KR102218827B1 - Anemometer with automatic flow rate maintaining function - Google Patents

Abstract

The present invention relates to an anemometer having function of automatically maintaining wind speed. The anemometer includes: a body for calculating the wind speed in a gas supply device based on the voltage and static pressure in a gas supply device output from a Pitot tube installed in an upper center of the gas supply device for manufacturing a semiconductor device; and an external damper driving member which is connected to the main body and automatically maintains the wind speed within a normal range by driving a damper when the wind speed calculated in the main body is abnormal, the damper being connected to an exhaust duct for discharging an exhaust gas of the gas supply device to the outside.

Description

Anemometer with automatic wind speed maintenance function {ANEMOMETER WITH AUTOMATIC FLOW RATE MAINTAINING FUNCTION}

The present invention relates to a digital measurement technology for the wind speed of exhaust gas of a gas supply device for manufacturing a semiconductor device, and more particularly, the wind speed of the exhaust gas is measured, and when the wind speed is out of the normal range, the wind speed can be adjusted and automatically maintained. It relates to an anemometer having an automatic wind speed maintenance function.

Various types of gases are required to produce semiconductor devices. Since these gases are toxic and flammable to humans, strict regulations on gas management are established to manage risk. In particular, gas may leak from a replacement or connection part of a gas cylinder installed in the gas supply device. If the gas leaks in this way, it must be discharged through an external gas treatment device (scrubber) through an exhaust pipe. In order to meet the necessity of gas management, the risk of gas leakage is managed by setting standard parameters such as differential pressure, which is the difference between the exhaust pressure and atmospheric pressure, and wind speed of the exhaust gas for leakage gas that may occur in the gas supply device.

In general, a manometer is installed inside the gas supply device to manage the exhaust static pressure in the gas supply device. The analog type manometer is difficult to accurately quantify because the scale representing the exhaust static pressure fluctuates, and the static pressure of the exhaust can be checked only when the administrator visually checks the exhaust pressure.

Accordingly, recently, a Pitot tube was installed in the gas supply device to sense the total pressure and static pressure output from the Pitot tube, and the atmospheric pressure and exhaust pressure output from the gas supply device to sense the wind speed of the leaked gas. Exhaust wind speed data can be quantified and quantified by calculating the overpressure as a digital value, and by transmitting the wind speed and differential pressure of the exhaust gas as digital data through the gas management system (GMS), a central control system, the manager is dispatched to the site to check the remote location. You can check the wind speed and differential pressure on the monitor installed in.

However, when the wind speed and differential pressure of the exhaust gas are out of the normal range, the manager still needs to go to the site and adjust the wind speed and differential pressure by manually rotating the damper installed in each gas supply device, so a technology for automatic adjustment is required.

Korea Open Utility Model No. 20-2009-0011899 (2009.11.25) embeds a GMP buried manometer bracket, so there is little effect on preventing airflow, and the safety of the part where the human head could support it from the protruding place. It also discloses a technology that can maintain and eliminate dust and microorganisms in protruding areas.

Korean Patent Laid-Open Publication No. 10-2006-0074588 (2006.07.03) relates to an exhaust system for track equipment for semiconductor manufacturing, and is provided on an exhaust duct of track equipment to automatically control exhaust pressure. As an exhaust system of a facility, a manometer that measures the exhaust pressure and transmits a detection signal when the upper or lower limit of the set appropriate range is detected, an exhaust pressure adjusting bar that is moved forward and backward in the exhaust duct to open or close, and the exhaust pressure A distance counting bar provided outside the exhaust duct so as to be parallel to the adjustment bar, a detection sensor that detects the movement state of the distance counting bar and transmits the detection result, and a forward and backward movement for moving the exhaust pressure adjusting bar and the distance counting bar together The driving means, the manometer, the detection sensor, and the forward and backward driving means are connected to the forward and backward driving means at a time when the detection signal of the manometer is received, and the detection result of the manometer and the detection sensor Disclosed is a technology capable of adjusting an optimum value of the exhaust pressure of a track facility in real time and automatically, including a controller for driving the forward/reverse driving means so as to achieve an optimum intermediate value of the exhaust pressure based on.

Korea Open Utility Model No. 20-2009-0011899 (2009.11.25) Korean Patent Publication No. 10-2006-0074588 (2006.07.03)

An embodiment of the present invention is to provide an anemometer having an automatic wind speed maintenance function capable of digitally measuring an exhaust gas wind speed of a gas supply device for manufacturing a semiconductor device and automatically maintaining the wind speed by adjusting the wind speed when the wind speed is out of a normal range.

An embodiment of the present invention is to provide an anemometer having an automatic wind speed maintenance function capable of automatically maintaining a current wind speed of a semiconductor exhaust duct through a damper.

An embodiment of the present invention is to provide an anemometer having an automatic wind speed maintenance function that can be easily applied to an existing anemometer by configuring an assembly structure that can be coupled with a damper driving member.

Among the embodiments, an anemometer having an automatic wind speed maintenance function includes a main body that calculates the wind speed in the gas supply device based on the voltage and the static pressure in the gas supply device output from the Pitot tube installed in the upper center of the gas supply device for semiconductor device manufacturing, And an external damper driving member that is connected to the main body and automatically maintains the wind speed in a normal range by driving a damper connected to an exhaust duct that discharges exhaust gas from the gas supply device when the wind speed calculated by the main body is abnormal. Includes.

The main body covers a case, a connector connection groove formed on the bottom surface of the case and electrically connected to the damper driving member and the connector, and the connector connection groove when the damper driving member is not connected to the connector connection groove. It may include a bracket that covers and fixes the main body case to a designated installation position.

The bracket includes a first support surface for supporting the bottom surface of the main body case and a second support surface that is vertically bent from both sides of the first support surface to support both side surfaces of the main body case. And a wing surface that is vertically bent toward the outside at an end of the second support surface.

The bracket is fixedly coupled to the main body case accommodated in the space by forming a fastening hole in each of the second support surface and the wing surface, and passing a fastening member through the fastening hole formed in the second support surface, and The fastening member may be passed through the formed fastening hole to be fixedly fastened to the designated installation position.

The damper driving member may be connected between the body case and the bracket, and may include an open path solenoid valve and a closed path solenoid valve of the damper.

The damper driving member may have two 2-pin connectors or one 4-pin connector, and may be inserted into the connector connection groove to electrically connect the open path solenoid valve and the closed path solenoid valve to the main body.

The main body includes a display window for displaying wind speed on the front of the case and a plurality of buttons, and includes a plurality of ports on the rear of the case, and the plurality of buttons are a menu button for selecting a menu displayed on the display window, and the display window A calibration button for calibrating the displayed wind speed to "zero", an increase/decrease button for selecting by adding or subtracting the display value of the wind speed displayed on the display window, a range selection button and button for selecting the display range of the wind speed displayed on the display window And an enter button for inputting a value selected by the Pitot tube, and the plurality of ports may include a voltage port to which a voltage output from the Pitot tube is input, a positive pressure port to which a positive pressure output from the Pitot tube is input, and a communication port. .

The main body is a wind speed sensor that senses a voltage and a static pressure in a gas supply device output from a Pitot tube installed in the upper center of a gas supply device for semiconductor device manufacturing, and based on the voltage and a static pressure in the gas supply device detected by the wind speed sensor. A control unit that calculates the wind speed in the gas supply device and checks whether the wind speed is out of the normal range, and generates an alarm in case of abnormality outside the normal range, a display unit that displays the wind speed calculated by the control unit, and calculated by the control unit It may include a communication unit for transmitting the wind speed and alarm signal to the remote gas supply management system.

The disclosed technology can have the following effects. However, since it does not mean that a specific embodiment should include all of the following effects or only the following effects, it should not be understood that the scope of the rights of the disclosed technology is limited thereby.

An anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention measures the exhaust gas wind speed of a gas supply device for semiconductor device manufacturing as a digital value, and when the wind speed of the exhaust gas exceeds the normal range, the damper does not require a manager to go to the site. The current wind speed of the semiconductor exhaust duct can be automatically maintained within the normal range by controlling the wind speed by driving.

An anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention includes a damper driving member made of a solenoid valve as an external type and connects it as needed to drive the damper, thereby setting the current wind speed of the semiconductor exhaust duct by the user. In addition to automatically maintaining within the range, the risk of explosion due to damper driving can be prevented.

An anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention may be used by connecting a damper driving member made of an external solenoid valve to an existing anemometer through a connector.

1 is a block diagram illustrating an anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention.
2A-2B are views for explaining the appearance of an anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention.
3A-3B are diagrams illustrating a coupling structure of a damper driving member to the anemometer in FIG. 2.
4 is an exemplary view showing a coupling form of a damper driving member to the anemometer of FIG. 2.
5 is another exemplary view showing a coupling form of a damper driving member to the anemometer of FIG. 2.
6 is an exemplary diagram for explaining an automatic wind speed maintenance function of an anemometer according to an exemplary embodiment.

Since the description of the present invention is merely an embodiment for structural or functional description, the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, since the embodiments can be variously changed and have various forms, the scope of the present invention should be understood to include equivalents capable of realizing the technical idea. In addition, since the object or effect presented in the present invention does not mean that a specific embodiment should include all of them or only those effects, the scope of the present invention should not be understood as being limited thereto.

Meanwhile, the meaning of terms described in the present application should be understood as follows.

Terms such as "first" and "second" are used to distinguish one component from other components, and the scope of rights is not limited by these terms. For example, a first component may be referred to as a second component, and similarly, a second component may be referred to as a first component.

When a component is referred to as being "connected" to another component, it should be understood that although it may be directly connected to the other component, another component may exist in the middle. On the other hand, when it is mentioned that a component is "directly connected" to another component, it should be understood that there is no other component in the middle. On the other hand, other expressions describing the relationship between the constituent elements, that is, "between" and "just between" or "neighboring to" and "directly neighboring to" should be interpreted as well.

Singular expressions are to be understood as including plural expressions unless the context clearly indicates otherwise, and terms such as “comprise” or “have” refer to implemented features, numbers, steps, actions, components, parts, or It is to be understood that it is intended to designate that a combination exists and does not preclude the presence or addition of one or more other features or numbers, steps, actions, components, parts, or combinations thereof.

In each step, the identification code (for example, a, b, c, etc.) is used for convenience of explanation, and the identification code does not describe the order of each step, and each step has a specific sequence clearly in context. Unless otherwise stated, it may occur differently from the stated order. That is, each of the steps may occur in the same order as specified, may be performed substantially simultaneously, or may be performed in the reverse order.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the field to which the present invention belongs, unless otherwise defined. Terms defined in commonly used dictionaries should be construed as having meanings in the context of related technologies, and cannot be construed as having an ideal or excessive formal meaning unless explicitly defined in the present application.

1 is a block diagram showing an anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention.

Referring to FIG. 1, an anemometer 100 having an automatic wind speed maintenance function may include a wind speed sensor 110, a control unit 130, a display unit 150, a communication unit 170, and a damper driving member 190. . Here, the wind speed sensor 110, the control unit 130, the display unit 150, and the communication unit 170 may be mounted inside the body 100A of the anemometer 100, and the damper driving member 190 is in an external form. It may be configured and used in connection with the main body of the anemometer 100.

The wind speed sensor 110 detects the voltage (Pt) and the positive pressure (Ps) in the gas supply device 200 output from the Pitot tube 210 installed in the upper center of the gas supply device 200 for semiconductor device manufacturing. can do.

The controller 130 may calculate the wind speed in the gas supply device 200 based on the voltage Pt and the static pressure Ps in the gas supply device 200 sensed by the wind speed sensor 110. In one embodiment, the control unit 130 checks whether the calculated wind speed is out of the normal range, and if abnormality out of the normal range, may generate an alarm and adjust the wind speed to automatically maintain the normal range.

The display unit 150 may visually display the wind speed calculated by the control unit 130 through numerical display or the like so that the manager can recognize the wind speed.

The communication unit 170 transmits the wind speed and the alarm signal calculated by the control unit 130 to a remote gas supply device management system, so that an administrator can remotely monitor the gas supply device.

When the wind speed calculated by the controller 130 is abnormal, the damper driving member 190 may drive the damper 250 of the exhaust duct 230 to adjust the wind speed. In one embodiment, the damper driving member 190 may include a solenoid valve. Here, the damper driving member 190 may be manufactured as an external type separate from the anemometer 100 and may be electrically connected to the anemometer 100 through a connector, and may be fixedly coupled to the anemometer 100 through a bracket. .

2A-2B are views for explaining the appearance of an anemometer having an automatic wind speed maintenance function according to an embodiment of the present invention.

2A and 2B, the anemometer 100 according to an embodiment has a main body case 310 for protecting an internal configuration, and a connector for connection with a damper driving member 190 on the bottom surface of the main case 310. A groove 320 and a bracket 330 may be included. Here, the bracket 330 may serve as a cover for protecting the connector connection groove 320, and the main body case 310 is fixedly coupled to an appropriate position around the exhaust duct 230 of the gas supply device 200. Can play a role. The bracket 330 has a first support surface 331 supporting the bottom surface of the main body case 310 and a second support that is vertically bent from both sides of the first support surface 331 to support both sides of the main body case 310 The surface 332 and 333 may be provided to form an accommodation space for the body case 310 therein. The first support surface 331 may serve as a protective cover covering the connector connection groove 320 formed on the bottom surface of the body case 310. Fastening holes 332a and 333a are formed in the second support surfaces 332 and 333 to penetrate fastening members such as bolts and screws to be fixedly coupled to the body case 310. The bracket 330 may have wing surfaces 334 and 335 vertically bent outward from the ends of the second support surfaces 332 and 333 to fix the main body case 310 at a desired position. Fastening holes 334a and 335a are formed in the wing surfaces 334 and 335 to penetrate fastening members such as bolts and screws to fix the main body case 310 at the installation position.

The anemometer 100 according to an exemplary embodiment may include a display window 340 displaying the wind speed of the display unit 150 and a plurality of buttons 350 on the front side. Here, the plurality of buttons 350 are a menu button for selecting a menu displayed on the display window 340, a calibration button for calibrating the wind speed displayed on the display window 340 to "zero", An increase/decrease button to select by adding or subtracting the display value of the wind speed displayed on the display window 340, a range selection button to select the display range of the wind speed displayed on the display window 340, and the ENTER (ENTER) to input a value selected by the buttons. ) Button.

The anemometer 100 according to an embodiment includes a plurality of ports including a voltage port to which the voltage output from the Pitot tube 210 is input, a positive pressure port to which the positive pressure output from the Pitot tube 210 is input, and a communication port ( 360).

3A-3B are diagrams illustrating a coupling structure of a damper driving member to the anemometer in FIG. 2.

3A and 3B, the anemometer 100 according to an embodiment may connect a damper driving member 190 between the body case 310 and the bracket 330. The damper driving member 190 may include an open path solenoid valve 410 and a closed path solenoid valve 420. The damper driving member 190 may be electrically connected to the anemometer 100 body by connecting a connector to the connector connection groove 320 provided on the bottom of the anemometer 100 body case 310 and provided inside the anemometer 100 body. By driving the exhaust damper 250 through the control unit 130, the wind speed may be adjusted to automatically maintain a normal range.

After connecting the damper driving member 190 to the connector connection groove 320 of the anemometer 100 according to an embodiment, the damper driving member 190 and the anemometer 100 body are accommodated in the inner space of the bracket 330 can do. The bracket 330 may support the bottom surface of the damper driving member 190 through the first support surface 331, and the amount of the damper driving member 190 and the anemometer 100 body through the second support surfaces 332 and 333 While supporting the side, it can be fixedly fastened to the anemometer 100 body case 310 with fastening members such as bolts and screws through the fastening holes 332a and 333a. The bracket 330 may be fixedly coupled to the installation position through the fastening holes 334a and 335a after installing the anemometer 100 to which the damper driving member 190 is connected through the wing surfaces 334 and 335 at a designated position.

4 is an exemplary view showing a coupling form of a damper driving member to the anemometer of FIG. 2.

Referring to FIG. 4, the anemometer 100 according to an exemplary embodiment may manufacture a damper driving member 190 in an exterior form and connect it through a connector. The damper driving member 190 may include an open path solenoid valve 410 and a closed path solenoid valve 420. The damper driving member 190 may include two 2-pin connectors 430 and 440 to operate the open path solenoid valve 410 and the closed path solenoid valve 420. In this case, the anemometer 100 may be configured in a form in which two 2-pin connectors 430 and 440 drawn out from the damper driving member 190 can be connected to the connector connection groove 320 provided on the bottom of the body case 310. . The damper driving member 190 can be electrically connected by inserting two 2-pin connectors 430 and 440 into the connector connection groove 320 provided on the bottom of the body case 310 of the anemometer 100, and the inside of the body of the anemometer 100 When the wind speed is out of the normal range through the control unit 130 provided in, the exhaust damper 250 may be driven to adjust the wind speed to automatically maintain the normal range.

After connecting the two 2-pin connectors 430 and 440 of the damper driving member 190 to the connector connection groove 320 of the anemometer 100 according to an embodiment, the damper driving member 190 and the damper driving member 190 through the bracket 330 It is possible to combine the body of the anemometer 100.

5 is another exemplary view showing a coupling form of a damper driving member to the anemometer of FIG. 2.

Referring to FIG. 5, the anemometer 100 according to an exemplary embodiment may manufacture a damper driving member 190 in an exterior form and connect it through a connector. The damper driving member 190 may include an open path solenoid valve 410 and a closed path solenoid valve 420. The damper driving member 190 may include one 4-pin connector 450 for operating the open path solenoid valve 410 and the closed path solenoid valve 420. In this case, the anemometer 100 may be configured in a form in which one 4-pin connector 450 drawn out from the damper driving member 190 can be connected to the connector connection groove 320 provided on the bottom of the main body case 310. . The damper driving member 190 can be electrically connected by inserting one 4-pin connector 450 into the connector connection groove 320 provided on the bottom of the body case 310 of the anemometer 100, and the inside of the body of the anemometer 100 When the wind speed is out of the normal range through the control unit 130 provided in, the exhaust damper 250 may be driven to adjust the wind speed to automatically maintain the normal range.

After plugging and connecting one 4-pin connector 450 of the damper driving member 190 to the connector connection groove 320 of the anemometer 100 according to an embodiment, the damper driving member 190 and the damper driving member 190 through the bracket 330 It is possible to combine the body of the anemometer 100.

6 is an exemplary diagram for explaining an automatic wind speed maintenance function of an anemometer according to an exemplary embodiment.

Referring to FIG. 6, the exhaust damper 250 is formed in the form of a hollow pipe connected in communication with the exhaust duct 230 of the gas supply device 200 so that the gas exhausted from the gas supply device 200 is discharged from the exhaust duct 230. Transfer to. The exhaust damper 250 may adjust the movement path space of the exhaust gas while the rotating plate 610 rotates in place while the disk-shaped rotating plate 610 is disposed horizontally so as to contact the inner wall of the cylindrical body. The shaft 620 is connected to the lower surface of the rotating plate 610 to move the rotating plate 610 inside the damper body as it rotates in place by driving the actuator 630 disposed outside the damper body. The actuator 630 is driven by the air pressure provided through the open path air valve 641 and the closed path air valve 642 so that the damper 250 rotates integrally with the shaft 620 and the rotating plate 610. Implement the "open" and "close" patterns. Here, the open path solenoid valve 410 constituting the damper driving member 190 is switched in response to the "open" pattern of the damper 250 when the current wind speed is less than the lower limit of the normal range, Is transferred to the open path air valve 641 and when the current wind speed exceeds the upper limit of the normal range, the air is switched in response to the "close" pattern of the damper 250 and returns air from the open path air valve 641 again. It is discharged to the outside and the wind speed is adjusted to maintain the normal range.

The closed path solenoid valve 420 constituting the damper driving member 190 is switched in response to the "close" pattern of the damper 250 when the current wind speed exceeds the upper limit of the normal range, thereby absorbing air due to external air pressure. When it is transferred to the closed path air valve 642 and the current wind speed is less than the lower limit of the normal range, it is switched in response to the "open" pattern of the damper 250 to discharge the air returning from the closed path air valve 642 to the outside. To maintain the normal range.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art will variously modify and change the present invention within the scope not departing from the spirit and scope of the present invention described in the following claims. You will understand that you can do it.

100: Anemometer with automatic wind speed maintenance function
100A: main body
110: wind speed sensor 130: control unit
150: display unit 170: communication unit
190: damper driving member
200: gas supply device 210: Pitot tube
230: exhaust duct 250: damper
310: main body case 320: connector connecting groove
330: bracket 340: display window
350: multiple buttons 360: multiple ports
410: open path solenoid valve 420: closed path solenoid valve
430,440: 2-pin connector 450: 4-pin connector

Claims (8)

A main body for calculating a wind speed in the gas supply device based on a voltage and a static pressure in the gas supply device output from a Pitot tube installed in the upper center of the gas supply device for semiconductor device manufacturing; And
An external damper driving member that is connected to the main body and automatically maintains the wind speed in a normal range by driving a damper connected to an exhaust duct that discharges exhaust gas from the gas supply device when the wind speed calculated by the main body is abnormal. Include,
The main body
case;
A connector connection groove formed on the bottom surface of the case and electrically connected to the damper driving member through a connector; And
When the damper driving member is not connected to the connector connection groove, it covers and covers the connector connection groove, and includes a bracket for fixing the main body case to a designated installation position,
The damper driving member
An anemometer having an automatic wind speed maintenance function connected between the main body case and the bracket and configured to include an open path solenoid valve and a closed path solenoid valve of the damper.
delete The method of claim 1, wherein the bracket
A first support surface supporting the bottom surface of the body case and a second support surface vertically bent from both sides of the first support surface to support both side surfaces of the body case to form an accommodation space of the body case therein, An anemometer having an automatic wind speed maintenance function, characterized in that it has a wing surface that is vertically bent toward the outside at an end of the second support surface.
The method of claim 3, wherein the bracket
A fastening hole is formed on the second support surface and the wing surface, respectively, and a fastening member is passed through the fastening hole formed on the second support surface to be fixedly coupled to the body case accommodated in the space, and a fastening hole formed on the wing surface An anemometer having an automatic wind speed maintenance function, characterized in that the fastening member is passed through and fixedly fastened to the designated installation position.
delete The method of claim 1, wherein the damper driving member
An anemometer having an automatic wind speed maintenance function, characterized in that the open path solenoid valve and the closed path solenoid valve are electrically connected to the body by having two 2-pin connectors or a 4-pin connector inserted into the connector connection groove .
The method of claim 1, wherein the body
Including a display window for displaying wind speed on the front of the case and a plurality of buttons, and including a plurality of ports on the rear of the case,
The plurality of buttons are a menu button for selecting a menu displayed on the display window, a calibration button for calibrating the wind speed displayed on the display window to "zero", and adding or subtracting the display value of the wind speed displayed on the display window. An increase/decrease button, a range selection button for selecting a display range of the wind speed displayed on the display window, and an enter button for inputting a value selected by the buttons,
The plurality of ports are an anemometer having an automatic wind speed maintenance function, characterized in that including a voltage port to which a voltage output from the Pitot tube is input, a positive pressure port to which a static pressure output from the Pitot tube is input, and a communication port.
The method of claim 1, wherein the body
A wind speed sensor that senses a voltage and a static pressure in the gas supply device output from the Pitot tube installed in the upper center of the gas supply device for semiconductor device manufacturing;
A control unit that calculates the wind speed in the gas supply device based on the voltage and the static pressure in the gas supply device sensed by the wind speed sensor, checks whether the wind speed is out of the normal range, and generates an alarm in case of abnormality out of the normal range ;
A display unit that displays the wind speed calculated by the control unit; And
An anemometer having an automatic wind speed maintenance function comprising a communication unit for transmitting the wind speed and alarm signals calculated by the control unit to a remote gas supply device management system.

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