KR102150194B1 - Optical module and optical apparatus for inspecting super-close align pattern including the same - Google Patents

Abstract

The present invention relates to an optical apparatus for inspecting a super-close align pattern, which comprises: an optical module which observes an align mark of a subject to be inspected; a moving module which is able to control the phase of the optical module; and a control module which controls each motion of the optical module and the moving module. The optical module includes: an optical unit which includes a half mirror placed on an upper side of the subject to be inspected to have a reflection surface tilted by 20-30 degrees, and at least one lens through which a light penetrates, wherein the light is successively reflected in a specific surface to be inspected on a surface of the subject to be inspected and the half mirror; a light source unit which irradiates light from an upper side of the half mirror and enables the light penetrating the half mirror to be irradiated on the surface to be inspected of the subject to be inspected; and an inspection unit which has a film surface that acquires an image generated by the light penetrating the at least one lens to be incident. The present invention aims to provide the optical apparatus for inspecting a subject, which is able to acquire and check an image for each align mark without collision between optical apparatuses or limits in the range of movement.

Description

Optical module and optical device for ultra-close alignment pattern inspection including the same {OPTICAL MODULE AND OPTICAL APPARATUS FOR INSPECTING SUPER-CLOSE ALIGN PATTERN INCLUDING THE SAME}

The present invention relates to an optical device for inspecting an ultra-close alignment pattern and an optical module in the device.

In manufacturing display panels such as FPD (Flat Panel Display) corresponding to LCD, PDP, OLED, FED, LED, VFD, etc. or internal substrates, vision inspection in general to check whether defects or defects in the process have occurred The image is acquired using the device.

When repeatedly performing inspections for defects or defects in manufacturing process based on vision inspection devices for various electronic devices or internal parts of the device, such as display panels, one pattern is formed to keep the phase of the inspection object constant. A plurality of alignment marks are equally provided at a specific position of the inspection target, and an inspection optical device for acquiring and checking images of the alignment marks is also provided on one side of the vision inspection apparatus.

In the conventional case, in the process of performing a vision inspection using a display panel such as a flat panel display (FPD) as an inspection object, the interval between alignment marks forming the specifications and patterns of the inspection object itself is not small. The optical device acquired the image for the test and provided it to the person performing the inspection, so no problem occurred.

In this regard, the distance between the plurality of alignment marks provided on the inspection object not causing interference between optical devices for obtaining each alignment mark image is maintained, and alignment of the inspection object is determined using such alignment marks. In the prior literature on the prior art prepared to confirm and perform a vision test, there is a "test method and test apparatus" (hereinafter referred to as "prior art") of Korean Patent Application Publication No. KR 10-2019-0037112.

However, in the case of optical devices for checking alignment marks in connection with existing inspection devices including the prior art, the degree of integration of inspection targets such as display panels has recently increased and the size itself has become increasingly smaller. The distance between the optical devices for acquiring a plurality of alignment mark images becomes very close, causing mutual interference in the process of performing a function of each optical device for acquiring a plurality of alignment mark images, thereby causing collisions or impossibility of obtaining a proper image.

In addition, in the case of an optical device for checking alignment marks in connection with existing inspection devices including the prior art, the functionality related to image clarity of the optical device that acquires an image for the alignment mark in the inspection target is insufficient. In order to satisfy the amount of light irradiation required to acquire the image of the device, additionally, a light irradiation device is provided around the optical device to limit the movement range of the optical device or to acquire an image of the optical device due to the absence or lack of the light irradiation device. There was a problem that the lack of irradiation amount of light to be produced occurs.

The present invention was created to solve the above problem, and an object of the present invention is to obtain and check images for each of the alignment marks forming an ultra-close alignment pattern on the surface to be inspected, and collision between optical devices and It is to provide an inspection optical device that does not limit the movement range.

In addition, another object of the present invention is to increase the resolution related to optical clarity and reduce the degree of distortion, so that the alignment mark in the object to be observed can be observed more clearly and clearly. To provide.

In addition, another object of the present invention is to satisfy the amount of light irradiation required to acquire an image for each of the alignment marks forming an ultra-close alignment pattern on the surface to be inspected. It is to provide an optical device for inspection that can be satisfied without provision.

In order to achieve the above object, an optical device for inspecting an ultra-close alignment pattern of the present invention comprises: an optical module for observing an alignment mark of an inspection object; A moving module capable of adjusting the phase of the optical module; And a control module for controlling each operation of the optical module and the moving module, wherein the optical module includes a half mirror in which a reflective surface is inclined at an angle of 20 degrees to 30 degrees above the inspection object, and the inspection An optical unit including a specific inspection surface on a target surface and at least one lens through which light sequentially reflected by the half mirror is transmitted; A light source unit that irradiates light from an upper side of the half mirror so that the light transmitted through the half mirror is irradiated onto the inspection surface of the inspection object; And an inspection unit having a film surface that transmits the at least one lens and obtains an image generated by incident light.

Here, the optical unit is formed in a position in which the inspection surface on the surface to be inspected is ahead of the installation position of the half mirror through the half mirror inclined at a predetermined angle toward the front end of the optical module, and the inspection unit An image of the inspection surface on the surface to be inspected may be obtained, which is formed at a position ahead of the installation position of the half mirror on the surface toward the front end of the optical module.

In addition, the light source unit may be disposed such that an axis of light irradiated through the light source unit is coaxial with an axis of light incident on the half mirror for reflection.

In addition, at least two alignment marks of the inspection target may be provided, and at least two of the optical modules may be provided, and a first alignment mark disposed at a predetermined interval on the surface of the inspection target The first optical module and the second optical module are moved through the moving module using a line connecting the first alignment mark and the second alignment mark as a moving axis to observe the and second alignment marks. An image with the first alignment mark as an inspection surface on the film surface of the inspection unit in the first optical module and the second alignment mark on the film surface of the inspection unit in the second optical module as an inspection surface When is obtained, the light irradiated by the light source unit in the first optical module is irradiated to the inspection surface on which the second alignment mark is located and then reflected to be reflected to the half mirror of the optical unit in the second optical module. The light that is incident and irradiated by the light source in the second optical module is irradiated to the inspection surface on which the first alignment mark is located and then reflected to be incident on the half mirror of the optical unit in the first optical module for reflection. have.

In addition, the inspection unit may be provided so that the film surface is inclined at a predetermined angle so that the Scheimpflug condition can be satisfied.

On the other hand, in order to achieve the above object, the optical module included in the optical device for inspecting an ultra-close alignment pattern of the present invention is an optical module for observing an alignment mark of an inspection object, An optical unit including a half mirror in which a reflective surface is inclined at an angle of 20 degrees to 30 degrees on an image side, and at least one lens through which light sequentially reflected by a specific inspection surface on the surface to be inspected and the half mirror is transmitted; A light source unit that irradiates light from an upper side of the half mirror so that the light transmitted through the half mirror is irradiated onto the inspection surface of the inspection object; And an inspection unit having a film surface that transmits the at least one lens and obtains an image generated by incident light, wherein the optical unit is on the surface of the inspection object through the half mirror inclined at a predetermined angle. The inspection surface is formed at a position ahead of the installation position of the half mirror toward the front end of the optical module, and the inspection unit is formed at a position ahead of the installation position of the half mirror on the film surface toward the front end of the optical module. An image of the inspection surface on the surface to be inspected is acquired.

Here, the light source unit may be disposed such that an axis of light irradiated through the light source unit forms coaxial with an axis of light incident on the half mirror for reflection.

In addition, the inspection unit may be provided inclined at a predetermined angle so that the film surface can satisfy the Scheimpflug condition.

According to the present invention, there are the following effects.

First, even if the inspection surface, which acquires a specific image on the surface of the inspection object through the optical module, is formed at a position ahead of the tip side of the optical module, so that a plurality of alignment marks are patterned to form a very close distance. It is possible to prevent collision between optical modules for checking the alignment mark of

Second, in connection with the moving arrangement of the inspection surface to the tip of the optical module through the optical module, the film surface in the inspection unit is inclined at a predetermined angle to satisfy the Scheimpflug condition, so that the image on the inspection target surface is more clearly and clearly displayed It can be observed, and ultimately, visibility for alignment marks can be improved.

Third, when the light source unit in the optical module has a structure of coaxial illumination, when the optical module is observed for each of the plurality of alignment marks, a complementary light irradiation structure can be constructed between the optical modules facing each other.

Fourth, by constructing a complementary light irradiation structure between the optical modules for each of the plurality of alignment marks, there is no need for a separate light irradiation device around the outside of the optical module, thereby limiting collision and movement of the optical module. The problem does not occur.

1 is a view showing the structure of an optical device for inspecting an ultra-close alignment pattern according to the present invention.
2 is a view showing an internal structure of an optical module in the optical device for inspecting an ultra-close alignment pattern according to the present invention.
3 is a diagram showing the structure of a conventional optical device for inspecting an alignment pattern.
4 is a view showing an internal structure of an optical module in a conventional optical device for inspecting an alignment pattern.
5 is a graph showing MTF performance test results of an optical module in the optical device for inspecting an ultra-close alignment pattern according to the present invention.
6 is a graph showing the results of an MTF performance test performed in the same manner as in the prior art, the slope of the film surface installed in the inspection unit of the optical module in the optical device for inspecting the ultra-close alignment pattern according to the present invention.
7 and 8 are views for explaining a complementary light irradiation structure between optical modules facing each other in the optical device for inspecting an ultra-close alignment pattern according to the present invention.

Preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings, but technical parts that are already well known will be omitted or compressed for conciseness of description.

<Description of the configuration and optical characteristics of the optical device for inspecting the ultra-close alignment pattern>

1 to 2, the optical device 100 for inspecting an ultra-close alignment pattern according to the present invention is used to obtain and check images for each of the alignment marks. An optical module 110 to prevent this from occurring, to improve visibility for alignment marks, and to construct a complementary light irradiation structure between optical modules facing each other; A moving module 120; And a control module 130;

First, the optical module 110 is a module configuration in a device capable of obtaining an image on the surface of the inspection object T for observing the alignment mark (A) of the inspection object, the optical unit 111, the light source unit 112 ) And an inspection unit 113.

Here, the optical unit 111 includes a half mirror 111M and a specific inspection surface on the surface of the inspection object T and the half mirror 111M disposed so that the reflection surface is inclined at an angle MA of 20 degrees to 30 degrees on the upper side of the inspection object T. S) and at least one lens 111L through which light sequentially reflected in the half mirror 111M is transmitted.

Specifically, the optical unit 111 is the inspection surface (S) on the surface of the inspection object (T) through the half mirror 111M inclined at an angle MA of 20 to 30 degrees with respect to the parallel plane such as the inspection surface (S). ) Is formed in a position ahead of the installation position of the half mirror 111M toward the front end of the optical module 110 as shown in FIG. 1.

This is a film surface of at least one lens 111L and the inspection unit 113 to be described later when the half mirror 111M is provided with an inclined angle MA of less than 20 degrees based on a parallel plane such as the inspection surface S. Technical difficulties arise in satisfying the Scheimpflug condition using the arrangement structure of (113F), and if it is provided beyond 30 degrees, it is difficult to acquire an image on the surface of the inspection target (T) using the half mirror 111M. This is because the degree of movement of the front end side of the inspection surface S is insignificant, and thus sufficient movement range of the optical module 110 is limited and the collision problem cannot be solved.

Most preferably, the half mirror 111M is preferably inclined to achieve 24 degrees based on a parallel plane such as the inspection surface S, which is a conventional half mirror 11M as shown in FIG. It shows a distinct difference from the inclined state to achieve').

Specifically, in the case of the conventional optical device 10 for alignment pattern inspection, as shown in Figs. 3 and 4, the conventional half mirror 11M is installed at an inclined angle to achieve 45 degrees (MA'). (T) The inspection surface (S) on the surface is formed just below the installation position of the half mirror 11M, as shown in Fig. 4, so that the inspection part 13 is formed immediately below the installation position of the half mirror 11M. (S) The image is acquired.

In addition, at least one lens 111L is a Plano-Convex (PCX) Lens, a Double-Convex (DCX), and a Plano-Concave (PCV) Lens) , Double-Concave (DCV) Lens, a single lens such as an aspherical lens or a lens assembly such as a lens array for adjusting spherical and chromatic aberration, as well as a number of known lenses, including a polarizing plate and a prism, etc. Conceptually, it consists of a combination of at least one or more of them.

In this way, in the lens 111L composed of at least one or more combinations, the light sequentially reflected on the specific inspection surface S and the half mirror 111M on the surface of the inspection object T is transmitted, so that the film surface in the inspection unit 113 ( 113F), the optical characteristics of the image such as focus, ratio, phase, refraction, chromatic aberration, and dispersion are adjusted during the incident process.

In addition, the light source unit 112 irradiates light from the upper side of the half mirror 111M so that the light transmitted through the half mirror 111M is irradiated onto the inspection surface S of the inspection object T.

Here, it is preferable that the light source unit 112 is arranged such that the axis of light irradiated through the light source unit 112 forms coaxial with the axis of light incident on the half mirror 111M for reflection to form coaxial illumination.

This is to provide a complementary light irradiation function between the plurality of optical modules 110 sharing the same moving axis as will be described in connection with the moving module 120 later.

In addition, the inspection unit 113 is a component that performs a photographing function, such as a CCD camera having a film surface 113F that transmits at least one lens 111L and acquires an image generated by incident light, Acquires an image on the surface of T) so that the operator can check and observe the image.

Here, the inspection unit 113 is an image of the inspection surface S on the surface of the inspection target T formed at a position ahead of the installation position of the half mirror 111M on the film surface 113F toward the front end side of the optical module 110 Is obtained.

In addition, it is preferable that the film surface 113F installed in the inspection unit 113 is inclined at a predetermined angle FA based on a parallel surface such as the inspection surface S so that the Scheimpflug condition can be satisfied.

Here, in order to satisfy the Scheimpflug condition, the angle FA in which the film surface 113F installed in the inspection unit 113 is inclined with respect to a parallel plane such as the inspection surface S is preferably 20 degrees to 30 degrees.

Specifically, a plane passing through the central angle of a specific lens related to image acquisition among the inspection surface S on the surface of the inspection object T in consideration of the reflection angle through the half mirror 111M and at least one lens 111L, and the inspection unit ( 113) The straight lines of each of the installed film surfaces 113F meet to form one crossing point, and the Scheimpflug condition may be satisfied.

In this way, the film surface 113F installed in the inspection unit 113 is inclined at a predetermined angle FA based on a parallel surface such as the inspection surface S so that the Scheimpflug condition can be satisfied. The sharpness level of the inspection surface S image on the surface of the object T is excellently improved, and this provides an effect of sufficiently securing the visibility of the alignment mark A.

In order to confirm this, as a result of examining the MTF performance based on the optical module 110 as shown in FIG. 2, it was confirmed that it has the MTF (Modulation Transfer Function) performance as shown in FIG.

Specifically, the MTF performance test performed is a test to obtain an MTF curve, which is an information measurement criterion that reflects how the contrast reproduced by the lens changes according to the change in spatial frequency (resolution). The MTF performance test of the optical module 110 in the pattern inspection optical device 100 was performed based on the following lens specification information (Lens data).

* MTF (Modulation Transfer Function) performance test lens specification information (Lens data)

-Surfaces: 19

-Stop: 6

-System Aperture: Float By Stop Size = 4

-Glass Catalogs: HOYA SCHOTT MISC

-Ray Aiming: Paraxial Reference, Cache On

-Effective Focal Length: -7.784495 (in air at system temperature and pressure)

-Effective Focal Length: -7.784495 (in image space)

-Back Focal Length: 1.32026

-Total Track: 135.7407

-Image Space F/#: 0.9443954

-Paraxial Working F/#: 26.38331

-Working F/#: 25.98893

-Image Space NA: 0.01894797

-Object Space NA: 0.0454383

-Stop Radius: 4

-Paraxial Image Height: 4

-Paraxial Magnification: 2.400104

-Entrance Pupil Diameter: 8.242835

-Entrance Pupil Position: 17.33566

-Exit Pupil Diameter: 0.734443

-Exit Pupil Position: -19.37721

-Field Type: Paraxial Image height in Millimeters

-Maximum Radial Field: 4

-Primary Wavelength: 0.5875618 ㅅm

-Lens Units: Millimeters

-Angular Magnification: -11.22315

In comparison, in the case of the conventional optical device 10 for inspection of alignment patterns, as shown in Figs. 3 and 4, the film surface 13F installed in the inspection unit 13 is based on a parallel surface such as the inspection surface S. Since it is erected at an angle of 90 degrees, it does not satisfy the Scheimpflug condition.

Moreover, to confirm that it is a significant feature that the film surface 113F installed in the inspection unit 113 in order to satisfy the Scheimpflug condition is inclined by 20 to 30 degrees with respect to the parallel plane such as the inspection surface S. After modifying the slope of the film surface 113F installed in the inspection unit 113 to be erected at 90 degrees orthogonal to the parallel plane such as the inspection surface S as in the prior art, the same lens specification information as the MTF performance test performed previously Equipped to perform the inspection, the test results are as shown in Figure 6.

As a result, it can be seen that the MTF performance test result of FIG. 5 shows more excellent MTF performance through the comparison between FIG. 5 and FIG. 6, which means that the film surface 113F installed in the inspection unit 113 is the same as the inspection surface S. It indicates that the Scheimpflug condition can be satisfied as it is inclined by 20 to 30 degrees with respect to the parallel plane, and through this, a clearer inspection surface S image can be obtained.

In summary, the optical module 110 in the optical device 100 for inspecting an ultra-close alignment pattern of the present invention is compared with the optical module 11 in the optical device 10 for inspecting an alignment pattern in the prior art. As shown in, the installation angle of the half mirror 111M is provided at a level of 20 to 30 degrees (most preferably 24 degrees) instead of 45 degrees as in the prior art, and the upper side of the inclined half mirror 111M The light source unit 112 is disposed so that the axis of light irradiated from the light source unit 112 forms coaxial with the axis of light incident on the half mirror 111M for reflection to irradiate light in the form of coaxial illumination, and the film surface 113F installed in the inspection unit 113 ) Shows the biggest difference from the prior art in that it is not erected perpendicular to 90 degrees as in the prior art, but is inclined at a predetermined angle to satisfy the Scheimpflug condition.

The moving module 120 can adjust the phase of the optical module 110, and moves the position of the optical module 110 so that the alignment mark A is located in the inspection surface S on the surface of the inspection object T. It is a driving device.

Here, the moving module 120 necessarily includes a moving element for horizontally moving the phase of the optical module 110 back and forth or left and right, and an elevating element for vertically moving the phase of the optical module 110 up and down according to implementation. , It may be provided to further include at least one or more of the rotational elements for rotating the phase of the optical module 110 as the rotational axis by the moving element.

In addition, at least two alignment marks A displayed on the surface of the inspection object T may be provided, and in this case, at least two optical modules 110 may be provided.

Most preferably, an optical module 110 corresponding to each of the plurality of alignment marks A displayed on the surface of the inspection object T and performing image acquisition of the alignment mark A is separately provided. Form a dog

As described above, the installation form of the half mirror 111M in the optical module 110 and the characteristics of the coaxial illumination structure of the light source unit 112 are changed in phase according to the moving module 120, and Various problems occurring in the process of placing the alignment mark A displayed on the surface into the inspection surface S are solved.

In particular, as the degree of integration of the inspection target (T) such as a flat panel display (FPD) has recently increased, and the size itself has become increasingly smaller, the distance between the alignment marks in the inspection target becomes very close, as shown in FIG. In the process of moving the conventional optical module 11 to place the alignment mark A displayed on the surface of the inspection object T within the inspection surface S, a collision occurs or the movement range is limited. Not only the problem, but more importantly, there has been a problem that it is difficult to obtain an image of the correct alignment mark A.

In addition, in the process of obtaining an image by placing the alignment mark (A) displayed on the surface of the inspection object (T) within the inspection surface (S) by the conventional optical module 11, an appropriate amount of light was required. A separate light irradiation device was positioned around the module 11 to provide the amount of light required for image acquisition, and thus, collisions and movement restrictions of the optical module 11 occurred.

In contrast, in the optical module 110 of the present invention, the half mirror 111M is inclined at a level of 20 degrees to 30 degrees (most preferably 24 degrees) on the front end side, and the half mirror ( The inspection surface (S) is formed at a position ahead of the surface of the inspection object (T) located immediately below the installation position of 111M), so that a plurality of alignment marks (A) are located in close proximity. Even so, there is no problem of collision of the optical module 110 moving to acquire an image of each alignment mark A and limitation of a moving range.

In addition, as shown in Figs. 7 and 8, the first alignment mark A1 and the second alignment mark A2 arranged at a predetermined interval (very close) on the surface of the inspection object T For observation, the first optical module 110-1 and the second optical module through the moving module 120 using the line connecting the first alignment mark A1 and the second alignment mark A2 as a moving axis. When (110-2) moves and approaches each other without colliding, complementary lighting can be provided.

Specifically, the first optical module 110-1 and the second optical module 110-2 move to observe the first alignment mark A1 and the second alignment mark A2 that are very close to each other, An image with the first alignment mark A1 as the inspection surface S is obtained on the film surface 113F of the inspection unit 113 in the first optical module 110-1, and the second optical module 110-2 When an image with the second alignment mark A2 as the inspection surface S is obtained on the film surface 113F of the internal inspection unit 113, the light source unit 112 in the first optical module 110-1 is irradiated. As shown in FIG. 7, the light L1 is irradiated onto the inspection surface S where the second alignment mark A2 is located, and then reflected to the optical unit 111 in the second optical module 110-2. It is incident on the half mirror 111M for reflection.

At the same time, the first optical module 110-1 and the second optical module 110-2 move to observe the first alignment mark A1 and the second alignment mark A2 that are very close to each other, An image with the first alignment mark A1 as the inspection surface S is obtained on the film surface 113F of the inspection unit 113 in the first optical module 110-1, and the second optical module 110-2 When an image with the second alignment mark A2 as the inspection surface S is obtained on the film surface 113F of the internal inspection unit 113, the light source unit 112 in the second optical module 110-2 is irradiated. As shown in FIG. 8, the light L2 is irradiated on the inspection surface S where the first alignment mark A1 is located, and then reflected to the optical unit 111 in the first optical module 110-2. It is incident on the half mirror 111M for reflection.

In this way, the first optical module 110-1 and the second optical module 110-2 moved and approached to observe the first alignment mark A1 and the second alignment mark A2 that are very close, respectively, As the light irradiation form of the light source unit 112 installed in the inside of the light source unit 112 achieves coaxial illumination, as described above, through complementary light irradiation, The amount of light required for image acquisition is provided.

Through this, a separate light irradiation device is additionally provided, thereby preventing the problem of collision of the optical module 110 and limitation of a moving range from occurring.

The control module 130 controls each operation of the optical module 100 and the moving module 120, receives a control command based on an input signal input by a device user through a separate input module, and controls it based on this. Perform.

The embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but to explain it, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

100: optical device for inspection of ultra-close alignment patterns
110: optical module
111: optical unit
111M: Half mirror
111L: lens
112: light source
113: inspection unit
113F: Film side
120: moving module
130: control module
T: subject to inspection
A: Alignment mark
S: Inspection surface

Claims (8)

An optical module for observing an alignment mark of an inspection object;
A moving module capable of adjusting the phase of the optical module; And
Includes; a control module for controlling each operation of the optical module and the moving module,
The optical module,
A half mirror in which a reflective surface is arranged to be inclined at an angle of 20 to 30 degrees on the upper side of the inspection object, and at least one lens through which light sequentially reflected by a specific inspection surface on the inspection object surface and the half mirror is transmitted. An optical unit;
A light source unit that irradiates light from an upper side of the half mirror so that the light transmitted through the half mirror is irradiated onto the inspection surface of the inspection object; And
Including; an inspection unit having a film surface for acquiring an image generated by the incident light through the at least one lens,
The optical unit allows the inspection surface on the inspection target surface to be formed at a position ahead of the installation position of the half mirror toward the front end of the optical module through the half mirror inclined at a predetermined angle,
The inspection unit acquires an image of the inspection surface on the surface to be inspected, which is formed at a position ahead of the installation position of the half mirror on the film surface toward the front end of the optical module,
The light source unit is disposed such that an axis of light irradiated through the light source unit forms coaxial with an axis of light incident on the half mirror for reflection,
At least two alignment marks of the inspection object may be provided, and at least two or more optical modules may be provided,
In order to observe the first alignment mark and the second alignment mark disposed on the surface of the inspection object at predetermined intervals, the line connecting the first alignment mark and the second alignment mark is used as a moving axis. The first optical module and the second optical module are moved through the moving module to obtain an image with the first alignment mark as the inspection surface on the film surface of the inspection unit in the first optical module, and When an image with the second alignment mark as the inspection surface is acquired on the film surface of the inspection unit, the light irradiated by the light source unit in the first optical module is irradiated to the inspection surface on which the second alignment mark is located. The light that is reflected and incident on the half mirror of the optical unit in the second optical module for reflection and irradiated by the light source unit in the second optical module is irradiated to the inspection surface on which the first alignment mark is located, and then is reflected. Characterized in that incident on the half mirror of the optical unit in the first optical module for reflection
Optical device for super proximity alignment pattern inspection.
delete delete delete The method of claim 1,
The inspection unit, characterized in that the film surface is provided to be inclined at a predetermined angle so that the Scheimpflug condition can be satisfied.
Optical device for super proximity alignment pattern inspection.
In the optical module provided in at least two or more to observe the alignment mark (Align mark) provided in at least two or more of the inspection object,
A half mirror in which a reflective surface is arranged to be inclined at an angle of 20 to 30 degrees on the upper side of the inspection object, and at least one lens through which light sequentially reflected by a specific inspection surface on the inspection object surface and the half mirror is transmitted. An optical unit;
A light source unit that irradiates light from an upper side of the half mirror so that the light transmitted through the half mirror is irradiated onto the inspection surface of the inspection object; And
Including; an inspection unit having a film surface for acquiring an image generated by the incident light through the at least one lens,
The optical unit allows the inspection surface on the inspection target surface to be formed at a position ahead of the installation position of the half mirror toward the front end of the optical module through the half mirror inclined at a predetermined angle,
The inspection unit acquires an image of the inspection surface on the surface to be inspected, which is formed at a position ahead of the installation position of the half mirror on the film surface toward the front end of the optical module,
The light source unit is disposed such that an axis of light irradiated through the light source unit forms coaxial with an axis of light incident on the half mirror for reflection,
In order to observe the first alignment mark and the second alignment mark arranged at predetermined intervals on the surface of the inspection object, the line connecting the first alignment mark and the second alignment mark is moved as a moving axis. The first optical module and the second optical module are moved through the module to obtain an image with the first alignment mark as the inspection surface on the film surface of the inspection unit in the first optical module, and the second optical module When an image with the second alignment mark as the inspection surface is acquired on the film surface of the inspection unit, the light irradiated by the light source unit in the first optical module is irradiated to the inspection surface on which the second alignment mark is located and then reflected. The light is incident on the half mirror of the optical unit in the second optical module for reflection and irradiated by the light source unit in the second optical module is irradiated to the inspection surface on which the first alignment mark is located, and then reflected to the first alignment mark. 1, characterized in that incident to the half mirror of the optical unit in the optical module for reflection
Optical module in the optical device for ultra-close alignment pattern inspection.
delete The method of claim 6,
The inspection unit, characterized in that the film surface is provided to be inclined at a predetermined angle so that the Scheimpflug condition can be satisfied.
Optical module in the optical device for ultra-close alignment pattern inspection.

Images