KR102218053B1 - High pressure gas carbon dioxide production apparatus - Google Patents

Abstract

The present invention is a low pressure tank unit for storing liquid carbon dioxide at a first pressure; A liquid pump unit for pressurizing the liquid carbon dioxide in the low pressure tank unit and supplying it to a second pressure higher than the first pressure; And a high pressure tank unit for storing liquid carbon dioxide supplied from the liquid pump unit at a third pressure between the first pressure and the second pressure. It is intended to provide an apparatus for producing high-pressure gaseous carbon dioxide, including.

Description

High pressure gas carbon dioxide production equipment {HIGH PRESSURE GAS CARBON DIOXIDE PRODUCTION APPARATUS}

The present invention relates to an apparatus and method for producing high pressure GCO2 for use in semiconductor cleaning.

The gaseous carbon dioxide is stored in the liquid carbon dioxide storage tank and vaporized when necessary.

At this time, the storage tank in which the liquid carbon dioxide is stored is affected by outside air, and accordingly, a phase change occurs in the interior, making it difficult to maintain the liquid carbon dioxide state. When a phase change occurs, when the liquid vaporizes and the volume expands and the pressure in the storage tank rises, the pressure reducing valve installed in the storage tank opens and the gas inside the storage tank is released to the atmosphere, resulting in loss of liquid. There is a problem that occurs.

In addition, the storage tank uses a level transmitter to measure the level of the stored liquid carbon dioxide.If a phase change of carbon dioxide occurs in the pipe connecting the storage tank and the level transmitter, the differential pressure is not measured constantly. As a result, it becomes impossible to measure the water level. As a result, it is impossible to know when to charge the carbon dioxide in the storage tank, so that the carbon dioxide cannot be stably supplied into the storage tank.

Accordingly, there is a need for a device capable of minimizing the phase change of liquid carbon dioxide in the storage tank and stably measuring the level of the liquid carbon dioxide storage amount inside the storage tank.

An object of the present invention is to provide a storage tank capable of minimizing a phase change in a storage tank storing liquid carbon dioxide having a high pressure of 55 bar or more and stably measuring the level of the liquid carbon dioxide storage amount therein.

Another object of the present invention is to provide an apparatus and method for producing high-pressure gaseous carbon dioxide to provide high-pressure gaseous carbon dioxide by vaporizing liquid carbon dioxide stored in the storage tank.

In order to achieve the above object, according to an aspect of the present invention, a low pressure tank unit for storing liquid carbon dioxide at a first pressure; A liquid pump unit for pressurizing the liquid carbon dioxide in the low pressure tank unit and supplying it to a second pressure higher than the first pressure; And a high pressure tank unit for storing liquid carbon dioxide supplied from the liquid pump unit at a third pressure between the first pressure and the second pressure. Including, the low pressure tank unit and the liquid pump unit are fluidly movably connected by a first pipe, the liquid pump unit and the high pressure tank unit are fluidly movably connected by a second pipe, and the liquid pump unit, Including 1 to 4 liquid pumps, wherein the first to fourth liquid pumps connect the first and second pipes to be fluidly moved by first to fourth pump pipes provided between the first pipe and the second pipe. In this case, high-pressure gas including cooling pipes each disposed adjacent to each pipe along each pipe to prevent vaporization of liquid carbon dioxide in the first pipe, the second pipe and the first to fourth pump pipes It provides a carbon dioxide production device.

In addition, a vaporization unit provided to produce gaseous carbon dioxide of a fourth pressure by vaporizing the liquid carbon dioxide transferred from the high-pressure tank unit; Includes.

In addition, when the liquid carbon dioxide flows through the first pipe from the low pressure tank unit to the liquid pump unit, it includes a cooling unit provided to prevent vaporization of the liquid carbon dioxide in the first pipe.

In addition, the cooling unit may include a cooler that is fluidly connected to the first pipe, and exchanges heat with the cooled brine by introducing liquid carbon dioxide flowing along the first pipe; A brine supply unit for supplying brine cooled by a cooler; A brine tank provided to supply brine to the brine supply unit; And a refrigerator provided to cool the brine by supplying the cooled refrigerant to the brine supply unit to exchange heat with the brine. Includes.

In addition, the brine supply unit includes a first distribution header provided to supply the cooled brine to the cooler and each cooling pipe, and each of the cooling pipes is fluidly connected to the brine supply unit through the first distribution header so that the brine The brine supplied from the supply unit exchanges heat with each pipe, and the brine tank includes a second distribution header provided so that the brine flowing along each pipe is recovered to the brine tank.

In addition, the high-pressure tank unit includes a first cooling coil provided on an upper side of the inner tank and a second cooling coil provided on a lower side of the inner tank, and the first and second cooling coils are respectively connected to the brine supply unit to be fluidly movable. And liquid carbon dioxide stored in the inner tank is provided to exchange heat by the brine supplied from the brine supply unit.

According to the present invention, there is an effect of minimizing a phase change in a storage tank in which liquid carbon dioxide having a high pressure of 55 bar or higher is stored, and stably measuring the level of the liquid carbon dioxide storage amount inside.

1 and 2 are schematic diagrams of a high-pressure gaseous carbon dioxide production apparatus according to an embodiment of the present invention.
3 is a schematic diagram showing a cooling unit according to an embodiment of the present invention.
4 is a schematic diagram showing a high-pressure tank according to an embodiment of the present invention.
5 and 6 are schematic diagrams illustrating a cooling pipe according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as being limited to their usual or dictionary meanings, and the inventors appropriately explain the concept of terms in order to explain their own invention in the best way. Based on the principle that it can be defined, it should be interpreted as a meaning and concept consistent with the technical idea of the present invention.

In addition, regardless of the reference numerals, the same or corresponding components are given the same or similar reference numbers, and duplicate descriptions thereof will be omitted, and the size and shape of each component member shown for convenience of explanation are exaggerated or reduced. Can be.

Accordingly, the embodiments described in the present specification and the configurations shown in the drawings are only the most preferred embodiment of the present invention, and do not represent all the technical spirit of the present invention, and thus various alternatives that can be substituted for them at the time of application It should be understood that there may be equivalents and variations.

The present invention relates to an apparatus and method for producing high-pressure GCO ₂ , for example, to an apparatus and method for producing high-pressure GCO ₂ used in semiconductor cleaning.

First, in the present specification, "pipe" means a transport pipe through which gas or the like can be transported.

1 and 2 are schematic diagrams of a high-pressure gaseous carbon dioxide production apparatus according to an embodiment of the present invention, FIG. 3 is a schematic diagram showing a cooling unit according to an embodiment of the present invention, and FIG. 4 is A schematic diagram showing a high-pressure tank, FIGS. 5 and 6 are schematic diagrams illustrating a cooling pipe according to an embodiment of the present invention.

Hereinafter, an apparatus 10 for producing high-pressure gaseous carbon dioxide according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6.

1 and 2, the high-pressure gaseous carbon dioxide production apparatus 10 of the present invention includes a low-pressure tank unit 100, a liquid pump unit 200, a high-pressure tank unit 300, and a vaporization unit 400. Include.

Specifically, the low pressure tank unit 100 may be provided to store liquid carbon dioxide at a first pressure.

In addition, the liquid carbon dioxide stored in the low pressure tank unit 100 may be in a relatively low pressure state.

Here, the first pressure may be 10 to 25 bar or 12 to 22 bar or 14 to 20 bar or 16 to 18 bar, and preferably 14 to 20 bar.

In addition, the liquid carbon dioxide stored in the low pressure tank unit 100 may be liquid carbon dioxide supplied by transporting from a supplier to a vehicle or the like.

The low pressure tank unit 100 includes a first low pressure tank 101 and a second low pressure tank 102.

Each of the low pressure tank units 101 and 102 is connected to a pressure vaporizer (not shown) for maintaining the internal pressure, so that a predetermined pressure can be maintained by the pressure vaporizer.

In addition, the first and second low pressure tanks 101 and 102 may be operated alternately or simultaneously.

In addition, the liquid pump unit 200 may be provided to pressurize the liquid carbon dioxide in the low pressure tank unit 100 and supply it to a second pressure higher than the first pressure.

Specifically, the liquid pump unit 200 may be connected to be fluidly movable by the low pressure tank unit 100 and the first pipe L1.

In addition, the liquid pump unit 200 may include first to fourth liquid pumps 201, 202, 203, and 204, and the first to fourth liquid pumps 201 to 204 include first and second low pressure tanks 101, 102) and the first pipe (L1) to be fluidly movable, the first low pressure tank 101 or the second low pressure tank 102 or the first and second low pressure tanks 101 and 102 The liquid carbon dioxide may be sucked in through the pipe L1 and pressurized to supply the liquid carbon dioxide at a second pressure higher than the first pressure.

Here, the second pressure may be 55 to 65 bar or 58 to 62 bar, or preferably 59 to 60 bar.

That is, liquid carbon dioxide having a relatively low pressure may be boosted to become liquid carbon dioxide having a relatively high pressure through the liquid pump unit 200.

In addition, the liquid pump unit 200 sucks the liquid carbon dioxide stored in the low pressure tank unit 100 by the first to fourth liquid pumps 201 to 204, respectively, so that the boosted liquid carbon dioxide can be supplied. It includes first to fourth pump pipes (P1, P2, P3, P4) connected to L1), respectively.

The first to fourth pump pipes P1 to P4 are fluidly connected to a second pipe L2 to be described later, so that the boosted liquid carbon dioxide discharged from the first to fourth pumps is supplied to the second pipe L2. It can be supplied to the high pressure tank unit 300 through.

That is, the first to fourth pump pipes P1 to P4 connect the first pipe L1 and the second pipe L2 to enable fluid movement.

The first to fourth liquid pumps 201 to 204 may be operated simultaneously or at least one pump selected as needed may be operated.

For example, when a third liquid pump needs to be repaired, only the first, second, and fourth liquid pumps may be driven and operated. Accordingly, even if a problem occurs in any one of the liquid pumps, the operation of the production apparatus 10 of the present invention can be continued through the remaining liquid pumps.

Meanwhile, between the low pressure tank unit 100 and the liquid pump unit 200, a cooling unit 110 provided to prevent vaporization of liquid carbon dioxide in the first pipe L1 is included.

Specifically, referring to FIG. 3, when the liquid carbon dioxide flows from the low pressure tank unit 100 to the liquid pump unit 200 through the first pipe L1, the first pipe ( It is possible to prevent liquid carbon dioxide from vaporizing in L1).

That is, when liquid carbon dioxide is sucked from the first and second low pressure tanks 101 and 102 to the first to fourth liquid pumps 201 to 204, the liquid carbon dioxide is applied to the temperature difference between the outside air in the first pipe L1. To prevent vaporization during flow.

Specifically, the cooling unit 110 is fluidly connected to the first pipe (L1), and liquid carbon dioxide flowing along the first pipe (L1) is introduced to exchange heat with the cooled brine. It includes a cooler 111.

The cooler 111 is a first cooler pipe (C1) that is fluidly connected to at least a portion of the first pipe (L1) so that liquid carbon dioxide transferred through the first pipe (L1) flows into the cooler (111). And a second cooler pipe that is fluidly connected to at least a portion of the first pipe (L1) so that the liquid carbon dioxide introduced into the cooler 111 exchanges heat with brine in the cooler and then flows into the first pipe (L1). (C2) is included.

In addition, the cooling unit 110, the brine supply unit 112 for supplying the brine cooled by the cooler 111, the brine tank 113 provided to supply the brine to the brine supply unit 112, and the cooled refrigerant to brine It includes a refrigerator 114 provided to cool the brine by supplying it to the supply unit 112 and exchanging heat with brine.

The brine tank 113 includes a pump 115 provided to supply brine to the brine supply unit 112.

In addition, the refrigerator 114 cools the refrigerant and supplies the cooled refrigerant to the brine supply unit 112, the supplied refrigerant heat exchanges with brine to cool the brine, and the refrigerant whose temperature is relatively increased is a refrigerator ( It includes a refrigerant pipe (R) provided to be transferred back to 114).

That is, the refrigerant after heat exchange may be cooled in the refrigerator 114 and supplied to the brine supply unit 112 again.

For example, the refrigerator may heat exchange with brine by supplying a refrigerant of approximately -37 degrees (℃) to -40 degrees (℃) to the brine supply unit. In addition, after heat exchange with brine, the temperature is relatively increased, so that the refrigerant of approximately -25 degrees (℃) to -30 degrees (℃) can be transported back to the refrigerator for cooling.

The cooler 111 includes a first brine pipe B1 fluidly movably connected to the cooler 111 to exchange heat for liquid carbon dioxide conversion and to resupply brine having a relatively increased temperature to the brine tank 113.

In addition, the brine tank 113 may be connected to be fluidly movable by the brine supply unit 112 and the second brine pipe B2, and relatively through the second brine pipe B2 by the pump 115 The brine whose temperature has risen may be supplied to the brine supply unit 112.

In addition, the brine supply unit 112 and the cooler 111 may be fluidly connected to each other by a third brine pipe B3, and the brine cooled by the brine supply unit 112 may be supplied to the cooler 111.

Therefore, the brine can be reused by circulating along the first to third brine pipes B1 to B3.

Here, the brine is an intermediate material that has an indirect freezing action, and may mean a mixture of 40 to 70 Vol% ethylene glycol and 60 to 30 Vol% of water, and the brine does not change state in the cooler, Refrigeration can be achieved by absorption and transmission.

As an example, the brine may be a mixture of 40 vol% of ethylene glycol and 60 vol% of water, or a mixture of 70 vol% of ethylene glycol and 30 vol% of water.

In addition, as described above, the liquid carbon dioxide heat-exchanged with brine of about -40 degrees (℃) in the cooler 111 may be lowered in temperature by about -3 degrees (℃) by the brine, and -25 to -27 degrees It can flow to the first pipe in the state of (℃).

As described above, before the liquid carbon dioxide is transferred from the low pressure tank unit 100 to the liquid pump unit 200, heat exchange with the brine that has been introduced into the cooler 111 and cooled, and then returned to the first pipe L1. Since the liquid carbon dioxide transferred through the inflow process is in a supercooled state before being transferred to the liquid pump unit 200, there is an effect of preventing cavitation in the liquid pump unit 200.

If the process as described above is not performed, since the first pipe L1 is exposed to the outside air, liquid carbon dioxide is vaporized in the pipe during the transfer from the first pipe to the liquid pump unit 200 and is converted into gaseous carbon dioxide. A change may occur, and accordingly, a cavitation may be generated in the pump by gaseous carbon dioxide sucked into the liquid pump unit 200, thereby providing a cause of a pump failure.

In addition, the high-pressure tank unit 300 may be provided to store liquid carbon dioxide supplied from the liquid pump unit 200 at a third pressure between the first pressure and the second pressure.

Specifically, the high pressure tank unit 300 may be connected to be fluidly movable by the liquid pump unit 200 and the second pipe L2.

In addition, the high pressure tank unit 300 may include a first high pressure tank 301 and a second high pressure tank 302.

That is, the first to fourth liquid pumps 201 to 204 may be fluidly connected to the first high pressure tank 301 and the second high pressure tank 302 through the second pipe.

In addition, referring to Figure 4, the high pressure tank unit 300 includes a double housing for blocking heat intrusion,

That is, each of the first and second high-pressure tanks 301 and 302 includes a double housing for blocking heat intrusion.

The double housing 310 includes an inner tub 311 and an outer tub 312 that surrounds the inner tub 311 and is formed at a predetermined distance from the inner tub 311, respectively, to measure the level of liquid carbon dioxide stored in the inner tub 311 It includes first and second level measurement units 340 and 350 provided.

The first level measuring unit 340 includes a first pressure measuring tube 341 connected to the inner tub 311 and the outer tub 312 so that at least a portion of the upper end thereof is exposed to the outside air and is connected to fluid movement. .

In addition, it includes a second pressure measuring tube 342 connected to each of the lower ends of the inner tub 311 and the outer tub 312 to expose at least a portion of the outside air and fluidly movable.

In addition, it includes a first water level measuring device 345 provided between the first pressure measuring pipe 341 and the second pressure measuring pipe 342 to measure the level of the liquid carbon dioxide in the inner tank 311.

The first water level measuring device 345 includes gaseous carbon dioxide (GCO ₂ ) discharged from the upper end of the inner tank 311 through the first pressure measuring tube 341 and a second pressure measuring tube 342 at the lower end of the inner tank 311. The water level can be measured by measuring the pressure difference of gaseous carbon dioxide that flows through and vaporizes.

That is, since the second pressure measuring tube 342 is exposed to outside air, the liquid carbon dioxide (LCO ₂ ) discharged from the lower end of the inner tank 311 flows through the second pressure measuring tube 342 and is Changes occur and become gaseous carbon dioxide.

Accordingly, the first water level meter 345 can measure the water level by measuring a pressure difference (differential pressure) between the gaseous carbon dioxide discharged from the upper part and the gaseous carbon dioxide phase-changed at the lower part.

The water level measurement in the first and second high-pressure tanks 301 and 302 is measured by using the pressure difference between the upper and lower portions of the tank, and gaseous carbon dioxide is present in the upper side of the tank and the liquid state is in the lower side of the tank. As carbon dioxide exists, the liquid head pressure acts on the lower side of the tank, so that the pressure on the lower side of the tank becomes higher than the pressure on the upper side. Therefore, it is possible to measure the water level by using the pressure difference between the upper side and the lower side.

Here, the first water level meter 345 may be a level transmitter that measures a water level using a pressure difference.

In addition, the first pressure measuring tube 341 may be provided to be connected to the outside from the upper end side of the outer tub 345.

Conventionally, a pressure measuring tube for measuring the pressure on the upper side of the tank is exposed from the lower side of the outer tank to the outside by arranging a pipe in a predetermined space between the inner tank and the outer tank at the upper side of the inner tank. There is a problem that the pressure difference (differential pressure) is not constantly measured because the gaseous carbon dioxide is re-liquefied as it moves downward. Accordingly, there is a problem that it becomes difficult to measure the water level in the inner tank.

Accordingly, according to the present invention, the first pressure measuring tube 341 is formed to be exposed to the outside air from the upper end of the outer tub to prevent re-liquefaction of gaseous carbon dioxide, so that the pressure difference can be more stably measured.

In addition, the second level measuring unit 350, the third pressure measuring tube 351, the inner tub 311, and the outer tub 312 connected to the fluid movement through the upper ends of the inner tub 311 and the outer tub 312, respectively. ) And a fourth pressure measuring tube 352 connected to each of the lower ends of the fluid to be movable.

In addition, it includes a second water level measuring device 355 provided between the third pressure measuring pipe 351 and the fourth pressure measuring pipe 352 to measure the level of the liquid carbon dioxide in the inner tank 311.

In addition, to connect the first pressure transmission pipe 353 and the fourth pressure measuring pipe 354 and the second water level measuring instrument 355 provided to connect the third pressure measuring pipe 351 and the second water level measuring instrument 355 It includes a second pressure transmission pipe 354 provided.

In addition, the third and fourth pressure measuring tubes 351 and 352 are provided so as not to be exposed to outside air, and the first and second diaphragms 356 and 357 may be disposed adjacent to the outer tub, respectively.

Here, the third and fourth pressure measuring tubes 351 and 352 of the second level measuring unit measure the level of liquid carbon dioxide stored in the high-pressure tank unit between the inner tank 311 and the outer tank 312 without being exposed to outside air. It can be arranged to measure.

Specifically, the first pressure transfer tube 353 transfers the pressure of the gaseous carbon dioxide discharged from the predetermined first fluid F1 and the third pressure measuring tube 351 injected into the first fluid F1 The pressure of the liquid carbon dioxide discharged from the predetermined second fluid F2 and the fourth pressure measuring tube 352 is included in the first diaphragm 356 provided to be configured, and the second pressure transfer tube 354 It includes a second diaphragm 357 provided to deliver the second fluid (F2).

That is, the third pressure measuring tube 351 connected at the upper end of the inner tank 311 and the outer tank 312 is connected to the first pressure transfer tube 353 via the first diaphragm 356, and the inner tank 311 ) And the fourth pressure measuring pipe 352 connected at the lower end of the outer tub 312 may be connected to the second pressure transfer pipe 354 via the second diaphragm 357.

At this time, the third pressure measuring pipe 351 and the fourth pressure measuring pipe 352 are disposed between the inner tub 311 and the outer tub 312 and are not exposed to the outside, respectively, the pressure of each discharged fluid Can be delivered to the first and second diaphragms 356 and 357, respectively.

In this state, the second water level meter 355 may measure a water level by measuring a pressure difference (differential pressure) between the first fluid F1 and the second fluid F2.

Here, the first fluid and the second fluid may be the same fluid, for example, silicone oil, but are not limited thereto.

As described above, the third pressure measuring pipe 351 and the fourth pressure measuring pipe 352 are disposed between the inner tub 311 and the outer tub 312 and are not exposed to the outside. The pressure is transmitted to the first and second diaphragms (356, 357), respectively, and the transmitted pressure is transferred to the first and second fluids accommodated in the first and second pressure transmission pipes (353, 354), By measuring the differential pressure of the fluid, gaseous carbon dioxide and liquid carbon dioxide are not affected by outside air, and the differential pressure can be more stably measured.

As described above, the first and second diaphragms 356 and 357 are disposed adjacent to the outer tub, respectively, to shield the third and fourth pressure measuring tubes so that gaseous carbon dioxide and liquid carbon dioxide are not exposed to the outside air, and at the same time control the first pressure. And it serves to deliver to the second fluid. That is, the first and second fluids refer to pressure transmission materials, and may be silicone oils that are not affected by outside air.

In particular, the first fluid is composed of oil that is not affected by the outside air, so even if the first and second pressure transfer pipes are exposed to the outside, the differential pressure is measured without being affected by the outside air to measure the water level stably and accurately. can do.

In addition, the first and second fluids in the first and second pressure transmission pipes may be previously filled in each pipe and then installed in the high-pressure tank unit.

Here, the second water level meter may be a level transmitter that measures the water level using a pressure difference.

In addition, the high-pressure tank unit 300 includes a first cooling coil 361 provided on the upper side of the inner tank 311 and a second cooling coil 362 provided on the lower side of the inner tank 311.

The first and second cooling coils 361 and 362 may be installed in at least a partial area along the inner circumferential surface of the inner tank 311 using fastening means such as a flange.

Each of the first and second cooling coils 361 and 362 is fluidly connected to the brine supply unit 112 so that the liquid carbon dioxide stored in the inner tank may be provided to exchange heat with the brine supplied from the brine supply unit 112.

The first and second cooling coils 361 and 362 installed as described above enable the internal temperature of the high-pressure tank unit to be kept constant, thereby preventing a phase change of liquid carbon dioxide.

In addition, the first and second high-pressure tanks 301 and 302 are each connected to a pressurized vaporizer (not shown) for maintaining the internal pressure, and thus may be provided to maintain a predetermined pressure by the pressurized vaporizer.

In addition, the first and second high pressure tanks 301 and 302 may be operated alternately or simultaneously.

Here, the third pressure may be 54 to 65 bar, 54 to 60 bar, or 56 to 58 bar.

On the other hand, the liquid pump unit 200 and the high pressure tank unit 300 of the high-pressure gaseous carbon dioxide production apparatus 10 of the present invention are connected to be fluidly movable by a second pipe L2, and the liquid pump unit 200 Silver includes first to fourth liquid pumps 201 to 204, and the first to fourth liquid pumps 201 to 204 are provided between the first pipe L1 and the second pipe L2. To 4th pump pipes (P1 to P4) when the first and second pipes are fluidly connected, the first pipe (L1), the second pipe (L2), and the first to fourth pump pipes (P1 to P4) In order to prevent vaporization of liquid carbon dioxide within P4), it includes cooling pipes CL disposed adjacent to each pipe along each pipe.

A plurality of cooling pipes CL may be provided and may be respectively installed adjacent to each pipe.

Specifically, referring to FIG. 5, the brine supply unit 112 includes a first distribution header 116 provided to supply cooled brine to the cooler 111 and each cooling pipe, respectively, and each cooling pipe The silver is fluidly connected to the brine supply unit 112 through the first distribution header 116 to exchange heat with each pipe by the brine supplied from the brine supply unit 112, respectively, and the brine tank 113, It includes a second distribution header 117 provided so that the brine flowing along each pipe is recovered to the brine tank.

The first distribution header 116 is a third brine pipe (B3) connecting the brine supply unit 112 and the cooler 111, and a first cooling pipe provided to cool at least a part of the first pipe on the side of the low pressure tank unit. (C1), a second cooling pipe (C2) provided to cool at least a portion of the first pipe on the side of the liquid pump unit, and a plurality of third cooling pipes provided to cool the first to fourth pump pipes (P1 to P4), respectively (C3), and a fourth cooling pipe (C4) provided to cool the second pipe.

Each of the cooling pipes is fluidly connected to the second distribution header 117, and the second distribution header 117 is fluidly connected to the brine tank 113 to flow each cooling pipe. The brine can be recycled for reuse.

The brine transferred from the brine tank 113 to the brine supply unit 112 is cooled by the refrigerant supplied from the cooler 114 and transferred to the first distribution header 116.

At this time, the third brine pipe (B3) in the first distribution header 116 and the cooler 111 are connected to be fluidly movable, so that some of the brine introduced into the first distribution header 116 is the cooler 111 Flows into.

At the same time, the first cooling pipe (C1) in the first distribution header 116 is disposed adjacent to at least a part of the first pipe on the side of the low pressure tank unit, and heat exchanges with the brine flowing through the first cooling pipe. After preventing the liquid carbon dioxide from vaporizing in the pipe, the brine may flow to the second distribution header 117 and be transferred to the brine tank 113.

In addition, the second cooling pipe C2 in the first distribution header 116 is disposed adjacent to at least a part of the first pipe on the side of the liquid pump unit to exchange heat with brine flowing through the second cooling pipe C2. After preventing the liquid carbon dioxide from vaporizing in the first pipe, the brine may flow to the second distribution header 117 and be transferred to the brine tank 113.

In addition, the plurality of third cooling pipes C3 in the first distribution header 116 are disposed adjacent to each of the first to fourth pump pipes P1 to P4, respectively, through the third cooling pipe C3. After heat exchange with flowing brine prevents liquid carbon dioxide from evaporating in the first to fourth pump pipes, the brine may flow to the second distribution header 117 and be transferred to the brine tank 113.

In addition, the fourth cooling pipe C4 in the first distribution header 116 is disposed adjacent to the second pipe of the high-pressure tank unit and exchanges heat with the brine flowing through the fourth cooling pipe C4. After preventing the liquid carbon dioxide from being vaporized in the pipe L2, the brine may flow to the second distribution header 117 and be transferred to the brine tank 113.

Each of the cooling pipes (CL; C1, C2, C3, C4) is disposed adjacent to the first pipe (L1), the second pipe (L2), and the first to fourth pump pipes (P1 to P4). In addition, cooling pipes may be disposed adjacent to both sides of each pipe with each pipe interposed therebetween.

In this case, the cooling pipe may be disposed adjacent to both sides of the first pipe (L1), the second pipe (L2), and the first to fourth pump pipes (P1 to P4) by extending one pipe. And two cooling pipes (first and second cooling lines) are arranged adjacent to both sides of the first pipe (L1), the second pipe (L2), and the first to fourth pump pipes (P1 to P4). It can be prepared to be.

In the process of transferring the liquid carbon dioxide in the low-pressure tank into the high-pressure tank through the cooling as described above, it is possible to effectively prevent the liquid carbon dioxide from evaporating in each pipe, and accordingly, the high-pressure liquid carbon dioxide is vaporized in the vaporization unit 400. Can be transferred to.

In addition, by the above configuration, it is possible to maintain a constant temperature of approximately -11 degrees (℃) in the high-pressure tank unit.

In addition, the vaporization unit 400 may be provided to vaporize liquid carbon dioxide transferred from the high-pressure tank unit 300 to produce gaseous carbon dioxide having a fourth pressure.

The vaporization unit 400 includes a first vaporizer 401 and a second vaporizer 402.

The first vaporizer 401 and the second vaporizer 402 each include a water tank (not shown) in which water is accommodated and an electric heater (not shown) for heating water in the water tank.

Each of the vaporizers may be, for example, a hot water bath electric heater type, and liquid carbon dioxide introduced into each vaporizer may be vaporized by heating water in a water tank using an electric heater.

The first and second vaporizers 401 and 402 evaporate the high-pressure liquid carbon dioxide transferred from the high-pressure tank unit 300 through the third pipe L3 by raising the temperature to 35 to 40 degrees Celsius. It can be supplied to the user via valves and filters.

Here, the fourth pressure may be 53 to 59 bar or 55 to 56 bar.

As described above, the high-pressure gaseous carbon dioxide production apparatus 10 of the present invention may produce gaseous carbon dioxide of 28 to 40 degrees Celsius (°C) of 50 bar or more, and may be used, for example, for semiconductor cleaning.

10: High pressure gaseous carbon dioxide production device
100: low pressure tank unit
200: liquid pump unit
300: high pressure tank unit
400: vaporization unit

Claims (6)

A low pressure tank unit for storing liquid carbon dioxide at a first pressure;
A liquid pump unit for pressurizing the liquid carbon dioxide in the low pressure tank unit and supplying it to a second pressure higher than the first pressure; And
A high-pressure tank unit for storing liquid carbon dioxide supplied from the liquid pump unit at a third pressure between the first pressure and the second pressure; Including,
The low pressure tank unit and the liquid pump unit are connected to enable fluid movement through a first pipe,
The liquid pump unit and the high pressure tank unit are connected to enable fluid movement through a second pipe,
The liquid pump unit includes first to fourth liquid pumps,
When the first to fourth liquid pumps connect the first and second pipes to be fluidly movable by the first to fourth pump pipes provided between the first pipe and the second pipe,
In order to prevent vaporization of liquid carbon dioxide in the first pipe, the second pipe, and the first to fourth pump pipes, it includes a cooling pipe disposed adjacent to each pipe along each pipe,
When the liquid carbon dioxide flows through the first pipe from the low pressure tank unit to the liquid pump unit, it includes a cooling unit provided to prevent vaporization of the liquid carbon dioxide in the first pipe,
The cooling unit is a cooler that is fluidly connected to the first pipe, and liquid carbon dioxide flowing along the first pipe is introduced to exchange heat with the cooled brine, and a brine supply unit and brine supplying brine cooled by the cooler It includes a brine tank provided to supply brine to the supply,
The brine supply unit includes a first distribution header provided to supply the cooled brine to the cooler and each cooling pipe, and the brine tank includes a second distribution header provided to recover the brine flowing along each pipe to the brine tank. Includes,
Each cooling pipe is fluidly connected to the brine supply unit through a first distribution header and exchanges heat with each pipe by the brine supplied from the brine supply unit. The method of claim 1,
A vaporization unit provided to produce gaseous carbon dioxide of a fourth pressure by vaporizing the liquid carbon dioxide transferred from the high-pressure tank unit; Containing, high pressure gaseous carbon dioxide production device. delete The method of claim 1,
The cooling unit further includes a refrigerator provided to cool the brine by supplying the cooled refrigerant to the brine supply unit and exchanging heat with the brine. delete The method of claim 1,
The high pressure tank unit includes a first cooling coil provided on an upper side of the inner tank and a second cooling coil provided on a lower side of the inner tank,
The first and second cooling coils are each fluidly connected to the brine supply unit, so that the liquid carbon dioxide stored in the inner tank is provided to exchange heat by the brine supplied from the brine supply unit.

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