KR102084102B1 - Manufacturing method of functional conductor and functional conductor - Google Patents

Abstract

The present invention relates to a functional conductor and a method of manufacturing the same, the functional conductor according to an embodiment of the present invention, the heating panel, the plate on one side of the heat conduction occurs; A plate disposed on the other side of the plate and spaced apart from each other to generate heat; A lattice disposed between the plate on one side and the plate on the other side, forming a closed space between the plate on one side and the plate on the other side, and conducting heat conduction; An enclosed space formed by the plate on one side, the plate on the other side, and the lattice, and radiating heat from the inner side of the plate on the one side to the inner side of the plate on the other side; And a fluid filled in the closed space and conducting heat convection and conduction. It includes a unit structure including a.

Description

{Manufacturing method of functional conductor and functional conductor}

The present invention relates to a functional conductor and a method for producing the functional conductor.

Insulation is used to reduce heat transfer by increasing the temperature difference between surfaces and is used in clothes, construction, and machinery. The heat transfer is conducted by conduction, convection, and radiation, and the conventional heat insulator has been developed to maximize the heat insulation performance by interfering with these three heat transfer methods as much as possible.

However, in recent years, the development of a passive reactor safety system requires a functional conductor whose thermal insulation performance changes with temperature. For example, in low temperature environments in normal operation, low thermal conductivity is needed to protect the device, and in high temperature environments in an accident, a high thermal conductivity is required for heat dissipation of the entire system.

Conventionally, nuclear power plants have been superior to hydroelectric power generation, thermal power generation, and various other alternative energies in terms of economic efficiency, safety, and environmental preservation, and have been established as important power generation means. Nuclear power generation uses electricity from fission to produce electricity, so nuclear power plants have multiple protections, including cladding, coolant, reactor vessels, and containment vessels, to prevent leakage of radiation generated during power generation. It has a reactor cooling system.

More specifically, the Three Mile Island (TMI) accident in 1979 and the Chernobyl accident in 1986 increased interest and research in the safety of nuclear power, resulting in a nuclear safety culture, an improved reactor cooling system, and a new reactor model. And the like. However, as can be seen from the 2011 nuclear accident in Japan, the present nuclear power plant has been found to have problems in removing the residual heat of the reactor and preventing the leakage of radioactive materials in the event of a power plant accident.

In other words, the 2011 Japanese nuclear power plant accident occurred due to the fact that external power was not supplied due to earthquakes and tsunamis, and thus cooling water for removing residual heat of the reactor was not smoothly injected. Therefore, in order to prevent such an accident, It can be seen that passive cooling systems such as natural convection are needed, not active cooling systems.

In response to these needs, a variety of reactors with passive driven condensation systems have been proposed, and some have already entered commercialization. For example, Westinghouse's pressurized water reactor (AP1000) -type nuclear power plant, as described in the journal "Energy Procedia 7 (2011) 293-302", uses a high thermal conductivity steel containment vessel without direct heat exchanger. Remove any residual heat out of the containment vessel.

More specifically, the Westinghouse pressurized water reactor (AP1000) -type nuclear power plant, in the water tank located above the containment vessel by flowing water to the outer surface of the containment vessel and the natural convection of the air to store the steam generated by the residual heat of the reactor Featuring condensation on the inner surface of the vessel, four power plants are under construction in China.

However, the AP1000 power plant, although its stability has been proven, has a disadvantage in terms of price by using a steel containment vessel. Therefore, in order to solve this disadvantage, a passive condensation system using a cheaper concrete containment vessel in terms of price is required. It is desirable to provide a pressurized water reactor-type nuclear power plant consisting of the present invention, but the structure of the reactor structure or the method of constructing the reactor that satisfies all such requirements is not suggested.

On the other hand, existing heat insulating material using glass or glass fiber shows a tendency to increase the thermal conductivity as the temperature rises, but the above-mentioned passive reactor system does not meet the required performance. In addition, the manufacturing method of the existing insulation material is difficult to arbitrarily control the increase tendency according to the thermal conductivity temperature. This is because the conventional heat insulator has a low density in order to obtain high heat conductivity at high temperature, and thus high heat conductivity is obtained even at low temperature, thereby causing a phenomenon in which it does not function as a heat insulator.

Republic of Korea Patent No. 10-0804405 discloses a cooling water circulation device and a cooling water circulation method for circulating the cooling water in the gap between the reactor vessel and the heat insulating material. Specifically, in order to circulate and supply the cooling water to the gap between the reactor vessel and the heat insulating material surrounding it, the opening / closing is made possible by the buoyancy device which is lifted up / down by buoyancy and the lifting / lowering of the buoyancy device. By installing the cooling water circulation system, the cooling water supplied to the reactor vessel can be smoothly circulated and supplied to the reactor vessel outer wall for cooling the reactor vessel during abnormal operation of the reactor, and the structure is simple and easy to install, and it can be packaged or separately It can be installed immediately and can be applied to nuclear reactors, and it can be opened and operated only in abnormal operation to prevent malfunction of the device, and to disclose the coolant circulation device and circulation method to improve the reliability of the device. have.

However, the patent document has a problem that the cost is increased by installing a separate cooling water circulation device, and also performs a heat insulation function during the normal operation of the reactor as the heat insulating material, but a disadvantage that can not perform a heat radiation function during abnormal operation. have.

Republic of Korea Patent No. 10-0804405

It is an object of the present invention to provide a functional conductor for controlling thermal conductivity over temperature by controlling heat transfer by conduction, convection and radiation between insulating surfaces.

In addition, to provide a method for producing a functional conductor that has a high thermal insulation performance at low temperatures, and greatly reduces the thermal insulation performance at high temperatures.

Functional conductor according to an embodiment of the present invention, the plate on one side of the heat conduction occurs; A plate disposed on the other side of the plate and spaced apart from each other to generate heat; A lattice disposed between the plate on one side and the plate on the other side, forming a closed space between the plate on one side and the plate on the other side, and conducting heat conduction; An enclosed space formed by the plate on one side, the plate on the other side, and the lattice, and radiating heat from the inner side of the plate on the one side to the inner side of the plate on the other side; And a fluid filled in the closed space and conducting heat convection and conduction. It includes.

Method for producing a functional conductor according to an embodiment of the present invention, the step of preparing a plate of one side (step 1); Disposing the plate of the other side spaced apart from the plate of the one side (step 2); Disposing a lattice to form a closed space between the plate on one side and the plate on the other side (step 3); And filling a fluid into the closed space (step 4). It characterized in that it comprises a unit structure.

The functional conductor and the method for manufacturing the functional conductor according to the embodiment of the present invention can freely adjust the thermal conductivity according to the temperature according to the control of the design parameters.

In addition, there is an advantage that can be effectively used in a variety of plant environments that require different characteristics depending on the temperature.

In addition, additional equipment costs can be reduced and reliable performance can be obtained.

1 is a diagram showing a unit structure of a functional conductor according to an embodiment of the present invention.
2 is a diagram showing a functional conductor according to an embodiment of the present invention.
3 is a view showing a heat transfer method according to the unit structure components of a functional conductor according to an embodiment of the present invention.
4 is a diagram showing a thermal resistance diagram of the unit structure components of the functional conductor according to an embodiment of the present invention.
5 is a view showing the aggregate according to the shape of the unit structure of the functional conductor according to an embodiment of the present invention.
6 is a view showing the aggregate according to the shape of the unit structure of the functional conductor according to another embodiment of the present invention.
7 is a graph showing thermal conductivity according to temperature of conductors according to examples and comparative examples of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. However, embodiments of the present invention may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. In addition, embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art. Accordingly, the shape and size of elements in the drawings may be exaggerated for clarity, and the elements represented by the same reference numerals in the drawings are the same elements. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and functions. In addition, "comprising" any component throughout the specification means that, unless specifically stated otherwise, it may further include other components, not to exclude other components.

Functional conductor

1 is a view showing a unit structure of a functional conductor according to an embodiment of the present invention, Figure 2 is a view showing a functional conductor according to an embodiment of the present invention.

1 and 2, the functional conductor 100 according to an embodiment of the present invention includes a plate 110 on one side where heat conduction occurs; A plate 120 disposed on the other side of the plate 110 and spaced apart from each other to generate heat; Disposed between the plate 110 on one side and the plate 120 on the other side, and forms a closed space 140 between the plate 110 on the one side and the plate 120 on the other side, and conducts heat. A grating 130 in which is generated; It is formed by the plate 110 of the one side, the plate 120 and the grid 130 of the other side, from the inner side of the plate 110 of the one side in the direction of the inner side of the plate 120 An enclosed space 140 in which radiation of heat occurs; And a fluid (150) filled in the closed space (140) where convection and conduction of heat occurs; It includes a unit structure including (Figure 1).

The conduction of heat may occur in the plate 110 on one side and the plate 120 on the other side. Specifically, conduction of heat from outside may occur from the outer surface to the inner surface of the plate 110 of the one side, the outer surface from the inner surface of the plate 120 of the other side. The thermal conductivity of the plate on one side and the plate on the other side of the plate on one side and the plate on the other side is preferably 10 W / m · K or more. This is because the rapid temperature difference between the outer and inner surfaces of the side plates resulting from lower thermal conductivity inhibits radiant heat transfer between the inner and outer surfaces of one side and the other.

The plate 110 on one side and the plate 120 on the other side may have a thickness of 0.5 mm to 5 mm, and the material may be metal or ceramic. If the thickness of the plate 110 on one side and the plate 120 on the other side is less than 0.5mm, there is a problem that the structural integrity of the conductor is lowered, and when the thickness of more than 5mm, the thickness of the conductor is too thick.

3 is a view showing a heat transfer method according to the unit structure components of a functional conductor according to an embodiment of the present invention.

Referring to FIG. 3, the plate 120 of the other side is disposed spaced apart from the plate 110 of the one side, and the inside of the plate 120 of the other side from the inner side of the plate 110 of the one side. Radiation can occur in the lateral direction. The Stefan-Boltzmann law states that the total amount of energy released from an object is proportional to the square of the object's temperature (absolute temperature) T, which is affected by radiant heat transfer at high temperatures. The heat transfer method by radiation is different from convection or heat conduction, and thus heat can be transferred from a high temperature body to a low temperature body instantaneously at the same speed as light without a material that mediates heat around.

Functional conductor according to an embodiment of the present invention may be formed by a plurality of unit structures are aggregated, thereby performing a radiant heat transfer as a plurality of unit structures at a time bar to perform a thermal insulation function in a low temperature environment suddenly high temperature environment When exposed to heat radiation by heat transfer can be performed by itself without having a separate device can have the functionality to switch from heat insulation to heat radiation.

Inner side and outer side of the plate 110 and the plate 120 of the other side Emissivity ε may be 0.65 to 0.95. To this end, it is possible to paint the surface or to apply a powder spray of high emissivity material, for example graphite spray. If the emissivity is less than 0.65 radiant heat transfer does not occur sufficiently there is a problem that the radiation is not made sufficiently in a high temperature environment, in the case of more than 0.95 there is a problem that the radiation occurs more than necessary even in a low temperature environment is not enough to perform the insulation function. In particular, the emissivity of the outer surface is irrelevant to conduction of most of the heat when the conductor and the structure to be protected are closely contacted, but when the outer surface emissivity is 0.8 or more when the structure is separated from the heat source or the conductor, it is unexpected in the spaced interval. There is an advantage that can prevent a sudden gradient of temperature.

Radiation heat transfer of the functional conductor according to an embodiment of the present invention is the exposed area of the inner surface of the plate 110 and the plate 120 of the other side, the distance between the inner side and the plate and the other side of the side It can also be affected by the plate thickness.

5 is a view showing the aggregate according to the shape of the unit structure of the functional conductor according to an embodiment of the present invention, Figure 6 is a view showing the aggregate according to the shape of the unit structure of the functional conductor according to another embodiment of the present invention to be.

5 and 6, the grating 130 of the functional conductor according to an embodiment of the present invention is disposed between the plate 110 on one side and the plate 120 on the other side, A space 140 is formed between the plate 110 and the plate 120 on the other side, and heat conduction may occur.

The shape of the plate 110 of one side and the plate 120 of the other side may be polygonal, in particular rectangular, the grid 130 of the plate 110 of the one side and the plate 120 of the other side It may have a rectangular shape to form a closed space 140 therebetween.

In the grating 130, heat conduction may occur. In order for the functional conductor according to an embodiment of the present invention to perform a sufficient thermal insulation function, the thermal conductivity of the grating 130 is preferably 0.1 to 1.0 W / m · k, and the material may be ceramic or metal. If the thermal conductivity is greater than 1.0 W / m · k, there is a problem that the thermal insulation function is not sufficiently performed.

The length ratio of the grating 130 to the plate length of the one side or the other side is preferably 0.2 or less. Referring to FIG. 1, the plate length of one side or the other side refers to the vertical length of the plate, and the length of the grating refers to the horizontal length of the grating.

If the ratio is longer than 0.2 because the length of the lattice is longer, heat transfer due to convection is increased, thereby insufficiently performing adiabatic function, and the performance varies depending on the installation position in the direction of gravity. In this case, the length of the grating may be 10 to 100 mm.

Since the length of the grating 130 corresponds to the length from the inner side of the plate 110 of the one side to the inner side of the plate 120 of the other side, if the length is less than 10 mm, insulation by the fluid layer is If not, there is a problem that the thermal insulation is not sufficiently performed in a low temperature environment, if the length is more than 100 mm, the volume of the functional conductor is excessively large, there may be a difficulty in filling the fluid 150.

Functional conductor according to an embodiment of the present invention is formed by the plate 110 of one side, the plate 120 and the grating 130 of the other side, the other side from the inner side of the plate 110 of the one side It may include an enclosed space 140 in which heat radiation occurs in the direction of the inner surface of the plate 120 of the side, and may include a fluid 150 filled in the enclosed space 140, the convection and conduction of heat occurs Can be.

The fluid 150 may be one selected from the group consisting of air, helium, nitrogen, and water. More specifically, the fluid 150 is made of air when used as a functional conductor in a general air environment, but may be used by filling a liquid such as water or another gas such as helium or nitrogen. This invention does not specifically limit this.

4 is a diagram showing a thermal resistance diagram of the unit structure components of the functional conductor according to an embodiment of the present invention.

Referring to FIG. 4, heat conduction and convection may occur in the fluid 150. In a low temperature environment, the heat conduction function is performed due to the conduction and convection of heat of the fluid 150 and the conduction of heat of the lattice 130, and then, when exposed to a sudden high temperature environment, the inner surface of the plate 110 of the one side may be Radiation heat transfer to the inner surface of the plate 120 on the other side mainly occurs to perform a heat dissipation function.

In the case of common conductors, the protection of the device from heat may be carried out, but in environments where heat dissipation is required, additional provision for heat dissipation shall be provided. Functional conductor according to an embodiment of the present invention is to switch the protection of the device and the heat dissipation of the system by itself can reduce the additional equipment cost, it is possible to obtain a reliable performance.

Functional conductor according to an embodiment of the present invention controls the emissivity of the inner and outer surfaces of the plate 110 and the plate 120 of the other side, between the exposed area, the inner surface of the inner side The radiant heat transfer can be controlled by adjusting the distance of.

In addition, the conduction of heat can be controlled by adjusting the material, the cross-sectional area and the thickness of the grating 130, and the convection and conduction of heat is controlled by adjusting the type of fluid 150 and the thickness and length of the fluid 150 layer. Can be. Therefore, there is an advantage that can be utilized in various fields in a variety of plant environments that require different characteristics depending on the temperature as well as the reactor.

Furthermore, the functional conductor according to an embodiment of the present invention can increase the application area of the conductor by stacking the unit structure of the conductor perpendicular to the heat transfer direction. In addition, the shape of the plate 110 on one side, the plate 120 on the other side and the grating 130 may be applied to a curved structure. On the other hand, the unit structure of the conductor can be stacked in parallel with the heat transfer direction to obtain additional thermal insulation performance. At this time, the performance of the conductor assembly is not directly proportional to the number of unit structures due to its characteristics. This is due to the large change in performance with temperature due to the influence of radiant heat transfer rather than heat conduction or convection. However, the performance of the functional conductor according to the present invention can be predicted from the performance according to the temperature of the unit structure.

Method of making functional conductor

Method for producing a functional conductor according to an embodiment of the present invention, preparing a plate 110 of one side (step 1); Disposing the plate 120 on the other side and spaced apart from the plate 110 on the one side (step 2); Disposing a grid (130) to form a closed space (140) between the plate (110) on one side and the plate (120) on the other side; And filling the sealed space 140 with the fluid 150 (step 4). It characterized in that it comprises a unit structure.

In addition, the emissivity of the inner surface of the plate 110 of the one side and the plate 120 of the other side may further include adjusting to be 0.65 to 0.95, the plate 110 and the other side of the one side Emissivity of the outer surface of the plate 120 may further comprise adjusting to be 0.65 to 0.95.

Emissivity (ε) of the inner surface and the outer surface of the plate 110 and the plate 120 of the other side is adjusted to be 0.65 to 0.95 to apply a paint on the surface or powder spray of high emissivity material, For example, graphite spray can be applied. If the emissivity is less than 0.65 radiant heat transfer does not occur sufficiently there is a problem that the radiation is not made sufficiently in a high temperature environment, in the case of more than 0.95 there is a problem that the radiation occurs more than necessary even in a low temperature environment it is not enough to perform the insulation function. In particular, the emissivity of the outer surface is irrelevant to most of the heat conduction when the conductor and the structure to be protected are closely contacted, but when the outer surface emissivity is 0.8 or more when the structure is separated from the heat source or the conductor, it is unexpected in the spaced interval. There is an advantage that can prevent a sudden gradient of temperature.

Including the steps 1 and 2, heat radiation may occur from the inner surface of the plate 110 of one side to the inner surface of the plate 120 of the other side. In addition, heat conduction may occur in the grating 130 including the steps 3 and 4, and convection and conduction of heat may occur in the fluid 150 to perform a function as a conductor.

In the method of manufacturing a functional conductor according to an embodiment of the present invention, the length ratio of the grating 130 to the length of the plate on one side or the other side may be adjusted to be 0.2 or less. Referring to FIG. 1, the plate length of one side or the other side refers to the vertical length of the plate, and the length of the grating refers to the horizontal length of the grating. If the ratio is longer than 0.2 because the length of the lattice is longer, heat transfer due to convection is increased, thereby insufficiently performing adiabatic function, and the performance varies depending on the installation position in the direction of gravity. In this case, the length of the grating may be 10 to 100 mm.

Since the length of the grating 130 corresponds to the length from the inner surface of the plate 110 on one side to the inner surface of the plate 120 on the other side, when the length is less than 10 mm, the fluid layer is in a low temperature environment. There is a problem that the insulation is not sufficiently performed, if the length is more than 100 mm, the volume of the functional conductor is excessively large, there may be a difficulty in filling the fluid 150.

In the method of manufacturing a functional conductor according to an embodiment of the present invention, the shape of the plate 110 and the other side of one side may be a polygon, in particular rectangular. The method may further include combining a plurality of the unit structures.

The unit structure formed by the above steps 1 to 4 can be piled up and down and left and right repeatedly to form a single heat insulation assembly. The unit structure is generally a rectangular parallelepiped shape for the performance measurement, but the structural integrity or overall To improve performance, you can have a polyhedron, such as a honeycomb or a soccer ball. This invention does not specifically limit this.

In the method of manufacturing a functional conductor according to an embodiment of the present invention, in step 4, the fluid 150 may be one selected from the group consisting of air, helium, nitrogen, and water. More specifically, the fluid 150 is filled with the atmosphere when used as a functional conductor in a general atmospheric environment, but may be filled with other gases such as helium or nitrogen, or liquid such as water. However, when using a fluid with low thermal conductivity, it is preferable to use a fluid with low thermal conductivity because the performance conversion between heat insulation and heat dissipation is maximized.

It is intended that the invention not be limited by the foregoing embodiments and the accompanying drawings, but rather by the claims appended hereto. Accordingly, various forms of substitution, modification, and alteration may be made by those skilled in the art without departing from the technical spirit of the present invention described in the claims, which are also within the scope of the present invention. something to do.

<Examples 1 to 7>

The functional conductors were simulated using commercial computational fluid analysis software while changing specifications as shown in Table 1 to obtain thermal conductivity.

The plates on one side and the other side simulated SS 316 material and the emissivity of the inside and outside of each plate was 0.8. As a rectangular grating disposed between the plate on one side and the plate on the other side spaced apart from each other and forming a closed space between the plate on the one side and the plate on the other side, a ceramic Lumiboard L-14Z was used. . The thermal conductivity of the lattice was 0.14 W / m · K. The enclosed space was filled with air (atmosphere) with fluid.

Plate thickness on one side and plate thickness on the other side
(mm) Distance between medial faces
(mm) Medial surface area
(mm ² ) Thermal conductivity
(W / mK) Example 1 3 19 576 0.135 Example 2 3 19 4761 0.161 Example 3 3 19 20736 0.169 Example 4 2 21 4761 0.177 Example 5 2 21 5041 0.1824 Example 6 One 23 5041 0.2021 Example 7 One 23 20736 0.2126

According to the table, it can be seen that the thermal conductivity of the functional conductor can be adjusted by actually adjusting the thickness of the plate, the distance between the inner surface and the exposed area of the inner surface.

Experimental Example 1

Measurement of thermal conductivity with temperature change

In order to check the thermal conductivity of the conductor according to the temperature change, the following experiment was performed.

The thermal conductivity of the functional conductor according to Example 7 of the present invention was measured using a standardized protective hotplate technique (ISO 3802, ASTM C177 technical standard) while increasing the temperature, and the results are shown in FIG. The same graph shows the thermal conductivity provided by Kaowool's commercial 1600 paper and Lumiboard L-14Z's sales company. According to Figure 7, the functional conductor according to the present invention can be seen that the thermal conductivity rapidly rises as the temperature rises compared to the commercial insulation. Specifically, commercial insulation materials have a thermal conductivity of less than 0.20 W / m · K even when the temperature rises above 600 ° C., while the functional conductor of the embodiment according to the present invention already has a thermal conductivity of 0.3 W, for example, at a temperature of about 200 ° C. It can be seen that exceeds / m · K, through which, it can be seen that the functional conductor according to the present invention can effectively perform the heat radiation function in a high temperature environment, for example, accident environment.

100: functional conductor
110: plate on one side
120: plate on the other side
130: grid
140: closed space
150: fluid

Claims (17)

A plate on one side where heat conduction occurs;
A plate disposed on the other side of the plate and spaced apart from each other to generate heat;
A lattice disposed between the plate on one side and the plate on the other side, forming a closed space between the plate on one side and the plate on the other side, and conducting heat conduction;
An enclosed space formed by the plate on one side, the plate on the other side, and a lattice, wherein heat radiation is generated from the inner side of the plate on one side to the inner side of the plate on the other side; And
A fluid filled in the sealed space and conducting heat convection and conduction; Including a unit structure including,
The inner and outer surfaces of the plate of the one side and the plate of the plate of the other side is treated so that the emissivity is 0.8 to 0.95,
Functional conductor, characterized in that to perform the heat insulation or heat dissipation function according to the temperature environment of the heating element.
delete delete The method of claim 1,
The plate of one side and the plate of the other side is 0.5mm to 5mm in thickness, the material is a functional conductor.
The method of claim 1,
The grating has a thermal conductivity of 0.1 W / m · k to 1.0 W / m · k, and the material is ceramic.
The method of claim 1,
Functional conductor of the lattice length to the plate length of the one side or the other side is 0.2 or less.
The method of claim 1,
The shape of the plate of one side and the plate of the other side is a functional conductor of the polygon.
The method of claim 7, wherein
Wherein said polygon is a rectangular functional conductor.
The method of claim 1,
The fluid is one kind of functional conductor selected from the group consisting of air, helium, nitrogen, and water.
Treating the inner and outer surfaces to prepare a plate of one side having an emissivity of 0.8 to 0.95 (step 1);
Treating the inner side and the outer side to prepare a plate of the other side having an emissivity of 0.8 to 0.95, and placing the plate apart from the plate of the one side (step 2);
Disposing a lattice to form a closed space between the plate on one side and the plate on the other side (step 3); And
Filling the sealed space with a fluid (step 4); Method for producing a functional conductor to perform a heat insulation or heat dissipation function according to the temperature environment of the heating element to form a unit structure comprising a.
The method of claim 10,
The method of manufacturing a functional conductor further comprising the step of combining a plurality of the unit structure.
delete delete The method of claim 10,
The method of manufacturing a functional conductor to adjust so that the ratio of the length of the lattice to the plate length of the one side or the other side is 0.2 or less.
The method of claim 10,
The shape of the plate of the one side and the plate of the other side is a method for producing a functional conductor is a polygon.
The method of claim 15,
Wherein the polygon is a rectangle.
The method of claim 10,
The method of claim 4 wherein the fluid is one kind selected from the group consisting of air, helium, nitrogen and water.

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