KR102176063B1 - System for removing vaporized material discharged from chiller - Google Patents

Abstract

The present invention relates to a system for removing a vaporized material discharged from a chiller. In detail, the system for removing a vaporized material discharged from a chiller includes a filter device which absorbs and treats the vaporized material of a cooling fluid of a process facility discharged from a vent line of the chiller. The filter device includes a housing, and a filtering unit positioned inside the housing to remove the vaporized material of the cooling fluid. The filtering unit includes an adsorbent for adsorbing and removing the vaporized material of the cooling fluid, and a receiving tube for accommodating a detecting agent which changes in color by reacting with the vaporized material of the cooling fluid. A fluid including the vaporized material of the cooling fluid discharged from the vent line passes through the adsorbent and then flows into the detection agent, thereby effectively removing the vaporized material of the cooling fluid discharged through the vent line of the chiller.

Description

System for removing vaporized material discharged from chiller

The present invention relates to a system for removing vaporized material from a chiller, and more particularly, to a filter device for adsorbing and treating vaporized cooling fluid of a process facility discharged from a vent line of a chiller, wherein the filter device includes a housing, It is located inside the housing and includes a filtration unit for removing vaporized cooling fluid, and the filtration unit accommodates an adsorbent that adsorbs and removes vaporized cooling fluid, and a detection agent whose color changes by reacting with the vaporization of cooling fluid. The fluid containing the cooling fluid vaporized discharged from the vent line passes through the adsorbent and then flows into the detection agent to effectively remove the vaporization of the cooling fluid discharged through the vent line of the chiller. It is about the exhaust gas removal system of the possible chiller.

A chiller in a FAB environment is an equipment used to keep the internal temperature of a process facility constant. A cooling fluid tank for accommodating the cooling fluid of the process facility and an evaporator for heat exchange between refrigerant and cooling fluid. And an acidic substance such as a fluorine solution is used as the cooling fluid. The chiller must have a function of not only heat exchange efficiency, but also the stability of the highly toxic cooling fluid to be accommodated, facilitate the introduction and withdrawal of the cooling fluid, and prevent the cooling fluid from leaking to the outside when receiving. Therefore, as described in the following patent document, a chiller having the above function is being developed.

<Patent Literature>

Patent No. 10-1705667 (registered on February 6, 2017) "Chiller device for semiconductor process"

However, there is a problem of polluting the surrounding environment by discharging vaporized material of the received cooling fluid through a vent line of a cooling fluid tank of a conventional chiller.

The present invention was devised to solve the above problems,

An object of the present invention is to provide a system for removing vapors of a cooling fluid discharged through a vent line of a chiller.

In addition, the present invention provides a system for removing gaseous discharge of a chiller capable of efficiently removing acidic vapors by using an adsorbent optimized for removal of acidic vapors when the cooling fluid accommodated in the chiller is an acidic substance. have.

The present invention is implemented by an embodiment having the following configuration in order to achieve the above object.

According to an embodiment of the present invention, a system for removing vaporized material from a chiller according to the present invention is characterized in that it includes a filter device that absorbs and treats vaporized cooling fluid of a process facility that flows out of a vent line of the chiller.

According to another embodiment of the present invention, in a system for removing vaporized matter from a chiller according to the present invention, the filter device comprises: a housing; A filtration unit positioned inside the housing to remove vaporized cooling fluid; and an adsorbent configured to remove vaporized cooling fluid; and a detection agent that changes color by reacting with vaporized cooling fluid. A fluid containing a receiving pipe for receiving a, and the fluid containing the cooling fluid vapor that flows out from the vent line passes through the adsorbent and then flows into the detector, and detects a color change of the detector to determine the life of the adsorbent. It is characterized by being able to.

According to another embodiment of the present invention, in the system for removing vaporized matter from the chiller according to the present invention, the receiving tube is made of a transparent material, and the housing communicates with the inside and outside, so that the color change of the detection agent is prevented from the outside of the housing. It characterized in that it comprises an opening to be able to check in.

According to another embodiment of the present invention, in the system for removing vaporization of a chiller according to the present invention, the adsorbent is used as an adsorbent for removing acid gas, and the adsorbent for removing acidic gas is a carrier by mixing a basic metal chloride and a carrier. A carrier mixture formation step of forming a mixture, a carrier solution formation step of mixing the carrier mixture with an alkaline aqueous solution to form a carrier solution, and a mixed solution formation step of adding the carrier solution to a surfactant solution and reacting to form a mixed solution Step and, a pH adjustment step of adding an acetic acid solution to the mixed solution to adjust the pH to 9 to 10 and reacting at a temperature of 80 to 120°C for 2 to 4 hours to obtain a gelled dry product in a thick state, and to the dried product It is characterized in that it is produced through a dough forming step of forming a dough by mixing zinc oxide and an aqueous alkali solution.

According to another embodiment of the present invention, in the system for removing vapors from the chiller according to the present invention, activated carbon and natural zeolite are used as the carrier, and 80 to 120 parts by weight of the activated carbon are used per 100 parts by weight of the basic metal chloride. The natural zeolite is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride, and the basic metal chloride is a mixture of 8 to 10 g of zinc chloride per 1 g of magnesium chloride. An additionally mixed aqueous alkali solution is used, and the iron oxide is characterized in that 100 parts by weight of the basic metal chloride and 15 to 25 parts by weight are used.

According to another embodiment of the present invention, in the step of forming the mixed solution in the system for removing vaporized matter from the chiller according to the present invention, the carrier solution is added to the surfactant solution and the temperature is 80 to 120°C for 2 to 4 hours. During the reaction to form a mixed solution, the surfactant solution is formed by mixing 1800 to 2500 parts by weight per 100 parts by weight of basic metal chloride, 80 to 120 g of surfactant per 1 liter of distilled water, and in the mixed solution forming step The solution is added dropwise to the surfactant solution, the zinc oxide is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride, and the alkaline aqueous solution is used in an amount of 50 to 200 parts by weight per 100 parts by weight of the basic metal chloride. , 2 to 3 molar concentration, in the dough forming step, zinc hydrogen carbonate is further mixed with zinc oxide, the zinc hydrogen carbonate is used 30 to 50 parts by weight per 100 parts by weight of basic metal chloride, the dough forming step In, nanodiamonds are further mixed with the aqueous alkali solution, and the nanodiamonds are characterized in that 1 to 3 parts by weight is used based on 100 parts by weight of the basic metal chloride.

The present invention can obtain the following effects by the configuration, combination, and use relationship that will be described below with the present embodiment.

The present invention has an effect of removing vapors of a cooling fluid discharged through a vent line of a chiller.

In addition, according to the present invention, when the cooling fluid accommodated in the chiller is an acidic substance, an adsorbent optimized for removal of acidic vapors can be used to efficiently remove acidic vapors.

1 is a block diagram of a system for removing exhaust vapors of a chiller according to an embodiment of the present invention.
Figure 2 is a perspective view of the filter device of Figure 1;
Figure 3 is a partial exploded perspective view of the filter device of Figure 1;
Figure 4 is a SEM image of the adsorbent used in the filter device of Figure 1.

Hereinafter, with reference to the accompanying drawings, a system for removing vapors from a chiller according to the present invention will be described in detail. Unless otherwise defined, all terms in this specification are the same as the general meaning of the terms understood by those of ordinary skill in the art to which the present invention belongs, and in case of conflict with the meaning of terms used herein, In accordance with the definitions used in the specification. In addition, detailed descriptions of known functions and configurations that may unnecessarily obscure the subject matter of the present invention will be omitted. Throughout the specification, when a part "includes" a certain component, it means that other components may be further included rather than excluding other components unless specifically stated to the contrary.

Referring to Figs. 1 to 4, a system for removing gaseous discharged from a chiller according to an embodiment of the present invention is a process that is discharged from the vent line 100 of the chiller (not shown). It includes a filter device (1) and the like that absorbs and treats vaporized cooling fluid of the facility. Since the vaporization removal system aims to remove vapors discharged from the vent line 100 of a conventional chiller, when describing the conventional chiller first, the chiller (not shown) accommodates the cooling fluid of the process equipment. And a cooling fluid tank for heat exchange between the refrigerant and the cooling fluid, and the cooling fluid tank has a vent line 100 to allow internal air to communicate with the outside, and the vent line 100 is cooled. Since the inside and outside of the fluid tank are communicated, the cooling fluid contained in the cooling fluid tank can be discharged to the vent line 100 by natural vaporization, and in the environment inside the fab (FAB), the cooling fluid of the process facility Since acidic substances such as fluorine solution are used, the surrounding environment is contaminated if vaporized material (eg, hydrogen fluoride) of the cooling fluid discharged through the vent line is not treated.

The filter device 1 is configured to absorb and treat the vaporized cooling fluid of the process equipment flowing out from the vent line 100 of the chiller, and includes a housing 11, a filtration part 12, a connection part 13, etc. do.

The housing 11 forms the outer shape of the filter device 1 and accommodates the filtering part 12, and includes an upper housing 11a, a lower housing 11b, and the like.

The upper housing 11a is combined with the lower housing 11b to form the housing 11, for example, the upper housing 11a and the lower housing 11b may be detachably coupled by screwing. have. The upper housing 11a has, for example, a cylindrical shape with open top and bottom, and an opening 111 for communicating inside and outside the upper housing 11a may be formed on an outer surface. Although it will be described in detail below, the detecting agent located inside the housing 11 can be directly checked with the naked eye through the opening 111.

The housing (11b) is a configuration configured to form the housing (11) by being combined with the upper housing (11a), for example, has a cylindrical shape with an open top surface, and a communication hole communicating with the connection part (13) (Not shown) may be formed.

The filtration unit 12 is located inside the housing 11 to absorb and remove the vaporized cooling fluid of the process equipment that flows out from the vent line 100, and includes a receiving pipe 12a and an upper cap 12b. , A lower cap (12c), an adsorbent (not shown), and a detection agent (not shown).

The receiving pipe (12a) has a configuration in which the upper and lower surfaces are closed by the upper cap (12b) and the lower cap (12c) to sequentially receive an adsorbent and a detection agent therein, for example, has a cylindrical shape with open upper and lower surfaces, and glass , It may be made of a transparent material such as plastic.

The upper cap (12b) is fitted to the upper surface of the receiving pipe (12a) to close the upper end of the receiving pipe (12a), the upper cap (12b) has a plurality of hollows that communicate the inside and outside 121 is formed.

The lower cap (12c) is fitted to the lower surface of the receiving pipe (12a) to close the lower end of the receiving pipe (12a), the lower cap (12c) has a plurality of hollows that communicate inside and outside the receiving pipe (12a) (Not shown) is formed.

The adsorbent (not shown) is positioned in the receiving pipe 12a to adsorb the cooling fluid vapor, and a conventional adsorbent used industrially may be used.

The detection agent (not shown) is located in the receiving pipe 12a and changes color in response to vaporization of the cooling fluid, and a conventional detection agent used industrially may be used, for example, contact with an acidic substance. In this case, a conventional silica gel detecting agent that changes from orange to red may be used. The adsorbent is located above the inlet (lower cap) through which the cooling fluid vapor is introduced, and the detection agent is located above the adsorbent, and includes a cooling fluid vapor introduced through the hollow of the lower cap (12c). The fluid reacts with the adsorbent to remove the cooling fluid vapor, passes through the detector, and is discharged through the hollow 121 of the upper cap 12b. Therefore, when the cooling fluid vaporized material is removed from the adsorbent, the color of the detection agent does not change, but when the adsorbent is not able to maintain its performance due to the end of its life, the cooling fluid vaporization cannot be removed from the adsorbent and thus the detection agent As it flows in and reacts, the color of the detection agent changes. In addition, since an opening 11 is formed in the housing 11 accommodating the filtering unit 12 so that the detection agent can be visually checked, the color of the detection agent is checked through the opening 111 In this case, it can be determined that the adsorbent has reached the end of its life, so that the time when the adsorbent must be replaced can be easily identified.

The connection part 13 has one end in communication with the vent line 100 and the other end in communication with the lower housing 11b, so that the fluid including the cooling fluid vapor discharged from the bat line 100 is inside the housing 11 It is a configuration that allows it to flow into. Looking at the principle of removing vaporized cooling fluid using the filter device 1 having the above configuration, first, the lower cap 12c is connected to the receiving pipe 12a, and the adsorbent and the detecting agent are sequentially inserted into the receiving pipe ( 12a) and then connecting the upper cap 12b to prepare a filtration unit 12, inserting the filtration unit 12 into the lower housing 11b to which the connection unit 13 is coupled, and inserting the filtration unit 12 into the upper housing 11a ) To cover the upper part of the filter unit 12 and then fasten the upper housing 11a and the lower housing 11b, the filter device 1 is prepared, and thereafter, the connection part of the filter device 1 ( 13) and the vent line 100, the fluid containing the cooling fluid vapor discharged from the vent line 100 is the connection part 13, the lower housing 11b, the lower cap 12c, the adsorbent, and the detection First, after passing through the upper cap 12b in turn, the cooling fluid vapor is removed and then discharged through the upper housing 11a.

Although not shown, a system for removing vaporization of a chiller according to another embodiment of the present invention includes a sensor for measuring the concentration of vaporized cooling fluid in the fluid discharged from the filter, and is installed in the vent line 100 to provide the vent line ( 100), and a control unit configured to close the vent line by controlling the valve when it is determined that the cooling fluid vapor is discharged from the filter by checking information output from the sensor.

In the environment within the fab, since an acidic substance is mainly used as the cooling fluid for the process equipment, the following adsorbent for removing acidic gas is preferably used.

The acidic gas removal adsorbent includes a carrier mixture forming step of forming a carrier mixture by mixing a basic metal chloride and a carrier, a carrier solution forming step of mixing the carrier mixture with an aqueous alkali solution to form a carrier solution, and the carrier solution A mixed solution forming step of adding and reacting to a surfactant solution to form a mixed solution; adjusting the pH to 9 to 10 by adding an acetic acid solution to the mixed solution and drying to obtain a dried product; and oxidation to the dried product. It is manufactured through a dough-forming step of mixing zinc and calcium carbonate aqueous solution to form a dough, and a drying step of forming the dough and then drying to form an adsorbent, and the adsorbent removes acidic gas. Includes various acidic gases such as hydrogen glide (HF, HCl, HBr, etc.) and glide gas (Cl ₂ , F ₂ , ClF _3, etc.).

The step of forming a carrier mixture is a step of forming a carrier mixture by mixing a basic metal chloride and a carrier. The basic metal chloride may be used in the form of a powder, and preferably has an average diameter of 0.5 to 200 μm. The basic metal chloride is preferably at least one selected from the group consisting of zinc chloride, magnesium chloride, and calcium chloride, and more preferably, 8 to 10 g of zinc chloride per 1 g of magnesium chloride are used in combination. The carrier may be used in the form of a powder, and coal-based activated carbon and zeolite are preferably used. The coal-based activated carbon is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride, has a total pore volume of 0.1 to 0.4 cm ³ /g, has an average pore size of 2 to 10 nm, and has an average pore size of 100 to 400 m ² /g. It is desirable to have a specific surface area. The zeolite may be a natural zeolite, 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride is used, has a total pore volume of 0.1 to 0.5 cm ³ /g, has an average pore size of 2 to 20 nm, and 100 to It is preferred to have a specific surface area of 150 m ² /g.

The carrier solution forming step is a step of forming a carrier solution by mixing the carrier mixture with an aqueous alkali solution, and the alkali aqueous solution is used in an amount of 2000 to 3000 parts by weight per 100 parts by weight of a basic metal chloride, and 200 to 600 g sodium hydroxide per 1 liter of distilled water. It is preferably formed by mixing.

The mixed solution forming step is a step of forming a mixed solution by adding the carrier solution to a surfactant solution and reacting at a temperature of 80 to 120°C for 2 to 4 hours, and the surfactant solution is 1800 per 100 parts by weight of a basic metal chloride. To 2500 parts by weight is used, and 80 to 120 g of a surfactant per 1 L of distilled water are mixed and formed, and the surfactant is tetradecyl trimethyl ammonium bromide (TTAB), dodecyl trimethyl ammonium bromide (DTAB), cetyl trimethyl ammonium bromide (CTAB) , Tween-20 (polyoxyethylene (20) sorbitan monolaurate), Tween-40 (polyoxyethylene (40) sorbitan monopalmitate), and Tween-80 (polyoxyethylene (80) sorbitan monooleate) Any one or more selected from the group consisting of may be used. When the carrier solution and the surfactant solution are mixed at the same time, the bone grain structure of the carrier is damaged and rearrangement is not performed uniformly, so that basic metals are not dispersed, resulting in a sintering phenomenon, which may degrade the adsorption performance, thus forming the mixed solution. In the step, the carrier solution is added drop by drop to the surfactant solution. The larger the specific surface area of the carrier, the higher the efficiency of physical adsorption, the greater the loading amount of the basic metal, thereby increasing the chemical adsorption efficiency, and thus the acidic gas is more effectively removed.The method of preparing the adsorbent has a smaller specific surface area. In a state of dissolving a low-value natural zeolite in an aqueous alkali solution, a surfactant is added to forcibly induce pores to be formed, and to bind with the activated carbon powder, thereby having mesoporous pores in a micro-sized pore-binding structure (i.e., developed pores). Eggplant) by forming a carrier, it is possible to increase the pores and specific surface area. On the other hand, when only activated carbon is used as a carrier, the strength of the prepared adsorbent decreases.In the method for preparing the adsorbent, a surfactant is added in a state in which natural zeolite is dissolved in an aqueous alkali solution to forcibly induce pores to be formed, and to bind to the activated carbon powder As a result, it is possible to increase the strength as well as increase the specific surface area of the prepared adsorbent. In the case of using an aqueous alkali solution in which iron oxide is additionally mixed in the step of forming the mixed solution, the acidic gas removal efficiency can be further improved by increasing the dispersibility in the carrier of the basic metal (zinc, magnesium, calcium, etc.). The iron oxide is preferably used in an amount of 15 to 25 parts by weight of 100 parts by weight of a basic metal chloride.

The pH adjusting step is a step of adding an acetic acid solution to the mixed solution to adjust the pH to 9 to 10 and reacting at a temperature of 80 to 120°C for 2 to 4 hours to obtain a thick gelled dried product. When the pH of the dried product is less than 9, the acidic gas removal efficiency decreases, and when the pH of the dried product is greater than 10, the skeleton structure of the carrier is collapsed by strong alkali, and the performance of the adsorbent decreases.

The dough forming step is a step of forming a dough by mixing an aqueous solution of zinc oxide and calcium carbonate with the dried product, wherein the zinc oxide serves as a binder, and 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride are used. desirable. Since the calcium carbonate aqueous solution is used, the strength of the adsorbent is increased, so that the calcium carbonate aqueous solution is used in an amount of 50 to 200 parts by weight per 100 parts by weight of the basic metal chloride, and preferably has 2 to 3 molar concentration. In the dough forming step, when zinc hydrogen carbonate (Zn(HCO ₃ ) ₂ ) is additionally used, hydrogen halide and activator gas are additionally ionized by moisture generated in the reaction process, and nanodiamonds are added to the calcium carbonate aqueous solution. If is further mixed, heat is effectively dispersed during the reaction process ), improves acid gas removal efficiency. The zinc hydrogen carbonate is preferably used in an amount of 30 to 50 parts by weight per 100 parts by weight of the basic metal chloride, and the nanodiamond increases the thermal conductivity of the adsorbent so that it has a uniform temperature throughout, and based on 100 parts by weight of the basic metal chloride. It is preferred that 1 to 3 parts by weight are used.

The drying step is a step of forming an adsorbent by molding and drying the dough to form an adsorbent. For example, an adsorbent may be prepared in a pellet form using an extrusion molding machine, and an adsorbent may be prepared in a spherical shape using a rotary molding machine.

Hereinafter, the effect of improving the adsorption efficiency of acidic gas when the adsorbent is used will be described in detail through examples.

<Example 1> Preparation of adsorbent

1. Example 1

(1) A carrier mixture was prepared by mixing 50 g of basic metal chloride (45 g of ZnCl ₂ ·6H ₂ O and 5 g of MgCl ₂ ·6H ₂ O), 50 g of coal-based activated carbon and 50 g of natural zeolite, and 400 g of sodium hydroxide was dissolved in 1000 ml of distilled water and alkali. An aqueous solution was prepared, and the carrier mixture and an aqueous alkali solution were mixed and stirred for 1 hour to prepare a carrier solution.

(2) 100 g of CTAB was mixed and stirred in 1000 ml of distilled water to obtain a surfactant solution, and the carrier solution was added drop by drop to the surfactant solution, stirred for 1 hour, and reacted in an oven at 100° C. for 3 hours. After adding an acetic acid solution to a pH of 10, it was reacted in an oven at 100° C. for 3 hours. Thereafter, 50 g of zinc oxide was added as a binder, and 75 g of an aqueous calcium carbonate solution having a concentration of 2.5 mol was mixed to form a dough, and the dough was molded into a spherical shape using a rotary molding machine, and dried at 100° C. to form an adsorbent.

2. Example 2

An adsorbent was formed in the same manner as in Example 1 except that TTAB was used instead of CTAB.

3. Example 3

An adsorbent was formed in the same manner as in Example 1 except that 1100 ml of distilled water was used instead of the surfactant solution.

4. Example 4

An adsorbent was formed in the same manner as in Example 1 except that 1400 ml of distilled water was used instead of the aqueous alkali solution.

5. Example 5

The adsorbent was formed in the same manner as in Example 1 except that the carrier solution was not added dropwise to the surfactant solution and the entire carrier solution was added to the surfactant solution at once.

6. Example 6

₂ · 6H ₂ O 45g and ZnCl ₂ · 6H ₂ O 5g instead of MgCl ₂ · 6H ₂ O 50g The ZnCl were formed and the adsorbent in the same manner as one of Example 1, except that the other conditions used in the.

7. Example 7

Except that CaCl ₂ ·2H ₂ O was used instead of ZnCl ₂ ·6H ₂ O, an adsorbent was formed under the same conditions as in Example 1 1.

8. Example 8

An adsorbent was formed in the same manner as in Example 1 except that the same amount of distilled water was used instead of the aqueous calcium carbonate solution.

9. Example 9

An adsorbent was formed in the same manner as in Example 1 except that 10 g of iron oxide was additionally used in the aqueous alkali solution.

10. Example 10

An adsorbent was formed in the same manner as in Example 1 9, except that 20 g of zinc hydrogen carbonate was additionally used together with 50 g of zinc oxide.

11. Example 11

An adsorbent was formed in the same manner as in Example 1, except that 1 g of nano diamonds (using PL-D-G01) was additionally used in the calcium carbonate aqueous solution.

<Example 2> Physical properties confirmation

1. The specific surface area (m ² /g) of the adsorbents prepared in Example 1 1 to 5 and 11 was measured using a BET apparatus (specific surface area analyzer), and the results are shown in Table 1. In addition, the adsorbents prepared in Example 1 1 and 3 were measured by SEM, and the results are shown in FIG. 4 (FIG. 4A is an SEM image of the adsorbent prepared in Example 1, 4B is a SEM image of the adsorbent prepared in Example 1 3).

2. Looking at Table 1, it can be seen that the specific surface area of the adsorbents prepared in Example 1 3 to 5 was significantly smaller than that of the adsorbents prepared in Example 1, 2 and 11, and no surfactant was used. Or, when the alkali aqueous solution is not used when the carrier solution is formed, or when the carrier solution and the surfactant solution are mixed together, it can be seen that the specific surface area of the prepared adsorbent is small, and in the adsorbents prepared in Example 1 1 and 2 In comparison, the specific surface area of the adsorbent prepared in Example 1 11 was small, but there was little difference, so it was found that the effect on the untargeted by the additive added to impart a specific function after the formation of mesoporous pores was small. have. In addition, referring to FIG. 4, the adsorbent prepared in Example 1 1 has mesoporous pores (pore diameter of 3.53 nm), whereas the adsorbent prepared in Example 1 3 has a smooth surface area. It can be seen that the adsorbent prepared in Example 1 of 1 had a mesoporous pore structure and thus increased specific surface area.

Example 1-1 Example 1-2 Example 1-3 Example 1-4 Example 1-5 Example 1-11 Specific surface area (m ² /g) 512 498 110 190 200 459

<Example 3> Acid gas treatment efficiency evaluation

1. The adsorption removal experiment was carried out by putting 20 ml of each of the adsorbents prepared in Examples 1 to 11 in a cylindrical reactor made of glass having an inner diameter of 25 mm and a height of 80 mm. Each of the hydrogen chloride (HCl) standard gas and the hydrogen fluoride (HF) standard gas were kept constant at a flow rate of 1LPM and flowed continuously, and the gas flowing out after the reaction was analyzed through FT-IR (MIDAC, Korea), and the concentration of the gas When it reached 10 ppm, it was reported as the time of destruction, and the amount of HCl gas removed per 1 L of adsorbent was evaluated by adsorption performance, and the results are shown in Table 2. In addition, chlorine (Cl ₂ ) standard gas was kept at a constant flow rate of 5LPM and flowed continuously, and the gas that flowed out after the reaction was collected in a Tedler bag and measured with a detection tube (Gastech, Japan). When the concentration reached 10 ppm was reported as the time of destruction, and the amount of Cl ₂ removed per 1 L of adsorbent was evaluated by adsorption performance, and the results are shown in Table 2.

2. Looking at Table 2, as confirmed in Example 2, it can be seen that the adsorbents prepared in 3 to 5 of Example 1 with a small specific surface area have low acid gas removal efficiency, and the adsorbent prepared in Example 1 of 1 It can be seen that the acidic gas removal efficiency is better than that of the adsorbents prepared in Example 1 6 and 7, so that Zn has better acid gas removal efficiency than Ca, and when Mg is added than when Zn alone is used, the role of a cocatalyst It can be seen that the acid gas removal efficiency is improved by performing In addition, the adsorbents prepared in Example 1 9 to 11 have better acid gas removal efficiency than the adsorbent prepared in Example 1 1, which improves the dispersibility of alkali metals when iron oxide is used, and zinc hydrogen carbonate is used. In this case, the hydrogen halide and the lubricant gas are further ionized by the moisture generated in the reaction process, and when nanodiamonds are used, heat is effectively dispersed, thereby improving the acid gas removal efficiency.

Example HCl adsorption HF absorption Cl ₂ adsorption Destruction time
(min) Adsorption amount
(L/L) Destruction time
(min) Adsorption amount
(L/L) Destruction time
(min) Adsorption amount
(L/L) One 180 44 150 32 115 29 2 175 46 145 31 119 26 3 50 15 50 12 25 12 4 70 23 68 16 33 15 5 68 25 70 18 31 14 6 150 38 128 27 99 23 7 171 41 145 28 105 24 8 175 42 146 29 110 26 9 220 53 200 36 133 35 10 309 79 260 42 200 41 11 400 98 310 55 270 53

<Example 4> Evaluation of compressive strength

1. The compressive strength (Kgf) was measured for the adsorbents prepared in Example 1 1 and 8. The compressive strength of the adsorbent prepared in Example 1 1 was 6.4, and the compressive strength of the adsorbent prepared in Example 1 8 was 2.7.

2. It can be seen that the adsorbent prepared in Example 1 of 1 has a higher compressive strength than the adsorbent prepared in Example 1 of 8, so that when an aqueous calcium carbonate solution is used, sufficient binder action occurs to improve the strength of the adsorbent. Can be seen.

In the above, the applicant has described the preferred embodiments of the present invention, but such embodiments are only one embodiment that implements the technical idea of the present invention, and any change or modification of the present invention as long as the technical idea of the present invention is implemented. It should be construed as falling within the scope.

1. Filter device 11: housing 12: filter unit
13: connection part 11a: upper housing 11b: lower housing
12a: accommodation pipe 12b: upper cap 12c: lower cap
111: opening 121: hollow

Claims (6)

Including a filter device for adsorbing and treating the vaporized cooling fluid of the process equipment discharged from the vent line of the chiller,
The filter device includes a housing; It is located in the interior of the housing, and a filtering unit for removing vaporized cooling fluid; includes,
The filtration unit includes an adsorbent for adsorbing and removing the cooling fluid vapor, and a receiving pipe for accommodating a detecting agent that changes color in response to the cooling fluid vapor, and includes a cooling fluid vapor flowing out of the vent line. The fluid passes through the adsorbent and then flows into the detecting agent, and the life of the adsorbent can be determined by detecting the color change of the detecting agent.
The receiving tube is made of a transparent material, and the housing includes an opening that communicates with the inside and outside so that the color change of the detection agent can be checked from the outside of the housing,
The adsorbent is an adsorbent for removing acidic gas,
The acidic gas removal adsorbent includes a carrier mixture forming step of mixing a basic metal chloride and a carrier to form a carrier mixture, a carrier solution forming step of mixing the carrier mixture with an aqueous alkali solution to form a carrier solution, and the carrier solution A mixed solution forming step of adding and reacting to a surfactant solution to form a mixed solution, and by adding an acetic acid solution to the mixed solution to adjust the pH to 9 to 10 and reacting at a temperature of 80 to 120°C for 2 to 4 hours. A system for removing gaseous discharge from a chiller, characterized in that it is manufactured through a pH adjustment step of obtaining a thick gelled dried product, and a dough forming step of mixing the dried product with an aqueous zinc oxide and calcium carbonate solution to form a dough. delete delete delete The method of claim 1,
Activated carbon and natural zeolite are used as the carrier,
The activated carbon is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride, and the natural zeolite is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride,
As the basic metal chloride, a mixture of 8 to 10 g of zinc chloride per 1 g of magnesium chloride is used,
In the carrier solution forming step, an alkali aqueous solution in which iron oxide is additionally mixed is used, and the iron oxide is 100 parts by weight of the basic metal chloride and 15 to 25 parts by weight of the basic metal chloride. The method of claim 5,
In the mixed solution forming step, the carrier solution is added to a surfactant solution and reacted at a temperature of 80 to 120° C. for 2 to 4 hours to form a mixed solution,
The surfactant solution is formed by mixing 1800 to 2500 parts by weight per 100 parts by weight of basic metal chloride, and 80 to 120 g of surfactant per 1 liter of distilled water,
In the mixed solution forming step, the carrier solution is added dropwise to the surfactant solution,
The zinc oxide is used in an amount of 80 to 120 parts by weight per 100 parts by weight of the basic metal chloride,
The calcium carbonate aqueous solution is used in an amount of 50 to 200 parts by weight per 100 parts by weight of the basic metal chloride, and has a molar concentration of 2 to 3,
In the dough forming step, zinc hydrogen carbonate is additionally mixed with zinc oxide, and 30 to 50 parts by weight of the zinc hydrogen carbonate is used per 100 parts by weight of basic metal chloride,
In the dough forming step, nanodiamonds are additionally mixed with the aqueous calcium carbonate solution, and the nanodiamonds are used in an amount of 1 to 3 parts by weight based on 100 parts by weight of the basic metal chloride.

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