KR102190735B1 - Automatic fastening device applied to gas storage containers for semiconductor manufacturing - Google Patents

Abstract

Disclosed is an automatic fastening device for a gas storage container for semiconductor fabrication. According to the present invention, the automatic fastening device for a gas storage container for semiconductor fabrication is attached to a supply device that provides a gas stored in a storage container to a semiconductor process through a supply line to connect the storage container and the supply line. The automatic fastening device comprises: a connecting part operating to automatically separate a sealing cap of the storage container mounted in the supply device, by a rotation operation on the sealing cap, and to connect the outlet of the storage container and the supply line; and a control part for automatically adjusting the supply of gas from the outlet to the supply line by opening and closing the valve of the storage container by a forward and reverse rotation operation on the knob of the storage container. According to the present invention, the automatic fastening device can minimize work errors such as wrong fastening, incomplete fastening, or an over-torque that can be generated by an operator, thereby effectively reducing accidents due to leakage of high-risk gas for semiconductor fabrication and enabling safe and quick replacement of the storage container using fewer personnel.

Description

Automatic fastening device for gas storage container for semiconductor manufacturing {AUTOMATIC FASTENING DEVICE APPLIED TO GAS STORAGE CONTAINERS FOR SEMICONDUCTOR MANUFACTURING}

The present invention relates to an automatic fastening device for a gas storage container for semiconductor manufacturing, and more particularly, to an automatic fastening device in which a connection between a storage container and a supply line inserted into a supply device is automatically made by continuous operation.

In a semiconductor made up of a series of semiconductor manufacturing facilities arranged in succession according to the order of the manufacturing process, the factory continuously performs a series of chemical processes such as numerous depositions, cleaning, etching, and drying on the wafer or substrate to be processed. To produce parts.

This semiconductor manufacturing process consists of a series of processes in which various high-purity and high-risk chemical substances (gases, liquids) must be provided in a timely and quantitative manner depending on the process, so supply is stopped at any one stage, incomplete supply, or When a breakdown occurs, there is a risk that the worker is exposed to a dangerous situation or the entire process is stopped, resulting in a huge loss.

Therefore, in order to safely and stably provide high-risk chemical substances to the semiconductor manufacturing process, a number of chemical substance supply devices are installed and operated in semiconductor manufacturing plants.

As shown in FIG. 1, the chemical substance supplying device 20 includes a case provided with a shielded inner space for safely storing a storage container in which chemical substances are stored, and a supply line and a storage container connected to the semiconductor manufacturing process. Safety accidents are prevented by creating a safe semiconductor manufacturing environment, consisting of a pipe assembly that is connected to communicate with each other and a means for controlling the amount of supply and motoring for abnormalities.

However, in the case of supplying a high-risk chemical substance stored in the storage container to the semiconductor manufacturing process through the supply device 20 as described above, when the chemical substance is consumed more than a certain amount, the exhausted storage container must be newly stored by the operator. Problems as mentioned below may arise in that they have to be replaced with containers.

First, looking at the process of replacing the storage container input to the supply device for semiconductor manufacturing, the operator closes the valve by rotating the knob of the exhausted storage container, and then the operation of releasing the connection between the pipe assembly and the delivery port is preceded.

In addition, the operator performs a work of discharging the sealing cap to the outlet by fastening it to the outlet so that the chemical substances remaining inside the storage container do not leak to the outside.

The operator then removes the sealing cap screwed to the outlet of the new storage container and then fastens the delivery port to the pipe assembly, and finally rotates the knob of the storage container to open the valve continuously. Will perform.

As described above, the series of replacement processes by the operator completely depend on the operator's manual work, so it takes excessive work time to replace the storage container, and when operating a plurality of supply devices 20, a large amount of manpower is required. There is a problem in that it is difficult to reduce maintenance and management costs and increase efficiency.

In addition, in the process of fastening the sealing cap of the exhausted storage container to the outlet during a series of replacement processes by the operator and the process of fastening the outlet of the new storage container to the pipe assembly, the sealing cap and the outlet, the outlet and the pipe assembly There is a problem in that there is a risk of leakage of chemical substances due to work errors such as incorrect fastening, incomplete fastening or overtorque between the liver.

Therefore, technical research and development is required to create a safer and more efficient work environment in operating the supply device 20 for semiconductor manufacturing.

An object of the present invention is a semiconductor in which a safe replacement for a storage container can be made by automatically performing a process for carrying out a storage container that has been put into a supply device and used and a connection between a newly inserted storage container and a supply line by continuous operation. It is to provide an automatic fastening device for a manufacturing gas storage container.

The above object is a fastening device that is attached to a supply device for providing gas stored in a storage container to a semiconductor process through a supply line and connects the storage container to the supply line, the storage container mounted inside the supply device A connecting unit that automatically separates the sealing cap through a rotational operation on the sealing cap, and operates so that a connection between the outlet of the storage container and the supply line is continuously made; And a control unit that opens and closes a valve of the storage container through a forward and reverse rotation operation on a knob of the storage container and automatically controls the supply of gas from the outlet to the supply line. Is achieved by an automatic fastening device for

The connecting portion, facing the sealing cap and installed to move on the xy plane side block; A cap removal module rotatably installed on the lateral block, fitted to surround the sealing cap located in the x-axis direction, and detaching the sealing cap according to the rotation operation; And a fastening module that is rotatably installed on the side block in parallel with the cap removal module in the y-axis direction and detachably coupled to the outlet for connection with the supply line.

The connecting part may include a first driving part provided on the first mounting plate so that the side block slides toward the sealing cap located in the x-axis direction; It is provided between the first mounting plate and the second mounting plate so that the side block slides in the y-axis direction to selectively access the cap removal module and the sealing cap or the fastening module and the outlet. 2 driving unit; And a third driving unit that provides a forward and reverse rotation driving force to the worm shaft rotatably axially coupled in the lateral block so as to engage with the worm gears respectively formed at the rear end of the cap removal module and the fastening module.

The connecting part further includes a load cell provided at any one of both ends of the worm shaft in order to measure a torque applied to the cap removal module or the fastening module through which the forward and reverse rotation driving force is transmitted through the worm shaft. I can.

The connecting unit is provided on a power transmission side between the worm shaft and the third driving unit to prevent an overloaded torque from acting on the cap removal module or the fastening module through which the forward and reverse rotation driving force is transmitted through the worm shaft. It may further include a torque limiter.

The control unit may include an upper block installed to face the knob; A knob module rotatably installed on the upper block, fitted to surround the knob positioned in the z-axis direction, and opening and closing the valve according to a rotation operation; And a planetary gear having a sun gear meshing with a pinion formed on the upper end of the knob module, a worm shaft meshing with the planetary carrier of the planetary gear, and a bevel gear provided on the other side of the worm shaft. It may include a fourth driving unit that provides a forward and reverse rotation driving force.

The control unit, in order to detect or display an open/close state of the valve corresponding to the rotation operation of the knob module, operates through a gear module engaged with the sun gear and rotates, and is provided outside the upper block. May contain more wealth.

According to the present invention, after the sealing cap is automatically separated by a rotational operation of the sealing cap of the storage container mounted inside the supply device, a connecting part for connecting the outlet of the storage container and the supply line through sliding movement is provided on one side. It is provided, and the control unit that opens and closes the valve of the storage container through the forward and reverse rotation operation of the knob of the storage container and automatically controls the gas supply from the outlet to the supply line is provided on the upper side, which can be generated by the operator. As work errors such as incorrect fastening, incomplete fastening or overtorque are minimized, safety accidents due to leakage of high-risk semiconductor manufacturing gas are effectively reduced, and there is an effect that the replacement of storage containers can be made safely and quickly with less manpower. .

1 is a use state diagram showing a state in which an automatic fastening device for a gas storage container for semiconductor manufacturing according to an embodiment of the present invention is mounted in a supply device.
2 is a perspective view showing an automatic fastening device for a gas storage container for semiconductor manufacturing according to an embodiment of the present invention.
3 and 4 are views specifically showing the structure and operation of the connecting part of FIG. 2.
5 is a cross-sectional view and a partial exploded perspective view specifically showing the structure of the cap removal module of FIG. 2.
6 to 9 are operational state diagrams sequentially showing a series of operation processes performed by the automatic fastening device of FIG. 2 on the storage container mounted in the supply device.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, in describing the present invention, a description of a function or configuration that is already known will be omitted in order to clarify the gist of the present invention.

1 is a use state diagram showing a state in which an automatic fastening device for a gas storage container for semiconductor manufacturing according to an embodiment of the present invention is mounted in a supply device, and FIG. 2 is a gas storage container for semiconductor manufacturing according to an embodiment of the present invention. A perspective view showing an automatic fastening device for, FIGS. 3 and 4 are views specifically showing the structure and operation of the connecting part of FIG. 2, and FIG. 5 is a cross-sectional view and a partial exploded view specifically showing the structure of the cap removal module of FIG. 2 It is a perspective view, and FIGS. 6 to 9 are operational state diagrams sequentially showing a series of operation processes performed by the automatic fastening device of FIG. 2 with respect to the storage container mounted in the supply device.

The X, Y, and Z axes shown in the drawings are arbitrarily determined for convenience of explanation, not for the purpose of limitation of rights, and the X axis indicates the front (front, arrow side) and rear (backward) directions, and the Y axis is the left (arrow) Side), right direction, and the Z axis is defined as indicating up (upward, arrow side) and down (downward) direction. Each direction to be described below is based on this, except for a case otherwise specifically limited.

The automatic fastening device 1 for a gas storage container for semiconductor manufacturing according to the present invention minimizes work errors such as incorrect fastening, incomplete fastening, or overtorque that may occur by an operator, and is caused by leakage of gas for semiconductor manufacturing, which is a high risk. While reducing safety accidents, it is an invention conceived to ensure that the replacement of the storage container 10 is made by a safe and quick automated operation with less manpower.

The present invention includes a cylindrical cylinder storing a chemical substance for semiconductor manufacturing in a gaseous state therein, a valve 18 at the upper end that is fastened to communicate with the cylinder, and a knob for adjusting the opening rate of the valve 18 according to a rotation operation. (16), an outlet 14 through which chemical substances are discharged to the outside through the valve 18, and a sealing cap 12 that is screwed to the outlet 14 to seal the outlet 14, etc. In order to specifically implement the functions or actions as described above for the storage container 10, as shown in Figs. 1 to 5, including a connecting unit 100, a control unit 200 and a control unit, etc. It can be configured in an embodiment.

Here, the control unit (not shown) controls the operation by applying a control power or a signal while being electrically or mechanically connected to the aforementioned connecting unit 100 and the control unit 200, and the measured information or data. As a component that receives and processes, it is a modular information processing unit such as a micro controller unit (MCU), a microcomputer, and an Arduino, a display (not shown) for displaying processed information, and for user setting. It may include an input device (not shown) or the like.

A series of processes or algorithms that control each device connected by such a control unit (not shown) and process transmitted/received data, etc. are made by coding in programming languages such as C, C++, JAVA, and machine language that can be read through the information processing unit. I can.

In this case, algorithms for a series of operations and data processing by a coded control unit (not shown) can be made in various ways and forms at the level of a person skilled in the art. do.

In the following, it may be understood that all components that perform a specifically set operation or function are operated and controlled by such a control unit unless otherwise specified.

The connecting part 100 is a component provided to communicate with each other a supply line 20, which is a pipe for transmitting gas to a semiconductor manufacturing process, and a storage container 10 mounted in the supply device 30, FIG. 1 As shown in Fig. 5, the side block 110, the cap removal module 120, the fastening module 130, the first driving unit 140, the second driving unit 150, the third driving unit 160, the load cell It may be configured to include the 170 and the torque limiter 180.

The side block 110 is a component that moves on the xy plane and provides a space in which a cap removal module 120, a fastening module 130, and a third driving unit 160, which will be described later, are installed, and the supply device 30 ) It may be made of an enclosure structure disposed to face the sealing cap 12 of the storage container 10 mounted in).

This side block 110, as shown in Figs. 2 and 3, is formed on the rail of the first mounting plate 142 formed along the x-axis direction and the upper end of the side block 110 in a state that is fitted to the rail. A first guide 144 consisting of a sliding block that moves according to the guide of the rail performs a front and rear sliding operation in the x-axis direction.

In addition, the side block 110 is formed on the rail of the second mounting plate 152 and the upper end of the first mounting plate 142 formed long in the y-axis direction, as shown in FIGS. 2 and 4 The second guide 154 configured of a sliding block that moves according to the guide of the rail in a fitted state performs a left-right sliding operation in the y-axis direction.

The cap removal module 120 separates the sealing cap 12 fastened to the storage container 10 arranged at the mounting position in the supply device 30 so that the delivery port 14 is exposed. As a component provided to refasten the previously removed sealing cap 12 to the outlet 14 of the storage container 10 that needs to be replaced due to use or exhaustion of gas, it rotates on the side block 110 Can be installed if possible.

The cap removal module 120 has a fitting groove corresponding to the shape of the sealing cap 12 formed at one end facing the sealing cap 12, and at the other end rotatably installed on the side block 110 A disk-shaped worm gear 122 may be formed.

At this time, the fitting groove of the cap removal module 120 moves with the front sliding of the lateral block 110 in the x-axis direction as shown in FIG. 4, and the sealing cap of the storage container 10 is located in the x-axis direction. (12) is fitted in the form of enclosing.

And the worm gear 122 of the cap removal module 120, as shown in (②) of Figs. 3 and 7 is interlocked with the typeming belt 182 that has received the rotational force of the third driving unit 160 to be described later. By the rotational operation of the worm shaft 162, the cap removal module 120, that is, the fitting groove is rotated in the forward or reverse direction.

When the cap removal module 120 rotates in the forward or reverse direction while the sealing cap 12 is located in the fitting groove as above, the sealing cap 12 is removed or stored from the outlet 14 of the storage container 10. It is possible to be coupled to the outlet 14 of the container 10 by screwing.

At this time, for smooth screwing and disengagement between the sealing cap 12 and the delivery port 14, the sealing cap 12 and the delivery port 14 are screwed and moved relative to each other according to the rotation of the cap removal module 120. The side block 110 may perform a sliding operation in the x-axis direction by a first driving unit 140 to be described later by a distance corresponding to the moving distance between the two.

The fastening module 130 is arranged at a predetermined mounting position in the supply device 30 and the sealing cap 12 is separated by the above-described cap removal module 120, the outlet 14 of the storage container 10 and the semiconductor. As a component that performs a fastening operation for the outlet 14 or a disconnection operation for the outlet 14 so that the supply lines 20 connected to the manufacturing process communicate with each other in a sealed state, in the y-axis direction It may be rotatably installed on the side block 110 in a position parallel to the cap removal module 120.

This fastening module 130 selectively performs sealed fastening and disengagement of the delivery port 14, and has a predetermined coupling end communicating with each other between the delivery port 14 and the supply line 20 at one end. The worm gear 132 may be formed at the other end that is formed and rotatably installed on the side block 110.

At this time, the outlet 14 of the storage container 10 and one side of the coupling end fastened thereto are complementarily formed with screws that are detachable from each other according to the forward and reverse rotation, and the supply line 20 is coupled to the other side of the coupling end. As a result, the gas discharged from the outlet 14 can be delivered to the semiconductor manufacturing process through the bonding end.

In addition, the worm gear 132 of the fastening module 130 is a worm shaft 162 interlocking with the typeming belt 182 that has received the rotational force of the third driving unit 160 to be described later, as shown in FIGS. 3 and 8. By the rotation operation of the fastening module 130, that is, the coupling end is rotated in the forward or reverse direction.

As described above, when the fastening module 130 rotates in the forward or reverse direction in a state in which the coupling end and the outlet 14 are arranged to face each other, the coupling end and the outlet 14 are screwed to each other to be fastened or disengaged. There will be.

At this time, for smooth screwing and disassociation between the coupling end and the transmission port 14, a screw connection is formed according to the rotation of the fastening module 130, and a distance corresponding to the moving distance between the coupling end and the transmission port 14 that moves relative to each other is The side block 110 may perform a sliding operation in the x-axis direction by a first driving unit 140 to be described later.

The first driving unit 140 is a component provided on the first mounting plate 142 so that the above-described side block 110 slides toward the sealing cap 12 located in the x-axis direction, and the side block 110 Any type of power device may be used as long as it is a commercially available device that operates in a linear reciprocation direction in the x-axis direction based on the first mounting plate 142.

However, the first driving unit 140 according to an embodiment of the present invention is a hydraulic or pneumatic actuator capable of ensuring stable operation even in an extreme working environment without fear of electrical failure, as shown in FIGS. 3 and 4. Can be implemented.

Such a hydraulic or pneumatic actuator may be composed of a cylinder body having an inner space through which a fluid such as air flows in and out and a piston installed in the inner space and reciprocating according to the inflow and outflow of air.

At this time, the supply of fluid is not specifically shown, but at least one pipe (not shown) that communicates the externally installed hydraulic or pneumatic pump (not shown) and the cylinder body with each other, and a control installed on one side of the pipe to open and close the pipe. It is achieved through a valve (not shown), and operation control for the hydraulic or pneumatic pump and the control valve may be performed by the above-described control unit (not shown).

As described above, the first driving unit 140 implemented as a hydraulic or pneumatic actuator accurately drives the side block 110 in a straight line in the x-axis direction according to the guidance by the first guide 144 described above, so that the cap removal module 120 The and fastening module 130 can access the sealing cap 12 or the delivery port 14 of the storage container 10, respectively, arranged at the mounting position, and thereby, mutual fastening operation and the like can be performed.

The second driving unit 150 is provided between the first mounting plate 142 and the second mounting plate 152 so that the above-described side block 110 slides in the y-axis direction to seal the cap removal module 120 As a component that selectively allows access between the cap 12 or the fastening module 130 and the outlet 14, the side block 110 or the first installation plate 142 based on the second installation plate 152 If it is a commercially available device that operates to linearly reciprocate in the y-axis direction, any type of power device may be used.

However, the second driving unit 150 according to the embodiment of the present invention, like the first driving unit 140 described above, also operates stably in an extreme working environment without fear of electrical failure, as shown in FIGS. 3 and 4. It may be implemented as a hydraulic or pneumatic actuator that can secure

Such a hydraulic or pneumatic actuator may be composed of a cylinder body having an inner space through which a fluid such as air flows in and out and a piston installed in the inner space and reciprocating according to the inflow and outflow of air.

At this time, the supply of fluid is not specifically shown, but at least one pipe (not shown) that communicates the externally installed hydraulic or pneumatic pump (not shown) and the cylinder body with each other, and a control installed on one side of the pipe to open and close the pipe. It is achieved through a valve (not shown), and operation control for the hydraulic or pneumatic pump and the control valve may be performed by the above-described control unit (not shown).

As described above, the second driving unit 150 implemented as a hydraulic or pneumatic actuator accurately rotates the side block 110 in the y-axis direction as shown in (③) of FIGS. 3 and 8 according to the guidance by the second guide 154 described above. By linearly driving, the cap removal module 120 and the fastening module 130 can be positioned in front of the sealing cap 12 or the delivery port 14 of the storage container 10, respectively, arranged at the mounting position.

The third driving unit 160 provides rotational driving force to the cap removal module 120 and the fastening module 130 respectively rotatably coupled to the lateral block 110 as described above to separate the sealing cap 12 / It is a component that allows coupling/disconnection to the fastening or the delivery port 14, respectively.

The third driving unit 160 is a commercially available device capable of rotating the cap removal module 120 and the fastening module 130 through a predetermined power transmission configuration such as a pulley and a belt, a gear assembly in which a plurality of gears are combined. If it is a device, it can be any type of power device.

However, the third driving unit 160 according to the embodiment of the present invention is implemented as a hydraulic or pneumatic motor to ensure stable operation even in an extreme working environment without fear of electrical failure, as shown in FIGS. 3 and 4 However, it is installed at the bottom in a direction parallel to the side block so that the configuration itself does not protrude to the outside and can be compactly integrated with the side block.

The rotational shaft of the third driving unit 160 installed at the lower end of the side block as above is rotatably coupled in the side block 110 so as to engage with the worm gears 122 and 132 of the cap removal module 120 and the fastening module 130, respectively. The worm shaft 162 and the type ming belt 182 are connected to each other to provide rotational driving force to the cap removal module 120 and the fastening module 130.

The hydraulic or pneumatic motor constituting the third driving unit 160 is a power device that converts the kinetic energy of the fluid transmitted at high pressure into mechanical rotational energy, and although not specifically shown, operations such as forward rotation, reverse rotation, and stop. Is made through at least one pipe (not shown) that communicates the body of the hydraulic or pneumatic motor with a hydraulic or pneumatic pump (not shown) installed outside, and a control valve (not shown) installed on one side of the pipe to open and close the pipe. The operation control of the hydraulic or pneumatic pump and the control valve may be performed by the above-described control unit (not shown), similar to the first and second driving units 140 and 150.

Due to the third driving unit 160 installed as above, the cap removal module 120 and the fastening module 130 can be simultaneously rotated with a single power source, and the connecting unit 100 itself is compact despite the 4-axis drive. Since it can be implemented in a structure, it is possible to easily install the connecting part 100 even in a narrow space.

The load cell 170 transmits a torque applied to the cap removal module 120 or the fastening module 130 through which the forward and reverse rotation driving force is transmitted through the worm shaft 162, that is, the previously removed sealing cap 12 In order to measure the locking torque applied to the cap removal module 120 when refastening to 14, or the connection torque applied to the fastening module 130 when connecting between the fastening module 130 and the outlet 14 As a specially prepared component, it is connected to the above-described control unit to transmit the measured information to the control unit.

The load cell 170 is made of a commercially available product that generates an electrical signal according to the degree of pressurization, and may be installed in various positions capable of directly or indirectly sensing the above-described locking torque or connection torque.

However, in the embodiment of the present invention, as shown in FIG. 3, it is installed at any one of both ends of the worm shaft 162 rotatably installed inside the side block 110 without installing a separate structure.

Specifically, one side of the load cell 170 is fixed to the inner side of the side block 110 in a state penetrated by the worm shaft 162, and the other side is pressed according to the flow of the worm shaft 162 in the y-axis direction. It is installed in a paper structure to measure the torque applied to the cap removal module 120 or the fastening module 130, respectively.

That is, as an example, in order to connect between the fastening module 130 and the transmission port 14, the worm gear 132 of the fastening module 130 is a third driving unit via the worm shaft 162 and the typing belt 182. When rotated by 160, the worm gear 132 engages with the worm gear 132 as a torque proportional to the degree of screwing between the coupling end of the fastening module 130 and the delivery port 14 is applied as a reaction resistance force. The worm shaft 162 flows in the y-axis direction, and at this time, the load cell 170 indirectly measures the torque applied between the coupling end and the delivery port 14 based on the degree of being pressed by the worm shaft 162.

Due to the provision of such a load cell 170, the over-torque generated between the sealing cap 12, which has already been removed, to the delivery port 14, and when connecting the connection module 130 and the delivery port 14 Since over-torque can be determined through the control unit, safety accidents due to over-torque can be appropriately prevented.

The torque limiter 180 includes the above-described load cell 170 and the above-described load cell 170 to prevent an overloaded torque from acting on the cap removal module 120 or the fastening module 130 through which the forward and reverse rotational driving force is transmitted through the worm shaft 162 It is a component that can be provided separately.

The torque limiter 180 according to the embodiment of the present invention is not mainly connected with a control unit that performs electrical control, but mechanically depends on the applied torque between the rotational shaft of the third driving unit 160 and the worm shaft 162. It may be a commercialized product of various methods that blocks power transmission above a certain torque and connects less than a certain torque.

At this time, the torque limiter 180, as shown in Figs. 3 and 4, the pulley used together with the type ming belt 182 connecting between the rotation shaft of the third driving unit 160 and the worm shaft 162 It can be manufactured in an integrated form, and is provided in plural together with the typing belt 182

In addition, the torque limiter 180 performs different stages of rotation of the worm shaft 162 that rotates based on the over torque between the sealing cap 12 and the outlet 14 or the fastening module 130 and the outlet 14. In order to block the furnace, a plurality of types may be provided together with the tying belt 182 and the pulley.

Since the above-described specific structure or operation method of the torque limiter 180 is already known in various ways, a detailed description thereof will be omitted.

As the above-described connecting part 100 is made of an organic combination of the above-described components, separation of the sealing cap 12 of the storage container 10 mounted inside the supply device 30 is performed by the cap removal module 120. Is automatically performed through the rotation of the storage container 10, and then the sliding operation of the second driving unit 150 in the y-axis direction with respect to the storage container 10 and the rotation operation of the fastening module 130 are successively performed automatically, so that the storage container ( The connection between the outlet 14 of 10) and the supply line 20 can be made safely and quickly.

The control unit 200 is a supply amount of gas that is automatically discharged from the outlet 14 of the storage container 10 connected to the supply line 20 through the above-described connecting unit 100 and provided to the supply line 20 It is a component designed to automatically adjust the value.

The control unit 200 according to the embodiment of the present invention, as shown in Figs. 2 and 5, the upper block 210, the knob module 220, for the specific implementation of the functions or actions as described above, It is composed of the fourth driving unit 230, the planetary gear 240 and the sensing unit 250, etc. to perform an operation of rotating the knob 16 that opens and closes the valve 18 of the storage container 10 in the forward or reverse direction. do.

Here, the upper block 210 is a component that provides a space in which a knob module 220, a fourth driving unit 230, a planetary gear 240, and a sensing unit 250, which will be described later, are installed, and the supply device 30 ) It is arranged to face the knob 16 provided at the upper end with respect to the storage container 10 aligned at the mounting position in), and may have a housing structure coupled to the upper end of the above-described side block 110.

This upper block 210, as shown in Figures 2 and 3, by forming a combination with the above-described side block 110 via the second mounting plate 152, the side block 110 is an upper block It is possible to behave on the xy plane relative to (210).

The upper block 210 coupled with the side block 110 (connecting unit 100) as described above is connected to a predetermined lifting device (not shown) and the mounting position in the supply device 30 as shown in FIG. It is located above the storage container 10 arranged in, or downward so that a fitting coupling between the knob 16 of the storage container 10 and the knob module 220 to be described later, as shown in (①) of FIG. 7 is achieved. Will go to.

The knob module 220 is fitted so as to surround the knob 16 located in the z-axis direction, and opens and closes the valve 18 of the storage container 10 according to the rotational operation to control the supply amount of gas discharged from the storage container 10. As a component to be finally adjusted, the lower end may be composed of a lower end protruding to face the knob 16 of the storage container 10 and an upper end rotatably installed on the upper block 210.

At the lower end of the knob module 220, a receiving groove corresponding to the shape of the knob 16 is formed to face the knob 16, as shown in FIGS. 2 and 5, and at the upper end of the knob module 220 A disk-shaped pinion 222 may be formed in mesh with the planetary gear 240 to be described later for accurate forward and reverse rotation operation.

At this time, the pinion 222 of the knob module 220 forwards the receiving groove at a predetermined rotation rate through the planetary gear 240 receiving the rotational force of the fourth driving unit 230 to be described later as shown in FIG. 5. Or it will rotate in the reverse direction.

When the knob module 220 rotates in the forward or reverse direction while the knob 16 of the storage container 10 is located in the receiving groove as above, the storage container 10 is rotated as shown in (⑤) of FIG. The knob 16 operates to gradually open or close the valve 18 of the storage container 10.

The fourth driving unit 230 is a component that opens and closes the valve 18 of the storage container 10 by providing rotational driving force to the knob module 220 rotatably coupled to the upper block 210 as described above. .

The fourth drive unit 230 may be any type of power device as long as it is a commercially available device that rotates the knob module 220 through a predetermined power transmission configuration such as a pulley and a belt, a gear assembly in which a plurality of gears are combined. Do.

However, the fourth driving unit 230 according to the embodiment of the present invention is implemented as a hydraulic or pneumatic motor to ensure stable operation even in an extreme working environment without fear of electrical failure, as shown in FIG. It is installed on the side in a direction parallel to the upper block 210 so that itself does not protrude to the outside and can be compactly integrated with the upper block 210.

In addition, the fourth driving unit 230 implemented as a hydraulic or pneumatic motor is installed inside the upper block 210 to transmit a predetermined rotational driving force to the knob module 220, the bevel gear 232, It is concisely implemented by a combination of the worm shaft 234 and the planetary gear 240.

At this time, the bevel gear 232 controls the rotational driving force of the fourth driving unit 230, which is a hydraulic or pneumatic motor provided on the side of the upper block 210, as shown in FIG. 5 on the same plane as the upper block 210. ° It is transferred to the worm shaft 234 to be described later.

Further, the worm shaft 234 is provided on the opposite side of the output side bevel gear 232 to transmit the rotational driving force to the planetary gear 240 to be described later at a predetermined deceleration rate.

Here, the planetary gear (240, Epicyclic Gear) is a gear that can easily distribute the load applied to the input/output side and thus has excellent durability, and can implement various rotation ratios desired with a thin thickness since the input side and the output side can be arranged on the same axis. As a system, specifically composed of a sun gear (242, Sun Gear), a planetary carrier (244, Planetary Carrier), a planetary gear (245, Pinion Gear) and a ring gear (246, Ring Gear) as shown in FIG. Can be.

Here, the input side planetary carrier 244 receives rotational driving force from the above-described worm shaft 234 and rotates together with the planetary gear 245, and the rotational driving force at a rate increased to the output side sun gear 242 disposed in the center. By transmitting again, the pinion 222 of the knob module 220, which is eventually engaged with the upper end of the sun gear 242, is stably rotated forward and backward.

Due to this fourth driving unit 230 and the power transmission configuration, the thickness of the upper block 210 itself can be implemented in a compact structure, so that the installation of the control unit 200 can be made more easily even in a narrow space, Stable, accurate forward and reverse rotation of the knob module 220 is to be implemented.

The sensing unit 250 is a component provided to detect or display an open/closed state of the valve 18 provided in the storage container 10 in response to the rotational operation of the knob module 220, and the sun gear 242 ) May be configured to operate through a predetermined gear module 254 that is engaged with and rotates.

That is, the sensing unit 250 is provided on the outside of the upper block 210 and rotates, as shown in FIGS. 2 and 5, and visually displays the opening and closing state of the valve 18 provided in the storage container 10 The rotation sign 252 and the gear module 254 that is engaged with the sun gear 242 to rotate the rotation sign 252 so as to interlock with the rotational operation of the knob module 220, and the protrusion formed on the rotation sign 252 It may be composed of a detection sensor 256 that recognizes the reflection of light or ultrasonic waves, electrically determines the open/close state of the valve 18 provided in the storage container 10, and transmits it to the above-described control unit.

Due to the installation of the sensing unit 250, the operator or the control unit can safely perform a series of tasks required for the automatic fastening device 1 according to the present invention based on whether the storage container 10 is opened or closed. .

In the above, although specific embodiments of the present invention have been described and illustrated, the present invention is not limited to the described embodiments, and various modifications and variations can be made without departing from the spirit and scope of the present invention. It is self-evident to those who have. Therefore, such modifications or variations should not be individually understood from the technical spirit or viewpoint of the present invention, and the modified embodiments should be said to belong to the claims of the present invention.

1: Automatic fastening device for gas storage container for semiconductor manufacturing
10: storage container 12: sealing cap
14: outlet 16: knob
18: valve 20: supply line
30: supply
100: connecting portion 110: side block
120: cap removal module 122,132: worm gear
130: fastening module 140: first driving unit
142: first mounting plate 144, 154: first, second guide
150: second driving unit 152: second mounting plate
160: third driving unit 162: worm shaft
170: load cell 180: torque limiter
182: timing belt
200: control unit 210: upper block
220: knob module 222: pinion
230: fourth driving unit 232: bevel gear
234: worm shaft 240: planetary gear
242: sun gear 244: planetary carrier
245: planetary gear 246: ring gear
250: detection unit 252: turn sign
254: gear module 256: detection sensor

Claims (7)

A fastening device that is attached to a supply device for providing gas stored in a storage container to a semiconductor process through a supply line and connects the storage container and the supply line,
A connecting unit that automatically separates the sealing cap by rotating the sealing cap of the storage container mounted inside the supply device, and operates so that a connection between the delivery port of the storage container and the supply line is continuously made; And a control unit that opens and closes a valve of the storage container through a forward and reverse rotation operation with respect to a knob of the storage container, and automatically adjusts gas supply from the outlet to the supply line,
The connecting part,
A cap removal module rotatably installed on a side block facing the sealing cap and installed to move on an xy plane, fitted to surround the sealing cap located in the x-axis direction, and detaching the sealing cap according to a rotational operation;
a fastening module which is rotatably installed in the side block in parallel with the cap removal module in a y-axis direction and detachably coupled to the outlet for connection with the supply line;
A first driving unit provided on the first mounting plate so that the lateral block slides toward the sealing cap located in the x-axis direction;
It is provided between the first mounting plate and the second mounting plate so that the side block slides in the y-axis direction to selectively access the cap removal module and the sealing cap or the fastening module and the outlet. 2 driving unit; And
A third driving unit that provides a forward and reverse rotation driving force to the worm shaft rotatably axially coupled in the side block so as to engage with the worm gears respectively formed at the rear end of the cap removal module and the fastening module,
The control unit,
A knob module rotatably installed on an upper block installed to face the knob, fitted to surround the knob located in the z-axis direction, and opening and closing the valve according to a rotation operation; And
A planetary gear provided with a sun gear meshing with a pinion formed on the upper end of the knob module, a worm shaft meshing with the planetary carrier of the planetary gear, and a bevel gear provided on the other side of the worm shaft forward and reverse to the knob module. An automatic fastening device for a gas storage container for semiconductor manufacturing, comprising a fourth driving unit that provides rotational driving force. delete delete delete delete delete delete

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