KR102104090B1 - Apparatus and method for automated deposition process - Google Patents

Abstract

The present invention relates to an automatic deposition process apparatus for manufacturing a flat panel display. The automated deposition process apparatus for manufacturing the flat panel display comprises: an information acquisition unit for obtaining process information including substrate information and deposition information corresponding to display information received from a user terminal; first and second performing units receiving the process information from the information acquisition unit and performing a deposition process of an organic material layer and a deposition process of an RGB organic light emission layer based on the process information; and an evaluation unit evaluating comparing a deposition result value of the first and second performing units with an ideal result value obtained from the process information to evaluate completeness. Each of the first and second performing units may receive the ideal result value from the process information and compare the deposition result value of the organic material layer and the deposition result value of the RGB organic light emission layer.

Description

Equipment and method for automated deposition process {APPARATUS AND METHOD FOR AUTOMATED DEPOSITION PROCESS}

This application relates to automated deposition process apparatus and methods.

2. Description of the Related Art With the development of information and communication technology and the expansion of the market, flat panel displays have been used as display devices. Such flat panel display devices include liquid crystal display devices, plasma display panels, and organic light emitting diodes.

Among them, the organic light emitting device, for example, OLED has a very good advantage such as fast response speed, lower power consumption than conventional LCDs, light weight, and ultra-thin because it does not require a separate back light device. It has been widely used as display devices such as displays and flexible displays for large devices such as TVs, as well as displays and lighting devices for small devices such as mobile phones, car audio, and digital cameras.

The organic electroluminescent device is a principle of depositing an anode film, an organic thin film, and a cathode film on a substrate in order, and applying a voltage between the anode and the cathode to form an energy difference in the organic thin film to emit light by itself. In other words, the injected electrons and holes recombine, and the remaining excitation energy is generated by light.

The organic light emitting device includes an anode, a hole infection layer, a hole transfer layer, a light emitting layer, a hole blocking layer, and an electron transport layer on a substrate. A structure in which a TFT (substrate), an encapsulation layer, and a polarizing plate are stacked around an organic material layer in which films such as a transfer layer, an electron injection layer, and a cathode are sequentially stacked. In other words, the organic light emitting device includes an anode, a cathode, and a light emitting layer interposed between the anode and the cathode, and when driven, holes are injected from the anode into the light emitting layer, and electrons are injected into the light emitting layer from the cathode. Holes and electrons injected into the light emitting layer are combined in the light emitting layer to generate excitons, and these excitons emit light while transitioning from an excited state to a ground state. These organic light emitting devices may be classified into a single color or full color organic light emitting device according to the color to be implemented, and the full color is red (R), green (G), and blue (B), which are the three primary colors of light. It may be implemented by having a patterned light emitting layer.

The organic light emitting device is implemented differently according to the use purpose or the type of digital device in which the organic light emitting device is to be utilized, and accordingly, it is necessary to provide a flat panel display process system for implementing a customized flat panel display.

The background technology of the present application is disclosed in Korean Patent Registration No. 10-1032938.

The present application is to solve the problems of the prior art described above, and an object of the present invention is to provide an automated deposition process apparatus and method capable of automatically performing deposition depending on the use and type of flat panel display.

However, the technical problems to be achieved by the embodiments of the present application are not limited to the technical problems as described above, and other technical problems may exist.

As a technical means for achieving the above technical problem, an automated deposition process apparatus for manufacturing a flat panel display according to an embodiment of the present application includes a process including substrate information and deposition information corresponding to display information received from a user terminal An acquiring unit for acquiring information, a first performing unit and a second performing unit receiving the process information from the acquiring unit and performing a deposition process of an organic material layer and a deposition process of an RGB organic light emitting layer based on the process information, the first And an evaluation unit for evaluating completeness by comparing the deposition result value of the execution unit and the second execution unit with an ideal result value obtained from the process information, and each of the first execution unit and the second execution unit is calculated from the process information. Deposition result of the organic material layer and deposition result of the RGB organic light emitting layer by receiving an ideal result value You can compare.

In addition, the substrate information includes at least one or more data on the substrate of the flat panel display that has been previously produced, and the deposition information includes at least one or more organic layer deposition information and RGB organic light emitting layer deposition information included in the flat panel display. Data may include.

Further, the ideal result value may include a preset first error range and a preset second error range to include the maximum value of the first error range.

In addition, the first performing unit receives the process information, performs a manufacturing process based on the organic material layer deposition information using a plurality of process performing units included in the first performing unit, and is included in the first performing unit The plurality of process execution units may evaluate the error range by comparing each process execution result value with the ideal result value.

In addition, the second performing unit may receive the process information and perform a manufacturing process based on the RGB organic light emitting layer deposition information.

In addition, the process information is stored, the database unit for providing the process information corresponding to the display information received from the acquisition unit and the first execution unit, the second execution unit and the evaluation unit according to the output value of the user It may further include a notification unit for transmitting a notification to the terminal.

On the other hand, the automated deposition process method for manufacturing a flat panel display according to an embodiment of the present application, obtaining the process information including the substrate information and deposition information corresponding to the display information received from the user terminal, the process information Receiving and performing the deposition process of the organic material layer and the deposition process of the RGB organic light emitting layer based on the process information in the first performing part and the second performing part, and the deposition result values of the first performing part and the second performing part and the Comprising the step of evaluating the completeness by comparing the ideal result obtained from the process information, each of the first performer and the second performer receives the ideal result from the process information and the deposition result value of the organic layer and The result of deposition of the RGB organic light emitting layer can be compared.

The above-described problem solving means are merely exemplary and should not be construed as limiting the present application. In addition to the exemplary embodiments described above, additional embodiments may exist in the drawings and detailed description of the invention.

According to the above-described problem solving means of the present application, by automatically processing the deposition process of the flat panel display according to the needs of the user, there is an effect that can be automatically and conveniently produced in large quantities in accordance with the purpose of the flat panel display.

According to the above-described problem solving means of the present application, by evaluating using the first error range in the deposition process, which is the core technology of the flat panel display, and evaluating the completeness using the second error range, accuracy in the process can be increased. have.

However, the effects obtainable herein are not limited to the effects described above, and other effects may exist.

1 is a schematic configuration diagram of an automated deposition process apparatus according to an embodiment of the present application.
2 is a schematic block diagram of an automated deposition process apparatus according to an embodiment of the present application.
3 is an operational flow diagram for an automated deposition process method according to one embodiment of the present application.

Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present application pertains may easily practice. However, the present application may be implemented in various different forms and is not limited to the embodiments described herein. In addition, in order to clearly describe the present application in the drawings, parts irrelevant to the description are omitted, and like reference numerals are assigned to similar parts throughout the specification.

Throughout this specification, when a part is "connected" to another part, it is not only "directly connected", but also "electrically connected" or "indirectly connected" with another element in between. "It also includes the case where it is.

Throughout the present specification, when a member is positioned on another member “on”, “on the top”, “top”, “bottom”, “bottom”, and “bottom”, it means that a member is on another member. This includes cases where there is another member between the two members as well as when in contact.

Throughout this specification, when a part “includes” a certain component, it means that the component may further include other components, rather than excluding other components, unless specifically stated to the contrary.

An automated deposition process apparatus according to an embodiment of the present application is a device capable of depositing a flat panel display including a video display device used from a small electronic device to a large electronic device according to the purpose and purpose of use and a user's needs.

The existing developed flat panel display deposition process apparatus can deposit a plurality of flat panel displays having the same conditions using a single device.

For example, a deposition apparatus for a flat panel display may include a heater, a deposition source, and respective components. Specifically, the heater includes a block heater, a hot block heater, an aluminum heater, an hot plate heater, an external heater, a heater, and a graphite heater. (Graphite Heater) and exterior and lamp heaters (Sus & Lamp Heater) may be included, and the deposition source may include a linear source (Leaner Source) and a point source (Point Source).

In addition, as an example of a device for manufacturing a conventional flat panel display, may include a flat panel display (FPD) and an industrial metal film and coating process, and the FPD and industrial metal film and coating process may include CIGS thin film solar cells (Copper, Indium) , Gallium, Selenium Thin Film Solar Cell), OLED manufacturing process and substrate size matching process. Specifically, FPD and industrial metal film and coating processes include copper (Cu), indium (In) gallium (Ga), selenium (Se) and metal manufacturing process, CIGS thin film solar cell, Alq3, DPBVI, etc. The process of manufacturing the OLED layer using the containing metal and organic material, cutting or processing the film to 650x1100mm, the process of controlling the deposition uniformity with the organic material <± 5%, metal material ± 7%, and performing alignment accuracy of <± 4μ It may include a process of performing a process, thermal evaporation or electron beam evaporation.

Existing flat panel display deposition process equipment is implemented so that one component or device performs one operation, and a process for driving a device for manufacturing a flat panel display is also fixed so that each process performs one operation. It consists of a configuration capable of manufacturing a flat panel display. In this case, there is an advantage in that it is possible to mass-produce single varieties / small varieties of flat-panel displays, but there is a problem in that it is not efficient because multi-various small-volume production requires the production of flat-panel display deposition process equipment and flat-panel display manufacturing equipment.

Accordingly, the automated deposition process apparatus according to an embodiment of the present application is a device capable of performing deposition of a flat panel display according to a user's needs based on a purpose of use, a use purpose, a model of a digital device, and the like. It has the advantage of being able to produce small quantities of multiple types of displays.

1 is a schematic block diagram of an automated deposition process apparatus according to an embodiment of the present application, and FIG. 2 is a schematic block diagram of an automated deposition process apparatus according to an embodiment of the present application.

1 and 2, the automated deposition process apparatus 100 according to an embodiment of the present application receives display information input from the user terminal 200 and processes information based on the received display information. After obtaining, by performing a deposition process based on the process information, it is possible to perform a deposition process of a flat panel display customized to the user.

The automated deposition process apparatus 100 according to an embodiment of the present application may be utilized in a deposition process of a flat panel display. Here, the flat panel display may mean a video display device used in portable electronic devices such as laptops, digital cameras, tablet PCs, smartphones, and large digital devices such as TVs and computer monitors. Liquid Crystal Display), a plasma display panel (Plasma Display Panel), organic light emitting diodes (Organic Light Emitting Diodes), and the like.

The automated deposition process apparatus 100 according to an embodiment of the present application has an automatic process for depositing an organic material layer of a flat panel display according to a user's needs and characteristics of a flat panel display that is manufactured differently according to conditions such as a use purpose and a model of a digital device. Since it is a possible device, it is possible to perform a customized automatic process for a liquid crystal display element, a plasma display element, and an organic light emitting element included in a flat panel display, but for convenience of description herein, the process of the OLED, which is an organic light emitting element, is described below. Based on this, it will be described.

The automated deposition process apparatus 100 according to an embodiment of the present application includes an acquiring unit 110, a database unit 120, a first performing unit 130, a second performing unit 140, an evaluation unit 150, and The notification unit 160 may be included.

First, the acquiring unit 110 may acquire process information including substrate information and deposition information corresponding to display information received from the user terminal 200.

The user terminal 200 is a device capable of input and output on a display capable of transmitting the display information input from the user to the automated deposition process apparatus 100, a portable terminal, for example, a smart phone, smart Pads (SmartPad), smart TVs, tablet PCs, PCS (Personal Communication System), GSM (Global System for Mobile communication), PDC (Personal Digital Cellular), PHS (Personal Handyphone System), PDA (Personal Digital Assistant), IMT Receives user inputs such as International Mobile Telecommunication (2000), Code Division Multiple Access (CDMA) -2000, W-Code Division Multiple Access (W-CDMA), and Wibro (Wireless Broadband Internet) terminals, and displays the results on the screen It may include all kinds of wireless communication devices and wired communication devices. The user terminal 200 may receive and display display information from the user, and transmit the input display information to the automated deposition process apparatus 100.

The display information may refer to information on a display in which a flat panel display to be manufactured using the automated deposition process apparatus 100 will be used. Display information may include information about the usage (eg, smartphone, tablet PC, computer monitor, TV, etc.) and model (Galaxy S8, iPhone X, LG Ultra HD TV, iMac, etc.) where the flat panel display will be used. have. As an example, a deposition process for a flat panel display used by a user for a smartphone (for example, a specific smartphone model including the Galaxy S8, iPhone X, LG G7, or the entire smartphone released by a specific company) is used. If desired, the display information is information about the flat panel display to be used in the smartphone (for example, in the case of the Galaxy S8, information about the flat panel display used in the Galaxy S8, that is, a dual curved edge screen, 18.5: 9 display) Ratio, Quad HD + resolution, etc.), and the user terminal 200 may transmit information about the flat panel display to be used for the smartphone input from the user to the automated deposition process apparatus 100. As another example, if a user wants to perform a deposition process for a flat panel display to be used in a TV (for example, a specific TV model including Samsung Smart TV, LG Allred HD TV, or all TVs released by a specific company) , Display information is information about the flat panel display to be used in the TV (for example, in the case of LG All-red HD TV, information about the flat-panel display used in LG All-red HD TV, that is, Nano Spectrum Plus, 217cm, Ultra HD , HDR dual image quality, etc.), and the user terminal 200 may transmit information on the flat panel display to be used for the TV input from the user to the automated deposition process apparatus 100. Here, the user may mean a specific person who wants to perform a deposition process of a flat panel display.

The acquisition unit 110 may acquire process information including substrate information and deposition information corresponding to display information received from the user terminal 200, and the database unit 120 stores process information, thereby obtaining Process information corresponding to the display received from 110) may be provided.

The database unit 120 may mean a collection location in which process information corresponding to each of a plurality of display information is stored. That is, a plurality of display information may be stored in the database unit 120, and process information corresponding to each of the plurality of display information may be stored in each of the plurality of display information.

The process information may refer to detailed information related to a deposition process that is determined according to the use purpose and model of the flat panel display. The process information may include substrate information and deposition information, and each of the substrate information and deposition information may include at least one or more data corresponding to display information. The substrate information may include at least one or more data on a substrate of a previously produced flat panel display, and the deposition information may include at least one data corresponding to each of the organic material layer deposition information and the RGB organic light emitting layer deposition information included in the flat panel display. have.

For example, if one of the plurality of display information is an iPhone X which is a smartphone, the database unit 120 includes deposition process information of the flat panel display used for the iPhone X, that is, substrate information and deposition information of the flat panel display of the iPhone X. Can be saved. As another example, if one of the plurality of display information is a Samsung Smart TV, which is a TV, the database unit 120 may be stored including substrate information and deposition information of a flat panel display used in the Samsung Smart TV.

Here, the substrate information and the deposition information may include at least one or more information required in a process of an organic material layer for manufacturing a flat panel display. For example, the substrate information may include information about the substrate, for example, a substrate processing method, a material forming the substrate, and substrate size information. The deposition information may include organic material layer deposition information and RGB organic light emitting layer deposition information. The organic layer deposition information may include process information for depositing an anode, a hole injection layer, a hole transport layer, an RGB organic light emitting layer, an electron transport layer, an electron injection layer, and a cathode, which is an organic layer, for example, an organic layer deposition process type PVD (Physical Vapor Deposition) deposition, CVD (Chemical Vapor Deposition) deposition, and information related to ALD (Atomic Layer Deposition) deposition may be included, and PVD, CVD, and ALD deposition information included in each may be included. The RGB organic light emitting layer deposition information may include process information for depositing the RGB organic light emitting layer in the organic material layer, for example, the type of the light emitting layer organic material (for example, Alq3.TPD, PBD, m-MTDATA, TCTA, etc.), RGB deposition method (for example, solution process, FMM, Open Mask, Laser, etc.), full color emission layer patterning method (for example, shadow mask, inkjet printing, laser thermal transfer method, linear source, etc.) may be included.

For example, if one of the plurality of display information is a smartphone S8, the database unit 120 includes substrate information of a flat panel display used for the Galaxy S8, LTPS (Low Temperature Polycrytallina Silicon) process information, and the substrate size of the Galaxy S8. (148.9x68.1X8.0mm) information, etc. can be stored, and ALD deposition information, Alq3 emission layer organic material information, RGB deposition information using Open Mask, and laser thermal transfer information can be stored as deposition information. That is, each of the plurality of display information stored in the database unit 120 may be stored to correspond to the substrate information and deposition information, and each of the substrate information and the deposition information may store process information applicable to the corresponding display. .

Since the substrate information and the deposition information correspond to each of the plurality of display information, the first performing unit 130 and the second performing unit 140 described below may automatically perform the deposition process with reference to the substrate information. . For example, if one of the plurality of display information is the smartphone S8, the first performer 130 and the second performer 140 described below refer to the substrate information for the Galaxy S8 and the Galaxy S8. An organic material deposition process may be performed.

At this time, the substrate information may include at least one or more data on the substrate of the previously produced flat panel display, and the deposition information includes at least one data corresponding to each of the organic material layer deposition information and the RGB organic light emitting layer deposition information included in the flat panel display. Can be included.

That is, the acquiring unit 110 acquires process information including substrate information and deposition information from the database unit 120, so that the first performing unit 130 and the second performing unit 140 described below refer to the substrate information. By doing so, the deposition process of the organic material layer and the RGB organic light emitting layer may be performed.

The acquiring unit 110 may acquire process information corresponding to display information received from the user terminal 200 from the database unit 120. At this time, the acquiring unit 110 and the user terminal 200 are connected to the network 1, so that the acquiring unit 110 may receive display information from the user terminal 200.

The network 1 refers to a wireless connection structure capable of exchanging information between each node, such as a terminal and a server, and an example of such a network is a 3GPP (3rd Generation Partnership Project) network and a Long Term Evolution (LTE) network. , 5G network, World Interoperability for Microwave Access (WIMAX) network, Internet, Local Area Network (LAN), Wireless Local Area Network (LAN), Wide Area Network (WAN), Personal Area Network (PAN), Bluetooth (Bluetooth) network, a satellite broadcasting network, an analog broadcasting network, a digital multimedia broadcasting (DMB) network, and the like.

The automated deposition process apparatus 100 according to an embodiment of the present application receives the process information from the acquiring unit 110 and performs the first performing unit 130 and the second performing unit performing a manufacturing process based on the process information ( 140).

The first performing unit 130 and the second performing unit 140 may receive process information from the acquiring unit 110, respectively, and perform an organic material layer deposition process and an RGB organic light emitting layer deposition process based on the process information. Each of the first execution unit 130 and the second execution unit 140 may receive an ideal result value from the process information and compare the deposition result value of the organic material layer and the deposition result value of the RGB organic emission layer.

In detail, the first execution unit 130 receives the process information from the acquisition unit 110 and performs a manufacturing process based on the organic material layer deposition information using a plurality of process execution units included in the first execution unit 130 can do. The first performing unit 130 may receive the entire process information to perform the organic material deposition process based on the organic material deposition information, and may perform the deposition process of the flat panel display using the organic material deposition information among the entire process information. have. At this time, the first performing unit 130 may directly perform an organic material layer deposition process or configure software for driving a device for performing an organic material layer deposition process to drive the device for performing the organic material layer deposition process.

For example, when the display information received from the user terminal 200 is information about the Galaxy S8, the acquisition unit 110 among the plurality of display information stored in the database unit 120, substrate information and deposition for the Galaxy S8 Process information including information may be obtained, and the first performing unit 130 may receive process information including substrate information and deposition information. The first performing unit 130 may configure the software for driving the organic material layer deposition process or the device for performing the organic material layer deposition process with reference to the substrate information of the Galaxy S8.

At this time, the first performing unit 130 may perform an organic material layer deposition process using a plurality of process performing units. In the organic layer deposition process, the deposition process of the anode and the hole injection layer and the transport layer, and the deposition process of the hole injection layer and the transport layer and the RGB organic light emitting layer may be different from each other. In addition, the deposition process of the hole injection layer and the transport layer and the RGB organic light emitting layer and the deposition process of the electron injection layer and the transport layer and the cathode may be different from each other. Accordingly, the first execution unit 130 may perform a deposition process of an organic material layer by using a plurality of process execution units by including a plurality of process execution units to perform each deposition process. The plurality of process execution units may configure software for directly performing deposition or driving an apparatus for performing the deposition process.

After performing the deposition process based on the organic material layer deposition information, the first execution unit 130 compares each deposition result value and an ideal result value, and then compares an error result range with the plurality of process execution units included in the first execution unit 130 Can be evaluated.

An ideal result value may mean information of a flat panel display that can be theoretically derived when a flat panel display is manufactured based on substrate information and deposition information input to the database unit 120, and an ideal result value may be determined according to deposition information. An ideal result value, an ideal result value according to the organic material layer deposition information, and an ideal result value according to the RGB organic emission layer deposition information may be included in the deposition information. Further, the ideal result value may include a preset first error range and a second error range preset to include the maximum value of the first error range. The first error range may refer to a range in which the flat panel display to be manufactured through the automated deposition process apparatus 100 can be used normally, not defective, and the first error range is a percentage value converted into a certain value or a completeness as a percentage. You can. For example, if a flat panel display capable of full-color emission is produced using the deposition information of the RGB organic emission layer, the first error range may be the completeness (eg, 98%) of color output of the RGB organic emission layer. The second error range may mean a value preset to include the maximum and minimum values of the first error range. When the first error range is expressed as a constant value, the second error range may be expressed as a constant value, and when the first error range is expressed as a percent completeness, the second error range may also be expressed as a percentage completeness. In this case, when the first error range is expressed as a percent completeness, the second error range may mean a value that is preset to include the minimum value of the first error range (eg, when the first error range is 98%, The second error range may be 98% to 98.5%). For example, to manufacture a flat panel display including an organic material layer having a size of 148.9x68.1X8.0mm, and when the first error range is 148.7x67.9x7.8mm to 149.1x68.3x8.2mm, the second error range is 148.7 x67.9x7.8mm to 148.8x68.0x7.9mm and 149.0x68.2x8.1mm to 149.1x68.3x 8.2mm.

The first error range and the second error range may be included in an ideal result value to correspond to each of the substrate information and the deposition information, and the type of the emission layer organic material, the RGB deposition method, and the pool included in the organic material deposition information and the RGB organic emission layer deposition information. An ideal result value including a first error range and a second error range may be allocated so as to correspond to all information included in each process information such as a color emission layer patterning method. Therefore, the theoretical description of the ideal result value including the first error range and the second error range mentioned in the description of the second execution unit 140 and the evaluation unit 150 is as follows. ) Can be applied in the same principle, and the error range evaluation and the completeness evaluation using an ideal result value can also be applied in the same principle as the first execution unit 130 described above.

After performing the manufacturing process based on the organic material layer deposition information, the first performing unit 130 according to an embodiment of the present application may evaluate the error range by comparing the deposition result value and the ideal result value. When deposition of the organic material layer of the flat panel display is completed through the first performing unit 130, an error range may be evaluated by comparing an ideal result value of deposition information, which is deposition information of the completed organic material layer, and theoretically derived organic material layer deposition information. .

If the organic material layer of the flat panel display manufactured through the first performing unit 130 does not exist within the first error range of the ideal result value of the organic material deposition information, the notification unit 160 processes the first performing unit 130 The stop signal may be transmitted to the user terminal 200.

The notification unit 160 is a means for transmitting a notification to the user terminal 200 according to the output values of the first execution unit 130 and the second execution unit 140 and the evaluation unit 150 described later, where the notification is a user A sound is output so that specific information (for example, process stop signals, error signals, and defective product discovery signals) of the first and second execution units 130 and 140 may be provided from the user terminal 200, It may mean that specific information is displayed. If the organic material layer of the flat panel display manufactured through the first performing unit 130 does not exist within the first error range of the ideal result value of the organic material deposition information, the notification unit 160 processes the first performing unit 130 By outputting a stop signal, the defective substrate can be checked by the user. In addition, when the organic material layer of the flat panel display manufactured through the first performing unit 130 falls within a certain number of times within the second error range of the ideal result value of the organic material deposition information, the notification unit 160 may perform the first performing unit 130 A process confirmation signal for can be output. If, when a specific number of times set by the user terminal 200 from the user is 10 times, the organic material layer produced through the first performing unit 130 belongs to the ideal error value more than 10 times within the second error range, the notification unit ( 160) may output a process confirmation signal for the first performer 130. Accordingly, by setting a second error range for each of the process information and measuring a case in which a specific number of times falls within the second error range, the process accuracy of the first and second execution units 130 and 140 can be further improved. There is an effect that can increase the completeness of the flat panel display to be produced.

In one embodiment of the present application, the first performer 130 is indicated to evaluate the error range by comparing the deposition result value and the ideal result value of the first performer 130, but is not limited thereto. For example, the error range may be evaluated by comparing the deposition result value and the ideal result value of the first performer 130 in the second performer 140. The second execution unit 140 compares the deposition result value and the ideal result value of the first execution unit 130 to evaluate the error range, and then receives a process stop signal or a process confirmation signal for the first execution unit 130. The user terminal 200 may be transmitted through the notification unit 160.

The second performer 140 may receive process information from the acquirer 110 and perform a manufacturing process based on the RGB organic light emitting layer deposition information. That is, the second performing unit 140 may receive the entire process information to perform the deposition process of the RGB organic light emitting layer of the flat panel display, and the manufacturing process of the flat panel display using the RGB organic light emitting layer deposition information of the entire process information You can do At this time, the second performing unit 140 may directly perform the deposition process or configure software for driving the device that performs the deposition process to drive the device that performs the deposition process.

For example, display information received from the user terminal 200 is information about the Galaxy S8, RGB organic light emitting layer deposition information for the Galaxy S8 is Alq3 as the light emitting layer organic material, RGB deposition information using an open mask, and laser thermal transfer method In the case of including information on, the second performing unit 140 uses the light emitting layer organic material as Alq3, performs RGB deposition using an Open Mask, and performs a full color light emitting layer patterning using a laser thermal transfer method, Software for performing an RGB organic emission layer deposition process or driving a device for performing the deposition process may be configured.

After performing the manufacturing process based on the deposition process information, the second execution unit 140 may evaluate the error range by comparing the deposition result value with the ideal result value.

For example, the error range can be evaluated by comparing the completeness and ideal result values of the RGB organic light emitting layer manufactured using the second performer 140. The completeness of the organic thin film manufactured using the second performer 140 may be calculated including the amount of the organic material, the deposition degree, the emission degree of the emission layer, and the patterning completion degree.

If the RGB organic light-emitting layer of the flat panel display manufactured by the second performing unit 140 does not exist within the first error range of the ideal result value of the process information, the notification unit 160 displays the second performing unit 140 The process stop signal may be transmitted to the user terminal 200. In addition, when the RGB organic light emitting layer of the flat panel display manufactured through the second execution unit 140 falls within a certain number of times within a second error range of an ideal result value of the process information, the notification unit 160 may display the second execution unit 140 ) Can output a process confirmation signal.

In one embodiment of the present application, the second execution unit 140 is indicated to evaluate the error range by comparing the deposition result value and the ideal result value of the second execution unit 140, but is not limited thereto. For example, the evaluation unit 150 may evaluate the error range by comparing the process execution result value and the ideal result value of the second execution unit 140.

The evaluation unit 150 may evaluate the completeness by comparing the deposition result values of the first execution unit 130 and the second execution unit 140 with ideal result values obtained from process information.

The evaluation unit 150 may evaluate the completeness by comparing an ideal result with a flat panel display manufactured according to the process execution results of the entire first execution unit 130 and the second execution unit 140.

In each of the first execution unit 130 and the second execution unit 140 according to an embodiment of the present application described above, the deposition result value and the ideal result value of each of the first execution unit 130 and the second execution unit 140 To evaluate the error range by comparing, but not limited to, the evaluation unit 150 compares the ideal result according to the deposition result values of the first performer 130 and the second performer 140, respectively. The process stop signal or the process confirmation signal for evaluating the error range of the 1 execution unit 130 and the second execution unit 140 may be transmitted to the user terminal 200 through the notification unit 160.

In addition, the first performing unit 130 and the second performing unit 140 may be arbitrarily performed as necessary in a deposition process, rather than sequentially performing a deposition process.

The automated deposition process apparatus according to an embodiment of the present application has an effect of automatically and conveniently producing a large amount in accordance with the use of the flat panel display by automatically processing the deposition process of the flat panel display according to a user's needs. In addition, by evaluating using a first error range in a deposition process, which is a core technology of a flat panel display, and evaluating completeness using a second error range, accuracy in a process can be improved.

Hereinafter, based on the details described above, the operation flow of the present application will be briefly described.

3 is an operational flow diagram for an automated deposition process method according to an embodiment of the present application.

The automated deposition process method illustrated in FIG. 3 may be performed by the automated deposition process apparatus 100 described above. Therefore, even if omitted, the description of the automated deposition process apparatus 100 may be applied to the description of the automated deposition process method.

First, process information including substrate information and deposition information corresponding to display information received from the user terminal 200 may be obtained (S301).

Next, by receiving the process information, the deposition process of the organic material layer and the deposition process of the RGB organic light emitting layer may be performed by the first performer 130 and the second performer 140 based on the process information (S302).

Next, the completeness may be evaluated by comparing the deposition result values of the first performer 130 and the second performer 140 with the ideal result obtained from the process information (S303).

In the above description, steps S301 to S303 may be further divided into additional steps or combined into fewer steps, depending on the implementation herein. In addition, some steps may be omitted if necessary, and the order between the steps may be changed.

The automated deposition process method according to an embodiment of the present application may be implemented in a form of program instructions that can be executed through various computer means and may be recorded on a computer readable medium. The computer-readable medium may include program instructions, data files, data structures, or the like alone or in combination. The program instructions recorded on the medium may be specially designed and configured for the present invention, or may be known and available to those skilled in computer software. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs, DVDs, and magnetic media such as floptical disks. -Hardware devices specially configured to store and execute program instructions such as magneto-optical media, and ROM, RAM, flash memory, and the like. Examples of program instructions include high-level language code that can be executed by a computer using an interpreter, etc., as well as machine language codes produced by a compiler. The hardware device described above may be configured to operate as one or more software modules to perform the operation of the present invention, and vice versa.

Further, the above-described automated deposition process method may also be implemented in the form of a computer program or application executed by a computer stored in a recording medium.

The above description of the present application is for illustrative purposes, and those skilled in the art to which the present application pertains will understand that it is possible to easily modify to other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present application is indicated by the claims, which will be described later, rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be interpreted to be included in the scope of the present application.

100: automated deposition process equipment
110: acquisition unit
120: database unit
130: first performing unit
140: second performance unit
150: evaluation unit
160: notification unit

Claims (5)

An automated deposition process device for manufacturing flat panel displays,
An acquiring unit for acquiring process information including substrate information and deposition information corresponding to display information received from a user terminal;
Based on the first performing part and the RGB organic light emitting layer deposition information including a plurality of process performing parts receiving the process information and performing the organic material layer deposition process of the flat panel display to perform the organic material layer deposition process based on the organic material layer deposition information A second performing unit that receives the process information and performs a deposition process of the RGB organic light emitting layer of the flat panel display to perform a deposition process of the RGB organic light emitting layer;
An evaluation unit for evaluating the completeness by comparing the deposition result values of the first execution unit and the second execution unit with ideal result values obtained from the process information;
A database unit that stores the process information and provides the process information corresponding to display information received from the acquisition unit; And
Notification unit for transmitting a notification to the user terminal according to the output value of the first execution unit, the second execution unit and the evaluation unit,
Including,
The evaluation unit receives the ideal result value from the process information and compares the deposition result value of the organic material layer of the first execution unit and the deposition result value of the RGB organic emission layer of the second execution unit,
The ideal result is
A second error range preset to include a preset first error range and a minimum and maximum value of the first error range,
The first execution unit and the second execution unit,
The order of the deposition process of each performer can be adjusted,
The notification unit, if each of the deposition result value of the organic material layer and the deposition result value of the RGB organic light emitting layer does not exist within the first error range, the user terminal receives a process stop signal for each of the first execution unit and the second execution unit. When the result of the deposition of the organic material layer and the deposition result of the RGB organic light emitting layer are repeatedly present in the second error range more than a predetermined number of times, processes for each of the first performing part and the second performing part Automated deposition process device that transmits a confirmation signal to the user terminal. According to claim 1,
The substrate information includes at least one or more data on the substrate of the flat panel display that has been produced.
The deposition information includes at least one data corresponding to each of the organic material layer deposition information and the RGB organic light emitting layer deposition information included in the flat panel display,
Automated deposition process equipment. According to claim 1,
The first performance unit,
Receiving the process information and performing a manufacturing process based on the organic material layer deposition information using a plurality of process execution units included in the first execution unit,
The plurality of process execution units included in the first execution unit compares each process execution result value with the ideal result value to evaluate an error range,
Automated deposition process equipment. According to claim 1,
The second performance unit,
Receiving the process information and performing a manufacturing process based on the RGB organic emission layer deposition information,
Automated deposition process equipment. As an automated deposition process method for manufacturing a flat panel display,
Obtaining process information including substrate information and deposition information corresponding to display information received from a user terminal by an acquiring unit;
Receiving the process information to perform an organic material layer deposition process based on the organic material layer deposition information by a plurality of process execution units included in the first execution unit and performing the organic material layer deposition process of the flat panel display;
Receiving the process information to perform a deposition process of the RGB organic emission layer of the flat panel display by receiving the process information to perform a deposition process of the RGB organic emission layer based on the deposition information of the RGB organic emission layer by a second performing unit;
Evaluating the completeness by comparing the deposition result values of the first and second performers and the ideal result obtained from the process information by an evaluation unit;
Providing the process information stored in the process information and corresponding to display information received from the acquisition unit; And
Transmitting a notification to the user terminal according to output values of the first execution unit, the second execution unit, and the evaluation unit,
And includes
The evaluation unit receives the ideal result value from the process information and compares the deposition result value of the organic material layer of the first execution unit and the deposition result value of the RGB organic emission layer of the second execution unit,
The ideal result is
A first error range preset and a second error range preset to include minimum and maximum values of the first error range,
The notification unit performing the step of transmitting the notification may be applied to each of the first performing unit and the second performing unit when the result of depositing the organic material layer and the result of depositing the RGB organic light emitting layer are not within the first error range. When the process stop signal is transmitted to the user terminal, and the result of depositing the organic material layer and the result of depositing the RGB organic light emitting layer are repeatedly present within a second error range, the first performing unit and the first 2 The process confirmation signal for each performer is to be transmitted to the user terminal, an automated deposition process method.

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