KR102058930B1 - Automatic continuous test system and method - Google Patents

Abstract

An automated continuous test system and method of the plant control module is provided to reduce the time and manpower required for testing and to increase accuracy. The automatic continuous test system includes a storage module for storing first and second test cases independent of each other; And a test module for continuously testing the first and second test cases in a facility control module without user intervention, wherein the test module controls facility first commands or first data based on the first test case. A module, receiving a first result according to the first test case from the facility control module, providing a second command or second data to the facility control module based on the second test case, and controlling the facility Receiving a second result according to the second test case from the module.

Description

Automatic continuous test system and method

The present invention relates to test systems and methods for testing facility control software.

The semiconductor device is manufactured by repeatedly performing various unit processes such as a thin film deposition process, a photo process, an etching process, a cleaning process, and a polishing process. The substrate processing facility which performs these various unit processes is operated by the facility control software. Therefore, if there is a bug in the facility control software or the scenario about how to respond in an exceptional situation or the like is not appropriate, many problems may occur in the operation of the substrate processing facility.

Therefore, thorough testing of the facility control software is required before the substrate processing facility is actually driven using the facility control software. However, in the past, a number of testers (developers) tested individually for various situations. In other words, the test was conducted for one situation, and after a good judgment was made on the situation, the test was conducted for another situation. This required a lot of manpower and time for testing. In addition, since testers (developers) individually determine the test results, the test results may vary from tester to tester.

The problem to be solved by the present invention is to provide an automatic continuous test system and method of the facility control software, which can reduce the time and manpower required for testing and increase the accuracy.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

An automatic continuous test system according to an aspect of the present invention for achieving the above object, the storage module for storing the first and second test cases independent of each other; And a test module for continuously testing the first and second test cases in a facility control module without user intervention, wherein the test module controls facility first commands or first data based on the first test case. A module, receiving a first result according to the first test case from the facility control module, providing a second command or second data to the facility control module based on the second test case, and controlling the facility Receiving a second result according to the second test case from the module.

Here, the first test case includes a continuous first step to n (where n is a natural number of 2 or more) step, the facility control module is a first to m (where m is more than 1 and less than n) Natural step), and if a process abnormality occurs in the m + 1 step, the test according to the first test case is ended by skipping the remaining unimplemented step, and the test according to the second test case To start.

In addition, between receiving the first result according to the first test case from the facility control module, and providing a second command or second data to the facility control module based on the second test case, the test The module further includes determining, based on the first result, whether the first test case is normal or bad.

The test module provides an exception situation to the facility control module and is provided with a result corresponding to the exception condition of the facility control module.

If an exception occurs in a step to be performed, the facility control module performs an alternative step instead of the step to be performed.

The first test case includes successive first to n th steps, where n is a natural number greater than or equal to two, and the facility control module comprises first to m th powers, wherein m is a natural number less than or equal to 1 and less than n. If an abnormal state is recognized by the first device for performing the m + 1 step, the second device different from the first device performs the m + 1 step.

The apparatus may further include a result review module configured to generate log data for analysis of the first and second test cases.

An automatic continuous test method according to an aspect of the present invention for achieving the above another object, provides a first command or first data to the facility control module based on a first test case, from the facility control module After receiving the first result according to the first test case, and after receiving the first result, a second command or second based on the second test case independent of the first test case without user intervention. Providing data to the facility control module and receiving a second result according to the second test case from the facility control module.

Here, the first test case includes a continuous first step to n (where n is a natural number of 2 or more) step, the facility control module is a first to m (where m is more than 1 and less than n) Natural step), and if a process abnormality occurs in the m + 1 step, the test according to the first test case is ended by skipping the remaining unimplemented step, and the test according to the second test case To start.

Alternatively, the first test case includes a continuous first step to n (where n is a natural number of two or more) steps, and the facility control module includes first to m (where m is one or more than n). Natural step), and when an abnormal state is recognized by the first device for performing the m + 1 step, the second device different from the first device performs the m + 1 step.

Specific details of other embodiments are included in the detailed description and the drawings.

1 is an exemplary block diagram illustrating an automated continuous test system in accordance with some embodiments of the present invention.
FIG. 2 is a diagram illustrating an exemplary substrate processing facility implemented by the equipment emulator of FIG. 1.
3 is a flowchart illustrating an automatic continuous test method according to an embodiment of the present invention.
4 is a flowchart illustrating an automatic continuous test method according to another embodiment of the present invention.
5 is a view for explaining an example of the automatic continuous test method according to another embodiment of the present invention.
6 is a flowchart illustrating an automatic continuous test method according to another embodiment of the present invention.
7 is a view for explaining an example of the automatic continuous test method according to another embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The embodiments of the present invention make the posting of the present invention complete and the general knowledge in the technical field to which the present invention belongs. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

When elements or layers are referred to as "on" or "on" of another element or layer, intervening other elements or layers as well as intervening another layer or element in between. It includes everything. On the other hand, when a device is referred to as "directly on" or "directly on" indicates that no device or layer is intervened in the middle.

The spatially relative terms " below ", " beneath ", " lower ", " above ", " upper " It may be used to easily describe the correlation of a device or components with other devices or components. Spatially relative terms are to be understood as including terms in different directions of the device in use or operation in addition to the directions shown in the figures. For example, when flipping a device shown in the figure, a device described as "below" or "beneath" of another device may be placed "above" of another device. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device can also be oriented in other directions, so that spatially relative terms can be interpreted according to orientation.

Although the first, second, etc. are used to describe various elements, components and / or sections, these elements, components and / or sections are of course not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, the first device, the first component, or the first section mentioned below may be a second device, a second component, or a second section within the technical spirit of the present invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements. Or does not exclude additions.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionaries are not ideally or excessively interpreted unless they are specifically defined clearly.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in describing the present invention with reference to the accompanying drawings, the same or corresponding elements are denoted by the same reference numerals, and the same reference numerals will be used. The description will be omitted.

1 is an exemplary block diagram illustrating an automated continuous test system in accordance with some embodiments of the present invention. FIG. 2 is a diagram illustrating an exemplary substrate processing facility implemented by the equipment emulator of FIG. 1.

First, referring to FIG. 1, an automatic continuous test system 100 according to some embodiments of the present invention includes a storage module 110, a test module 120, an input / output module 130, a result review module 140, and the like. do. The facility control module 200 is a module that is tested by the automated continuous test system 100.

Here, the "module" may be a unit for processing at least one function or operation. For example, it can mean a hardware component such as software, FPGA, or ASIC. The “module” may be configured to be stored in an addressable storage medium and may be configured to play one or more processors. Thus, a "module" refers to components such as software components, object-oriented software components, class components, and task components, and processes, functions, properties, procedures, subroutines. , Segments of program code, drivers, firmware, microcode, circuitry, data, databases, data structures, tables, arrays, and variables. In addition, the "module" may be divided into several "modules", or may be combined with other "modules".

Alternatively, when the automatic continuous test system 100 and the facility control module 200 are implemented in software, the automatic continuous test system 100 and the facility control module 200 may be driven within one computer (or server). And / or commands or data to and from each other through a computer (or server) that are physically separated from each other and communicate with each other (network). In addition, the modules 110, 120, 130, and 140 constituting the automatic continuous test system 100 may be dividedly installed in several computers (or servers) that are physically or logically separated from each other. For example, the computer in which the storage module 110 is installed and the computer in which the test module 120 is installed may be physically or logically separated.

The facility control module 200 receives a number of commands or data based on test cases from the automated continuous test system 100. The facility control module 200 controls the operation of the equipment emulator 210 and receives the results from the equipment emulator 210 based on the command or data. Here, the equipment emulator 210 is a virtual implementation of various equipment and operations of the substrate processing facility. Equipment emulator 210 may be a software substrate or may be hardware based.

Here, for convenience of description, an exemplary substrate processing apparatus implemented by the equipment emulator 210 will be described with reference to FIG. 2.

Referring to FIG. 2, the substrate processing apparatus 10 may include a process module 1000, a loadlock chamber 2000, and an index module 3000. The processing module 1000, the load lock chamber 2000, and the index module 3000 are sequentially arranged in a row. In this case, a direction in which the processing module 1000, the load lock chamber 2000, and the index module 3000 are disposed is called a first direction. In addition, when viewed from the top, the direction perpendicular to the first direction is referred to as a second direction. A direction perpendicular to the first direction and the second direction, respectively, is called a third direction.

The index module 3000 includes a load port 3200 and a transfer frame 3100. The load port 3200 is disposed in front of the transfer frame 3100 and has a plurality of load ports 3200. The load ports 3200 are arranged in a line along the second direction. A carrier (eg, a cassette, a FOUP, etc.) in which the substrate W to be provided to the process and the substrate W on which the process is completed is accommodated is mounted on the load port 3200.

The transfer frame 3100 includes an index robot 3110 and a housing 3130. The load port 3200 is disposed between the load lock chamber 2000. An index robot 3110 for transferring the substrate W is disposed between the load port 3200 and the load lock chamber 2000 in the transfer frame 3100. The index robot 3110 moves along the transfer rail provided in the second direction.

The index robot 3110 is provided to be able to move up and down. The hand of the index robot 3110 is provided to enable forward, backward and rotation on the horizontal plane. One or more hands may be provided.

Also, the aligner 3210 aligns the substrate W by sensing the flat zone or notch while rotating the substrate W. FIG. In addition, the cooling module 3300 serves to cool the substrate W, which has been processed in a process, before it goes out.

The load lock chamber 2000 is disposed between the transfer chamber 1110 and the index module 3000, before the substrate W to be provided to the process is transferred to the process chamber 1200 or after the process is completed. ) Provides a space to wait before being transferred to the index module 3000. One or more load lock chambers 2000 are provided. In one example, two load lock chambers 2000 are provided. One of the two load lock chambers 2000 contains a substrate (W) flowing into the processing module 1000 to proceed with the process, and the other (W) a substrate (W) flowing out from the processing module 1000 is completed ) May be accommodated, but is not limited thereto.

The processing module 1000 includes a transfer chamber 1100, a process chamber 1200, and the like. The processing module 1000 performs a process on the substrate. The transfer chamber 1100 is disposed adjacent to the load lock chamber 2000. The housing 1130 may have a polygonal shape when viewed from the top. In one embodiment, the housing 1130 may be provided in the shape of a hexagon. Alternatively, the housing 1130 may be provided in various shapes.

Outside the housing 1130, the load lock chambers 2000 and the plurality of process chambers 1200 are disposed adjacent to the housing 1130. Each sidewall of the housing 1130 is formed with an inlet through which the substrate enters and exits between the transfer chamber 1100 and the load lock chamber 2000 or between the transfer chamber 1100 and the process chamber 1200. Each inlet is provided with a valve for opening and closing the inlet.

The transfer robot 1110 is provided inside the housing 1110. The transfer robot 1110 transfers an unprocessed substrate waiting in the load lock chamber 2000 to the process chamber 1200 or transfers a substrate on which process processing is completed to the load lock chamber 2000.

The transfer chamber 1100 is provided with a valve assembly 1150 for transferring the substrate to the process chamber 1200. The valve assembly 1150 is disposed between the transfer chamber 1100 and the process chamber 1200.

The process chamber 1200 is disposed adjacent to the transfer chamber 1100. According to an embodiment, a plurality of process chambers 1200 may be provided on the side of the housing 1130 of the transfer chamber 1100. In one example, six process chambers 1200 may be provided. According to the design of the process chamber 1200, six process chambers 1200 may have the same function or may be partially identical to each other. Alternatively, the six process chambers 1200 may perform different functions.

Referring back to FIG. 1, a plurality of test cases are stored in the storage module 110. Here, the test case refers to a scenario of operating a substrate processing facility. Many test cases have independent relationships with each other. For example, performing the first test case and performing the second test case are separate from each other, and the result of the first test case and the result of the second test case do not affect each other. In other words, even if the result of the first test case is determined to be defective, the second test case is not judged to be the same as defective. Alternatively, even if the result of the first test case is determined to be normal, the test is necessarily performed without automatically determining the second test case to be normal.

In addition, one test case may consist of a plurality of steps. For example, referring to FIG. 2, an exemplary test case may be described as follows: “(Step 1) The index robot 3110 removes the substrate W from the load port 3200, and (Step 2) the index robot 3110 uses the substrate. (W) to the aligner 3210, (step 3) align the substrate W in the aligner 3210, and (step 4) load lock the substrate W on which the index robot 3110 is aligned. The transfer robot 1110 removes the substrate W from the load lock chamber 2000, transfers the substrate W to the process chamber 1200 (step 6), and cleans the process chamber 1200. Process proceeds ", and the like.

The storage module 110 may store hundreds to thousands of test cases. In addition, a user (or a developer or a tester) may generate a new test case through the input / output module 130 and store it in the storage module 110. In addition, the user may modify the test case previously stored through the input / output module 130.

The test module 120 may test a plurality of test cases in the facility control module 200 continuously without user intervention. Thus, for example, thousands of test cases can be performed without user intervention (see FIG. 3). For example, the test module 120 provides a first command or first data to the facility control module 200 based on the first test case, and from the facility control module 200, the first test case according to the first test case. Receive the result, and then provide a second command or second data to the facility control module 200 based on the second test case, and provide a second result according to the second test case from the facility control module 200. Receive.

For this automatic continuous test, the test module 120 may determine whether the test module 120 according to its own criteria without waiting for the user's judgment about the result of the test case. In addition, for example, if the first test case is determined to be abnormal (ie, NG) while performing the first test case, the first test case is terminated without completing. Subsequently, a second test case is performed (see FIGS. 4 and 5).

In addition, the test module 120 performs an exception while the facility control module 200 performs a test case in order to confirm how the facility control module 200 responds when an exception occurs. May be provided to the facility control module 200. Alternatively, an exception may be inserted in the test case in advance so that the exception occurs while the facility control module 200 performs the test case (see FIGS. 6 and 7).

An automatic continuous test method of the test module 120 will be described later with reference to FIGS. 3 to 7.

Referring back to FIG. 1, the automated continuous test system 100 further includes a result review module 140.

In the automatic continuous test system 100 according to some embodiments of the present invention, a plurality of test cases (ie, all directed by the user) are continuously processed without user intervention. In addition, the non-payment judgment for the test case performed is also performed according to its own criteria. Thus, after the test case is completed, the user may need to review the results of the test case as needed. To this end, the result review module 140 generates log data for analysis of the test case. In addition, a video recording may be provided for the user to check later.

The automated continuous test system 100 according to some embodiments of the present invention can reduce the time and manpower required for testing to a minimum because multiple test cases are continuously performed without user intervention. In addition, due to the determination of good or bad according to its own criteria, it is possible to increase the accuracy of the results for the test case. In addition, log data and the like are provided for the user to review later, so that the resulting error that may occur during the test can be caught and corrected.

3 is a flowchart illustrating an automatic continuous test method according to an embodiment of the present invention.

1 and 3, the test module 120 provides the facility control module 200 with a first command or first data based on the first test case. According to the first command or the first data, the first test case is started in the facility control module 200 (S9 and S10). Since the first test case includes a plurality of consecutive steps, each step is performed continuously. The first test case is terminated and a first result according to the first test case is provided from the facility control module 200 to the test module 120. The test module 120 performs a good judgment of the first result (that is, whether the first test case is normal or bad) (S80).

It is determined whether all test cases have been performed (S90).

If all test cases have not been performed, the second test case is started (S91, S10). Similarly, the test module 120 provides the facility control module 200 with a second command or second data based on the second test case. According to the second command or the second data, the second test case is performed in the facility control module 200. The second test case is terminated and a second result according to the second test case is provided from the facility control module 200 to the test module 120. The test module 120 performs a good judgment of the second result (ie, determining whether the second test case is normal or bad) (S80).

In this manner, all test cases instructed by the user are continuously performed (S90). If all test cases have been completed, exit.

4 is a flowchart illustrating an automatic continuous test method according to another embodiment of the present invention. 5 is a view for explaining an example of the automatic continuous test method according to another embodiment of the present invention. For convenience of description, descriptions made in advance using FIGS. 1 to 3 will be omitted.

First, referring to FIGS. 1 and 4, a first test case is started (S9 and S10). The first test case includes a plurality of consecutive steps. Therefore, the first step of the first test case is performed (S19, S20).

It is determined whether there is a process abnormality (that is, NG) while performing the first step or the result of performing the first step (S30). The process abnormality may be determined by the facility control module 200. Alternatively, the test module 120 may determine whether the process is abnormal in real time while reviewing the execution of the test case in real time.

If there is a process error in the result of performing the first step, the subsequent step (that is, the second step to the last step) is skipped.

Or, if the result of performing the first step is normal, it is examined whether all the steps have been performed (S40). Since all the steps have not been performed, the second step is performed (S41, S20).

In this manner, S20, S30, S40, S41 are repeated until all the steps of the first test case are performed.

When all the steps are performed, the first test case ends (S80).

Based on the results according to the first test case, the automated continuous test system 100 (ie, the test module 120) may make a non-payment determination of the first test case.

Subsequently, it is determined whether all test cases have been performed (S90).

If all test cases have not been performed, the second test case is started (S91, S10).

In this way, S10, S19, S20, S30, S40, S41, S80, S90, S91 are repeated until all test cases are performed.

4 and 5, an example of an automatic continuous test method according to another embodiment of the present invention will be described.

The first test case is started (S10) and the first step ST11 proceeds. That is, although the index robot 3110 pulls out the substrate W from the load port 3200 in the middle, a process abnormality (NG) alarm may occur. If a process abnormality occurs (S30), the subsequent steps (that is, the second step to the last step) are skipped and the first test case is terminated (S80). The first test case is determined to be defective.

Since all test cases have not been performed (S90), the second test case is automatically started without user intervention (S10). That is, the index robot 3110 removes the substrate W from the load port 3200 (the first step ST21 is performed), and the index robot 3110 provides the substrate W to the aligner 3210. In the aligner 3210, the substrate W is aligned (a second step ST22 is performed), the index robot 3110 transfers the aligned substrate W to the load lock chamber 2000 (third step). (ST23 is performed), the transfer robot 1110 removes the substrate W from the load lock chamber 2000 and transfers the substrate W to the process chamber 1200 to perform a cleaning process in the process chamber 1200 (fourth step ( ST24)). Subsequently, the cleaned substrate W is carried out to the outside through the load lock chamber 2000, the cooling module 3300, the load port 3200, and the like. When all the steps are performed in this manner (S40), the second test case is terminated (S80).

The automatic continuous test method according to another embodiment of the present invention is summarized as follows. For example, when the first test case includes consecutive first to nth steps, where n is a natural number of two or more steps, the facility control module 200 may include first to mth points, where m is 1. If a process abnormality occurs in the m + 1 step and skips the remaining steps that have not been performed, the test according to the first test case is ended, and the second test case is skipped. Start testing accordingly.

6 is a flowchart illustrating an automatic continuous test method according to another embodiment of the present invention. 6 illustrates the addition of the steps S50 and S60 in the flowchart of FIG. 4. 7 is a view for explaining an example of the automatic continuous test method according to another embodiment of the present invention. For convenience of description, descriptions made in advance using FIGS. 1 to 5 will be omitted.

1 and 6, an n th step of a first test case is performed (S20).

Subsequently, it is examined whether an exceptional situation has occurred (S50). If no exception occurs, it is determined whether there is a process abnormality (ie, NG) (S30).

If an exception occurs, it is determined whether the n 'step (that is, a replaceable step) that can be replaced without performing the nth step that is supposed to be performed is performed, and the n' step is performed. Perform (S60). If there is no alternative step, the process case may be processed as NG and the test case in progress may be terminated. In this way, it is possible to confirm in advance how the facility control module 200 copes with the exceptional situation.

Meanwhile, while the facility control module 200 performs a test case, the test module 120 may provide an exception situation to the facility control module 200. Alternatively, an exception may be inserted in the test case in advance so that the exception occurs while the facility control module 200 performs the test case.

The facility control module 200 may provide a result corresponding to the exceptional situation from the facility control module 200 to determine whether the corresponding result is unpaid.

Here, an example of an automatic continuous test method according to another embodiment of the present invention will be described with reference to FIGS. 6 and 7.

The index robot 3110 removes the substrate W from the load port 3200 (the first step ST11 is performed), and the index robot 3110 provides the substrate W to the aligner 3210 and aligns the aligner. At 3210, the substrate W is aligned (the second step ST12 is performed), the index robot 3110 transfers the aligned substrate W to the load lock chamber 2000 (the third step ST13). Is performed), the transfer robot 1110 should remove the substrate (W) from the load lock chamber 2000 and transfer it to the process chamber 1200, an exception occurs. That is, the substrate W should be provided in the first process chamber 1200 among the plurality of process chambers 1200. An exception occurs in the first process chamber 1200. That is, the first process chamber 1200 is in an abnormal state. In this case, it is checked whether there is a usable process chamber 1200 among the adjacent process chambers 1200. If it is determined that the second process chamber 1200 is usable, the cleaning process is performed by providing the substrate W to the second process chamber 1200 (the fourth step ST14 ′ is performed).

An automatic continuous test method according to another embodiment of the present invention is summarized as follows. For example, when an ongoing test case includes consecutive first steps to nth (where n is a natural number of two or more) steps, the facility control module 200 includes the first to mth points, where m is If the abnormal state is recognized by the first device for performing the m + 1 step, the second device different from the first device performs the m + 1 step.

By doing so, the test module 120 can test a plurality of test cases in the facility control module 200 continuously without user intervention. In addition, it is possible to test how the facility control module 200 responds to an exception while performing a plurality of test cases continuously.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. You will understand that. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

100: automatic continuous test system 110: storage module
120: test module 130: input and output module
140: result review module 200: facility control module
210: Equipment Emulator

Claims (10)

A storage module for storing first and second test cases independent of each other; And
And a test module for continuously testing the first and second test cases in the facility control module without user intervention, wherein the test module
Provide a first command or first data to the facility control module based on the first test case;
Receiving a first result according to the first test case from the facility control module;
Provide a second command or second data to the facility control module based on the second test case;
Receiving a second result according to the second test case from the facility control module;
The facility control module examines whether or not an exception occurs when each step is performed when one test case includes consecutive first to nth steps (where n is a natural number of two or more). If the situation does not occur, it is determined whether there is a process abnormality (NG).
When an exception occurs in a step that should be performed in the one test case, the facility control module performs an alternative step instead of the step that should be performed, and checks whether there is an available process chamber, and if there is an available process chamber, Performing said replacement step in a process chamber,
The facility control module performs the first to mth steps, where m is a natural number less than 1 and less than n, and if a process error occurs in the m + 1 step, the remaining steps not performed in the one test case. Automatic continuous test system that skips. The method of claim 1,
The first test case comprises a continuous first step to n (where n is a natural number of two or more),
The facility control module performs the first to mth steps, wherein m is a natural number less than 1 or less than n, and skips the remaining steps that have not been performed when a process abnormality occurs in the m + 1 step. And end the test according to the first test case and begin the test according to the second test case. According to claim 1,
Between receiving a first result according to the first test case from the facility control module and providing a second command or second data to the facility control module based on the second test case,
The test module further comprises determining, based on the first result, whether the first test case is normal or bad. The method of claim 1,
The test module provides an exception situation to the facility control module and receives a corresponding result of the exception of the facility control module. delete delete The method of claim 1,
And a result review module for generating analytical log data for the first and second test cases. Provide the facility control module with a first command or first data based on the first test case,
Receiving a first result according to the first test case from the facility control module;
After receiving the first result, provide a second command or second data to the facility control module based on the second test case independent of the first test case, without user intervention;
Receiving a second result according to the second test case from the facility control module;
The facility control module examines whether or not an exception occurs when each step is performed when one test case includes consecutive first to nth steps (where n is a natural number of two or more). If the situation does not occur, it is determined whether there is a process abnormality (NG).
If an exception occurs in a step to be performed in the one test case, the facility control module performs an alternative step instead of the step to be performed, checks whether there is an available process chamber, and if there is an available process chamber, Performing said replacement step in a process chamber,
The facility control module performs the first step to the m-th step (where m is a natural number less than 1 and less than n), and if a process error occurs in the m + 1 step, the remaining steps not performed in the one test case Automatic continuous test method that skips. The method of claim 8,
The first test case comprises a continuous first step to n (where n is a natural number of two or more),
The facility control module performs the first to mth steps, wherein m is a natural number less than 1 or less than n, and skips the remaining steps that have not been performed when a process abnormality occurs in the m + 1 step. Ending a test according to the first test case and starting a test according to the second test case. delete

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