (NP4) having the same shape as shown in FIG. 3D and one plasmonic nanoparticle having a different length (NP4') may be employed. In addition, as shown in FIG. 3E, two plasmonic nanoparticles NP5 (NP5') having two shapes may be employed.

3A to 3E all show rod-shaped plasmonic nanoparticles, but may have a polygonal shape, a circular shape, an oval shape, or a wire grid shape. In addition, the illustrated shapes may be a pattern embossed as shown in FIG. 2A or a pattern engraved as shown in FIG. 2B.

4 shows another exemplary structure of a nano-antenna 112 that may be employed in the spectral sensor of FIG. 1. And, FIG. 5 is a cross-sectional view taken along line A-A' of the nano-antenna 112 of FIG. 4.

The nano-antenna 112 may have a structure in which nanostructures arranged in a predetermined rule are applied to a stacked structure of a plurality of dielectric layers in a horizontal direction, that is, along a plane perpendicular to the stacked structure. This structure is suggested as a structure capable of inducing resonance for light in a specific wavelength band in the stacking direction and reducing the dependence of the resonance wavelength on the incident angle of incident light by the nanostructure in the horizontal direction.

The nano-antenna 112 specifically includes an upper nano-structure layer 10, a lower nano-structure layer 20, and an intermediate layer 30 disposed between the upper nano-structure layer 10 and the lower nano-structure layer 20 can do.

The upper nanostructure layer 10 includes a stack structure in which a first dielectric layer 11 and a second dielectric layer 12 having a refractive index greater than that of the first dielectric layer 11 are alternately stacked, and a plurality of layers formed through the stacked structure. It includes nano holes (NH).

The lower nanostructure layer 20 has a similar structure to the upper nanostructure layer 10, in which a third dielectric layer 21 and a fourth dielectric layer 22 having a higher refractive index than the third dielectric layer 21 are alternately stacked. It includes a structure and a plurality of nanoholes (NH) formed through the stacked structure.

A period p in which different types of dielectric layers are stacked in the upper nanostructure layer 10 and the lower nanostructure layer 20 may have a value less than or equal to λ/2 when the resonance wavelength is λ.

The upper nanostructure layer 10 and the lower nanostructure layer 20 may each be formed of a Distributed Bragg Reflector (DBR). The thickness of the dielectric layer constituting the upper nanostructure layer 10 and the lower nanostructure layer 20 may be determined to be 1/4 of the resonance wavelength, and the first to fourth dielectric layers 11, 12, 21, 22 ) And the number of pairs of dielectric layers may be appropriately adjusted in consideration of reflectance. That is, the number of pairs of the first dielectric layer 11 and the second dielectric layer 12 in the upper nanostructure layer 10, the third dielectric layer 21 and the fourth dielectric layer 22 in the lower nanostructure layer 20 The number of pairs consisting of is shown as two in the drawing, but this is exemplary and may be modified differently.

The reflectance of the upper nanostructure layer 10 and the lower nanostructure layer 20 may be the same or may be different. For example, the reflectance of the lower nanostructure layer 20 disposed adjacent to the photodetector (121 in FIG. 1) may be set lower than that of the upper nanostructure layer 10.

The upper nanostructure layer 10 and the lower nanostructure layer 20 may be made of the same material. That is, the first dielectric layer 11 and the third dielectric layer 21 may be made of the same material, and the second dielectric layer 12 and the fourth dielectric layer 22 may be made of the same material. In this case, the reflectance may be adjusted differently by differentiating the number of pairs of dielectric layers applied to the upper nanostructure layer 10 and the number of pairs of dielectric layers applied to the lower nanostructure layer 20.

The intermediate layer 30 serves to break the regularity of the upper and lower nanostructure layers 10 and 20 within the nanoantenna 112, and its material is not particularly limited. For example, when the upper nanostructure layer 10 and the lower nanostructure layer 20 are formed of the same material, the intermediate layer 30 may be made of a material different from the material employed therein, and the thickness is not limited. Alternatively, the same material as any one of the dielectric layers employed in the upper nanostructure layer 10 and the lower nanostructure layer 20 may be employed for the intermediate layer 30, and in this case, the upper and lower nanostructure layers 10 It may have a different thickness than the dielectric layer employed in (20).

The plurality of nanoholes NH may be arranged with a predetermined regularity along a plane perpendicular to the stacking direction. The period (T) representing the regularity may be smaller than λ/3 when the resonance wavelength is λ.

The plurality of nanoholes NH may be filled with air or a dielectric material having a refractive index greater than 1. The refractive index of the dielectric material filling the nanohole NH is not limited, and may have the same value as the refractive index of any one of the first to fourth dielectric layers 11, 12, 21, 22, for example, , May have different values.

6A and 6B show examples of the shape and arrangement of nanoholes that can be employed in the nanoantenna 112 of FIG. 4.

Referring to FIG. 6A, the plurality of nanoholes NH1 may be arranged in a period T1 in a first direction and a period T2 in a second direction. T1 and T2 may have the same value.

Referring to FIG. 6B, a plurality of nanoholes NH2 may be repeatedly arranged in a period T4 along a row repeatedly arranged in a period T3, and nanoholes NH2 in adjacent rows may be arranged to be offset from each other. T3 and T4 may have the same value.

In FIGS. 6A and 6B, the cross-sectional shapes of the nanoholes NH1 and NH2 and the nanoantenna 112 are illustrated in a circular shape, but these are exemplary and are not limited thereto. For example, it may have a shape such as an oval or a polygon.

7 shows another exemplary structure of the nano-antenna 113 that can be employed in the spectral sensor of FIG. 1.

The nano-antenna 113 is formed so that the nano-hole NH4 penetrating the stacked structure entirely penetrates the upper nano-structure layer 10, the intermediate layer 30, and the lower nano-structure layer 20. There is a difference from (112). That is, the nanoholes NH4 formed in the upper nanostructure layer 10 and the nanoholes NH4 formed in the lower nanostructure layer 20 pass through the intermediate layer 30 and are connected to each other. The shape or arrangement of the nanoholes NH4 may have the shapes illustrated in FIGS. 6A to 6C.

When the nano-antennas 112 and 113 are employed in the spectroscopic sensor 100 in the form of an array as shown in FIG. 1, each of the nano-antennas 112 and 113 are some of the optical signals L from the target to be spectroscopically analyzed. A specific wavelength is transmitted to the lower photodetector 121. Each of the nano-antennas 112 and 113 resonates only specific wavelength components among the light entering at various angles and determines the details of the material, thickness, and nanoholes of each dielectric layered structure so that they can be transmitted to the photodetector 121.

8 is a block diagram showing a schematic structure of a spectrometer 1000 according to an embodiment.

The spectrometer 1000 includes a spectroscopic sensor module 300 _{that irradiates the excitation light L E} to the object OBJ _{and senses the scattered light L S from the object OBJ.} The spectral sensor module 300 includes a light source unit 200 and a spectral sensor 100.

Here, the object OBJ may include a human body, a living body such as an animal, or food. For example, the object OBJ may be a human body for measuring blood sugar or food for measuring freshness, and may be a sample for analyzing air pollution or water pollution.

The light source unit 200 may include a light source, and may also include an optical member that directs light from the light source to a required position of the object OBJ. The light source may be configured to irradiate light having a suitable wavelength band according to the property to be analyzed from the object OBJ. For example, the light source may irradiate light in the near-infrared band.

As illustrated in FIG. 1, the spectroscopic sensor 100 may be a configuration including a nano-antenna array and a photo-detector array, and various types of nano-antenna shapes illustrated in FIGS. 2A, 2B, and 3A to 3E Can be employed. The resonance wavelength band of the nano-antenna constituting the nano-antenna array may be set to a wavelength band slightly longer than the wavelength of light irradiated from the light source.

The spectrometer 1000 may also include a control module 600 that analyzes physical properties of the object OBJ from a signal sensed by the spectroscopic sensor 100 and generates a necessary control signal. The control module 600 may include a user interface 500 and a signal processing unit 400. The user interface 500 may include an input unit and a display unit. The signal processing unit 400 may analyze the physical properties of the object OBJ from the signal sensed by the spectroscopic sensor 100, for example, can analyze the physical properties of the object OBJ according to Raman Spectroscopy. have. Raman spectroscopy uses scattering, in particular inelastic scattering, in which light incident in the object OBJ collides with atoms or molecules in the object OBJ and scatters in various directions. Such scattering is not simply reflected off the surface of an atom or molecule, but is absorbed and emitted by an atom or molecule, and the scattered light has a wavelength longer than that of incident light. This difference in wavelength may be approximately 200 nm or less. By analyzing the spectrum of the scattered light, it is possible to find out various physical properties such as the vibration of molecules in the object OBJ and the structure of the molecules.

The signal processing unit 400 may process the analyzed result as an image signal to be displayed on the display unit of the user interface 500. In addition, a control signal may be transmitted to the light source unit 200 according to an input from the user interface 500. In addition, when the spectral sensor 100 is configured to change the resonance wavelength band according to an external signal, the signal processing unit 400 may generate a control signal for adjusting the resonant wavelength band according to an input from the user interface 500. The signal processing unit 400 may be implemented with a microprocessor or the like.

The spectroscopic sensor module 300 and the control module 600 may be connected to each other by wire or wirelessly. For example, the spectrometer 1000 may be implemented as a small portable device in which the spectroscopic sensor module 300 and the control module 600 are connected by wire. Alternatively, the control module 600 may be mounted on a portable mobile communication device and configured to wirelessly communicate with the spectroscopic sensor module 300.

9 shows an example of an optical arrangement of a spectroscopic sensor module 301 that may be employed in the spectroscope 1000 of FIG. 8.

The spectroscopic sensor module 301 includes a light source 210 and a spectroscopic sensor 100, and has a reflective type, that is, the spectroscopic sensor 100 senses the _{scattered light L S reflected from the object OBJ.} Is composed.

The light source unit 200 includes a light source 210, a light path switching member 220, and a stop 230. The optical path switching member 220 is illustrated in the form of a prism, but this is exemplary, and may have a shape of a beam splitter or a flat mirror. Alternatively, it may be omitted depending on the arrangement position of the light source 210.

The spectroscopic sensor module 300 may further include an optical lens 150 for collecting _{the scattered light L S from the object OBJ by the spectroscopic sensor 100.}

_{The excitation light L E} irradiated from the light source 210 collides with the molecular structure in the object OBJ, is absorbed by the molecular structure, and is re-emitted, and is emitted from the object OBJ in the form of _{wavelength converted scattered light L S} Comes out. The scattered light L _S includes various spectrums having different degrees of wavelength conversion depending on the state of molecules in the object OBJ. The spectroscopic sensor module 301 of this embodiment adopts an optical system structure in which _{the scattered light L S} emitted along the same path as the path where the _{excitation light L E is incident to the object OBJ is incident on the spectroscopic sensor 100, and} Also, if necessary, _{an additional optical member for diverging the scattered light L S} toward the spectroscopic sensor 100 may be further employed.

10 shows another example of an optical arrangement of a spectroscopic sensor module 302 that may be employed in the spectroscope 1000 of FIG. 8.

The spectral sensor module 302 includes a light source 210 and a spectral sensor 100, and is of a transmission type, that is, the spectral sensor 100 senses the _{scattered light L S transmitted through the object OBJ.} Consists of.

The light source unit 200 includes a light source 210, a light path switching member 220, and a stop 230. The optical path switching member 220 is illustrated in the form of a prism, but this is exemplary, and may have a shape of a beam splitter or a flat mirror. Alternatively, it may be omitted depending on the arrangement of the light source 210.

The spectroscopic sensor module 302 may further include an optical lens 150 that collects _{the scattered light L S from the object OBJ by the spectroscopic sensor 100.}

_{The excitation light L E} irradiated from the light source 210 collides with the molecular structure in the object OBJ, is absorbed by the molecular structure, and is re-emitted, and is emitted from the object OBJ in the form of _{wavelength converted scattered light L S} Comes out. The scattered light L _S includes various spectrums having different degrees of wavelength conversion depending on the state of molecules in the object OBJ. The spectroscopic sensor module 302 of the present exemplary embodiment _{adopts an optical system structure in which the scattered light L S} transmitted through the object OBJ is incident on the spectroscopic sensor 100.

Whether to employ the reflective type as shown in FIG. 9 or the transmissive type as shown in FIG. 10 may be appropriately selected according to the properties of the object OBJ.

11 shows a schematic structure of a spectrometer 1001 according to another embodiment.

The spectrometer 1001 includes a spectroscopic sensor module 303 and a control module 600. In this embodiment, the spectral sensor module 303 includes a base 280 made of a light-transmitting material, and the light source 210 and the spectral sensor 100 are disposed on one surface of the base 280 to be spaced apart from each other.

The light source 210 passes through the base 280 _{and is disposed to irradiate the excitation light L E} on the object OBJ, and the spectroscopic sensor 100 passes through the base 280 and enters the object OBJ. It is arranged to sense the scattered light L _{S from.}

In addition, the spectral sensor module 303 _{focuses the excitation light L E} from the light source 210 to the object OBJ, and collects the scattered light L _S from the object OBJ by the spectroscopic sensor 100. The included optical lens 260 may be further included. The optical lens 260 may be disposed on a surface facing one surface of the base 280 on which the light source 210 and the spectroscopic sensor 100 are disposed.

The base 280 may be made of a flexible material. In this case, the spectroscopic sensor module 303 is advantageous in being applied in a form that can be worn on the object OBJ.

The control module 600 may be connected to the spectroscopic sensor module 303 by wire or wirelessly. The control module 600 may be mounted on the base 280 together with the spectroscopic sensor module 303 and may constitute, for example, a wristband-shaped wearable small spectrometer.

Alternatively, only the spectroscopic sensor module 303 may be formed as a bracelet-shaped wearable device, and the control module may be mounted on a mobile device.

12 shows a schematic structure of a spectrometer 1002 according to another embodiment.

The spectral sensor module 304 includes a light source unit 200 and a spectral sensor 100, and employs a transmission-type optical system configuration, and may be worn on an object in the form of an earring.

The control module 600 may be connected to the spectral sensor module 304 by wire or wirelessly. For example, the control module 600 may be mounted on a mobile device and communicate with the spectroscopic sensor module 304.

Until now, exemplary embodiments have been described and illustrated in the accompanying drawings to aid in understanding the present invention. However, it should be understood that these examples are for illustrative purposes only and are not limiting. And it should be understood that the invention is not limited to the illustrated and described description. This is because various other modifications can occur to those of ordinary skill in the art.

100...spectral sensor 110...nano antenna array unit
111, 112, 113...nano antenna 120...photo detector array unit
121...photodetector 150, 260...optical lens
200... light source part 210... light source
220...light path switching member 230...aperture
280...base 300, 301, 302, 303, 304...spectral sensor module
600...control module 1000, 1001, 1002... spectrometer

Claims (26)

A nano-antenna array unit including a plurality of nano-antennas having different resonance wavelength bands;
Including; a photodetector array unit having a plurality of photodetectors respectively detecting light from the plurality of nano-antennas,
Each of the plurality of nano-antennas
An upper nanostructure layer including a stack structure in which a first dielectric layer and a second dielectric layer having a refractive index greater than that of the first dielectric layer are alternately stacked in a first direction, and a plurality of nanoholes formed through the stacked structure;
A lower nanostructure layer including a stacked structure in which a third dielectric layer and a fourth dielectric layer having a refractive index greater than that of the third dielectric layer are alternately stacked along a first direction, and a plurality of nanoholes formed through the stacked structure;
Including; an intermediate layer disposed between the upper nanostructure layer and the lower nanostructure layer, made of a dielectric material,
The intermediate layer has a different material or thickness than the first to fourth dielectric layers. delete delete delete delete delete delete delete The method of claim 1,
The period of the stacked structure formed on the upper nanostructure layer and the lower nanostructure layer is λ/2 or less when the resonance wavelength is λ. The method of claim 1,
The plurality of nano-holes are a spectroscopic sensor disposed on a plane perpendicular to the first direction with a predetermined regularity. The method of claim 10,
The periodicity indicating the regularity is smaller than λ/3 when the resonance wavelength is λ. The method of claim 1,
The first dielectric layer and the third dielectric layer are made of the same material,
The second dielectric layer and the fourth dielectric layer are made of the same material. The method of claim 1,
The plurality of nanoholes are filled with air or a dielectric material having a refractive index greater than 1. The method of claim 1,
A spectroscopic sensor in which a plurality of nanoholes formed in the upper nanostructure layer and a plurality of nanoholes formed in the lower nanostructure layer are connected to each other through the intermediate layer. A light source for irradiating excitation light onto an object;
The spectroscopic sensor module comprising a; the spectroscopic sensor of claim 1 capable of sensing the scattered light by the excitation light from the object. The method of claim 15,
The spectroscopic sensor module is arranged to sense the scattered light reflected from the object. The method of claim 16,
A base made of a light-transmitting material and having a first surface and a second surface facing each other; further includes,
The light source is disposed on the first surface of the base to irradiate excitation light to an object through the second surface,
The spectroscopic sensor is a spectroscopic sensor module disposed on the first surface of the base to sense scattered light from an object incident through the second surface. The method of claim 17,
An optical lens disposed on the second surface to focus the excitation light from the light source on the object and the scattered light from the object to the spectroscopic sensor. The method of claim 17,
The base is a spectroscopic sensor module made of a flexible material. The method of claim 19,
The spectroscopic sensor module is a spectroscopic sensor module having a shape that can be worn on an object. The method of claim 15,
The spectroscopic sensor module is arranged to sense the scattered light transmitted through the object. The method of claim 21,
The spectroscopic sensor module is a spectroscopic sensor module that can be worn on an object in the form of an earring. A light source for irradiating the object with excitation light,
A spectroscopic sensor module including the spectroscopic sensor of claim 1 capable of sensing the scattered light by the excitation light from the object;
Spectroscope comprising a; signal processing unit for analyzing the physical properties of the object from the signal sensed by the spectroscopic sensor. The method of claim 23,
The light source is a spectroscope that irradiates light in the near-infrared band. The method of claim 24,
The signal processor is a spectrometer that analyzes the physical properties of the object by Raman spectroscopy. The method of claim 23,
The spectroscopic sensor module is a spectrometer configured to be worn on an object.

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