KR102068575B1 - Apparatus for rotation drive - Google Patents

Abstract

An embodiment of the present invention provides a rotation driving device capable of rotating a mirror of high mass by a high frequency. The rotation driving device comprises a base unit, a support unit, a driving unit, and a voltage applying unit. The base unit has a pair of coupling mounts provided to be opposite to each other. The support unit has each of both end units rotatablly coupled to a coupling mount so as to be rotated based on a virtual central axis connecting the pair of coupling mounts. The driving unit has a one end unit coupled to the base unit and the other end unit coupled to the support unit and is provided in a pair to be symmetric to each other based on the central axis so as to repeatedly rotate the support unit in both directions while the pair of driving units is repeatedly stretched and contracted in opposite to each other. The voltage applying unit applies voltage to the pair of driving units by allowing the pair of driving units to be repeatedly stretched and contracted in opposite to each other.

Description

Rotary drive device {APPARATUS FOR ROTATION DRIVE}

The present invention relates to a rotation drive device, and more particularly to a rotation drive device capable of rotating a heavy weight mirror at a high frequency.

In general, with the development of various portable electronic devices such as mobile phones, PDAs, notebook computers, there is an increasing demand for a display device for light and small size that can be applied thereto. As such display devices, liquid crystal displays (LCDs), plasma display panels (PDPs), field emission displays (FEDs), and vacuum fluorescent displays (VFDs) have been actively studied.

In the process of producing the display panel, inspect the panel's appearance before assembling the backlight and driving circuit, and check for any foreign substances or stains remaining on the panel, defects in the circuit wiring itself, uniformity of the space between the bonded substrates, and scratches. Will be examined.

For example, during the inspection of the display panel, there are various inspection processes by repeatedly changing the light path and using the changed and irradiated light.

However, in order to change the light path repeatedly, it is necessary to rotate the reflector such as a mirror stably and precisely, and a rotation driving device is used for this purpose.

Conventional rotary drive has repeatedly rotated the mirror by using the forward and reverse rotation of the motor. However, when the motor is used, it is difficult to implement the forward and reverse rotation of the motor in a very short period. For example, there is a problem in that the configuration is complicated to rotate the mirror in a short period of about 100 Hz.

In addition, when the weight of the mirror is a heavy weight of about 10 kg, it is more difficult to rotate the heavy mirror in a short cycle.

Republic of Korea Patent Publication No. 2016-0113385 (Published September 29, 2016)

In order to solve the above problems, the technical problem to be achieved by the present invention is to provide a rotation drive device capable of rotating a heavy weight mirror at a high frequency.

The technical problem to be achieved by the present invention is not limited to the technical problem mentioned above, and other technical problems not mentioned above may be clearly understood by those skilled in the art from the following description. There will be.

In order to achieve the above technical problem, an embodiment of the present invention includes a base portion having a pair of coupling mounts provided to face each other; A support portion rotatably coupled to the coupling mount at both ends to rotate about an imaginary central axis connecting the pair of coupling mounts; A driving unit having one end coupled to the base and the other end coupled to the support, the pair being symmetrical with respect to the central axis and repeatedly rotating the support in both directions while repeatedly extending and contracting oppositely; And it provides a rotational drive device including a voltage applying unit for applying a voltage to the pair of drive unit so that the pair of drive unit is repeatedly extended and contracted opposite to each other.

In an embodiment of the present invention, the driving unit is provided with a piezoelectric actuator that extends in the longitudinal direction when a voltage is applied, and extends in the width direction of the piezoelectric actuator at both ends of the piezoelectric actuator in the longitudinal direction, and extends and contracts the piezoelectric actuator. A pair of moving parts which reciprocate in the longitudinal direction of the piezoelectric actuator in connection with and connected to one end of the pair of moving parts respectively provided on one side in the width direction of the piezoelectric actuator, when the piezoelectric actuator is deformed. Flexurally deformed in the width direction of the piezoelectric actuator, the first elastic deformation portion coupled to the base portion and provided on the other side of the piezoelectric actuator are connected to the other ends of the pair of moving portions, respectively, when the piezoelectric actuator is deformed. A second elastic deformation portion flexibly deformed in the width direction of the piezoelectric actuator, and An end portion may be connected to the second elastic deformation portion, extend in the width direction of the piezoelectric actuator, and the other end may have a third elastic deformation portion connected to the support portion.

In an embodiment of the present invention, the first elastic deformation portion is formed to have a plurality of first nodes spaced apart in the longitudinal direction of the first elastic deformation portion, the width smaller than the width of the first node, A first elastic hinge connecting the first node and a second elastic hinge connecting the first node and the moving part and having a width smaller than the width of the first node; The first node in the center of one node may be coupled to the base portion.

In an embodiment of the present invention, the second elastic deformation portion is formed to be symmetrical to the first elastic deformation portion with respect to the piezoelectric actuator, and a first node in the center of the first node of the second elastic deformation portion is formed in the first elastic deformation portion. 3 may be connected to one end of the elastic deformation portion.

In an embodiment of the present invention, the third elastic deformation portion is formed to have a plurality of second nodes and a thickness smaller than the thickness of the second node provided in the longitudinal direction of the third elastic deformation portion, A third elastic hinge connecting the second node and a thickness smaller than a thickness of the second node, and between a first node in the center of the first node and the second node of the second elastic deformation part; The fourth elastic hinge and the fourth elastic hinge is disposed at the longitudinal center of the third elastic deformation portion, the second node is the piezoelectric actuator when the expansion and contraction of the The second elastic member is rotated in the thickness direction of the third elastic deformation part, and the second node provided at the other end of the third elastic deformation part of the second node may be coupled to the support part.

In an embodiment of the present invention, comprising an elastic bearing provided between the coupling mount and the support, wherein the elastic bearing to rotate in the opposite direction of the direction in which the support is rotated when the support is rotated in one direction Elastic resilience can be provided.

In an exemplary embodiment of the present invention, the voltage applying unit may apply a positive voltage and a negative voltage to each of the driving units at the same time so that each of the driving units can be extended and contracted opposite to each other.

In an embodiment of the present invention, the voltage applying unit may apply a reference voltage of the same magnitude in advance to the pair of driving units before applying a positive voltage and a negative voltage to each of the driving units at the same time.

According to the embodiment of the present invention, by using the drive unit having a piezoelectric actuator it is possible to stably rotate the heavy support portion to which the mirror is coupled at a high frequency.

In addition, according to an embodiment of the present invention, since the voltage applying unit applies the operating voltage in a state in which the reference voltage is previously applied, it is possible to generate a large differential force even with a relatively small operating voltage, through which the support unit The micro rotational displacement can be controlled more precisely, and the micro rotational frequency can be controlled higher.

In addition, according to the embodiment of the present invention, it is possible to help the micro-reciprocating rotation of the support to be made more stable by using the elastic bearing.

It is to be understood that the effects of the present invention are not limited to the above effects, and include all effects deduced from the configuration of the invention described in the detailed description or claims of the present invention.

1 is a perspective view showing a rotation driving apparatus according to an embodiment of the present invention.
Figure 2 is an exploded perspective view showing a rotary drive device according to an embodiment of the present invention.
Figure 3 is a front view showing a drive unit of the rotary drive device according to an embodiment of the present invention.
Figure 4 is a front exemplary view showing an operation example of the drive unit of the rotary drive device according to an embodiment of the present invention.
Figure 5 is a plan view showing a drive unit of the rotary drive device according to an embodiment of the present invention.
6 is a plan view showing an example of the operation of the drive unit and the support of the rotary drive device according to an embodiment of the present invention.
7 is an exemplary view showing a method of applying a voltage in the voltage applying unit of the rotary drive device according to an embodiment of the present invention.
8 is an exemplary view showing an operation example in which the rotary drive device is operated in the manner of FIG.
9 is a perspective view showing the elastic bearing of the rotary drive device according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like parts throughout the specification.

Throughout the specification, when a part is said to be "connected" (connected, contacted, coupled) with another part, it is not only "directly connected" but also "indirectly connected" with another member in between. Also includes the case where In addition, when a part is said to "include" a certain component, this means that unless otherwise stated, it may further include other components rather than excluding the other components.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, the terms “comprise” or “have” are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a rotary drive device according to an embodiment of the present invention, Figure 1 (a) and (b) shows the rotary drive device from different directions. And Figure 2 is an exploded perspective view showing a rotary drive device according to an embodiment of the present invention.

As shown in FIG. 1 and FIG. 2, the rotation driving apparatus may include a base part 100, a support part 200, a driving part 300, and a voltage applying part 400.

The base unit 100 may form a base of the rotation driving apparatus, and may have a coupling mount 110 on the upper and lower portions, respectively. Coupling mount 110 may be provided in a pair, it may be provided to face each other. Coupling mount 110 may have the same virtual central axis (C1).

The support 200 may be rotatably coupled to the pair of coupling mounts 110. Specifically, the upper and lower centers of the support portion 200 may be provided with a coupler 210, respectively, between the coupler 210 and the coupling mount 110 to mate with each other the elastic bearing 500 Can be combined. The support part 200 may rotate based on a virtual center axis C1 connecting the pair of coupling mounts 110. The elastic bearing 500 will be described later.

The mirror 250 may be attached to the front of the support part 200. The mirror 250 may be integrally rotated with the support 200.

The driving part 300 may be provided such that one end is coupled to the base part 100 and the other end is coupled to the support part 200. The driving unit 300 may be provided in a pair, and may be spaced apart from each other so as to be symmetrical with respect to the central axis C1.

The driving unit 300 may be extended and contracted by repetitively opposite to each other, through which the support 200 may be repeatedly rotated in both directions.

Figure 3 is a front view showing a drive unit of the rotary drive device according to an embodiment of the present invention, Figure 4 is a front exemplary view showing an operation example of the drive unit of the rotary drive device according to an embodiment of the present invention, It further demonstrates including 3 and FIG.

The driving part 300 may have a piezoelectric actuator 310, a moving part 320, a first elastic deformation part 330, a second elastic deformation part 340, and a third elastic deformation part 350.

The piezoelectric actuator 310 may expand when voltage is applied and return to an initial state when the voltage supply is stopped. That is, it can shrink. Through this, the piezoelectric actuator 310 may be extended in the longitudinal direction when the voltage is applied to transfer the force.

The moving unit 320 may be provided in pairs at both ends of the piezoelectric actuator 310 in the longitudinal direction A1. The moving part 320 may extend in the width direction A2 of the piezoelectric actuator 310. The moving unit 320 may reciprocate in the longitudinal direction A1 of the piezoelectric actuator 310 in association with the extension and contraction of the longitudinal direction A1 of the piezoelectric actuator 310. Referring to FIG. 3, when the piezoelectric actuator 310 extends in the longitudinal direction A1, the moving part 320 provided on the upper portion of the piezoelectric actuator 310 may move upward, and the lower portion of the piezoelectric actuator 310 may be moved. The moving unit 320 provided in the may move downward.

The first elastic deformation part 330 may be provided at one side of the piezoelectric actuator 310 in the width direction A2. In addition, the first elastic deformation parts 330 may be connected to one ends of the pair of moving parts 320, respectively. The first elastic deformation part 330 is a direction perpendicular to the deformation direction of the piezoelectric actuator 310 when the piezoelectric actuator 310 is deformed in the longitudinal direction A1, that is, the width direction A2 of the piezoelectric actuator 310. Can be flexurally deformed. The first elastic deformation portion 330 may have a flexible elastic hinge structure of straight and round as a whole.

In detail, the first elastic deformation part 330 may have first nodes 331a and 331b, a first elastic hinge 332, and a second elastic hinge 333.

A plurality of first nodes 331a and 331b may be provided and spaced apart from each other along the longitudinal direction of the first elastic deformation part 330.

The first elastic hinge 332 may be formed to have a width smaller than the width of the first nodes 331a and 331b, and may be connected between the first nodes 331a and 331b. The first elastic hinge 332 may be formed in a shape in which the first elastic hinge 332 is concave in a round shape. The first elastic hinge 332 may be disposed outside based on the longitudinal center C2 of the first elastic deformation part 330.

The second elastic hinge 333 may be formed to have a width smaller than the width of the first nodes 331a and 331b, and may be connected between the first node 331b and the moving part 320. The second elastic hinge 333 may be formed in a shape that is concave in a round shape in the first elastic deformation part 330. The second elastic hinge 333 may be disposed inwardly based on the longitudinal center C2 of the first elastic deformation part 330.

Figure 4 (a) shows the state of Figure 3, when the piezoelectric actuator 310 as shown in Figure 4 (b) in the initial state as shown in Figure 4 (a) is deformed to stretch, respectively The moving unit 320 is moved in a direction away from each other. Then, a force for extending the first elastic deformation part 330 by the moving part 320 is applied to the first elastic deformation part 330. However, the first elastic hinge 332 and the second elastic hinge 333 are disposed at positions opposite to each other with respect to the longitudinal center C2 of the first elastic deformation portion 330, and in particular, the first elastic hinge 333. Since 332 is disposed outside based on the longitudinal center C2 of the first elastic deformation part 330, the first nodes 331a and 331b may be moved closer to the piezoelectric actuator 310. That is, the first elastic deformation part 330 may be bent and deformed in the direction of the piezoelectric actuator 310. At this time, the moving distance of the first node 331a in the center of the first node (331a, 331b) may be the largest, the first node 331a in the center may be coupled to the base portion (100).

On the other hand, when the elongation deformation of the piezoelectric actuator 310 is stopped and contracted to return the piezoelectric actuator 310 to its initial form, the first elastic deformation portion 330 is moved away from the piezoelectric actuator 310 so as to move away from the piezoelectric actuator 310. Can return to the initial state as in a).

The second elastic deformation part 340 may be provided on the other side of the piezoelectric actuator 310 in the width direction A2. In addition, the second elastic deformation parts 340 may be connected to the other ends of the pair of moving parts 320, respectively. The second elastic deformation part 340 may be formed to be symmetrical to the first elastic deformation part 330 based on the piezoelectric actuator 310. In addition, the second elastic deformation part 340 may be bent and deformed in the width direction of the piezoelectric actuator 310 when the piezoelectric actuator 310 is deformed in the longitudinal direction A1.

The second elastic deformation part 340 may have first nodes 341a and 341b, a first elastic hinge 342, and a second elastic hinge 343.

A plurality of first nodes 341a and 341b may be provided and spaced apart from each other along the longitudinal direction of the second elastic deformation part 340.

The first elastic hinge 342 may be formed to have a width smaller than the width of the first nodes 341a and 341b, and may be connected between the first nodes 341a and 341b. The first elastic hinge 342 may be formed in a shape formed concave in a round shape in the second elastic deformation part 340, and outwardly based on the longitudinal center C3 of the second elastic deformation part 340. Can be arranged.

The second elastic hinge 343 may be formed to have a width smaller than the width of the first nodes 341a and 341b, and may be connected between the first node 341b and the moving part 320. The second elastic hinge 343 may be formed in a shape that is concave in a round shape in the second elastic deformation part 340, and may be inward with respect to the longitudinal center C3 of the second elastic deformation part 340. Can be arranged.

When the piezoelectric actuator 310 is deformed to extend as shown in FIG. 4B in the initial state as shown in FIG. 4A, the second elastic deformation part 340 is close to the piezoelectric actuator 310. Can be flexibly deformed. Among the first nodes 341a and 341b, the moving distance of the first first node 341a may be the largest, and the first first node 341a may be coupled to the third elastic deformation part 350.

When the extension deformation of the piezoelectric actuator 310 is stopped and contracted to return the piezoelectric actuator 310 to its initial form, the second elastic deformation portion 340 is moved away from the piezoelectric actuator 310 to be moved away from the piezoelectric actuator 310 to FIG. 4A. Can be returned to an initial state such as The second elastic deformation part 340 may be driven to be symmetrical with the first elastic deformation part 330 around the piezoelectric actuator 310.

5 is a plan view showing a drive unit of the rotary drive device according to an embodiment of the present invention, Figure 6 is a plan view showing an example of the operation of the drive unit and the support of the rotary drive device according to an embodiment of the present invention, In the following description, FIG. 5 and FIG. 6 are further included.

One end of the third elastic deformation part 350 may be connected to the second elastic deformation part 340 and may extend in the width direction A2 of the piezoelectric actuator 310. The other end of the third elastic deformation part 350 may be connected to the support part 200.

In detail, the third elastic deformation part 350 may have second nodes 351a and 351b, a third elastic hinge 352, and a fourth elastic hinge 353.

The second nodes 351a and 351b may be provided in plural and may be spaced apart from each other along the longitudinal direction of the third elastic deformation part 350.

The third elastic hinge 352 may be formed to have a thickness smaller than the thickness of the second nodes 351a and 351b, and may be connected between the second nodes 351a and 351b. The third elastic hinge 352 may be formed in a shape that is concave in a round shape in the third elastic deformation part 350.

The fourth elastic hinge 353 may be formed to have a thickness smaller than the thickness of the second nodes 351a and 351b, and the center of the first node of the second node 351a and the second elastic deformation part 340. It is possible to connect between the first node (341a). The fourth elastic hinge 353 may be formed in a shape in which the fourth elastic hinge 353 is concave in a round shape. The third elastic hinge 352 and the fourth elastic hinge 353 may be disposed at the longitudinal center C4 of the third elastic deformation part 350.

As shown in FIG. 6, when the piezoelectric actuators of the pair of driving units 300 are repeatedly stretched and contracted in opposition to each other, the second elastic deformation part 340 is deflected or moved away from the piezoelectric actuators so as to be close to the piezoelectric actuators. Can be flexibly deformed. Then, the third elastic deformation part 350 reciprocates in the width direction A2 of the piezoelectric actuator. On the other hand, since each of the third elastic deformation portion 350 is coupled to the support portion 200, when the third elastic deformation portion 350 reciprocates in the width direction A2 of the piezoelectric actuator, the third elastic deformation portion 350 Bending occurs at the hinge 352 and the fourth elastic hinge 353. In the meantime, the second nodes 351a and 351b may be rotated in the thickness direction A3 of the third elastic deformation part 350, and the support part 200 may be reciprocally rotated about the central axis C1. .

The moving part 320, the first elastic deformation part 330, the second elastic deformation part 340, and the third elastic deformation part 350 may be integrally formed, and stress generated during deformation may cause yield stress. It is preferable not to exceed. The moving part 320, the first elastic deformation part 330, the second elastic deformation part 340, and the third elastic deformation part 350 may be made of a material that satisfies these conditions. There is no limitation.

7 is an exemplary view showing a method of applying a voltage in the voltage applying unit of the rotary drive device according to an embodiment of the present invention, Figure 8 is an illustration showing an example of the operation of operating the rotary drive device according to the method of FIG. It is also.

First, as shown in FIG. 8A, when the voltage is not applied to the driving units 300a and 300b, the support unit 200 is in a fixed state. In this case, the positions of the second elastic deformation parts 340a and 340b are referred to as the first position P1.

As shown in (a) of FIG. 7, the voltage applying unit 400 (see FIG. 2) may apply a voltage to the piezoelectric actuators 310a and 310b of the pair of driving units, and thus, the pair of piezoelectric actuators. The 310a and 310b may be repeatedly stretched and shrunk in opposition to each other.

The voltage applying unit 400 may initially apply the reference voltage V0 having the same magnitude to the piezoelectric actuators 310a and 310b of each driving unit in advance. When the reference voltage V0 is initially applied to the amplifiers 410a and 410b, the amplified voltages may be applied to the respective piezoelectric actuators 310a and 310b. Here, the reference voltage V0 may be a positive voltage.

When the reference voltage V0 is applied to the piezoelectric actuators 310a and 310b, as shown in FIG. 8 (b), the second elastic deformation parts 340a and 340b are contracted to the second position P2 and the third voltage is increased. As the elastic deformation parts 350a and 350b are pulled, the support part 200 is pulled. Here, since the driving mechanisms of the pair of driving units 300a and 300b are the same, the support unit 200 does not rotate when the same reference voltage V0 is applied to each of the piezoelectric actuators 310a and 310b. Will not. Here, the displacement difference between the first position P1 and the second position P2 may be a small displacement difference.

Subsequently, when the voltage applying unit 400 applies the sinusoidal operating voltage V as shown in (b) of FIG. 7, each of the piezoelectric actuators 310a and 310b has a positive voltage and a negative voltage V2. It can be applied alternately at the same time.

That is, as shown in FIG. 7A, a positive voltage V1 is applied to one of the piezoelectric actuators 310a and a negative voltage V2 is applied to the other piezoelectric actuator 310b. Can be. Then, as shown in FIG. 8C, the second elastic deformation part 340a of the driving part 300a to which the positive voltage V1 is applied is further contracted to move to the third position P3, and the negative voltage ( The second elastic deformation part 340b of the driving part 300b to which V2) is applied may be relaxed and moved to the fourth position P4. Accordingly, the support part 200 may be rotated based on the central axis C1, and each of the third elastic deformation parts 350a and 350b may be rotated by the support part 200 and the respective driving parts 300a and 300b. Deformation such as bending, rotation, etc. is made corresponding to the shape deformation of the support part 200 and the second elastic deformation parts 340a and 340b to be stably connected.

As such, the voltage applying unit 400 may apply a positive voltage and a negative voltage to each of the piezoelectric actuators 310a and 310b at the same time to generate a differential force, thereby driving each of the driving units 300a and 300b. By extending and contracting opposite to each other, the support 200 may be repeatedly rotated.

On the other hand, if the reference voltage V0 is applied in advance, the piezoelectric actuator can be pre-stretched, so that one of the piezoelectric actuators can be further extended and the other piezoelectric actuator can be relaxed by the applied operating voltage. In this way, a relatively large differential force can be obtained even if the magnitude of the applied operating voltage is small.

On the other hand, if only the operating voltage is applied without applying the reference voltage in advance, even if the operating voltage of the same magnitude as in the case of applying the reference voltage in advance, the differential force is relatively small.

In the present invention, since the voltage applying unit 400 applies the operating voltage V in a state in which the reference voltage V0 is previously applied, a large differential force can be generated even with a relatively small operating voltage V. And, through this, it is possible to control the micro rotational displacement of the support 200 more precisely, it is possible to control the micro rotational frequency of the support 200 more high. According to the present invention, the support 200 having a weight of 10 kg or more can be quickly driven to 100 Hz or more.

9 is a perspective view showing the elastic bearing of the rotary drive device according to an embodiment of the present invention.

As shown in FIGS. 2 and 9, the elastic bearing 500 may have a first fixing ring 510, a second fixing ring 520, an insertion ring 530, and an elastic bar 540.

The first fixing ring 510 may be coupled to the coupling mount 110 and may have a first protruding surface 511 protruding from a portion of the inner circumferential surface.

The second fixing ring 520 may be coupled to the coupler 210 of the support 200. The second fixing ring 520 may have a second protruding surface 521 protruding from a portion of the inner circumferential surface, and the second protruding surface 521 may have a first protrusion based on the center of the second fixing ring 520. It may be formed to be symmetrical to the surface 511.

The insertion ring 530 may have a first insertion piece 531 and a second insertion piece 535.

The first insertion piece 531 and the second insertion piece 535 may be provided in pairs spaced apart from each other inside the first fixing ring 510 and the second fixing ring 520.

The first insertion piece 531 may be coupled to the outer circumferential surface of the first protrusion 511 and may not be connected to the second fixing ring 520.

In addition, an outer circumferential surface of the second insertion piece 535 may be coupled to the second protrusion surface 521, and may not be connected to the first fixing ring 510.

The elastic bar 540 may be provided in the radial direction of the insertion ring 530 inside the insertion ring 530. One end of the elastic bar 540 may be coupled to the first insertion piece 531, and the other end of the elastic bar 540 may be coupled to the second insertion piece 535. Through this, the elastic bar 540 may connect the first insertion piece 531 and the second insertion piece 535. A plurality of elastic bars 540 may be provided.

In the state in which the first fixing ring 510 is coupled to the coupling mount 110 and the second fixing ring 520 is coupled to the coupler 210 of the support unit 200, the support unit is operated by the operation of the driving unit 300. When the 200 is rotated in one direction, deformation of the elastic bar 540 is generated, thereby generating an elastic restoring force. This elastic restoring force acts as a force for rotating the support part 200 in a direction opposite to the direction in which it is currently rotating. This restoring force generated by the elastic bearing 500 may help to make the micro reciprocation rotation of the support 200 more stable.

The foregoing description of the present invention is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the invention is indicated by the following claims, and it should be construed that all changes or modifications derived from the meaning and scope of the claims and their equivalents are included in the scope of the invention.

100: base portion
200: support
250 mirror
300, 300a, 300b: drive section
310, 310a, 310b: piezo actuator
330: first elastic deformation part
340: second elastic deformation portion
350: third elastic deformation part
400: voltage applied
500: elastic bearing

Claims (8)

A base portion having a pair of coupling mounts provided to face each other;
A support portion rotatably coupled to the coupling mount at both ends to rotate about an imaginary central axis connecting the pair of coupling mounts;
A driving unit having one end coupled to the base unit and the other end coupled to the support unit, the pair being provided to be symmetrical with respect to the central axis and repeatedly rotating the support unit in both directions while repeatedly stretching and contracting opposite to each other;
A voltage applying unit configured to apply a voltage to the pair of driving units such that the pair of driving units are repeatedly stretched and shrunk in opposite directions; And
It includes an elastic bearing provided between the coupling mount and the support,
The elastic bearing is a rotation drive device characterized in that to provide an elastic restoring force to be rotated in a direction opposite to the direction in which the support is rotated when the support is rotated in one direction. A base portion having a pair of coupling mounts provided to face each other;
A support portion rotatably coupled to the coupling mount at both ends to rotate about an imaginary central axis connecting the pair of coupling mounts;
A driving unit having one end coupled to the base unit and the other end coupled to the support unit, the pair being provided to be symmetrical with respect to the central axis and repeatedly rotating the support unit in both directions while repeatedly stretching and contracting opposite to each other; And
And a voltage applying unit configured to apply a voltage to the pair of driving units such that the pair of driving units are repeatedly stretched and shrunk oppositely to each other.
And the voltage applying unit alternately applies a positive voltage and a negative voltage to each of the driving units so that each of the driving units is extended and contracted opposite to each other. The method according to claim 1 or 2,
The driving unit
A piezoelectric actuator extending in the longitudinal direction when a voltage is applied,
A pair of moving parts provided at both ends of the piezoelectric actuator in the longitudinal direction and extending in the width direction of the piezoelectric actuator and reciprocating in the longitudinal direction of the piezoelectric actuator in association with the extension and contraction of the piezoelectric actuator;
A first elastic deformation provided at one side in the width direction of the piezoelectric actuator and connected to one end of the pair of moving parts, the first elastic deformation bent and deformed in the width direction of the piezoelectric actuator when the piezoelectric actuator is deformed, and coupled to the base part; Wealth,
A second elastic deformation part provided on the other side of the piezoelectric actuator and connected to the other ends of the pair of moving parts, and bent and deformed in the width direction of the piezoelectric actuator when the piezoelectric actuator is deformed;
One end portion is connected to the second elastic deformation portion and extending in the width direction of the piezoelectric actuator and the other end has a third elastic deformation portion connected to the support portion. The method of claim 3,
The first elastic deformation part
A plurality of first nodes spaced apart along the longitudinal direction of the first elastic deformation part;
A first elastic hinge formed to have a width smaller than the width of the first node, and connecting the first nodes;
It is formed to have a width smaller than the width of the first node, and has a second elastic hinge connecting between the first node and the moving part,
The first node of the center of the first node is coupled to the base unit. The method of claim 4,
The second elastic deformation portion is formed to be symmetrical to the first elastic deformation portion with respect to the piezoelectric actuator,
The first node in the center of the first node of the second elastic deformation portion is connected to one end of the third elastic deformation portion. The method of claim 5,
The third elastic deformation part
A plurality of second nodes spaced apart along the longitudinal direction of the third elastic deformation part;
A third elastic hinge formed to have a thickness smaller than the thickness of the second node, and connecting the second nodes;
It is formed to have a thickness smaller than the thickness of the second node, and has a fourth elastic hinge connecting between the first node and the second node of the first node of the second elastic deformation portion,
The third elastic hinge and the fourth elastic hinge are disposed at the longitudinal center of the third elastic deformation portion, and the second node is rotated in the thickness direction of the third elastic deformation portion when the piezoelectric actuator is extended and contracted. ,
The second node provided in the other end of the third elastic deformation portion of the second node is a rotary drive device, characterized in that coupled to the support. delete The method of claim 2,
And the voltage applying unit applies a reference voltage of the same magnitude in advance to the pair of driving units before applying a positive voltage and a negative voltage to the driving units at the same time.

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