KR102133334B1 - Mass spectrometer - Google Patents

Abstract

Provided is a mass spectrometer capable of adjusting flow rate of a sample gas. The mass spectrometer comprises: an ion generation unit providing an ion generating passage; an ion selection unit providing an ion selection passage connected to the ion generation passage; a reaction unit providing a reaction passage connected to the ion selection passage; a second ion selection unit providing a second ion selection passage connected to the reaction passage; and an ion detection unit coupled to the second ion selection unit. The reaction passage extends in a first direction. The reaction unit includes a reaction tube extending in the first direction and defining the reaction passage and a sample inlet pipe coupled to the reaction tube. The sample inlet provides a sample inlet passage connected to the reaction passage. The reaction tube includes a distribution passage connected to the sample inlet passage and surrounding the reaction passage in the first direction and a connection inlet passage connecting the distribution passage and the reaction passage.

Description

Mass spectrometer {Mass spectrometer}

The present invention relates to a mass spectrometer, and more particularly, to a mass spectrometer capable of introducing sample gas in multiple directions.

As pollution of air and water, including fine dust, is accelerated, a method for measuring and analyzing it is required. A mass spectrometer can be used for this measurement and analysis.

A mass spectrometer is a device that identifies or analyzes chemical agents by mass spectrometry. Such a mass spectrometer can analyze the components of the sample by measuring the mass of the material as a mass-to-charge ratio. Samples can be ionized using various methods within a mass spectrometer. Ionized samples can be accelerated across electric and/or magnetic fields. That is, some or all of the ionized sample may be warped by an electric field and/or a magnetic field. The detector can detect ionized samples.

The problem to be solved by the present invention is to provide a mass spectrometer capable of introducing sample gas in multiple directions.

The problem to be solved by the present invention is to provide a mass spectrometer capable of promoting the ionization reaction of a sample gas.

The present invention is to provide a mass spectrometer that can improve the accuracy of the measurement to be solved.

The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention includes an ion generating unit providing an ion generating passage; An ion selector providing an ion selection passage connected to the ion generation passage; A reaction unit providing a reaction passage connected to the ion selection passage; A second ion selector providing a second ion selector passage connected to the reaction passage; And an ion detection unit coupled to the second ion selection unit. Including, the reaction passage is extended in a first direction, the reaction unit: a reaction tube extending in the first direction to define the reaction passage; And a sample inlet tube coupled to the reaction tube. Including, wherein the sample inlet pipe provides a sample inlet passage connected to the reaction passage, wherein the reaction tube is connected to the sample inlet passage, the distribution passage surrounding the reaction passage axially in the first direction; And a connection inflow passage connecting the distribution passage and the reaction passage. Can provide.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention may surround the distribution passage 360° in the first direction as an axis of the distribution passage.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention may extend the connection inlet passage from the distribution passage to the reaction passage in a direction perpendicular to the first direction.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention may be provided with a plurality of the connection inflow passages.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention may be arranged to be spaced apart from each other at a predetermined interval from each other.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention may be spaced apart from the sample inlet passage and the connection inlet passage at a predetermined interval in the first direction.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention may include a first quadrupole filter in which the ion selector is located in the ion selector passage.

To achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention may include a second quadrupole filter in which the second ion selector is located in the second ion selector passage.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention includes the ion detector including an ion detector, and the ion detector may be exposed to the second ion selection passage.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention further includes a carrier gas inlet positioned between the ion selector and the reaction unit, wherein the carrier gas inlet: the ion selection passage And a first connection tube defining a first connection passage connecting the reaction passage; An orifice located in the first connection passage and defining a mixing passage; And a carrier gas inlet pipe defining a carrier gas inlet passage. Including, the mixing passage is extended in the first direction, the carrier gas inlet passage is extended in a direction crossing the first direction may be connected to the mixing passage.

In order to achieve the problem to be solved, a mass spectrometer according to an embodiment of the present invention includes a first pump connected to the ion selector; A second pump connected to the reaction unit; And a third pump connected to the second ion selector.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention may further include a sample supply part connected to the sample inlet pipe.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention has the reaction passage: an enlarged reaction passage having a larger diameter toward the first direction; And a connection reaction passage connected to the enlargement reaction passage in the first direction based on the enlargement reaction passage. It may include.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention may be connected to the connecting inlet passage to the expanding reaction passage.

In order to achieve the problem to be solved, the mass spectrometer according to an embodiment of the present invention further includes a reduction reaction passage in which the reaction passage is connected to the connection reaction passage in the first direction based on the connection reaction passage. Can.

In order to achieve the object to be solved, the mass spectrometer according to an embodiment of the present invention may include the sample inlet pipe made of stainless steel.

Specific details of other embodiments of the present invention are not limited to those mentioned above, and other matters not mentioned will be clearly understood by those skilled in the art from the following description.

According to the mass spectrometer of the present invention, sample gas can be introduced in multiple directions.

According to the mass spectrometer of the present invention, it is possible to promote the ionization reaction of the sample gas.

According to the mass spectrometer of the present invention, the accuracy of measurement can be improved.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a partially cut-away perspective view of a mass spectrometer according to exemplary embodiments of the present invention.
FIG. 2 is a partially enlarged view showing a part of FIG. 1.
FIG. 3 is a partially enlarged view of the Y portion of FIG. 2.
4 is a cross-sectional view taken along line I-I' of FIG. 2.
5 is a partially enlarged view of a mass spectrometer according to exemplary embodiments of the present invention.
FIG. 6 is an enlarged view of part B of FIG. 5.
7 is a partially enlarged view of a mass spectrometer according to exemplary embodiments of the present invention.

In order to fully understand the configuration and effects of the technical spirit of the present invention, preferred embodiments of the technical spirit of the present invention will be described with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments disclosed below, and may be implemented in various forms and various changes may be made. However, the disclosure of the technical spirit of the present invention is made complete through the description of the present exemplary embodiments, and is provided to completely inform a person of ordinary skill in the art to which the present invention belongs.

Parts indicated by the same reference numerals throughout the specification indicate the same components. Embodiments described in the present specification will be described with reference to block diagrams, perspective views, and/or cross-sectional views that are ideal examples of the technical spirit of the present invention. In the drawings, the thickness of the regions is exaggerated for effective description of the technical content. Accordingly, the regions illustrated in the figures have schematic properties, and the shapes of the regions illustrated in the figures are intended to illustrate specific forms of regions of the device and are not intended to limit the scope of the invention. Although various terms are used to describe various components in various embodiments of the present specification, these components should not be limited by these terms. These terms are only used to distinguish one component from another component. The embodiments described and illustrated herein also include its complementary embodiments.

The terminology used herein is for describing the embodiments and is not intended to limit the present invention. In the present specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein,'comprises' and/or'comprising' does not exclude the presence or addition of one or more other components.

Hereinafter, the present invention will be described in detail by describing preferred embodiments of the technical spirit of the present invention with reference to the accompanying drawings.

1 is a partially cut-away perspective view of a mass spectrometer according to exemplary embodiments of the present invention.

Hereinafter, D1 in FIG. 1 may be referred to as a first direction, D2 as a second direction, D3 substantially perpendicular to the first direction D1 and the second direction D2 as the third direction.

Referring to FIG. 1, the mass spectrometer is an ion generating part (R1), an ion selecting part (R2), a carrier gas inlet part (R3), a reaction part (R4), a connecting part (R5), and a second ion selecting part (R6). And it may include a detection unit (R7). In embodiments, the mass spectrometer is an ion source supply (Sa), a microwave supply (M), a first pump (P1), a carrier gas supply (Sc), a sample supply (Ss), a second pump (P2) and a third pump (P3) and the like.

The ion generating unit R1 may include an ion generating tube 11. The ion generating tube 11 may extend in the first direction D1. The ion generating tube 11 may provide an ion generating passage C1. That is, the ion generating tube 11 may define the ion generating passage C1. The ion generating passage C1 may extend in the first direction D1. The ion generating unit R1 may be supplied with an ion source from the ion source supply unit Sa. More specifically, the ion source may be supplied to the ion generation passage C1 from the ion source supply unit Sa. The ion source may mean particles that can become ions. More specifically, the ion source may mean particles that can be reactant ions through an ionization reaction. Reagent ion may mean an ion capable of reacting with a sample gas. The ion source can include neutral molecules and the like. For example, the ion source may include nitrogen (N ₂ ), oxygen (O ₂ ), and/or water (H ₂ O). However, it is not limited to this. More details about this will be described later. The ion source may move in the first direction D1 along the ion generating passage C1. The ion source can be ionized in the ion generating passage C1. More specifically, microwaves are applied from the microwave supply unit M, so that the ion source can be ionized. That is, the ion source can be a reactant ion. For example, when the ion source includes nitrogen (N ₂ ), oxygen (O ₂ ), and/or water (H ₂ O), etc., the reactant ions are H ₃ O ⁺ , NO ⁺ , and/or O ₂ ⁺ And the like. The reactant ions may move along the first direction D1 to move to the ion selector R2. In embodiments, the ion generating passage C1 may be maintained at a very low pressure. For example, the ion generating passage C1 may be maintained at a pressure of about 0.3 torr. The ionization operation of the ion source can be performed under this low pressure close to the actual vacuum.

In the ion selector R2, reactant ions flowing from the ion generator R1 may be filtered. The ion selector R2 may include an ion selector tube 12, a first focusing member 121, a first quadrupole filter 123, a second focusing member 125, and a first pump connector 127. Can. The ion selection tube 12 may be connected to the ion generation tube 11. The ion selector tube 12 may extend in the first direction D1. The ion selection tube 12 may provide an ion selection passage C2. That is, the ion selection tube 12 may define an ion selection passage C2. The ion selection passage C2 may be connected to the ion generation passage C1. The ion selection passage C2 may extend in the first direction D1. The first focusing member 121 may be located in the ion selection passage C2. The first focusing member 121 may have a plate shape with a hole in the center. The first focusing member 121 may guide the flow of reactant ions introduced from the ion generation passage C1. The first quadrupole filter 123 may include four bars surrounding a path of reactant ions that have passed through the first focusing member 121. Each of the four bars may extend in the first direction D1. Each of the four bars may contain metal. Each of the four bars can receive a voltage from an external power supply (not shown). The first quadrupole filter 123 may form an electric field. Due to the electric field formed by the first quadrupole filter 123, a movement path of some or all of the reactant ions may be bent. When the reactant movement path of the ions is curved, only some ions may selectively pass through the second focusing member 125. Thereby, it is possible to prevent unnecessary ions from passing into the carrier gas inlet R3. That is, only the necessary reactant ions among various ions may be filtered by the first quadrupole filter 123 in the ion selector R2. For example, the necessary reactant ions may mean ions necessary for the reaction to ionize the sample gas. The second focusing member 125 may have a plate shape with a hole in the center. The second focusing member 125 may guide the flow of filtered reactant ions. The first pump connection pipe 127 may be connected to the first pump P1. By means of the first pump P1, the ion selection passage C2 can be maintained at a very low pressure. For example, the ion selection passage C2 can be maintained at a pressure of about 10 ^-5 torr. The filtering operation of the ions can be performed under such low pressure close to a practical vacuum.

The carrier gas inlet R3 may be located between the ion selector R2 and the reaction unit R4. The carrier gas inlet R3 may include a first connection pipe 131, an orifice 133, and a carrier gas inlet pipe 135. The first connection tube 131 may be coupled to the ion selection tube 12. The first connector 131 may extend in the first direction D1. The first connection pipe 131 may provide a first connection passage C3. That is, the first connection passage C3 may be defined by the first connection pipe 131. The first connection passage C3 may extend in the first direction D1. The first connection passage C3 may be connected to the ion selection passage C2. The orifice 133 may be located in the first connection passage C3. The orifice 133 may include a part of a cylindrical shape. A mixing passage 133c may be provided in the center of the orifice 133. The mixing passage 133c may be connected to the ion selection passage C2. The carrier gas inlet pipe 135 may extend in a direction crossing the first direction D1. The carrier gas inlet pipe 135 may be coupled to the first connecting pipe 131. The inner space of the carrier gas inlet pipe 135 may be connected to the mixing passage 133c. The carrier gas inlet pipe 135 may be connected to the carrier gas supply part Sc. The carrier gas may flow from the carrier gas supply part Sc through the carrier gas inlet pipe 135 to the mixing passage 133c. The carrier gas may be mixed with reactant ions in the mixing passage 133c. The carrier gas may guide the flow of reactant ions or the like in the reaction unit R4. For example, the carrier gas may form a laminar flow in the reaction part R4 to guide the flow direction of the reactant ions. The carrier gas may include an inert gas or the like. For example, the carrier gas may include nitrogen (N ₂ ), argon (Ar), and/or helium (He). Details of this will be described later.

The reaction unit R4 may include a reaction tube 14, a sample inlet tube 3, a second pump connecting tube 147, and a third focusing member 141. The reaction tube 14 may be coupled to the first connection tube 131. The reaction tube 14 may extend in the first direction D1. The reaction tube 14 may provide a reaction passage C4. That is, the reaction passage (C4) may be defined by the reaction tube (14). The reaction passage C4 may extend in the first direction D1. The reaction passage C4 may be connected to the first connection passage C3. Carrier gas and reactant ions may be introduced into the reaction passage (C4). The sample inlet tube 3 may be coupled to the reaction tube 14. The sample inlet pipe 3 may be connected to the sample supply unit Ss. The sample inlet pipe 3 may receive sample gas from the sample supply unit Ss and send it to the reaction passage C4. Details of the sample inlet pipe 3 will be described later with reference to FIGS. 2 and 3. The sample gas may include objects that require mass spectrometry. For example, the sample gas may include volatile organic compounds (VOCs). The sample gas introduced from the sample inlet pipe 3 may react with reactant ions. More specifically, the sample gas can be ionized by reacting with reactant ions. The ionized sample gas can be referred to as a sample ion. That is, the sample gas may react with reactant ions to become sample ions. The ionization reaction of the sample gas can be expressed as follows.

R ⁺ + A -> P ⁺ + N

R ⁺ may mean reactant ions. A may mean sample gas. P ⁺ may mean sample ions. N may mean that the reactant ions are neutralized after reaction with the sample gas. For example, N may again mean a neutralized ion source. The third focusing member 141 may have a plate shape with a hole in the center. The third focusing member 141 may guide the flow of ions introduced from the reaction passage C4. The second pump connection pipe 147 may be connected to the reaction passage C4. The second pump connecting pipe 147 may be connected to the second pump P2. The second pump P2 may be connected to the reaction passage C4 through the second pump connection pipe 147. By means of the second pump P2, the reaction passage C4 can be maintained at a very low pressure. For example, the reaction passage (C4) can be maintained at a pressure of about 0.5 torr. The ionization operation of the sample gas can be performed under such low pressure.

The connection portion R5 may include a second connection pipe 15. The second connector 15 may be coupled to the reaction tube 14. The second connection pipe 15 may provide a second connection passage C5. That is, the second connection passage C5 may be defined by the second connection pipe 15. The second connection passage C5 may extend in the first direction D1. The second connection passage C5 may be connected to the reaction passage C4.

The second ion selector R6 includes a second ion selector tube 16, a fourth focusing member 161, a second quadrupole filter 163, a fifth focusing member 165, and a third pump connector 167 ). The second ion selection tube 16 may be coupled to the second connection tube 15. The second ion selector tube 16 may extend in the first direction D1. The second ion selection tube 16 may provide a second ion selection passage C6. That is, the second ion selection passage C6 may be defined by the second ion selection tube 16. The second ion selection passage C6 may extend in the first direction D1. The second ion selection passage C6 may be connected to the second connection passage C5. Carrier gas and sample ions may be introduced into the second ion selection passage C6 through the second connection passage C5. The fourth focusing member 161 may be located in the second ion selection passage C6. The fourth focusing member 161 may have a plate shape with a hole in the center. The fourth focusing member 161 may guide the flow of particles introduced from the second connection passage C5. The second quadrupole filter 163 may include four bars surrounding the path of particles passing through the fourth focusing member 161. Each of the four bars may extend in the first direction D1. Each of the four bars may contain metal. Each of the four bars can receive a voltage from an external power supply (not shown). The second quadrupole filter 163 may form an electric field. Due to the electric field formed by the second quadrupole filter 163, some or all of the moving paths of particles such as sample ions may be curved. Ion particles may have different degrees of warp depending on the ratio of mass and charge. Ions that do not require measurement can bend the travel path by the electric field formed by the second quadrupole filter 163. For example, the reactant ions remaining unreacted with the sample gas in the reaction unit R4 may not be able to go straight by the second quadrupole filter 163. Ions that are not straight may not pass through the fifth focusing member 165. The fifth focusing member 165 may have a plate shape in which a hole is formed in the center. The fifth focusing member 165 may guide the flow of particles. The third pump connecting pipe 167 may be connected to the third pump P3. By the third pump P3, the second ion selection passage C6 can be maintained at a very low pressure. For example, the second ion selection passage C6 may be maintained at a pressure of about 10 ^-5 torr. The filtering operation of the sample ions can be performed under such low pressure close to a practical vacuum.

The detection unit R7 may include a detection tube 17 and a detector 171. The detection tube 17 may be coupled to the second ion selection tube 16. The detector 171 may be located within the detection tube 17. The detector 171 may be exposed to the second ion selection passage C6. As shown in FIG. 1, the normal of the detector 171 may be substantially parallel to the first direction D1. However, the present invention is not limited thereto, and the normal line of the detector 171 may form a constant angle with the first direction D1. For example, the normal of the detector 171 may be substantially perpendicular to the first direction D1. The sample ions filtered in the second ion selection passage C6 may be detected by the detector 171. For example, when the normal of the detector 171 is substantially parallel to the first direction (D1), the detector 171 is a sample ion that is not curved by the electric field formed by the second quadrupole filter 163 and goes straight. Can measure the amount of That is, when the second quadrupole filter 163 is controlled to set only some ions to go straight, the detector 171 can measure the amount of straight ions. Using the information about the electric field applied by the second quadrupole filter 163, the mass-to-charge ratio (m/z) of the ions detected by the detector 171 can be calculated by going straight ahead. . The second quadrupole filter 163 may be controlled to change the ions to go straight. You can then repeat the same task. Accordingly, the mass-to-charge ratio (m/z) can be obtained for various ions. When the measured data is compared with the data of the previously obtained mass-to-charge ratio (m/z), the mass of the particles in the sample gas and its ratio can be obtained. When the normal of the detector 171 is not parallel to the first direction D1, the detector 171 may measure the amount of sample ions bent by the electric field formed by the second quadrupole filter 163. Even in this case, the measurement method may be substantially the same or similar to the case where the normal of the detector 171 is parallel to the first direction D1.

The ion source supply unit Sa may supply an ion source to the ion generation unit R1. The ion source may supply oxygen (O ₂ ), nitrogen (N ₂ ), and/or water (H ₂ O). In embodiments, the ion source supplied by the ion source supply unit Sa to the ion generation unit R1 may be similar to the components of the atmosphere.

The microwave supply unit M may apply microwaves to the ion generating unit R1. The ion source introduced into the ion generating unit R1 may be ionized by microwaves. That is, the ion source can be ionized to become a reactant ion.

The first pump P1 may be connected to the ion selection passage C2 by the first pump connector 127. The first pump P1 may maintain the ion selection passage C2 close to a substantially vacuum state. For example, the first pump P1 may maintain the ion selection passage C2 at a pressure of about 10 ^-5 torr.

The carrier gas supply unit Sc may be connected to the mixing passage 133c through the carrier gas inlet pipe 135. The carrier gas supply unit Sc may supply carrier gas. The carrier gas may include an inert gas or the like. For example, the carrier gas may include nitrogen (N ₂ ), helium (He), and/or argon (Ar). The carrier gas may be mixed with reactant ions in the mixing passage 133c. Carrier gas may be introduced into the reaction passage (C4). The carrier gas may form laminar flow in the first direction D1 in the reaction passage C4.

The sample supply unit Ss may supply sample gas to the sample inlet pipe 3. The sample gas may include objects that require mass spectrometry. For example, the sample gas may include volatile organic compounds (VOCs). The sample gas may be introduced into the reaction passage C4 through the sample inlet pipe 3. Details of this will be described later.

The second pump P2 may be connected to the reaction passage C4 through the second pump connection pipe 147. The second pump P2 may keep the reaction passage C4 close to a substantially vacuum state. For example, the second pump P2 may maintain the reaction passage C4 at a pressure of about 0.5 torr.

The third pump P3 may be connected to the second ion selection passage C6 through the third pump connector 167. The third pump P3 may maintain the second ion selection passage C6 close to a substantially vacuum state. For example, the third pump P3 may maintain the second ion selection passage C6 at a pressure of about 10 ^-5 torr.

FIG. 2 is a partially enlarged view showing a part of FIG. 1, FIG. 3 is a partially enlarged view of the Y portion of FIG. 2, and FIG. 4 is a cross-sectional view taken along line I-I' of FIG. 2.

2, 3 and 4, the reaction tube 14 may provide a distribution passage (C91) and a connection inlet passage (C92).

The distribution passage C91 may be connected to the sample inlet pipe 3. The distribution passage C91 may extend in the first direction D1. The distribution passage C91 may surround the reaction passage C4. More specifically, the distribution passage C91 may surround the reaction passage C4 about the first direction D1. In embodiments, the distribution passage C91 may completely surround the reaction passage C4. That is, the distribution passage C91 may surround the reaction passage C4 by 360° in the first direction D1 as an axis.

The connecting inlet passage C92 may connect the distribution passage C91 and the reaction passage C4. The connection inflow passage C92 may extend in a direction intersecting the first direction D1. In embodiments, the connection inflow passage C92 may extend in a direction substantially perpendicular to the first direction D1. The connecting inlet passage C92 and the sample inlet pipe 3 may be spaced apart in the first direction D1. More specifically, the extension line of the connecting inlet passage C92 and the extension line of the sample inlet tube 3 may be spaced apart by a distance x in the first direction D1. A plurality of connection inflow passages C92 may be provided. For example, as illustrated in FIG. 4, each of the plurality of connection inflow passages C92 may be disposed spaced apart from each other with the reaction passage C4 as the center. In embodiments, each of the plurality of connection inflow passages C92 may be spaced apart from each other.

The carrier gas C and the reactant ions R ⁺ introduced into the reaction passage C4 may move in the first direction D1. The sample gas (A) introduced into the reaction passage (C4) through the sample inlet pipe (3), the distribution passage (C91) and the connecting inlet passage (C92) may react with reactant ions (R ⁺ ). That is, the sample gas A may react with reactant ions R ⁺ to become sample ions P ⁺ . Reactive reactant ions (R ⁺ ), carrier gas (C), sample ions (P ⁺ ), and ion source (N) may flow to the rear end of the reaction passage (C4).

According to the mass spectrometer according to the exemplary embodiments of the present invention, the sample gas in the inlet pipe in the sample inlet pipe may be distributed by a distribution passage. The sample gas can enter the reaction passage in various directions by distribution of the distribution passage. Therefore, the sample gas can be uniformly distributed in the reaction passage. Accordingly, the reaction of the sample gas and the reactant ions can be promoted. And the accuracy of mass spectrometry can be improved.

According to the mass spectrometer according to the exemplary embodiments of the present invention, the connecting inlet passage and the sample inlet tube may be spaced apart in the first direction. It is possible to prevent the sample gas from escaping directly into the reaction passage through the connecting inlet passage. That is, the sample gas entering the distribution passage through the sample inlet pipe can be sufficiently distributed. Therefore, the sample gas can be uniformly distributed in the reaction passage. Accordingly, the reaction of the sample gas and the reactant ions can be promoted. And the accuracy of mass spectrometry can be improved.

5 is a partially enlarged view of a mass spectrometer according to exemplary embodiments of the present invention, and FIG. 6 is a partially enlarged view of a portion B of FIG. 5.

Hereinafter, substantially identical or similar contents to those described with reference to FIGS. 1 to 4 may be omitted for convenience of description.

5 and 6, the length of the distribution passage C91 in the first direction D1 may be smaller than that described with reference to FIG. 2. The portion where the distribution passage C91 is provided may be referred to as a distribution reaction tube 143. The portion where the distribution passage C91 is not provided may be referred to as an extension reaction tube 141.

According to the mass spectrometer according to the exemplary embodiments of the present invention, the length of the distribution passage may be limited. In addition, the distribution passage may be blocked back and forth. Therefore, it is possible to prevent the sample gas entering the distribution passage through the sample inlet pipe from leaking to another place. Any sample gas can be introduced into the reaction passage. Accordingly, the reaction of the sample gas and the reactant ions can be promoted. And the accuracy of mass spectrometry can be improved.

7 is a partially enlarged view of a mass spectrometer according to exemplary embodiments of the present invention.

Hereinafter, substantially identical or similar contents to those described with reference to FIGS. 1 to 4 may be omitted for convenience of description.

Referring to FIG. 7, the reaction unit R4 may include an enlarged reaction unit R41, a connected reaction unit R42, and a reduced reaction unit R43.

The enlarged reaction unit R41 may include an enlarged reaction tube 14a. The enlarged reaction tube 14a may provide an enlarged reaction passage C41. That is, the enlarged reaction passage C41 may be defined by the enlarged reaction tube 14a. The enlarged reaction passage C41 may extend in the first direction D1. The diameter of the enlarged reaction passage C41 may increase toward the first direction D1. More specifically, the minimum diameter of the enlarged reaction passage C41 may be D1. The maximum diameter of the enlarged reaction passage C41 may be D2. The diameter of the enlarged reaction passage C41 may increase continuously from D1 to D2 as it goes toward the first direction D1.

The connection reaction unit R42 may include a connection reaction tube 14b. The connecting reaction tube 14b may provide a connecting reaction passage C42. That is, the connection reaction passage C42 may be defined by the connection reaction tube 14b. The connection reaction passage C42 may extend in the first direction D1. The connection reaction passage C42 may be connected to the enlarged reaction passage C41. The diameter of the connection reaction passage C42 may be constant in the first direction D1. In embodiments, the diameter of the connecting reaction passage C42 may be D2. That is, the diameter of the connection reaction passage C42 may be substantially the same as the maximum value of the diameter of the enlarged reaction passage C41.

The reduction reaction unit R43 may include a reduction reaction tube 14c. The reduction reaction tube 14c may provide a reduction reaction passage C43. That is, the reduction reaction passage C43 may be defined by the reduction reaction tube 14c. The reduction reaction passage C43 may extend in the first direction D1. The reduction reaction passage C43 may be connected to the connection reaction passage C42. The reduction reaction passage C43 may decrease in diameter toward the first direction D1. The maximum value of the diameter of the reduction reaction passage C43 may be substantially the same as the diameter of the connection reaction passage C42. More specifically, the maximum diameter of the reduction reaction passage C43 may be D2. The minimum diameter of the reduction reaction passage C43 may be D3. The diameter of the reduction reaction passage C43 may decrease continuously from D2 to D3 as it goes toward the first direction D1.

The sample inlet tube 3 may be coupled to the enlarged reaction tube 14a. The sample gas supplied from the sample supply unit Ss may be introduced into the enlarged reaction passage C41 through the sample inlet pipe 3, the distribution passage C91 and the connecting inlet passage C92.

According to the mass spectrometer according to the exemplary embodiments of the present invention, the diameter of the reaction tube may increase from the first half of the reaction tube toward the first direction. Therefore, the velocity of the carrier gas and the reactant ions flowing into the reaction passage and moving in the first direction may be slowed down. Accordingly, the flow of carrier gas and reactant ions can be stable. In addition, the reaction between the reactant ions and the sample gas can be accelerated. That is, the ionization of the sample gas can be actively progressed. Thereby, the accuracy of mass spectrometry can be improved.

The embodiments of the present invention have been described above with reference to the accompanying drawings, but those skilled in the art to which the present invention pertains can implement the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

Claims (16)

An ion generating unit providing an ion generating passage;
An ion selector providing an ion selection passage connected to the ion generation passage;
A reaction unit providing a reaction passage connected to the ion selection passage;
A second ion selector providing a second ion selector passage connected to the reaction passage; And
An ion detector coupled to the second ion selector; Including,
The reaction passage extends in the first direction,
The reaction unit:
A reaction tube extending in the first direction to define the reaction passage; And
A sample inlet tube coupled to the reaction tube; Including,
The sample inlet pipe provides a sample inlet passage connected to the reaction passage,
The reaction tube is:
A distribution passage connected to the sample inflow passage and surrounding the reaction passage 360° in the first direction as an axis; And
A plurality of connection inflow passages connecting the distribution passage and the reaction passage; Provides
Each of the plurality of connection inlet passages is spaced a predetermined distance from the sample inlet passage in the first direction,
The plurality of connection inflow passages are mass spectrometers arranged to be spaced apart from each other in a circumferential direction on a plane perpendicular to the first direction.
delete According to claim 1,
Each of the plurality of connection inflow passages is a mass spectrometer extending from the distribution passage to the reaction passage in a direction perpendicular to the first direction.
delete According to claim 1,
Each of the plurality of connection inlet passages are mass spectrometers spaced apart from each other at regular intervals.
delete According to claim 1,
The ion selector is a mass spectrometer including a first quadrupole filter located in the ion selection passage.
The method of claim 7,
The second ion selector is a mass spectrometer including a second quadrupole filter positioned in the second ion selector passage.
According to claim 1,
The ion detector includes an ion detector,
The ion detector is a mass spectrometer exposed to the second ion selection passage.
According to claim 1,
Further comprising a carrier gas inlet located between the ion selector and the reaction unit,
The carrier gas inlet:
A first connection tube defining a first connection passage connecting the ion selection passage and the reaction passage;
An orifice located in the first connection passage and defining a mixing passage; And
A carrier gas inlet pipe defining a carrier gas inlet passage; Including,
The mixing passage extends in the first direction,
The carrier gas inlet passage extends in a direction crossing the first direction, and the mass spectrometer is connected to the mixing passage.
According to claim 1,
A first pump connected to the ion selector;
A second pump connected to the reaction unit; And
A mass spectrometer further comprising a third pump connected to the second ion selector.
According to claim 1,
A mass spectrometer further comprising a sample supply part connected to the sample inlet pipe.
According to claim 1,
The reaction pathway is:
An enlarged reaction passage that increases in diameter in the first direction; And
A connection reaction passage connected to the enlargement reaction passage in the first direction based on the enlargement reaction passage; Mass spectrometer comprising a.
The method of claim 13,
Each of the plurality of connection inlet passages are mass spectrometers connected to the enlarged reaction passages.
The method of claim 13,
The reaction passage further comprises a reduction reaction passage connected to the connection reaction passage in the first direction based on the connection reaction passage.
According to claim 1,
The sample inlet pipe is a mass spectrometer including stainless steel (Stainless Steel).

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