KR102054733B1 - Bonding structure of heater terminal - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a terminal bonding structure of a heater. The present invention relates to a terminal bonding structure of a metal terminal embedded in a heater and a metal connecting member (or rod) for supplying electric power from the outside. It relates to a terminal junction structure of a heater to maintain a high bonding strength and strong electrical connection. To this end, power is supplied to the resistance heating element embedded in the plate of the heater, the rod accommodated in the receiving groove of the plate, the low thermal expansion conductor received in the receiving groove of the plate and contacted with the rod, and the rod and contacting with the low thermal expansion conductor. The terminal junction structure of the heater comprising a terminal for receiving power through a low thermal expansion conductor, and a fixing portion for improving a holding force between the low thermal expansion conductor and the terminal by applying a supporting force in a direction in which the terminal is disposed. Is initiated.

Description

Bonding structure of heater terminal

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a terminal bonding structure of a heater, and more particularly, to corrosion resistance against corrosive gas during a process of joining a metal terminal embedded in a heater and a metal connecting member (or rod) that supplies power from the outside. The present invention relates to a terminal junction structure of a heater that maintains a high bond strength against an abrupt temperature change and a strong electrical connection.

In ceramic or AlN heaters, various structures for connecting with metal terminals embedded in a plate for supplying power to a resistance heating element embedded in a plate of the heater have been proposed in various prior art documents. It is necessary to embed a metal terminal in the plate and electrically connect it with an external power supply connector (or rod). However, these connection portions are exposed to very high and very low temperature thermocycles under an oxidizing atmosphere or a corrosive gas atmosphere. Even under such bad conditions, it is necessary to maintain high bonding strength and good electrical connection for a long time. In the connection structure between the rod and the metal terminal, there is a need for a new bonding structure capable of preventing high bonding strength and short circuit of the terminal and enhancing the connection force of the rod even when exposed to high temperature or heat circulation in an oxidizing atmosphere.

In addition, the rod is inserted into and fixed to the plate and fixed to the mount. At this time, the rod and plate are exposed to high temperature during the process, so that the rod and plate are thermally expanded according to their respective coefficients of thermal expansion. When the rod is stretched by thermal expansion, since the rods are fixed at both sides, there is a problem of causing cracking (or breaking) of the plate.

JP 3746594 (Invention: Joint Structure of Ceramics and Manufacturing Method Thereof) Republic of Korea Patent Publication No. 10-1763713 (Invention name: Terminal junction structure of the heater) Republic of Korea Patent Publication No. 10-1776581 (Invention name: Terminal junction structure of the heater) Republic of Korea Patent Publication No. 10-1432320 (Invention name: bonded structure and its manufacturing method) Republic of Korea Patent Publication No. 10-1071441 (Invention name: Mount structure and processing device) Republic of Korea Patent Publication No. 10-0279650 (Invention name: Junction structure of the ceramic member and the connector for power supply) Republic of Korea Patent Publication No. 10-0283600 (Invention name: Joint structure of ceramics and its manufacturing method) Republic of Korea Patent Publication No. 10-0933430 (Invention name: heater and electrostatic chuck) Republic of Korea Patent Publication No. 10-1425688 (Invention name: Junction structure and semiconductor manufacturing device)

Accordingly, the present invention has been made to solve the problems as described above, and provides a terminal junction structure capable of providing corrosion resistance to corrosive gases in the process and reinforcing high bonding strength and electrical connection against rapid temperature changes. There is a purpose.

In addition, an object of the present invention is to provide an invention for preventing cracking of a plate by absorbing stretching of a rod due to thermal expansion.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

An object of the present invention described above, the power supply to the resistance heating element embedded in the plate of the heater, a low thermal expansion conductor, a low thermal expansion conductor that is received in contact with the rod received in the receiving groove of the plate, the receiving groove of the plate And a fixing part coupled to and in contact with the terminal to receive power through the rod and the low thermal expansion conductor, and a holding portion for improving the coupling holding force between the low thermal expansion conductor and the terminal by applying a supporting force in a direction in which the terminal is disposed. This can be achieved by providing a terminal junction structure of the heater.

In addition, the rod and the low thermal expansion conductor are accommodated in the receiving groove of the plate so that the rod, the low thermal expansion conductor, and the terminals are sequentially contacted with each other.

In addition, the rod is formed with a low thermal expansion conductor receiving groove, and includes a head portion in contact with the low thermal expansion conductor, the low thermal expansion conductor is protruded in one direction from the body portion and the central region of the body portion in contact with the terminal, low thermal expansion It includes a projection accommodated in the conductor receiving groove.

In addition, a welding hole or a brazing hole is formed in one region of the head portion of the rod.

In addition, a brazing hole or a welding hole is formed in one circumferential region so that the end portion of the protrusion of the low thermal expansion conductor is exposed.

In addition, the protrusion of the low thermal expansion conductor and the head of the rod are side welded through the brazing hole or the welding hole to provide elasticity due to thermal expansion to prevent the plate from being broken.

Further, the bonding layer for contacting the body portion of the low thermal expansion conductor and the terminal is brazed by a filler material made of at least one metal selected from the group consisting of gold, platinum, and palladium.

In addition, the filler metal contains at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium, and magnesium to increase oxidation resistance.

Further, the bonding layer for contacting and coupling the head portion of the rod and the protrusion of the low thermal expansion conductor is brazed by a filler material made of at least one metal selected from the group consisting of gold, platinum, and palladium.

In addition, the filler metal contains at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium, and magnesium to increase oxidation resistance.

In addition, the fixing portion is accommodated in the circumferential direction between the inner wall of the receiving groove of the plate and the rod so that the supporting force is applied to the low thermal expansion conductor and the terminal.

In addition, a thread is formed in the inner wall of the receiving groove of the plate in the circumferential direction along the thickness direction or the width, and is screwed with the inner wall by the thread formed in the outer peripheral direction of the fixing part.

In addition, the thermal expansion coefficient of the low thermal expansion conductor has an intermediate thermal expansion coefficient value between the rod and the terminal.

In addition, the rod is made of at least one selected from the group consisting of nickel, nickel-based heat-resistant alloys, gold, platinum, and silver, and the low thermal expansion conductors include molybdenum, tungsten, molybdenum-tungsten alloys, tungsten-copper-nickel alloys, and It consists of at least one kind selected from the group consisting of kovar, and the terminal is made of molybdenum or molybdenum alloy.

In addition, the rod includes a support portion formed to be spaced apart from the low thermal expansion conductor receiving groove by a distance greater than the diameter of the head portion of the rod, and a length body portion extending in the longitudinal direction from the support portion, the fixing portion of the inner wall of the receiving groove of the plate and the rod It is supported by the outer peripheral surface of the support in the space between the length body parts.

Further, the diameter of the head of the rod and the body of the low thermal expansion conductor is smaller than or equal to the diameter of the support of the rod.

In addition, the diameter of the body portion of the low thermal expansion conductor is formed larger than the diameter of the head portion of the rod, the fixing portion is supported on the outer peripheral surface of the body portion of the low thermal expansion conductor in the space between the inner wall of the receiving groove of the plate and the body portion of the rod.

Meanwhile, an object of the present invention is inserted into and fixed to the plate of the heater and coupled to the mounter so as to supply power to a connector disposed inside the shaft of the heater, and a resistance heating element embedded in the plate of the heater, and is electrically connected and connected by a connector It can be achieved by providing a rod connection structure of the heater, characterized in that it comprises a first, second rod.

Further, the connector electrically connects the first and second rods flexibly or flexibly in a thin plate, plate or wire form to absorb the stretching of the rod due to thermal expansion.

The connector is also a non-resistive connector made of nickel or tungsten.

In addition, one side of the first rod is fixedly inserted into the plate of the heater, the other side of the first rod is coupled to the one end of the connector and the first coupling region, one side of the second rod is coupled to the mounter, the second rod The other side of is coupled to the other end of the connector at the second coupling region.

In addition, the first rod forms a first welding opening surface to be welded to one end of the connector in the first coupling region, and the second rod is connected to the other end of the connector in the second coupling region away from the first coupling region. A second weld opening surface is formed to be welded.

In addition, the first and second welding opening surfaces are formed in one circumferential region so that the ends of the first and second rods are exposed, and the ends of the first and second rods and the ends of the connector are respectively sided through the first and second welding opening surfaces. By welding, elasticity due to thermal expansion of the rod is absorbed.

Further, first and second welding layers are formed on the first and second welding open surfaces.

The apparatus further includes a low thermal expansion conductor in contact with the first rod and having a convex protrusion in the central region, wherein the first rod forms a third welding opening surface to be welded to the protrusion in the third coupling region.

In addition, the third welding opening surface is formed in one circumferential region so that the end of the first rod is exposed in the third coupling region, and the end of the rod and the end of the connector are side welded through the third welding opening surface. It absorbs elasticity due to thermal expansion.

In addition, a third welding layer is formed on the third welding opening surface.

According to the present invention as described above, there is an effect that can prevent the entry of the corrosive gas to prevent oxidation of the low thermal expansion conductor and the terminal.

In addition, the present invention has the effect of doubling the coupling holding force between the low thermal expansion conductor and the terminal.

In addition, by exposing the upper surface of the terminal embedded in the plate, the bonding surface can be secured to a large area and the bonding strength can be increased.

In addition, the low thermal expansion conductor to reduce the thermal stress difference between the plate and the rod to reduce the risk of short circuit, there is an effect that can prevent the plate from breaking.

In addition, there is an effect of preventing cracking of the plate due to thermal expansion of the rod by the flexible cable and the welding layer.

The following drawings, which are attached to this specification, illustrate one preferred embodiment of the present invention, and together with the detailed description thereof, serve to further understand the technical spirit of the present invention. It should not be construed as limited.
1 is a view showing the configuration of a heater according to the present invention,
2 is a view showing a terminal junction structure according to a first embodiment of the present invention,
3 is a view showing that the rod, the low thermal expansion conductor, and the fixing portion inserted into the receiving groove of the plate according to the first embodiment of the present invention,
4 is a view showing a terminal junction structure according to a second embodiment of the present invention.
FIG. 5 is a view illustrating a rod, a low thermal expansion conductor, and a fixing part inserted and seated in a receiving groove of a plate according to a second embodiment of the present invention.
6 is a view showing a welding hole formed on one side of the circumferential direction of the rod,
7 is a view showing that the inner surface of the rod and the upper end of the protrusion of the low thermal expansion conductor is brazed by welding holes;
8 is a view showing a flexible thin plate according to a third embodiment of the present invention,
9 is a view showing a terminal portion inserted and fixed in a plate,
FIG. 10 is an enlarged view illustrating a coupling structure between the flexible thin plate and the rod illustrated in FIG. 8.

Hereinafter, with reference to the drawings will be described a preferred embodiment of the present invention. In addition, one Example described below does not unduly limit the content of this invention described in the Claim, and the whole structure demonstrated by this Embodiment is not necessarily required as a solution of this invention. In addition, the matters obvious to those skilled in the art and the art may be omitted, and the description of the omitted elements (methods) and functions may be sufficiently referred to without departing from the spirit of the present invention.

The heater 10 disposed in the process chamber in which the process proceeds under a corrosion resistant or oxidizing gas atmosphere (corrosive atmosphere) may be largely classified into a ceramic heater or an AlN heater, and the heater 10 may be roughly as shown in FIG. 1. It consists of a plate 10 and a shaft 13 for supporting the plate. In the plate 10, an RF electrode 11 for forming plasma is disposed at the top thereof, and a resistance heating element 12 is buried below the RF electrode 11. The resistance heating element 12 is preferably formed in a coil type, but is not necessarily limited thereto. The shaft 13 may be made of the same material as the plate 10 as a hollow, or may be made of different materials as necessary. However, it may be preferable to be made of the same material in consideration of heat transfer characteristics. The ground rod 15 connected to the RF electrode 11 is disposed inside the hollow shaft 13, and the AC rod 14 for supplying power to the resistance heating element 12 is disposed. At this time, the AC power supplied to the resistance heating element 12 may be appropriately applied according to the amount of heat generated by the resistance heating element.

As described above, in order to supply power to the resistance heating element 12 embedded inside the plate, an AC rod 14 (hereinafter referred to as a load or a power supply) is inserted into the shaft 13 to supply power. do. In the present invention, a terminal junction structure between the rod 14 and the terminal for supplying power to the resistance heating element 12 will be described in detail with reference to the accompanying drawings.

(First embodiment)

2 shows a structure for transferring the power supplied from the rod 100 (power supply unit) to the terminal 300. Terminal bonding structure according to an embodiment of the present invention is composed of a rod 100, a low thermal expansion conductor 200 and the terminal 300. In the present invention, a large stress due to the difference in thermal expansion between the ceramic heater 10 and the rod 100 is not generated so that the bonding strength is not lowered.

In the plate 10 according to an embodiment of the present invention, the receiving groove 16 is formed in the thickness direction, so that the rod 100, the low thermal expansion conductor 200, and the fixing part 400 which will be described later are the receiving groove 16. Is inserted into The terminal 300 is sintered together with the AlN plate 10. Moreover, the threaded groove or the screw tab 17 is formed in the accommodating groove 16 in the thickness direction or the width direction (hereinafter, collectively referred to as screw tab). However, the thread tap 17 is formed in a different position according to the first embodiment and the second embodiment. That is, in the first embodiment shown in FIG. 3, the thread tab 17 is formed along the thickness direction between the length body 130 and the head 110, and in the second embodiment, shown in FIG. 5. As described above, the screw tab 17 is formed along the thickness direction up to the head portion 110 and the body portion 210 of the low thermal expansion conductor 200.

The rod 100 according to one embodiment of the present invention, the power supply unit is roughly composed of the head portion 110, the support portion 120, and the length body portion 130 as shown in FIG. The head portion 110 has a rectangular cross section. 2, the receiving groove 111 of the protrusion 220 of the low thermal expansion conductor is formed in the central region of the lower surface of the head unit 110. The protrusion 220 of the low thermal expansion conductor is accommodated in the accommodating groove 111 and welded thereto. The support part 120 is formed between the length body part 130 and the head part 110 larger than the diameters W2 and W3 of the head part 110 and the length body part 130. The head portion 110 is in contact with the low thermal expansion conductor 200, the length body portion 130 is formed extending from the support portion 220. The head 110, the support 120, and the length body 130 may be integrally formed. The diameter of the support portion 120 is formed to be smaller than or equal to the diameter of the plate receiving groove (16). A fixing part 400 to be described later is supported on the upper surface of the support part 120, and the fixing part 400 is seated on the upper surface of the support part 120 to be coupled with a screw tab formed on the inner wall of the receiving groove 16 to be lowered. The support force (F) is acted to double the coupling holding force between the low thermal expansion conductor 200 and the terminal 300. The length body 130 extends in the direction in which the mount 20 of the heater is disposed.

Referring to FIG. 6, a welding hole 140 is formed in one circumferential region of the head part 110. The welding hole 140 is formed in a groove shape so that the upper end of the protrusion 220 of the low thermal expansion conductor, which will be described later, is exposed. When the protrusion 220 of the low thermal expansion conductor is inserted into and received in the receiving groove 111 of the rod 100, the upper end of the protrusion and the inner wall of the head 110 corresponding thereto may be welded through the welding hole 140. The welding layer 150 is formed as shown in FIG. 7. By welding the rod 100 and the low thermal expansion conductor 200 only on one side without welding the entire area, the coupling fixing force between the rod 100 and the low thermal expansion conductor 200 is improved, and furthermore, the elasticity due to thermal expansion is provided. Prevents cracking of AlN plates. Diameter and groove length of the receiving groove 111 of the head portion 110 is correspondingly formed according to the protruding length of the protrusion 220. However, the receiving groove 111 is formed between the support portion 120 on the upper surface of the body portion 210 of the low thermal expansion conductor.

The welding layer contacting the head portion 110 of the rod and the protrusion 220 of the low thermal expansion conductor is brazed by a filler material made of at least one metal selected from the group consisting of gold, silver (Ag), platinum, and palladium. do. At this time, the filler metal preferably contains at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium and magnesium in order to increase oxidation resistance.

Rod 100 is made of at least one selected from the group consisting of nickel, nickel-based heat-resistant alloy, gold, platinum, and silver of a high corrosion resistance material, low thermal expansion conductor 200 is molybdenum, tungsten, molybdenum-tungsten alloy , Tungsten-copper-nickel alloy, and at least one member selected from the group consisting of kovar. Therefore, the thermal expansion coefficient (or thermal expansion coefficient) between the rod 100 and the low thermal expansion conductor 200 is different.

Low thermal expansion conductor 200 according to an embodiment of the present invention is accommodated in the receiving groove (16). As shown in FIGS. 2 and 3, the low thermal expansion conductor 200 has a rectangular cross section in which a lower surface is brazed and coupled to an upper surface of the terminal 300, and a central region of the body portion 210 and the body portion 210 having a rectangular shape. In the direction of the mount 20 includes a protrusion 220 is formed to protrude while having a predetermined diameter. The diameter of the protrusion 220 is smaller than the diameter of the body portion 210, the length of the protrusion 220 is formed to correspond to the receiving groove 111 of the rod. The diameter W4 of the body portion 210 of the low thermal expansion conductor is preferably equal to or smaller than the diameter W1 of the support 120. The diameter of the support part 120 is preferably larger than the diameter of the length body 130 and the same as or smaller than the diameter of the receiving groove 16 so that the fixing part 400 can be stably seated and supported. As described later, since the fixing part 400 is seated and supported on the upper surface of the support part 120 and coupled to the inner wall of the receiving groove 16, the corrosive gas generated in the process chamber does not penetrate into the terminal 300. have.

On the other hand, the rod 100 is made of one or more selected from the group consisting of nickel, nickel-based heat-resistant alloy, gold, platinum, and silver, the low thermal expansion conductor 200 is preferably thermal expansion coefficient 8.0x10 ^-6 / ℃ Molybdenum, tungsten, molybdenum-tungsten alloys, tungsten-copper-nickel alloys, and cobars having the following properties. different. The thermal expansion coefficient of the low thermal expansion conductor preferably has an intermediate thermal expansion coefficient value between the rod 100 and the terminal 300. As described above, the low thermal expansion conductor 200 is disposed between the rod 100 and the terminal 300 to be used as an intermediate bonding medium to mitigate the thermal stress difference between the ceramic plate 10 and the rod 100 to reduce the risk of short circuit. Reduce and further mitigate thermal expansion between the rod 100 and the terminal 300.

The coupling layer for contact-bonding the lower surface of the body portion 210 of the low thermal expansion conductor and the upper surface of the terminal 300 is a filler material made of at least one metal selected from the group consisting of gold, silver (Ag), platinum, and palladium. Is brazed by. At this time, the filler metal preferably contains at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium and magnesium in order to increase oxidation resistance.

Terminal 300 according to an embodiment of the present invention is made of molybdenum or molybdenum alloy, is located on the same vertical line with the rod 100, and the upper surface of the body portion 210 of the low thermal expansion conductor 200 Adhesively bonded. The rod 100 and the low thermal expansion conductor 200 are accommodated in the receiving groove 16 of the plate, so that the rod 100, the low thermal expansion conductor 200, and the terminal 300 are sequentially contacted with each other by contact layers. . The upper surface of the terminal 300 is exposed, and the exposed upper surface and the lower surface of the body portion 210 of the low thermal expansion conductor 200 are in surface contact or line contact and brazed. Therefore, due to the exposed upper surface of the terminal 300 it is possible to secure a large joint surface to increase the bonding strength or bonding strength.

The fixing part 400 according to the exemplary embodiment of the present invention has a screw thread or a thread tap 410 formed on an outer circumferential surface of the fixing bolt 400 facing the inner wall of the receiving groove 16. In addition, the fixing portion 400 is hollow in the central region so that the length body 130 of the rod 100 passes when inserted into the receiving groove (16). Therefore, while the fixing part 400 is seated and supported on the upper surface of the support part 120 of the rod 100 and is screwed with the inner wall of the receiving groove 16 in which the thread is formed, the support force F is directed toward the terminal 300. Occurs. The support force F acts downward to improve the fixing force between the low thermal expansion conductor 200 and the terminal 300 (that is, to compensate for the weakness of brazing welding), and the low thermal expansion conductor 200 and the terminal ( There is an advantage that the brazing welding layer between 300 is prevented from oxidation to extend the life of the welding layer.

By the tab coupling of the fixing part 400 described above, the supporting force F is strongly acted downward, and the diameter of the supporting part 120 is formed to be the same as the inner wall of the receiving groove 16 so that Intrusion can be prevented to prevent oxidation of the terminal and corrosion resistance, and high junction strength and electrical connection can be maintained in response to a sudden temperature change.

(Second embodiment)

In the second embodiment of the present invention, the tab engagement position of the fixing part 400 is changed compared with the first embodiment. Therefore, only differences from the first embodiment will be described, and the rest of the description will be replaced with the description of the first embodiment.

As shown in FIGS. 4 and 5, the position of the screw tab 17 of the accommodation groove 16 is formed to be moved downward more than in the first embodiment. For this reason, the fixing part 400 is seated and supported on the outer circumferential surface of the body portion 210 of the low thermal expansion conductor in the space between the inner wall of the receiving groove 16 of the plate and the body portion 110 of the rod. It is because it is screwed with the screw tab 17 formed in the inner wall of 16). The diameter W2 of the body portion 210 of the low thermal expansion conductor is fixed to the outer circumferential surface of the body portion 210 of the low thermal expansion conductor so that the fixing part 400 is the diameter W1 of the head portion 110 of the rod. It is formed larger than). The diameter of the body portion 210 of the low thermal expansion conductor is preferably larger than the diameter of the head portion 110 of the rod and the same as or smaller than the diameter of the receiving groove (16).

In the first embodiment, since the fixing part 400 is fixed to the substantially central region of the accommodation groove 16, the screw tab 17 formed on the inner wall of the accommodation groove 16 is also substantially centered in the width direction of the accommodation groove 16. Is formed in the area. On the contrary, in the second embodiment, since the fixing part is fixed to the lower region of the accommodating groove 16, the screw tab 17 formed on the inner wall of the accommodating groove 16 also corresponds to the lower region in the width direction of the accommodating groove 16. Is formed. The screw tab 17 of the accommodation groove 16 is preferably formed longer than the width of the screw tab 410 of the fixing portion 400. Accordingly, the screw tab 410 of the fixing part 400 may be screwed together with the screw tab 17 of the receiving groove 16 to be tightened in the downward direction.

(Third embodiment)

The terminal bonding structure according to the first and second embodiments described above will be referred to collectively as the terminal portion 50 as shown in FIG. The terminal part 50 may include a rod 100, a low thermal expansion conductor 200, a terminal 300, and a fixing part 400. As shown in FIG. 8, the rod 100 of the terminal part is inserted into and fixed to the receiving groove 16 of the plate 10, and the other side 100b is fixed to the mount 20. The inner side of the shaft 30 is disposed along the longitudinal direction of the shaft 30. At this time, since the thermal expansion coefficient of the rod 100 and the plate 10 are different from each other, the low thermal expansion conductor 200 is disposed and used as the intermediate bonding medium as described in the first and second embodiments described above. The thermal stress between the rods 100 is not generated, and the thermal expansion difference is alleviated.

In the present invention, by providing a flexible thin plate 40 (or flexible thin plate) as shown in FIG. 8 together with the arrangement of the low thermal expansion conductor 200, it provides elasticity together with the low thermal expansion conductor 200 to further generate thermal stress. To further reduce the thermal expansion difference.

As shown in FIG. 8, the flexible connector or the flexible terminal 40 may be formed in a plate shape, a thin plate, or a wire shape, and the rod and the rod are connected to each other in order to compensate for the extension of the rod 100 by thermal expansion. do. Since the rod 100 is fixedly constrained in the plate 10 and the mount 20, when the rod 100 thermally expands due to heat during the process, thermal stress is generated because the coefficient of thermal expansion is different from the plate 10 as described above. Alternatively, the plate 10 may be damaged by the thermal expansion difference. The flexible thin plate 40 is made of a material or shape for simultaneously providing non-resistance characteristics and elasticity. The flexible thin plate 40 preferably has no resistance as the non-heating section. Therefore, the flexible thin plate 40 is preferably made of a wire or a thin plate in order to provide elasticity, and it is preferable to use nickel (Ni) or tungsten (W) material. The flexible thin plate 40 electrically connects and connects the first rod 100a and the second rod 100b at a position closer to the mount 20 side than the plate 10. The flexible thin plate 40 may be twisted thin plate or wire shape as shown in FIG. 10. That is, the thin plate or wire 40 may be straight, twisted, or folded. The first flexible thin plate 40a is electrically connected to the end region of the first rod 100a, and the second flexible thin plate 40b is electrically connected to the end region of the second rod 100b. It is preferable that the first and second flexible thin plates 40a and 40b are formed integrally with only the separation and description for convenience of description.

First and second end portions of the first and second rods 100a and 100b for electrically connecting and coupling the first and second flexible thin plates 40a and 40b to the end regions of the first and second rods 100a and 100b, respectively. In the second welding region, first and second welding opening surfaces 101 and 102 are formed in a partial region in the circumferential direction of the rod, respectively. That is, the first welding opening surface 101 is formed in the first welding region (or the first coupling region), and the second welding opening surface 102 is formed in the second welding region (or the second coupling region). The first and second flexible thin plates 40a and 40b are welded to the first and second rods 100a and 100b through the first and second welding regions, respectively. According to the welding, first and second welding layers are formed in the first and second welding regions. The first welding layer is formed by welding an end portion of the first flexible thin plate 40a and a portion including a side surface of the first rod 100a adjacent to the first welding opening surface 101 to each other. The second welding layer is formed by welding an end portion of the second flexible thin plate 40b and a portion including a side surface of the second rod 100b adjacent to the second welding opening surface 102 to each other. The flexible thin plate can be joined by welding as described above, and can be electrically connected to the end regions of the first and second rods by bolting or pressing as another example.

Each of the welding layers described in the above-described third embodiment welds the rods 100a and 100b and the flexible thin plates 40a and 40b to each other in the first and second welding regions, and the welding layers described in the first and second embodiments. 150 welds the protrusion 220 and the rod 100 of the low thermal expansion conductor in the third welding region. In the present invention, even if the rod 100 is thermally expanded by the process temperature during the process by the respective side welding layer described in the third embodiment and the side welding layer 150 described in the first and second embodiments, the primary elasticity In addition, by providing the secondary elasticity by the flexible thin plate 40 it is possible to prevent damage to the plate 10 due to the difference in thermal expansion coefficient between the rod 100 and the plate 10. In addition, in the present invention, damage to the plate 10 may be further prevented by using the low thermal expansion conductor 200 having an intermediate thermal expansion coefficient between the rod 100 and the plate 10 as an intermediate medium.

Description of the configuration and functions of the above-described parts have been described separately from each other for convenience of description, any one configuration and function may be implemented by integrating into other components, or may be implemented more subdivided as necessary.

As mentioned above, although demonstrated with reference to one Embodiment of this invention, this invention is not limited to this, A various deformation | transformation and an application are possible. That is, those skilled in the art will readily appreciate that many modifications are possible without departing from the spirit of the invention. In addition, when it is determined that the detailed description of the known function and its configuration or the coupling relationship for each configuration of the present invention may unnecessarily obscure the subject matter of the present invention, it should be noted that the detailed description is omitted. something to do.

10: heater (plate)
11: RF electrode
12: resistance heating element
13: shaft
14: AC load
15: ground rod
16: receiving home
17: thread (or thread tap)
20: mount
30: shaft
40: flexible terminal (or flexible terminal, flexible socket)
40a: first flexible sheet
40b: second flexible sheet
50 terminal
100: load (or connector, power supply)
100a: first rod
100b: second load
101: first welding hole (or first welding opening surface)
102: second welding hole (or second welding opening surface)
110: head
111: Receiving Home
120: support
130: length body
140: welding hole (or third welding opening surface)
150: bonding layer (or welding layer)
200 low thermal expansion conductor
210: body
220: protrusion (or coupling)
300: terminal
400: fixing part (or fixing bolt)
410: thread (or thread tap)

Claims (17)

A rod for supplying power to the resistance heating element embedded in the plate of the heater, the rod being received in the receiving groove of the plate,
A low thermal expansion conductor housed in a receiving groove of the plate and in contact with the rod;
A terminal in contact with the low thermal expansion conductor and supplied with power through the rod and the low thermal expansion conductor, and
It includes a fixing portion for improving the coupling holding force between the low thermal expansion conductor and the terminal by allowing the support force to act in the direction in which the terminal is disposed,
The rod is,
A low thermal expansion conductor receiving groove is formed, and includes a head portion in contact with the low thermal expansion conductor,
The low thermal expansion conductor,
A body part in contact with the terminal, and
And a protrusion configured to protrude in one direction from the central region of the body to be accommodated in the low thermal expansion conductor accommodating groove.
The method of claim 1,
And the rod and the low thermal expansion conductor are accommodated in the receiving groove of the plate, so that the rod, the low thermal expansion conductor, and the terminals are sequentially contacted with each other to form a layer.
delete The method of claim 1,
The terminal junction structure of the heater, characterized in that a welding hole or a brazing hole is formed in one region of the head portion of the rod.
The method of claim 4, wherein
The welding hole or the brazing hole is a terminal junction structure of the heater, characterized in that formed in one circumferential region so that the end of the protrusion of the low thermal expansion conductor is exposed.
The method of claim 5,
And the protrusion of the low thermal expansion conductor and the head of the rod are side welded through the welding hole or the brazing hole, thereby providing elasticity due to thermal expansion to prevent cracking of the plate.
The method of claim 1,
The bonding layer for contacting the body portion of the low thermal expansion conductor and the terminal is brazed by a filler material made of at least one metal selected from the group consisting of gold, silver, platinum, and palladium. rescue.
The method of claim 7, wherein
The filler metal,
A terminal junction structure of a heater, characterized by containing at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium and magnesium to increase oxidation resistance.
The method of claim 1,
The bonding layer contacting and coupling the head portion of the rod and the protrusion of the low thermal expansion conductor is brazed by a filler material made of at least one metal selected from the group consisting of gold, silver, platinum, and palladium. Terminal junction structure.
The method of claim 9,
The filler metal,
A terminal junction structure of a heater, characterized by containing at least one active metal selected from the group consisting of titanium, hafnium, vanadium, niobium and magnesium to increase oxidation resistance.
The method of claim 1,
The fixing part,
The terminal joining structure of the heater, characterized in that the supporting force is applied to the low thermal expansion conductor and the terminal by receiving and coupled to the space between the inner wall of the receiving groove of the plate and the rod in the circumferential direction.
The method of claim 11,
The inner wall of the receiving groove of the plate is formed with a thread in the circumferential direction along the thickness direction or width,
And a screw thread is formed in an outer circumferential direction of the fixing part to be screwed to the inner wall.
The method of claim 1,
The thermal expansion coefficient of the low thermal expansion conductor has a terminal thermal expansion coefficient value between the rod and the terminal.
The method of claim 1,
The rod is made of one or more selected from the group consisting of nickel, nickel-based heat resistant alloys, gold, platinum, and silver,
The low thermal expansion conductor is made of one or more selected from the group consisting of molybdenum, tungsten, molybdenum-tungsten alloy, tungsten-copper-nickel alloy, and kovar,
And said terminal is made of molybdenum or molybdenum alloy.
The method of claim 11,
The rod is,
A support portion formed to be spaced apart from the low thermal expansion conductor receiving groove by a larger diameter than the head of the rod, and
It includes a length body portion extending in the longitudinal direction from the support,
The fixing part,
The terminal joining structure of the heater, characterized in that supported on the outer peripheral surface of the support in the space between the inner wall of the receiving groove of the plate and the length body portion of the rod.
The method of claim 15,
And the diameter of the head of the rod and the body of the low thermal expansion conductor is less than or equal to the diameter of the support of the rod.
The method of claim 11,
The diameter of the body portion of the low thermal expansion conductor is formed larger than the diameter of the head portion of the rod,
The fixing part,
And the outer peripheral surface of the body portion of the low thermal expansion conductor in a space between an inner wall of the receiving groove of the plate and the body portion of the rod.

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