KR102145093B1 - An Apparatus for Analyzing a Sample and a Method thereof - Google Patents

Abstract

The present invention describes an improved ESCA system capable of loading a sample that is likely to be contaminated when exposed to the atmosphere into the ESCA chamber without exposure to the atmosphere.

Description

Sample analysis apparatus and analysis method {An Apparatus for Analyzing a Sample and a Method thereof}

The present invention relates to a sample analysis device, and more particularly, to an Electron Spectroscopy for Chemical Analysis (ESCA) system capable of loading a sample without exposing it to the atmosphere.

In general, a sample with a high possibility of reacting with oxygen when exposed to the atmosphere, such as lithium (Li) used as a major component of a battery, is prepared in a conventional ESCA system (ESCALAB 250, Thermo scientific, etc.; see FIGS. 5A and 5B) In order to be loaded into the chamber of, it was necessary to expose it to the atmosphere for a certain period of time, and for this reason, there were many cases of observing the surface of the sample that was secondarily contaminated in the air, not the surface of the sample that was to be observed.

It is required to load a sample, such as lithium, which is likely to be contaminated when exposed to the atmosphere, in the ESCA chamber without exposure to the atmosphere by improving the conventional ESCA apparatus.

In the Electron Spectroscopy for Chemical Analysis (ESCA) system according to the present invention:

As an Electron Spectroscopy Chemical Analysis (ESCA) device:

A main chamber in which electro spectral chemical analysis (ESCA) is performed on the sample;

A load lock chamber connected to the main chamber and evacuated in a vacuum state before the sample is loaded into the main chamber; And

The ESCA device comprising a door of a load lock chamber, which is a passage through which the sample can be loaded into the load lock chamber;

A glove bag capable of receiving the sample and a tool for loading the sample; And

An inert gas cylinder connected to the glove bag and capable of supplying an inert gas into the glove bag,

The door includes a glove bag mounting portion so that the glove bag can be connected to the door of the load lock chamber,

The sample accommodated in the glove bag may be loaded into the load lock chamber without being exposed to the atmosphere.

In addition, in the ESCA system according to the present invention:

The glove bag mounting portion of the door:

A first flange portion connecting the glove bag mounting portion and the gate of the door;

A second flange portion connecting the glove bag mounting portion and the load lock chamber; And

A neck connecting the first flange portion and the second flange portion, the neck of which an opening of the glove bag can be fixed by a fixing member,

The width of the neck may be smaller than the width of the first flange portion or the width of the second flange portion so as to prevent the glove bag fixed to the neck from being separated from the neck by the fixing member. have.

In addition, in the ESCA system according to the present invention, the glove bag mounting portion is a nipple, the first flange portion of the glove bag mounting portion and the gate of the door may be connected to each other by tanning bolts, and the glove bag mounting portion The second flange portion and the load lock chamber may be connected to each other by tanning bolts.

In addition, in the ESCA system according to the present invention, a gate handle for opening and closing the gate of the door may be located above the gate.

In addition, in the ESCA system according to the present invention, the width (A) of the first flange portion and the width (A) of the second flange portion are 10 to 21 cm, respectively, and the width (B) of the neck is 6.5 to 16.5 cm, the length (C) of the neck is 0.5 to 15 cm, the total length (D) of the glove bag mounting portion may be 4 to 20 cm.

In addition, in the ESCA system according to the present invention,

The glove bag is:

An opening that is a portion fixed to the neck of the glove bag mounting portion of the door by the fixing member;

A gas inlet capable of being connected to the inert gas cylinder;

A gas outlet for discharging the gas inside the glove bag to the outside; And

Including the hand portion which is in contact with the hand of the operator so that the operator can easily handle the sample and the tool accommodated in the glove bag even outside the glove bag,

After the glove bag containing the sample is connected to the glove bag mounting part of the door, before and during loading of the sample into the load lock chamber, the glove bag is removed from the inert gas cylinder so that the sample does not come into contact with oxygen in the atmosphere. Inert gas may be injected through the gas inlet.

In addition, in the ESCA system according to the present invention, the inert gas may be any one selected from the group consisting of helium, neon, krypton, xenon, radon, argon and nitrogen.

In addition, in the ESCA system according to the present invention, the tool for loading the sample includes a sample holder that is a container for receiving the sample, a sample holder carrier that can be sealed after receiving the sample holder containing the sample therein, and the It may be at least one of sample holder tongs for inserting a sample holder containing a sample into the load lock chamber from the sample holder carrier.

Further, in the ESCA system according to the present invention, the sample holder has at least one concave portion, the sample holder tongs have at least one convex portion that can be connected to the concave portion, and the convexity of the sample holder tongs By connecting a part to the concave part of the sample holder, the sample holder may be moved into the load lock chamber with the sample holder tongs.

In addition, in the ESCA system according to the present invention, the diameter of the convex portion of the sample holder tongs is 0.5 mm to 2.5 mm, the length of the convex portion is 5 mm to 25 mm, and the length of the sample holder tongs may be 200 mm to 4OO mm. have.

In addition, the ESCA system according to the present invention may further include an ESCA table on which the ESCA device can be placed, and a movable table that is detachable from the ESCA table and on which the glove bag can be placed.

In addition, in the method of performing electron spectroscopic chemical analysis (ESCA) of the sample using the ESCA system according to the present invention:

Accommodating a sample holder containing the sample and a tool for loading the sample into the glove bag through the opening of the glove bag;

Positioning the opening of the glove bag on the glove bag mounting portion of the door and fixing it using a fixing member;

The inert gas is injected into the gas inlet of the glove bag and the gas inside the glove bag flows out through the gas outlet, while performing a purging operation of inflating and removing the glove bag with the inert gas. Removing oxygen from within;

Loading the sample holder into the load lock chamber by opening the door of the load lock chamber with the sample holder containing the sample; And

It may include performing an electron spectral chemical analysis (ESCA) of the sample in the main chamber.

In addition, in the method of performing electron spectral chemical analysis (ESCA) of the sample using the ESCA system according to the present invention, the tool for loading the sample is sealed after receiving the sample holder containing the sample therein. It may be at least one of possible sample holder carriers and sample holder tongs that can insert the sample holder containing the sample from the sample holder carrier into the load lock chamber.

According to the present invention, there is an advantage that the sample can be loaded into the ESCA chamber without exposure to the atmosphere.

1 shows a schematic diagram of an electron spectral chemical analysis (ESCA) system 100 according to an embodiment of the present invention.
2A is a top view of a glove bag mounting unit 30b according to an embodiment of the ESCA system 100 according to the present invention, and FIG. 2B is an implementation of an ESCA system 100 according to the present invention. It is an enlarged photograph of the door 30 in the case.
3A to 3C are photographs showing tools for loading samples, which can be accommodated in the glove bag 40 according to an embodiment of the ESCA system 100 according to the present invention.
4A is a photograph of a case where the ESCA device of the ESCA system 100 according to an embodiment of the present invention is implemented as an embodiment, and FIGS. 4B to 4E are the glove bag 40 mounted on the ESCA device of FIG. 4A It is a picture of the case.
5A and 5B are schematic diagrams and actual photographs of the conventional ESCA device 1, respectively.

Hereinafter, a sample analysis device according to the present invention will be described in detail. The accompanying drawings show exemplary forms of the present invention, which are only provided to describe the present invention in more detail, and the technical scope of the present invention is not limited thereby.

In addition, regardless of the reference numerals, the same or corresponding components are given the same reference numbers and duplicate descriptions thereof will be omitted, and the size and shape of each component member shown for convenience of explanation may be exaggerated or reduced. have.

1 shows a schematic diagram of an electron spectral chemical analysis (ESCA) system 100 according to an embodiment of the present invention.

The ESCA system 100 according to an embodiment of the present invention is connected to a main chamber 10 and a main chamber 10 in which electrospectral chemical analysis (ESCA) is performed on a sample, so that the sample is a main chamber. (10) A load lock chamber 20 that is a passage that is loaded into the interior and is evacuated in a vacuum state before the sample is loaded into the main chamber 10, and a passage that loads the sample into the load lock chamber 20. It includes an ESCA device including the door 30 of the load lock chamber 20. In addition, the ESCA system 100 may be connected to the door 30 of the load lock chamber 20, and a glove bag capable of accommodating a sample and tools 60, 70, 80 for loading the sample, etc. ) 40, and an inert gas cylinder 50 connected to the glove bag 40 and capable of supplying an inert gas into the glove bag 40. In addition, the ESCA system 100 may further include an ESCA table 90a on which an ESCA device can be placed, and a movable table 90b that is detachable from the ESCA table 90a and can place the glove bag 40. have.

In the main chamber 10, electro spectral chemical analysis (ESCA) may be performed in the same manner as the method performed in the main chamber of a conventional ESCA device. The load lock chamber 20 is connected to the main chamber 10 and a gate valve 15 is provided between the load lock chamber 20 and the main chamber 10, so that the load lock chamber 20 can be evacuated. do. Accordingly, the sample may be transferred into the main chamber 10 through the load lock chamber 20 which may have the same environment as the environment in the main chamber 10.

Meanwhile, in the conventional ESCA apparatus 1, referring to FIG. 5A, when a sample is loaded into the load lock chamber 17, a sample pretreated from the glove box is taken and the door 19 of the load lock chamber 17 Open and load the sample.At this time, the sample had to be exposed to the atmosphere for a certain period of time, and due to this, in many cases, the surface of the sample that was secondarily contaminated in the air was not observed. .

However, the ESCA system 100 according to the present invention includes a glove bag 40 that can be connected to the door 30 of the load lock chamber 20, unlike the conventional ESCA device 1, and the door 30 As will be described later, by having a structure that is easy to mount the glove bag 40, the sample pretreated in the glove box and the tools to be described later necessary for loading the sample into the load lock chamber 20 (60, 70, 80) is placed inside the glove bag 40, the glove bag 40 is mounted on the door 30 of the load lock chamber 20, and the connection is tied with a fixing member such as, for example, a rubber band, and the glove bag ( 40) When the sample inside is loaded into the load lock chamber 20, it is possible to prevent the sample from being exposed to the atmosphere. The glove bag 40 is provided with a hand part 40d that substantially matches the shape of the operator's hand, so that the operator has tools (60, 70, 80) accommodated in the glove bag 40 from the outside of the glove bag 40. Can be handled easily. As an embodiment, the glove bag 40 is a glove bag that is catalog number Z112828 (specification: ALDRICH(R) ATMOSBAG, TWO-HAND, NON-STERILE, SIZE M, CLOSURE TYPE, TAPE-SEAL) of SIGMA-ALDRICH. Can be used.

The glove bag 40 is provided with an opening 40a so that the sample pretreated in the glove box and the tools 60, 70, 80 to be described later necessary for loading the sample into the load lock chamber 20 are provided with the opening 40a. And the opening 40a may be connected to the door 30 of the load lock chamber 20 as described above. In addition, the glove bag 40 includes a gas inlet 40a that can be connected to the inert gas cylinder 50 outside of the glove bag 40 and a gas outlet that can discharge gas inside the glove bag 40 ( 40c). After the glove bag 40 containing the sample is connected to the door 30 of the load lock chamber 20, before and during the loading of the sample into the load lock chamber 20, the glove bag 40 from the inert gas cylinder 50 Inert gas is injected into the gas injection port 40a of 40) so that the sample does not come into contact with oxygen in the atmosphere. The inert gas may be any one selected from the group consisting of helium, neon, krypton, xenon, radon, argon and nitrogen, and FIG. 1 shows an example of using argon gas.

In addition, referring to Figure 1, the door 30 of the ESCA system 100 according to the present invention, unlike the door 19 of the conventional ESCA device 1, the load lock chamber 20 and the load lock chamber ( It includes a glove bag mounting portion (30b) for mounting the glove bag (40) between the gate (30a) of the door 30 of 20). In this regard, Figure 2a shows a top view of the glove bag mounting portion (30b) according to an embodiment of the ESCA system 100 according to the present invention, Figure 2b is an embodiment of the ESCA system 100 according to the present invention This is an enlarged picture of the door 30 when the example is implemented.

Referring to Figure 2a, the glove bag mounting portion (30b) connects the first flange portion (301b) connecting the glove bag mounting portion (30b) and the gate (30a), the glove bag mounting portion (30b) and the load lock chamber (20) A neck 303b that connects between the second flange portion 302b, the first flange portion 301b and the second flange portion 302b, and the opening 40a of the glove bag 40 can be fixed. It may include.

The width A of the first flange portion 301b and the second flange portion 302b is, for example, 10 to 21 cm, and may be about 15.24 cm (6 inches) in one embodiment. The width B of the neck 303b may be 6.5 to 16.5 cm, for example, and may be 10.16 cm (4 inches) in one embodiment. Since the width (B) of the neck 303b is smaller than the width (A) of the first flange portion 301b or the second flange portion 302b, the glove bag 40 is mounted on the neck 303b, such as a rubber band. When tied with a fixing member, it is possible to prevent the glove bag 40 from being separated from the neck 303b. The length (C) of the neck 303b is, for example, 0.5 to 15 cm, so that a space to which the glove bag 40 is connected is secured, and may be about 3.65 cm (1.44 inches) in one embodiment. The overall length D of the glove bag mounting portion 30b is, for example, 4 to 20 cm, and may be about 7.62 cm (3 inches) in one embodiment.

The first flange portion 301b and the gate 30a of the glove bag mounting portion 30b may be connected to each other by tanning bolts, and the second flange portion 302b and the load lock chamber 20 of the glove bag mounting portion 30b are also They can be connected to each other with tanned bolts. In order to prevent the glove bag 40 from being damaged, it is preferable to use a headless bolt, and the length of the headless bolt may be 4cm or more and less than 6cm. Further, as the glove bag mounting portion 30b, for example, a nipple can be used.

Referring to FIG. 2B, a handle 301a is provided above the gate 30a of the door 30. Therefore, by providing the handle 301a on the gate 30a, the sample stored in the glove bag 40 can be loaded into the load lock chamber 20 after the glove bag 40 is connected to the door 30. When opening and closing the door 30 was made easy. In particular, since the handle 301a is located on the upper portion of the gate 30a, the operator can work more easily when loading the sample in the glove bag 40 into the load lock chamber 20. As the door 30, for example, as shown in FIG. 2B, a 6-inch-sized door made by MDC may be used, and as described above, the handle 301a of the door is provided to facilitate the work of the operator. Can be installed on the top of the door.

Referring back to FIG. 1, as described above, the inside of the glove bag 40 includes a sample pre-treated in the glove box and tools 60, 70, and 80 to be described later necessary for loading the sample into the load lock chamber 20. ), etc. More specifically, as the tools 60, 70, and 80 to be described later necessary for loading the sample into the load lock chamber 20, a sample holder 60 corresponding to a container for receiving a sample, and a sample After accommodating the contained sample holder 60 therein, the sealable sample holder carrier 70 and the sample holder 60 containing the sample are taken out from the sample holder carrier 70 and the load lock chamber 20 There are sample holder tongs 80 that can be put inside.

3A shows a sample holder 60, 60 containing a sample, a sample holder carrier 70, a sample holder carrier stopper for sealing the sample holder carrier 70, which can be accommodated in the glove bag 40 ( 70a) is a photograph showing a case in which the sample holder tongs 80 are implemented as an embodiment. 3B is an enlarged photograph of the sample holder 60 and the sample holder tongs 80 containing the sample, and FIG. 3C is an enlarged photograph of the entire sample holder tongs 80. 1, 2a and 2b, the door 30 of the ESCA system 100 according to the present invention, unlike the case of the conventional ESCA device 1, the load lock chamber 20 and the load lock Since the glove bag mounting portion 30b is included between the gates 30a of the door 30 of the chamber 20, the distance from the load lock chamber 20 to the gate 30a becomes a little further. It can be difficult to load.

Accordingly, as shown in FIGS. 1 and 3A to 3C, the ESCA system 100 according to the present invention facilitates sample loading, that is, the sample holder 60 containing the sample is easily moved into the load lock chamber 20. It may additionally or alternatively include a sample holder tongs 80 to allow easy insertion. As shown in FIG. 3B, the sample holder 60 includes at least one concave portion 60a, and the sample holder clamp 80 includes at least one convex portion 80a that can be connected to the concave portion 60a. It can be provided. Accordingly, the operator connects the convex portion 80a of the sample holder tongs 80 to the concave portion 60a of the sample holder 60 to lift the sample holder 60 to facilitate the inside of the load lock chamber 20 Can be loaded. For example, the width or diameter of the convex portion 80a may be 0.5mm to 2.5mm, the length may be 5mm to 25mm, and the length of the rod may be 200mm to 4OOmm. However, the present invention is not limited to those shown in FIGS. 1 and 3A to 3C with respect to the shape or configuration of the sample holder 60 and the sample holder clamp 80, and various changes and modifications are possible.

In addition, the ESCA system 100 according to the present invention may additionally or alternatively include a sample holder carrier 70 that can be sealed after receiving a sample holder 60 containing a sample therein. By accommodating a sample pretreated in a glove box (not shown) and contained in the sample holder in the sample holder carrier 70, it is possible to minimize exposure of the sample to the atmosphere when the sample is transferred from the glove box to the glove bag 40. Made it possible. In FIG. 3A, a container 70 with a stopper 70a is shown as the sample holder carrier 70, but the present invention is not limited thereto, and various changes and modifications are possible.

FIG. 4A is a photograph of an ESCA device of the ESCA system 100 according to an embodiment of the present invention, and FIG. 4B is a photograph of the entire ESCA system 100 according to an embodiment of the present invention. As a picture, the glove bag 40 is attached to the ESCA device of FIG. 4A. FIG. 4C is a picture taken by expanding the ESCA system 100 of the picture of FIG. 4B. FIG. 4D is a picture taken from the side of the ESCA system 100 in the picture of FIG. 4B when the glove bag 40 is mounted on the ESCA device. 4E is an enlarged photograph of the case in which the glove bag 40 is fixed to the ESCA device with a rubber band in the ESCA system 100 of the photograph of FIG. 4B. 2A and 2B, among the constituent parts of the glove bag mounting portion 30b of the door 30, the opening 40a of the glove bag 40 is formed of a rubber band in the neck 303b. It is fixed. In FIG. 4E, a rubber band is shown as an embodiment, but the present invention is not limited thereto, and the glove bag 40 may be fixed to the ESCA device with various fixing means such as a string.

Hereinafter, a method of performing ESCA analysis by loading a sample using the ESCA system 100 according to an embodiment of the present invention will be described.

Step 1: Movable table (90b) After positioning in front of the ESCA table (90a), the glove bag (40) is spread over the movable table (90b).

Step 2: Through the opening (40a) of the glove bag 40, the inside of the glove bag 40, pre-processed in an external glove box to accommodate the sample holder 60 containing the sample, and then sealed the sample holder carrier 70 , Put the sample holder tongs (80), scissors, carbon tape, other necessary tools such as tweezers.

Step 3: After placing the opening 40a of the glove bag 40 on the glove bag mounting portion 30b of the door 30, the opening 40a of the glove bag 40 is closed using a rubber band. 30b).

Step 4: Injecting an inert gas such as high-purity argon gas into the gas inlet 40b of the glove bag 40 and allowing the gas inside the glove bag 40 to flow out through the gas outlet 40c, 40) is inflated with argon gas 2 to 3 times and then purging is performed 2 to 3 times to reduce the oxygen concentration in the glove bag 40 as much as possible. At this time, if the pressure of the injected gas is high, it is impossible to put a hand into the glove bag 40, so the pressure is appropriately adjusted so that the glove bag 40 is maintained at an appropriate size while the gas is continuously flowing.

Step 5: Take out the sample holder 60 from the sample holder carrier 70 accommodated in the glove bag 40 by contacting both hands of the operator with the hand part 40d of the glove bag 40, and the sample holder forceps 80 The sample holder 60 is picked up and the door 30 of the load lock chamber 20 is opened to load the sample holder 60 into the load lock chamber 20.

Step 6: When the vacuum state of the load lock chamber 20 becomes a normal state, as an embodiment, when the pressure is maintained below 10 ^-6 (mTorr), the glove bag 40 and the glove bag table 80b are removed. .

Step 7: After step 5 or after step 6, conduct an electron spectral chemical analysis (ESCA) of the sample in the main chamber 10. Electron spectral chemical analysis (ESCA) of the sample performed in the main chamber 10 may be the same as the electro spectral chemical analysis (ESCA) performed in the main chamber of the ESCALAB 250 model device as an embodiment.

It will be appreciated that the above-described technical configuration of the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention by a person skilled in the art. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting. In addition, the scope of the present invention is indicated by the claims to be described later rather than the detailed description above. In addition, all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

100: ESCA system 10: main chamber
20: load lock chamber 30: door
40: glove bag 50: inert gas cylinder
60: sample holder 70: sample holder carrier
80: sample holder tongs 90a: ESCA table
90b: globe back table

Claims (13)

In the Electron Spectroscopy for Chemical Analysis (ESCA) system:
As an Electron Spectroscopy Chemical Analysis (ESCA) device:
A main chamber in which electro spectral chemical analysis (ESCA) is performed on the sample;
A load lock chamber connected to the main chamber and evacuated in a vacuum state before the sample is loaded into the main chamber; And
The ESCA device comprising a door of a load lock chamber, which is a passage through which the sample can be loaded into the load lock chamber;
A glove bag capable of receiving the sample and a tool for loading the sample; And
An inert gas cylinder connected to the glove bag and capable of supplying an inert gas into the glove bag,
The door includes a glove bag mounting portion so that the glove bag can be connected to the door of the load lock chamber,
The sample accommodated in the glove bag may be loaded into the load lock chamber without being exposed to the atmosphere,
The glove bag mounting portion of the door:
A first flange portion connecting the glove bag mounting portion and the gate of the door;
A second flange portion connecting the glove bag mounting portion and the load lock chamber; And
A neck connecting the first flange portion and the second flange portion, the neck of which an opening of the glove bag can be fixed by a fixing member,
The width of the neck is smaller than the width of the first flange portion or the width of the second flange portion so as to prevent the glove bag fixed to the neck from being separated from the neck by the fixing member,
The tool for loading the sample includes a sample holder that is a container for receiving the sample, a sample holder carrier that can be sealed after receiving the sample holder containing the sample therein, and the sample is At least one of sample holder tongs capable of putting a contained sample holder into the load lock chamber from the sample holder carrier,
The sample holder has at least one recess,
The sample holder tongs have at least one convex portion that can be connected to the concave portion,
The convex portion is provided in a tapered shape, and a diameter decreases as the distance from the main body of the sample holder tongs increases,
By connecting the convex portion of the sample holder tongs to the concave portion of the sample holder, the sample holder can be moved into the load lock chamber with the sample holder tongs. delete The method of claim 1,
The glove bag mounting portion is a nipple,
The first flange portion of the glove bag mounting portion and the gate of the door may be connected to each other by tanning bolts, and the second flange portion of the glove bag mounting portion and the load lock chamber may be connected to each other by tanning bolts. The method of claim 1,
A gate handle for opening and closing the gate of the door is located above the gate, ESCA system. The method of claim 1,
The first flange portion width (A) and the second flange portion width (A) is 10 to 21 cm, respectively,
The width (B) of the neck is 6.5 to 16.5 cm and the length (C) of the neck is 0.5 to 15 cm,
The overall length (D) of the glove bag mounting portion is 4 to 20 cm, ESCA system. The method of claim 1,
The glove bag is:
An opening that is a portion fixed to the neck of the glove bag mounting portion of the door by the fixing member;
A gas inlet capable of being connected to the inert gas cylinder;
A gas outlet for discharging the gas inside the glove bag to the outside; And
It includes a hand part which is in contact with the operator's hand so that the operator can easily handle the sample and the tool accommodated in the glove bag outside the glove bag,
After the glove bag containing the sample is connected to the glove bag mounting part of the door, before and during loading of the sample into the load lock chamber, the glove bag is removed from the inert gas cylinder so that the sample does not come into contact with oxygen in the atmosphere ESCA system in which inert gas is injected through the gas inlet. The method of claim 1,
The inert gas is any one selected from the group consisting of helium, neon, krypton, xenon, radon, argon, and nitrogen, ESCA system. delete delete The method of claim 1,
The diameter of the convex part of the sample holder tongs is 0.5mm to 2.5mm, the length of the convex part is 5mm to 25mm, and the length of the sample holder tongs is 200mm to 4OOmm, ESCA system. The method of claim 1,
The ESCA system further comprising an ESCA table on which the ESCA device can be placed, and a movable table detachable from the ESCA table and on which the glove bag can be placed. In the method of performing electron spectral chemical analysis (ESCA) of the sample using the ESCA system according to claim 6:
Accommodating a sample holder containing the sample and a tool for loading the sample into the glove bag through the opening of the glove bag;
Positioning the opening of the glove bag on the glove bag mounting portion of the door and fixing it using a fixing member;
Injecting the inert gas into the gas inlet of the glove bag and flowing the gas inside the glove bag through the gas outlet, performing a purging operation of inflating and removing the glove bag with the inert gas to the glove bag Removing oxygen from within;
Loading the sample holder into the load lock chamber by opening the door of the load lock chamber with the sample holder containing the sample; And
Performing an Electron Spectroscopy Chemical Analysis (ESCA) of the sample in the main chamber. delete

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