KR102194573B1 - Vacuum chuck and processing system having the same - Google Patents

Abstract

The present invention relates to a vacuum chuck, and more particularly, to a vacuum chuck module for fixing a process object using vacuum pressure, and a process system having the same.
In the present invention, a plurality of first grid groove lines 110 formed parallel to each other in a first direction (X) on an upper surface of the main body 100, and at least one second direction (Y) intersecting the first direction (X) ), a plurality of grid protrusions 130 are formed by one or more second grid groove lines 120, and are coupled to a pneumatic transmission assembly 501 that is connected to the vacuum pressure forming unit 800 to transmit the vacuum pressure. At least one coupling hole 141 is formed inward from the side of the body 100, and the vacuum pressure forming hole 142 is formed to be connected to the coupling hole 141 on the upper surface of the body 100, and is to be fixed. The main O-ring 190 including the one or more vacuum pressure forming holes 142 forming a closed curve having a planar shape smaller than the plane size of the object to be processed (2) is provided with the first grid groove line 110 and the first 2 Disclosed is a vacuum chuck module, characterized in that it is inserted into the grid groove line 120 to directly or indirectly fix the object to be processed 2 by vacuum pressure.

Description

Vacuum chuck and processing system having the same {Vacuum chuck and processing system having the same}

The present invention relates to a vacuum chuck, and more particularly, to a vacuum chuck module for fixing a process object using vacuum pressure, and a process system having the same.

A vacuum chuck is a device that directly or indirectly fixes an object to be processed using vacuum pressure, and is used in a process system such as being used to fix an object to be processed during machining.

Meanwhile, in the case of machining, drilling and milling are performed on various materials such as metal materials such as aluminum, aluminum alloy, and steel, and synthetic resin materials such as resin. A vacuum chuck is used due to the limit of reliability for fixing the object to be processed, but there are many limitations.

In order to solve this problem, as a prior art of a vacuum chuck module, as in Patent Document 1, a method for improving the adsorption force for a fixed object to be processed has been provided.

However, in the case of the structure suggested in Patent Document 1, preparation of the vacuum chuck module is cumbersome as the ends of the O-ring inserted into the grid groove are joined by bonding, and the bond applied to the O-ring is applied to the grid groove of the vacuum chuck together, causing the O-ring to vacuum. There is a problem that maintenance is inconvenient because it is fixed to the chuck.

(Patent Document 1) KR20-0412828 Y1

(Patent Document 2) KR10-1472503 B

(Patent Document 3) KR10-1472503 B

(Patent Document 4) KR10-0629994 B

In order to solve the above problems, it is an object of the present invention to form an O-ring connecting protrusion in which both ends of the O-ring are interviewed and inserted in the formation of a grid groove formed on the upper surface, thereby facilitating the preparation work of the vacuum chuck module, It is to provide a vacuum chuck module and a process system having the same, which can greatly improve the adsorption force for fixing the device.

The present invention, as created to achieve the object of the present invention as described above, the present invention, a plurality of first grid groove lines 110 formed parallel to each other in a first direction (X) on the upper surface of the main body 100 ), a plurality of grid protrusions 130 are formed by at least one second grid groove line 120 formed in at least one second direction Y crossing the first direction X, and a vacuum pressure forming part ( At least one coupling hole 141 coupled to the pneumatic transmission assembly 501 that is connected to 800 and transmits the vacuum pressure is formed inward from the side of the body 100, and a vacuum pressure type from the upper surface of the body 100 Success 142 is formed to be connected to the coupling hole 141, forms a flat-shaped closed curve of a size smaller than the plane size of the object to be fixed (2), and the closed curve includes the one or more vacuum compression holes 142 Vacuum characterized in that the main O-ring 190 is inserted into the first grid groove line 110 and the second grid groove line 120 to directly or indirectly fix the object to be processed 2 by vacuum pressure. Initiate the chuck module.

The main body 100 includes a first grid protrusion formed by connecting two or more grid protrusions 130 in the first direction (X) or the second direction (Y) among the plurality of grid protrusions 130 ( 121), and a second grid protrusion 122 formed by connecting two or more grid protrusions 130 in parallel adjacent to the first grid protrusion 121, the first grid protrusion 121 and the It may include O-ring coupling protrusions 121 and 122 in which both ends of one or more main O-rings 190 are interviewed with each other between the second grid protrusions 122.

The main body 100, of the first grid protrusion 121 and the second grid protrusion 122, two in parallel adjacent to the second grid protrusion 122 located far from the edge of the main body 100 And a third grid protrusion 123 formed by connecting the above grid protrusions 120, and the vacuum pressure forming hole 142 is formed between the second grid protrusion 122 and the third grid protrusion 123 Can be.

The vacuum chuck module (1) is inserted into the plurality of first grid groove lines (110) and the second grid groove lines (120), and at least one main unit is inserted into the O-ring coupling protrusions (121, 122). It further comprises an auxiliary body 1000 having a larger planar shape than the planar shape formed by the O-ring 190 and having a bottom surface in contact with the one or more main O-rings 190, the auxiliary body 1000, wherein the A plurality of first grid groove lines 1110 formed in a first direction (X) on the upper surface of the auxiliary body 1000, and at least one second formed in one or more second directions (Y) intersecting the first direction (X). 2 The grid protrusions 1120 are formed by the grid groove line 1120, and the vacuum pressure formed on the bottom surface of the auxiliary body 1000 is applied to the first grid groove line 1110 and the second grid groove line ( At least one vacuum pressure transmission through hole 1220 is formed vertically so as to be transmitted to 1120, and forms a closed curve in a planar shape of a size smaller than the plane size of the object to be fixed 2, and the closed curve is the vacuum pressure transmission through hole 1220 The auxiliary O-ring 1190 including "the first grid groove line 1110 and the second grid groove line 1120" and "the first grid groove line 1110 and the second grid groove line ( 1120)" It is inserted into the auxiliary O-ring insertion groove 1131 formed separately from the processing object 2 can be directly or indirectly fixed by vacuum pressure.

The vacuum pressure forming hole 142 may be opened when in use and may be closed by coupling the closing member 145 when not in use.

The vacuum chuck module according to the present invention may include a pneumatic transmission assembly 501 that forms a vacuum pressure transmission passage for transferring the vacuum pressure to the body 100 from the vacuum pressure forming unit 800 for forming the vacuum pressure. .

The pneumatic transmission assembly 501 is installed in the vacuum pressure transmission passage, is formed in a longitudinal direction at both ends, and has a first communication part 513 and a second communication part 514 isolated from each other, and the first communication The valve body 510 and the valve body 510 are formed by passing the first through hole 511 and the second through hole 512 from the side to communicate with each of the part 513 and the second communication part 514 It is installed to enable linear movement with respect to the valve body 510 while the outer circumferential surface of is in contact with the inner circumferential surface, and communication and disconnection between the first communication unit 513 and the second communication unit 514 are performed by linear movement. It may further include a slide member 520.

At least one of both ends of the valve body 510 may be inserted into and coupled to the other flow path forming member, or an end of the other flow path forming member may be inserted and coupled to the inside.

The valve body 510 may have a male screw portion formed on an outer peripheral surface such that at least one of both ends is screwed with a female screw portion formed on an inner peripheral surface of the end of the other flow path forming member.

The slide member 520 includes an annular communication groove 523 formed on an inner circumferential surface so as to mutually communicate and release communication between the first through hole 511 and the second through hole 512 by linear movement, and the communication A pair of O-ring installation grooves 521 and 522 in which O-rings 551 and 552 are respectively installed at both ends of the groove 523, and the second through hole among the pair of O-ring installation grooves 521 and 522 ( 512) is formed in the vicinity and communicates with the second through hole 512 when the communication between the first through hole 511 and the second through hole 512 is released by linear movement, so that external air is transmitted to the second through hole. It may include an annular release groove 524 flowing into the (512).

The vacuum chuck module and the process system having the same according to the present invention facilitates the preparation of the vacuum chuck module by forming an O-ring connecting protrusion into which both ends of the O-ring are interviewed and inserted in the formation of the grid groove formed on the upper surface. There is an advantage that can greatly improve the adsorption power for fixing.

The vacuum chuck module and the process system having the same according to the present invention, in forming the O-ring connecting protrusion into which both ends of the O-ring are interviewed and inserted, are formed to have a relatively long length compared to the other protrusions, while stably maintaining the interview at both ends of the O-ring. The sealing power can be greatly improved according to the O-ring installation.

In addition, the vacuum chuck module and the process system having the same according to the present invention further include a vacuum slide valve installed in the delivery passage of the vacuum pressure to transfer and cut off the vacuum pressure from the first stage to the second stage. It is installed in the transmission channel and can release the vacuum pressure at any one of both ends by simple operation.

1 is a conceptual diagram showing the configuration of a process system according to the present invention.
FIG. 2A is a perspective view showing a vacuum chuck module of the process system of FIG. 1, and FIG. 2B is an enlarged view of part A in FIG. 2A.
3 is a plan view of the vacuum chuck module of FIG. 1.
4A is a cross-sectional view taken along the BB direction in FIG. 3.
4B is a cross-sectional view showing an embodiment of fixing the object to be processed by a magnet as a modification example of FIG. 4A.
5 is an enlarged view of part E in FIG. 3
6A is a plan view illustrating an example in which a main O-ring is installed in the vacuum chuck module of FIG. 1.
6B and 6C are plan and side views, respectively, illustrating an example in which an auxiliary body is additionally installed in the vacuum chuck module of FIG. 6A.
7 is a plan view showing a modified example of the auxiliary body of FIG. 6B.
8A is a plan view showing a modified example of the main body of the vacuum chuck module of FIG. 1, FIG. 8B is a right side view of the main body of FIG. 8A, FIG. 8C is a front view of the main body of FIG. 8A, and FIG. 8D is a A rear view of the main body, Fig. 8E is a bottom view of the main body of Fig. 8A, Fig. 8F is an enlarged view showing a portion D in Fig. 8A, and Fig. 8G is a cross-sectional view in the FF direction in Fig. 8F.
9A and 9B are cross-sectional views in the CC direction in FIG. 3, respectively, showing the operation of the vacuum slide valve.
10A and 10B are cross-sectional views in the DD direction in FIG. 3, respectively, showing the operation of the vacuum slide valve.
11 is a cross-sectional view showing a state sealed by a cover member as a modified view of FIG. 10A.
12 is a plan view showing examples of assembly of a pneumatic transmission pipe and a slide valve in the vacuum chuck module of FIG. 1.
13 is a cross-sectional view showing an assembly example for branching of two pneumatic transmission pipes in the vacuum chuck module of FIG. 1.
14 is a perspective view showing an example of the vacuum slide valve shown in FIGS. 9A to 12.
15 is an exploded perspective view showing the vacuum slide valve of FIG. 14.

Hereinafter, a vacuum chuck module according to the present invention, a process system having the same, and a vacuum slide valve used therein will be described with reference to the accompanying drawings.

In the present invention, the process system includes a vacuum chuck module 1 in which an object to be processed 2 is directly or indirectly adsorbed and fixed by vacuum pressure, as shown in FIG. 1, and a vacuum chuck module 1 It includes a vacuum pressure forming unit 800 for providing pneumatic pressure.

The vacuum pressure forming unit 800 is configured to provide a preset vacuum pressure to the vacuum chuck module 1, and any pump can be used as long as it is a vacuum pump capable of forming a negative pressure, that is, a vacuum pressure.

As an example, the vacuum pressure forming unit 800 is a dynamic vacuum including a gas transfer type vacuum pump, a gas trapping type vacuum pump, more specifically a displacement type vacuum pump, and an ejector vacuum pump (see Patent Documents 3 and 4). A pump or the like can be used.

The vacuum chuck module 1 according to the present invention is a configuration for adsorbing and fixing the object to be processed 2 by the vacuum pressure provided by the vacuum pressure forming unit 800, which requires fixing to the object to be processed (2). Any device is possible as long as it is a device.

For example, the vacuum chuck module 1 is a machining device that performs machining, such as a milling machine, drilling machine, grinding machine, welding machine, etc., in a state where the object to be processed 2 is adsorbed and fixed on the upper surface, especially automatically machining It can be applied to CNC machines that perform

In addition, it goes without saying that the vacuum chuck module 1 can be applied to any device that requires adsorption and fixation of an object to be processed by vacuum pressure, such as a coating operation, in addition to a machining device.

The vacuum chuck module 1 is a configuration in which the object to be processed 2 is directly or indirectly adsorbed and fixed by vacuum pressure, and various configurations are possible.

For example, the vacuum chuck module 1 has a flat plate shape and includes a main body 100 for vacuum adsorption on an upper surface.

The main body 100 has a flat plate shape forming an adsorption surface for vacuum adsorption on an upper surface, and various configurations are possible.

For example, the main body 100 is a flat plate made of a metal material, which is connected to a pneumatic transmission assembly 501 to be described later, and transmits the vacuum pressure transmitted by the pneumatic transmission assembly 501 to the absorption surface. The object to be processed 2 can be directly or indirectly adsorbed and fixed by pneumatic pressure.

In addition, the main body 100 includes a plurality of first grid groove lines 110 and a first direction X formed parallel to each other in a first direction X on an upper surface, as shown in FIGS. 1 to 4B. A plurality of grid protrusions 130 may be formed by one or more second grid groove lines 120 formed in one or more second directions Y intersecting.

The first grid groove line 110 and the second grid groove line 120 are configured to form a plurality of grid protrusions 130 on the upper surface of the main body 10 and may be formed by various methods and structures.

In particular, the first grid groove line 110 and the second grid groove line 120 are arranged orthogonal to each other, as shown in FIGS. 1 to 3 and 6B, as shown in FIG. It may be formed by a variety of methods, such as an inclined crossing arrangement that crosses by forming an inclination.

In addition, in addition to the first grid groove line 110 and the second grid groove line 120, as shown in FIG. 7, one or more grid groove lines 150 having a closed curve such as a circle may be additionally formed.

The grid groove line 150 is a groove line formed by a method independent from the formation of the first grid groove line 110 and the second grid groove line 120 according to the installation shape of the main O-ring 190 to be described later. It can have a variety of shapes and structures.

Here, the main O-ring 190 forms a closed curve in the shape of a plane having a size smaller than the plane size of the object to be processed 2 to be fixed by being installed on the first grid groove line 110 and the second grid groove line 120, and the closed curve is As a configuration including one or more vacuum pressure forming holes 142, various configurations are possible.

For example, the main O-ring 190 may be formed of an integral O-ring formed as a closed curve of a preset size.

In addition, the main O-ring 190 is preferably installed so as to protrude higher than the upper surface of the grid protrusion 130 so as to prevent leakage of negative pressure, that is, vacuum pressure, to the outside of the formed closed curve.

On the other hand, as another example of the installation of the mail O-ring 19, it may be installed to form the previously described closed curve by interviewing both ends of an O-ring cut to an appropriate size by a user's work so as to correspond to the plane size of the object to be processed 2. .

At this time, when the main O-ring 190 is cut to a certain length and installed by an interview at both ends, vacuum pressure may leak from the interviewed part.

Thus, the main body 100, as shown in Figs. 1, 3, 6A and 7, among a plurality of grid protrusions 130, 2 in the first direction (X) or the second direction (Y). A first grid protrusion 121 formed by connecting one or more grid protrusions 130 and a second grid protrusion 122 formed by connecting two or more grid protrusions 130 in parallel adjacent to the first grid protrusion 121 ), including O-ring coupling protrusions 121 and 122 in which both ends of the one or more main O-rings 190 are interviewed between the first grid protrusion 121 and the second grid protrusion 122 have.

That is, the main body 100 is, as shown in FIG. 5, two or more grid protrusions 130 of the plurality of grid protrusions 130 are connected to a pair of O-ring coupling protrusions 121 of a relatively long length, 122), and prevent leakage of vacuum pressure at the interview site of the main O-ring 190 by installing both ends 191 of the main O-ring 190 between the pair of O-ring coupling protrusions 121 and 122 Or minimize it.

Meanwhile, the main body 100 has two or more grids adjacent to and in parallel with the second grid protrusion 122 located far from the edge of the main body 100 among the first grid protrusions 121 and the second grid protrusions 122. It includes a pair of third grid protrusions 123 formed by connecting the protrusions 120, wherein the vacuum pressure forming hole 142 may be formed between the pair of third grid protrusions 123.

In addition, the pair of third grid protrusions 123 are formed with bolt installation grooves 122a and 123a that are larger than the inner diameter of the vacuum pressure forming hole 142 for installation of a closing member 145 such as a bolt to be described later. Can be.

Meanwhile, it goes without saying that the second grid protrusion 122 may replace one of the pair of third grid protrusions 123.

Meanwhile, the main O-ring 190 may be any material as long as it is a material capable of being adsorbed by vacuum pressure by directly or indirectly interviewing the object to be processed 2 installed on the upper surface of the main body 100 such as synthetic rubber or heat-resistant plastic. Do.

That is, the main O-ring 190, as shown in FIGS. 1 and 7, forms a closed curve in a planar shape smaller than the plane size of the object 2 to be fixed, and the closed curve is the one or more vacuum pressure forming holes ( 142), and is inserted into the first grid groove line 110 and the second grid groove line 120 to directly or indirectly fix the object to be processed 2 by vacuum pressure.

Meanwhile, as another embodiment of the first grid groove line 110 and the second grid groove line 120, the second grid groove line 120 is, as shown in FIG. 6B, radially based on a preset center. The first grid groove line 110 may be formed as a circular or polygonal closed curve that intersects the second grid groove line 120.

Meanwhile, the main body 100, as shown in FIGS. 9A and 9B, is connected to a vacuum pressure forming unit 800 to be described later and coupled to a pneumatic transmission assembly 501 for transmitting a vacuum pressure. 141 may be formed from the side of the body 100 to the inside, and the vacuum pressure forming hole 142 on the upper surface of the body 100 may be formed to be connected to the coupling hole 141.

The coupling hole 141 and the pneumatic forming hole 142 are holes formed in the main body 100 to form a vacuum pressure on the upper side of the pneumatic transmission assembly 501 to be described later. It can be formed through machining or the like.

And the coupling hole 141 and the pneumatic forming hole 142, as shown in Figs. 1 and 9A to 11, despite being coupled to the pneumatic transmission assembly 501, the adsorption fixing of the object to be processed (2) When not in use, as shown in FIG. 9B, in order to cut off the vacuum pressure, that is, a closing member 145 such as a bolt may be opened when in use and when not in use.

And the formation position of the coupling hole 141 and the vacuum pressure forming hole 142, as shown in Figs. 1 to 3, one or more along the plane edge of the main body 100 having a rectangular or circular planar shape. Can be placed as

Meanwhile, the object to be processed 2 may be directly or indirectly adsorbed and fixed with respect to the main body 100.

For example, on the upper side of the main body 100, the bottom surface of the object to be processed 2 is interviewed on the top surface of the main O-ring 190 inserted into the first grid groove line 110 and the second grid groove line 120 The object to be processed (2) by forming a closed curve formed by the main O-ring (190) to include the vacuum pressure forming hole (142) and a closed adsorption space that cannot communicate with the outside air by the bottom surface of the object to be processed (2). ) Can be adsorbed and fixed.

On the other hand, the object to be processed 2 may be formed or cut through holes, slots, etc., depending on the processing method. In this case, the sealing of the adsorption space is destroyed, making it impossible to adsorb and fix the object to be processed (2). There is a problem.

Accordingly, on the upper side of the main body 100, a fixing jig 181 that is adsorbed and fixed on the main body 100 may be installed, and the object to be processed 2 may be fixed to the fixing jig 181.

The fixing jig 181 is a configuration for fixing the object to be processed 2 for processing the object to be processed 2 while the bottom surface is adsorptively fixed to the body 100, and the fixing method for the object to be processed (2) Therefore, various configurations are possible.

For example, the fixing jig 181, as shown in Figs. 4A and 4B, the bottom of the main O-ring 190 inserted into the first grid groove line 110 and the second grid groove line 120 It is installed by interviewing on the top surface, and by forming a closed suction space that cannot communicate with outside air by a closed curve formed to include the vacuum pressure forming hole 142 by the main O-ring 190 and the bottom surface of the fixing jig 181 It may be adsorbed and fixed to the main body 100.

In addition, the fixing jig 181 may be fixed to the object 2 by various methods such as fixing by a magnet, fixing by a double-sided tape, fixing by bolting, etc.

In addition, the fixing jig 181 may be any member as long as it is a member that can be adsorbed and fixed by the vacuum chuck module 100, and may have various materials such as a synthetic resin material such as acrylic or a metal material.

Meanwhile, when the object 2 or the fixing jig 181 is installed, the fixing jig 181 is attached to the main body 100 so as to be screwed by a bolt 182, as shown in FIGS. 3 and 4A. The hole 183 may be formed and fixed by bolting.

By the bolting, when the object to be processed 2 or the fixing jig 181 is installed, the fixing jig 181 can maintain a more rigid connection to the main body 100.

In addition, in the fixing method of the fixing jig 181 to the main body 100, it may be fixed by various methods other than bolting, and as shown in FIG. 4B, the main body 100 and the suction fixing jig 184 The fixing jig 181 may be fixed by the magnets 184 and 185 installed on at least one of them.

In this case, when only one of the main body 100 and the adsorption fixing jig 184 is installed with a magnet, the rest must have a magnetic material that can be attached to the magnet.

Meanwhile, when both the main body 100 and the adsorption fixing jig 184 are made of a non-magnetic material, magnets are installed on both the main body 100 and the adsorption fixing jig 184 so that they can be fixedly coupled to each other.

Meanwhile, it goes without saying that the fixing method of the main body 100 and the adsorption fixing jig 184 as described above can be applied to the coupling between the main body 100 and the auxiliary main body 1000 to be described later.

In addition, the fixing of the object 2 to the adsorption fixing jig 184 may be fixed by various methods, and may be fixed by an adhesive means 187 such as double-sided tape.

On the other hand, the object to be processed 2 may be difficult to be adsorbed and fixed to the main body 100 by the method described above due to the structure of the machining and the planar shape.

Accordingly, the main body 100 is inserted into a plurality of first grid groove lines 110 and second grid groove lines 120 as shown in FIGS. 6B, 6C, and 7 so that both ends thereof are O-ring coupling protrusions. (121, 122) has a larger planar shape than the planar shape formed by the one or more main O-rings 190 inserted into the one or more main O-rings 190, and further includes an auxiliary body 1000 having a bottom surface in contact with the one or more main O-rings 190 I can.

The auxiliary body 1000 is a configuration for indirectly fixing the object to be processed 2 corresponding to the structure and planar shape of the machining, as shown in FIGS. 6B, 6C, and 7, and the bottom surface is a first A closed curve installed by interviewing the top surface of the main O-ring 190 inserted into the grid groove line 110 and the second grid groove line 120 and formed to include the vacuum pressure forming hole 142 by the main O-ring 190 And by forming a closed adsorption space that cannot communicate with external air by the bottom surface of the auxiliary main body 1000, it may be fixed to the main body 100 by adsorption.

Meanwhile, the auxiliary body 1000 may have a structure similar to that of the body 100 described above on an upper surface. However, as shown in FIG. 6B or 7, the auxiliary body 1000 may have various planar shapes according to the planar shape and the machining structure of the object 2.

That is, the auxiliary main body 1000, as shown in FIG. 7, a plurality of first grid groove lines 1110 formed in the first direction (X) on the upper surface, at least one crossing the first direction (X) A plurality of grid protrusions 1120 are formed by one or more second grid groove lines 1120 formed in the second direction Y, and the vacuum pressure formed on the bottom of the auxiliary body 1000 is applied to the first grid groove line 1110. ) And one or more vacuum pressure transmission through holes 1142 may be vertically penetrated so as to be transmitted to the second grid groove line 1120.

The first grid groove line 1110 and the second grid groove line 1120 may be formed similar to the first grid groove line 110 and the second grid groove line 120 of the main body 100 described above. have. However, for the first grid groove line 1110 and the second grid groove line 1120, an auxiliary body 1000 was additionally installed in consideration of a case where it is difficult to directly adsorb and fix it by the main body 100. It may be formed differently from the formation patterns of the first grid groove line 110 and the second grid groove line 120.

On the other hand, the auxiliary body 1000, as shown in Figs. 6B to 7, forms a closed curve in a planar shape of a size smaller than the plane size of the object to be fixed 2, and the closed curve includes a vacuum pressure transmission through hole 1220. The auxiliary O-ring 1190 is formed separately from the "first grid groove line 1110 and the second grid groove line 1120" and the "first grid groove line 1110 and the second grid groove line 1120" It is inserted into the O-ring insertion groove 1131 to directly or indirectly fix the object to be processed 2 by vacuum pressure.

The auxiliary body 1000 and the auxiliary O-ring 1190, the main body 100 and the main O-ring 190, and the material and shape are additionally installed in consideration of a case where it is difficult to directly adsorb and fix the body 100 It can be configured similarly except for that.

Meanwhile, the fixing jig 181 may be configured such that a flat bottom surface is formed to contact the main O-ring 190 installed in the main body 100 and adsorbed and fixed by vacuum pressure formed in a closed curve formed by the main O-ring 190.

In addition, the fixing jig 181 may fix the object to be processed 2 by various structures and methods.

For example, the fixing jig 181 may include a fixing means such as a bite used in machining or the like to fix the object 2 to be processed.

On the other hand, the main body 100 constituting the vacuum chuck module 1 having the above configuration can be variously modified except for the configuration in which the first grid groove line 110 and the second grid groove line 120 are formed. .

As an example, the main body 100, as shown in Figs. 8A to 8E, a plurality of first grid groove lines 110 formed parallel to each other in a first direction X on the upper surface, and in the first direction. A plurality of grid protrusions 130 may be formed by one or more second grid groove lines 120 formed in one or more second directions Y crossing (X).

In addition, the main body 100 is preferably made of a metal material for sturdy fixation in consideration of a high load acting as in machining, and may be installed on the upper side of the heavy base member.

Here, the coupling structure with the base member is, as shown in FIGS. 8D and 8E, so that the main body 100 may be stably fixed to the upper surface of the base member made of a magnetic material, a plurality of magnetic force generating members 161 on the bottom surface. ) Can be installed.

The magnetic force generating member 161 is a configuration in which the main body 100 is fixed to the upper surface of the base member by magnetic force, and any member such as a permanent magnet or an electromagnet may be used as long as it is a member capable of generating magnetic force.

Meanwhile, the main body 100 may be provided with a plurality of stoppers 192 to prevent horizontal movement on the upper surface of the base member.

The stopper 192 is a configuration installed in the main body 100 to prevent horizontal movement on the upper surface of the base member, and various configurations are possible.

For example, the stopper 192 may be formed of a member having a slot 192a that is link-coupled to the fixing member 193 fixed to the side of the main body 100.

Specifically, the stopper 192 protrudes upward while the object to be processed 2, the fixing jig 181, etc. are installed on the upper surface of the main body 100, and the object 2 and the fixing jig 181 are After being in close contact with the side, the stopper 192 may be fixed by the fixing member 193.

Meanwhile, the main body 100 may further include a position fixing means for fixing a position with an object that is suction-fixed on an upper surface such as the object 2 and the fixing jig 181.

For example, the positioning means, as shown in Figs. 8A, 8F, and 8G, a positioning insertion groove 132 into which a positioning pin 194 is inserted into at least some of the grid protrusions 130 Can be formed.

The positioning insertion groove 132 is a groove formed to insert a positioning pin 194 coupled to the object 2, the fixing jig 181, and the like, and may have various structures.

Further, the positioning insertion groove 132 may be provided with a pin groove forming member 195 having a pin groove 195a into which the positioning pin 194 is inserted for precise positioning.

The pin groove forming member 195 is a member in which the pin groove 195a into which the positioning pin 194 is inserted is formed and may be coupled to the positioning insertion groove 132 by screwing or the like.

In addition, the main body 100 may be additionally provided with a fixed coupling means for firmly fixed coupling with the object to be fixed on the upper surface such as the object to be processed 2 and the fixing jig 181.

In the airborne fixing means, as shown in FIGS. 8A, 8F and 8G, a screwing groove 133 into which a fixing screw 198 is screwed may be formed in at least some of the grid protrusions 130. have.

The screwing groove 133 is a groove in which the fixing screw 198 is screwed to at least a portion of the grid protrusions 130, and a female threaded portion is formed on the inner circumferential surface to be screwed with the fixing screw 198.

In addition, the screw coupling groove 133 may be provided with a female screw forming member 196 having a female screw portion 197 screwed with a fixing screw 198 on the inner circumferential surface for precise coupling with the fixing screw 198. have.

The female thread forming member 196 is a member in which a female threaded portion 197 is formed so as to be screwed with a fixing coupling screw 198 on an inner circumferential surface for precise coupling with the fixing coupling screw 198, and various configurations are possible.

By positioning the object 2 and the fixing jig 181 on the main body 100 by the positioning means as described above, precise machining is possible.

In addition, precise machining is possible by stably fixing the object to be processed 2 and the fixing jig 181 on the main body 100 by the fixed coupling means as described above.

Meanwhile, the vacuum chuck module 1, in particular, the main body 100 may receive a vacuum pressure by a pneumatic transmission assembly 501 connected to the vacuum pressure forming unit 800.

The pneumatic transmission assembly 501 is connected to a vacuum pressure forming unit 800 for forming a negative pressure, that is, a vacuum pressure, from the vacuum pressure forming unit 800 to the vacuum chuck module 1, that is, a vacuum pressure to the main body 100. As a configuration to form a vacuum pressure transmission flow path for transmitting, various configurations are possible depending on the structure of the vacuum pressure transmission flow path.

As an example, the pneumatic transmission assembly 501 is connected to one or more pneumatic transmission pipes 591 and the pneumatic transmission pipe 591 to branch the pneumatic flow passage or change the direction of the pneumatic flow passage. ), and the pneumatic connection block 590 may include a pipe coupling member 570 for coupling the pneumatic transmission pipe 591.

The pneumatic transmission pipe 591 is installed in one or more, and various pipes can be used as pipes for transmitting negative pressure, that is, vacuum pressure formed by the vacuum pressure forming unit 800, and installation and assembly while enduring vacuum pressure To facilitate this, it is preferable to use a member made of a material free of bending.

The at least one pneumatic connection block 580 is connected to the pneumatic transmission pipe 591 to branch the pneumatic flow path or change the direction of the pneumatic flow path, and various configurations are possible.

As an example, the pneumatic connection block 580, as shown in FIGS. 1 to 3, 9a to 10b, and 12a to 13, may include a block body 581 having a'T'-shaped flow path. I can.

The block body 581 is, for example, a main passage 582 formed in the longitudinal direction of a polygonal column such as a cylindrical block or square column having a predetermined length to form a'T'-shaped passage, and the main passage ( A branch passage 583 formed to communicate with the 582 may be formed.

And the main passage 582, the pipe joint member 540 is fitted at both ends, the pipe coupling member 570 for coupling the pneumatic transmission pipe 591 described above is coupled to communicate with other members, or the cover member ( 146) can be combined and closed.

Here, the pipe joint member 540 has one end inserted into the coupling hole 141 formed in the main body 100 or the main passage 582 forming the vacuum chuck module 1 and the other end is exposed to the outside, so that the pipe coupling member ( Various configurations are possible as a configuration in which 570), a slide valve 500, a cover member 146, and the like to be described later are combined.

In addition, the pipe joint member 540 is another member to which at least one end is coupled, for example, in the case of a simple fitting coupling to the coupling hole 141 or the main passage 582, the O-ring 542 is interposed and the other member is coupled. An annular groove 548 into which a wedge shape formed at the end of the fixing screw 594 is inserted may be formed on the outer circumferential surface so that it can be fixed to the fixing screw 594 installed through the hole.

The cover member 146 is a member for blocking external air from flowing in when a flow path such as the pneumatic transmission pipe 591 in the main flow path 582 is unnecessary, and may have various configurations according to a coupling structure.

On the other hand, the cover member 146 is a member for blocking the transmission of outside air to the vacuum pressure transmission channel in the formation of the vacuum pressure transmission channel, shown in Figs. 1, 2, 11, and 12a to 12b. As shown, it can be installed in various locations.

As an example, the cover member 146 may be coupled to the pneumatic connection block 580, as shown in FIGS. 1 and 2.

In addition, the cover member 146 may be coupled to the body 100, as shown in FIG. 2. In this case, when the cover member 146 is difficult to be directly coupled, an adapter member 149 may be additionally installed on a member to which the cover member 146 is coupled, such as the body 100 for coupling the cover member 146.

As another example, the pipe joint member 540, at least one end is coupled to another member, for example, a branch passage 583, or when the cover member 146 is coupled to the previously described fixing screw 594 A male threaded portion may be formed on the outer circumferential surface so that it can be screwed with the branch passage 583 or the cover member 146 in a state in which it is difficult to fix the O-ring.

On the other hand, the pipe joint member 540, as shown in Figs. 9A and 9B, when fitted into the vacuum chuck module 1, that is, the coupling hole 141 formed in the main body 100, the pipe joint member 540 A filter member 549 for preventing foreign substances from entering the furnace may be coupled.

The filter member 549 is a configuration for preventing the introduction of foreign substances into the pipe joint member 540 when inserted into the vacuum chuck module 1, that is, the coupling hole 141 formed in the main body 100. Various configurations are possible depending on the type of foreign material.

For example, when the vacuum chuck module 1 is machined using abrasion or the like on the object to be processed 2, the filter member 549 is composed of a mesh member to prevent the inflow of generated chips (particles). Can be.

The piping coupling member 570 is coupled to the pneumatic connection block 590 and the like to couple the pneumatic transmission pipe 591, and various configurations are possible.

As an example, the pipe coupling member 570 includes a coupling body 571 having one end inserted into the inner side of the pipe joint member 540 described above and the other end inserted into the inner side of the pneumatic transmission pipe 591, The other end of the coupling body 571 is screwed with a male thread formed on the outer circumferential surface of the coupling body 571 while the other end of the coupling body 571 is inserted into the pneumatic transmission pipe 591 to securely fix the pneumatic transmission pipe 591 to the coupling body 571. It may include a fixing member 572.

Meanwhile, the pneumatic transmission assembly 501 transmits vacuum pressure by being coupled to the main body 100 of the vacuum chuck module 1 or coupled to the pneumatic connection block 580, and when negative pressure, that is, vacuum pressure, is formed in the flow path. When separating the pneumatic transmission pipe 591 among the pneumatic transmission assembly 501, it is necessary to cut off the vacuum pressure.

Accordingly, the pneumatic transmission assembly 501 according to the present invention is installed in the delivery passage of the vacuum pressure as shown in FIGS. 9A to 10B and FIGS. 12A to 15 to transmit the vacuum pressure from the first stage to the second stage. And it is preferable to further include a vacuum slide valve 500 to perform shutoff.

The vacuum slide valve 500 is installed in a delivery passage of vacuum pressure to transfer and cut off the vacuum pressure from the first stage to the second stage, and various configurations are possible.

As an example, the vacuum slide valve is installed in a vacuum pressure transmission channel, is formed in a longitudinal direction at both ends, and has a first communication part 513 and a second communication part 514 isolated from each other, and a first communication part ( The valve body 510 formed by passing through the first through hole 511 and the second through hole 512 from the side to communicate with each of the 513 and the second communication part 514, and the outer peripheral surface of the valve body 510 A slide member 520 that is installed to enable linear movement with respect to the valve body 510 while in contact with the inner circumferential surface, and performs communication and release of communication between the first communication unit 513 and the second communication unit 514 by linear movement. ) Can be included.

The valve body 510 is installed in a vacuum pressure transmission passage, is formed in a longitudinal direction at both ends, and has a first communication part 513 and a second communication part 514 isolated from each other, and a first communication part 513 ) And the second communication part 514, the first through hole 511 and the second through hole 512 are formed through the side to communicate with each other, and various configurations are possible.

For example, the valve body 510 may be configured as a cylindrical rod in which a first communication part 513 is formed from one end and a second communication part 514 is formed from the other end.

The second communication portion 513 and the second communication portion 514 are formed in a state not connected to each other.

In addition, the valve body 510 has a first through hole 511 and a second through hole 512 formed therethrough so as to communicate with each of the first and second communication parts 513 and 514 from the side surface.

The first through hole 511 and the second through hole 512 are holes formed to communicate with each of the first communication part 513 and the second communication part 514 on the side of the valve body 510, It may be formed of more than one.

At this time, the distance between the first through hole 511 and the second through hole 512 is formed to be smaller than the length of the communication groove 523 formed in the slide member 520 to be described later.

Meanwhile, the vacuum slide valve 500 is preferably provided with a coupling structure for coupling with other flow path forming members installed in the vacuum pressure transmission flow path. For example, the valve body 510 has at least one end of both ends. The other flow path forming member may be inserted into and coupled, or the end of the other flow path forming member may be inserted into and coupled.

In addition, the coupling structure with the other flow path forming member can be various embodiments, and the valve body 510 has a male threaded portion formed on the outer circumferential surface so that at least one of both ends is screwed with a female thread formed on the inner circumferential surface of the end of the other flow path forming member I can.

Here, the flow path forming member is a main body 100 of the vacuum chuck module 1 in which the coupling hole 141 is formed, a pipe joint member 540 coupled to the main body 100 of the vacuum chuck module 1, and a pneumatic connection block Any member, such as 580, may be used as long as it is a member capable of forming a vacuum pressure transmission channel.

The slide member 520 is installed to enable linear movement with respect to the valve body 510 while the outer circumferential surface of the valve body 510 is in contact with the inner circumferential surface, and the first communication part 513 and the second communication part by linear movement Various configurations are possible as a configuration for communicating and releasing communication between the 514.

For example, the slide member 520 includes an annular communication groove 523 formed on the inner circumferential surface so as to mutually communicate and release the communication between the first through hole 511 and the second through hole 512 by linear movement, A pair of O-ring installation grooves 521 and 522 in which O-rings 551 and 552 are installed at both ends of the communication groove 523, and a second through hole 512 of the pair of O-ring installation grooves 521 and 522 ) Is formed in the vicinity and communicates with the second through hole 512 when the communication between the first through hole 511 and the second through hole 512 is released by linear movement, so that external air is transferred to the second through hole 512 It may include an annular release groove 524 for inflow.

First, the slide member 520 may be composed of a cylinder member having an inner diameter equal to or larger than the outer diameter of the outer circumferential surface in which the first through hole 511 and the second through hole 512 are formed or within a preset error range.

And the slide member 520, the communication between the first through hole 511 and the second through hole 512 by the communication groove 523 described above by a relative linear movement with the valve body 510 and release As a result, communication and disconnection between the first communication unit 513 and the second communication unit 514 may be performed.

The communication recess 523 is formed on the inner circumferential surface of the slide member 520 so as to mutually communicate and release communication between the first through hole 511 and the second through hole 512 by linear movement, and is formed in an annular shape. desirable.

The pair of O-ring installation grooves 521 and 522 are formed on the inner circumferential surface of the slide member 520 so that O-rings 551 and 552 are installed at both ends of the communication groove 523, respectively, and are preferably formed in an annular shape.

Here, the inflow of outside air into the communication groove 523 may be blocked by the O-rings 551 and 552 installed in the O-ring installation grooves 521 and 522.

The release groove 524 is formed in the vicinity of the second through hole 512 among the pair of O-ring installation grooves 521 and 522, and the first through hole 511 and the second through hole 512 by linear movement. ) Is formed on the inner circumferential surface of the slide member 520 so as to communicate with the second through hole 512 so that external air flows into the second through hole 512 when the communication is released, and is preferably formed in an annular shape.

Here, the release groove 524 is preferably formed to allow the inflow of external air. A plurality of ventilation holes 525 formed on the side surfaces and end surfaces of the slide member 520, and the slide member at the end of the slide member 520 Since the inner circumferential surface of the 520 is formed at a distance from the outer circumferential surface of the valve body 510, external air can be introduced into the release groove 524.

On the other hand, the vacuum slide valve 500 having the above configuration is installed in the vacuum pressure transmission flow path and can release the vacuum pressure at any one end of both ends by a simple operation.

In addition, the vacuum slide valve 500 having the above configuration has been described as an example applied to the vacuum chuck module 1 shown in FIGS. 1 to 7, but a fluid forming flow path that forms a fluid flow path such as vacuum pressure It goes without saying that it may be installed in and used as a valve that transfers and blocks fluid from the first stage to the second stage.

By additionally including a vacuum slide valve for transferring and shutting off the vacuum pressure from the first stage to the second stage, it is installed in the vacuum pressure transmission channel and can release the vacuum pressure at one of both ends by simple operation.

The Hanhyun vacuum slide valve 500 is coupled to an upstream end of the both ends of the valve body 510 based on the flow direction of the fluid in the vacuum pressure transmission path, so that the first communication part 513 and the second communication part 514 A filter member 549 for preventing foreign substances from flowing into any one of them may be additionally coupled.

When the filter member 549 is fitted into the vacuum chuck module 1, that is, the coupling hole 141 formed in the main body 100, as shown in FIGS. 9A to 10B, foreign matter to the pipe joint member 540 As a configuration to prevent the inflow of inflow, various configurations are possible depending on the type of foreign matter to be prevented from entering.

For example, when the vacuum chuck module 1 is machined using abrasion or the like on the object to be processed 2, the filter member 549 is composed of a mesh member to prevent the inflow of generated chips (particles). Can be.

Since the above is only described with respect to some of the preferred embodiments that can be implemented by the present invention, as well known, the scope of the present invention should not be limited to the above embodiments and should not be interpreted. It will be said that both the technical idea and the technical idea together with the fundamental are included in the scope of the present invention.

100: vacuum chuck module 800: vacuum pressure forming unit

Claims (10)

A plurality of first grid groove lines 110 formed parallel to each other in a first direction (X) on the upper surface of the main body 100, and one formed in one or more second directions (Y) crossing the first direction (X) A plurality of grid protrusions 130 are formed by the above second grid groove line 120,
One or more coupling holes 141 connected to the vacuum pressure forming unit 800 and coupled with the pneumatic transmission assembly 500 for transmitting the vacuum pressure are formed inward from the side of the body 100,
A vacuum pressure forming hole 142 is formed on the upper surface of the main body 100 to be connected to the coupling hole 141,
The main O-ring 190 including the one or more vacuum pressure forming holes 142 forming a flat closed curve having a size smaller than the plane size of the object to be fixed 2 is the first grid groove line 110 and It is inserted into the second grid groove line 120 to directly or indirectly fix the object to be processed 2 by vacuum pressure,
A first grid protrusion 121 formed by connecting two or more grid protrusions 130 in the first direction (X) or the second direction (Y) among the plurality of grid protrusions 130, and the first Including a second grid protrusion 122 formed by connecting two or more grid protrusions 130 in parallel adjacent to the grid protrusion 121, the first grid protrusion 121 and the second grid protrusion 122 It includes O-ring coupling protrusions 121 and 122 in which both ends of one or more main O-rings 190 are interviewed with each other,
Among the first grid protrusions 121 and the second grid protrusions 122, two or more grid protrusions 120 are adjacent to the second grid protrusion 122 located far from the edge of the main body 100 in parallel. It includes a pair of third grid protrusions 123 formed by being connected,
The vacuum pressure forming hole 142 is formed between the pair of third grid protrusions 123,
The vacuum pressure forming hole 142 is opened when in use, and when not in use, the closing member 145 is coupled and closed,
The pair of third grid protrusions 123 are characterized in that the bolt installation grooves 122a and 123a are formed larger than the inner diameter of the vacuum pressure forming hole 142 for installation of the closing member 145 Vacuum chuck module. delete delete The method according to claim 1,
A plane formed by one or more main O-rings 190 inserted into the plurality of first grid groove lines 110 and the second grid groove lines 120 and inserted at both ends of the O-ring coupling protrusions 121 and 122 It has a larger planar shape than the shape and further includes an auxiliary body 1000 having a bottom surface in contact with the one or more main O-rings 190,
The auxiliary body 1000 includes a plurality of first grid groove lines 1110 formed in a first direction X on the upper surface of the auxiliary body 1000, and at least one second crossing the first direction X. A plurality of grid protrusions 1120 are formed by one or more second grid groove lines 1120 formed in the direction Y,
One or more vacuum pressure transmission through holes 1220 are vertically penetrated so that the vacuum pressure formed on the bottom surface of the auxiliary body 1000 is transmitted to the first grid groove line 1110 and the second grid groove line 1120, and ,
The auxiliary O-ring 1190 including the vacuum pressure transmission through hole 1220 forming a closed curve having a size smaller than the planar size of the object to be fixed 2 is “the first grid groove line 1110 and The second grid groove line 1120" and "the first grid groove line 1110 and the second grid groove line 1120" are inserted into an auxiliary O-ring insertion groove 1131 formed separately from the object to be processed (2) Vacuum chuck module, characterized in that directly or indirectly fixed by vacuum pressure. delete The method according to any one of claims 1 or 4,
A vacuum chuck module, characterized in that it comprises a pneumatic transmission assembly (500) forming a vacuum pressure transmission passage through which the vacuum pressure is transmitted from the vacuum pressure forming unit (800) to form a vacuum pressure (100). The method of claim 6,
The pneumatic transmission assembly 500,
A first communication part 513 and a second communication part 514 are formed in the vacuum pressure transmission passage and formed in the longitudinal direction at both ends, and the first communication part 513 and the second communication part (514) the first through hole 511 and the second through hole 512 to be in communication with each of the valve body 510 formed through penetration from the side,
It is installed so that linear movement with respect to the valve body 510 while the outer circumferential surface of the valve body 510 is in contact with the inner circumferential surface, and between the first communication part 513 and the second communication part 514 by linear movement Vacuum chuck module, characterized in that it further comprises a slide member (520) for performing communication and communication release. The method of claim 7,
The valve body 510 is a vacuum chuck module, characterized in that at least one end of both ends is inserted and coupled to the inside of the other flow path forming member, or the end of the other flow path forming member is inserted and coupled to the inside. The method of claim 8,
The valve body 510,
A vacuum chuck module, characterized in that at least one end of both ends is formed with a male threaded portion on the outer circumferential surface such that at least one end is screwed with a female threaded portion formed on the inner peripheral surface of the end of the other flow path forming member. The method of claim 7,
The slide member 520,
An annular communication recess 523 formed on the inner circumferential surface so as to mutually communicate and release communication between the first through hole 511 and the second through hole 512 by linear movement,
A pair of O-ring installation grooves 521 and 522 in which O-rings 551 and 552 are respectively installed at both ends of the communication groove 523,
It is formed in the vicinity of the second through hole 512 among the pair of O-ring installation grooves 521 and 522 to release communication between the first through hole 511 and the second through hole 512 by linear movement The vacuum chuck module, characterized in that it comprises an annular release groove (524) in communication with the second through hole (512) to allow external air to flow into the second through hole (512).

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